JP2017135936A5 - - Google Patents

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Publication number
JP2017135936A5
JP2017135936A5 JP2016015706A JP2016015706A JP2017135936A5 JP 2017135936 A5 JP2017135936 A5 JP 2017135936A5 JP 2016015706 A JP2016015706 A JP 2016015706A JP 2016015706 A JP2016015706 A JP 2016015706A JP 2017135936 A5 JP2017135936 A5 JP 2017135936A5
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JP
Japan
Prior art keywords
vibrating body
piezoelectric actuator
mass
adjusting
housing
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Application number
JP2016015706A
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English (en)
Japanese (ja)
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JP6693150B2 (ja
JP2017135936A (ja
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Priority to JP2016015706A priority Critical patent/JP6693150B2/ja
Priority claimed from JP2016015706A external-priority patent/JP6693150B2/ja
Publication of JP2017135936A publication Critical patent/JP2017135936A/ja
Publication of JP2017135936A5 publication Critical patent/JP2017135936A5/ja
Application granted granted Critical
Publication of JP6693150B2 publication Critical patent/JP6693150B2/ja
Expired - Fee Related legal-status Critical Current
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JP2016015706A 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 Expired - Fee Related JP6693150B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016015706A JP6693150B2 (ja) 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016015706A JP6693150B2 (ja) 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法

Publications (3)

Publication Number Publication Date
JP2017135936A JP2017135936A (ja) 2017-08-03
JP2017135936A5 true JP2017135936A5 (cg-RX-API-DMAC10.html) 2019-02-21
JP6693150B2 JP6693150B2 (ja) 2020-05-13

Family

ID=59505073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016015706A Expired - Fee Related JP6693150B2 (ja) 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法

Country Status (1)

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JP (1) JP6693150B2 (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7174399B2 (ja) * 2018-08-01 2022-11-17 株式会社ミクロブ グリッパーモジュール及びグリッパー
JP2023085718A (ja) * 2021-12-09 2023-06-21 セイコーエプソン株式会社 圧電駆動装置、およびロボット

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