JP2017516141A - 発光ダイオードデジタルマイクロミラーデバイスイルミネータ - Google Patents

発光ダイオードデジタルマイクロミラーデバイスイルミネータ Download PDF

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Publication number
JP2017516141A
JP2017516141A JP2016565687A JP2016565687A JP2017516141A JP 2017516141 A JP2017516141 A JP 2017516141A JP 2016565687 A JP2016565687 A JP 2016565687A JP 2016565687 A JP2016565687 A JP 2016565687A JP 2017516141 A JP2017516141 A JP 2017516141A
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JP
Japan
Prior art keywords
led
aperture
output
optical system
condensing optical
Prior art date
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Pending
Application number
JP2016565687A
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English (en)
Japanese (ja)
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JP2017516141A5 (enExample
Inventor
ジョン ブルキラッキオ，トーマス
ジョン ブルキラッキオ，トーマス
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Innovations In Optics Inc
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Innovations In Optics Inc
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Application filed by Innovations In Optics Inc filed Critical Innovations In Optics Inc
Publication of JP2017516141A publication Critical patent/JP2017516141A/ja
Publication of JP2017516141A5 publication Critical patent/JP2017516141A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G02B19/0066—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED in the form of an LED array
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0994—Fibers, light pipes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/20—Lamp housings
    • G03B21/208—Homogenising, shaping of the illumination light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G03F7/70166—Capillary or channel elements, e.g. nested extreme ultraviolet [EUV] mirrors or shells, optical fibers or light guides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/70391—Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141—Constructional details thereof
    • H04N9/315—Modulator illumination systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/005—Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/008—Projectors using an electronic spatial light modulator but not peculiar thereto using micromirror devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/20—Lamp housings
    • G03B21/2006—Lamp housings characterised by the light source
    • G03B21/2033—LED or laser light sources

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Projection Apparatus (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2016565687A 2014-05-10 2015-05-06 発光ダイオードデジタルマイクロミラーデバイスイルミネータ Pending JP2017516141A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461991488P 2014-05-10 2014-05-10
US61/991,488 2014-05-10
PCT/US2015/029392 WO2015175274A1 (en) 2014-05-10 2015-05-06 Light emitting diode digital micromirror device illuminator

Publications (2)

Publication Number Publication Date
JP2017516141A true JP2017516141A (ja) 2017-06-15
JP2017516141A5 JP2017516141A5 (enExample) 2018-12-13

Family

ID=54368430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016565687A Pending JP2017516141A (ja) 2014-05-10 2015-05-06 発光ダイオードデジタルマイクロミラーデバイスイルミネータ

Country Status (6)

Country Link
US (2) US20150325323A1 (enExample)
EP (2) EP3143449A4 (enExample)
JP (1) JP2017516141A (enExample)
CA (1) CA2945982A1 (enExample)
IL (1) IL248343A0 (enExample)
WO (1) WO2015175274A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020506413A (ja) * 2017-01-19 2020-02-27 イノヴェイションズ イン オプティクス，インコーポレイテッドＩｎｎｏｖａｔｉｏｎｓ Ｉｎ Ｏｐｔｉｃｓ，Ｉｎｃ． 発光ダイオードデジタルマイクロミラーデバイスイルミネータ

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9971135B2 (en) 2014-05-10 2018-05-15 Innovations In Optics, Inc. Light emitting diode digital micromirror device illuminator
US10180248B2 (en) 2015-09-02 2019-01-15 ProPhotonix Limited LED lamp with sensing capabilities
US10908507B2 (en) 2016-07-13 2021-02-02 Applied Materials, Inc. Micro LED array illumination source
EP3485515A4 (en) * 2016-07-13 2020-04-01 Applied Materials, Inc. Micro led array as illumination source
WO2019109071A1 (en) * 2017-12-01 2019-06-06 Chroma Technology Corp. System and method for preparing laser light for microscopy
US11303355B2 (en) * 2018-05-30 2022-04-12 Apple Inc. Optical structures in directional free-space optical communication systems for portable electronic devices
US10700780B2 (en) 2018-05-30 2020-06-30 Apple Inc. Systems and methods for adjusting movable lenses in directional free-space optical communication systems for portable electronic devices
TWI659239B (zh) * 2018-11-14 2019-05-11 大立光電股份有限公司 成像光學透鏡組、取像裝置及電子裝置
US11549799B2 (en) 2019-07-01 2023-01-10 Apple Inc. Self-mixing interference device for sensing applications
CN112666135B (zh) * 2020-11-26 2023-04-21 中国科学技术大学 一种三维显微成像装置及方法
US12413043B2 (en) 2021-09-21 2025-09-09 Apple Inc. Self-mixing interference device with tunable microelectromechanical system

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5442414A (en) * 1994-05-10 1995-08-15 U. S. Philips Corporation High contrast illumination system for video projector
EP1616219A4 (en) * 2003-04-24 2006-08-09 Chromnomotion Imaging Applic I TUBELESS OPTICAL LIGHT ENGINE SYSTEM
US7029130B2 (en) * 2003-12-30 2006-04-18 3M Innovative Properties Company Contrast and brightness enhancing apertures for illumination displays
US20060139580A1 (en) * 2004-12-29 2006-06-29 Conner Arlie R Illumination system using multiple light sources with integrating tunnel and projection systems using same
US7832878B2 (en) * 2006-03-06 2010-11-16 Innovations In Optics, Inc. Light emitting diode projection system
US7889430B2 (en) * 2006-05-09 2011-02-15 Ostendo Technologies, Inc. LED-based high efficiency illumination systems for use in projection systems
WO2007146373A2 (en) * 2006-06-13 2007-12-21 Wavien, Inc. Illumintion system and method for recycling light to increase the brightness of the light source
US7542206B2 (en) * 2006-07-18 2009-06-02 Real D Light collectors for projection systems
JP2010541001A (ja) * 2007-09-25 2010-12-24 エクスプレイ エルティーディー． マイクロプロジェクタ
WO2009095406A1 (en) * 2008-01-28 2009-08-06 Upstream Engineering Oy Double-reverse total-internal-reflection-prism optical engine
WO2010084666A1 (ja) * 2009-01-20 2010-07-29 コニカミノルタオプト株式会社 投影装置
JP5436097B2 (ja) * 2009-08-25 2014-03-05 三菱電機株式会社 集光光学系及び投写型画像表示装置
US8602567B2 (en) * 2009-09-29 2013-12-10 Wavien, Inc. Multiplexing light pipe having enhanced brightness
US8403527B2 (en) * 2010-10-26 2013-03-26 Thomas J. Brukilacchio Light emitting diode projector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020506413A (ja) * 2017-01-19 2020-02-27 イノヴェイションズ イン オプティクス，インコーポレイテッドＩｎｎｏｖａｔｉｏｎｓ Ｉｎ Ｏｐｔｉｃｓ，Ｉｎｃ． 発光ダイオードデジタルマイクロミラーデバイスイルミネータ

Also Published As

Publication number Publication date
IL248343A0 (en) 2016-11-30
WO2015175274A1 (en) 2015-11-19
US20180341094A1 (en) 2018-11-29
EP3143449A1 (en) 2017-03-22
EP3435132A3 (en) 2019-04-17
EP3435132A2 (en) 2019-01-30
US20150325323A1 (en) 2015-11-12
EP3143449A4 (en) 2018-01-03
CA2945982A1 (en) 2015-11-19

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