JP2016040850A - Foreign matter removal device and die bonder having the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a foreign matter removal device on a substrate which can prevent re-adhesion of foreign matters by cleaning the surface of the substrate efficiently in a short time regardless of size of the substrate, and to provide a die bonder having the same.SOLUTION: A foreign matter removal device comprises a pickup device to which a dicing film mounting a die on the surface is fixed, and a collet which sucks the die peeled off from the dicing film and mounts the die on a substrate coated with an adhesive, and removes foreign matters on the substrate in order to coat the substrate with the adhesive. The foreign matter removal device includes a cleaning nozzle where air blowing holes and air suction holes are integrated.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a foreign matter removing device and a die bonder provided with the same.

  A die bonder is an apparatus for bonding a die (a chip of a silicon substrate on which an electronic circuit is built) to a lead frame or a substrate (hereinafter referred to as a substrate) using solder, gold plating, or resin as a bonding material. An engineering plastic is used as a die bonding material (paste, film) for bonding the die and the substrate, and the die is positioned and bonded to a lead frame or the like. At present, a method of bonding using resin as a bonding material has become the mainstream.

  In semiconductor die bonding, solder and die bonding resin paste (Ag epoxy and Ag polyimide) are used as adhesives to fix semiconductor chips (IC, LSI) to lead frames, ceramic cases, substrates, etc. .

JP 2002-50655 A JP 2002-186923 A JP 2000-5715 A JP 2007-115979 A

  When the die is bonded to the substrate, if the dust adheres to the surface of the substrate, the adhesive strength of the adhesive is reduced. Therefore, removing the dust (hereinafter referred to as foreign matter) on the substrate is necessary for mounting the die. It is extremely important. In addition, 5 to 10 μm of foreign matter has caused voids in the adhesive.

  Therefore, cleaning by airflow is generally performed in the die bonding process. The following patent documents are known as conventional techniques for such cleaning.

  For example, Patent Document 1 is provided by a plurality of types of cleaning devices along a substrate transport path that transports and moves horizontally, and after the substrate is cleaned while being transported, the chip is mounted on the substrate.

  Patent Document 2 has a configuration in which foreign matter adhering to the substrate surface is sucked out by a dust collector.

Patent Document 3 discloses an apparatus in which a dust removing device in which an air discharge chamber and an air suction chamber are integrally provided is arranged in the traveling direction of a workpiece.

  Patent Document 4 describes a configuration in which foreign matter adhering to the surface of a wafer ring in which a plurality of chips are arranged is removed by blowing and sucking ionized gas.

  As described above, as a means for removing the foreign matter on the substrate, it is generally performed that the foreign matter is blown off with air and the blown-out foreign matter is sucked and collected as described in each patent document. However, since all the patent documents are fixed foreign matter removal formats, it is insufficient to efficiently remove foreign matter over the entire width of the substrate and prevent reattachment of the removed foreign matter.

  An object of the present invention is to provide a foreign matter removing apparatus capable of efficiently cleaning a surface of a substrate in a short time regardless of the size of the substrate and preventing reattachment of foreign matter, and a die bonder having the same. .

  In order to achieve the above object, the present invention provides a pick-up device on which a dicing film having a die mounted thereon is fixed, and a substrate on which an adhesive is applied by adsorbing the die peeled off from the dicing film. And an air nozzle in which a suction hole and an air blowing hole for removing foreign substances on the substrate before bonding the die on the substrate are integrated.

  In order to achieve the above object, according to the present invention, in addition to the first feature, the air nozzle has a plurality of blow holes formed in an elliptical shape, and the plurality of suction holes are formed in an ellipse so as to surround the blow holes. It is preferable that it is formed in a shape.

  In order to achieve the above object, according to the present invention, in addition to the first feature, the air nozzle is preferably long in the moving direction of the substrate and moved in a direction perpendicular to the moving direction of the substrate.

  In order to achieve the above object, in the present invention, in addition to the first feature, the air nozzle is disposed long in the direction orthogonal to the moving direction on the substrate, and the moving direction of the substrate is While moving in the orthogonal direction, it is preferable to arrange two air nozzles.

  In addition to the first feature, the air nozzle is preferably arranged in a staggered manner in order to achieve the above object.

  In order to achieve the above object, according to the present invention, in addition to the first feature, the air nozzle preferably rotates in a direction orthogonal to the moving direction of the substrate with a longitudinal end portion as a rotation axis.

  In order to achieve the above object, according to the present invention, in addition to the first feature, a plurality of the air nozzles are preferably arranged in a direction orthogonal to the moving direction of the substrate.

  Moreover, in order to achieve the said objective, in addition to the 1st characteristic, in this invention, it is preferable to perform the blowing-in / out of the air by the said air nozzle intermittently.

  ADVANTAGE OF THE INVENTION According to this invention, the die bonder and foreign material removal apparatus which can clean the surface of a board | substrate efficiently in a short time irrespective of the size of a board | substrate, and can prevent reattachment of a foreign material can be provided.

FIG. 1 is a conceptual view of a die bonder as viewed from above. It is an external appearance perspective view of the pick-up apparatus attached to the die bonder of FIG. 3 is a schematic configuration diagram of a cleaning nozzle according to Embodiment 1. FIG. It is a figure which shows a motion and shape of the air nozzle of the cleaning nozzle which concerns on Example 1. FIG. 6 is a schematic configuration diagram of a cleaning nozzle according to Embodiment 2. FIG. 6 is a schematic configuration diagram of a cleaning nozzle according to Embodiment 3. FIG. 10 is a schematic configuration diagram of a cleaning nozzle according to Embodiment 4. FIG. FIG. 9 is a schematic configuration diagram of a cleaning nozzle according to a fifth embodiment.

  In order to remove foreign matter on the substrate, there is a nozzle that has a circular air outlet at the center and is provided with an air inlet so as to surround the outlet in a ring shape. .

  With such a nozzle, dust can be sucked in at a stroke before dust rises with air, and the dust that should have been removed does not adhere to the substrate again.

  On the other hand, the width of the substrate to which the die is bonded is not always constant, and a plurality of types of substrates are bonded to each other with a die bonder.

  Therefore, when the air nozzle as described above is a circular blow-out port and a ring-shaped suction port, there is a problem that the moving distance of the nozzle becomes long and cleaning takes a long time on the substrate with the maximum width. .

  Accordingly, the inventors of the present invention have studied various shapes and operation modes of air nozzles that can cope with various substrate widths, and as a result, obtained the following examples.

  Hereinafter, the die bonder will be described with reference to FIGS. 1 and 2 based on the drawings.

FIG. 1 is a conceptual view of a die bonder as viewed from above.
In FIG. 1, the die bonder can be roughly divided into a wafer supply unit 1, a workpiece supply / conveyance unit 2, and a die bonding unit 3. The wafer supply unit 1 includes a wafer cassette lifter 11 and a pickup device 12. The wafer cassette lifter 11 has a wafer cassette (not shown) filled with wafer rings, and sequentially supplies the wafer rings to the pickup device 12. The pick-up device 12 moves the wafer ring so that a desired die can be picked up from the wafer ring.

  The workpiece supply / conveyance unit 2 includes a stack loader 21, a frame feeder (not shown), and an unloader 23. The stack loader 21 conveys a substrate (not shown) to which the die is bonded by the substrate guides 22a and 22b in the direction of arrow A. The substrate guides 22 a and 22 b convey the substrate to the unloader 23 through two processing positions on the frame feeder 22. The unloader 23 is a part for storing the transported substrate. A cleaning nozzle 5 (foreign substance removing device) is attached to the upper portions of the substrate guides 22a and 22b and the substrate to be transported. The die bonding unit 3 includes a preform unit (die paste coating apparatus) 31 and a bonding head unit 32.

2 is an external perspective view of the pickup device attached to the die bonder of FIG.
In FIG. 2, a pickup device 12 includes an expand ring 15 for holding a wafer ring 14 and a support ring (not shown) for horizontally positioning a dicing tape 16 held on the wafer ring 14 and bonded to a plurality of dies (chips) 4. ) Is attached. A plurality of dies 4 are taken out one by one by the preform part 31, and an adhesive is applied and bonded to the surface of the substrate conveyed by the substrate guides 22a and 22b shown in FIG. ing.

  Hereinafter, the cleaning nozzle 5 provided with the present invention will be described in detail.

FIG. 3 is a schematic configuration diagram of the cleaning nozzle according to the first embodiment.
FIG. 4 is a diagram illustrating the movement and shape of the air nozzle of the cleaning nozzle according to the first embodiment.
3 and 4, the substrate 10 supported in the grooves of the substrate guides 22a and 22b is transported in the depth direction on the paper surface (shown in FIG. 3). The cooling nozzle 5 is provided with an air supply pipe 5a and an air discharge pipe 5b. As shown in FIG. 3, the air discharge pipe 5b has a larger pipe diameter than the air supply pipe 5a. This is because the air discharge pipe 5b is used for conveying foreign matter. The nozzle surface 5c is closest to the surface of the substrate 10 as shown in FIG.

  As shown in FIG. 4, the nozzle surface 5c is provided with a plurality of air blowing ports 5d at the center, and a plurality of air suction ports 5e are provided so as to cover the periphery of the air blowing ports 5d.

  As a result, the foreign matter blown off by the air discharged from the air blowing port 5d is immediately sucked by the air suction port 5e as shown by the arrow in FIG. 3, and finally discarded.

  Reference numeral 51 denotes a cleaning nozzle in a state in which the cleaning nozzle 5 moves up and down as indicated by an arrow B shown in FIG. 3 and stops at the raised position. Normally, the cleaning nozzle 5 is lowered to an appropriate position of the substrate 10 (for example, a position 2 mm above the substrate), and is raised when the substrate 10 is moved or replaced. Further, as shown in FIG. 3, the cleaning nozzle 5 moves in the width direction of the substrate 10 to remove foreign matter as indicated by an arrow C, and 52 is a cleaning nozzle after moving in the width direction. .

  That is, in this embodiment, the rectangular cleaning nozzle 5 moves in a direction orthogonal to the moving direction of the substrate 10 and the direction of the long side of the rectangular cleaning nozzle 5 is the same as the moving direction of the substrate. ing.

  In this embodiment, the width of the nozzle surface 5c of the cleaning nozzle 5 is set to a required width according to the cleaning processing time (required throughput). Thereby, the movement amount of the arbitrary cleaning nozzle 5 can be set according to the width of the substrate 10. Therefore, the cleaning according to the present embodiment can cope with various substrate widths, and can be processed under the optimum cleaning condition by the optimum distance between the substrate 10 and the cleaning nozzle 5 while preventing the contact failure at the time of carrying the substrate. .

  In this embodiment, since the nozzle surface 5c of the cleaning nozzle 5 is rectangular, the cleaning width of the foreign matter is widened, so that the cleaning efficiency by shortening the cleaning time can be greatly improved.

FIG. 5 is a diagram illustrating an installation example of the cleaning nozzle according to the second embodiment.
In FIG. 5, two cleaning nozzles 53 and 54 are provided in parallel in a direction orthogonal to the moving direction of the substrate 10, and in this embodiment, the cleaning nozzles 53 and 54 are supported by the substrate guides 22a and 22b. I let you. The direction of the long side of the two cleaning nozzles 53 and 54 is a direction perpendicular to the moving direction of the substrate, and the two cleaning nozzles 53 and 54 are operated in the long side direction.

  Thus, in this embodiment, the X-axis direction cleaning and the Y-axis cleaning shown in FIG.

FIG. 6 is a diagram illustrating an installation example of the cleaning nozzle according to the third embodiment.
In FIG. 6, in this embodiment, three cleaning nozzles 55, 56, and 57 are arranged in parallel and shifted (staggered arrangement) in a direction orthogonal to the moving direction of the substrate 10. The long sides of the three cleaning nozzles 55, 56, 57 are in a direction perpendicular to the moving direction of the substrate as in the second embodiment, the central cleaning nozzle 57 is fixed, and the cleaning nozzles 55, Similarly to the second embodiment, 56 operates in the long side direction.

  As a result, in this embodiment, the cleaning nozzle 57 can follow the operation of the cleaning nozzles 55 and 56 without the operation mechanism with respect to the substrate width, which is advantageous in terms of cost. Further, since the cleaning is performed when the substrate 10 passes under the cleaning nozzles 55, 56, and 57, it is possible to prevent a decrease in throughput due to the cleaning processing time.

FIG. 7 is a diagram illustrating an installation example of the cleaning nozzle according to the fourth embodiment.
In FIG. 7, the cleaning nozzle 58 of this embodiment rotates like a wiper of an automobile around a fulcrum 58a, and becomes a rotated cleaning nozzle 58 ′ as indicated by a broken line.

  Thus, according to the present embodiment, the longitudinal cleaning nozzle 58 that covers the width of the substrate 10 can be rotated in the θ direction from parallel (horizontal) to vertical with respect to the substrate 10, so that various substrate widths can be accommodated. It is possible to make it. In addition, since the cleaning nozzle 58 of this embodiment can cope with the substrate width only by attaching a rotation mechanism, the cleaning device itself can be downsized, and as a result, the cost can be reduced.

FIG. 8 is a diagram illustrating an installation example of the cleaning nozzle according to the fifth embodiment.
In FIG. 8, in this embodiment, cleaning nozzles 59 and 60 that rotate around fulcrums 59a and 60a are provided in two stages as in the fourth embodiment. Reference numerals 59 'and 60' denote cleaning nozzles after rotation. The substrate guide is movable according to the width of the substrate as indicated by 22a 'and 22b'.

  Thus, according to the present embodiment, not only can the substrate 10 with a large width be handled, but also only the cleaning nozzle 59 or only the cleaning nozzle 60 is operated in accordance with the width of the substrate 10 to be transported. It is also possible to make it correspond.

  That is, the cleaning nozzle according to the present embodiment operates flexibly with a degree of freedom with respect to the substrate width, so that the cleaning can be performed without being limited to the width of the substrate.

  Although not shown in the present embodiment, the air supply is pulsed in order to further enhance the foreign matter removing effect by the cleaning nozzle described in the first to sixth embodiments.

  That is, in the present embodiment, the foreign matter strongly adhered to the substrate surface can be peeled off by strongly or intermittently blowing and sucking air with respect to the foreign matter, and the foreign matter removing ability can be improved.

  In the first to sixth embodiments, the following can be further performed.

  A distance detection sensor may be provided at the tip of the cleaning nozzle 5 for the purpose of protecting the substrate and the die 4 bonded in advance for lamination. Since the distance of the surface of the substrate or the stacked dies can be measured by the distance detection sensor, it is possible to detect whether or not the appropriate distance has been deviated. If the distance is outside the proper distance, an alarm may be issued. Alternatively, an interlock function may be provided to stop the operation of the die bonder when it deviates from an appropriate distance. Further, a control function may be provided to keep the distance between the surface of the substrate or the stacked dies and the cleaning nozzle 5 constant by the distance detection sensor.

  According to this method, even when the substrate or nozzle position changes due to a deformed substrate or physical influence, it is possible to prevent defects due to nozzle contact of the substrate product on which the substrate or die is mounted, and the foreign matter removal ability is also appropriate. It becomes possible to keep.

  The flow rate of air from the cleaning nozzle 5 and the suction flow rate of the suction holes around it may be detected by a flow rate sensor or a pressure sensor for the purpose of stabilizing the foreign matter removal capability and preventing defects due to deterioration in removal performance. An alarm is issued when the flow rate deviates from the appropriate value. Alternatively, an interlock function can be provided, and the operation of the die bonder can be stopped when the flow rate deviates from an appropriate value. Moreover, it can also have a function which maintains the flow volume by detecting a flow volume with a flow sensor or a pressure sensor.

  According to this method, it is possible to prevent a decrease in removal capability due to abnormal air flow rate or suction flow rate, failure due to damage of the substrate or mounted die due to excessive flow rate, and it is possible to keep foreign matter removal capability properly. Become.

  Although the embodiments of the present invention have been described above, various alternatives, modifications, and variations can be made by those skilled in the art based on the above description, and the present invention is not limited to the various embodiments described above without departing from the spirit of the present invention. It encompasses alternatives, modifications or variations.

  DESCRIPTION OF SYMBOLS 1 ... Wafer supply part, 2 ... Work supply / conveyance part, 3 ... Die bonding part, 4 ... Die (chip), 5 ... Cooling nozzle, 5a ... Air supply piping, 5b: Air discharge piping, 5c: Nozzle surface, 5d: Air outlet, 5e ... Air suction port, 10 ... Substrate, 11 ... Wafer cassette lifter, 12 ... Pickup Equipment: 14 ... Wafer ring, 15 ... Expand ring, 16 ... Dicing tape, 21 ... Stack loader, 22 ... Frame feeder, 22a, 22b ... Substrate guide, 23 ... Unloader, 31 ... preform part (die paste coating device), 32 ... bonding head part.

Claims (16)

A pickup device for picking up the die;
A collet for adsorbing the die and mounting it on the substrate;
A cleaning nozzle that removes foreign matter on the substrate before mounting the die on the substrate;
Have
The cleaning nozzle is disposed on the substrate, and has a plurality of air blowing holes and a suction hole formed in an elliptical shape so as to surround the plurality of blowing holes. The die bonder according to claim 1, wherein
The substrate has a rectangular shape that is long in its moving direction,
The longitudinal direction of the cleaning nozzle is arranged in the same direction as the moving direction of the substrate,
The die bonder according to claim 1, wherein the cleaning nozzle moves a movement amount set in accordance with a width of the substrate in a direction orthogonal to the movement direction of the substrate. The die bonder according to claim 1, wherein
The substrate has a rectangular shape that is long in its moving direction,
The longitudinal direction of the cleaning nozzle is arranged in a direction perpendicular to the moving direction of the substrate,
The die bonder according to claim 1, wherein the cleaning nozzle moves a movement amount set in accordance with a width of the substrate in a direction orthogonal to the movement direction of the substrate. The die bonder according to claim 3,
A die bonder, wherein a plurality of the cleaning nozzles are arranged in a staggered manner shifted in a direction orthogonal to the moving direction of the substrate. The die bonder according to claim 1, wherein
The die bonder is characterized in that the cleaning nozzle rotates in a direction orthogonal to the moving direction of the substrate with the end in the longitudinal direction outside the suction hole as a rotation axis. The die bonder according to claim 5, wherein
A plurality of the cleaning nozzles are arranged in a direction orthogonal to the moving direction of the substrate. The die bonder according to any one of claims 1 to 6,
A die bonder characterized by intermittently blowing and sucking air by the cleaning nozzle. The die bonder according to claim 1, wherein
The cleaning nozzle is a distance measurement sensor that measures at least a distance from the substrate or a die stacked on the substrate, or a sensor that measures a flow rate of air from the plurality of air blowing holes and a suction flow rate of the suction holes. A die bonder characterized by mounting one. The die bonder according to any one of claims 1 to 8,
The cleaning nozzle includes an air supply pipe that communicates with the blowing hole and an air discharge pipe that communicates with the suction hole. A die bonder characterized by being a cleaning nozzle having a hole diameter larger than that of the hole. The die bonder according to claim 1, wherein
A plurality of the cleaning nozzles are arranged in a direction orthogonal to the moving direction of the substrate. A pick-up device on which a dicing film having a die mounted thereon is fixed;
A collet for adsorbing the die peeled off from the dicing film and mounting it on the substrate;
A cleaning nozzle in which an air blowing hole and a suction hole for removing foreign substances on the substrate before mounting the die on the substrate are integrated;
Have
The substrate has a rectangular shape that is long in its moving direction,
The longitudinal direction of the cleaning nozzle is arranged in the same direction as the moving direction of the substrate,
The foreign matter removing apparatus, wherein the cleaning nozzle is disposed above the substrate and moves a moving amount set in accordance with a width of the substrate in a direction orthogonal to a moving direction of the substrate. A pick-up device on which a dicing film having a die mounted thereon is fixed;
A collet for adsorbing the die peeled off from the dicing film and mounting it on the substrate;
A cleaning nozzle in which an air blowing hole and a suction hole for removing foreign substances on the substrate before mounting the die on the substrate are integrated;
Have
The substrate has a rectangular shape that is long in its moving direction,
The longitudinal direction of the cleaning nozzle is arranged in a direction perpendicular to the moving direction of the substrate,
The foreign matter removing apparatus, wherein the cleaning nozzle is disposed above the substrate and moves a moving amount set in accordance with a width of the substrate in a direction orthogonal to a moving direction of the substrate. A pick-up device on which a dicing film having a die mounted thereon is fixed;
A collet for adsorbing the die peeled off from the dicing film and mounting it on the substrate;
A cleaning nozzle disposed on the substrate and removing foreign matter on the substrate before mounting the die on the substrate;
Have
The cleaning nozzle has a plurality of air blowing holes and a plurality of suction holes formed in an elliptical shape so as to surround the plurality of blowing holes. The foreign matter removing apparatus according to claim 13,
The substrate has a rectangular shape that is long in its moving direction,
The longitudinal direction of the cleaning nozzle is arranged in the same direction as the moving direction of the substrate,
The die bonder according to claim 1, wherein the cleaning nozzle moves a movement amount set in accordance with a width of the substrate in a direction orthogonal to the movement direction of the substrate. A pick-up device on which a dicing film having a die mounted thereon is fixed;
A collet for adsorbing the die peeled off from the dicing film and mounting it on the substrate;
A cleaning nozzle disposed on the substrate and removing foreign matter on the substrate before mounting the die on the substrate;
Have
The cleaning nozzle has a plurality of air blowing holes and a plurality of suction holes formed in an elliptical shape so as to surround the plurality of blowing holes. The foreign matter removing apparatus according to claim 15,
The substrate has a rectangular shape that is long in its moving direction,
The longitudinal direction of the cleaning nozzle is arranged in the same direction as the moving direction of the substrate,
The foreign matter removing apparatus, wherein the cleaning nozzle moves a movement amount set in accordance with a width of the substrate in a direction orthogonal to the movement direction of the substrate.

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