JP2017191802A - Electronic device manufacturing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electronic device manufacturing apparatus capable of easily performing alignment every time and manufacturing an electronic device with a small number of manufacturing steps and high precision in each step required when TFT or the like is manufactured by printing.SOLUTION: An electronic device manufacturing apparatus includes an impression cylinder 110 rotating while holding a sheet, a plate cylinder 130 for transferring functional ink to the sheet held on a holding surface of the impression cylinder 110, sheet position detecting means 301, 302 for detecting the position in a circumferential direction and an axial direction of a pattern of the sheet held by the impression cylinder 110, right and left position adjusting means 171 to 183 and 219 for adjusting the position in the axial position of the plate cylinder 130, top and bottom position adjusting means 188, 189 and 203 for adjusting the rotational phase of the impression cylinder 110 and the plate cylinder 130, and a control device 200 for controlling the right and left position adjusting means and the top and bottom position adjusting means based on the positions in the circumferential direction and the axial direction of the sheet which are obtained by the sheet position detecting means when the functional ink is transferred to the sheet.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an electronic device manufacturing apparatus that manufactures an electronic device by laminating functional materials on a flexible substrate to form a functional layer.

  A flexible electronic device such as a thin film transistor (TFT) in which functional layers such as a gate layer (G layer), a gate insulator layer (GI layer), and a source and drain layer (SD layer) are stacked on a substrate is, for example, As described in Patent Document 1, the substrate is transported by holding the substrate on the impression cylinder and rotating the impression cylinder, while the ink layer is placed on the rubber cylinder that can come into contact with the impression cylinder. And providing a convex pattern on the plate cylinder that can come into contact with the rubber cylinder to contact the rubber cylinder, and removing ink in a portion of the ink layer on the rubber cylinder that is in contact with the convex pattern. After forming an ink pattern on the rubber cylinder, a plurality of functional layers are provided on the base material by transferring the ink pattern on the rubber cylinder to the base material held on the pressure cylinder. Manufactured by the printing method It is known.

  Further, for example, in Patent Document 2 below, when forming an electrode pattern with a conductive material on a substrate such as a thin film transistor using a reversal printing method with high resolution, the conductive material is accurately formed on a specific portion of the substrate. A printing method is described.

Japanese Patent Laying-Open No. 2015-153796 JP 2007-268715 A JP2013-241275A

  Here, in order to manufacture a TFT by a printing method, the G layer, the GI layer, the SD layer, and the semiconductor must be printed with high accuracy on the same base material. However, in the method of Patent Document 2, each functional layer can be printed on the base material with high accuracy. However, in the case of forming other layers on top of each other, the base material is moved to each device, and the precise layers are precisely There is a problem that preparation work such as alignment must be performed, which increases the number of manufacturing steps and increases the burden on the operator.

  For this reason, the present invention can easily perform alignment at each step required when manufacturing a TFT or the like by a printing method, and can manufacture an electronic device with a small number of manufacturing steps and high accuracy. An object is to provide an electronic device manufacturing apparatus.

In order to solve the above-described problem, an electronic device manufacturing apparatus according to the present invention includes:
An electronic device manufacturing apparatus for manufacturing an electronic device by laminating a functional material on a flexible substrate to form a functional layer,
An impression cylinder that holds and rotates the substrate;
An ink transfer means for transferring a functional ink made of a functional material to the base material held by the impression cylinder;
Base material position detecting means for detecting the position of the base material held by the impression cylinder;
Left and right position adjusting means for adjusting the axial position of the impression cylinder of the ink transfer means;
The top and bottom position adjusting means for adjusting the transfer position in the substrate transport direction of the impression cylinder and the ink transfer means,
Control means for controlling the left-right position adjusting means and the top-and-bottom position adjusting means based on the position of the base material acquired by the base material position detecting means when the functional ink is transferred to the base material by the ink transfer means. It is characterized by comprising.

An electronic device manufacturing apparatus according to the present invention is
The ink transfer means is a transfer cylinder;
An impression cylinder driving device and a transfer cylinder driving device for respectively driving the impression cylinder and the transfer cylinder;
The top-and-bottom position adjusting means is composed of at least one of the impression cylinder driving device and the transfer cylinder driving device,
The control device controls at least one of the transfer cylinder driving device and the transfer cylinder driving device so that the position of the transfer cylinder in the rotation direction with respect to the position of the base material held in the impression cylinder in the substrate conveyance direction is set. It is characterized by adjusting.

An electronic device manufacturing apparatus according to the present invention is
The ink transfer means is a transfer cylinder;
A transfer cylinder driving device for driving the transfer cylinder;
The top-and-bottom position adjusting means is composed of the transfer cylinder driving device,
The control device adjusts the position of the transfer cylinder in the rotation direction with respect to the position of the substrate held in the impression cylinder in the substrate transport direction by controlling only the transfer cylinder driving device.

  According to the electronic device manufacturing apparatus according to the present invention, in each process required when manufacturing a TFT or the like by a printing method, alignment is easily performed each time, and an electronic device is manufactured with a small number of manufacturing steps and high accuracy. be able to.

It is a principal part schematic block diagram of 1st embodiment of the electronic device manufacturing apparatus which concerns on this invention. FIG. 2 is a sectional view taken along the line II-II in FIG. 1. FIG. 3 is a view taken along line III-III in FIG. 2. It is the figure seen from the arrow line IV direction of FIG. It is a front view which shows an example of an alignment mark. It is a control block diagram of the principal part of the electronic device manufacturing apparatus of FIG. It is explanatory drawing of the manufacture procedure of the thin-film transistor (TFT) by the electronic device manufacturing apparatus of FIG. It is explanatory drawing of the manufacturing procedure following FIG. 7A. It is explanatory drawing of the manufacturing procedure following FIG. 7B. It is explanatory drawing of the manufacturing procedure following FIG. 7C. It is explanatory drawing of the manufacturing procedure following FIG. 7D. It is explanatory drawing of the manufacturing procedure following FIG. 7E. It is explanatory drawing of the manufacturing procedure following FIG. 7F. It is explanatory drawing of the manufacturing procedure following FIG. 7G. It is explanatory drawing of the manufacturing procedure following FIG. 7H. It is explanatory drawing of the manufacturing procedure following FIG. 7I. It is a front view which shows an example of the alignment mark in 2nd embodiment of the electronic device manufacturing apparatus which concerns on this invention.

  Although an embodiment of an electronic device manufacturing apparatus according to the present invention will be described with reference to the drawings, the present invention is not limited to only the following embodiments described with reference to the drawings.

<First embodiment>
A first embodiment in the case of manufacturing a thin film transistor (TFT) with an electronic device manufacturing apparatus according to the present invention will be described below based on FIGS. 1 to 6 and FIGS. 7A to 7J.

  In FIG. 1, 100A is a main frame, 110 is an impression cylinder, 120 is a supply cylinder, 130 is a plate cylinder, 140 is a coater cylinder, 150 is a discharge cylinder, 191 is an ink jet apparatus, 192 is an insulating ink supply apparatus, and 301 is an alignment camera. It is.

  The impression cylinder 110 is rotatably supported and has a diameter size (sixfold diameter) that can include six effective surfaces in the circumferential direction of the outer surface as a holding surface for holding a sheet that is a flexible substrate. However, it has a so-called skeleton type in which only three effective surfaces 110a to 110c are provided at equal intervals in the circumferential direction.

  The impression cylinder 110 includes gripping claw devices 111A to 111C that detachably hold the front side (front end side) of the sheet in each of the effective surfaces 110a to 110c, and the rear side (end side) of the sheet in the conveyance direction. Suction heads 112 </ b> A to 112 </ b> C (for example, see Patent Document 2). The suction heads 112A to 112C are connected to a suction pump 217 via valves 218A to 218C, respectively (see FIG. 5).

  The supply cylinder 120, which is a base material supply means, is rotatably supported so as to face the impression cylinder 110, and has a diameter size (double diameter) that can include two effective surfaces in the circumferential direction of the outer surface. However, the impression cylinder has only one effective surface 120a and has a gripper claw device 121 that detachably grips the front side (front end side) in the sheet conveyance direction on the effective surface 120a. Every other sheet can be supplied to and held by the effective surfaces 110a to 110c of 110.

  The discharge drum 150 serving as a substrate discharge means is located at a position opposite to the pressure drum 110 and the supply drum 120, that is, the holding position of the pressure drum 110 that holds the sheet from the supply drum 120. The cylinder 110 has a diameter size (double diameter) that is supported rotatably so as to face the impression cylinder 110 on the downstream side in the rotation direction (sheet conveyance direction) of the cylinder 110 and can have two effective surfaces in the circumferential direction of the outer surface. However, it has only one effective surface 150a, and has a gripper device 151 that detachably grips the front side (front end side) in the sheet conveying direction on the effective surface 150a.

  The plate cylinder 130 serving as a transfer cylinder as an ink transfer means is located at a position where the impression cylinder 110 and the supply cylinder 120 face each other, that is, from a holding position where the impression cylinder 110 holds a sheet from the supply cylinder 120. Also, the downstream side of the impression cylinder 110 in the rotation direction (sheet conveyance direction) and the position where the impression cylinder 110 and the discharge cylinder 150 face each other, that is, the separation of the impression cylinder 110 to release the sheet to the discharge cylinder 150. A rotational position of the impression cylinder 110 with respect to the upstream side of the position (the conveyance direction of the sheet) is arranged to be rotatable, and an operating position in contact with the impression cylinder 110 and a retracted position separated from the impression cylinder 110. It is supported so that it can be slid linearly between them (details will be described later).

  In addition, the plate cylinder 130 includes a plate surface Pg for the G layer which is a first plate surface on which a pattern corresponding to the gate layer (G layer) which is the first functional layer is formed, and a third functional layer. Holding surface for holding a double-size plate P formed so that a plate surface Psd for SD layer, which is a second plate surface on which a pattern corresponding to a certain source and drain layer (SD layer) is formed, is arranged in the circumferential direction A plate holding device 131 that has a diameter size (double diameter) having an effective surface 130a on the outer surface and detachably holds one end side (tip side) and the other end side (end side) of the plate P. have.

  The ink jet device 191 which is a first functional ink supply means is made of a material which forms a G layer and an SD layer with respect to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 located at the retracted position. The conductive ink which is the first functional ink can be jetted and supplied.

  The alignment camera 301 is an imaging device for imaging the alignment mark m (see FIG. 6) attached to the sheet conveyed by the impression cylinder 110. As shown in FIG. 6, the alignment mark m is, for example, on the upstream side of the sheet S (S1, S2, S3, S4,...) In the conveyance direction (in the example shown in FIG. One is attached to each side of the impression cylinder in the axial direction (the direction perpendicular to the conveying direction and along the sheet S). In the present embodiment, in order to image these alignment marks m, the two alignment cameras 301 are disposed opposite to each other on both sides in the axial direction of the inspection cylinder 120B. Information about the image captured by each alignment camera 301 is input to an image processing device 302 (see FIG. 5).

  The coater cylinder 140 serving as a transfer cylinder includes a downstream side of the pressure cylinder 110 in the rotation direction (sheet conveyance direction) of the impression cylinder 110 and the plate cylinder 130, and the impression cylinder 110 and the discharge cylinder. It is possible to rotate between the position facing the cylinder 150, that is, the upstream side of the impression cylinder 110 in the rotation direction (sheet conveying direction) of the impression cylinder 110 with respect to the separation position where the sheet is released to the discharge cylinder 150. A blanket B made of silicon resin having a size corresponding to the size of the sheet is wound around the outer periphery (single diameter), an operating position in contact with the pressure drum 110, and a retracted position separated from the pressure drum 110 The plate cylinder 130 is supported by a mechanism similar to that of the plate cylinder 130 so as to be slidable linearly.

  The insulating ink supply device 192, which is a second functional ink supply means, has a gate insulator layer (GI layer) which is a second functional layer on the blanket B of the coater cylinder 140 located at the retracted position. Insulating ink, which is a second functional ink made of a material forming the above, can be sent out and supplied.

  As shown in FIG. 2, the main frames 100A and 100B are arranged on both sides in the axial direction of the plate cylinder 130 so as to make a pair, and the plate cylinder 130 has both ends thereof. The part side penetrates the main frames 100A and 100B, respectively. Bearings 161 are fitted coaxially to both ends of the plate cylinder 130, respectively. Sleeves 162 are coaxially fitted on the outer periphery of the bearing 161.

  As shown in FIGS. 2 and 3, a linear guide rail 163 is formed on the outer surface of the main frame 100A in the axial direction of the plate cylinder 130 so as to form a pair with the plate cylinder 130 interposed therebetween. It is arranged so that its longitudinal direction is directed in a direction parallel to the direction connecting the axis of the impression cylinder 110 and the axis of the plate cylinder 130. Sliders 164 that are slidable along the longitudinal direction of the guide rail 163 are respectively attached to the guide rails 163 on the outer side in the axial direction of the plate cylinder 130.

  A subframe 165 is attached outside the slider 164 in the axial direction of the plate cylinder 130 so as to cover between the pair of guide rails 163, and the subframe 165 attaches the sleeve 162. The plate cylinder 130 is held so as to be slidable in the axial direction.

  On the other hand, as shown in FIG. 2, guide rails 163, sliders 164, and subframes 165 are provided on the outer side of the main frame 100B in the axial direction of the plate cylinder 130 in the same manner as in the case of the main frame 100A. ing.

  That is, the plate cylinder 130 is rotatably supported with respect to the subframe 165 via the sleeve 162 and the bearing 161, and the sleeve 162 slides and moves in the axial direction. 161 is slidable in the axial direction via 161, and further, the subframe 165 is slid along the guide rail 163, thereby moving toward and away from the impression cylinder 110 in a straight line. It is like that.

  In FIG. 3, reference numeral 166 denotes a stopper provided on the main frame 100A for restricting the movement of the sub frame 165 so that the plate cylinder 130 can be positioned at the retracted position. The main frame 100B is provided in the same manner.

  As shown in FIG. 3, the servo motor 215 directs the axial direction of the drive shaft 215 a along the longitudinal direction of the guide rail 163 on the axially outer surface of the plate cylinder 130 of the main frame 100 </ b> A. Oriented and attached. One end of a screw shaft 167 is coaxially connected and fixed to the tip of the drive shaft 215a of the servo motor 215. The other end side of the screw shaft 167 is rotatably supported by a support member 169 provided on the axially outer side surface of the plate cylinder 130 of the main frame 100A.

  A nut block 168 is screwed onto the screw shaft 167. The nut block 168 is provided with a bracket 168a. The bracket 168a is connected to a bracket 165a provided on the subframe 165.

  On the other hand, the brackets 165a and 168a, the screw shaft 167, the nut block 168, and the support member 169 are disposed on the outside of the main frame 100B in the axial direction of the plate cylinder 130 in the same manner as in the case of the main frame 100A. , The servo motor 215 and the like are provided.

  In other words, when the servo motor 215 is operated to drive and rotate the drive shaft 215a, the screw shaft 167 supported by the support member 169 rotates, so that the nut along the axial direction of the screw shaft 167 is rotated. The block 168 can be moved, and the sub-frame 165 can be moved along the longitudinal direction of the guide rail 163 via the brackets 168a and 165a.

2 and 3, reference numeral 226 denotes a linear scale 226a attached to the subframe 165 along the longitudinal direction of the left and right guide rails 163, respectively, to the main frame 100A and the main frame 100B. It is a position detector that detects the radial position of the plate cylinder 130 with respect to the impression cylinder 110 by reading with the sensor 226b.
2 and 3, reference numeral 228 denotes a linear scale 228a attached to the sleeve 162 along the axial direction of the plate cylinder 130 by reading with a sensor 228b attached to the subframe 165. It is a position detector that detects the position of the plate cylinder 130 in the axial direction with respect to the impression cylinder 110.

  As shown in FIG. 2, a direct drive (DD) type motor 203 as a transfer cylinder driving device is coaxially connected to one end side (right end side in FIG. 2) of the plate cylinder 130 via a bracket 189. The motor 203 is supported by the sleeve 162 via a bracket 188.

  In other words, the motor 203 can independently rotate the plate cylinder 130 via the bracket 189, and the plate cylinder 130 together with the sleeve 162 and the bearing 161 via the bracket 188. It can be moved integrally in the axial direction.

  Further, the base end side (left end side in FIG. 2) of the transmission cylinder 171 is fitted coaxially to the other end side (left end side in FIG. 2) of the plate cylinder 130. An outer peripheral side of an annular rotating plate 172 is coaxially and integrally attached to the distal end side (left end side in FIG. 2) of the transmission cylinder 171. On both axial surfaces of the rotating plate 172, thrust bearings 173 that are paired with the rotating plate 172 interposed therebetween are disposed so as to be coaxial with the hole of the rotating plate 172, respectively.

  On the inner side of the hole of the rotating plate 172 and the thrust bearing 173, the distal end side of the screw shaft 174 (FIG. 2) having a screw thread between the middle in the axial direction and the proximal end (near the left end in FIG. 2). The middle, right end side) is loosely fitted. A pair of flange plates 175 having an annular shape for holding the rotary plate 172 and the thrust bearing 173 in the axial direction are fitted on the tip side (right end side in FIG. 2) of the screw shaft 174 in a coaxial manner. ing.

  A nut block 176 is screwed in the middle in the axial direction of the screw shaft 174 and near the base end (near the left end in FIG. 2). The nut block 176 is fixedly supported by the support plate 177 so as to penetrate the support plate 177 supported by the subframe 165 via a support stay 177a.

  That is, when the screw shaft 174 is rotated, the screw shaft 174 moves in the axial direction with respect to the nut block 176, and the flange plate 175, the thrust bearing 173, the rotary plate 172, and the transmission cylinder 171 are moved. The plate cylinder 130 can be moved in the axial direction via the screw cylinder 130. When the plate cylinder 130 rotates, the transmission cylinder 171 and the rotating plate 172 rotate. The rotational force is not transmitted to the shaft 174.

  As shown in FIGS. 2 and 4, a gear 178 is coaxially attached to the proximal end side (left end side in FIG. 2) of the screw shaft 174. A gear 179 is engaged with the gear 178. The gear 179 is coaxially fixed to the distal end surface of the rotating shaft 180 that is supported by the support plate 177 so that the base end side is rotatable. A worm wheel 181 is coaxially attached to the distal end side (left end side in FIG. 2) of the rotating shaft 180.

  A worm shaft 182 is engaged with the worm wheel 181. Both ends of the worm shaft 182 are rotatably supported by the support plate 177 via support members 183. A drive shaft of a servo motor 219 supported by the support plate 177 is connected to one end side (right end side in FIG. 4) of the worm shaft 182 in a coaxial manner.

  That is, when the worm shaft 182 is rotated by operating the servo motor 219, the screw shaft 174 is rotated with respect to the nut block 176 via the worm wheel 181, the rotation shaft 180, and the gears 178 and 179. Thus, it can be moved in the axial direction.

  As shown in FIG. 5, a motor 201 as an impression cylinder driving device that independently drives the impression cylinder 110, a motor 202 that independently drives the supply cylinder 120, and a motor 203 that independently drives the plate cylinder 130. The motor 204 for independently rotating the coater cylinder 140 and the motor 205 for independently rotating the discharge cylinder 150 are electrically connected to the output unit of the control device 200 as control means. The output unit of the control device 200 is electrically connected to the ink jet device 191 and the insulating ink supply device 192.

  Further, the output unit of the control device 200 is configured so that the holding claw device 111A of the impression cylinder 110 is opposed to the holding claw device 111A to 111C of the impression cylinder 110 and the holding claw device 121 of the supply cylinder 120. To switch the opening and closing of the holding claw device 121 of the supply cylinder 120 and the actuator 211 for switching the track of the cam follower cam for opening and closing the holding claw device 111A to 111C to switch the opening and closing of the holding claw device 111A to 111C. The cam follower cam trajectory for switching the cam follower 12 that opens and closes the pawl device 12 is electrically connected to each other (for the cam trajectory switching mechanism, “printing cylinder” and “ The cam trajectory switching mechanism of the “feed side transfer cylinder” (refer to FIG. 5 in particular)).

  Further, the output unit of the control device 200 opens and closes the gripper claw devices 111A to 111C when the gripper claw devices 111A to 111C of the impression cylinder 110 and the gripper claw device 151 of the discharge drum 150 are opposed to each other. A cam follower cam that opens and closes the gripper claw device 151 to switch between an actuator 213 that switches the trajectory of the cam follower cam that opens and closes the gripper claw device 111A to 111C so as to switch. Are electrically connected to the actuator 214 for switching the trajectory of each of them (for the cam trajectory switching mechanism, “second paper discharge side transfer cylinder” and “paper take-up cylinder” described in Patent Document 2). (See FIG. 4 in particular).

  The output unit of the control device 200 is electrically connected to the suction pump 217 and the valves 218A to 218C, respectively. The valves 218A to 218C are connected to the gripper claw of the impression cylinder 110, respectively. When the devices 111A to 111C face the holding claw device 121 of the supply cylinder 120 and the holding claw device 151 of the discharge cylinder 150, when the devices 111A to 111C are opened, suction from the suction heads 112A to 112C by the suction pump 217 is performed. In the closed state, the suction from the suction heads 112A to 112C by the suction pump 217 can be stopped.

  The output unit of the control device 200 includes the servo motor 215 that slides the plate cylinder 130 along the guide rail 163, and the coater cylinder 140 along the guide rail in the same manner as the plate cylinder 130. The servo motor 216 for sliding movement is electrically connected to the servo motor 219 for moving the plate cylinder 130 along the axial direction.

  On the other hand, the rotary unit 221 for detecting the rotational phase of the impression cylinder 110, the rotary encoder 222 for detecting the rotational phase of the supply cylinder 120, and the rotational phase of the plate cylinder 130 are input to the control device 200. A rotary encoder 223 for detecting, a rotary encoder 224 for detecting the rotational phase of the coater cylinder 140, and a rotary encoder 225 for detecting the rotational phase of the discharge cylinder 150 are electrically connected.

  Further, the input unit of the control device 200 detects the position detector 226 that detects the radial position of the plate cylinder 130 with respect to the impression cylinder 110 and the position of the coater cylinder 140 with respect to the impression cylinder 110. The position detector 227 and the position detector 228 for detecting the position of the plate cylinder 130 in the axial direction with respect to the impression cylinder are electrically connected to each other.

  Further, an input unit of the control device 200 receives information on the image captured by the alignment camera 301 and the rotation phase of the impression cylinder 110 detected by the rotary encoder 221 on the sheet S conveyed by the impression cylinder 110. The image processing apparatus 302 is electrically connected to obtain a positional deviation amount in a rotation direction (sheet conveyance direction) with respect to a reference position of the alignment mark m and an axial direction of the impression cylinder (direction orthogonal to the conveyance direction and along the sheet). Has been.

  That is, the control device 200 performs the rotation operation of the motors 201 to 205, the ink jet device 191 based on information from the rotary encoders 221 to 225, the position detectors 226, 227, and 228 and the image processing device 302. And the operation of the insulating ink supply device 192, the expansion / contraction operation of the actuators 211-214, the rotation operation of the servo motors 215, 216, the opening / closing operation of the valves 218A-218C, the operation of the servo motor 219, etc. (Details will be described later).

  In the present embodiment, the alignment camera 301, the image processing apparatus 302, and the like constitute base material position detection means, and the transmission cylinder 171, the rotary plate 172, the thrust bearing 173, the screw shaft 174, and the Left and right position adjusting means by a flange plate 175, the nut block 176, the support plate 177, the gears 178 and 179, the rotary shaft 180, the worm wheel 181, the worm shaft 182, the support member 183, the servo motor 219, etc. The brackets 188 and 189, the motor 203 and the like constitute a top / bottom position adjusting means.

  Next, a TFT manufacturing method by the electronic device manufacturing apparatus according to the present embodiment will be described with reference to FIGS.

  Initially, the plate cylinder 130 and the coater cylinder 140 are located at the retracted position away from the impression cylinder 110, and the valves 218A to 218C are in the closed state. First, between the plate cylinder 130, the plate cylinder 130, and the coater cylinder 140, which are defined in advance based on various manufacturing conditions such as the thickness of the plate P, the sheet, the functional layer, etc. of the plate cylinder 130. When the length (interval) is input to the control device 200, the control device 200 sets the positions of the plate cylinder 130 and the coater cylinder 140 that are the intervals as the operation positions. At the same time, the servo motor 219 is operated by operating the control device 200 so as to adjust the registration of the plate cylinder 130 in the width direction of the plate P.

  The control device 200 operates the suction pump 217 and rotates the drums 110, 120, 130, and 140 at a predetermined cycle based on information from the rotary encoders 221 to 225. The operation of the motors 201 to 205 is controlled.

  The holding claw device 121 of the supply cylinder 120 holds the leading end side of the first sheet S1, holds the sheet S1 on the effective surface 120a of the supply cylinder 120, and conveys the sheet S1. When the gripper device 121 faces the gripper device 111A of the impression cylinder 110, the control device 200 determines the gripper device 121 of the supply drum 120 based on information from the rotary encoders 221 and 222. From the effective surface 120a of the supply cylinder 120 to the effective surface 110a of the impression cylinder 110, the sheet S1 is held from the effective surface 120a of the supply cylinder 120 by changing the holding claw device 111A of the impression cylinder 110 from The operation of the actuators 211 and 212 is controlled (see FIG. 7A), and the gripper claw device 11 of the impression cylinder 110 is used. The terminal side of the sheet S1, which is applied to the tip side A so as to suck and hold the suction head 112A, releasing control the valve 218A. As a result, the sheet S1 is held tightly on the effective surface 110a of the impression cylinder 110.

  At the same time, the control device 200 controls the ink jet based on the information from the rotary encoders 221 and 223 so as to supply the conductive ink Ic to the plate surface Pg of the plate P of the plate cylinder 130. The operation of the device 191 is controlled.

  Subsequently, the control device 200 transfers the conductive ink Ic supplied to the plate surface Pg of the plate P of the plate cylinder 130 onto the sheet S1 on the effective surface 110a of the impression cylinder 110. Based on information from the encoders 221 and 223 and the position detector 226, the operation of the servo motor 215 is controlled to move the plate cylinder 130 to the operating position. Thereby, the G layer is formed on the sheet S1 (see FIG. 7B).

  At this time, the alignment mark m shown in FIG. 6 and the above-described alignment marks m is simultaneously transferred to both sides in the axial direction of the sheet S1. Further, since the supply cylinder 120 faces the gripping claw device 111B of the impression cylinder 110 in an empty state without the gripper claw device 121 holding a sheet, the control device 200 is configured so that the rotary encoders 221 and 222 On the basis of the information from the above, the operation of the actuators 211 and 212 is controlled so that the gripper devices 121 and 111B do not interfere with each other without delivering the sheet by the cylinders 110 and 120, and the closed state of the valve 218A is set. The operation of the valve 218A is controlled so as to be maintained as it is.

  Then, when the plate cylinder 130 finishes transferring the conductive ink Ic to the sheet S1 on the effective surface 110a of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 223 and the position detector 226. Based on the information, the operation of the servo motor 215 is controlled so that the plate cylinder 130 is moved to the retracted position.

  At the same time, the control device 200 supplies the insulating ink Ii to the blanket B of the coater cylinder 140 based on the information from the rotary encoders 221 and 224 so as to supply the insulating ink Ii. To control the operation.

  Subsequently, the control device 200 transfers the insulating ink Ii supplied to the blanket B of the coater cylinder 140 onto the sheet S1 on the effective surface 110a of the impression cylinder 110, so that the rotary encoders 221 and 224 are transferred. And based on the information from the position detector 227, the operation of the servo motor 216 is controlled to move the coater cylinder 140 to the operating position. Thereby, a GI layer is formed on the G layer of the sheet S1 (see FIG. 7C).

  Then, when the coater cylinder 140 finishes transferring the insulating ink Ii to the sheet S1 on the effective surface 110a of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 224 and the position detector 227. Based on the information, the operation of the servo motor 216 is controlled so as to move the coater cylinder 140 to the retracted position.

  In this way, the holding claw device 111A that holds the leading end side of the sheet S1 on which the G layer and the GI layer are formed on the effective surface 110a of the impression cylinder 110 faces the holding claw device 151 of the discharge cylinder 150. At this time, the control device 200 does not cause the gripper claw device 151 of the discharge drum 150 to interfere with the gripper claw device 111A of the pressure drum 110 based on information from the rotary encoders 221 and 225. The sheet S1 is held on the effective surface 110a of the impression cylinder 110 without passing the leading end side of the sheet S1 from the gripper claw device 111A of 110 to the gripper claw device 151 of the discharge cylinder 150. In addition, the operation of the actuators 211 and 214 is controlled, and the open state of the valve 218A is kept as it is. Controlling the operation of the valve 218A to maintain.

  At this time, the supply cylinder 120 faces the holding claw device 111C of the impression cylinder 110 in a state where the holding claw device 121 holds the leading end side of the next sheet S2 on the effective surface 120a. Based on the information from the rotary encoders 221 and 222, the control device 200 replaces the leading end side of the sheet S2 from the holding claw device 121 of the supply cylinder 120 to the holding claw device 111C of the impression cylinder 110. The operation of the actuators 211 and 212 is controlled so that the sheet S2 is held from the effective surface 120a of the supply cylinder 120 to the effective surface 110c of the impression cylinder 110 (see FIG. 7D). The suction side 112C holds the distal end side of the sheet S2 held at the leading end by the holding claw device 111C. As it is to open controls the valve 218C. As a result, the sheet S2 is held tightly on the effective surface 110c of the impression cylinder 110.

  At the same time, the control device 200 controls the ink jet based on the information from the rotary encoders 221 and 223 so as to supply the conductive ink Ic to the plate surface Pg of the plate P of the plate cylinder 130. The operation of the device 191 is controlled.

  Subsequently, the control device 200 transfers the conductive ink Ic supplied to the plate surface Pg of the plate P of the plate cylinder 130 onto the sheet S2 on the effective surface 110c of the impression cylinder 110. Based on information from the encoders 221 and 223 and the position detector 226, the operation of the servo motor 215 is controlled to move the plate cylinder 130 to the operating position. Thereby, the G layer is formed on the sheet S2 (see FIG. 7E). Further, at this time, the alignment mark m shown in FIG. 6 and simultaneously described is transferred to both sides in the axial direction of the sheet S2.

  At the same time, the control device 200 supplies the insulating ink Ii to the blanket B of the coater cylinder 140 based on the information from the rotary encoders 221 and 224 so as to supply the insulating ink Ii. To control the operation.

  At this time, the holding claw device 111A that holds the sheet S1 on the effective surface 110a of the impression cylinder 110 faces the holding claw device 121 of the supply cylinder 120 that does not hold the sheet. Based on the information from the rotary encoders 221 and 222, the apparatus 200 controls the operation of the actuators 211 and 212 so that the gripping claw devices 121 and 111A do not interfere with each other without delivering the sheet by the cylinders 110 and 120. At the same time, the operation of the valve 218A is controlled so as to maintain the open state of the valve 218A.

  Then, when the plate cylinder 130 finishes transferring the conductive ink Ic to the sheet S2 on the effective surface 110c of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 223 and the position detector 226. On the basis of this information, the operation of the servo motor 216 is controlled so as to move the plate cylinder 130 to the retracted position, and the conductive ink Ic is supplied to the plate surface Psd of the plate P of the plate cylinder 130. Then, the operation of the inkjet device 191 is controlled (see FIG. 7F). At this time, the alignment mark m attached to the sheet S1 held on the effective surface 110a of the impression cylinder 110 is picked up by the alignment camera 301, and the image processing device 302 shifts the alignment mark m relative to the reference position. A quantity is calculated.

  Subsequently, the control device 200 transfers the insulating ink Ii supplied to the blanket B of the coater cylinder 140 onto the sheet S2 on the effective surface 110c of the impression cylinder 110, so that the rotary encoders 221 and 224 are transferred. And based on the information from the position detector 227, the operation of the servo motor 216 is controlled to move the coater cylinder 140 to the operating position. Thereby, a GI layer is formed on the G layer of the sheet S2.

  Then, when the coater cylinder 140 finishes transferring the insulating ink Ii to the sheet S2 on the effective surface 110c of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 224 and the position detector 227. Based on this information, the operation of the servo motor 216 is controlled so as to move the coater cylinder 140 to the retracted position (see FIG. 7G).

  At the same time, the control device 200 transfers the conductive ink Ic supplied to the plate surface Psd of the plate P of the plate cylinder 130 onto the sheet S1 on the effective surface 110a of the impression cylinder 110. Further, based on information from the rotary encoders 221 and 223 and the position detector 226, the operation of the servo motor 215 is controlled to move the plate cylinder 130 to the operating position.

  At this time, the control device 200 detects the axial position of the plate cylinder 130 relative to the impression cylinder 110 detected by the position detector 228, the rotational phase of the plate cylinder 130 detected by the rotary encoder 223, and the image. Based on the amount of displacement of the sheet S1 relative to the reference position detected by the processing device 302, the operation of the servo motor 219 is controlled to adjust the axial position of the plate cylinder 130 relative to the impression cylinder 110, and the motor By controlling the operation of 203 and adjusting the rotational phase of the plate cylinder 130 relative to the rotational phase of the impression cylinder 110, the plate surface Psd of the plate P of the plate cylinder 130 and the sheet conveyed by the impression cylinder 110. Positional relationship between the G layer formed on S1 in the axial direction and the rotational direction (axial position and rotation in the sheet conveyance direction) Match position) with high precision. As a result, an SD layer is formed on the GI layer of the sheet S1 in a state of being precisely aligned with the G layer.

  Then, when the plate cylinder 130 finishes transferring the conductive ink Ic to the sheet S1 on the effective surface 110a of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 223 and the position detector 226. Based on the information, the operation of the servo motor 215 is controlled so as to move the plate cylinder 130 to the retracted position (see FIG. 7H).

  At this time, when the holding claw device 111C that holds the leading end side of the sheet S2 on which the G layer and the GI layer are formed on the effective surface 110c of the impression cylinder 110 faces the holding claw device 151 of the discharge drum 150. In the same manner as in the case of the sheet S1 described above, the control device 200 changes the holding claw device 151 of the discharge drum 150 based on the information from the rotary encoders 221 and 225 to the holding claw device of the impression drum 110. On the effective surface 110c of the impression cylinder 110 without changing the leading end side of the sheet S2 from the holding claw device 111C of the impression cylinder 110 to the holding claw device 151 of the discharge cylinder 150 without interfering with the 111C. The actuators 211 and 214 are controlled so as to pass the sheet S2 while being held, and the bar As it is to maintain an open state of the probe 218C.

  In addition, the supply cylinder 120 faces the holding claw device 111B of the impression cylinder 110 in a state where the holding claw device 121 further holds the leading end side of the next sheet S3 and holds the effective surface 120a. The control device 200 replaces the leading end side of the sheet S3 from the gripping claw device 121 of the supply cylinder 120 to the gripping claw device 111B of the impression cylinder 110 based on information from the rotary encoders 221 and 222. Then, the operation of the actuators 211 and 212 is controlled so as to hold the sheet S3 from the effective surface 120a of the supply cylinder 120 to the effective surface 110b of the impression cylinder 110, and the gripper device of the impression cylinder 110 The suction head 112B sucks and holds the end side of the sheet S3 with the leading end side added to 111B. , The opening controls the valve 218B. As a result, the sheet S3 is tightly held on the effective surface 110b of the impression cylinder 110.

  On the other hand, the sheet S1 on which the G layer, the GI layer, and the SD layer are formed on the effective surface 110a of the impression cylinder 110 passes through the coating cylinder 140 without being transferred with the insulating ink Ii.

  When the gripping claw device 111A that holds the leading end side of the sheet S1 held on the effective surface 110a of the impression cylinder 110 faces the gripping claw device 151 of the discharge cylinder 150, the control device 200 Based on the information from the rotary encoders 221 and 225, the valve 218A is controlled to be closed so that the suction of the pressure drum 110 by the suction head 112A is stopped, and the gripper claw device 111A of the pressure drum 110 The actuator is configured to cause the gripper claw device 151 of the discharge cylinder 150 to replace the leading end side of the sheet S1 and hold the sheet S1 from the effective surface 110a of the impression cylinder 110 to the effective surface 150a of the discharge cylinder 150. The operations of 211 and 214 are controlled (see FIG. 7I). Accordingly, the sheet S1 on which the G layer, the GI layer, and the SD layer are formed is separated from the effective surface 110a of the impression cylinder 110, and is discharged out of the system through the discharge cylinder 150.

  At this time, the holding claw device 111B that holds the sheet S2 on the effective surface 110c of the impression cylinder 110 faces the holding claw device 121 of the supply cylinder 120 that does not hold the sheet. Based on the information from the rotary encoders 221 and 222, the apparatus 200 prevents the gripper claws 121 and 111B from interfering with the cylinders 110 and 120 without delivering the sheet, as in the case of the sheet S1. The operation of the actuators 211 and 212 is controlled, and the operation of the valve 218C is controlled so that the open state of the valve 218C is maintained as it is.

  Thereafter, the alignment mark m attached to the sheet S2 held on the effective surface 110c of the impression cylinder 110 is picked up by the alignment camera 301, and the amount of positional deviation of the alignment mark m with respect to the reference position is detected by the image processing device 302. Calculated.

  Further, the sheet S3 held on the effective surface 110b of the impression cylinder 110 is the same as that of the sheets S1 and S2 held on the effective surfaces 110a and 110c in the plate P of the plate cylinder 130. The conductive ink Ic is transferred from the plate surface Pg.

  The sheet S3 held on the effective surface 110b of the impression cylinder 110 is insulated from the blanket B of the coater cylinder 140 in the same manner as the sheets S1 and S2 held on the effective surfaces 110a and 110c. By transferring the ink Ii, a GI layer is formed on the G layer.

  Further, the sheet S2 held on the effective surface 110c of the impression cylinder 110 is the pressure of the plate cylinder 130 detected by the position detector 228, as in the case of the sheet S1 held on the effective surface 110a. Based on the position in the axial direction with respect to the cylinder 110, the rotational phase of the plate cylinder 130 detected by the rotary encoder 223, and the amount of positional deviation with respect to the reference position of the sheet S2 detected by the image processing apparatus 302, the servo motor 219 The operation is controlled to adjust the axial position of the plate cylinder 130 relative to the impression cylinder 110, and the operation of the motor 203 is controlled to adjust the rotation phase of the plate cylinder 130 relative to the rotation phase of the impression cylinder 110. And formed on the plate surface Psd of the plate P of the plate cylinder 130 and the sheet S2 conveyed by the impression cylinder 110. The conductive ink Ic is transferred from the plate surface Psd of the plate P of the plate cylinder 130 in a state in which the positional relationship in the axial direction and the rotational direction with the G layer is matched with high accuracy. The SD layer is formed in a state of being precisely aligned with the G layer (see FIG. 7J).

  In addition, the supply cylinder 120 faces the gripping claw device 111A of the impression cylinder 110 in a state where the gripping claw device 121 further holds the leading end side of the next sheet S4 and holds it on the effective surface 120a. The control device 200 replaces the leading end side of the sheet S4 from the gripping claw device 121 of the supply cylinder 120 to the gripping claw device 111A of the impression cylinder 110 based on information from the rotary encoders 221 and 222. Then, the operation of the actuators 211 and 212 is controlled so that the sheet S4 is held from the effective surface 120a of the supply cylinder 120 to the effective surface 110a of the impression cylinder 110, and the holding claw device of the impression cylinder 110 is controlled. The suction head 112A sucks and holds the distal end side of the sheet S4 with the leading end side added to 111A. , The opening controls the valve 218A. As a result, the sheet S4 is held tightly on the effective surface 110a of the impression cylinder 110.

  Hereinafter, by repeating the above-described operation, a TFT in which a G layer, a GI layer, and an SD layer are sequentially laminated on a sheet can be continuously manufactured.

  That is, in the electronic device manufacturing apparatus according to this embodiment, when the G layer is formed on the sheet S (sheets S1, S2,...) By the plate cylinder 130, the alignment mark m is attached at the same time, and the GI layer is formed by the coater cylinder. The position of the plate cylinder 130 detected by the position detector 228 in the axial direction when the SD layer is formed again by the plate cylinder 130 through the formation of the plate cylinder 130, the position detected by the rotary encoder 223. Based on the rotational phase of the plate cylinder 130 and the amount of displacement of the sheet S relative to the reference position detected by the image processing apparatus 302, the operation of the servo motor 219 is controlled to control the axis of the plate cylinder 130 relative to the impression cylinder 110. The plate cylinder 13 is adjusted with respect to the rotational phase of the impression cylinder 110 by adjusting the position of the direction and controlling the operation of the motor 203. By adjusting the rotational phase of the plate cylinder 130, the positional relationship between the plate surface Psd of the plate P of the plate cylinder 130 and the G layer formed on the sheet S conveyed by the impression cylinder 110 in the axial direction and the rotation direction. By making it coincide with high accuracy, the SD layer can be formed in a state of being precisely aligned with the G layer.

  Further, since the plate P having the two plate surfaces Pg and Psd is mounted on one plate cylinder 130, the ink jet device 191 can supply the conductive ink Ic to the two plate surfaces Pg and Psd. Therefore, it is possible to reduce the number of installation of the very expensive ink jet device 191 and to achieve cost reduction and space saving.

  In addition, since the supply cylinder 120 supplies and holds every other sheet to the impression cylinder 110 having the three effective surfaces 110a to 110c, the sheets supplied from the supply cylinder 120 one after another are held. On the other hand, it is possible to efficiently form each layer sequentially, and to manufacture a plurality of TFTs at the same time in a space-saving manner.

<Second Embodiment>
A second embodiment in the case of manufacturing a thin film transistor (TFT) with the electronic device manufacturing apparatus according to the present invention will be described below with reference to FIG.

  In this embodiment, in addition to the alignment mark m described in the first embodiment, as shown in FIG. 8, when the G layer is formed on the sheet S (S1, S2, S3, S4,...) A plurality of alignment marks M are provided at a certain interval d along the circumferential direction in a margin portion on one end side in the axial direction of the sheet S. In the image processing apparatus 302, information on the image captured by the alignment camera 301 and the rotary information are provided. From the rotational phase of the impression cylinder 110 detected by the encoder 221, the downstream side in the conveyance direction of the sheet S relative to the reference position of the alignment mark m on the sheet S conveyed by the impression cylinder 110 (in the example shown in FIG. In addition to determining the amount of misalignment in the right side of the direction) and the axial direction (direction perpendicular to the transport direction and along the sheet S), It is obtained to detect the distance between M.

  Further, when forming the SD layer on the sheet S, the control device 200 uses the distance between the adjacent alignment marks M obtained by the image processing device 302 and the information from the rotary encoders 201 and 223 to calculate the SD layer. The rotational speed of the motor 203 is controlled to control the surface circumferential speed of the plate cylinder 130 relative to the surface circumferential speed of the sheet S held on the impression cylinder 110, and the surface circumference of the sheet conveyed by the impression cylinder 110 is controlled. Using the relative difference between the speed and the surface peripheral speed of the plate P, a state in which the position is precisely aligned on the G layer of the sheet S so as to match the distance between the alignment marks M of the G layer. To form an SD layer.

  More specifically, for example, if the distance between the alignment marks M attached to the sheet S is shorter than the design value, the plate P has a surface peripheral speed of the sheet S conveyed by the impression cylinder 110. If the distance between the alignment marks M attached to the sheet S is controlled to be faster than the design value, the plate P is controlled with respect to the surface peripheral speed of the sheet S conveyed by the impression cylinder 110. The surface peripheral speed is controlled to be slow.

  At this time, if the detected distances between the alignment marks M are not equal, the conductive ink Ic supplied accordingly to the plate surface Psd of the plate P of the plate cylinder 130 is transferred to one sheet. In this case, it is also possible to change the peripheral speed difference between the impression cylinder 110 and the plate cylinder 130.

  In the present embodiment, the bearing 161, the sleeve 162, the guide rail 163, the slider 164, the subframe 165, the stopper 166, and the like constitute transfer cylinder support means, and the screw shaft 167 and the nut block. 168, the support member 169, the brackets 165a and 168a, the servo motor 215, and the like constitute transfer cylinder contact / separation movement drive means, the transmission cylinder 171, the rotary plate 172, the thrust bearing 173, the screw shaft 174, the flange plate 175, the nut block 176, the support plate 177, the gears 178, 179, the rotary shaft 180, the worm wheel 181, the worm shaft 182, the support member 183, the servo motor 219, etc. Constituting transfer cylinder axis direction moving drive means, Serial brackets 188 and 189, by such the motor 203 constitutes a transfer cylinder rotational drive means constitutes a plate deformation detecting means by the inspection camera 303 and the image processing apparatus 302.

  A method of manufacturing a TFT by the electronic device manufacturing apparatus according to the present embodiment will be briefly described below with respect to differences from the first embodiment described above.

  That is, in this embodiment, when forming the SD layer on the GI layer of the sheets S1, S2, S3,..., The control device 200 detects the impression cylinder of the plate cylinder 130 detected by the position detector 228. 110, the rotational phase of the plate cylinder 130 detected by the rotary encoder 223, the amount of misregistration relative to the reference position of the sheets S1, S2, S3,. Based on the distance between them, the operation of the servo motor 219 is controlled to adjust the axial position of the plate cylinder 130 relative to the impression cylinder 110, and the operation of the motor 203 is controlled to control the operation of the impression cylinder 110. By adjusting the rotational phase of the plate cylinder 130 with respect to the rotational phase, the plate surface Psd of the plate P of the plate cylinder 130 and the front surface The positional relationship in the axial direction and the rotational direction with the G layer formed on the sheets S1, S2, S3,... Conveyed by the impression cylinder 110 are made to coincide with each other with high accuracy, and thereby the sheets S1, S2, S3,. An SD layer is formed on the GI layer in a state of being precisely aligned with the G layer.

  Other configurations are substantially the same as those of the first embodiment described above, and a description overlapping with the first embodiment is omitted.

  According to the electronic device manufacturing apparatus according to the present embodiment configured as described above, in addition to the operational effects of the electronic device manufacturing apparatus according to the first embodiment described above, the G layer and SD formed on the sheet S The positional relationship between the layers in the axial direction and the rotational direction can be matched with higher accuracy.

<Other embodiments>
In the first and second embodiments described above, the position of the plate cylinder 130 in the rotational direction with respect to the position in the rotational direction of the sheet S <b> 1 conveyed by the impression cylinder 110 by controlling the operation of the motor 203. Although an example of adjusting is shown, as another embodiment, for example, it is formed on the sheet S conveyed by the impression cylinder 110 by controlling the operation of the motor 201 and adjusting the rotation phase of the impression cylinder 110. It is also possible to match the positional relationship in the rotational direction between the formed G layer and the plate surface Psd of the plate P of the plate cylinder 130 with high accuracy.

  In the second embodiment described above, the plate cylinder with respect to the surface peripheral speed of the sheet on the effective surface 110c of the impression cylinder 110 based on the distance between the alignment marks M obtained by the image processing apparatus 302. Although the example in which the surface peripheral speed of 130 is controlled is shown, as another embodiment, the impression cylinder 110 with respect to the surface peripheral speed of the plate cylinder 130 based on the distance between the alignment marks M obtained by the image processing apparatus 302. The surface peripheral speed of the sheet on the effective surface 110c is controlled, or the surface peripheral speed of the plate cylinder 130 and the surface of the impression cylinder 110 are determined based on the distance between the alignment marks M obtained by the image processing apparatus 302. It is also possible to control the surface peripheral speed of the sheet on the effective surface 110c.

  In the first and second embodiments described above, the conductive ink Ic is supplied to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 by the inkjet device 191. However, other embodiments are described. For example, an inking device that supplies ink to the plate cylinder via a transfer roller from an ink fountain, an inking device that supplies ink directly from the ink plate to the plate cylinder, a furnisher roller or an ink discharge roller from the ink plate, It is also possible to apply an inking device or the like that indirectly supplies ink to the plate cylinder via an ink form roller or the like.

  Further, in the first and second embodiments described above, the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 are formed on the sheets held on the effective surfaces 110a to 110c of the impression cylinder 110. The supplied conductive ink Ic is directly transferred. However, as another embodiment, for example, the pressure drum 110 and the plate cylinder 110 can be moved so as to contact and separate from the pressure drum 110 and the plate cylinder 130. The conductive ink Ic supplied to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 is once transferred to the blanket cylinder by arranging a blanket cylinder rotatably with the plate cylinder 130. It is also possible to adopt an offset method in which the image is transferred to a sheet held on the effective surfaces 110a to 110c of the impression cylinder 110.

  In the first and second embodiments described above, the diameter size (double diameter) having the effective surface 130a for holding the plate P of double size formed with the two plate surfaces Pg and Psd. Although the case where the plate cylinder 130 is applied has been described, the present invention is not limited to this, and, for example, if necessary, a diameter size having an effective surface for holding a triple size plate formed with three plate surfaces ( It is also possible to apply a plate cylinder of (three times the diameter).

  In the first and second embodiments described above, the suction heads 112 </ b> A to 112 </ b> C connected to the suction pump 217 are provided on the effective surfaces 110 a to 110 c of the impression cylinder 110, thereby rearward in the sheet conveyance direction. Although the side (terminal side) is detachably sucked and held on the effective surfaces 110a to 110c, as another embodiment, for example, instead of the suction heads 112A to 112C and the like, the effective of the impression cylinder 110 is used. By attaching a rubber sheet made of silicon rubber or the like on the surfaces 110a to 110c, the sheet conveyance direction rear side (terminal side) can be detachably attached to the effective surfaces 110a to 110c. The same operational effects as those of the above-described embodiment can be obtained.

  Further, in the first and second embodiments described above, the case where the impression cylinder 110 having the three effective surfaces 110a to 110c is applied has been described. However, the present invention is not limited to this, and there are three or more. Any impression cylinder having an odd number (for example, five or seven) effective surfaces (holding surfaces) can be applied in the same manner as in the above-described embodiment. However, as in the above-described embodiment, the impression cylinder 110 having the three effective surfaces 110a to 110c is very preferable because it can achieve the most space saving.

  In the first and second embodiments described above, the case of manufacturing a TFT has been described. However, the present invention is not limited to this, and a functional material is laminated on a flexible substrate. If an electronic device is manufactured by forming a functional layer, it can be applied in the same manner as in the above-described embodiment.

  In the first and second embodiments described above, an example in which functional ink (conductive ink, insulating ink) is transferred to a sheet by a transfer cylinder is shown. However, the present invention is not limited to this, and an inkjet system is used. The functional ink may be transferred directly from the inkjet head to the sheet. In this case, the left-right position adjusting means and the top-and-bottom position adjusting means may move the ink-jet head in the left-right direction and the top-and-bottom direction, and the top-and-bottom position adjusting means changes the timing for transferring (ejecting) the functional ink from the ink-jet head. It may be a thing.

  The electronic device manufacturing apparatus according to the present invention can easily align each time in each process required when manufacturing TFTs or the like by a printing method, and manufacture an electronic device with a small number of manufacturing steps and high accuracy. Therefore, it can be used extremely beneficially in the industry.

100A, 100B Main frame 110 Impression cylinder 110a-110c Effective surface 111A-111C Holding claw device 112A-112C Suction head 120 Supply cylinder 120a Effective surface 121 Holding claw device 130 Plate cylinder 130a Effective surface 131 Plate holding device 140 Coater cylinder 150 Discharge cylinder 150a Effective surface 151 Holding claw device 161 Bearing 162 Sleeve 163 Guide rail 164 Slider 165 Subframe 165a Bracket 166 Stopper 167 Screw shaft 168 Nut block 168a Bracket 169 Support member 171 Transmission cylinder 172 Rotating plate 173 Shaft plate 175 Screw plate 175 Screw plate Nut block 177 Support plate 177a Support stay 178, 179 Gear 180 Rotating shaft 181 Warm wheel 182 C 183 Support member 188, 189 Bracket 191 Ink jet device 192 Insulating ink supply device 200 Control device 201-205 Motor 211-214 Actuator 215, 216, 219 Servo motor 215a Drive shaft 217 Suction pump 218A-218C Valve 221-225 Rotary Encoder 226, 227, 228 Position detector 226a, 228a Linear scale 226b, 228b Sensor 301 Alignment camera 302 Image processing device P plate Pg, Psd Plate surface Ic Conductive ink Ii Insulating ink S1-S4 Sheet m, M Alignment mark

Claims (3)

An electronic device manufacturing apparatus for manufacturing an electronic device by laminating a functional material on a flexible substrate to form a functional layer,
An impression cylinder that holds and rotates the substrate;
An ink transfer means for transferring a functional ink made of a functional material to the base material held by the impression cylinder;
Base material position detecting means for detecting the position of the base material held by the impression cylinder;
Left and right position adjusting means for adjusting the axial position of the impression cylinder of the ink transfer means;
The top and bottom position adjusting means for adjusting the transfer position in the substrate transport direction of the impression cylinder and the ink transfer means,
Control means for controlling the left-right position adjusting means and the top-and-bottom position adjusting means based on the position of the base material acquired by the base material position detecting means when the functional ink is transferred to the base material by the ink transfer means. An electronic device manufacturing apparatus comprising: The electronic device manufacturing apparatus according to claim 1,
The ink transfer means is a transfer cylinder;
An impression cylinder driving device and a transfer cylinder driving device for respectively driving the impression cylinder and the transfer cylinder;
The top-and-bottom position adjusting means is composed of at least one of the impression cylinder driving device and the transfer cylinder driving device,
The control device controls at least one of the transfer cylinder driving device and the transfer cylinder driving device so that the position of the transfer cylinder in the rotation direction with respect to the position of the base material held in the impression cylinder in the substrate conveyance direction is set. An electronic device manufacturing apparatus characterized by adjusting. The electronic device manufacturing apparatus according to claim 1,
The ink transfer means is a transfer cylinder;
A transfer cylinder driving device for driving the transfer cylinder;
The top-and-bottom position adjusting means is composed of the transfer cylinder driving device,
The control device adjusts the position of the transfer cylinder in the rotation direction with respect to the position of the substrate held in the impression cylinder in the substrate conveyance direction by controlling only the transfer cylinder driving device. Device manufacturing equipment.

Images