JP2002313883A - Electronic device transport device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To constitute a transport head to be simple, small and light without blowing a peripheral electronic device. SOLUTION: A suction opening 3 formed in the transport head 1 is connected to an air source through a single air path port 2, and it transmits positive and negative pneumatics to a suction face 1b, sucks the electronic device W and holds the electronic device W at the suction face 1b. At the time of suction, a come-out stop member 5 restricts the shift of a removal pin 4. The electronic device W is removed from the suction face 1b by vacuum destruction. At that time, an engagement part 4a is brought into contact with a step 1c by the shift of the removal pin 4, and air jetted from the suction face 1b is interrupted. Jet quantity from the suction 1b is reduced. Then, the tip 4b of the removal pin 4 protrudes from the suction face 1b and it securely removes the electronic device W.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic device transport apparatus which transports an electronic device by sucking the device onto a transport head.

[0002]

2. Description of the Related Art An electronic device inspection apparatus or the like is provided with an electronic device transport device that transports electronic devices one by one from a standby location to a measurement location and transports the electronic devices to a discharge location after measurement. As such an electronic device transport device,
2. Description of the Related Art Conventionally, there is a configuration in which a suction port is provided in a transfer head to suck an electronic device, and after the transfer, the electronic device is separated from the suction port.

[0003] However, in the above-described configuration, there may be a case where excess air blown out from the suction port when the electronic device is detached blows off other electronic devices besides the desired electronic device at the standby and discharge locations. In some cases, there is a problem in automation of electronic device transportation. Recent small and lightweight electronic devices are easily blown away.

FIG. 4 shows another conventional transport head (Japanese Patent Laid-Open No.
FIG. The transport head 50 is provided with a plurality of suction pads 51 on the lower surface of the head, and transports the optical disk while sucking the optical disk by vacuum suction. At the center of the suction pad 51, an air cylinder 5
A push-out pin 52 that can be protruded by 3 is provided. After the conveyance, the optical disk can be separated from the suction pad 51 by extending the air cylinder 53 and projecting the pushing pin 52 simultaneously with the vacuum breaking of the suction pad 51.

FIG. 5 shows another conventional transport head (Patent No. 2).
648118). The transfer head 60 is provided with a suction port 61 on the lower surface of the head, and transfers the semiconductor chip in a state in which the semiconductor chip is sucked by vacuum suction through a vacuum joint (suction air path) 62. A tip holding rod 63 is provided at the suction port 61 so as to be freely protruded. The tip holding rod 63 is protruded by compressed air via a high-pressure air joint (compression air path) 64. After transport,
The inside of the emptying port 61 is returned to the atmospheric pressure, and compressed air is supplied from the high-pressure air joint 64 side, so that the tip holding rod 6
By projecting 3, the semiconductor chip can be detached. The tip holding rod 63 is urged upward by an internal spring 65, and is retracted upward when compressed air is not supplied.

[0006]

However, the apparatus shown in FIG. 4 has an air cylinder 53 inside the transfer head 50, and the transfer head 50 is heavy, and the transfer mechanism of the transfer head 50 is subjected to a moving load. The mechanism has become larger.

5 also has a tip holding rod 63 and a spring 65 of a predetermined length inside the transfer head 60, so that the transfer head 60 is heavy, and the transfer mechanism of the transfer head 60 has a moving load. However, the moving mechanism is enlarged. In addition, since there are two different air paths, an adsorption air path and a compression air path, the number of parts constituting each air path including the solenoid valve increases, and special control for switching of the solenoid valve and supply and discharge of air is performed. Was needed. As a result, the overall configuration is complicated, maintenance and inspection cannot be performed easily, and the cost increases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and has as its object to provide an electronic device transport apparatus which can configure a transport head simply, compactly and lightly without blowing away electronic devices in the vicinity. I have.

[0009]

In order to achieve the above object, an electronic device transport apparatus according to the present invention comprises a cylindrical transport head (1) for adsorbing an electronic device (W) by air pressure, and In the electronic device transport apparatus that transports the electronic device by moving a head, the cylindrical transport head has an adsorbing surface (1b) for adsorbing the electronic device at one end and an opening on the adsorbing surface. A suction opening for forming a single air passage from the opening to the other end and being connected to an air source, and transmitting positive or negative air pressure from the air source to the electronic device to be suctioned to the suction surface; And (3) moving in the suction opening by the positive or negative air pressure applied by the air source, and closing the suction opening when the positive air pressure is applied to the electronic device. It is disengaged, and when the negative air pressure, characterized in that it comprises a and a closing member (4, 14) for adsorbing the electronic device is opened the suction opening portion.

In the suction opening (3), a retaining portion (5) for restricting the movement of the opening / closing member (4, 14) when a negative air pressure is applied by the air source, A step (1c) is provided between the suction surface and the retaining portion, and the opening / closing member is formed in a rod shape having a predetermined length (L2) and moves within the suction opening (3). A detachable pin (4) formed to be longer (L2) than the length (L1) between the suction surface and the stepped portion, and the detached pin is formed when the positive air pressure is applied by the air source. An engagement portion (4a) for contacting the suction portion to block the blowing of air from the suction surface (1b), and the electronic device (W) is pushed out by a predetermined length to push the electronic device (W) when the suction opening is closed. The tip (4b) may protrude from the suction surface by L4).

Further, the opening / closing member is provided on the suction surface (1).
b) A spherical opening / closing sphere having a diameter larger than the opening diameter of the portion (14)
The opening / closing sphere blocks air blowing from the suction surface when contacting the suction surface by air pressure from the air source, and a predetermined amount from the suction surface so as to push out the electronic device (W). You may comprise so that it may protrude freely.

The operation of the above-described structure is explained by using the release pin 4 shown in FIG.
This will be described by using an example. The suction surface 1b at the distal end of the transfer head 1 is capable of sucking the electronic device W, and moves the transfer head 1 in the suction state to transfer the electronic device W. The suction opening 3 formed inside the transport head 1 is connected to an air source through a single air path, and transmits positive and negative air pressure to the suction surface 1b to suck the electronic device W, The electronic device W is held on the suction surface 1b by vacuum suction. During this suction, the detachment pin 4 moves within the suction opening 3, but the movement is regulated by the retaining member 5. on the other hand,
The electronic device W is separated from the suction surface 1b by the vacuum break.
At this time, the movement of the detachment pin 4 causes the engagement portion 4a to contact the step portion 1c to shut off the air blown out from the suction surface 1b, thereby reducing the blowout amount. At the same time, release pin 4
Protrudes from the suction surface 1b and reliably detaches the electronic device W.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIG. 1 shows a first embodiment of a transport head which is a main part of an electronic device transport apparatus of the present invention.
It is a partially cut front view showing an embodiment. The electronic device transport device is provided in an electronic device inspection device or the like, and is configured such that the transport head 1 is movable by a moving mechanism (not shown). The transport head 1 transports electronic devices one by one from a standby location to a measurement location by a moving mechanism.
After the measurement, it is transported to the discharge location.

The illustrated transport head 1 is formed in a hollow cylindrical shape, and has an air passage opening 2 for supply / discharge formed therein. The upper end 2a of the air passage 2 is connected to an air source via a joint (not shown). The air source applies positive and negative air pressure (vacuum break and vacuum suction) through the one air passage 2.

The distal end portion 1a of the transport head 1 is formed to have a small diameter, and sucks and holds the electronic device on the suction surface 1b. Correspondingly, a step portion 1c is formed inside the front end portion 1a inside the transport head 1, and a small-diameter suction opening 3 having a predetermined length is formed. The suction opening 3 is provided with a detachment pin 4 as an opening / closing member for closing or opening the suction opening 3.

The detaching pin 4 has a length L of the suction opening 3.
It is formed to have a length L2 longer than 1. The suction opening 3 is formed to have a smaller diameter than the opening diameter, and a gap is formed between the suction opening 3 and the detachment pin 4. An engaging portion 4 a having a diameter larger than that of the suction opening 3 is provided above the detachment pin 4. As shown in FIG.
a is in contact with the step 1c, and the tip (lower end) 4b
Project from the suction surface 1b by a predetermined length.

The detachment pin 4 is formed small and lightweight, and is movable up and down in the figure in conjunction with the application of positive and negative air pressures by an air source. In addition, a retaining member 5 is provided to protrude from the internal air passage 2. The illustrated retaining member 5 is composed of a pin that is press-fitted at one location a predetermined length L3 away from the step portion 1c. When the detachment pin 4 moves upward by the suction force at the time of suction by the air source, the engaging portion 4a contacts the retaining member 5 to regulate the movement of the detachment pin 4. At this time, the lower end portion 4b stays in the suction opening 3, and can be returned to the state shown in the drawing (the detachment pin 4 is located in the suction opening 3) when the vacuum is broken. .

The retaining member 5 is not limited to press-fitting but can be screwed. The retaining member 5 is not limited to one location, and may be provided in plural on the circumference of the transport head 1.

Next, the suction operation of the transport head 1 having the above configuration will be described with reference to the operation diagram of FIG. It should be noted that the arrows in the air passage 2 in the figure do not indicate the vertical movement of the transport head 1, but indicate the pressure direction of the air source. First, as shown in FIG. 2A, after moving the transport head 1 to the standby position of the electronic device W, a suction force is generated by an air source. At this time, the detachment pin 4 is moved upward by the suction force, and the suction opening 3 is opened at the suction surface 1b. At this time, the engaging portion 4a of the detachment pin 4 abuts on the retaining member 5 to restrict the movement of the detachment pin 4.

Next, as shown in FIG. 2 (b), the transport head 1 is lowered to suck the electronic device W on the suction surface 1b. At this time, the inside of the transport head 1 (the air passage opening 2 and the suction opening 3) is in a vacuum state, and the engaging portion 4a of the detaching pin 4 is separated from the retaining member 5. Then, the detachment pin 4 longer than the length of the suction opening 3 is, as shown in FIG.
The engaging portion 4a is separated from the step portion 1c. This allows
The suction state of the electronic device W is maintained.

Next, as shown in FIG. 2C, the transport head 1 is raised by the moving mechanism while the electronic device W is attracted, and transported from the standby position to the measurement position.

Next, after moving the transport head 1 to the measurement location of the electronic device W, the transport head 1 is lowered to the measurement location (the same state as in FIG. 2B). After this,
When the vacuum break is performed by the air source, as shown in FIG. 2D, the air inside the air passage opening 2 is blown out from the suction opening 3 to the outside by the vacuum break, and the release pin 4 causes the suction pin 4 to move to the suction surface. 1b. The protrusion length L4 at this time is, as shown in FIG.
2-Length L1 of the suction opening 3.

Since the detachment pin 4 projects from the suction surface 1b, the electronic device W can be easily detached. Also,
When the air inside the air passage opening 2 is blown out by the vacuum break, the detaching pin 4 has the upper end engaging portion 4 a at the stepped portion 1.
By contacting the portion c, the communication of the air passage between the air passage opening 2 and the suction opening 3 is blocked (closed). Thereby, air is blown out only momentarily from the suction opening 3 at the time of vacuum breakage, and the amount of air blown out from the suction opening 3 can be minimized by the engagement portion 4a.

After the measurement of the electronic device W, the electronic device W is transported from the measurement location to the discharge location. At this time, the electronic device W is sucked and conveyed in the same manner as described above between the measurement point (FIG. 2A) and the discharge point (FIG. 2D). At this time, since the state at the discharge location is as shown in FIG. 2D, the amount of air blown out from the suction opening 3 can be reduced, the measurement is completed, and the electronic device W already discharged around the discharge location is blown off. There is no.

(Second Embodiment) Next, FIG. 3 is a partially enlarged sectional view showing a second embodiment of a transport head which is a main part of the electronic device transport apparatus of the present invention. In the second embodiment, the opening / closing member is provided with the first opening 3 in the suction opening portion.
An opening / closing sphere 14 is provided instead of the detachment pin 4 of the embodiment.

An opening 1ba having an opening diameter smaller than that of the opening / closing sphere 14 is formed on the suction surface 1b of the transport head 1, and a tapered surface 3a conically inclined toward the opening 1ba is formed inside the opening 1ba. Are formed.

According to the above configuration, in the state shown in FIG. 3A (corresponding to FIG. 2A), the opening / closing sphere 14 is separated upward from the opening 1ba by the suction force from the air source, and The electronic device W can be sucked by opening the portion 1ba. At this time, the movement of the opening / closing sphere 14 is restricted by a predetermined distance upward by the retaining member 5. When the electronic device W is sucked, the suction opening 3 is in a vacuum state, and the opening / closing sphere 14 is separated from the retaining member 5.

Thereafter, the transport head 1 is moved to the measurement position and lowered, and then the state shown in FIG. 3B (FIG. 2D)
And the air source breaks the vacuum, the opening 1b
Air is blown out to the outside from a, and the blowing sphere causes a part of the opening / closing sphere 14 to project from the suction surface 1b by a predetermined amount. Due to this protrusion, the electronic device W can be easily detached, and at the same time, when the internal air is blown out, the opening / closing sphere 14 comes into contact with the opening 1ba (tapered surface 3a),
The opening 1ba is closed to stop blowing air.

Thus, similarly to the first embodiment, the blowing of air from the opening 1ba at the time of vacuum break can be minimized, and the blowing of another electronic device W can be particularly prevented at the discharge location.

In each of the above embodiments, the stick-shaped detaching pin 4 or the spherical opening / closing sphere 14 is provided as an opening / closing member capable of opening and closing the suction surface 1b of the transport head 1; The present invention is not limited to the above, and can be similarly applied as long as the configuration has a reproducibility of opening and closing as in the above-described embodiments using lid members of various shapes.

In addition, although the regulating member 5 is provided to regulate the movement of the release pin 4 and the opening / closing sphere 14 inside the transport head 1, the releasing pin 4 and the opening / closing sphere 14 are It may be configured to engage with each other so as to be restricted from moving with respect to the air passage opening 2 or the suction opening 3 inside the transport head 1, and in this case, the regulating member 5 can be unnecessary.

In each of the above-described embodiments, the air path from the air source and the air path port 2 of the transfer head 1 are configured as a single unit to apply positive and negative air pressures. According to this configuration, an air path can be formed with a minimum number of components and a connection configuration.
However, the present invention is not limited to this, and a configuration may be adopted in which the positive pressure and the negative pressure are supplied to the two air passage openings 2 provided in the transport head 1 as separate paths.

In the present invention, the electronic device is attracted or desorbed by the positive and negative air pressures of the air source. However, the transfer head is incompletely sealed, and the negative air pressure from the air source is reduced. By increasing the pressure, the electronic device can be adsorbed, the supply of the negative air pressure from the air source is stopped, and at the same time, the electronic device can be detached by the weight of the opening / closing member due to the incompletely closed state. According to this configuration, no positive air pressure is required.

[0034]

According to the present invention, since the opening / closing member is moved within the suction opening by the positive and negative air pressures applied by the air source, the suction surface of the electronic device can be closed or opened freely. It is possible to reduce the amount of air blown from the suction surface when the electronic device is detached, and to prevent the surrounding electronic devices from being blown off. As a result, the electronic device can be transported smoothly, and the automation of the inspection can be promoted. Also, since the suction opening is connected to the air source through a single air path to suck or release the electronic device by vacuum suction or vacuum breakage, the number of systems for applying air pressure can be minimized, and The electronic device can be sucked and conveyed by simple air control using the component parts.
In addition, the transport head can be reduced in size and weight, and the moving function can be easily configured.

Further, by providing a retaining portion for restricting the movement of the opening / closing member at the suction opening, the opening / closing member moving by the air pressure applied by the air source can be prevented from falling off, and the closing and opening of the suction surface can be prevented. The reproducibility can be obtained, and the effects of preventing the electronic device from being attracted, desorbed, and blown out of air can be stabilized. Further, according to the configuration in which the detachment pin is provided in the suction opening, when the electronic device is detached, the engaging portion contacts the step portion to prevent air from being blown out, and the tip protrudes from the suction surface to prevent the electronic device from being blown out. The device can be reliably detached.

Also, in the structure in which the opening / closing sphere is provided in the suction opening, similarly, when the electronic device is separated, the opening / closing sphere closes the suction surface to prevent air from being blown out, and to prevent the air from being blown out. A part of the sphere projects so that the electronic device can be reliably detached.

[Brief description of the drawings]

FIG. 1 is a partially cut front view showing a configuration of a transport head showing a first embodiment of an electronic device transport apparatus of the present invention.

FIG. 2 is an operation diagram of the transport head.

FIG. 3 is a diagram illustrating a transport head according to a second embodiment.

FIG. 4 is a sectional view showing a transfer head of a conventional electronic device transfer device.

FIG. 5 is a sectional view showing a transfer head of a conventional electronic device transfer device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Transfer head, 1b ... Suction surface, 1ba ... Opening, 1
c: stepped portion, 2: air passage opening, 3: suction opening, 3a ...
Taper surface, 4 ... detachment pin, 4a ... engagement part, 5 ... retaining member, 14 ... opening / closing sphere.

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C007 AS01 AS08 CY03 CY36 DS01 FS01 FT04 NS09 NS14 NS17 5F031 CA01 CA13 GA23 GA24 GA26 MA33 PA08

Claims (3)

[Claims] An electronic device transport apparatus for transporting said electronic device by adsorbing an electronic device (W) by pneumatic pressure with a cylindrical transport head (1) and moving said transport head. The suction head (1b) for adsorbing an electronic device at one end thereof
The electron that is opened to the suction surface, forms a single air path from the opening to the other end, is connected to an air source, and absorbs positive or negative air pressure from the air source on the suction surface. A suction opening (3) for transmitting to the device; and a positive or negative air pressure applied by the air source moves in the suction opening, and when the positive air pressure is applied, closes the suction opening. And an opening / closing member (4, 14) for opening the inside of the suction opening and sucking the electronic device when the negative air pressure is applied. apparatus. 2. A retaining portion (5) in the suction opening (3) for restricting movement of the opening / closing member (4, 14) when a negative air pressure is applied by the air source; A step (1c) is provided between the suction surface and the retaining portion, and the opening / closing member is formed in a rod shape having a predetermined length (L2) and moves within the suction opening (3). A detaching pin (4), the detaching pin having a length (L) between the suction surface and the step portion.
1) is formed longer (L2) and contacts the step portion when the positive air pressure is applied by the air source to contact the suction surface (1).
b) has an engaging portion (4a) for blocking air from being blown out, and a predetermined length (L4) from the suction surface to push the electronic device (W) when the suction opening is closed. 4. The method of claim 1, wherein 4b) is configured to protrude.
The electronic device transport apparatus according to claim 1. 3. The opening / closing member includes the suction surface (1b).
A spherical opening / closing sphere (14) having a diameter larger than the opening diameter of the portion, wherein the opening / closing sphere blocks air blowing from the suction surface when contacting the suction surface by air pressure from the air source; 2. The electronic device transport apparatus according to claim 1, wherein the electronic device is configured to be able to protrude by a predetermined amount from the suction surface so as to push out the electronic device.