JP2017181624A5 - - Google Patents
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- Publication number
- JP2017181624A5 JP2017181624A5 JP2016065205A JP2016065205A JP2017181624A5 JP 2017181624 A5 JP2017181624 A5 JP 2017181624A5 JP 2016065205 A JP2016065205 A JP 2016065205A JP 2016065205 A JP2016065205 A JP 2016065205A JP 2017181624 A5 JP2017181624 A5 JP 2017181624A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- light source
- electro
- spacer
- projection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 125000006850 spacer group Chemical group 0.000 description 5
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016065205A JP2017181624A (ja) | 2016-03-29 | 2016-03-29 | 電気光学装置、電気光学ユニットおよび電子機器 |
| US15/467,036 US9933614B2 (en) | 2016-03-29 | 2017-03-23 | Electro-optic device, electro-optic unit, and electronic apparatus |
| CN201710178311.0A CN107238924A (zh) | 2016-03-29 | 2017-03-23 | 光电装置、光电单元以及电子设备 |
| US15/905,057 US10261311B2 (en) | 2016-03-29 | 2018-02-26 | Electro-optic device, electro-optic unit, and electronic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016065205A JP2017181624A (ja) | 2016-03-29 | 2016-03-29 | 電気光学装置、電気光学ユニットおよび電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017181624A JP2017181624A (ja) | 2017-10-05 |
| JP2017181624A5 true JP2017181624A5 (enExample) | 2019-01-17 |
Family
ID=59960884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016065205A Withdrawn JP2017181624A (ja) | 2016-03-29 | 2016-03-29 | 電気光学装置、電気光学ユニットおよび電子機器 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US9933614B2 (enExample) |
| JP (1) | JP2017181624A (enExample) |
| CN (1) | CN107238924A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018055667A1 (ja) * | 2016-09-20 | 2018-03-29 | 三菱電機株式会社 | 半導体装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4124657B2 (ja) * | 2001-03-19 | 2008-07-23 | 富士通株式会社 | 光源装置及び表示装置 |
| JP4342174B2 (ja) | 2002-12-27 | 2009-10-14 | 新光電気工業株式会社 | 電子デバイス及びその製造方法 |
| JP2005309174A (ja) * | 2004-04-23 | 2005-11-04 | Seiko Epson Corp | 波長可変フィルタ及びその製造方法 |
| US7701631B2 (en) * | 2004-09-27 | 2010-04-20 | Qualcomm Mems Technologies, Inc. | Device having patterned spacers for backplates and method of making the same |
| US7763962B2 (en) * | 2006-11-10 | 2010-07-27 | Spatial Photonics, Inc. | Wafer-level packaging of micro devices |
| JP4906496B2 (ja) * | 2006-12-25 | 2012-03-28 | 新光電気工業株式会社 | 半導体パッケージ |
| JP4577318B2 (ja) * | 2007-03-02 | 2010-11-10 | セイコーエプソン株式会社 | 液晶装置の製造方法 |
| WO2009038686A2 (en) * | 2007-09-14 | 2009-03-26 | Tessera Technologies Hungary Kft. | Hermetic wafer level cavity package |
| JP2010014798A (ja) * | 2008-07-01 | 2010-01-21 | Nsk Ltd | マイクロミラーデバイス及び光照射装置 |
| US7898724B2 (en) | 2008-11-05 | 2011-03-01 | Texas Instruments Incorporated | Thermal conduction by encapsulation |
| JP2011027973A (ja) | 2009-07-24 | 2011-02-10 | Fujitsu Ltd | マイクロ素子 |
-
2016
- 2016-03-29 JP JP2016065205A patent/JP2017181624A/ja not_active Withdrawn
-
2017
- 2017-03-23 US US15/467,036 patent/US9933614B2/en active Active
- 2017-03-23 CN CN201710178311.0A patent/CN107238924A/zh active Pending
-
2018
- 2018-02-26 US US15/905,057 patent/US10261311B2/en active Active
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