JP2018029164A - Board rotary device and board processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a board rotary device easier to maintain, and reducing pollutant source in a container.SOLUTION: A board rotary device 10 has an outer frame 20 including magnetic field generating means, and capable of rotating a generated magnetic field around the medial axis, a container 40 placed on the inside of the outer frame, an inner frame 50 placed in the container, and including a board 60 holding means and magnets or ferromagnetic materials distributed in the circumferential direction, magnetic coupling means for magnetically coupling the outer frame and inner frame, floating the inner frame, and rotating the inner frame while following rotation change of the magnetic field, and gap adjustment means for keeping a constant interval of the outer and inner frames, and maintaining the inner frame concentrically to the outer frame.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a substrate rotating apparatus or a substrate processing apparatus that can be used in a semiconductor manufacturing process or the like.

  The semiconductor manufacturing process includes many processes for processing a wafer with a chemical solution such as application / development of photoresist, etching, and cleaning. In these processes, a single-wafer type substrate rotating apparatus or an immersion apparatus for immersing a wafer in a treatment tank filled with a chemical solution is used, and each has advantages and disadvantages. In the immersion method, there are advantages such as no generation of static electricity, an increase in cleaning efficiency by adding ultrasonic vibration, and non-uniformity of chemicals in the treatment tank. Advantages of the rotation method include a large number of control parameters for processing conditions and excellent uniformity of processing within the wafer surface.

  On the other hand, in the conventional substrate rotating apparatus, since the rotating shaft (shaft) of the stage for fixing the wafer penetrates the bottom of the container, there are problems such as corrosion of the seal portion of the through portion and contamination from the seal portion. On the other hand, in Patent Document 1, a rotating plate accommodated in a sealed container is magnetically levitated by a second type superconductor disposed below the container and rotated by a rotating magnetic field coil disposed around the container. A magnetically levitated rotation processing apparatus is described.

JP 2008-73636 A

  However, the apparatus described in Patent Document 1 has a problem that the facility becomes large in order to cool the superconductor, and because the container shape is complicated, there is room for improvement in workability of maintenance work such as cleaning. was there.

  The present invention has been made in view of the above, and an object of the present invention is to provide a substrate rotating apparatus that reduces the number of contamination sources in the container and is easier to maintain.

  The substrate rotating apparatus according to the present invention includes a magnetic field generating means, and an outer frame body capable of rotating the generated magnetic field around a central axis, a container disposed inside the outer frame body, and a container disposed in the container. An inner frame comprising a substrate holding means and magnets or ferromagnetics distributed in the circumferential direction; and the outer frame and the inner frame are magnetically coupled to float the inner frame A magnetic coupling means for rotating the inner frame following the rotation change of the magnetic field, and maintaining a constant distance between the outer frame and the inner frame, so that the inner frame is concentric with the outer frame. And a gap adjusting means for maintaining.

  Here, the central axis of the outer frame body is a straight line that passes through the center of the outer frame body and is perpendicular to the surface of the outer frame body. Further, rotating the magnetic field around the central axis means changing the magnetic field as if the distribution of magnetic flux density is rotating around the central axis.

  With this configuration, since the inner ring holding the substrate is floated and rotated in the container, the rotating shaft or the like does not penetrate the container, and the contamination sources in the container can be reduced. Further, since the inner ring and the outer ring are arranged concentrically in the same plane, a simpler shape can be adopted as the container shape.

  In one aspect of the present invention, the magnetic field generating means is an electromagnet distributed in the circumferential direction of the outer frame so as to face the magnet or the ferromagnetic body of the inner frame, and the rotation of the magnetic field Is realized by the rotational movement of the outer frame body, and the magnetic coupling means is composed of a magnet or a ferromagnetic body of the inner frame body and an electromagnet of the outer frame body.

  In another aspect of the present invention, the magnetic field generating means is an electromagnet aligned in the circumferential direction of the outer frame, and the rotation of the magnetic field is realized by sequentially changing the polarity of the aligned electromagnets. The magnetic coupling means includes a magnet or a ferromagnetic body of the inner frame body and an electromagnet of the outer frame body.

  In another aspect of the present invention, the outer frame body includes a non-rotating portion that occupies the outer peripheral side of the outer frame body and an inner peripheral side of the outer frame body, and portions having different magnetic permeability are connected in the circumferential direction. It consists of a rotating part formed. The non-rotating portion includes, as the magnetic field generating means, electromagnets arranged in a circumferential direction, the rotation of the magnetic field is realized by the rotational movement of the rotating portion, and the magnetic coupling means is the inner frame body. It is composed of a magnet or a ferromagnetic body, an electromagnet of the rotating part and the non-rotating part.

  In any one of the above substrate rotating apparatuses, preferably, the outer frame body can be further rotated and inclined around a straight line intersecting the central axis. With this configuration, the substrate can be rotated while being inclined from the horizontal plane.

  Preferably, the outer frame body is further translatable in the central axis direction. This makes it easier to mount and remove the substrate.

  Preferably, the container has a chemical solution supply unit and a drainage unit at the bottom, and can be treated by immersing a substrate held in the inner frame body by storing the chemical solution therein. Here, the chemical solution contains pure water. With this configuration, the substrate can be rotated while immersed in the chemical solution.

  The substrate processing apparatus of the present invention comprises a magnetic field generating means, an outer frame that can rotate the generated magnetic field around a central axis, and a container that is disposed inside the outer frame and can store a processing chemical solution inside. And an inner frame that is disposed in the container and includes a substrate holding means and a magnet or a ferromagnetic material distributed in the circumferential direction, and the outer frame and the inner frame are magnetically coupled, A magnetic coupling means for levitating the inner frame and rotating the inner frame in accordance with a rotation change of the magnetic field; and maintaining a constant distance between the outer frame and the inner frame, And a gap adjusting means for maintaining the concentricity with the outer frame body.

  According to the substrate rotating apparatus or the substrate processing apparatus of the present invention, since the inner frame body holding the substrate is floated and rotated in the container, the rotating shaft or the like does not penetrate the container, and the contamination source in the container is reduced. Can be reduced. Further, since the inner frame body and the outer frame body are arranged concentrically in the same plane, a simpler container shape can be adopted.

1 is a perspective view of a substrate rotation device according to a first embodiment of the present invention. It is sectional drawing which cut | disconnected the board | substrate rotation apparatus of 1st Embodiment of this invention in the center of the thickness direction of an inner ring and an outer ring. FIG. 3 is a vertical sectional view taken along line AA in FIG. 2. It is a figure which shows the example of the rotation mechanism of an outer ring. It is a figure which shows the structure of an inner ring. It is a figure for demonstrating the usage method of the board | substrate rotation apparatus of 1st Embodiment of this invention. It is sectional drawing which cut | disconnected the board | substrate rotation apparatus of 2nd Embodiment of this invention in the center of the thickness direction of an inner ring and an outer ring. It is sectional drawing which cut | disconnected the board | substrate rotation apparatus of 3rd Embodiment of this invention in the center of the thickness direction of an inner ring and an outer frame.

  1st Embodiment of this invention is described based on FIGS. The substrate rotating apparatus of this embodiment can rotate a circular substrate while being immersed in a chemical solution.

  Referring to FIG. 1, a substrate rotating apparatus 10 of the present embodiment includes an outer ring (outer frame body) 20, a container 40 disposed inside the outer ring, and an inner ring (inner frame disposed in the container). Body) 50. The substrate 60 is held on the inner ring.

  Referring to FIGS. 2 and 3, outer ring 20 includes a plurality of magnetic coupling electromagnets 23 and a plurality of holding claw driving electromagnets 24 between outer ring upper member 21 and outer ring lower member 22. In the present specification, the term “electromagnet” simply refers to “magnetic coupling electromagnet 23”.

  The electromagnets 23 are distributed in the circumferential direction of the outer ring 20. As the electromagnet 23, an air-core solenoid, a solenoid having a permanent magnet or a ferromagnetic core, or the like can be used. A magnetic field is generated by the electromagnet 23. The electromagnet 23 is controlled in magnitude by a control device (not shown). The number of electromagnets 23 is three or more. The upper limit of the number of electromagnets 23 is not particularly limited, but is preferably 7 or less, and more preferably 3 so that the structure is not too complicated. The electromagnet 23 is arranged so that at least one of the triangles having three electromagnets at the apex is an acute-angled triangle. The electromagnet 23 is preferably arranged so as to equally divide the circumference of the outer ring.

  The holding claw driving electromagnet 24 is for driving a holding claw 54 of the inner ring 50 described later.

  The outer ring 20 is rotatable around the central axis Z. As the outer ring rotates, the magnetic field generated by the electromagnet 23 rotates around the central axis Z. Further, the outer ring can be rotated and tilted about a straight line intersecting the central axis Z. Such an operation can be realized by a gimbal mechanism. As an example, in FIG. The first support frame 61 is horizontally supported by a support mechanism (not shown). The second support frame 62 is supported by the first support frame so as to be rotatable around the X axis, and can be tilted by being rotated around the X axis by the first motor 63 (T). The outer ring 20 is disposed on a bearing 65 fixed to a column 64 extending from the second support frame, and is rotated around the Z axis by a belt (68) drive or the like (R) by the second motor 66. As a result, the outer ring can be rotated around the X axis and tilted, and can be rotated around the Z axis.

  1 and 3, the container 40 is disposed inside the outer ring 20 and is supported by a support mechanism (not shown). The shape of the container needs not to interfere with the inclination and rotation of the outer ring and the inner ring. The container shape of this embodiment is a spherical shape whose upper and lower sides are cut, and even if the outer ring is inclined and rotated, it does not interfere with the outer ring and the inner ring. The container 40 includes a side wall portion 41, a lid portion 42, and a bottom portion 43, and the side wall portion forms a spherical surface. The bottom part 43 is liquid-tightly joined to the lower end of the side wall part. A chemical solution supply pipe 44 and a drainage pipe 45 are connected to the bottom. Preferably, the lid part 42 can also be liquid-tightly joined to the upper end of the side wall part. This is because the container itself can be tilted with the chemical solution stored inside the container.

  The material of the container 40 is a dielectric having a relative permeability close to 1, and does not corrode by the chemical solution used and does not become a contamination source of the substrate. The material of the container is preferably quartz. As a processing chemical solution filled in the container, for example, for substrate cleaning, pure water, ammonia, ammonia / hydrogen peroxide mixed solution, hydrochloric acid, hydrochloric acid / hydrogen peroxide mixed solution, sulfuric acid, sulfuric acid / hydrogen peroxide mixed solution Hydrogen peroxide, ozone water, hydrofluoric acid / ozone water mixture, sulfuric acid / ozone water mixture, etc. are used. For etching treatment, nitric acid, hydrofluoric acid, acetic acid, hydrofluoric acid / hydrogen peroxide mixture, hydrofluoric acid / nitric acid mixture, hydrofluoric acid / nitric acid / acetic acid mixture, hydrofluoric acid / hydrochloric acid mixture, sulfuric acid / hydrochloric acid mixture , Sulfuric acid / nitric acid mixture, nitric acid / hydrochloric acid mixture, etc. are used. For substrate drying treatment, isopropyl alcohol, ethanol, methanol, or the like is used.

  With reference to FIGS. 2, 3, and 5, the inner ring 50 is disposed in the container 40. The inner ring 50 includes a plurality of magnetic coupling permanent magnets 53 and a plurality of holding claws 54 for gripping the substrate between the inner ring upper member 51 and the inner ring lower member 52. In the present specification, the term “permanent magnet” simply refers to the “magnetic coupling permanent magnet 53”.

  The inner ring upper member 51 and the inner ring lower member 52 are made of materials that do not corrode by the chemicals used and do not become a contamination source of the substrate. The material of the inner ring upper member and the inner ring lower member is preferably quartz.

  The permanent magnets 53 are distributed in the circumferential direction of the inner ring 50. The number of permanent magnets 53 is three or more. The permanent magnet 53 is arranged so as to be able to face the electromagnet 23 of the outer ring 20 on a one-to-one basis. The permanent magnet 53 is enclosed in a quartz tube. This structure can be realized, for example, by inserting a permanent magnet into a quartz tube, closing both ends of the quartz tube with a quartz plate, and welding the end surface of the quartz tube and the periphery of the quartz plate.

  The holding claws 54 are distributed in the circumferential direction of the inner ring 50. The holding claw has a through hole 55 perpendicular to the surface of the inner ring, and is rotatable around a pin 56 inserted through the through hole. The pins are fixed to the inner ring upper member 51 and the inner ring lower member 52 by welding or the like. A holding claw driving permanent magnet 58 is embedded in the holding claw base end portion 57, and the entire holding claw rotates around the pin 56 by attraction or repulsion of the outer ring 20 with the holding claw driving electromagnet 24. To do. The holding claw tip 59 grips the substrate 60.

  The number of holding claws 54 is three or more. The upper limit of the number of holding claws is not particularly limited, but is preferably 7 or less, more preferably 3 so that the structure is not too complicated. The holding claws are arranged so that at least one of the triangles having the apex at the three tip portions 59 is an acute triangle. The holding claws are preferably arranged so that the tip 59 equally divides the outer periphery of the substrate 60.

  The holding claws 54 and the pins 56 are made of materials that do not corrode by the chemicals used and do not cause contamination of the substrate. The material of the holding claws and pins is preferably quartz.

  Referring to FIGS. 2 and 3, the electromagnets 23 distributed in the circumferential direction of the outer ring 20 and the permanent magnets 53 of the inner ring 50 constitute a magnetic coupling means so as to face each other one to one. Thereby, the outer ring and the inner ring are magnetically coupled with the side wall of the container 40 interposed therebetween, and the inner ring is held in a suspended state in the container. The larger the distance between the outer ring and the inner ring, the greater the degree of freedom in designing the device, which is preferable. The realizable distance depends on the weight of the inner ring and the magnitude of the magnetic force of the electromagnet 23 and the permanent magnet 53. From the experimental results of the present inventors, the distance can be increased to about 40 mm using generally available materials. be able to.

  When the outer ring 20 rotates around the central axis Z while the inner ring 50 is suspended in the container 40, the inner ring rotates following the rotational movement of the outer ring.

  However, the space between the outer ring 20 and the inner ring 50 is unstable only by the magnetic coupling means. Therefore, the distance between the outer ring and the inner ring is detected by a sensor and the magnetic force of the electromagnet 23 is adjusted, so that the distance is kept constant. This keeps the inner ring concentric in the same plane as the outer ring. The sensor detects the distance between the outer ring and the inner ring in at least three places. Preferably, detection at the positions of the electromagnet 23 and the permanent magnet 53 facilitates control of the magnetic force of the electromagnet 23. As the sensor, for example, a laser type displacement sensor can be provided on the outer ring.

  Next, a method for using the substrate rotating apparatus of this embodiment will be described with reference to FIG.

  First, the lid of the container 40 is removed and opened upward, the substrate 60 is held by the robot arm 71 or the like and inserted into the container, and the substrate is lowered to a predetermined position (FIG. 6A). The substrate is held by the holding claw of the inner ring 50. After transferring the substrate to the inner ring, the robot arm is pulled upward. By attaching the lid 42 to the container in a liquid-tight manner and inclining the outer ring 20, the inner ring and the substrate 60 are inclined. A chemical solution 46 (sulfuric acid / hydrogen peroxide mixture or the like) is supplied from a chemical solution supply pipe 44 at the bottom of the container to fill the container (FIG. 6B). With the substrate 60 immersed in the chemical solution, the substrate is processed by rotating around the central axis Z of the outer ring (FIG. 6C). After the substrate processing is completed, the container 40 and the outer ring 20 are tilted, and the substrate is further tilted, preferably standing vertically (FIG. 6D). The chemical solution is discharged from the drain tube 45 at the bottom of the container (FIG. 6E). The substrate 60 is returned to the horizontal position (FIG. 6F). Thereafter, the lid of the container is removed, and the substrate is taken out by a robot arm or the like.

  A second embodiment of the present invention will be described with reference to FIG. This embodiment is different from the first embodiment in that the magnetic field is rotated using the principle of the linear motor.

  Referring to FIG. 7, the outer ring 25 in the substrate processing apparatus 11 of the present embodiment includes electromagnets 26 arranged in the circumferential direction as magnetic field generating means. Then, the outer ring itself does not rotate around the central axis, but the magnetic field is rotated by sequentially turning on and off the electromagnet 26 in the circumferential direction or inverting the polarity while the outer ring is stationary. Thereby, the inner ring 50 is rotated by following the rotational change of the magnetic field by the attraction and / or repulsion of the electromagnet 26 and the permanent magnet 53.

  The holding claw 54 is driven by an electromagnet (26 </ b> A in FIG. 7) at a position facing the holding claw driving permanent magnet 58 among the electromagnets 26. Specifically, when the holding claw 54 is opened and closed when the inner ring 50 is stopped, the polarity of the electromagnet 26 </ b> A at a position facing the holding claw driving permanent magnet 58 is appropriately reversed. During the rotation of the inner ring, the polarity and magnetic force of the electromagnet 26 are controlled so that the holding claws can hold the substrate.

  The other parts of the outer ring 20, the configuration of the container 40 and the inner ring 50 are the same as those in the first embodiment.

  According to this embodiment, an outer ring rotating mechanism or the like is not required, and the apparatus structure can be simplified.

  A third embodiment of the present invention will be described with reference to FIG. This embodiment is different from the first embodiment in that the outer frame body includes a non-rotating part and a rotating part.

  With reference to FIG. 8, the outer frame 30 in the substrate processing apparatus 12 of the present embodiment includes a non-rotating portion 31 occupying the outer peripheral side and a rotating portion 33 occupying the inner peripheral side. The rotating portion 33 is mechanically joined to the non-rotating portion via a support mechanism such as a bearing (not shown), and both are arranged concentrically in the same plane, and the relative positional relationship is unchanged.

  The non-rotating part 31 includes electromagnets 32 arranged in the circumferential direction as magnetic field generating means. The rotating portion 33 is formed by joining portions having different magnetic permeability along the circumferential direction. The dark colored portion in FIG. 8 is a portion 34 having a high magnetic permeability, and is made of, for example, a ferromagnetic material or a permanent magnet. The light colored portion in FIG. 8 is a portion 35 having a low magnetic permeability, and is made of, for example, various dielectrics. Since the magnetic lines of force generated by the electromagnet 32 easily pass through the high magnetic permeability portion 34, the magnetic flux density is increased inside the high magnetic permeability portion 34 of the rotating portion 33. Conversely, the magnetic flux density is low inside the low magnetic permeability portion 35 of the rotating portion 33. The high magnetic permeability portion 34 is arranged so as to be able to face the permanent magnets 53 and the holding claw driving permanent magnets 58 distributed in the circumferential direction of the inner ring 50.

  The electromagnet 32 of the non-rotating portion 31, the high magnetic permeability portion 34 of the rotating portion 33, and the permanent magnet 53 of the inner ring 50 are magnetically coupled, and the inner ring is held in a suspended state in the container 40. In addition, when the non-rotating portion 31 is stationary, the rotating portion 33 rotates around the central axis Z, whereby the magnetic field rotates, and the inner ring rotates following the rotation change of the magnetic field.

  The driving method of the holding claw 54 is the same as in the second embodiment. That is, when the holding claw 54 is opened and closed when the inner ring 50 is stopped, the polarity of the electromagnet 32A at the position facing the holding claw driving permanent magnet 58 is appropriately reversed.

  According to this embodiment, since the non-rotating part 31 in which the electromagnet 32 is arranged does not rotate, the wiring of the electromagnet 32 can be simplified.

  The substrate rotating apparatus according to the first to third embodiments has the advantages of the conventional immersion type substrate processing apparatus and the rotary type substrate processing apparatus. For example, as an advantage of the immersion method, there is no problem of static electricity, and the cleaning effect can be improved by adding ultrasonic vibration. As a merit of the rotation method, the uniformity of processing within the substrate surface is improved by rotating the substrate. In addition, since the substrate is rotated while being immersed in the chemical solution, a lift-off effect can be expected in which dirt attached to the substrate surface is easily peeled off from the surface, particularly in the cleaning process.

  The present invention is not limited to the above-described embodiment, and various modifications are possible within the scope of the technical idea. Several modifications will be described below.

  Although the inner frame body and the outer frame body in each of the above embodiments are annular, the shape of the inner frame body and the outer frame body is not limited to this, and may be, for example, a regular octagon or other polygons. .

  In each of the above embodiments, the inner frame body includes the magnetic coupling permanent magnet 53 and the holding claw driving permanent magnet 58. However, the inner frame body may include a ferromagnetic body instead of the permanent magnet.

  In addition, when the number of rotation or rotation axes of the outer frame body is referred to as “degree of freedom of rotation”, the degree of freedom of rotation of the outer frame body in each of the above embodiments is 2, The degree of freedom of rotation may be 3. That is, the outer frame body may be rotatable around the central axis and may be tilted by rotating around two straight lines intersecting the central axis. Thereby, it is possible to process the substrate while moving it in a more complicated manner.

  Alternatively, the degree of freedom of rotation of the outer frame body may be 1. That is, the outer frame body can rotate around the central axis, but the outer frame body may not be inclined and the direction of the central axis may be fixed. Thereby, the apparatus structure can be simplified. Further, the container shape may be a substantially cylindrical shape instead of a spherical shape. This is because even if the container is cylindrical, it does not interfere with the rotation of the outer frame and the inner frame. In this case, it is preferable that the central axis be inclined instead of vertical, so that the chemical liquid or the like hardly remains on the substrate when the chemical liquid is discharged.

  Further, the outer frame body may be capable of translation in the direction of its central axis. This facilitates mounting and removal of the substrate.

  Moreover, the substrate rotating apparatus of the present invention can be used as an alternative to a conventional substrate rotating apparatus such as a spin coater without immersing the substrate in a chemical solution. In this case, if the degree of freedom of rotation is 2, the substrate can be rotated while being inclined from the horizontal, so that processing conditions closer to the optimum can be selected. Even if the degree of freedom of rotation is 1, the rotating shaft or the like does not penetrate the container, and the contamination source in the container can be reduced.

  Moreover, the substrate rotating apparatus of the present invention can be used in a dry process that does not use a chemical solution. In that case, give the container the required airtightness.

10-12 Substrate rotating device 20 Outer ring (outer frame)
21 Outer ring upper member 22 Outer ring lower member 23 Electromagnet for magnetic coupling (electromagnet)
24 Electromagnet for holding claw drive 25 Outer ring (outer frame)
26, 26A Electromagnet 30 Outer frame 31 Non-rotating part 32, 32A Electromagnet 33 Rotating part 34 High magnetic permeability part 35 Low magnetic permeability part 40 Container 41 Side wall part 42 Lid part 43 Bottom part 44 Chemical liquid supply pipe 45 Drainage pipe 46 Chemical liquid 50 Inner ring (inner frame)
51 Inner ring upper member 52 Inner ring lower member 53 Permanent magnet for magnetic coupling (permanent magnet)
54 Holding claws (substrate holding means)
55 Through-hole 56 Pin 57 Base end portion 58 Holding claw driving permanent magnet 59 Tip portion 61 First support frame 62 Second support frame 63 First motor (for rotation and tilting)
64 support 65 bearing 66 second motor (for rotation)
68 Belt 60 Substrate 71 Robot arm Z Center axis of outer ring and outer frame

Claims (8)

An outer frame comprising a magnetic field generating means and capable of rotating the generated magnetic field around a central axis;
A container disposed inside the outer frame;
An inner frame provided in the container and provided with a substrate holding means and a magnet or a ferromagnetic material distributed in the circumferential direction;
Magnetic coupling means for magnetically coupling the outer frame body and the inner frame body to float the inner frame body and to rotate the inner frame body in accordance with the rotational change of the magnetic field;
A gap adjusting means for maintaining a constant distance between the outer frame body and the inner frame body and maintaining the inner frame body concentrically with the outer frame body;
A substrate rotating apparatus having The magnetic field generating means is an electromagnet distributed and arranged in the circumferential direction of the outer frame body so as to face the magnet or ferromagnetic body of the inner frame body,
The rotation of the magnetic field is realized by the rotational movement of the outer frame,
The magnetic coupling means is composed of a magnet or a ferromagnetic body of the inner frame body and an electromagnet of the outer frame body.
The substrate rotating apparatus according to claim 1. The magnetic field generating means is an electromagnet arranged in the circumferential direction of the outer frame,
The rotation of the magnetic field is realized by sequentially changing the polarity of the aligned electromagnets,
The magnetic coupling means is composed of a magnet or a ferromagnetic body of the inner frame body and an electromagnet of the outer frame body.
The substrate rotating apparatus according to claim 1. The outer frame body includes a non-rotating portion that occupies the outer peripheral side of the outer frame body and a rotating portion that occupies the inner peripheral side of the outer frame body and is formed by joining portions having different magnetic permeability in the circumferential direction. ,
The non-rotating part includes an electromagnet arranged in the circumferential direction as the magnetic field generating means,
The rotation of the magnetic field is realized by the rotational movement of the rotating part,
The magnetic coupling means is composed of a magnet or a ferromagnetic body of the inner frame body, an electromagnet of the rotating portion and the non-rotating portion,
The substrate rotating apparatus according to claim 1. The outer frame body can be further rotated and inclined around a straight line intersecting the central axis.
The board | substrate rotation apparatus as described in any one of Claims 1-4. The outer frame body is further translatable in the central axis direction.
The substrate rotating apparatus according to any one of claims 1 to 5. The container has a chemical solution supply means and a drainage means at the bottom, and can be processed by immersing the substrate held in the inner frame by storing the chemical solution inside.
The substrate rotating apparatus according to any one of claims 1 to 6. An outer frame comprising a magnetic field generating means and capable of rotating the generated magnetic field around a central axis;
A container that is disposed inside the outer frame body and can store a treatment chemical solution therein;
An inner frame provided in the container and provided with a substrate holding means and a magnet or a ferromagnetic material distributed in the circumferential direction;
Magnetic coupling means for magnetically coupling the outer frame body and the inner frame body to float the inner frame body and to rotate the inner frame body in accordance with the rotational change of the magnetic field;
A gap adjusting means for maintaining a constant distance between the outer frame body and the inner frame body and maintaining the inner frame body concentrically with the outer frame body;
A substrate processing apparatus.

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