JP2018016408A5 - - Google Patents
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- JP2018016408A5 JP2018016408A5 JP2016150859A JP2016150859A JP2018016408A5 JP 2018016408 A5 JP2018016408 A5 JP 2018016408A5 JP 2016150859 A JP2016150859 A JP 2016150859A JP 2016150859 A JP2016150859 A JP 2016150859A JP 2018016408 A5 JP2018016408 A5 JP 2018016408A5
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- 238000012545 processing Methods 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 13
- 238000009530 blood pressure measurement Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 14
- 230000003247 decreasing effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016150859A JP6734724B2 (ja) | 2016-07-29 | 2016-07-29 | 二重容器の破損検出装置及び破損検出方法、基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016150859A JP6734724B2 (ja) | 2016-07-29 | 2016-07-29 | 二重容器の破損検出装置及び破損検出方法、基板処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018016408A JP2018016408A (ja) | 2018-02-01 |
| JP2018016408A5 true JP2018016408A5 (enExample) | 2019-09-05 |
| JP6734724B2 JP6734724B2 (ja) | 2020-08-05 |
Family
ID=61075779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016150859A Active JP6734724B2 (ja) | 2016-07-29 | 2016-07-29 | 二重容器の破損検出装置及び破損検出方法、基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6734724B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118881980A (zh) * | 2024-09-29 | 2024-11-01 | 中国空气动力研究与发展中心高速空气动力研究所 | 大型金属波纹管在线实时监测设备及泄漏判断方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07106925B2 (ja) * | 1987-02-09 | 1995-11-15 | 住友電気工業株式会社 | 光フアイバ用母材の製造方法 |
| JPH0845647A (ja) * | 1994-07-28 | 1996-02-16 | Nec Kansai Ltd | 投げ込みヒータおよびそのクラック検出方法 |
| JPH10321528A (ja) * | 1997-05-22 | 1998-12-04 | Hitachi Ltd | 半導体処理装置及びその使用方法 |
| JP2006303115A (ja) * | 2005-04-19 | 2006-11-02 | Se Techno Co Ltd | 洗浄装置、洗浄方法および半導体製造装置 |
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2016
- 2016-07-29 JP JP2016150859A patent/JP6734724B2/ja active Active
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