JP2017141115A - Carrier head for brittle material substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an easily-removable carrier head that carries an end material produced when a substrate having a functional area formed in such a shape as to be aligned in longitudinal and lateral directions is broken.SOLUTION: A carrier head has a base plate 21 and a lid plate 22, and a void 24 is provided between connection parts of them. A vacuum suction device, which is connected to the inside of the void 24 and which can jet or suck air from or into an opening, is provided. The air is sucked in from the opening to attract the end material and carry it to a predetermined place. Additionally, the air is jetted from the opening when the end material is removed. Thus, the end material can be removed.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a brittle material substrate such as a semiconductor wafer, which has a large number of functional regions (also referred to as device regions) formed in alignment in the vertical and horizontal directions, and a substrate that is broken for each functional region. The present invention relates to a transport head used when sucking and transporting.

  Patent Document 1 proposes a substrate breaking device that breaks a substrate on which a scribe line is formed by pressing it perpendicularly to the surface along the scribe line from the back surface of the surface on which the scribe line is formed. Hereinafter, an outline of the break by such a break device will be described. It is assumed that a number of functional regions are formed in alignment on a semiconductor wafer to be broken. In the case of division, first, scribe lines are formed in the vertical direction and the horizontal direction at equal intervals between the functional areas on the substrate. And it breaks with a break device along this scribe line. Fig.1 (a) has shown sectional drawing of the board | substrate mounted in the breaking apparatus before dividing | segmenting. As shown in this figure, functional regions 101a, 101b and scribe lines S1, S2, S3,... In the case of dividing, an adhesive tape 102 is attached to the back surface of the substrate 101, and a protective film 103 is attached to the surface. In the case of a break, a scribe line to be broken, in this case a scribe line S2, is arranged in the middle of the receiving blades 105 and 106 as shown in FIG. The substrate 101 is pressed. In this way, a break by three-point bending between the pair of receiving blades 105 and 106 and the blade 104 has been performed.

JP 2004-39931 A

  When the break device having such a configuration is used to break a substrate on which a scribe is formed in a lattice shape, an end material remains around the chips separated for each functional region. Before the divided functional chips are transported together or after transporting, it is necessary to separate and transport the surrounding end materials. Therefore, it is conceivable that only the end material is sucked and transported by the transport head, but since the silicon material is injected into the surface of the functional area of the substrate, the end material is sucked and transported to a predetermined place. When only the material is discarded, it is difficult to remove the end material from the transport head.

  The present invention has been made paying attention to such a problem, and an object of the present invention is to provide a transport head that easily separates the end material from the head after the end material is transported.

In order to solve this problem, the transport head of the present invention has a functional area formed at a predetermined pitch in the vertical direction and the horizontal direction on one surface, and is arranged in a lattice shape so that the functional area is located at the center A transport head that transports an end material region of a brittle material substrate that is broken along a formed scribe line and has a lattice-like functional region and a region that becomes an end material on the outside, the lid plate, and the lid plate vacuum air gap airtight formed between the surface outer periphery which is not in contact from said lid plate, for connecting to said base plate having an opening communicating with the air gap, the air in the gap formed by the lid plate and the base plate of comprising a suction device, the opening of the base plate is one which is arranged annularly at a pitch corresponding to the pitch of the functional area of the brittle material substrate.

The vacuum suction device can eject or suck air from the opening .

  Here, the transport head may include an elastic sheet that is attached to a surface of the base plate that is not in contact with the lid plate and has an opening arranged at a position facing the opening of the base plate.

According to the present invention having such a feature, only the end material can be adsorbed by the transport head by abutting against the substrate broken along the scribe line. And after conveying the position required adsorbed end material, thereby dropping the end material adsorbed by allowing out-injection air from the opening of the base plate. For this reason, the end material can be reliably removed from the transport head and discarded.

FIG. 1 is a cross-sectional view showing a state of a conventional substrate during a break. FIG. 2 is a front view and a partial cross-sectional view showing an example of a substrate scribed and broken in a lattice shape. FIG. 3 is a perspective view showing the transport head according to the embodiment of the present invention. FIG. 4 is a front view and a bottom view of the transport head according to the present embodiment. FIG. 5 is a cross-sectional view taken along line AA and BB of the transport head according to the present embodiment. FIG. 6 is a front view and a side view showing the pusher plate according to the present embodiment. FIG. 7 is a partial cross-sectional view showing a state where the pusher plate of the transport head according to the present embodiment is pulled up and pulled down.

In the embodiment of the present invention, as shown in FIG. 2, the substrate 10 to be broken has a large number of functional regions 11 at a constant pitch along the x-axis and y-axis in the manufacturing process. Let it be a formed substrate. For example, the functional region 11 is a region having a function as an LED, and a circular lens for the LED is formed on each surface in each functional region. In order to divide each functional area into LED chips, the scribe lines S _{y1 to} S _yn and the horizontal scribe lines S _{x1 to} S _yn are arranged so that each functional area is centered by a scribing device. _xm are formed so as to be orthogonal to each other. The pitches of these scribe lines S _{x1 to} S _xm and scribe lines S _{y1 to} S _yn are the same as the pitches of the functional area in the x-axis and y-axis directions. The scribe line S _x1 of the substrate 10, S _xm, on the inside of the S _y1, S _yn, a silicon resin is filled in transporting the substrates, the range of functional areas of the silicon resin LED is formed Therefore, a linear protrusion 12 slightly higher than the surface of the substrate 10 is formed around the outside of the functional region.

Breaking is performed on the substrate 10 thus scribed by pressing a blade of a breaker (not shown) from right above the scribe line. Then, by repeating the break along the scribe lines S _{x1 to} S _xm , it can be made into a long and narrow piece, and further, the individual LED chips can be generated by repeating the break along the scribe lines S _{y1 to} S _yn. it can. The substrate 10 immediately after being broken is divided along the scribe line, but is not separated. In other words, the divided substrate 10 is composed of an unnecessary portion serving as an outer peripheral end material and a plurality of grid-shaped LED chip portions excluding the outer periphery.

  Next, a description will be given of a transport head for sucking only peripheral peripheral materials according to the embodiment of the present invention. 3 is a perspective view showing the transport head, FIG. 4A is a front view thereof, and FIG. 4B is a bottom view thereof. 5A is a cross-sectional view taken along the line AA in FIG. 4A, FIG. 5B is a cross-sectional view taken along the line BB, and FIG. 6 is a front view and a side view showing the pusher plate. As shown in these drawings, the transport head 20 has a rectangular base plate 21 and a lid plate 22 having substantially the same shape. The base plate 21 and the lid plate 22 are formed with a recess in the center portion of the opposing surfaces, and are bonded to each other via an annular rubber sheet 23 in order to keep airtight. An airtight space 24 is formed by each recess and the rubber sheet 23. As shown in the bottom view of the transport head in FIG. 4B, the base plate 21 is provided with guide openings 21a and 21b at diagonal corner positions. The openings 21a and 21b are for inserting the pins protruding above the outside of the substrate so that the transport head 20 can be accurately positioned with respect to the substrate.

On the lower surface of the base plate 21, a large number of openings 25 are provided in the vicinity of each side. All the openings 25 communicate with each other and are connected to a gap 24 formed by a recess between the base plate 21 and the lid plate 22. A pipe joint 26 is provided on the upper surface of the lid plate 22 and communicates with the gap 24. The pipe joint 26 is connected to a vacuum suction device via a tube (not shown), and can drive air from the opening 25 or suck air by driving the vacuum suction device. The pitch of the openings 25 is the same as the pitch of the scribe lines S _{x1 to} S _xm and S _{y1 to} S _yn of the substrate 10.

A pusher plate 31 that can move up and down is provided inside the gap 24. The pusher plate 31 has substantially the same shape as the substrate 10, and as shown in the front view and the side view in FIG. A large number of pusher pins 32 are provided perpendicular to the surface of the pusher plate 31. The lengths of the pusher pins 32 are all the same as shown in the figure. The pitch of the pusher pin 32, the scribe line S _x1 to S _xm of the substrate 10, the same as the pitch of the S _y1 to S _yn.

  Further, a plunger 33 is connected to the central portion of the pusher plate 31, and a plunger 35 is further connected in the vertical direction via connection plates 34a and 34b. The pusher plate 31 moves up and down in the gap 24 between the base plate 21 and the lid plate 22 by driving the plunger 35.

  As shown in the perspective view of FIG. 3, four arms 41 a to 41 d are provided around the upper surface of the lid plate 22, and a flat bracket 42 is provided perpendicularly to the back surface of the base plate 21 therebetween. An air cylinder 43 is attached to the bracket 42. Further, the air cylinder 43 is provided with position sensors 44a and 44b for detecting the vertical movement of the plunger 35 connected to the pusher plate 31.

  Now, as shown in the bottom view of the transport head in FIG. 4B, an elastic sheet 51 made of an annular rubber is attached around the lower surface of the base plate 21, and the above-described pusher plate is provided around the inside. A number of openings 52 are annularly provided at positions corresponding to the 31 pins 32. When the plunger 35 is pulled down, the tip of the pusher pin 32 protrudes from the opening 52 of the rubber sheet 51 through the opening 25. When the plunger 35 is pulled up, the pusher pin 32 does not protrude from the opening 52 and is inside. It is comprised so that it may be in the state accommodated in.

  When transporting a substrate that has already been broken using the transport head 20, the plunger 35 is first sucked and the pusher plate 31 is pulled up. The position sensor 44a detects the upward movement of the pusher plate. At this time, the pusher pin 32 is not projected from the opening 52 of the rubber sheet 51 as shown in FIG. Then, air is sucked from each opening 52 to fix the transport head 20 to the broken substrate. Then, by lifting the head as it is, it is possible to lift only the peripheral material around the broken substrate.

And after moving the conveyance head 20 to the shooter which is not shown in figure, air is ejected from the opening 52 with a vacuum suction device. This at least one end member is Ru removed. Therefore, the pusher plate 31 is pushed down as shown in FIG. At this time, the position sensor 44b detects the downward movement of the pusher plate. If it carries out like this, the pin 32 can be protruded from the opening 52, and, thereby, all the end materials adhering to the circumference | surroundings can be removed.

  Thereafter, if the remaining functional area of the substrate is transported, the central lattice-shaped substrate area can be transported without being affected by the linear protrusions shown in FIG.

  Note that only the central substrate region may be transported, and then only the peripheral end material region may be transported by the transport head of the present embodiment.

  In the present invention, a peripheral material formed after breaking a brittle material substrate is adsorbed, and the end material is removed by projecting a pusher pin from the opening when removing from the head after the adsorption. Therefore, the present invention can be effectively applied to an apparatus that conveys the end material around the functional area.

DESCRIPTION OF SYMBOLS 10 Board | substrate 11 Functional area 12 Linear protrusion 20 Conveyance head 21 Base plate 22 Lid plate 23 Rubber sheet 24 Gap 25 Pipe joint 31 Pusher plate 32 Pusher pin 33, 35 Plunger 34a, 34b Connection plate 41a-41d Arm 42 Bracket 43 Air cylinder 44a 44b Optical sensor 51 Elastic sheet 52 Opening

Claims (1)

Lattice-like functional area that has a functional area formed at a predetermined pitch in the vertical and horizontal directions on one side and is broken along a scribe line that is formed in a grid-like shape so that the functional area is located at the center And a transport head for transporting an end material region of a brittle material substrate having an end material region outside thereof,
Lid plate,
The surface periphery to form an empty gap airtight, which is not in contact and the lid plate between the lid plate, the base plate having an opening communicating with the air gap,
The ligated into the lid plate and the air in the gap formed by the base plate, equipped with a vacuum suction device air can be made or or suction is ejected from the opening,
The transport head is configured such that the openings of the base plate are annularly arranged at a pitch corresponding to the pitch of the functional region of the brittle material substrate.