JP2017212323A - Substrate housing container and management system therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container and a management system therefor, for making it possible to easily determining replacement time and easily select a replacement product.SOLUTION: A system comprises: detection means 20 that is provided on a substrate housing container 1 to detect a use state such as an open/close state of a lid body 10 thereof; and small-sized wireless communication means 30 that is provided on the substrate housing container 1, where the system is accessed by a predetermined related peripheral device. The wireless communication means 30 comprises: a data recording unit for recording a detection value by the detection means 20 and a threshold on the substrate housing container 1; an operation processing unit for at least comparing the detection value by the detection means 20 with the threshold on the substrate housing container 1; and a wireless communication unit for communicating with an external server 36. A use limit for the substrate housing container 1 is determined according to a result of the comparison of the operation processing unit. The substrate housing container 1 can be selected on the basis of determination by the wireless communication means 30.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a substrate storage container for storing, storing, transporting, and transporting a substrate made of a semiconductor wafer, a liquid crystal device, a glass wafer, a mask glass, and the like, and a management system therefor.

  A conventional substrate storage container is not shown, but a container body for arranging and storing a plurality of semiconductor wafers made of silicon wafers of φ300 mm in the vertical direction, a lid body for opening and closing the open front of the container body, and It is equipped with a locking mechanism that locks the lid fitted on the front of the container body, and is positioned and mounted on the load port device attached to the semiconductor processing device, or mounted on the inspection and inspection device at the inspection and inspection time. Are periodically tested, or are gripped by a ceiling transport device in a semiconductor manufacturing factory and transported between processes (see Patent Documents 1, 2, and 3).

  The container body is formed into a front open box by a molding material containing a predetermined resin, and support pieces for semiconductor wafers are respectively provided on both sides of the inside of the container body, and the pair of support pieces are vertically arranged at a predetermined pitch. An array is formed. In addition, the bottom plate of the container body is provided with a positioning mechanism for accessing and positioning a predetermined related peripheral device, the rear wall of the container body, etc., the lot number of the substrate storage container, the production history of the semiconductor wafer, etc. An RFID tag for identification of an RFID system storing predetermined data is attached, and data of the RF tag is read and written using radio waves in a non-contact manner (see Patent Document 4).

  Such a substrate storage container is used so as to circulate in all production processes of semiconductors, or is used for each area of the production process, and is periodically used after being cleaned periodically. In the case of repeated use, when the substrate storage container becomes old or is severely damaged, the semiconductor wafer becomes abnormal or deteriorates in quality, so that it is replaced with a new substrate storage container. There is no clear criterion for this replacement period, and the years of use such as 8, 9, 10, etc. are the standard.

Japanese Patent No. 3636669 Japanese Patent No. 4767517 JP-T-2005-513659 Japanese Patent No. 4553840

  Conventional substrate storage containers are configured as described above, and there is no clear criterion for replacement timing, and usually the age of use is the standard for replacement timing. Since individual differences occur and the length of usable years varies, there is a problem that selection of replacement parts is not easy and selection work becomes complicated. In addition, when the substrate storage container is used to circulate in all production processes of semiconductors, since the use history is different for each substrate storage container, there is a variation in the replacement timing of each substrate storage container, and it is difficult to judge the replacement timing. There is a problem of becoming.

  In addition, when a substrate storage container is used for each area of the semiconductor production process, particularly when a substrate storage container is used in a metal wiring formation process or a heat treatment process of a semiconductor wafer, due to thermal deformation or the like, Life may be shortened. In view of this point, when a substrate storage container is used for each area of the production process, it is necessary to individually and specifically determine the criteria for determining the replacement timing of the substrate storage container for each area. Work becomes really difficult.

  The present invention has been made in view of the above, and an object of the present invention is to provide a substrate storage container and a management system for the same that can easily determine the replacement time and can easily select a replacement product.

In order to solve the above-described problems, the present invention includes a container main body that can store a plurality of substrates side by side, and a detachable lid that opens and closes the opening of the container main body, and allows access to predetermined related peripheral devices. And
Detection means provided on at least one of the container main body and the lid and detecting its use state; wireless communication means provided on either the container main body and the lid and capable of communicating with an external communication device; An informing means connected to the wireless communication means and provided in at least one of the container body and the lid,
At least one of the external communication device and the wireless communication means has a function of recording the detection value of the detection means and the threshold value related to the container body or the lid, and compares the detection value of the detection means and the threshold value related to the container body or the cover body. And a function to judge the use limit of the container body or lid according to the comparison result,
The notification means is characterized in that at least one of the external communication device and the wireless communication means notifies the contents according to the result of comparing the detection value of the detection means and the threshold value related to the container body or the lid.

In order to solve the above-mentioned problems, the present invention comprises a detection means provided on the substrate storage container for detecting the use state thereof, and a wireless communication means provided on the substrate storage container for accessing a predetermined related peripheral device. System
The wireless communication unit includes a data recording unit that records at least a detection value of the detection unit and a threshold value related to the substrate storage container, and an arithmetic processing unit that compares at least the detection value of the detection unit and the threshold value related to the substrate storage container. Determine the usage limit of the substrate storage container according to the comparison result of the arithmetic processing unit,
It is characterized in that the substrate storage container can be selected by the judgment of the wireless communication means.

  The detecting means is mounted on the container body of the substrate storage container and projects light receiving and receiving elements for projecting light rays obliquely toward the lid body, and for the lid body that is mounted on the container body and projects light beams toward the lid body. A light projecting / receiving element, and a retroreflective member attached to the lid and capable of reflecting the light from the light projecting / receiving element for the substrate and the light projecting / receiving element for the cover to the light projecting / receiving element for the substrate and the light projecting / receiving element for the lid, respectively. In addition, the presence / absence of the substrate can be detected by measuring the time when the light projecting / receiving element for the substrate cannot receive the reflected light from the return reflection member, and the light projecting / receiving element for the lid can receive the reflected light from the return reflection member. A photoelectric sensor that detects the number of times of opening and closing the lid body can be obtained by measuring the time that has been lost.

The detecting means is attached to the front peripheral edge of the container main body of the substrate storage container and irradiates the light beam in the direction of the peripheral wall of the lid, and is attached to the front peripheral edge of the container main body from the peripheral wall of the lid. A photoelectric sensor that detects the number of times the lid is opened and closed by measuring the number of times the light receiving element has become unable to receive light.
The wireless communication means inputs the lid opening / closing frequency from the detection means to the external input unit and records it in the data recording unit, and the lid opening / closing frequency and the lid opening / closing frequency threshold recorded in the data recording unit As a result of the comparison in the arithmetic processing unit, as a result of the comparison in the arithmetic processing unit, when the lid opening / closing frequency approaches the lid opening / closing frequency threshold, it is determined that the use limit of the substrate storage container is close,
The notification means may notify the preparation for inspection or replacement of the substrate storage container when it is determined that the use limit of the substrate storage container is close as a result of the comparison of the arithmetic processing unit of the wireless communication means. .

The detection means is an acceleration sensor that is attached to the substrate storage container and detects the acceleration thereof.
The wireless communication means inputs the acceleration value of the substrate storage container from the detection means to the external input unit and records it in the data recording unit, and the acceleration value of the substrate storage container recorded in the data recording unit and the acceleration of the substrate storage container When the acceleration value of the substrate storage container exceeds the acceleration threshold value of the substrate storage container, it is determined that the use limit of the substrate storage container is near. ,
The notification means may notify the preparation for inspection or replacement of the substrate storage container when it is determined that the use limit of the substrate storage container is close as a result of the comparison of the arithmetic processing unit of the wireless communication means. .

The detection means is an inclination sensor that detects the level of the substrate storage container when the substrate storage container is positioned and mounted on a predetermined related peripheral device via a positioning mechanism.
The wireless communication means inputs the horizontal value of the substrate storage container from the detection means to the external input unit and records it in the data recording unit. The horizontal value of the substrate storage container recorded in the data recording unit and the horizontal value of the substrate storage container are recorded. When the horizontal value of the substrate storage container approaches at least the horizontal threshold value of the substrate storage container, the use limit of the substrate storage container is determined to be close. And
The notification means may notify the preparation for inspection or replacement of the substrate storage container when it is determined that the use limit of the substrate storage container is close as a result of the comparison of the arithmetic processing unit of the wireless communication means. .

  Here, the substrate in the claims includes a necessary number (for example, 2 or less, 20 or more) of semiconductor wafers, liquid crystal devices, glass wafers, mask glasses, and the like of at least φ200, 300, and 450 mm. The substrate storage container is not particularly limited to a top open box type, a front open box type, a bottom open box type, transparent, opaque, and translucent. The predetermined related peripheral device includes at least a semiconductor processing device, a load port device that opens and closes a lid attached to the device, and various transfer devices for a substrate storage container. The external communication device includes at least a load port device, an inspection / inspection device, various servers, and the like.

  Substrate storage container, in other words, the use state of the container main body and the cover includes at least opening / closing of the cover, presence / absence of the substrate, acceleration of the substrate storage container, number of times of transport of the substrate storage container, transport distance of the substrate storage container, substrate The number of times the storage container is held by the flange, the number of impacts that acted on the substrate storage container, the maximum impact value that acted on the substrate storage container, the maximum frequency that acted on the substrate storage container, the number of heat shocks, the number of times the substrate storage container was washed, the substrate storage container Level, oxygen concentration in the substrate storage container, humidity, particles, and the like.

  The required number of detection means is provided in the inside, upper part, lower part, rear part, and side part of the substrate storage container, and is used at the time of operation, storage, and performance test of the substrate storage container. This detection means includes at least a photoelectric sensor, an acceleration sensor, a temperature sensor, a temperature / humidity sensor, a humidity sensor, a tilt sensor, an oxygen concentration sensor, a gas sensor, and the like.

  According to the present invention, when the substrate storage container is used, stored, during a performance test, etc., the detection means detects the use state of the container body or lid of the substrate storage container, and the detected value is transmitted to an external communication device or wireless communication. Output to the means. The external communication device or the wireless communication means records the detection value of the detection means, compares the detection value with a threshold value related to the container body or lid of the substrate storage container, and as a result, the detected value relates to the container body or lid. If it is less than the threshold value or has not approached the threshold value for the container body or lid, it is determined that the substrate storage container is still usable. When it is determined that the substrate storage container is still usable, the substrate storage container can be used continuously.

  On the other hand, if the performance or quality of the substrate storage container deteriorates due to the prolonged use period, etc., and the detected value approaches or exceeds the threshold value related to the container body or lid, an external communication device or wireless communication The means determines that the use limit of the container main body or the lid is close, that is, the replacement time of the substrate storage container is close. When it is determined that the use limit of the substrate storage container is close, the user can check the existing substrate storage container or prepare to replace it with a new substrate storage container.

  According to the first or second aspect of the invention, the container body or lid of the substrate storage container according to a comparison result between the detected value and the threshold value related to the container body or lid of the substrate storage container by the external communication device or wireless communication means. Since the use limit of the body is determined, there is an effect that the substrate storage container can be selected and a replacement of the substrate storage container can be easily selected.

According to the third aspect of the present invention, if a large-capacity server or the like is connected as a service providing unit to the wireless communication unit of the wireless communication unit, an analysis capability superior to that of the wireless communication unit can be obtained. The use limit of the container can be analyzed in more detail.
According to the invention of claim 4, the content according to the comparison result of the arithmetic processing unit of the wireless communication unit or the analysis result of the service providing unit received by the wireless communication unit of the wireless communication unit. Therefore, it is possible to easily determine the replacement time of the substrate storage container.

  According to the fifth aspect of the present invention, the use of the positioning mechanism makes it possible to position and mount the container main body of the substrate storage container on the peripheral related apparatus with high accuracy. Further, by using the flange, it is possible to hold the container main body in the peripheral related device and safely transport the substrate storage container storing the substrate. Further, by utilizing the locking mechanism, it is possible to effectively prevent the lid body fitted on the front surface of the container body from dropping off.

  According to the sixth aspect of the present invention, if the air supply valve and the exhaust valve are used, purge gas and the like can be circulated inside and outside the container main body, and the pressure difference between the inside and outside of the substrate storage container can be eliminated. In addition, the purge gas can be injected into the container body from a plurality of injection holes of the purge nozzle instead of simply supplying the purge gas into the container body from the air supply valve, so that the relative humidity in the container body is uniform. It becomes easy to control the flow of the purge gas so as to decrease. Furthermore, even if the supply valve of the container body is not connected to the purge gas supply device, the purge gas is supplied from the purge gas source of the substrate storage container to the purge nozzle as needed, and the purge gas is injected into the container body from the injection hole of the purge nozzle. can do.

According to the eighth aspect of the present invention, it is possible to grasp the wear, damage, deterioration, etc. of the lid from the number of times the lid is opened and closed, and to determine the replacement timing of the substrate storage container.
According to the ninth aspect of the present invention, the number of times of transporting the substrate storage container, the transport distance of the substrate storage container, the number of times of holding the flange of the substrate storage container, the number of impacts acting on the substrate storage container, and the maximum impact value acting on the substrate storage container. Alternatively, it is possible to determine the replacement timing of the substrate storage container by grasping the decrease in the performance of the substrate storage container from the maximum frequency applied to the substrate storage container.

According to the invention described in claim 10, it becomes possible to grasp the thermal deformation of the container body from the heat shock when the heated substrate is stored in the substrate storage container, and to determine the use limit of the substrate storage container. .
According to the eleventh aspect of the present invention, it is possible to grasp the thermal deformation, contamination, etc. associated with the drying of the container main body and the lid from the number of times of cleaning the substrate storage container, and to determine the use limit of the substrate storage container.

According to the twelfth aspect of the present invention, it is possible to determine the age limit of the container body from the oxygen concentration value in the container body of the substrate storage container, and to determine the use limit of the substrate storage container.
According to the thirteenth aspect of the present invention, when the oxygen concentration in the substrate storage container becomes abnormal, the purge gas can be supplied from the purge nozzle into the container main body, thereby preventing the deterioration of the atmosphere in the container main body. It is possible to improve the quality of the substrate stored in the container body.

  According to the seventh and fourteenth aspects of the present invention, when the oxygen concentration in the substrate storage container becomes abnormal, the purge gas can be supplied from the purge valve into the container body, so that the atmosphere in the container body deteriorates. This can contribute to improving the quality of the substrate stored in the container body.

It is a section explanatory view showing typically an embodiment of a substrate storage container and its management system concerning the present invention. It is explanatory drawing which shows typically the radio | wireless communication means in embodiment of the substrate storage container which concerns on this invention, and its management system. It is explanatory drawing which shows typically the detection means, radio | wireless communication means, and alerting | reporting means in embodiment of the substrate storage container which concerns on this invention, and its management system. It is front explanatory drawing which shows typically the container main body in another embodiment of the board | substrate storage container which concerns on this invention, and its management system.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. A substrate storage container management system according to the present embodiment includes a front open box type substrate storage container 1 as shown in FIGS. Detection means 20 provided to detect a use state such as an open / closed state of the lid 10, a small wireless communication means 30 of the IoT system provided in the substrate storage container 1, and a notification connected to the wireless communication means 30 Means 40, and the substrate storage container 1 is accessed to a predetermined related peripheral device, and the usage limit of the substrate storage container 1, that is, the replacement time is determined according to the comparison result of the arithmetic processing unit 33 of the wireless communication means 30. The notification means 40 is made to notify the contents according to the comparison result of the arithmetic processing unit 33.

  As shown in FIG. 1, the substrate storage container 1 includes, for example, a transparent container main body 2 for aligning and storing a plurality of semiconductor wafers W, a lid 10 for opening and closing the open front of the container main body 2, and A locking mechanism that locks the lid 10 fitted to the front surface of the container body 2, and is positioned and mounted on a load port device provided in the semiconductor processing apparatus or mounted on the inspection / inspection apparatus at the inspection / inspection time. Then, the basic performance is periodically tested or transported by a transport device in a semiconductor manufacturing factory.

  Each semiconductor wafer W is made of a silicon wafer of φ300 mm having a thickness of 775 μm, for example. The semiconductor wafer W is appropriately subjected to various processing and processing in the manufacturing process of semiconductor parts (up to 500 to 600 processes), and 25 pieces are horizontally inserted and stored in the container body 2. Align in the vertical direction of 2.

  The container body 2, the lid body 10, and the locking mechanism are each formed by combining a plurality of parts by injection molding with a molding material containing a predetermined resin. Examples of the resin contained in the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, cycloolefin copolymer, polyetherimide, polyether ketone, polyether ether ketone, polybutylene terephthalate, polyacetal, and liquid crystal polymer, and these resins. Examples include alloys.

  These resins are added with various antistatic agents such as conductive materials made of carbon fibers, carbon powder, carbon nanotubes, conductive polymers, and the like, and anions, cations, and nonionics as required. Further, benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, hindered amine-based ultraviolet absorbers are added, and glass fibers, carbon fibers, and the like that improve rigidity are also selectively added.

  The container body 2 is formed in a transparent front open box having an open front, and is positioned and mounted on the load port device with the opened front facing in the horizontal horizontal direction, or by holding the ceiling transport device, Be transported. The container body 2 is provided with a pair of left and right support pieces 3 for supporting the semiconductor wafer W substantially horizontally on the inner sides thereof, in other words, on the inner surfaces of the both side walls, respectively, Position restricting portions that restrict excessive insertion of W are integrally formed.

  The pair of left and right support pieces 3 are arranged at a predetermined pitch in the vertical direction, and between the support piece 3 and the support piece 3 adjacent to each other in the vertical direction, the side edge of the semiconductor wafer W floating from the support piece 3 is located laterally. A supporting groove 4 having a substantially U-shaped cross section to be supported is defined. Each support piece 3 is formed in a long and narrow plate shape that supports the peripheral edge of the side of the semiconductor wafer W, and a stepped portion that restricts the forward protrusion of the semiconductor wafer W is integrally formed on the front surface.

  A plurality (at least two or more) of mounting holes are drilled through the front or rear of the bottom plate of the container body 2, and a gas replacement filter valve is fitted into each mounting hole via a gasket. The plurality of filter valves are supported by the bottom plate of the container body 2 and include at least one supply valve 6 for supplying a purge gas such as nitrogen gas from the external purge gas supply device 5 to the inside of the container body. A pressure difference between the inside and outside of the substrate storage container 1 is made up of at least one exhaust valve that is supported by the bottom plate and exhausts air from the inside of the container body to the outside. It works to eliminate.

  Positioning tools 7 that are positioning mechanisms for positioning the substrate storage container 1 are provided on both sides of the front portion and the rear center of the back surface of the bottom plate of the container body 2 so that the plurality of positioning tools 7 draw a substantially Y-shaped plane. Arranged. Each positioning tool 7 is basically formed in a substantially V-shaped cross section having a substantially elliptical shape in a plane, and a recess having a pair of inclined surfaces thereof is directed downward, and the positioning pin 8 on the load port device is recessed from above. The container main body 2 functions to be positioned with high accuracy by fitting and sliding contact.

  A separate bottom plate is screwed onto the back surface of the bottom plate of the container body 2 in a horizontal manner through a screw tool, and the bottom plate exposes a plurality of air supply valves 6, exhaust valves, and positioning tools 7.

  At the center of the top plate of the container main body 2, a top flange 9 for transfer that is gripped by a ceiling transfer device of a semiconductor manufacturing factory is detachably mounted. On both sides of the upper and lower parts on the front inner periphery of the container main body 2, Each locking hole for the locking mechanism is drilled. A pair of left and right rear retainers capable of supporting the rear of the peripheral edge of the semiconductor wafer W are formed side by side on the left and right sides of the inner surface of the back wall of the container body 2, and the pair of rear retainers are arranged at a predetermined pitch in the vertical direction of the container body 2. Arranged in In addition, a substantially H-shaped mounting portion is defined at the center of both side walls of the container body 2, and a grip portion that functions for gripping operation is detachably mounted on each mounting portion.

  The lid body 10 includes a lid body 11 that is pressed and fitted into the opened front surface of the container body 2, and a surface plate 12 that covers the opened surface of the lid body 11. The peripheral wall of the lid body 11 contacts the inner periphery of the front face through a seal gasket for hermetic sealing.

  The lid body 11 is basically formed in a substantially dish-shaped section with a shallow bottom, and is provided with a plurality of reinforcing and mounting ribs inside, and on the back surface, which is the facing surface facing the semiconductor wafer W, A front retainer that elastically holds the semiconductor wafer W is mounted. Further, a frame-shaped fitting groove is formed in the rear peripheral edge portion of the lid body 11, and an elastically deformable seal gasket that press-contacts the front inner periphery of the container body 2 is tightly fitted in the fitting groove. In the upper and lower side portions of the peripheral wall of the lid body 11, a lock mechanism retracting hole facing the locking hole of the container body 2 is penetrated and drilled.

  The surface plate 12 is formed in a horizontally long front rectangle, and a plurality of reinforcing and mounting ribs, screw holes, and the like are provided. On both sides of the surface plate 12, operation holes for the locking mechanism are formed.

  The locking mechanism is a pair of left and right rotating plates that are pivotally supported on both the left and right sides of the lid body 11 of the lid body 10 and rotated from the outside, and slides in the vertical direction of the lid body 10 as the respective rotating plates rotate. A plurality of advancing / retracting plates; and a plurality of locking claws that move in and out of the intrusion holes of the lid main body 11 as the respective advancing / retracting plates slide, and come into and out of the locking holes of the container body 2. And the surface plate 12.

  Each rotating plate faces the operation hole of the surface plate 12 of the lid 10 and is rotated by an operation key of the load port device penetrating the operation hole. Each locking claw is basically bent and formed in a substantially L-shaped cross section, and has a rotatable roller at the tip thereof. The locking claw is pivotally supported in the vicinity of the retracting hole in the lid body 11 so as to advance and retreat. The roller plate is connected to the distal end of the moving plate via a pin, and the roller is brought into and out of the locking hole of the container body 2.

  As shown in FIG. 1, the detecting means 20 is mounted on the lower portion of the back wall of the container body 2 and projects a light beam obliquely toward the lower portion of the lid 10, and the back wall of the container body 2. The light projecting / receiving element 22 for a lid that projects a light beam horizontally in the lower direction of the lid 10 and the light projecting / receiving element 21 for a substrate and the lid mounted on the lower back of the lid body 11 of the lid 10. Wireless communication means comprising a retroreflective photoelectric sensor 24 provided with a retroreflector 23 capable of reflecting the light beam from the light projecting / receiving element 22 to the substrate light projecting / receiving element 21 and the lid light projecting / receiving element 22. 30. The substrate light projecting / receiving element 21 and the lid light projecting / receiving element 22 are arranged such that the substrate light projecting / receiving element 21 is positioned above the lid light projecting / receiving element 22.

  The detecting means 20 detects the presence / absence of the semiconductor wafer W by measuring the time during which the substrate light projecting / receiving element 21 cannot receive the reflected light from the regressive reflection plate 23, and the lid light projecting / receiving element 22 is regressively reflected. It functions to detect the number of times the lid 10 is opened and closed by measuring the time during which the reflected light from the plate 23 cannot be received. For example, after the presence / absence of the semiconductor wafer W is detected by measuring the time when the substrate light projecting / receiving element 21 cannot receive the reflected light from the regressive reflection plate 23, the light projecting / receiving element 22 for the lid is removed from the regressive reflection plate 23. When the time during which the reflected light cannot be received (for example, 10 seconds or more) is measured, the number of times the lid 10 is opened and closed is detected.

  The wireless communication means 30 is composed of an ultra-small IoT module that is lighter and smaller than a Japanese one-yen coin and has a substantially rectangular plane, and is attached to the bottom plate, the side wall, and the bottom plate of the container body 2. As shown in FIG. 1 and FIG. 2, the wireless communication unit 30 includes, for example, an external input unit 31 that inputs a detection value from a connected detection unit 20, a detection value of the detection unit 20, and a threshold value related to the substrate storage container 1. The data recording unit 32 for recording the data, the arithmetic processing unit 33 for comparing the detection value of the detection unit 20 with the threshold value for the substrate storage container 1, and storing the detection signal in the data recording unit 32, and external service providing unit Ultra-low power consumption type comprising: a wireless communication unit 34 that communicates with a battery; and a detection unit 20, an external input unit 31, a data recording unit 32, an arithmetic processing unit 33, and a battery unit 37 that supplies power to the wireless communication unit 34 The power is supplied from the power source 38.

The external input unit 31 is formed in a substantially stamp shape at a predetermined pitch on, for example, four sides of the wireless communication unit 30 and is surface-mounted on a printed board.
The data recording unit 32 stores the number of times the lid 10 is opened and closed, the acceleration value of the substrate storage container 1, the number of times the substrate storage container 1 is transferred, the transfer distance of the substrate storage container 1, The number of times the top flange 9 of the storage container 1 is held, the number of impacts of the substrate storage container 1, the maximum impact value of the substrate storage container 1, the maximum frequency of the substrate storage container 1, the number of heat shocks of the substrate storage container 1, The number of times of cleaning, the horizontal value of the substrate storage container 1, the oxygen concentration value in the substrate storage container 1, the number of uses in a predetermined process, etc. are recorded as necessary.

  In addition, the data recording unit 32 stores the threshold value for the substrate storage container 1 in the ROM of the memory as the opening / closing frequency threshold value of the lid 10, the acceleration threshold value of the substrate storage container 1, the transfer frequency threshold value of the substrate storage container 1, Conveyance distance threshold, top flange 9 holding frequency threshold of substrate storage container 1, impact frequency threshold of substrate storage container 1, maximum impact threshold of substrate storage container 1, maximum frequency threshold of substrate storage container 1, heat of substrate storage container 1 The shock frequency threshold value, the substrate storage container 1 cleaning frequency threshold value, the substrate storage container 1 horizontal threshold value, the oxygen concentration threshold value in the substrate storage container 1 and the like are recorded as necessary for comparison with the detection signal of the detection means 20. . The thresholds related to the substrate storage container 1 are determined in advance by a table test.

  The arithmetic processing unit 33 includes, for example, a 32-bit CPU that operates at a maximum of 32 MHz, and the CPU reads a predetermined program stored in the ROM of the data recording unit 32 using the RAM area of the data recording unit 32 as a work area. A predetermined function is realized as a computer.

  Specifically, the function for comparing the number of times the lid 10 is opened and closed recorded in the data recording unit 32 and the threshold value for the number of times the lid 10 is opened and closed. As a result of the comparison, the number of times the lid 10 is opened and closed is the number of times the lid 10 is opened and closed. A function for determining that the substrate storage container 1 is not yet at the limit of use when the threshold value is not approaching the threshold value, and as a result of comparison, if the opening / closing frequency of the lid body 10 approaches the threshold value for opening / closing the lid body 10, A function for determining that the use limit of the storage container 1 is near, and as a result of comparison, if the number of times the lid 10 is opened and closed exceeds the threshold value for the number of times the cover 10 is opened and closed, it is determined that the substrate storage container 1 has exceeded the use limit. Realize functionality. The relationship as to whether or not the number of times of opening / closing the lid 10 has approached the threshold value of the number of times of opening / closing the lid 10 is set in consideration of past use results and experimental results.

  The wireless communication unit 34 is connected to an external Internet server 36 or a large-capacity dedicated server 36 so as to be able to communicate with the 2.4 GHz band wirelessly, for example, by an omnidirectional antenna 35. As for the antenna 35 of the wireless communication unit 34, in addition to non-directionality, a high-gain directional type that can extend the communication distance, an inexpensive match rod type, a wire type that can be mounted with a low height, a board type, etc. are selective. Adopted.

  The server 36 is installed with, for example, a large number of computation cores, a large-capacity main memory, and various analysis software, and receives the number of times the substrate storage container 1 is used in a predetermined process from the wireless communication unit 34 and uses the substrate storage container 1. The limit is analyzed in detail, and the analysis result is transmitted to the wireless communication unit 34 and recorded and accumulated in the data recording unit 32. The server 36 transmits / receives data to / from the arithmetic processing unit 33 of the wireless communication unit 30 as necessary.

  The battery unit 37 is made of, for example, a small button battery or the like, and power is supplied from a power source 38 by a contact method or a non-contact method. The power source 38 is not particularly limited, but is installed in, for example, a load port device, an inspection / inspection device for inspecting / inspecting the substrate storage container 1 that is determined to be near the use limit.

  As shown in FIG. 3, the notification unit 40 includes, for example, an LED 41, a liquid crystal display (LCD) 42, a buzzer, a server 36 communicatively connected to the wireless communication unit 30 of the substrate storage container 1, etc. It is disposed on the bottom plate, load port device, inspection / inspection device and the like. As a result of the comparison by the arithmetic processing unit 33 of the wireless communication means 30, the notification means 40 does not give any notification when the substrate storage container 1 is not yet the use limit, and is determined that the use limit of the substrate storage container 1 is close. If the substrate storage container 1 is checked, preparation for inspection or replacement of the substrate storage container 1 is notified, and if it is determined that the use limit of the substrate storage container 1 has been exceeded, the replacement of the substrate storage container 1 is notified.

  Specifically, when the notification means 40 is an LED 41, when the substrate storage container 1 is not yet at the use limit, it does not blink / light up, and when it is determined that the use limit of the substrate storage container 1 is near, it blinks and stores the substrate. The preparation for inspection or replacement of the container 1 is notified, and when it is determined that the use limit of the substrate storage container 1 has been exceeded, it is lit to notify the replacement of the substrate storage container 1.

  In addition, when the wireless communication unit 30 receives or records the analysis result of the use limit of the substrate storage container 1 by the server 36, the notification unit 40 can be notified of the contents according to the analysis result. For example, when the server 36 analyzes that the substrate storage container 1 is not yet at the use limit, no notification is given, and when the server 36 analyzes that the use limit of the substrate storage container 1 is close, the inspection of the substrate storage container 1 is performed. Alternatively, when the server 36 analyzes that the replacement preparation is informed and the use limit of the substrate storage container 1 has been exceeded, the replacement of the substrate storage container 1 can be notified.

  The predetermined related peripheral device includes a load port device that accesses and positions a plurality of positioning tools 7 that are positioning mechanisms of the container body 2, and a ceiling transport device that accesses the top flange 9 of the container body 2 and holds it from above. Consists of. The load port device fixes and fixes the substrate storage container 1 or opens and closes the locking mechanism by automatically engaging the positioning pins 8 erected on the plurality of positioning tools 7 of the container body 2 from below. It functions to be unlocked or locked with a rotatable operation key of the mechanism. In addition, after unlocking the locking mechanism, the lid body 10 is removed from the container body 2 by adsorption by the adsorption mechanism of the lid body opening / closing mechanism, or the lid body 10 is removed from the front surface of the container body 2 by the lid body opening / closing mechanism and its adsorption. They are pressed and fitted by a mechanism.

  The ceiling transport device includes a gripping mechanism that can be moved up and down. After the gripping mechanism grips the top flange 9 of the substrate storage container 1 that is positioned and mounted on the load port device, the substrate transport container 1 is suspended and the load port is suspended. It is transported at high speed from a device to a predetermined device or location.

  In the above configuration, when a plurality of semiconductor chips are formed on the semiconductor wafer W, the substrate storage container 1 is positioned and mounted on the load port device via the plurality of positioning tools 7, and the locking mechanism of the lid 10 is provided. The unlocking operation is performed by the operation key of the lid opening / closing mechanism of the load port device, and the lid 10 is adsorbed and removed by the lid opening / closing mechanism or its adsorption mechanism, and then the semiconductor wafer is opened from the front of the container body 2 opened. W is taken out by a dedicated robot hand. When the semiconductor wafer W is taken out by the dedicated robot in this way, the semiconductor processing apparatus performs various types of processing and processing on the semiconductor wafer W, and after completion of these processing and processing, the semiconductor wafer W is stored in the container body 2 again.

  Next, the lid body 10 is fitted to the front surface of the container body 2 by the lid opening / closing mechanism of the load port device or its suction mechanism, and the locking mechanism of the lid body 10 is locked by the operation key of the load port device. The lid 10 is completely press-fitted on the front surface of the container body 2 and is transported by the ceiling transport device to the next processing step. By repeating such processing, a plurality of semiconductor chips are formed on the semiconductor wafer W.

  When a plurality of semiconductor chips are formed on the semiconductor wafer W, the substrate storage container 1 is transferred from the container body 2 to a dedicated container for transporting to the subsequent process, and the empty container body 2 is transferred to the substrate container 2. An unprocessed semiconductor wafer W is newly stored. The substrate storage container 1 in which a new semiconductor wafer W is stored is repeatedly used in the same operation as described above, but is used after being periodically cleaned with cleaning water from a cleaning device at a predetermined interval and dried. In addition, after a predetermined period, the basic performance is periodically tested by being mounted on the inspection / inspection apparatus.

  Now, when the substrate storage container 1 is used, the detection means 20 projects light rays from the substrate light projecting / receiving element 21 and the lid light projecting / receiving element 22 onto the regression reflecting plate 23 of the lid 10, respectively. 21 measures the time when the reflected light from the return reflection plate 23 cannot be received and detects the presence or absence of the semiconductor wafer W, so that the light projecting / receiving element 22 for the lid cannot receive the reflection light from the return reflection plate 23. Time is measured to detect the number of times the lid 10 is opened and closed, and the detected value is output to the wireless communication means 30.

  The wireless communication means 30 records the number of opening / closing of the lid 10 in the data recording unit 32, and the arithmetic processing unit 33 uses the number of times of opening / closing the lid 10 recorded in the data recording unit 32 and the threshold of opening / closing the lid 10. As a result of the comparison, if the number of times of opening / closing the lid 10 is not close to the threshold for the number of times of opening / closing the lid 10, it is determined that the substrate storage container 1 is not yet at the limit of use. When the arithmetic processing unit 33 of the wireless communication means 30 determines that the substrate storage container 1 is not yet at the limit of use, the notification means 40 does not notify anything and the use of the substrate storage container 1 is continued.

  On the other hand, when the number of times of opening / closing the lid 10 increases and the number of times of opening / closing the lid 10 approaches the threshold of opening / closing the lid 10, the arithmetic processing unit 33 stores the substrate due to deterioration of the lid 10. It is determined that the use limit of the container 1, that is, the replacement time is near. When the arithmetic processing unit 33 of the wireless communication unit 30 determines that the use limit of the substrate storage container 1 is near, the notification unit 40 blinks or displays a corresponding character or the like to display the substrate storage container 1. Notification of inspection or replacement preparation.

  According to the above, since the detection means 20, the wireless communication means 30, and the notification means 40 are arranged in the substrate storage container 1, and the substrate storage container 1 itself determines the performance and quality during use and testing, There is no clear judgment standard for the replacement time of the storage container 1, and even if there are individual differences in replacement time, replacement products can be easily selected, and the replacement work selection operation is simplified and speeded up. be able to. In addition, since it is possible to accurately determine the replacement timing of the substrate storage container 1, lifetime management becomes possible, and improvement in work efficiency of the production process can be greatly expected.

  Further, when the substrate storage container 1 is used so as to circulate in the entire production process of the semiconductor, even if the use history is different for each substrate storage container 1, the replacement time can be easily determined. Further, even when the substrate storage container 1 is used for each area of the semiconductor production process, it is not necessary to individually determine the criteria for determining the replacement timing of the substrate storage container 1 for each area, which is convenient.

Next, an embodiment in which the use limit of the substrate storage container 1 is determined not by the number of times of opening and closing the lid 10 but by acceleration will be described. In this case, the detection means 20 is an acceleration sensor 25 that is mounted on the bottom plate of the container body 2 of the substrate storage container 1 and detects the acceleration value thereof, and the acceleration sensor 25 is connected to the wireless communication means 30. (See FIG. 3).
The acceleration sensor 25 includes a capacitance detection method, a piezoresistive method, a heat detection method, and the like, but is not particularly limited.

  In the wireless communication unit 30, the acceleration value of the substrate storage container 1 from the detection unit 20 is recorded in the data recording unit 32, and the acceleration value of the substrate storage container 1 and the substrate recorded in the data recording unit 32 by the arithmetic processing unit 33. When the acceleration value of the substrate storage container 1 is not close to the acceleration value threshold value of the substrate storage container 1 as a result of comparison with the acceleration threshold value of the storage container 1 and comparison by the arithmetic processing unit 33, the substrate storage container 1 Judge that it is not yet the limit of use. On the other hand, when the acceleration value of the substrate storage container 1 exceeds the acceleration value threshold value of the substrate storage container 1 due to aging degradation of the substrate storage container 1, it is determined that the use limit of the substrate storage container 1 is near. The relationship as to whether or not the acceleration value of the substrate storage container 1 has approached the acceleration value threshold value of the substrate storage container 1 is set in consideration of past use results and experimental results.

As a result of the comparison by the arithmetic processing unit 33 of the wireless communication means 30, the notification means 40 does not give any notification when the substrate storage container 1 is not yet the use limit, and is determined that the use limit of the substrate storage container 1 is close. In this case, the preparation for inspection or replacement of the substrate storage container 1 is notified. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
Also in this embodiment, the same effect as the above embodiment can be expected, and the degree of deterioration of the initial performance of the substrate storage container 1 is grasped from the acceleration applied to the substrate storage container 1, and the substrate storage container 1 Obviously, the time for replacement can be determined.

  Next, an embodiment will be described in which the use limit of the substrate storage container 1 is determined based on the number of times the substrate storage container 1 is transported instead of the number of times the lid 10 is opened and closed. In this case, the detection means 20 is mounted on the bottom plate of the container body 2 of the substrate storage container 1 and the number of times the substrate storage container 1 is transferred, the transfer distance of the substrate storage container 1, the top flange of the substrate storage container 1 based on the acceleration. 9. Acceleration sensor 25 for detecting at least one of information values of the number of holding times, the number of impacts applied to the substrate storage container 1, the maximum impact value applied to the substrate storage container 1, and the maximum frequency applied to the substrate storage container 1. The acceleration sensor 25 is connected to the wireless communication means 30 (see FIG. 3).

  In the wireless communication unit 30, the information value of the substrate storage container 1 from the detection unit 20 is recorded in the data recording unit 32, and the information value of the substrate storage container 1 and the substrate recorded by the arithmetic processing unit 33 in the data recording unit 32. If the information value of the substrate storage container 1 is not close to the information threshold value of the substrate storage container 1 as a result of comparison with the information threshold value of the storage container 1 and comparison by the arithmetic processing unit 33, the substrate storage container 1 is still Judge that it is not the limit of use. On the other hand, when the information value of the substrate storage container 1 exceeds the information threshold value of the substrate storage container 1 due to damage of the substrate storage container 1 or the like, it is determined that the use limit of the substrate storage container 1 is near.

  As a result of the comparison by the arithmetic processing unit 33 of the wireless communication means 30, the notification means 40 does not give any notification when the substrate storage container 1 is not yet the use limit, and is determined that the use limit of the substrate storage container 1 is close. In this case, the preparation for inspection or replacement of the substrate storage container 1 is notified. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and the number of times the substrate storage container 1 is transferred, the transfer distance of the substrate storage container 1, the number of times the top flange 9 is held in the substrate storage container 1, the substrate storage container 1 It is apparent that the replacement timing of the substrate storage container 1 can be determined from the number of impacts applied to the substrate storage container 1, the maximum impact value applied to the substrate storage container 1, or the maximum frequency applied to the substrate storage container 1.

  Next, an embodiment will be described in which the use limit of the substrate storage container 1 is determined based on the number of heat shocks of the substrate storage container 1 instead of the number of times the lid 10 is opened and closed. In this case, when the semiconductor wafer W (hot wafer) heated in the substrate storage container 1 is stored in the substrate storage container 1 and a heat shock occurs around 100 ° C., the detection means 20 measures the temperature at the time of the heat shock. A temperature sensor 26 for detecting the number of heat shocks of the substrate storage container 1 is used, and this temperature sensor 26 is connected to the wireless communication means 30 (see FIG. 3).

The temperature sensor 26 includes a contact type, a non-contact type, an electric type, a mechanical type, and the like, and is installed inside the container body 2 that does not hinder the storage of the semiconductor wafer W, for example, near the rear wall on the rear side. .
In the wireless communication unit 30, the number of heat shocks from the detection unit 20 is recorded in the data recording unit 32, and the number of heat shocks recorded in the data recording unit 32 by the arithmetic processing unit 33 and the heat shock threshold value of the substrate storage container 1. When the number of heat shocks is not approaching the heat shock threshold value of the substrate storage container 1, it is determined that the substrate storage container 1 is not yet at the limit of use.

  On the other hand, as a result of comparison, when the number of heat shocks approaches the heat shock threshold of the substrate storage container 1, it is determined that the use limit of the substrate storage container 1 is close, and the number of heat shocks is the heat of the substrate storage container 1. When the shock threshold is exceeded, it is determined that the substrate storage container 1 has exceeded the use limit. The relationship as to whether or not the number of heat shocks has approached the heat shock threshold value of the substrate storage container 1 is set in consideration of past use results and experimental results.

  When the calculation processing unit 33 of the wireless communication unit 30 compares the notification means 40, when the substrate storage container 1 is not yet at the use limit, the notification means 40 is not notified and it is determined that the use limit of the substrate storage container 1 is near. In this case, the preparation for inspection or replacement of the substrate storage container 1 is notified, and if it is determined that the use limit of the substrate storage container 1 has been exceeded, the replacement of the substrate storage container 1 is notified. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  In the present embodiment, the same effect as the above embodiment can be expected, and the use limit of the substrate storage container 1 can be determined from the heat shock when the heated semiconductor wafer W is stored in the substrate storage container 1. it can.

  Next, an embodiment in which the use limit of the substrate storage container 1 is determined based on the number of times the substrate storage container 1 is cleaned will be described. In this case, when the substrate storage container 1 is washed with washing water and thermally dried at about 60 ° C., the detecting means 20 measures the drying temperature of the substrate storage container 1 to clean the substrate storage container 1. The temperature sensor 26 detects the number of times, and this temperature sensor 26 is connected to the wireless communication means 30 (see FIG. 3).

  The temperature sensor 26 is installed on the outer surface of the container body 2 and the lid body 10 of the substrate storage container 1, respectively. The measurement temperature of the temperature sensor 26 is set in consideration of the cleaning condition and the drying condition of the substrate storage container 1. The wireless communication unit 30 records the number of times of cleaning the substrate storage container 1 from the detection unit 20 in the data recording unit 32, and the number of times of cleaning the substrate storage container 1 recorded in the data recording unit 32 by the arithmetic processing unit 33. Is compared with the cleaning frequency threshold value of the substrate storage container 1 and, as a result of comparison by the arithmetic processing unit 33, if the cleaning frequency of the substrate storage container 1 is not close to the cleaning frequency threshold value of the substrate storage container 1, the substrate storage It is determined that the container 1 is not yet at the limit of use.

  On the other hand, as a result of the comparison, when the number of cleanings of the substrate storage container 1 approaches the cleaning frequency threshold of the substrate storage container 1, it is determined that the use limit of the substrate storage container 1 is close, and the substrate storage container 1 is cleaned. When the number of times exceeds the cleaning frequency threshold of the substrate storage container 1, it is determined that the substrate storage container 1 has exceeded the use limit. The number of cleanings of the substrate storage container 1 is set in consideration of the cleaning conditions and the drying conditions of the substrate storage container 1. In addition, the relationship of whether or not the number of times of cleaning the substrate storage container 1 has approached the threshold for cleaning the number of times of cleaning the substrate storage container 1 is set in consideration of past use results and experimental results.

  When the calculation processing unit 33 of the wireless communication unit 30 compares the notification means 40, when the substrate storage container 1 is not yet at the use limit, the notification means 40 is not notified and it is determined that the use limit of the substrate storage container 1 is near. In this case, the preparation for inspection or replacement of the substrate storage container 1 is notified, and if it is determined that the use limit of the substrate storage container 1 has been exceeded, the replacement of the substrate storage container 1 is notified. When preparation for inspection or replacement of the substrate storage container 1 is notified, it is preferable to confirm the external dimensions of the substrate storage container 1, the support height of the semiconductor wafer W in the container body 2, the horizontal accuracy, and the like. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  Also in this embodiment, the same effect as the above embodiment can be expected, and the use limit of the substrate container 1 can be determined from the number of times the substrate container 1 is cleaned.

  Next, an embodiment in which the use limit of the substrate storage container 1 is determined based on the level of the substrate storage container 1 will be described. In this case, the inclination sensor 27 that detects the level of the substrate storage container 1 when the substrate storage container 1 is positioned and mounted on the positioning pin 8 on the load port device via the positioning tool 7. The inclination sensor 27 is connected to the wireless communication means 30 (see FIG. 3).

The tilt sensor 27 is a type using bubbles or pendulums, a type using a potentiometer or magnetism, a type using the tilt of the electrolyte, etc., and is mounted on the bottom plate or bottom plate of the container body 2 in a highly accurate horizontal state. Is done.
In the wireless communication unit 30, the horizontal value of the substrate storage container 1 from the detection unit 20 is recorded in the data recording unit 32, and the horizontal value of the substrate storage container 1 and the substrate recorded by the arithmetic processing unit 33 in the data recording unit 32. If the horizontal value of the substrate storage container 1 is not close to the horizontal threshold value of the substrate storage container 1 as a result of comparison with the horizontal threshold value of the storage container 1 and comparison by the arithmetic processing unit 33, the substrate storage container 1 is still Judge that it is not the limit of use.

  On the other hand, as a result of comparison, when the horizontal value of the substrate storage container 1 approaches the horizontal threshold value of the substrate storage container 1, it is determined that the use limit of the substrate storage container 1 is close due to wear of the positioning tool 7 or the like. When the horizontal value of the substrate storage container 1 exceeds the horizontal threshold value of the substrate storage container 1, it is determined that the substrate storage container 1 has exceeded the use limit due to damage of the positioning tool 7 or the like. The relationship as to whether or not the horizontal value of the substrate storage container 1 has approached the horizontal threshold value of the substrate storage container 1 is set in consideration of past use results and experimental results.

When the calculation processing unit 33 of the wireless communication unit 30 compares the notification means 40, when the substrate storage container 1 is not yet at the use limit, the notification means 40 is not notified and it is determined that the use limit of the substrate storage container 1 is near. In this case, the preparation for inspection or replacement of the substrate storage container 1 is notified, and if it is determined that the use limit of the substrate storage container 1 has been exceeded, the replacement of the substrate storage container 1 is notified. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
In the present embodiment, the same effect as the above embodiment can be expected, and the use limit of the substrate storage container 1 is judged from the level of the substrate storage container 1 to prevent the inclination when the substrate storage container 1 is mounted. Is possible.

  Next, an embodiment in which the use limit of the substrate storage container 1 is determined based on the oxygen concentration in the substrate storage container 1 will be described. In this case, as shown in FIGS. 3 and 4, the detection means 20 detects the oxygen concentration in the substrate storage container 1 at regular intervals when the semiconductor wafer W is stored in the substrate storage container 1. The oxygen concentration sensor 28 is built in the container main body 2 together with the wireless communication means 30 as a sensor 28.

  The substrate body 2 of the substrate storage container 1 stores a semiconductor wafer W during or after the processing of metal wiring. A purge gas cylinder 13 for storing a purge gas such as nitrogen gas is provided on both sides of the interior rear side of the container body 2, and a purge gas cylinder 13 and a purge gas cylinder 13 are provided on the pair of air supply valves 6 from the viewpoint of contributing to the flow control of the purge gas. The hollow cylindrical purge nozzles 14 that communicate with each other are erected in a standing manner, and a plurality of injection holes 15 that inject purge gas forward in the container body 2 are formed in the peripheral wall of each purge nozzle 14 side by side in the vertical direction. The

  The oxygen concentration sensor 28 is installed in the rear side of the container body 2 that does not hinder the storage of the semiconductor wafer W, specifically, near the rear wall, and is used when the substrate storage container 1 is transported, stored, or performance-tested. Is done. The oxygen concentration sensor 28 includes a galvanic cell type, a zirconia solid electrolyte type, a magnetic type, and a wavelength tunable semiconductor laser spectroscopic type, but is not particularly limited.

  The wireless communication unit 30 records the oxygen concentration value in the substrate storage container 1 from the detection unit 20 in the data recording unit 32, and the oxygen in the substrate storage container 1 recorded in the data recording unit 32 by the arithmetic processing unit 33. When the concentration value is compared with the oxygen concentration threshold value of the substrate storage container 1 and compared by the arithmetic processing unit 33, the oxygen concentration value in the substrate storage container 1 is not close to the oxygen concentration threshold value of the substrate storage container 1. Determines that the substrate storage container 1 is not yet at the limit of use.

  On the other hand, as a result of comparison, when the oxygen concentration value in the substrate storage container 1 approaches the oxygen concentration threshold value of the substrate storage container 1, the use limit of the substrate storage container 1 is close due to deterioration of the container body 2 or the like. If the oxygen concentration value in the substrate storage container 1 exceeds the oxygen concentration threshold value of the substrate storage container 1, it is determined that the substrate storage container 1 has exceeded the use limit. The relationship as to whether or not the oxygen concentration value in the substrate storage container 1 has approached the oxygen concentration threshold value of the substrate storage container 1 is set in consideration of past use results and experimental results.

  When the calculation processing unit 33 of the wireless communication unit 30 compares the notification means 40, when the substrate storage container 1 is not yet at the use limit, the notification means 40 is not notified and it is determined that the use limit of the substrate storage container 1 is near. In this case, the preparation for inspection or replacement of the substrate storage container 1 is notified, and if it is determined that the use limit of the substrate storage container 1 has been exceeded, the replacement of the substrate storage container 1 is notified.

  Further, the purge gas cylinder 13 is compared with the oxygen concentration value in the substrate storage container 1 or the oxygen concentration threshold in the substrate storage container 1 as a result of the comparison by the arithmetic processing unit 33 of the wireless communication means 30. When the concentration threshold is exceeded, it is determined that the substrate storage container 1 is abnormal, the purge gas is supplied to the lower part of the purge nozzle 14, and the purge gas is diffused from the plurality of injection holes 15 of the purge nozzle 14 and functions to be injected.

  The purge gas cylinder 13 includes, for example, an electromagnetic valve that can open and close a passage communicating with the purge nozzle 14 of the substrate storage container 1. This electromagnetic valve is opened and closed by an ON-OFF signal from the wireless communication means 30, thereby supplying purge gas. Be controlled. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  Also in this embodiment, the same effect as the above embodiment can be expected, and the replacement timing of the substrate storage container 1 can be determined from the oxygen concentration value in the container body 2 of the substrate storage container 1. Furthermore, when the oxygen concentration value in the container main body 2 is abnormal, purge gas is supplied from the purge nozzle 14 into the container main body 2, so that the deterioration of the atmosphere in the container main body 2 can be effectively prevented, and the semiconductor wafer W This can greatly contribute to the improvement of the yield of the semiconductor chips formed on the substrate.

  In the above embodiment, the hollow purge nozzle 14 communicates with the air supply valve 6 in a standing manner. However, the present invention is not limited to this. For example, a purge gas cylinder 13 is installed on the outside of the substrate storage container 1, the back wall of the container body 2, etc., and a purge valve such as an electromagnetic valve for controlling the flow of the purge gas is provided in the purge gas circulation port drilled in the bottom plate of the container body 2. The purge valve and the purge gas cylinder 13 can be connected by a purge gas distribution pipe.

  As a result of comparison by the arithmetic processing unit 33 of the wireless communication means 30, the oxygen concentration value in the substrate storage container 1 approaches the oxygen concentration threshold value of the substrate storage container 1 or exceeds the oxygen concentration threshold value of the substrate storage container 1. In this case, the purge valve may be opened to supply the purge gas from the purge gas cylinder 13 to the inside of the substrate storage container 1.

  Further, the detection means 20 in the above embodiment is mounted on the lower portion of the back wall of the container body 2 and projects a light projecting / receiving element 22 for the lid body that horizontally projects light rays toward the lower portion of the lid body 10, and the lid body of the lid body 10. 11, a retroreflective photoelectric sensor 24 provided with a retroreflective plate 23 attached to the lower part of the rear surface of the cover 11 and capable of reflecting the light beam from the light projecting / receiving element 22 for the lid to the light projecting / receiving element 22 for the lid, and wireless communication means 30 may be connected.

  Further, the light projecting / receiving element for the lid body, which is mounted on the front peripheral edge of the container body 2 and projects the light beam toward the peripheral wall of the lid body 10 through a minute transmission hole in the front peripheral edge of the container body 2. 22 and a reflection reflector 23 attached to the peripheral wall of the lid body 10 and capable of reflecting the light beam from the lid light projecting / receiving element 22 to the lid light projecting / receiving element 22 through a minute transmission hole. The photoelectric sensor 24 may be configured to detect the number of times the lid body 10 is opened and closed by measuring the number of times the lid light projecting / receiving element 22 cannot receive light when the lid body 10 is removed.

  For the inspection / inspection apparatus and the server 36, an external input unit 31 for inputting a detection value from the detection unit 20, a data recording unit 32 for recording the detection value of the detection unit 20 and a threshold value for the substrate storage container 1, An arithmetic processing unit 33 that compares the detection value of the detection unit 20 with a threshold value related to the substrate storage container 1 or stores a detection signal in the data recording unit 32 and a wireless communication unit 34 that communicates with an external communication device are provided. Can be structured into a structure.

  Similar to the wireless communication means 30, the function of comparing the number of times the lid 10 is opened and closed recorded in the data recording unit 32 and the threshold value for the number of times the lid 10 is opened and closed. When the opening / closing frequency threshold of 10 is not approaching, the function of determining that the substrate storage container 1 is not yet the use limit, and as a result of comparison, the opening / closing frequency of the lid 10 approaches the opening / closing frequency threshold of the lid 10 The function of determining that the usage limit of the substrate storage container 1 is near, and as a result of comparison, if the number of times the lid 10 is opened and closed exceeds the threshold value of the number of times the lid 10 is opened and closed, the substrate storage container 1 will exceed the usage limit. It is possible to realize a function of determining that the value has been exceeded and to notify the notification unit 40 of the function.

  The substrate storage container and its management system according to the present invention are used in the field of manufacturing a substrate storage container for storing a substrate such as a semiconductor wafer.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container body 3 Support piece 6 Air supply valve 7 Positioning tool 8 Positioning pin 9 Top flange (flange)
10 Lid 13 Purge gas cylinder (Purge gas source)
14 Purge nozzle 15 Injection hole 20 Detection means 21 Substrate light projecting / receiving element 22 Lid light projecting / receiving element 23 Return reflection plate (regression reflection member)
24 Photoelectric sensor 25 Acceleration sensor 26 Temperature sensor 27 Inclination sensor 28 Oxygen concentration sensor 30 Wireless communication means 31 External input part 32 Data recording part 33 Operation processing part 34 Wireless communication part 35 Antenna 36 Server (external communication device, service providing means)
37 Battery unit 38 Power supply 40 Notification means 41 LED
42 Liquid crystal display W Semiconductor wafer (substrate)

Claims (14)

A substrate storage container comprising a container body capable of storing a plurality of substrates side by side and a detachable lid that opens and closes the opening of the container body, and is accessed by a predetermined related peripheral device,
Detection means provided on at least one of the container main body and the lid and detecting its use state; wireless communication means provided on either the container main body and the lid and capable of communicating with an external communication device; An informing means connected to the wireless communication means and provided in at least one of the container body and the lid,
At least one of the external communication device and the wireless communication means has a function of recording the detection value of the detection means and the threshold value related to the container body or the lid, and compares the detection value of the detection means and the threshold value related to the container body or the cover body. And a function to judge the use limit of the container body or lid according to the comparison result,
The informing means notifies at least one of the external communication device and the wireless communication means of the contents according to the result of comparing the detection value of the detecting means and the threshold value relating to the container body or the lid. container. A substrate storage container management system provided with a detection means provided in a substrate storage container for detecting the use state thereof, and a wireless communication means provided in the substrate storage container, wherein a predetermined related peripheral device is accessed,
The wireless communication unit includes a data recording unit that records at least a detection value of the detection unit and a threshold value related to the substrate storage container, and an arithmetic processing unit that compares at least the detection value of the detection unit and the threshold value related to the substrate storage container. Determine the usage limit of the substrate storage container according to the comparison result of the arithmetic processing unit,
A management system for a substrate storage container, wherein the substrate storage container can be selected based on the judgment of the wireless communication means.   The wireless communication unit includes an external input unit that inputs a detection value from the detection unit and a wireless communication unit that communicates with the external service providing unit, and the external service providing unit analyzes the usage limit of the substrate storage container. 3. The substrate storage container management system according to claim 2, wherein the analysis result by the service providing means is received by the wireless communication unit.   Informing means connected to the wireless communication means, the notifying means is based on the comparison result of the arithmetic processing unit of the wireless communication means, or the analysis result of the service providing means received by the wireless communication part of the wireless communication means The substrate storage container management system according to claim 3, wherein the content corresponding to the information is notified.   The substrate storage container includes a container main body that can store a plurality of substrates arranged in the vertical direction, and a lid that opens and closes the front surface of the container main body. A predetermined related peripheral device is accessed at the bottom of the container main body. A positioning mechanism is provided, and a flange is provided on the upper portion of the container main body to access and hold a predetermined related peripheral device, and the lid body can be accessed by a predetermined related peripheral device. 5. The management system for a substrate storage container according to claim 2, wherein a locking mechanism for locking the lid fitted on the front surface of the container body is provided.   A purge gas source is provided in the substrate storage container, an air supply valve capable of supplying purge gas to the container main body of the substrate storage container from the outside of the container main body, and an exhaust valve capable of exhausting air from the inside of the container main body to the outside The air supply valve is provided with a hollow purge nozzle connected to the purge gas source of the substrate storage container, and the purge nozzle has a plurality of injection holes for injecting purge gas into the container body. 6. The substrate storage container management system according to claim 5, which is provided.   A purge gas source is mounted on the substrate storage container, and a purge gas flow port is provided in the container body of the substrate storage container. A purge valve for controlling the purge gas is attached to the flow port so as to be opened and closed. 6. The substrate storage container management system according to claim 5, wherein the purge valve and the purge gas source are connected by piping. The detecting means is attached to the container body of the substrate storage container and projects a light projecting / receiving element for the lid, and projects light from the light projecting / receiving element for the lid, which is attached to the lid. A photoelectric sensor that detects the number of times the lid is opened and closed by measuring the time when the lid light projecting and receiving element is unable to receive the reflected light from the regression member.
The wireless communication means inputs the lid opening / closing frequency from the detection means to the external input unit and records it in the data recording unit, and the lid opening / closing frequency and the lid opening / closing frequency threshold recorded in the data recording unit As a result of the comparison in the arithmetic processing unit, as a result of the comparison in the arithmetic processing unit, when the lid opening / closing frequency approaches the lid opening / closing frequency threshold, it is determined that the use limit of the substrate storage container is close,
The informing means informs of the preparation for inspection or replacement of the substrate storage container when it is determined that the use limit of the substrate storage container is near as a result of the comparison by the arithmetic processing unit of the wireless communication means. Board storage container management system. The detection means is attached to the container body of the substrate storage container. From the acceleration of the substrate storage container, the number of times the substrate storage container is transferred, the distance of the substrate storage container, the number of times the substrate storage container is held by the flange, and the number of impacts applied to the substrate storage container. An acceleration sensor that detects at least one information value of a maximum impact value acting on the substrate storage container and a maximum frequency acting on the substrate storage container;
The wireless communication means inputs the information value from the detection means to the external input section and records it in the data recording section, and compares the information value recorded in the data recording section with the information threshold value of the substrate storage container by the arithmetic processing section. Then, as a result of comparison in this arithmetic processing unit, when the information value exceeds the information threshold value of the substrate storage container, it is determined that the use limit of the substrate storage container is close,
9. The informing means informs of the preparation for inspection or replacement of the substrate storage container when it is determined that the use limit of the substrate storage container is near as a result of comparison by the arithmetic processing unit of the wireless communication means. Board storage container management system. The detection means is a temperature sensor that detects the number of heat shocks of the substrate storage container by measuring the temperature at the time of the heat shock when a heat shock occurs by storing the heated substrate in the substrate storage container,
The wireless communication means inputs the heat shock frequency from the detection means to the external input unit and records it in the data recording unit, and calculates the heat shock frequency recorded in the data recording unit and the heat shock threshold value of the substrate storage container. When the number of heat shocks approaches the heat shock value threshold of the substrate storage container, it is determined that the use limit of the substrate storage container is close,
9. The informing means informs of the preparation for inspection or replacement of the substrate storage container when it is determined that the use limit of the substrate storage container is near as a result of comparison by the arithmetic processing unit of the wireless communication means. Board storage container management system. The detection means is a temperature sensor that measures the drying temperature of the substrate storage container and detects the number of times of cleaning the substrate storage container when the substrate storage container is washed and thermally dried.
The wireless communication means inputs the number of cleanings of the substrate storage container from the detection means to the external input unit and records it in the data recording unit, and the number of cleanings of the substrate storage container recorded in the data recording unit and the cleaning of the substrate storage container When the number of cleanings of the substrate storage container is close to the threshold of cleaning times of the substrate storage container, the use limit of the substrate storage container is close. Judgment
The notifying means notifies preparations for inspection or replacement of the substrate storage container when it is determined that the use limit of the substrate storage container is close as a result of comparison by the arithmetic processing unit of the wireless communication means. Board storage container management system. The detection means is an oxygen concentration sensor that detects the oxygen concentration in the substrate storage container when the substrate is stored in the substrate storage container.
The wireless communication means inputs the oxygen concentration value in the substrate storage container from the detection means to the external input unit and records it in the data recording unit, and the oxygen concentration value in the substrate storage container recorded in the data recording unit and the substrate When the oxygen concentration threshold value in the substrate storage container approaches at least the oxygen concentration threshold value in the substrate storage container as a result of comparison in the calculation processing unit with the oxygen concentration threshold value in the storage container, Judge that the container usage limit is near,
9. The informing means informs of the preparation for inspection or replacement of the substrate storage container when it is determined that the use limit of the substrate storage container is near as a result of comparison by the arithmetic processing unit of the wireless communication means. Board storage container management system.   As for the purge gas source of the substrate storage container, when the arithmetic processing unit of the wireless communication means compares the oxygen concentration value in the substrate storage container with the oxygen concentration threshold value of the substrate storage container, the oxygen concentration value in the substrate storage container is at least the substrate storage 13. The substrate storage container management system according to claim 12, wherein a purge gas is supplied to the purge nozzle when the oxygen concentration threshold of the container is approached.   As for the purge gas source of the substrate storage container, when the arithmetic processing unit of the wireless communication means compares the oxygen concentration value in the substrate storage container with the oxygen concentration threshold value of the substrate storage container, the oxygen concentration value in the substrate storage container is at least the substrate storage 13. The substrate storage container management system according to claim 12, wherein a purge gas is supplied to the purge valve when the oxygen concentration threshold of the container is approached.

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