JP2017168866A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 107
- 230000007246 mechanism Effects 0.000 claims abstract description 107
- 229910052751 metal Inorganic materials 0.000 claims description 40
- 239000002184 metal Substances 0.000 claims description 40
- 238000004544 sputter deposition Methods 0.000 claims description 19
- 229910044991 metal oxide Inorganic materials 0.000 claims description 15
- 150000004706 metal oxides Chemical class 0.000 claims description 15
- 230000007723 transport mechanism Effects 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 abstract description 416
- 238000000034 method Methods 0.000 description 194
- 230000008569 process Effects 0.000 description 191
- 239000007789 gas Substances 0.000 description 35
- 230000000694 effects Effects 0.000 description 34
- 238000010438 heat treatment Methods 0.000 description 34
- 230000009471 action Effects 0.000 description 30
- 238000001816 cooling Methods 0.000 description 26
- 229910019236 CoFeB Inorganic materials 0.000 description 23
- 230000003647 oxidation Effects 0.000 description 20
- 238000007254 oxidation reaction Methods 0.000 description 20
- 238000011144 upstream manufacturing Methods 0.000 description 20
- 239000011777 magnesium Substances 0.000 description 19
- 229910003321 CoFe Inorganic materials 0.000 description 15
- 229910019041 PtMn Inorganic materials 0.000 description 15
- 239000010410 layer Substances 0.000 description 15
- 230000005291 magnetic effect Effects 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000011143 downstream manufacturing Methods 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 10
- 239000001257 hydrogen Substances 0.000 description 10
- 229910052739 hydrogen Inorganic materials 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 230000005856 abnormality Effects 0.000 description 9
- 238000005247 gettering Methods 0.000 description 9
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 9
- 239000000395 magnesium oxide Substances 0.000 description 9
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 230000005294 ferromagnetic effect Effects 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000003111 delayed effect Effects 0.000 description 5
- 102100031383 Fibulin-7 Human genes 0.000 description 4
- 101000846874 Homo sapiens Fibulin-7 Proteins 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 239000002923 metal particle Substances 0.000 description 4
- 101100323157 Arabidopsis thaliana LAP1 gene Proteins 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000011946 reduction process Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 101000639461 Rattus norvegicus Small nuclear ribonucleoprotein-associated protein B Proteins 0.000 description 2
- 101100298008 Strongylocentrotus purpuratus PM27 gene Proteins 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000004148 unit process Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- H—ELECTRICITY
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Abstract
Description
ところで装置を稼働しているときに、前記装置に組み込まれた処理チャンバが故障して使用できなくなる可能性がある。この場合には、故障した処理チャンバ内にある基板と、この基板よりも後から装置に搬入された基板に対しては、故障した処理チャンバでの処理を行うことができないため、この装置にて積層膜を形成することができず、これら基板は廃棄することになる。
複数の処理モジュールを順次用い、基板に対し真空雰囲気にて複数の一連の処理を行うための基板処理装置において、
真空雰囲気にされる搬送室内に配置されると共に、各々水平回転、進退自在に構成され、互いに隣接するもの同士で当該搬送室内にて基板の受け渡しが可能な基板搬送機構の列と、
この列の左右両側にて当該列に沿って配置され、基板に対して処理を行う処理モジュールの列と、
前記処理モジュールの各列の一端側に配置された予備真空室と、
基板の搬送を制御する制御部と、を備え、
前記複数の処理モジュールには、基板搬送機構の列側の側壁が互いに隣接する基板搬送機構の間に向かって突出し、斜め前方側及び斜め後方側のいずれの基板搬送機構からも基板の受け渡しが可能なように構成された処理モジュールが含まれ、
前記処理モジュールの列は、前記一連の処理の各処理が少なくとも2つの処理モジュールのいずれにおいても行うことができるように構成され、
前記制御部は、処理モジュールの列に含まれる一の処理モジュールが使用できなくなったときには、当該一の処理モジュールにて行われる処理と同じ処理を行える他の処理モジュールを使用して基板の処理を続行するように制御信号を出力することを特徴とする。
さらに、前記第2の列では、図1及び図2に示すように、ロードロック室LL2、処理モジュールPM8〜PM13及び退避用モジュールSM1の真空容器5は、搬入出ポート2側から見て例えば左側に向けてV字状に突出して屈曲する側壁42を備えている。そして、第2の列の互いに隣接するロードロック室LL2、処理モジュールPM8〜PM13及び退避用モジュールSM1の側壁42同士の間に、搬送モジュールTMの側壁32が夫々入り込むように配列されている。
そして、この真空処理装置では、前記一連の処理の各処理が少なくとも2つの処理モジュールのいずれにおいても行うことができるように、処理モジュールが配置されている。従って、真空処理装置は、同じ処理を少なくとも2つの処理モジュールのいずれにおいても行うことができるように、同じ金属膜の成膜処理を行う成膜モジュールと、酸化モジュールと、加熱モジュールと、冷却モジュールとを少なくとも2個ずつ備えている。酸化モジュール、加熱モジュール及び冷却モジュールについては、1つのモジュールはウエハWの処理に用いるものであり、残りのモジュールは予備の処理モジュールである。
このとき、例えば処理モジュールPM14が使用できなくなったときには、例えば第1の列ではロードロック室LL1から処理モジュールPM11へのウエハWの搬入を停止し、処理モジュールPM24を他の処理モジュールとして使用してウエハWの処理が続行される。この場合には、例えば図40に示すように、第1の列のウエハWは、処理モジュールPM24にて処理を行った後、再び第1の列の処理モジュールPM15〜PM19に順次搬送されて処理が行われるように搬送が制御される。
上述の例では、第1の列のウエハWは、処理モジュールPM14が使用できなくなったときに、処理モジュールPM24にて処理を行った後、そのまま第2の列の処理モジュールPM25〜PM29に順次搬送して処理を行うようにしてもよい。さらに、同じロットのウエハWに対して一連の処理を行うために、ロードロック室LL1に搬入予定のウエハWに対してもロードロック室LL2を介して処理モジュールPM21に搬送し、一連の処理を行うようにしてもよい。
四角モジュールB1、B10でウエハWは加熱処理されて脱気される。五角モジュールA1にて、ウエハWの表面がスパッタエッチングされ、当該表面がクリーニングされる。五角モジュールA2にて、ウエハW表面にTaからなるシード層が成膜される。このシード層はTaに代わりRuにより形成してもよい。四角モジュールB3で、ウエハWが加熱処理される。五角モジュールA3でCo膜、Pd膜が交互に繰り返しn回成膜される。この繰り返しの回数nは、4以上20以下の整数である。四角モジュールB4で、ウエハWが冷却処理される。五角モジュールA4でTa膜、CoFeB膜がこの順で形成される。四角モジュールB5でウエハWの向きが調整される。
複数の処理モジュールを順次用い、基板に対し真空雰囲気にて複数の一連の処理を行うための基板処理装置において、
列をなすように複数設けられ、各々真空雰囲気にされる搬送室と、
前記複数の搬送室内に各々配置され、各々水平回転、進退自在に構成され、互いに隣接するもの同士で当該搬送室内にて基板の受け渡しが可能な基板搬送機構の列と、
この列の左右両側にて当該列に沿って配置され、基板に対して処理を行う処理モジュールの列と、
前記基板搬送機構の列の一端側に配置された予備真空室と、
基板の搬送を制御する制御部と、を備え、
前記複数の処理モジュールには、基板搬送機構の列側の側壁が互いに隣接する基板搬送機構の間に向かって突出し、斜め前方側及び斜め後方側のいずれの基板搬送機構からも基板の受け渡しが可能なように構成された処理モジュールが含まれ、
隣接する前記搬送室同士はゲートバルブにより仕切られ、前記ゲートバルブの近傍には隣接する前記基板搬送機構により各々前記基板が受け渡される基板受け渡し部が設けられていることを特徴とする。
Claims (4)
- 複数の処理モジュールを順次用い、基板に対し真空雰囲気にて複数の一連の処理を行うための基板処理装置において、
列をなすように複数設けられ、各々真空雰囲気にされる搬送室と、
前記複数の搬送室内に各々配置され、各々水平回転、進退自在に構成され、互いに隣接するもの同士で当該搬送室内にて基板の受け渡しが可能な基板搬送機構の列と、
この列の左右両側にて当該列に沿って配置され、基板に対して処理を行う処理モジュールの列と、
前記基板搬送機構の列の一端側に配置された予備真空室と、
基板の搬送を制御する制御部と、を備え、
前記複数の処理モジュールには、基板搬送機構の列側の側壁が互いに隣接する基板搬送機構の間に向かって突出し、斜め前方側及び斜め後方側のいずれの基板搬送機構からも基板の受け渡しが可能なように構成された処理モジュールが含まれ、
隣接する前記搬送室同士はゲートバルブにより仕切られ、前記ゲートバルブの近傍には隣接する前記基板搬送機構により各々前記基板が受け渡される基板受け渡し部が設けられていることを特徴とする基板処理装置。 - 前記処理モジュールの列は、金属膜と金属酸化膜とが合わせて8層以上積層された積層膜を基板上に形成するために設けられ、
金属膜の形成を行う処理モジュールは、スパッタを行うための処理モジュールであることを特徴とする請求項1記載の基板処理装置。 - 前記処理モジュールは、互いに異なる種類の複数のターゲットが設けられていることを特徴とする請求項2記載の基板処理装置。
- 前記処理モジュールの列と基板搬送機構の列との配置関係は、処理モジュール、基板搬送機構、処理モジュールの並びが千鳥状になるように設定されたことを特徴とする請求項1ないし3のいずれか一つに記載の基板処理装置。
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