JP2018003137A - 成膜装置および成膜方法 - Google Patents
成膜装置および成膜方法 Download PDFInfo
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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Abstract
【解決手段】蒸着源と接続され、複数の開口部を備えているヘッドと、前記ヘッドに巻き付けられているヒータを有し、前記ヒータは、前記蒸着源の側に位置する第1領域と、前記第1領域の前記蒸着源とは反対の側に位置する第2領域を有し、前記ヒータは、記第1領域と前記第2領域において、不均一に配置される成膜装置が提供される。さらに、この成膜装置を用いた成膜方法が提供される。
【選択図】図1
Description
本実施形態では、本発明の実施形態の一つである成膜装置100の構造、および成膜装置100を用いる成膜方法に関し、図1乃至図15を用いて説明する。成膜装置100は蒸着によって膜を基板140上に形成する装置であり、蒸着装置とも呼ばれる。
図1に成膜装置100とそれを設置可能なチャンバー200の側面模式図を、図2に上面模式図を示す。図1に示すように、成膜装置100は、後述する坩堝102を保持する容器104を含む蒸着源106、および閉管108を有する。ここで閉管とは、片方が閉じ、片方が開いた管を意味する。蒸着源106では、形成される膜に含まれる材料が坩堝102内に充填され、坩堝102が加熱され、材料が気化される。一方、閉管108は、気化された材料の蒸気を、膜を形成する基板140上へ均一に導く機能を有する。なお、閉管108に相当する箇所を、ヘッド、収容部、チューブ、混合室と呼ぶこともある。
蒸着源106の断面模式図を図4に示す。蒸着源106は、坩堝102を内部に保持できる容器104を有している。任意の構成として蒸着源106はさらに、容器104を保持するための蒸着ホルダ118を有してもよい。
閉管108の側面図を図5に示す。図5は、閉管108を基板ホルダ142側から観察した場合の模式図である。図5の鎖線A―A’に沿った断面模式図を図6に、鎖線B−B’に沿った断面模式図を7(A)と(B)に示す。
上述した蒸着プロセスでは、材料の加熱、気化は、高真空に維持されたチャンバー200内で行われる。また、材料を加熱する熱は蒸着源106で与えられる。したがって、蒸着源106から閉管108への熱の伝達は、熱伝導が主な機構となる。このため、閉管108には熱伝導機構に起因する温度勾配が生じる可能性がある。たとえば開放端132に近い側では、材料が気化可能な高温を維持できるが、閉鎖端130に近い側では材料は気体状態を維持できずに固化し、その結果、開口部134を詰まらせる原因となる。一方、開口部134の詰まりを防止するために、閉鎖端130に近い側まで十分な温度を有するように蒸着源106を加熱した場合には、坩堝102内において材料の熱分解を引き起こすことがある。
成膜装置100を用いて蒸着する場合、坩堝102に蒸着する材料を充填し、坩堝102を容器104内に設置する。容器104と閉管108を接続後、シート状ヒータ110を閉管108に巻き付ける。その後容器104内のヒータ120に通電して坩堝102加熱を開始し、同時にシート状ヒータ110に通電して閉管108を加熱する。閉管108の温度が坩堝102の温度と同じ、あるいは坩堝102の温度よりも高くなるように、シート状ヒータ110の通電を制御してもよい。これにより、閉管108の温度勾配が解消され、かつ、開口部134の詰まりを効果的に防止することができる。
本実施形態では、基板140の主面が水平面に対して平行になるように基板140を保持して膜を形成するための成膜装置250に関し、図16、17を用いて説明する。第1実施形態と同一の構成に関しては説明を割愛することがある。
本実施形態では、第1実施形態で述べた成膜装置100、成膜方法を適用し、半導体素子の一つである発光素子が搭載された表示装置を作製する方法に関し、図18乃至図23を用いて説明する。第1、2実施形態と同一の構成に関しては説明を割愛することがある。
Claims (20)
- 蒸着源と、
前記蒸着源と接続され、複数の開口部を備えているヘッドと、
前記ヘッドに巻き付けられているヒータと、を有し、
前記ヒータは、前記蒸着源の側に位置する第1領域と、前記第1領域の前記蒸着源とは反対の側に位置する第2領域とを有し、
前記ヒータは、記第1領域と前記第2領域において、不均一に配置されることを特徴とする成膜装置。 - 前記ヒータは、前記複数の開口部の間を通過するように配置される、請求項1に記載の成膜装置。
- 前記ヒータは、記第1領域と前記第2領域において、重なって複数回巻き付けられた部分を有し、
前記第1領域における前記ヒータの第1の巻き数と、前記第2領域における前記ヒータの第2の巻き数とは、互いに異なる、請求項1または請求項2に記載の成膜装置。 - 前記第2の巻き数は前記第1の巻き数よりも大きい、請求項3に記載の成膜装置。
- 前記第1領域における前記ヒータの第1の幅と、前記第2領域における前記ヒータの第2の幅とは、互いに異なる、請求項1または請求項2に記載の成膜装置。
- 前記第2の幅は前記第1の幅よりも大きい、請求項5に記載の成膜装置。
- 前記ヒータは電熱線を含み、
前記電熱線は、前記ヘッドの長手方向である第1の方向に延在し、かつ前記第1の方向と交差する第2の方向に複数本並んでいる部分を有し、
前記第1領域における前記電熱線が前記第2の方向に並んでいる第1の本数と、前記第2領域における前記電熱線が前記第2の方向に並んでいる第2の本数とは、互いに異なる、請求項1または請求項2に記載の成膜装置。 - 前記第2の本数は前記第1の本数よりも大きい、請求項7に記載の成膜装置。
- 前記ヒータはシート状であり、
前記ヒータは前記ヘッドから着脱可能である、請求項1から請求項8の何れか1項に記載の成膜装置。 - 蒸着源と、
前記蒸着源を覆い、開放端が前記蒸着源に接続され、複数の開口部を備える閉管と、
前記閉管に巻き付いているヒータと、を有し、
前記ヒータは、前記開放端の側と前記開放端とは反対の側において、不均一に配置されることを特徴とする成膜装置。 - 前記ヒータは、前記閉管の同じ個所に複数回巻き付けられており、
前記開放端からの距離が増大するにつれて、前記ヒータの巻き数は増大する、請求項10に記載の成膜装置。 - 前記開放端からの距離が増大するにつれて、前記ヒータの幅は増大する、請求項10に記載の成膜装置。
- 基板の主面が水平面に対して垂直になるように、前記基板を保持する基板ホルダをさらに有し、
前記複数の開口部が前記基板ホルダに対向するように配置される、請求項10に記載の成膜装置。 - 蒸着源において材料を加熱して気化させる工程と、
前記蒸着源と接続され、複数の開口部を備えているヘッドの中へ前記材料の蒸気を導入する工程と、
前記複数の開口部を通して前記蒸気を前記ヘッドから射出する工程と、
前記材料が加熱される間、前記ヘッドに巻きつけられたヒータによって前記ヘッドを加熱する工程を含み、
前記ヒータは、前記蒸着源の側に位置する第1領域と、前記第1領域の前記蒸着源とは反対の側に位置する第2領域を有し、
前記ヒータは、記第1領域と前記第2領域において、不均一に配置されることを特徴とする成膜方法。 - 前記ヘッドは、長手方向が水平面に対して垂直になるように配置される、請求項14に記載の成膜方法。
- 前記材料の気化時、
基板の主面が前記水平面に対して垂直になるように、前記基板を配置し、
前記複数の開口部を前記主面に対向させて、前記蒸気を前記ヘッドから射出する、請求項15に記載の成膜方法。 - 前記ヒータによって前記ヘッドを加熱する工程は、前記ヘッドの温度勾配を解消する、請求項14から請求項16の何れか1項に記載の成膜方法。
- 前記ヒータは、少なくとも記第1領域と前記第2領域とにおいて、重なって複数回巻き付けられた部分を有し、
前記第1領域における前記ヒータの第1の巻き数と、前記第2領域における前記ヒータの第2の巻き数とは、互いに異なっている、請求項14から請求項16の何れか1項に記載の成膜方法。 - 前記第1領域における前記ヒータの第1の幅と、前記第2領域における前記ヒータの第2の幅とは、互いに異なる、請求項14から請求項16の何れか1項に記載の成膜方法。
- 前記ヒータは電熱線を含み、
前記電熱線は、前記ヘッドの長手方向である第1の方向に延在し、且つ前記第1の方向と交差する第2の方向に複数本並んでいる部分を有し、
前記第1領域における前記電熱線が前記第2の方向に並んでいる第1の本数と、前記第2領域における前記電熱線が前記第2の方向に並んでいる第2の本数とは、互いに異なっている、請求項14から請求項16の何れか1項に記載の成膜方法。
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JPH0284257U (ja) * | 1988-12-19 | 1990-06-29 | ||
JPH06220619A (ja) * | 1992-07-20 | 1994-08-09 | Intevac Inc | 温度勾配を達成するために加熱器を利用したmbeソース |
US20100248416A1 (en) * | 2009-03-25 | 2010-09-30 | Scott Wayne Priddy | Deposition of high vapor pressure materials |
JP2011012309A (ja) * | 2009-07-02 | 2011-01-20 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
JP2015501379A (ja) * | 2011-10-21 | 2015-01-15 | リベル | 真空蒸着によって薄膜を堆積させる装置のための噴射システム |
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JPH0284257U (ja) * | 1988-12-19 | 1990-06-29 | ||
JPH06220619A (ja) * | 1992-07-20 | 1994-08-09 | Intevac Inc | 温度勾配を達成するために加熱器を利用したmbeソース |
US20100248416A1 (en) * | 2009-03-25 | 2010-09-30 | Scott Wayne Priddy | Deposition of high vapor pressure materials |
JP2011012309A (ja) * | 2009-07-02 | 2011-01-20 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
JP2015501379A (ja) * | 2011-10-21 | 2015-01-15 | リベル | 真空蒸着によって薄膜を堆積させる装置のための噴射システム |
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