JP2017177017A - Electronic device manufacturing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electronic device manufacturing apparatus that is capable of easily adjusting a gap between a transfer cylinder and an impression cylinder so as to sufficiently meet the need.SOLUTION: This electronic device manufacturing apparatus is provided with; a plate cylinder 130 that conductive inks Ic to sheets S1 to S4 held on an impression cylinder 110; support means 161 to 166 for supporting the plate cylinder 130 so as to be rotatable and movable in an axial direction and so as to be linearly movable away from or in contact with the impression cylinder 110; driving means 167 to 169 and 215 for moving the support means 161 to 166 so as to move the plate cylinder 130 away from or in contact with the impression cylinder 110, driving means 188, 189, and 203 supported by the support means 161 to 166 so as to move integrally with the plate cylinder 130 and to rotate the plate cylinder 130; and driving means 171 to 183 and 219 supported by the support means 161 to 166 so as to move integrally with the plate cylinder 130 and to move the plate cylinder 130 in an axial direction.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an electronic device manufacturing apparatus that manufactures an electronic device by laminating functional materials on a flexible substrate to form a functional layer.

  A flexible electronic device such as a thin film transistor (TFT) in which functional layers such as a gate layer (G layer), a gate insulator layer (GI layer), and a source and drain layer (SD layer) are stacked on a substrate is, for example, As described in Patent Document 1, the substrate is transported by holding the substrate on the impression cylinder and rotating the impression cylinder, while the ink layer is placed on the rubber cylinder that can come into contact with the impression cylinder. And providing a convex pattern on the plate cylinder that can come into contact with the rubber cylinder to contact the rubber cylinder, and removing ink in a portion of the ink layer on the rubber cylinder that is in contact with the convex pattern. After forming an ink pattern on the rubber cylinder, a plurality of functional layers are provided on the base material by transferring the ink pattern on the rubber cylinder to the base material held on the pressure cylinder. Manufactured by the printing method It is known.

Japanese Patent Laying-Open No. 2015-153796 JP2013-241275A JP 2007-268715 A

  By the way, the thickness of a base material or a functional layer differs in flexible electronic devices, such as TFT, according to the kind. For this reason, in the electronic device manufacturing apparatus as described above, the transfer is performed by rotating an eccentric bearing that rotatably supports a transfer cylinder such as a rubber cylinder or a plate cylinder corresponding to the thickness of the electronic device. The cylinder intervals such as the cylinder and the impression cylinder are adjusted so that the thickness of the base plate, the functional layer, the plate cylinder, etc. can be changed.

  However, depending on the type of electronic device, the thickness of the base material or the functional layer is large, and the rotation of the eccentric bearing cannot sufficiently cope with the change of the thickness of the base material, the functional layer, the plate cylinder, etc. There was a case.

  In view of the above, an object of the present invention is to provide an electronic device manufacturing apparatus capable of easily adjusting the distance between the transfer cylinder and the impression cylinder as necessary.

  An electronic device manufacturing apparatus according to the present invention for solving the above-described problems is an electronic device that manufactures an electronic device by forming a functional layer by laminating a functional material on a flexible substrate. A manufacturing apparatus, a pressure drum that holds and rotates a substrate, a transfer cylinder that transfers functional ink made of a functional material to the substrate held by the pressure cylinder, and the transfer A transfer cylinder supporting means for supporting the cylinder so as to be rotatable and movable in the axial direction and linearly supporting the cylinder so as to move away from and contacting the impression cylinder; and contacting and separating the transfer cylinder from the impression cylinder A transfer cylinder contact / separation moving drive means for moving the transfer cylinder support means to move, and a transfer cylinder that is supported by the transfer cylinder support means and rotates the transfer cylinder so as to move integrally with the transfer cylinder. A rotation driving means; Characterized in that it includes a said transfer cylinder is supported by the support means transfer cylinder axial movement driving means for moving the transfer cylinder in the axial direction so as to be movable cylinder and integrally.

  The electronic device manufacturing apparatus according to the present invention is characterized in that, in the electronic device manufacturing apparatus described above, the transfer cylinder is a plate cylinder having a plate surface in which a pattern corresponding to a functional layer is formed in a circumferential direction. .

  According to the electronic device manufacturing apparatus of the present invention, the support means for supporting the transfer cylinder so as to be rotatable and movable in the axial direction and to support the transfer cylinder so as to be able to move linearly in contact and away from the impression cylinder. In addition to the drive means for moving the transfer cylinder in the axial direction, the drive means for moving the transfer cylinder in the axial direction is also provided. Since the support means is provided so that it can move integrally with the cylinder, the length (interval) between the impression cylinder and the transfer cylinder can be easily adjusted as necessary.

It is a principal part schematic block diagram of main embodiment of the electronic device manufacturing apparatus which concerns on this invention. FIG. 2 is a sectional view taken along the line II-II in FIG. 1. FIG. 3 is a view taken along line III-III in FIG. 2. It is the figure seen from the arrow line IV direction of FIG. It is a control block diagram of the principal part of the electronic device manufacturing apparatus of FIG. It is explanatory drawing of the manufacture procedure of the thin-film transistor (TFT) by the electronic device manufacturing apparatus of FIG. It is explanatory drawing of the manufacturing procedure following FIG. 6A. It is explanatory drawing of the manufacturing procedure following FIG. 6B. It is explanatory drawing of the manufacturing procedure following FIG. 6C. It is explanatory drawing of the manufacturing procedure following FIG. 6D. It is explanatory drawing of the manufacturing procedure following FIG. 6E. It is explanatory drawing of the manufacturing procedure following FIG. 6F. It is explanatory drawing of the manufacturing procedure following FIG. 6G. It is explanatory drawing of the manufacturing procedure following FIG. 6H. FIG. 6D is an explanatory diagram of the manufacturing procedure following FIG. 6I.

  Although an embodiment of an electronic device manufacturing apparatus according to the present invention will be described with reference to the drawings, the present invention is not limited to only the following embodiments described with reference to the drawings.

<Main embodiment>
A main embodiment in the case of manufacturing a thin film transistor (TFT) in the electronic device manufacturing apparatus according to the present invention will be described below based on FIGS. 1 to 5 and FIGS. 6A to 6J.

  In FIG. 1, 100A is a main frame, 110 is an impression cylinder, 120 is a supply cylinder, 130 is a plate cylinder, 140 is a coater cylinder, 150 is a discharge cylinder, 191 is an ink jet apparatus, and 192 is an insulating ink supply apparatus.

  The impression cylinder 110 is rotatably supported and has a diameter size (sixfold diameter) that can include six effective surfaces in the circumferential direction of the outer surface as a holding surface for holding a sheet that is a flexible substrate. However, it has a so-called skeleton type in which only three effective surfaces 110a to 110c are provided at equal intervals in the circumferential direction.

  The impression cylinder 110 includes gripping claw devices 111A to 111C that detachably hold the front side (front end side) of the sheet in each of the effective surfaces 110a to 110c, and the rear side (end side) of the sheet in the conveyance direction. Suction heads 112 </ b> A to 112 </ b> C (for example, see Patent Document 2). The suction heads 112A to 112C are connected to a suction pump 217 via valves 218A to 218C, respectively (see FIG. 5).

  The supply cylinder 120, which is a base material supply means, is rotatably supported so as to be in contact with the impression cylinder 110, and has a diameter size (double diameter) that can include two effective surfaces in the circumferential direction of the outer surface. However, the impression cylinder has only one effective surface 120a and has a gripper claw device 121 that detachably grips the front side (front end side) in the sheet conveyance direction on the effective surface 120a. Every other sheet can be supplied to and held by the effective surfaces 110a to 110c of 110.

  The discharge cylinder 150 which is a base material discharge unit is located at a position where the impression cylinder 110 and the supply cylinder 120 are in contact with each other, that is, the holding position where the sheet from the supply cylinder 120 is held. A diameter size (double diameter) that is rotatably supported so as to be in contact with the impression cylinder 110 on the downstream side in the rotation direction (sheet conveying direction) of the impression cylinder 110 and can have two effective surfaces in the circumferential direction of the outer surface. Although there is only one effective surface 150a, it has a gripping claw device 151 that detachably grips the front side (front end side) in the sheet conveyance direction on the effective surface 150a.

  The plate cylinder 130 serving as a transfer cylinder is located at a position where the impression cylinder 110 and the supply cylinder 120 are in contact with each other, that is, the holding position where the impression cylinder 110 holds a sheet from the supply cylinder 120. 110 on the downstream side in the rotation direction (sheet conveyance direction) 110 and the contact position between the impression cylinder 110 and the discharge cylinder 150, that is, the separation position of the impression cylinder 110 from which the sheet is released to the discharge cylinder 150. The impression cylinder 110 is rotatably arranged between the rotation direction of the impression cylinder 110 (sheet conveying direction) and a straight line between an operation position in contact with the impression cylinder 110 and a retracted position away from the impression cylinder 110. It is supported so as to be slidable (details will be described later).

  In addition, the plate cylinder 130 includes a plate surface Pg for the G layer which is a first plate surface on which a pattern corresponding to the gate layer (G layer) which is the first functional layer is formed, and a third functional layer. Holding surface for holding a double-size plate P formed so that a plate surface Psd for SD layer, which is a second plate surface on which a pattern corresponding to a certain source and drain layer (SD layer) is formed, is arranged in the circumferential direction A plate holding device 131 that has a diameter size (double diameter) having an effective surface 130a on the outer surface and detachably holds one end side (tip side) and the other end side (end side) of the plate P. have.

  The ink jet device 191 which is a first functional ink supply means is made of a material which forms a G layer and an SD layer with respect to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 located at the retracted position. The conductive ink which is the first functional ink can be jetted and supplied.

  The coater cylinder 140 serving as a transfer cylinder includes a downstream side of the pressure cylinder 110 in the rotation direction (sheet conveyance direction) of the impression cylinder 110 and the plate cylinder 130, and the impression cylinder 110 and the discharge cylinder. It can be rotated between the contact position with the cylinder 150, that is, the upstream side of the impression cylinder 110 in the rotation direction (sheet conveyance direction) of the impression cylinder 110 with respect to the separation position where the sheet is released to the discharge cylinder 150. The silicon resin blanket B having a size corresponding to the size of the sheet is wound around the outer circumference (single diameter), the operating position in contact with the impression cylinder 110 and the retracted position separated from the impression cylinder 110 Is supported by a mechanism similar to that of the plate cylinder 130 so as to be slidable linearly.

  The insulating ink supply device 192, which is a second functional ink supply means, has a gate insulator layer (GI layer) which is a second functional layer on the blanket B of the coater cylinder 140 located at the retracted position. Insulating ink, which is a second functional ink made of a material forming the above, can be sent out and supplied.

  As shown in FIG. 2, main frames 100A and 100B are arranged on both sides in the axial direction of the plate cylinder 130 so as to form a pair, and the plate cylinder 130 has both end portions thereof. The side passes through the main frames 100A and 100B. Bearings 161 are fitted coaxially to both ends of the plate cylinder 130, respectively. Sleeves 162 are coaxially fitted on the outer periphery of the bearing 161.

  As shown in FIGS. 2 and 3, a linear guide rail 163 is formed on the outer surface of the main frame 100A in the axial direction of the plate cylinder 130 so as to form a pair with the plate cylinder 130 interposed therebetween. It is arranged so that its longitudinal direction is directed in a direction parallel to the direction connecting the axis of the impression cylinder 110 and the axis of the plate cylinder 130. Sliders 164 that are slidable along the longitudinal direction of the guide rail 163 are respectively attached to the guide rails 163 on the outer side in the axial direction of the plate cylinder 130.

  A subframe 165 is attached outside the slider 164 in the axial direction of the plate cylinder 130 so as to cover between the pair of guide rails 163, and the subframe 165 attaches the sleeve 162. The plate cylinder 130 is held so as to be slidable in the axial direction.

  On the other hand, as shown in FIG. 2, guide rails 163, sliders 164, and subframes 165 are provided on the outer side of the main frame 100B in the axial direction of the plate cylinder 130 in the same manner as in the case of the main frame 100A. ing.

  That is, the plate cylinder 130 is rotatably supported with respect to the subframe 165 via the sleeve 162 and the bearing 161, and the sleeve 162 slides and moves in the axial direction. 161 is slidable in the axial direction via 161, and further, the subframe 165 is slid along the guide rail 163, thereby moving toward and away from the impression cylinder 110 in a straight line. It is like that.

  In FIG. 3, reference numeral 166 denotes a stopper provided on the main frame 100A for restricting the movement of the sub frame 165 so that the plate cylinder 130 can be positioned at the retracted position. The main frame 100B is provided in the same manner.

  As shown in FIG. 3, the servo motor 215 directs the axial direction of the drive shaft 215 a along the longitudinal direction of the guide rail 163 on the axially outer surface of the plate cylinder 130 of the main frame 100 </ b> A. Oriented and attached. One end of a screw shaft 167 is coaxially connected and fixed to the tip of the drive shaft 215a of the servo motor 215. The other end side of the screw shaft 167 is rotatably supported by a support member 169 provided on the axially outer side surface of the plate cylinder 130 of the main frame 100A.

  A nut block 168 is screwed onto the screw shaft 167. The nut block 168 is provided with a bracket 168a. The bracket 168a is connected to a bracket 165a provided on the subframe 165.

  On the other hand, the brackets 165a and 168a, the screw shaft 167, the nut block 168, and the support member 169 are disposed on the outside of the main frame 100B in the axial direction of the plate cylinder 130 in the same manner as in the case of the main frame 100A. , The servo motor 215 and the like are provided.

  In other words, when the servo motor 215 is operated to drive and rotate the drive shaft 215a, the screw shaft 167 supported by the support member 169 rotates, so that the nut along the axial direction of the screw shaft 167 is rotated. The block 168 can be moved, and the sub-frame 165 can be moved along the longitudinal direction of the guide rail 163 via the brackets 168a and 165a.

  2 and 3, reference numeral 226 denotes a position detector. A linear scale 226a attached to the subframe 165 along the longitudinal direction of the guide rail 163 is replaced with a sensor 226b attached to the main frame 100A. , The position of the plate cylinder 130 relative to the impression cylinder 110 can be detected, and is similarly provided not only on the main frame 100A side but also on the main frame 100B side.

  As shown in FIG. 2, a direct drive (DD) type motor 203 is coaxially provided on one end side (right end side in FIG. 2) of the plate cylinder 130 via a bracket 189. The motor 203 is supported by the sleeve 162 via a bracket 188.

  In other words, the motor 203 can independently rotate the plate cylinder 130 via the bracket 189, and the plate cylinder 130 together with the sleeve 162 and the bearing 161 via the bracket 188. It can be moved integrally in the axial direction.

  Further, the base end side (right end side in FIG. 2) of the transmission cylinder 171 is fitted coaxially to the other end side (left end side in FIG. 2) of the plate cylinder 130. An outer peripheral side of an annular rotating plate 172 is coaxially and integrally attached to the distal end side (left end side in FIG. 2) of the transmission cylinder 171. On both axial surfaces of the rotating plate 172, thrust bearings 173 that are paired with the rotating plate 172 interposed therebetween are disposed so as to be coaxial with the hole of the rotating plate 172, respectively.

  On the inner side of the hole of the rotating plate 172 and the thrust bearing 173, the distal end side of the screw shaft 174 (FIG. 2) having a screw thread between the middle in the axial direction and the proximal end (near the left end in FIG. 2). The middle, right end side) is loosely fitted. A pair of flange plates 175 having an annular shape for holding the rotary plate 172 and the thrust bearing 173 in the axial direction are fitted on the tip side (right end side in FIG. 2) of the screw shaft 174 in a coaxial manner. ing.

  A nut block 176 is screwed in the middle in the axial direction of the screw shaft 174 and near the base end (near the left end in FIG. 2). The nut block 176 is fixedly supported by the support plate 177 so as to penetrate the support plate 177 supported by the subframe 165 via a support stay 177a.

  That is, when the screw shaft 174 is rotated, the screw shaft 174 moves in the axial direction with respect to the nut block 176, and the flange plate 175, the thrust bearing 173, the rotary plate 172, and the transmission cylinder 171 are moved. The plate cylinder 130 can be moved in the axial direction via the screw cylinder 130. When the plate cylinder 130 rotates, the transmission cylinder 171 and the rotating plate 172 rotate. The rotational force is not transmitted to the shaft 174.

  As shown in FIGS. 2 and 4, a gear 178 is coaxially attached to the proximal end side (left end side in FIG. 2) of the screw shaft 174. A gear 179 is engaged with the gear 178. The gear 179 is coaxially fixed to the distal end surface of the rotating shaft 180 that is supported by the support plate 177 so that the base end side is rotatable. A worm wheel 181 is coaxially attached to the distal end side (left end side in FIG. 2) of the rotating shaft 180.

  A worm shaft 182 is engaged with the worm wheel 181. Both ends of the worm shaft 182 are rotatably supported by the support plate 177 via support members 183. A drive shaft of a servo motor 219 supported by the support plate 177 is connected to one end side (right end side in FIG. 4) of the worm shaft 182 in a coaxial manner.

  That is, when the worm shaft 182 is rotated by operating the servo motor 219, the screw shaft 174 is rotated with respect to the nut block 176 via the worm wheel 181, the rotation shaft 180, and the gears 178 and 179. Thus, it can be moved in the axial direction.

  As shown in FIG. 5, a motor 201 that independently drives the impression cylinder 110, a motor 202 that independently drives the supply cylinder 120, a motor 203 that independently drives the plate cylinder 130, and the coater cylinder 140. The motor 204 for independently rotating the motor and the motor 205 for independently rotating the discharge cylinder 150 are electrically connected to the output unit of the control device 200 as control means. The output unit of the control device 200 is electrically connected to the ink jet device 191 and the insulating ink supply device 192.

  Further, the output unit of the control device 200 is configured so that the holding claw device 111A of the impression cylinder 110 is opposed to the holding claw device 111A to 111C of the impression cylinder 110 and the holding claw device 121 of the supply cylinder 120. To switch the opening and closing of the holding claw device 121 of the supply cylinder 120 and the actuator 211 for switching the track of the cam follower cam for opening and closing the holding claw device 111A to 111C to switch the opening and closing of the holding claw device 111A to 111C. The cam follower cam trajectory for switching the cam follower 121 that opens and closes the pawl device 121 is electrically connected to each other (for the cam trajectory switching mechanism, “printing cylinder” and “ The cam trajectory switching mechanism of the “feed side transfer cylinder” (refer to FIG. 5 in particular)).

  Further, the output unit of the control device 200 opens and closes the gripper claw devices 111A to 111C when the gripper claw devices 111A to 111C of the impression cylinder 110 and the gripper claw device 151 of the discharge drum 150 are opposed to each other. A cam follower cam that opens and closes the gripper claw device 151 to switch between an actuator 213 that switches the trajectory of the cam follower cam that opens and closes the gripper claw device 111A to 111C so as to switch. Are electrically connected to the actuator 214 for switching the trajectory of each of them (for the cam trajectory switching mechanism, “second paper discharge side transfer cylinder” and “paper take-up cylinder” described in Patent Document 2). (See FIG. 4 in particular).

  The output unit of the control device 200 is electrically connected to the suction pump 217 and the valves 218A to 218C, and the actuator 215 slides the plate cylinder 130 along the guide rail. And an actuator 216 that slides the coater cylinder 140 along the guide rail.

  The output unit of the control device 200 includes the servo motor 215 that slides the plate cylinder 130 along the guide rail 163, and the coater cylinder 140 along the guide rail in the same manner as the plate cylinder 130. The servo motor 216 for sliding movement is electrically connected to the servo motor 219 for moving the plate cylinder 130 along the axial direction.

  On the other hand, the rotary unit 221 for detecting the rotational phase of the impression cylinder 110, the rotary encoder 222 for detecting the rotational phase of the supply cylinder 120, and the rotational phase of the plate cylinder 130 are input to the control device 200. A rotary encoder 223 for detecting, a rotary encoder 224 for detecting the rotational phase of the coater cylinder 140, and a rotary encoder 225 for detecting the rotational phase of the discharge cylinder 150 are electrically connected.

  The input unit of the control device 200 includes a position detector 226 that detects the position of the plate cylinder 130 with respect to the impression cylinder 110 and a position detector that detects the position of the coater cylinder 140 with respect to the impression cylinder 110. 227 are electrically connected to each other.

  In other words, the control device 200 performs the rotation operation of the motors 201 to 205, the inkjet device 191 and the insulating ink supply device 192 based on information from the rotary encoders 221 to 225 and the position detectors 226 and 227. Operation, expansion / contraction operation of the actuators 211 to 214, rotation operation of the servo motors 215 and 216, opening / closing operation of the valves 218A to 218C, and the like can be controlled (details will be described later).

  In this embodiment, the bearing 161, the sleeve 162, the guide rail 163, the slider 164, the subframe 165, the stopper 166, and the like constitute transfer cylinder support means, and the screw shaft 167, The nut block 168, the support member 169, the brackets 165a and 168a, the servo motor 215, etc. constitute transfer cylinder contact / separation moving drive means, and the transmission cylinder 171, the rotary plate 172, the thrust bearing 173, Screw shaft 174, flange plate 175, nut block 176, support plate 177, gears 178, 179, rotation shaft 180, worm wheel 181, worm shaft 182, support member 183, servo motor 219, etc. The transfer cylinder axial direction moving drive means is configured by And, the bracket 188 and 189, by such the motor 203 constitute a transfer cylinder rotational drive means.

  Next, a TFT manufacturing method using the flexible electronic device manufacturing apparatus according to this embodiment will be described with reference to FIGS.

  Initially, the plate cylinder 130 and the coater cylinder 140 are located at the retracted position away from the impression cylinder 110, and the valves 218A to 218C are in the closed state. First, between the plate cylinder 130, the plate cylinder 130, and the coater cylinder 140, which are defined in advance based on various manufacturing conditions such as the thickness of the plate P, the sheet, the functional layer, etc. of the plate cylinder 130. When the length (interval) is input to the control device 200, the control device 200 sets the positions of the plate cylinder 130 and the coater cylinder 140 that are the intervals as the operation positions. At the same time, the servo motor 219 is operated by operating the control device 200 so as to adjust the registration of the plate cylinder 130 in the width direction of the plate P.

  The control device 200 operates the suction pump 217 and rotates the drums 110, 120, 130, and 140 at a predetermined cycle based on information from the rotary encoders 221 to 225. The operation of the motors 201 to 205 is controlled.

  When the holding claw device 121 of the supply cylinder 120 holds the leading end side of the first sheet S1 and the sheet S1 is held on the effective surface 120a of the supply cylinder 120 and conveyed, the control device 200 Based on the information from the rotary encoders 221 and 222, when the holding claw device 121 of the supply cylinder 120 faces the holding claw device 111A of the impression cylinder 110, the holding claw device of the supply cylinder 120 The operation of the actuators 211 and 212 is controlled (see FIG. 6A) so that the leading end side of the sheet S1 is held by the holding claw device 111A of the pressure drum 110 from 121 (see FIG. 6A), and the suction head of the pressure drum 110 When the 112 A faces the effective surface 120 a of the supply cylinder 120, the gripper device 1 of the impression cylinder 110 The terminal side of the sheet S1, which is applied to the distal end side 1A so as to suck and hold to the suction head 112A, releasing control the valve 218A. As a result, the sheet S1 is supplied from the effective surface 120a of the supply cylinder 120 onto the effective surface 110a of the impression cylinder 110 and held in close contact therewith.

  At the same time, the control device 200 controls the ink jet based on the information from the rotary encoders 221 and 223 so as to supply the conductive ink Ic to the plate surface Pg of the plate P of the plate cylinder 130. The operation of the device 191 is controlled.

  Subsequently, the control device 200 transfers the conductive ink Ic supplied to the plate surface Pg of the plate P of the plate cylinder 130 onto the sheet S1 on the effective surface 110a of the impression cylinder 110. Based on information from the encoders 221 and 223 and the position detector 226, the operation of the servo motor 215 is controlled to move the plate cylinder 130 to the operating position. Thereby, the G layer is formed on the sheet S1 (see FIG. 6B).

  At this time, the supply cylinder 120 faces the gripping claw device 111B of the impression cylinder 110 in a state where the gripping claw device 121 is empty without gripping the sheet. Therefore, the control device 200 includes the rotary encoder 221, Based on the information from 222, the operation of the actuators 211, 212 is controlled so that the gripper devices 121, 111B do not interfere with each other without delivering the sheet by the cylinders 110, 120, and the valve 218A is closed. The operation of the valve 218A is controlled so as to maintain the state as it is.

  Then, when the plate cylinder 130 finishes transferring the conductive ink Ic to the sheet S1 on the effective surface 110a of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 223 and the position detector 226. Based on the information, the operation of the servo motor 215 is controlled so that the plate cylinder 130 is moved to the retracted position.

  At the same time, the control device 200 supplies the insulating ink Ii to the blanket B of the coater cylinder 140 based on the information from the rotary encoders 221 and 224 so as to supply the insulating ink Ii. To control the operation.

  Subsequently, the control device 200 transfers the insulating ink Ii supplied to the blanket B of the coater cylinder 140 onto the sheet S1 on the effective surface 110a of the impression cylinder 110, so that the rotary encoders 221 and 224 are transferred. And based on the information from the position detector 227, the operation of the servo motor 216 is controlled to move the coater cylinder 140 to the operating position. Thereby, a GI layer is formed on the G layer of the sheet S1 (see FIG. 6C).

  Then, when the coater cylinder 140 finishes transferring the insulating ink Ii to the sheet S1 on the effective surface 110a of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 224 and the position detector 227. Based on the information, the operation of the servo motor 216 is controlled so as to move the coater cylinder 140 to the retracted position.

  In this way, the holding claw device 111A that holds the leading end side of the sheet S1 on which the G layer and the GI layer are formed on the effective surface 110a of the impression cylinder 110 faces the holding claw device 151 of the discharge cylinder 150. At this time, the control device 200 does not cause the gripper claw device 151 of the discharge drum 150 to interfere with the gripper claw device 111A of the pressure drum 110 based on information from the rotary encoders 221 and 225. The sheet S1 is held on the effective surface 110a of the impression cylinder 110 without passing the leading end side of the sheet S1 from the gripper claw device 111A of 110 to the gripper claw device 151 of the discharge cylinder 150. In addition, the operation of the actuators 211 and 214 is controlled, and the open state of the valve 218A is kept as it is. Controlling the operation of the valve 218A to maintain.

  At this time, the supply cylinder 120 conveys the sheet S2 while the gripper claw device 121 holds the leading end side of the next sheet S2 and holds it on the effective surface 120a. Based on the information from the rotary encoders 221 and 222, when the holding claw device 121 of the supply cylinder 120 faces the holding claw device 111C of the impression cylinder 110, the holding claw device 121 of the supply cylinder 120 The operation of the actuators 211 and 212 is controlled so that the holding claw device 111C of the impression cylinder 110 changes the leading end side of the sheet S2 (see FIG. 6D), and the suction head 112C of the impression cylinder 110 is also controlled. When the gripper device 111 of the impression cylinder 110 is opposed to the effective surface 120a of the supply cylinder 120. End side of the seat S2, applied to the distal end side so as to suck and hold to the suction head 112C, releasing control the valve 218C on. Accordingly, the sheet S2 is supplied from the effective surface 120a of the supply cylinder 120 onto the effective surface 110c of the impression cylinder 110 and is held in close contact therewith.

  At the same time, the control device 200 controls the ink jet based on the information from the rotary encoders 221 and 223 so as to supply the conductive ink Ic to the plate surface Pg of the plate P of the plate cylinder 130. The operation of the device 191 is controlled.

  Subsequently, the control device 200 transfers the conductive ink Ic supplied to the plate surface Pg of the plate P of the plate cylinder 130 onto the sheet S2 on the effective surface 110c of the impression cylinder 110. Based on information from the encoders 221 and 223 and the position detector 226, the operation of the servo motor 215 is controlled to move the plate cylinder 130 to the operating position. Thereby, the G layer is formed on the sheet S2 (see FIG. 6E).

  At the same time, the control device 200 supplies the insulating ink Ii to the blanket B of the coater cylinder 140 based on the information from the rotary encoders 221 and 224 so as to supply the insulating ink Ii. To control the operation.

  At this time, the holding claw device 111A that holds the sheet S1 on the effective surface 110a of the impression cylinder 110 faces the holding claw device 121 of the supply cylinder 120 that does not hold the sheet. Based on the information from the rotary encoders 221 and 222, the apparatus 200 controls the operation of the actuators 211 and 212 so that the gripping claw devices 121 and 111A do not interfere with each other without delivering the sheet by the cylinders 110 and 120. At the same time, the operation of the valve 218A is controlled so as to maintain the open state of the valve 218A.

  Then, when the plate cylinder 130 finishes transferring the conductive ink Ic to the sheet S2 on the effective surface 110c of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 223 and the position detector 226. On the basis of this information, the operation of the servo motor 216 is controlled so as to move the plate cylinder 130 to the retracted position, and the conductive ink Ic is supplied to the plate surface Psd of the plate P of the plate cylinder 130. Then, the operation of the inkjet device 191 is controlled (see FIG. 6F).

  Subsequently, the control device 200 transfers the insulating ink Ii supplied to the blanket B of the coater cylinder 140 onto the sheet S2 on the effective surface 110c of the impression cylinder 110, so that the rotary encoders 221 and 224 are transferred. And based on the information from the position detector 227, the operation of the servo motor 216 is controlled to move the coater cylinder 140 to the operating position. Thereby, a GI layer is formed on the G layer of the sheet S2.

  Then, when the coater cylinder 140 finishes transferring the insulating ink Ii to the sheet S2 on the effective surface 110c of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 224 and the position detector 227. Based on the information, the operation of the servo motor 216 is controlled so as to move the coater cylinder 140 to the retracted position (see FIG. 6G).

  At the same time, the control device 200 transfers the conductive ink Ic supplied to the plate surface Psd of the plate P of the plate cylinder 130 onto the sheet S1 on the effective surface 110a of the impression cylinder 110. Further, based on information from the rotary encoders 221 and 223 and the position detector 226, the operation of the servo motor 215 is controlled to move the plate cylinder 130 to the operating position. As a result, an SD layer is formed on the GI layer of the sheet S1.

  Then, when the plate cylinder 130 finishes transferring the conductive ink Ic to the sheet S1 on the effective surface 110a of the impression cylinder 110, the control device 200 moves from the rotary encoders 221 and 223 and the position detector 226. Based on the information, the operation of the servo motor 215 is controlled so as to move the plate cylinder 130 to the retracted position (see FIG. 6H).

  At this time, when the holding claw device 111C that holds the leading end side of the sheet S2 on which the G layer and the GI layer are formed on the effective surface 110c of the impression cylinder 110 faces the holding claw device 151 of the discharge drum 150. In the same manner as in the case of the sheet S1 described above, the control device 200 changes the holding claw device 151 of the discharge drum 150 based on the information from the rotary encoders 221 and 225 to the holding claw device of the impression drum 110. On the effective surface 110c of the impression cylinder 110 without changing the leading end side of the sheet S2 from the holding claw device 111C of the impression cylinder 110 to the holding claw device 151 of the discharge cylinder 150 without interfering with the 111C. The actuators 211 and 214 are controlled so as to pass the sheet S2 while being held, and the bar As it is to maintain an open state of the probe 218C.

In addition, the feeding cylinder 120 conveys the sheet S3 in a state where the gripping claw device 121 further holds the leading end side of the next sheet S3 and holds it on the effective surface 120a.
Based on information from the rotary encoders 221 and 222, the control device 200 is configured to supply the feed cylinder 120 when the grip claw device 121 of the supply cylinder 120 faces the grip claw device 111 </ b> B of the impression cylinder 110. The operation of the actuators 211 and 212 is controlled so that the gripper claw device 111B of the impression cylinder 110 can exchange the leading end side of the sheet S3, and the suction head of the impression cylinder 110 is also controlled. When the 112B faces the effective surface 120a of the supply cylinder 120, the suction head 112B sucks and holds the distal end side of the sheet S3 with the leading end held by the gripping claw device 111B of the impression cylinder 110. The valve 218B is controlled to be opened. As a result, the sheet S3 is supplied from the effective surface 120a of the supply cylinder 120 onto the effective surface 110b of the impression cylinder 110 and held in close contact therewith.

  On the other hand, the sheet S1 on which the G layer, the GI layer, and the SD layer are formed on the effective surface 110a of the impression cylinder 110 passes through the coating cylinder 140 without being transferred with the insulating ink Ii.

  When the gripping claw device 111A that holds the leading end side of the sheet S1 held on the effective surface 110a of the impression cylinder 110 faces the gripping claw device 151 of the discharge cylinder 150, the control device 200 Based on the information from the rotary encoders 221 and 225, the actuators 211, 211 are arranged so that the leading end side of the sheet S1 is changed from the holding claw device 111A of the impression cylinder 110 to the holding claw device 151 of the discharge cylinder 150. 214 is controlled (see FIG. 6I), and the valve 218A is controlled to be closed so that the suction is stopped when the suction head 112A of the pressure drum 110 faces the effective surface 150a of the discharge drum 150. To do. Accordingly, the sheet S1 on which the G layer, the GI layer, and the SD layer are formed is separated from the effective surface 110a of the impression cylinder 110, and is discharged out of the system through the discharge cylinder 150.

  At this time, the holding claw device 111C that holds the sheet S2 on the effective surface 110c of the impression cylinder 110 faces the holding claw device 121 of the supply cylinder 120 that does not hold the sheet. Based on the information from the rotary encoders 221 and 222, the apparatus 200 prevents the gripper claws 121 and 111C from interfering with the cylinders 110 and 120 without delivering the sheet, as in the case of the sheet S1. The operation of the actuators 211 and 212 is controlled, and the operation of the valve 218C is controlled so that the open state of the valve 218C is maintained as it is.

  Further, the sheet S3 held on the effective surface 110b of the impression cylinder 110 is the same as that of the sheets S1 and S2 held on the effective surfaces 110a and 110c in the plate P of the plate cylinder 130. The conductive ink Ic is transferred from the plate surface Pg.

  The sheet S3 held on the effective surface 110b of the impression cylinder 110 is insulated from the blanket B of the coater cylinder 140 in the same manner as the sheets S1 and S2 held on the effective surfaces 110a and 110c. By transferring the ink Ii, a GI layer is formed on the G layer, and the sheet S2 held on the effective surface 110c of the impression cylinder 110 is the same as the sheet S1 held on the effective surface 110a. Thus, the conductive ink Ic is transferred from the plate surface Psd of the plate P of the plate cylinder 130, whereby an SD layer is formed on the GI layer (see FIG. 6J).

  In addition, the supply cylinder 120 conveys the sheet S4 in a state where the gripper claw device 121 further holds the leading end side of the next sheet S4 and holds it on the effective surface 120a. Based on the information from the rotary encoders 221 and 222, when the holding claw device 121 of the supply cylinder 120 faces the holding claw device 111A of the impression cylinder 110, the holding claw device of the supply cylinder 120 The operation of the actuators 211 and 212 is controlled so that the leading end side of the sheet S4 is changed from 121 to the holding claw device 111A of the impression cylinder 110, and the suction head 112A of the impression cylinder 110 is supplied to the supply cylinder. When facing the effective surface 120a of 120, the gripper claw device 111A of the impression cylinder 110 has a distal end side. The terminal side of the added sheet S4 so as to suck and hold to the suction head 112A, releasing control the valve 218A. Accordingly, the sheet S4 is supplied from the effective surface 120a of the supply cylinder 120 onto the effective surface 110a of the impression cylinder 110 and is held in close contact therewith.

  Hereinafter, by repeating the above-described operation, a TFT in which a G layer, a GI layer, and an SD layer are sequentially laminated on a sheet can be continuously manufactured.

  That is, in the electronic device manufacturing apparatus according to the present embodiment, the support unit that supports the plate cylinder 130 so as to be rotatable and movable in the axial direction, and supports the plate cylinder 110 so that the plate cylinder 130 can move in a linear manner. Drive means for moving the plate cylinder 130 against and away from the impression cylinder 110, and driving means for rotating the plate cylinder 130 are provided on the support means so as to move integrally with the plate cylinder 130. The driving means for moving the plate cylinder 130 in the axial direction is also provided on the support means so as to move integrally with the plate cylinder 130.

  Therefore, according to the electronic device manufacturing apparatus according to this embodiment, even if the plate P, the sheet, the functional layer, and the like of the plate cylinder 130 are large, the impression cylinder 130, the plate cylinder 130, and the coater cylinder. It is possible to easily adjust the length (interval) between 140 and 140.

  Further, since the inks Ic and Ii are transferred by the devices 191 and 192 to the sheet held on the effective surfaces 110a to 110c of the rotatable impression cylinder 110, each layer is laminated on the sheet. It is possible to easily perform high-accuracy alignment each time the is formed.

  Further, since the plate P having the two plate surfaces Pg and Psd is mounted on one plate cylinder 130, the ink jet device 191 can supply the conductive ink Ic to the two plate surfaces Pg and Psd. Therefore, it is possible to reduce the number of installation of the very expensive ink jet device 191 and to achieve cost reduction and space saving.

  In addition, since the supply cylinder 120 supplies and holds every other sheet to the impression cylinder 110 having the three effective surfaces 110a to 110c, the sheets supplied from the supply cylinder 120 one after another are held. On the other hand, it is possible to efficiently form each layer sequentially, and to manufacture a plurality of TFTs at the same time in a space-saving manner.

<Other embodiments>
In the above-described embodiment, the conductive ink Ic is supplied to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 by the inkjet device 191. However, as another embodiment, for example, an ink fountain is used. Ink unit that supplies ink to the plate cylinder via a transfer roller, an ink unit that supplies ink directly from the ink plate to the plate cylinder, a furnisher roller, an ink discharge roller, an ink form roller, etc. from the ink plate It is also possible to apply an inking device that indirectly supplies ink to the plate cylinder.

  In the above-described embodiment, the conductive ink Ic supplied to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 with respect to the sheet held on the effective surfaces 110a to 110c of the impression cylinder 110. However, as another embodiment, for example, between the impression cylinder 110 and the plate cylinder 130 so as to be able to move to and away from the impression cylinder 110 and the plate cylinder 130. The conductive ink Ic supplied to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 is once transferred to the blanket cylinder after the blanket cylinder is rotatably arranged on the plate cylinder 130, and then the plate cylinder 130. It is also possible to adopt an offset method for transferring to the sheets held on the effective surfaces 110a to 110c.

  In the embodiment described above, the plate cylinder 130 having a diameter size (double diameter) including the effective surface 130a for holding the plate P having a double size formed with the two plate surfaces Pg and Psd is applied. However, the present invention is not limited to this, and if necessary, for example, a plate having a diameter size (triple diameter) having an effective surface for holding a triple size plate formed with three plate surfaces. It is also possible to apply a barrel.

  In the embodiment described above, the suction heads 112 </ b> A to 112 </ b> C connected to the suction pump 217 are provided on the effective surfaces 110 a to 110 c of the impression cylinder 110, so that the sheet conveyance direction rear side (end side) is provided. The effective surfaces 110a to 110c are detachably sucked and held. However, as another embodiment, for example, instead of the suction heads 112A to 112C and the like, on the effective surfaces 110a to 110c of the impression cylinder 110, for example. Even if the rubber sheet made of silicon rubber or the like is attached so that the rear side (terminal side) in the sheet conveyance direction can be detachably attached to the effective surfaces 110a to 110c, Similar effects can be obtained.

  In the above-described embodiment, the case where the impression cylinder 110 having the three effective surfaces 110a to 110c is applied has been described. However, the present invention is not limited to this, and three or more odd numbers (for example, five Any impression cylinder having a glossy (seven) effective surface (holding surface) can be applied in the same manner as in the above-described embodiment. However, as in the above-described embodiment, the impression cylinder 110 having the three effective surfaces 110a to 110c is very preferable because it can achieve the most space saving.

  In the embodiment described above, the case of manufacturing a TFT has been described. However, the present invention is not limited to this, and a functional layer is formed by laminating a functional material on a flexible base material. Thus, if an electronic device is manufactured, it can be applied in the same manner as in the above-described embodiment.

  Since the electronic device manufacturing apparatus according to the present invention can easily and sufficiently adjust the length (interval) between the impression cylinder and the transfer cylinder, it can be used extremely beneficially industrially.

100A, 100B Main frame 110 Impression cylinder 110a-110c Effective surface 111A-111C Holding claw device 112A-112C Suction head 120 Supply cylinder 120a Effective surface 121 Holding claw device 130 Plate cylinder 130a Effective surface 131 Plate holding device 140 Coater cylinder 150 Discharge cylinder 150a Effective surface 151 Holding claw device 161 Bearing 162 Sleeve 163 Guide rail 164 Slider 165 Subframe 165a Bracket 166 Stopper 167 Screw shaft 168 Nut block 168a Bracket 169 Support member 171 Transmission cylinder 172 Rotating plate 173 Shaft plate 175 Screw plate 175 Screw plate Nut block 177 Support plate 177a Support stay 178, 179 Gear 180 Rotating shaft 181 Warm wheel 182 C 183 Support member 188, 189 Bracket 191 Ink jet device 192 Insulating ink supply device 200 Control device 201-205 Motor 211-214 Actuator 215, 216, 219 Servo motor 215a Drive shaft 217 Suction pump 218A-218C Valve 221-225 Rotary Encoder 226, 227 Position detector 226a Linear scale 226b Sensor P plate Pg, Psd Plate surface Ic Conductive ink Ii Insulating ink S1-S4 Sheet

Claims (2)

An electronic device manufacturing apparatus for manufacturing an electronic device by laminating a functional material on a flexible substrate to form a functional layer,
An impression cylinder that holds and rotates the substrate;
A transfer cylinder for transferring functional ink made of a functional material to the substrate held by the impression cylinder;
A transfer cylinder support means for supporting the transfer cylinder so as to be rotatable and movable in the axial direction, and supporting the transfer cylinder so as to be able to move linearly in contact with and away from it
Transfer cylinder contact / separation movement drive means for moving the transfer cylinder support means so as to move the transfer cylinder against and away from the impression cylinder;
Transfer cylinder rotation driving means for rotating the transfer cylinder supported by the transfer cylinder support means so as to be able to move integrally with the transfer cylinder;
An electronic device manufacturing apparatus, comprising: a transfer cylinder axial direction movement driving unit that is supported by the transfer cylinder support means so as to move integrally with the transfer cylinder and moves the transfer cylinder in the axial direction. . The electronic device manufacturing apparatus according to claim 1,
The electronic device manufacturing apparatus, wherein the transfer cylinder is a plate cylinder having a plate surface formed with a pattern corresponding to a functional layer in a circumferential direction.

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