JP2005344203A - Method and device for producing thin film-deposited body - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To extremely facilitate the attaching-detaching operation of a masking member to the surface of a substrate, and to deposit a metallic film with a correct shape on the surface of the substrate without being influenced by thermal expansion or the like. <P>SOLUTION: In the method for producing a thin film-deposited body comprising a step where a thin film is deposited on the surface of a glass substrate 3, a magnet(s) 4 is arranged on the back side of the glass substrate 3, further, a masking member 2 composed of a magnetic substance is arranged on the surface side of the glass substrate 3, and, in a state wherein the masking member 2 is abutted against the surface of the glass substrate 3 by the magnetic force of the magnet(s) 4, a metallic film 9 is deposited on the surface of the glass substrate 3. Preferably, in a step prior to the deposition of the metallic film 9 on the surface of the glass substrate 3 using the masking member 2, an antireflection film 5 is deposited at least on the surface of the glass substrate 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing a thin film formed body and an apparatus therefor, and more particularly to a technique for appropriately holding a masking member used for forming a metal film in a thin film.

  For example, an optical element component such as an optical semiconductor module used for optical communication or an optical system system includes an optical element such as a semiconductor laser diode or a photodiode inside an enclosure made of a package or the like. Since this optical element needs to transmit and receive optical signals to and from the outside through the wall portion of the enclosure, a hole for light transmission is formed in the wall portion of the enclosure, and this light transmission The hole is covered with a window element for an optical element having a window glass that enables an optical signal to be exchanged between the inside and the outside. In this case, the inner space of the enclosure is sealed (for example, in a vacuum state) for the purpose of ensuring high reliability and high durability of the optical element component.

  Therefore, the above-described optical element window part is required to be able to seal the light transmitting hole formed in the wall portion of the enclosure in an airtight state. In order to meet such a demand, the following Patent Documents 1 and 2 disclose that a window part for an optical element in which a central part of a window glass plate is a circular light transmitting window part and a metal film is formed around the window part. Has been disclosed in which a solder is attached to the periphery of a light transmitting hole in the wall portion of the enclosure. More specifically, this optical element window component includes a metal film formed around the center of the surface of the window glass plate and a metal contact surface at the periphery of the light transmitting hole of an enclosure such as a package. The light transmission hole is closed by bonding in an airtight state using solder.

  The metal film includes, in order from the window glass plate side, a first film made of a chromium film or a titanium film having excellent adhesion to the window glass plate, and a palladium film for preventing diffusion of metal solder components. Alternatively, the second film is made of a platinum film or a nickel film, and the third film is made of a gold film having excellent adhesion to metal solder.

Japanese Patent No. 2993472 Japanese Patent Laid-Open No. 10-112568

  By the way, in the process of manufacturing the above-mentioned optical element window part, a masking member is detachably fixed to the surface of the substrate made of glass, and a metal film is formed on the surface of the glass substrate by sputtering or vacuum evaporation. There is a film forming process to be formed. In this film forming process, it is advantageous in terms of efficiency to make a large number of optical element window parts on a glass substrate made of a single large plate. A metal film having a predetermined shape is formed in many places. For this reason, the masking member is in a state where a large number of frame members and the like are arranged in a complicated and narrow pitch, but the size thereof is as small as about 100 mm × 100 mm.

  Since this masking member is exposed to a high temperature atmosphere at the time of film formation, the masking member may be extended, deformed or bent due to thermal expansion or the like, and may be separated from the surface (lower surface) of the glass substrate. When this occurs, it becomes impossible to obtain an appropriate mask effect by the masking member, and it becomes difficult to accurately form a metal film having a desired shape on the surface of the glass substrate.

  For this reason, the masking member needs to be securely held in contact with the entire surface of the glass substrate even when thermal expansion or the like occurs. It is very difficult to meet the above requirements with the conventional method of using and fixing to a glass substrate using an adhesive tape or the like.

  In addition, when the masking member is small as described above, the fixing work using the above-described fastening member and the adhesive tape becomes extremely troublesome and complicated, not only causing deterioration in workability but also wearing or sticking. Therefore, it is necessary to provide a region for a small masking member or a glass substrate, and the space problem becomes serious as compared with the case where the masking member is relatively large. Therefore, what measures should be taken to ensure that a small masking member is securely abutted and held on the surface of the glass substrate without being affected by thermal expansion or the like and to obtain an appropriate mask effect. Is a problem.

  The present invention has been made in view of the above circumstances, and makes it extremely easy to attach and detach the masking member to the surface of the substrate, and an accurate-shaped metal film is formed on the surface of the substrate without being affected by thermal expansion or the like. It is a technical problem to make it possible to form a thin film.

  The method according to the present invention, which has been made to solve the above technical problem, includes a step of forming a thin film on the surface of a substrate using a masking member. A masking member made of a magnetic material is disposed on the surface side of the substrate, and a metal film is formed on the surface of the substrate in a state where the masking member is brought into contact with the surface of the substrate by the magnetic force of the magnet. It is characterized by forming. In this case, examples of the substrate include those made of glass, ceramic, glass ceramic and the like.

  According to such a configuration, the masking member is held in contact with the surface of the substrate by the magnetic force of the magnet disposed on the back side of the substrate, so that the masking member can be attached to and detached from the surface of the substrate very easily. Thus, workability is improved. In addition, even when thermal expansion or the like occurs in the masking member, it is possible to maintain the state in which the masking member is in contact with the surface of the substrate accurately by the magnetic force of the magnet. As a result, it is possible to effectively avoid the problem that the metal film having a precise shape cannot be formed due to separation from the surface of the substrate. Moreover, even if the masking member is small, a separate area for holding and holding the masking member is not required, and space is not wasted. The magnet may be an electromagnet, but is preferably a permanent magnet. The number of magnets may be one corresponding to the size of the masking member, or a plurality of magnets may be arranged so as to correspond to the size of the masking member.

  In the above configuration, the substrate may be a glass substrate, and an antireflection film may be formed on at least the surface of the glass substrate in a previous step of forming a metal film on the surface of the glass substrate using a masking member. .

  In this way, when the metal film is formed on the surface of the glass substrate using the masking member, an antireflection film is formed on the non-formation portion of the metal film on the glass substrate. And the non-formation site | part of the metal film will show | play the antireflection effect of light effectively, and it becomes possible to obtain the glass article excellent in the optical characteristic.

  An apparatus according to the present invention made to solve the above technical problem is a masking member for forming a metal film in an apparatus for manufacturing a thin film forming body configured to form a thin film on the surface of a substrate using a masking member. The masking member is disposed on the front surface side of the substrate, and the magnet is disposed on the back surface side of the substrate. Also in this case, examples of the substrate include those made of glass, ceramic, glass ceramic and the like.

  Even with such a configuration, the masking member is held in contact with the surface of the substrate by the magnetic force of the magnet disposed on the back side of the substrate, and the masking member can be attached to and detached from the surface of the substrate very easily. Even when thermal expansion or the like occurs in the member, the state in which the masking member is accurately brought into contact with the surface of the substrate by the magnetic force of the magnet can be maintained, and a metal film with an accurate shape cannot be formed. Is effectively avoided, and even if the masking member is small in size, a useless space for holding the contact is not required. In this case as well, the magnet may be an electromagnet, but is preferably a permanent magnet, and the number of magnets may be one corresponding to the size of the masking member, Alternatively, a plurality may be arranged so as to correspond to the size of the masking member.

  In the above manufacturing apparatus, the substrate is preferably a glass substrate having an antireflection film formed on at least the surface.

  Even if it does in this way, what is obtained by forming a metal film on the surface of a glass substrate using a masking member is obtained by forming an antireflection film on the non-formation part of the metal film on the glass substrate. Therefore, the non-formed portion of the metal film effectively exhibits the light reflection preventing effect, and a glass article having excellent optical characteristics can be obtained.

  As described above, according to the method and apparatus for manufacturing a thin film formed body according to the present invention, the masking member is held in contact with the surface of the substrate by the magnetic force of the magnet disposed on the back side of the substrate, and the surface of the substrate The masking member can be easily attached and detached with respect to the substrate, and even when the masking member is thermally expanded, the state in which the masking member is accurately brought into contact with the surface of the substrate by the magnetic force of the magnet can be maintained. Therefore, it is possible to effectively avoid the problem that a metal film having an accurate shape cannot be formed, and even when the masking member is small, there is an advantage that a useless space for holding the contact is not required. it can.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

  FIG. 1 is a longitudinal front view schematically showing a manufacturing apparatus 1 for a thin film forming body (optical element window part) according to an embodiment of the present invention. As shown in the figure, the manufacturing apparatus 1 includes a masking member 2 made of a magnetic material for forming a metal film, and a magnet 4 disposed on the back side of the glass substrate 3. Thus, the masking member 2 is configured to abut on and hold the surface (lower surface) of the glass substrate 3. In this case, the magnet 4 is composed of one piece corresponding to the size of the masking member 2 or a plurality of pieces arranged so as to correspond to the size of the masking member 2. In this embodiment, the magnet 4 is formed on the back surface of the glass substrate 3. It is held in contact.

An antireflection film 5 is formed on the entire front and back surfaces (or only the front surface) of the glass substrate 3. The antireflection film 5 includes a tantalum oxide film (Ta ₂ O ₅ ) or a niobium oxide film (Nb ₂ O ₅ ) directly formed on both the front and back surfaces of the glass substrate 3 and the tantalum oxide film or And a silica film (SiO ₂ ) formed on the niobium oxide film. If necessary, a tantalum oxide film or a niobium oxide film may be further formed on the silica film, and a silica film may be formed thereon.

  FIG. 2 is a plan view showing a part of the masking member 2, and FIG. 3 is an enlarged view of a main part thereof. As shown in these drawings, the masking member 2 includes a plurality of vertical frame members 2a extending linearly in the vertical direction and a plurality of horizontal frame members 2b extending linearly in the horizontal direction perpendicular thereto. By being connected, square frame portions 2x are formed at a plurality of locations. Further, the masking member 2 includes a first inclined frame member 2c and a second inclined frame member 2d extending in two opposite directions with an inclination angle of 45 ° to the vertical frame member 2a and the horizontal frame member 2b. These inclined frame members 2c, 2d are cross-connected to the periphery of the four corners of the square frame portion 2x, thereby forming regular octagonal frame portions 2y at a plurality of locations. In addition, a circular covering body 2e is disposed inside each of the regular octagonal frame portions 2y with a predetermined gap interposed on the entire circumference, and the outer periphery of the covering body 2e and the regular octagon The corners of the shape frame 2y are connected by a plurality of connecting bodies 2f that are spaced apart from each other and extend radially.

  In this case, as shown in FIG. 1, when the masking member 2 is set (removably fixed) by the magnetic force of the magnet 4 on the surface of one glass substrate 3, the regular octagonal frame portion 2y is formed. All the frame members 2a to 2d including the frame member to be performed and all the circular covering bodies 2e serve as contact mask portions that contact the surface of the glass substrate 3, whereas all the connected members 2f, A gap 6 is formed between all the connection mask portions and the surface of the glass substrate 3. The gap 6 has a height direction dimension t1 that is at least twice the thickness of the coupling body 2f. More specifically, the masking member 2 is formed so that the surfaces of all the frame members 2a to 2d, the surfaces of all the covering bodies 2e, and the surfaces of all the connecting bodies 2f are in the same plane. Above, only the thickness of the connection body 2f is formed to be less than 1/2 (preferably less than 1/3) of the thickness t2 common to other parts. And this masking member 2 is formed with stainless steel (for example, SUS430), and the magnitude | size is 50 mm-150 mm in the vertical direction, and is 50 mm-150 mm in the horizontal direction. The thickness t2, that is, the thickness of the masking member 2, is 0.1 mm to 2.0 mm, preferably 0.1 mm to 1.0 mm, and in this embodiment is 0.25 mm.

  When the masking member 2 having such a structure is set on the surface of the glass substrate 3 by the magnetic force of the magnet 4 and film formation is performed by a sputtering method or a vacuum evaporation method, the material particles are the frame materials 2a to 2d, By passing through the gap between the covering body 2e and the connecting body 2f, the surface of the glass substrate 3 (at this time, both the front and back surfaces of the glass substrate 3 are sputtered or vacuum-deposited to prevent reflection as described above. Film 5 is formed). In that case, since a plurality of connecting bodies 2f are disposed in the gap between the regular octagonal frame portion 2y of the masking member 2 and the circular covering body 2e, both side portions of each connecting body 2f are arranged. The material particles that have passed through the vicinity pass around the gap 6 on the back side of each connecting body 2f and reach the surface of the glass substrate 3, while passing through the periphery of the central portion in the circumferential direction between the connecting bodies 2f. The material particles go straight and reach the surface of the glass substrate 3. Therefore, the portion where the material particles go straight and reach the surface portion of the glass substrate 3 corresponding to the gap between the regular octagonal frame portion 2y of the masking member 2 and the covering body 2e. There will be a part that can be reached by.

  By performing the film forming step in this manner, as shown in FIG. 4, a plurality of regular octagonal unit thin film forming portions 7 are formed regularly and vertically on the glass substrate 3. More specifically, each unit thin film forming portion 7 has a circular window portion 8 corresponding to the shape of the covering body 2e at a portion corresponding to the inner region of the regular octagonal frame portion 2y of the masking member 2 in the glass substrate 3. A metal film 9 (a portion with a narrow-pitch parallel diagonal line in the figure) is formed on the surface around the central portion. One glass substrate 3 having a plurality of such unit thin film forming portions 7 is arranged in four directions that are different by 45 °, specifically, at a plurality of places in the direction of arrow a, and at a plurality of places, arrows b. Cutting is performed in one direction at a time, at a plurality of locations in the direction of the arrow c, and at a plurality of locations in a direction of the arrow d. As a result, a large number of optical element window parts 10 can be manufactured by performing a total of four cutting operations.

  As shown in FIGS. 5 and 6, the optical element window part 10 has a window glass 11 made of a plate-like body having an outer contour shape of a regular octagon, and a circular shape is formed at the center of the window glass 11. A light transmitting window 8 is formed, and a plurality of layers of metal films 9 are formed on the surface side around the window 8. On the surface of the metal film 9, a plurality of groove-like recesses 12 extending radially at equal intervals in the circumferential direction are formed. As shown in FIG. 7, the bottom surfaces 12 x of these recesses 12 are curved in the direction crossing the recesses 12, and the portions 9 y connected from the bottom surface 12 x to the surface 9 x are also curved in the direction crossing the recesses 12. Therefore, the portion from the bottom surface 12x to the surface 9x of these recesses 12 is smoothly continuous without having a bent portion. The reason why the concave portion 12 having such a shape is formed is that the portion of the masking member 2 described above where the material particles wrap around due to the presence of each connecting body 2f and reach the surface of the glass substrate 3 goes straight ahead. This is because the arrival amount of the material particles is relatively smaller than the reaching portion. Along with this, the metal film 9 having the concave portions 12 as described above is formed on the surface portions of the glass substrate 3 corresponding to the respective connected bodies 2f and the vicinity of both side portions thereof.

In this case, as shown in FIG. 5, when the diameter of the circumscribed circle circumscribing the outer contour of the window glass 11 is L ₁ and the diameter of the circular window portion 8 is L ₂ , the ratio L ₂ between the _{two is shown.} / L ₁ is 0.1 to 0.9, preferably 0.3 to 0.8. In this embodiment, the circumscribed circle has a diameter L ₁ of about 2.0 to 3.5 mm, and the window portion 8 has a diameter L ₂ of about 0.6 to 2.8 mm. Further, as shown in FIGS. 6 and 7, the metal film 9 is a chromium film (or a film formed on the antireflection film 5 (silica film) around the circular window portion 8 having light transmittance. A first film 9a made of a titanium film), a second film 9b made of a palladium film (or a platinum film or a nickel film) formed on the first film 9a, and on the second film 9b. And a third film 9c made of a formed gold film. In this case, the first film 9a has excellent adhesion to the window glass 11, the second film 9b serves to prevent diffusion of solder components, and the third film 9c adheres to solder. Excellent in properties. The antireflection film 5 is a planar film having no concave portion on the surface, whereas the first, second, and third films 9a, 9b, and 9c are equally spaced in the circumferential direction. In addition, since there are a plurality of recesses extending radially, a plurality of recesses 12 are formed on the surface of the metal film 9 as described above.

  Furthermore, as shown in FIG. 7, the surface of the edge portion 9w in the surface direction of the metal film 9 gradually approaches the surface of the window glass 11 as it moves to the terminal side, and the surface of the window glass 11 ( It reaches the antireflection film 5). Further, at the edge portion 9w of the metal film 9, the first film 9a is entirely or substantially entirely covered by the second film 9b, and the second film 9b is entirely or substantially entirely covered by the third film 9c. Covered. Therefore, the first and second films 9a and 9b having low adhesiveness to the solder are not exposed or hardly exposed. The reason why the edge portion 9w having such a form is formed is that the metal film 9 is formed by the sputtering method or the vacuum deposition method using the masking member 2. The thickness of the metal film 9 (the thickness of the region excluding the edge portion 9w) is about 0.5 μm for the antireflection film 5, about 0.1 μm for the first film 9a, and 0 for the second film 9b. The third film 9c has a thickness of about 0.3 μm.

  FIG. 8 is a longitudinal sectional side view showing a schematic configuration of a semiconductor laser diode module (optical element component) 13 to which the above-described optical element window component 10 is mounted. As shown in the figure, the optical element component 13 includes an enclosure 15 made of a package for storing a laser chip (optical element) 14 and its internal space is in a vacuum state. A circular light transmitting hole 16 is formed in one wall portion 15a of the enclosure 15, and an optical element window component 10 that closes the light transmitting hole 16 is formed on the inner surface of the one wall portion 15a with metal solder. Is hermetically bonded. In this embodiment, the light emitted from the laser chip 14 passes through the spherical lens 17 housed in the inner space of the enclosure 15, the optical element window component 10, and the light path outside the enclosure 15. It is configured to be sent to the optical fiber 20 in the ferrule 19 through the arranged spherical lens 18.

  Then, as shown in FIG. 9, the optical element window component 10 is bonded to the peripheral portion of the light transmitting hole 16 on the inner surface (metal surface) of the one wall portion 15 a of the enclosure 15 using metal solder. (The metal solder is not shown). More specifically, the metal film 9 formed around the window portion 8 of the window glass 11 is hermetically bonded to the inner surface of one wall portion 15a of the enclosure 15 using Au—Sn solder, thereby transmitting light. The hole 16 is completely closed by the optical element window part 10. In this case, since a plurality of recesses 12 are formed on the surface of the metal film 9, the surface area thereof is wider than a simple plane. Therefore, the adhesion area of the metal film 9 to the one wall portion 15a of the enclosure 15, that is, the adhesion area between the metal film 9 and the Au—Sn solder is increased, and the adhesion strength is increased.

  In the above embodiment, the present invention is applied when a metal film is formed on the surface of a substrate made of glass. However, the substrate may be ceramic or glass ceramic.

  Moreover, although the said embodiment applied this invention to the optical element window component 10 with which a semiconductor laser diode module is mounted | worn, also about the thin film formation body used for optical semiconductor modules other than this and other optical element components, Similarly, the present invention can be applied to the present invention, and the present invention can also be applied to a thin film forming body such as a solar cell panel or a defocus plate.

It is a principal part longitudinal front view which shows the manufacturing apparatus of the thin film formation body (window part for optical elements) which concerns on embodiment of this invention, Comprising: It is a figure corresponding to sectional drawing cut | disconnected according to the BB line of FIG. . It is a principal part schematic plan view which shows the masking member used for manufacture of the thin film formation body (window part for optical elements) which concerns on embodiment of this invention. It is a principal part enlarged plan view which shows the masking member used for manufacture of the thin film formation body (window part for optical elements) which concerns on embodiment of this invention. It is a principal part schematic plan view which shows the state in the middle of manufacture of the thin film forming body (window part for optical elements) which concerns on embodiment of this invention. It is a top view which shows the thin film formation body (window component for optical elements) manufactured with the manufacturing apparatus which concerns on embodiment of this invention. It is a longitudinal cross-sectional view which shows the thin film formation body (window component for optical elements) manufactured with the manufacturing apparatus which concerns on embodiment of this invention, Comprising: It is sectional drawing cut | disconnected according to the AA line of FIG. It is a principal part expansion longitudinal cross-sectional view which shows the thin film formation body (window component for optical elements) manufactured with the manufacturing apparatus which concerns on embodiment of this invention. It is a schematic longitudinal cross-sectional view which shows the optical element component by which the thin film formation body (window component for optical elements) manufactured with the manufacturing apparatus which concerns on embodiment of this invention is mounted | worn. It is a principal part expansion schematic cross-sectional view which shows the state by which the thin film formation body (window component for optical elements) produced with the manufacturing apparatus which concerns on embodiment of this invention is mounted | worn with an optical element component.

Explanation of symbols

1 Manufacturing equipment 2 Masking member 3 Substrate (glass substrate)
4 Magnet 5 Antireflection film 9 Metal film 10 Thin film forming body (window component for optical element)

Claims (4)

  In the method of manufacturing a thin film forming body including a step of forming a thin film on the surface of the substrate using a masking member, a magnet is disposed on the back side of the substrate, and a masking member made of a magnetic material is provided on the surface side of the substrate. A method for producing a thin film forming body, comprising: forming a metal film on a surface of the substrate in a state where the masking member is in contact with the surface of the substrate by the magnetic force of the magnet.   The substrate is a glass substrate, and an antireflection film is formed on at least the surface of the glass substrate in a previous step of forming a metal film on the surface of the glass substrate using the masking member. A method for producing the thin film-formed body according to 1.   In an apparatus for manufacturing a thin film forming body configured to form a thin film on the surface of a substrate using a masking member, the masking member for forming a metal film is formed of a magnetic material, and the masking member is disposed on the surface side of the substrate. An apparatus for manufacturing a thin film forming body, characterized in that a magnet is disposed on the back side of the substrate.   The said board | substrate is a glass substrate in which the antireflection film was formed in the surface at least, The manufacturing apparatus of the thin film formation body of Claim 3 characterized by the above-mentioned.