JP2018044912A5 - - Google Patents
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- Publication number
- JP2018044912A5 JP2018044912A5 JP2016181382A JP2016181382A JP2018044912A5 JP 2018044912 A5 JP2018044912 A5 JP 2018044912A5 JP 2016181382 A JP2016181382 A JP 2016181382A JP 2016181382 A JP2016181382 A JP 2016181382A JP 2018044912 A5 JP2018044912 A5 JP 2018044912A5
- Authority
- JP
- Japan
- Prior art keywords
- probes
- probe
- adjacent
- locking
- relatively shifted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims 11
- 230000002093 peripheral Effects 0.000 claims 3
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016181382A JP6781598B2 (ja) | 2016-09-16 | 2016-09-16 | プローブカード |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016181382A JP6781598B2 (ja) | 2016-09-16 | 2016-09-16 | プローブカード |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2018044912A JP2018044912A (ja) | 2018-03-22 |
JP2018044912A5 true JP2018044912A5 (it) | 2019-10-03 |
JP6781598B2 JP6781598B2 (ja) | 2020-11-04 |
Family
ID=61693645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016181382A Active JP6781598B2 (ja) | 2016-09-16 | 2016-09-16 | プローブカード |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6781598B2 (it) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022059070A1 (ja) | 2020-09-15 | 2022-03-24 | 日本電子材料株式会社 | プローブカード |
JP2022144851A (ja) * | 2021-03-19 | 2022-10-03 | 株式会社日本マイクロニクス | プローブおよびプローブカード |
CN115248338A (zh) * | 2021-04-27 | 2022-10-28 | 迪科特测试科技(苏州)有限公司 | 探针结构及其探针卡装置 |
CN115684677A (zh) * | 2021-07-29 | 2023-02-03 | 迪科特测试科技(苏州)有限公司 | 探针及探针卡装置 |
JPWO2023105553A1 (it) * | 2021-12-06 | 2023-06-15 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7671610B2 (en) * | 2007-10-19 | 2010-03-02 | Microprobe, Inc. | Vertical guided probe array providing sideways scrub motion |
TWM342638U (en) * | 2008-03-10 | 2008-10-11 | Hon Hai Prec Ind Co Ltd | Electrical connector |
JP2010091349A (ja) * | 2008-10-06 | 2010-04-22 | Japan Electronic Materials Corp | 垂直型プローブカード |
JP5341456B2 (ja) * | 2008-10-06 | 2013-11-13 | 日本電子材料株式会社 | プローブカード |
JP5487050B2 (ja) * | 2010-08-19 | 2014-05-07 | 株式会社日本マイクロニクス | プローブカードの製造方法 |
JP2012093127A (ja) * | 2010-10-25 | 2012-05-17 | Advanced Systems Japan Inc | バーチカルプローブヘッド |
US8832933B2 (en) * | 2011-09-15 | 2014-09-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of fabricating a semiconductor test probe head |
US10359447B2 (en) * | 2012-10-31 | 2019-07-23 | Formfactor, Inc. | Probes with spring mechanisms for impeding unwanted movement in guide holes |
US10866266B2 (en) * | 2015-10-29 | 2020-12-15 | Taiwan Semiconductor Manufacturing Company Ltd. | Probe head receiver and probe card assembly having the same |
-
2016
- 2016-09-16 JP JP2016181382A patent/JP6781598B2/ja active Active
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