JP2017140671A5 - - Google Patents

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Publication number
JP2017140671A5
JP2017140671A5 JP2016023536A JP2016023536A JP2017140671A5 JP 2017140671 A5 JP2017140671 A5 JP 2017140671A5 JP 2016023536 A JP2016023536 A JP 2016023536A JP 2016023536 A JP2016023536 A JP 2016023536A JP 2017140671 A5 JP2017140671 A5 JP 2017140671A5
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JP
Japan
Prior art keywords
joint portion
cable
rotary joint
stationary
side joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016023536A
Other languages
Japanese (ja)
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JP6622105B2 (en
JP2017140671A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2016023536A priority Critical patent/JP6622105B2/en
Priority claimed from JP2016023536A external-priority patent/JP6622105B2/en
Priority to KR1020170013504A priority patent/KR102561433B1/en
Priority to CN201710067615.XA priority patent/CN107052985B/en
Priority to TW106104278A priority patent/TWI709458B/en
Publication of JP2017140671A publication Critical patent/JP2017140671A/en
Publication of JP2017140671A5 publication Critical patent/JP2017140671A5/ja
Application granted granted Critical
Publication of JP6622105B2 publication Critical patent/JP6622105B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

この変形例の場合、図２において、符号３２を付した部分が回転する下定盤用駆動軸、符号３１を付した部分が下定盤用駆動軸の周囲の静止する機体部分であると考えることができ、そうすると、光用ロータリジョイント部６１の静止側ジョイント部６２及び電気用ロータリジョイント部６５の静止側ジョイント部６６がそれぞれ回転側ジョイント部になると共に、光用ロータリジョイント部６１の回転側ジョイント部６３及び電気用ロータリジョイント部６５の回転側ジョイント部６７がそれぞれ静止側ジョイント部になり、また、第１ケーブルカバー７３と第２ケーブルカバー７４は静止側である機体部分に取り付けられ、両ケーブルカバー７３，７４間の空間部７５内に収容された光ファイバーケーブル５１の二次側ケーブル５３及び電気ケーブル５６の二次側ケーブル５８は、測定ユニット５と静止側ジョイント部とを接続する一次側ケーブルになる。 In the case of this modification, in FIG. 2, it is considered that the lower surface plate drive shaft that rotates at the portion denoted by reference numeral 32 is the stationary body portion around the lower surface plate drive shaft at the position denoted by reference numeral 31. Then, the stationary side joint portion 62 of the light rotary joint portion 61 and the stationary side joint portion 66 of the electrical rotary joint portion 65 become the rotation side joint portion, and the rotation side joint portion of the light rotary joint portion 61 The rotary joint parts 67 of the electric rotary joint part 63 and the electric rotary joint parts 65 become stationary side joint parts, and the first cable cover 73 and the second cable cover 74 are attached to the stationary body part, and both cable covers 73 and 74 and the secondary side cable 53 of the optical fiber cable 51 housed in the space 75 and Secondary cable 58 of the air cable 56, is the primary side cables for connecting the measurement unit 5 and the stationary side joint portion.

JP2016023536A 2016-02-10 2016-02-10 Surface polishing equipment Active JP6622105B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016023536A JP6622105B2 (en) 2016-02-10 2016-02-10 Surface polishing equipment
KR1020170013504A KR102561433B1 (en) 2016-02-10 2017-01-31 Surface polishing apparatus
CN201710067615.XA CN107052985B (en) 2016-02-10 2017-02-07 Plane grinding device
TW106104278A TWI709458B (en) 2016-02-10 2017-02-09 Surface polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016023536A JP6622105B2 (en) 2016-02-10 2016-02-10 Surface polishing equipment

Publications (3)

Publication Number Publication Date
JP2017140671A JP2017140671A (en) 2017-08-17
JP2017140671A5 true JP2017140671A5 (en) 2018-11-15
JP6622105B2 JP6622105B2 (en) 2019-12-18

Family

ID=59599179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016023536A Active JP6622105B2 (en) 2016-02-10 2016-02-10 Surface polishing equipment

Country Status (4)

Country Link
JP (1) JP6622105B2 (en)
KR (1) KR102561433B1 (en)
CN (1) CN107052985B (en)
TW (1) TWI709458B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102037749B1 (en) * 2018-03-16 2019-10-29 에스케이실트론 주식회사 Wafer Lapping Apparatus
JP7035748B2 (en) * 2018-04-11 2022-03-15 株式会社Sumco Work double-sided polishing device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547350Y2 (en) * 1988-05-18 1993-12-13
US5429517A (en) * 1994-02-14 1995-07-04 Methode Electronics, Inc. Two-piece clockspring with lock and wire harness assembly
JPH10202514A (en) * 1997-01-20 1998-08-04 Speedfam Co Ltd Automatic sizing device
CN2574263Y (en) * 2002-10-24 2003-09-17 王军珲 Sliding shaft-mounted conductive swivel joint
US6962497B2 (en) * 2003-04-16 2005-11-08 The Furukawa Electric Co., Ltd. Rotary connector having an identifiable neutral position
JP2008227393A (en) * 2007-03-15 2008-09-25 Fujikoshi Mach Corp Double-side polishing apparatus for wafer
JP5246847B2 (en) * 2008-02-08 2013-07-24 津田駒工業株式会社 Spindle head for machine tools
JP6101621B2 (en) * 2013-11-28 2017-03-22 株式会社荏原製作所 Polishing equipment

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