JP2017140671A5 - - Google Patents

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Publication number
JP2017140671A5
JP2017140671A5 JP2016023536A JP2016023536A JP2017140671A5 JP 2017140671 A5 JP2017140671 A5 JP 2017140671A5 JP 2016023536 A JP2016023536 A JP 2016023536A JP 2016023536 A JP2016023536 A JP 2016023536A JP 2017140671 A5 JP2017140671 A5 JP 2017140671A5
Authority
JP
Japan
Prior art keywords
joint portion
cable
rotary joint
stationary
side joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016023536A
Other languages
English (en)
Japanese (ja)
Other versions
JP6622105B2 (ja
JP2017140671A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016023536A priority Critical patent/JP6622105B2/ja
Priority claimed from JP2016023536A external-priority patent/JP6622105B2/ja
Priority to KR1020170013504A priority patent/KR102561433B1/ko
Priority to CN201710067615.XA priority patent/CN107052985B/zh
Priority to TW106104278A priority patent/TWI709458B/zh
Publication of JP2017140671A publication Critical patent/JP2017140671A/ja
Publication of JP2017140671A5 publication Critical patent/JP2017140671A5/ja
Application granted granted Critical
Publication of JP6622105B2 publication Critical patent/JP6622105B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016023536A 2016-02-10 2016-02-10 平面研磨装置 Active JP6622105B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016023536A JP6622105B2 (ja) 2016-02-10 2016-02-10 平面研磨装置
KR1020170013504A KR102561433B1 (ko) 2016-02-10 2017-01-31 평면 연마 장치
CN201710067615.XA CN107052985B (zh) 2016-02-10 2017-02-07 平面研磨装置
TW106104278A TWI709458B (zh) 2016-02-10 2017-02-09 平面研磨裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016023536A JP6622105B2 (ja) 2016-02-10 2016-02-10 平面研磨装置

Publications (3)

Publication Number Publication Date
JP2017140671A JP2017140671A (ja) 2017-08-17
JP2017140671A5 true JP2017140671A5 (enExample) 2018-11-15
JP6622105B2 JP6622105B2 (ja) 2019-12-18

Family

ID=59599179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016023536A Active JP6622105B2 (ja) 2016-02-10 2016-02-10 平面研磨装置

Country Status (4)

Country Link
JP (1) JP6622105B2 (enExample)
KR (1) KR102561433B1 (enExample)
CN (1) CN107052985B (enExample)
TW (1) TWI709458B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102037749B1 (ko) * 2018-03-16 2019-10-29 에스케이실트론 주식회사 웨이퍼 랩핑 장치
JP7035748B2 (ja) * 2018-04-11 2022-03-15 株式会社Sumco ワークの両面研磨装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547350Y2 (enExample) * 1988-05-18 1993-12-13
US5429517A (en) * 1994-02-14 1995-07-04 Methode Electronics, Inc. Two-piece clockspring with lock and wire harness assembly
JPH10202514A (ja) * 1997-01-20 1998-08-04 Speedfam Co Ltd 自動定寸装置
CN2574263Y (zh) * 2002-10-24 2003-09-17 王军珲 一种滑动式轴装导电旋转接头
US6962497B2 (en) * 2003-04-16 2005-11-08 The Furukawa Electric Co., Ltd. Rotary connector having an identifiable neutral position
JP2008227393A (ja) * 2007-03-15 2008-09-25 Fujikoshi Mach Corp ウェーハの両面研磨装置
JP5246847B2 (ja) * 2008-02-08 2013-07-24 津田駒工業株式会社 工作機械用スピンドルヘッド
JP6101621B2 (ja) * 2013-11-28 2017-03-22 株式会社荏原製作所 研磨装置

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