JP2018016408A5 - - Google Patents
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- JP2018016408A5 JP2018016408A5 JP2016150859A JP2016150859A JP2018016408A5 JP 2018016408 A5 JP2018016408 A5 JP 2018016408A5 JP 2016150859 A JP2016150859 A JP 2016150859A JP 2016150859 A JP2016150859 A JP 2016150859A JP 2018016408 A5 JP2018016408 A5 JP 2018016408A5
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- 238000012545 processing Methods 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 13
- 238000009530 blood pressure measurement Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 14
- 230000003247 decreasing effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016150859A JP6734724B2 (ja) | 2016-07-29 | 2016-07-29 | 二重容器の破損検出装置及び破損検出方法、基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016150859A JP6734724B2 (ja) | 2016-07-29 | 2016-07-29 | 二重容器の破損検出装置及び破損検出方法、基板処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018016408A JP2018016408A (ja) | 2018-02-01 |
| JP2018016408A5 true JP2018016408A5 (https=) | 2019-09-05 |
| JP6734724B2 JP6734724B2 (ja) | 2020-08-05 |
Family
ID=61075779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016150859A Active JP6734724B2 (ja) | 2016-07-29 | 2016-07-29 | 二重容器の破損検出装置及び破損検出方法、基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6734724B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7623136B2 (ja) * | 2020-12-24 | 2025-01-28 | 川崎重工業株式会社 | 液化ガス用真空断熱配管ユニットおよび液化ガス用真空断熱配管の破損検知方法 |
| CN118881980A (zh) * | 2024-09-29 | 2024-11-01 | 中国空气动力研究与发展中心高速空气动力研究所 | 大型金属波纹管在线实时监测设备及泄漏判断方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07106925B2 (ja) * | 1987-02-09 | 1995-11-15 | 住友電気工業株式会社 | 光フアイバ用母材の製造方法 |
| JPH0845647A (ja) * | 1994-07-28 | 1996-02-16 | Nec Kansai Ltd | 投げ込みヒータおよびそのクラック検出方法 |
| JPH10321528A (ja) * | 1997-05-22 | 1998-12-04 | Hitachi Ltd | 半導体処理装置及びその使用方法 |
| JP2006303115A (ja) * | 2005-04-19 | 2006-11-02 | Se Techno Co Ltd | 洗浄装置、洗浄方法および半導体製造装置 |
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2016
- 2016-07-29 JP JP2016150859A patent/JP6734724B2/ja active Active
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