JP2017508315A5 - - Google Patents

Download PDF

Info

Publication number
JP2017508315A5
JP2017508315A5 JP2016536176A JP2016536176A JP2017508315A5 JP 2017508315 A5 JP2017508315 A5 JP 2017508315A5 JP 2016536176 A JP2016536176 A JP 2016536176A JP 2016536176 A JP2016536176 A JP 2016536176A JP 2017508315 A5 JP2017508315 A5 JP 2017508315A5
Authority
JP
Japan
Prior art keywords
electrode
cell
ultrasonic transducer
cmut
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016536176A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017508315A (ja
JP6482558B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2014/076475 external-priority patent/WO2015086413A1/en
Publication of JP2017508315A publication Critical patent/JP2017508315A/ja
Publication of JP2017508315A5 publication Critical patent/JP2017508315A5/ja
Application granted granted Critical
Publication of JP6482558B2 publication Critical patent/JP6482558B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016536176A 2013-12-12 2014-12-04 モノリシックに集積された三電極cmut装置 Active JP6482558B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13196881.0 2013-12-12
EP13196881 2013-12-12
PCT/EP2014/076475 WO2015086413A1 (en) 2013-12-12 2014-12-04 Monolithically integrated three electrode cmut device

Publications (3)

Publication Number Publication Date
JP2017508315A JP2017508315A (ja) 2017-03-23
JP2017508315A5 true JP2017508315A5 (OSRAM) 2017-12-14
JP6482558B2 JP6482558B2 (ja) 2019-03-13

Family

ID=49765363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016536176A Active JP6482558B2 (ja) 2013-12-12 2014-12-04 モノリシックに集積された三電極cmut装置

Country Status (5)

Country Link
US (1) US10265728B2 (OSRAM)
EP (1) EP3079837B1 (OSRAM)
JP (1) JP6482558B2 (OSRAM)
CN (1) CN105828962B (OSRAM)
WO (1) WO2015086413A1 (OSRAM)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104160250B (zh) * 2012-03-13 2017-10-27 皇家飞利浦有限公司 具有充电电压源的电容微机械超声换能器设备
EP3079837B1 (en) * 2013-12-12 2023-02-08 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device
WO2016030717A1 (en) * 2014-08-25 2016-03-03 B-K Medical Aps Transducer array cmut element biasing
US10139479B2 (en) 2014-10-15 2018-11-27 Qualcomm Incorporated Superpixel array of piezoelectric ultrasonic transducers for 2-D beamforming
WO2016091624A1 (en) * 2014-12-11 2016-06-16 Koninklijke Philips N.V. Two-terminal cmut device
CN108025331B (zh) * 2015-06-30 2019-11-05 皇家飞利浦有限公司 超声系统和超声脉冲发射方法
US9751108B2 (en) * 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
WO2017025438A1 (en) * 2015-08-11 2017-02-16 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
EP3347735B1 (en) 2015-09-10 2021-06-02 Koninklijke Philips N.V. An ultrasound system with wide depth and detailed viewing
US10497748B2 (en) 2015-10-14 2019-12-03 Qualcomm Incorporated Integrated piezoelectric micromechanical ultrasonic transducer pixel and array
US10996333B2 (en) 2015-11-02 2021-05-04 Koninklijke Philips N.V. Ultrasound system for providing ultrasound images at variable frequencies of a volumetric region comprising an interferer analyzer
JP6495545B2 (ja) * 2015-11-02 2019-04-03 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 超音波トランスジューサアレイ、プローブ及びシステム
US9987661B2 (en) * 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
WO2018095937A1 (en) * 2016-11-28 2018-05-31 Koninklijke Philips N.V. Cmut device and imaging method
US11039814B2 (en) * 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
EP3366221A1 (en) 2017-02-28 2018-08-29 Koninklijke Philips N.V. An intelligent ultrasound system
US10613058B2 (en) * 2017-06-27 2020-04-07 Kolo Medical, Ltd. CMUT signal separation with multi-level bias control
EP3527140A1 (en) * 2018-02-15 2019-08-21 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
EP3597313A1 (en) * 2018-07-18 2020-01-22 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
US10725597B2 (en) * 2018-07-23 2020-07-28 Superc-Touch Corporation Hovering and touch sensing apparatus with enhanced sensitivity
EP3613352A1 (en) * 2018-08-21 2020-02-26 Koninklijke Philips N.V. Systems and methods for performing bi-plane imaging
JP7089992B2 (ja) * 2018-08-31 2022-06-23 富士フイルムヘルスケア株式会社 超音波トランスデューサアレイおよび超音波プローブ
EP3733309A1 (en) * 2019-04-30 2020-11-04 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer (cmut) devices
EP4021649A1 (en) * 2019-08-30 2022-07-06 Vermon S.A. Cmut transducer
WO2021077381A1 (zh) * 2019-10-25 2021-04-29 京东方科技集团股份有限公司 电容式微机械超声换能单元及其制备方法、面板、装置
KR102253210B1 (ko) * 2020-08-06 2021-05-18 한국과학기술원 전하 포획층을 가지는 정전용량형 미세가공 초음파 트랜스듀서 및 이의 제조 방법
KR20230104684A (ko) 2020-11-19 2023-07-10 카톨리에케 유니버시테이트 루벤 초음파 트랜스듀서 어레이 디바이스

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2724437B1 (de) * 1977-05-31 1978-06-15 Siemens Ag Nach dem Impuls-Echo-Verfahren arbeitendes Ultraschall-Bildgeraet
US5396143A (en) 1994-05-20 1995-03-07 Hewlett-Packard Company Elevation aperture control of an ultrasonic transducer
US5997479A (en) * 1998-05-28 1999-12-07 Hewlett-Packard Company Phased array acoustic systems with intra-group processors
US6865140B2 (en) 2003-03-06 2005-03-08 General Electric Company Mosaic arrays using micromachined ultrasound transducers
EP1769573A4 (en) * 2004-02-27 2010-08-18 Georgia Tech Res Inst MULTIPLE-ELEMENT-ELECTRODE-CMUT-COMPONENTS AND MANUFACTURING METHOD
US8008105B2 (en) 2005-05-18 2011-08-30 Kolo Technologies, Inc. Methods for fabricating micro-electro-mechanical devices
CA2607885A1 (en) 2005-05-18 2006-11-23 Kolo Technologies, Inc. Through-wafer interconnection
JP4790315B2 (ja) 2005-05-31 2011-10-12 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子
NO20052656D0 (no) 2005-06-02 2005-06-02 Lumex As Geometrisk bildetransformasjon basert pa tekstlinjesoking
JP4880275B2 (ja) 2005-10-03 2012-02-22 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子装置
EP1777721A1 (en) * 2005-10-18 2007-04-25 Seiko Epson Corporation Micro-electromechanical switch, method of manufacturing an integrated circuit including at least one such switch, and an integrated circuit
EP1944070A1 (en) * 2007-01-12 2008-07-16 Esaote S.p.A. Bidimensional ultrasonic array for volumetric imaging
CN101686826B (zh) 2007-07-11 2012-10-10 株式会社日立医药 超声波探头及超声波诊断装置
CN101772383B (zh) * 2007-07-31 2011-11-02 皇家飞利浦电子股份有限公司 具有高k电介质的cmut
CN101868981B (zh) * 2007-12-03 2014-05-07 科隆科技公司 叠层换能设备
EP2326432A2 (en) * 2008-09-16 2011-06-01 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasound transducer
EP3079837B1 (en) * 2013-12-12 2023-02-08 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device
WO2016091624A1 (en) * 2014-12-11 2016-06-16 Koninklijke Philips N.V. Two-terminal cmut device

Similar Documents

Publication Publication Date Title
JP2017508315A5 (OSRAM)
JP2019504534A5 (OSRAM)
WO2013165705A3 (en) Ultra wide bandwidth transducer with dual electrode
CN104121984B (zh) 一种高灵敏度谐振式mems矢量水听器结构
JP2016529835A5 (OSRAM)
CN103759809B (zh) 一种三维压电矢量水听器微结构
JP2016522650A5 (OSRAM)
CN106311584B (zh) 一种有源匹配的厚度模压电空耦超声换能器
KR20160023154A (ko) 초음파 변환기
JP2016518739A5 (OSRAM)
WO2015095721A8 (en) High frequency ultrasound transducers
BR112018007248A2 (pt) sistema de sensor para uso em um furo de poço e método
JP2014235133A5 (OSRAM)
WO2011139602A3 (en) Methods for forming a connection with a micromachined ultrasonic transducer, and associated apparatuses
JP2020501642A5 (OSRAM)
JP2018534891A5 (OSRAM)
CN204214576U (zh) 摩擦电和压电复合传感器
WO2019099681A8 (en) Ultrasound device with piezoelectric micromachined ultrasonic transducers
CN108370483A (zh) 确定具有电容电极和压电电极的mems麦克风的绝对灵敏度的系统和方法
Liu et al. A high-performance square pMUT for range-finder
Sung et al. A new transduction mechanism for hydrophones employing piezoelectricity and a field-effect transistor
Huang et al. Design, modelling, and characterization of display compatible pMUT device
JP2018522667A5 (OSRAM)
WO2012031216A3 (en) Acoustic transducers using quantum tunneling composite active elements
JP2018525954A5 (OSRAM)