JP2017513188A5 - - Google Patents

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JP2017513188A5
JP2017513188A5 JP2016557932A JP2016557932A JP2017513188A5 JP 2017513188 A5 JP2017513188 A5 JP 2017513188A5 JP 2016557932 A JP2016557932 A JP 2016557932A JP 2016557932 A JP2016557932 A JP 2016557932A JP 2017513188 A5 JP2017513188 A5 JP 2017513188A5
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Japan
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radiation
vuv
duv
visible
euv
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JP2016557932A
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JP2017513188A (ja
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Priority claimed from US14/660,849 external-priority patent/US9530636B2/en
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Publication of JP2017513188A publication Critical patent/JP2017513188A/ja
Publication of JP2017513188A5 publication Critical patent/JP2017513188A5/ja
Priority to JP2019238419A priority Critical patent/JP6891261B2/ja
Pending legal-status Critical Current

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別の実施形態において、コレクタ素子１０５は、プラズマ１０６から放出された広帯域照明１１５（例えば、ＶＵＶ放射、ＤＵＶ放射、ＥＵＶ放射、ＵＶ放射および／または可視放射）を集め、広帯域照明を１つ以上の追加の光学素子（例えば、フィルタ１２３、ホモジナイザ１２５など）に向けるように配置される。例えば、コレクタ素子１０５は、プラズマ１０６によって放出されたＶＵＶ広帯域放射、ＤＵＶ放射、ＥＵＶ放射、ＵＶ放射または可視放射のうちの少なくとも１つを集め、広帯域照明１１５を１つ以上の下流の光学素子に向けることができる。これに関し、プラズマセル１０１は、ＶＵＶ放射、ＤＵＶ放射、ＥＵＶ放射、ＵＶ放射および／または可視放射を、限定されないが、検査ツールまたは計測ツールなどの当技術で公知の任意の光学特徴付けシステムの下流の光学素子に送達することができる。本明細書において、システム１００のプラズマセル１０１は、限定されないが、ＶＵＶ放射、ＤＵＶ放射、ＥＵＶ放射、ＵＶ放射、および／または可視放射を含む様々なスペクトル域において有用な放射を放出できることに留意する。
JP2016557932A 2014-03-20 2015-03-19 ナノ構造の反射防止層を有する光源 Pending JP2017513188A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019238419A JP6891261B2 (ja) 2014-03-20 2019-12-27 ナノ構造の反射防止層を有する光源、装置、及び方法

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461968161P 2014-03-20 2014-03-20
US61/968,161 2014-03-20
US14/660,849 US9530636B2 (en) 2014-03-20 2015-03-17 Light source with nanostructured antireflection layer
US14/660,849 2015-03-17
PCT/US2015/021460 WO2015143150A1 (en) 2014-03-20 2015-03-19 Light source with nanostructured antireflection layer

Related Child Applications (1)

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JP2019238419A Division JP6891261B2 (ja) 2014-03-20 2019-12-27 ナノ構造の反射防止層を有する光源、装置、及び方法

Publications (2)

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JP2017513188A JP2017513188A (ja) 2017-05-25
JP2017513188A5 true JP2017513188A5 (ja) 2018-04-26

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JP2016557932A Pending JP2017513188A (ja) 2014-03-20 2015-03-19 ナノ構造の反射防止層を有する光源
JP2019238419A Active JP6891261B2 (ja) 2014-03-20 2019-12-27 ナノ構造の反射防止層を有する光源、装置、及び方法

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US (1) US9530636B2 (ja)
JP (2) JP2017513188A (ja)
DE (1) DE112015001355B4 (ja)
WO (1) WO2015143150A1 (ja)

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