JP2017135227A - heat sink - Google Patents
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- JP2017135227A JP2017135227A JP2016013099A JP2016013099A JP2017135227A JP 2017135227 A JP2017135227 A JP 2017135227A JP 2016013099 A JP2016013099 A JP 2016013099A JP 2016013099 A JP2016013099 A JP 2016013099A JP 2017135227 A JP2017135227 A JP 2017135227A
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 128
- 239000002184 metal Substances 0.000 claims abstract description 128
- 239000000835 fiber Substances 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims description 54
- 239000000463 material Substances 0.000 description 14
- 238000012546 transfer Methods 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 238000005219 brazing Methods 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 238000005304 joining Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- ZSDSQXJSNMTJDA-UHFFFAOYSA-N trifluralin Chemical compound CCCN(CCC)C1=C([N+]([O-])=O)C=C(C(F)(F)F)C=C1[N+]([O-])=O ZSDSQXJSNMTJDA-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
本発明は、熱を放散するために用いられるヒートシンクに関する。 The present invention relates to a heat sink used to dissipate heat.
パワー素子等の半導体素子を搭載したパワーモジュール等のように、発熱を伴う電子部品においては、これを正常に動作させるために、発熱素子からの熱を放散するためのヒートシンクが設けられる。このヒートシンクとしては、熱伝導性が高いアルミニウムや銅が用いられる。また、平板状の基板部の片面に多数のプレート状、ピン状等のフィンを立設させた構造のものが多く用いられ、このようなヒートシンクは、パワーモジュール等の被冷却体と基板部とを密着させ、フィンを熱媒流路に配置することにより、被冷却体を冷却する。 In an electronic component that generates heat, such as a power module on which a semiconductor element such as a power element is mounted, a heat sink for dissipating heat from the heating element is provided in order to operate the electronic component normally. As this heat sink, aluminum or copper having high thermal conductivity is used. Also, a structure in which a large number of plate-like and pin-like fins are erected on one side of a flat-plate-like substrate portion is often used, and such a heat sink is composed of a body to be cooled such as a power module and a substrate portion. And the object to be cooled is cooled by disposing the fins in the heat medium flow path.
例えば、特許文献１には、押出成形により、基板部に板状のフィンが高さ方向の中間位置を横リブにより連結された形状に形成されている。
また、特許文献２では、フィンの比表面積を高めるために、立体網状材料からなるフィンが用いられており、基板部にろう付け等により接合されている。立体網状材料としては、銅、ニッケル、ステンレス、アルミニウム等の金属を発泡させた連続気孔を有する発泡金属が挙げられている。
また、特許文献３には、基板部に立設したピン又はプレート状のフィンの間に、連通細孔を有する多孔質体を充填した構造のものが開示されており、基板部から多孔質体への熱移動はバルク体のフィンにより広い面積で行われ、多孔質体から空気への熱伝達は多孔質体によって行われるため、熱交換性能を高めることができると記載されている。
For example, in Patent Document 1, a plate-like fin is formed in a shape in which an intermediate position in the height direction is connected to a substrate portion by a lateral rib by extrusion molding.
Moreover, in patent document 2, in order to raise the specific surface area of a fin, the fin which consists of a solid network material is used, and it joins to the board | substrate part by brazing. Examples of the three-dimensional network material include a foam metal having continuous pores obtained by foaming a metal such as copper, nickel, stainless steel, and aluminum.
Patent Document 3 discloses a structure in which a porous body having communication pores is filled between pins or plate-like fins erected on a substrate portion. It is described that heat transfer can be performed over a large area by the fins of the bulk body, and heat transfer from the porous body to the air is performed by the porous body, so that the heat exchange performance can be improved.
しかしながら、特許文献１記載のヒートシンクでは、フィンがバルク体であるため表面積が小さく、高い熱交換性能が期待できない。特許文献２記載のものでは、ろう材が母材と反応し、接合界面の熱抵抗が大きくなることが懸念される。また、ろう材が多孔質体（立体網状材）内に浸透して比表面積が低下するおそれがあるとともに、接合に必要なろう材およびフラックスがコスト高となる傾向にある。さらに、特許文献３記載の構造では、フィン間が多孔質体により埋められているため、その間を熱媒が流通する際の圧力損失が大きくなり過ぎる問題がある。これを避けるため、多孔質体の空隙率を高くすると、熱交換性能を損なう。
本出願人は、特願２０１４−１３７１５６号にて、フィンをバルク体の芯部の表面に多孔質体を接合した構造とすることを提案しており、その多孔質体として、アルミニウム繊維とアルミニウム粉末とを焼結して一体化したものを用いている。これにより、多孔質体の焼結強度が高められ熱伝導性が向上するため、効率的に熱交換を行うことができるが、さらなる熱交換性能の向上が望まれる。
However, in the heat sink described in Patent Document 1, since the fins are bulk bodies, the surface area is small and high heat exchange performance cannot be expected. In the one described in Patent Document 2, there is a concern that the brazing material reacts with the base material and the thermal resistance of the bonding interface increases. Further, the brazing material may permeate into the porous body (three-dimensional network material) to reduce the specific surface area, and the brazing material and the flux required for joining tend to be expensive. Furthermore, in the structure described in Patent Document 3, since the space between the fins is filled with a porous body, there is a problem that the pressure loss when the heat medium flows between the fins becomes too large. In order to avoid this, if the porosity of the porous body is increased, the heat exchange performance is impaired.
In the Japanese Patent Application No. 2014-137156, the present applicant has proposed that the fin has a structure in which a porous body is bonded to the surface of the core of the bulk body. As the porous body, aluminum fibers and aluminum are proposed. The powder is integrated by sintering. Thereby, since the sintered strength of the porous body is increased and the thermal conductivity is improved, heat exchange can be performed efficiently, but further improvement in heat exchange performance is desired.
本発明は、圧力損失を増大することなくさらに熱交換面積を大きくして、熱交換性能を向上させることを目的とする。 An object of the present invention is to further increase the heat exchange area without increasing the pressure loss, thereby improving the heat exchange performance.
本発明のヒートシンクは、基板部と、該基板部の表面に立設したフィン部とを有するとともに、前記フィン部が、前記基板部に一体のフィン芯部と、該フィン芯部の表面を覆うように接合された三次元網目構造を有する金属多孔体とを有しており、前記基板部と前記フィン芯部とは金属のバルク体からなり、前記金属多孔体は多数の金属繊維を含有し、該金属繊維の長さをＬとし、前記金属多孔体の前記フィン芯部表面からの厚さをＴとすると、Ｌ／Ｔが８未満であり、かつ、前記金属多孔体が前記フィン芯部に焼結接合部を介して接合されており、前記基板部の表面で前記フィン部が立設されている領域の平面積と前記フィン部の高さとの積で求められる全体体積のうち、金属部分を除く空間体積の比率が、４０％以上９０％以下である。 The heat sink of the present invention has a substrate portion and a fin portion standing on the surface of the substrate portion, and the fin portion covers the fin core portion integrated with the substrate portion and the surface of the fin core portion. A porous metal body having a three-dimensional network structure joined together, and the substrate portion and the fin core portion are made of a metal bulk body, and the porous metal body contains a number of metal fibers. When the length of the metal fiber is L and the thickness of the metal porous body from the surface of the fin core portion is T, L / T is less than 8, and the metal porous body is the fin core portion. Of the entire volume determined by the product of the flat area of the region where the fin portion is erected on the surface of the substrate portion and the height of the fin portion. The ratio of the space volume excluding the portion is 40% or more and 90% or less.
このヒートシンクは、バルク体のフィン芯部を覆うように金属多孔体が設けられており、熱媒は金属多孔体内の空隙を通って金属多孔体及びフィン芯部表面との間で熱交換される。この場合、フィン部として、金属多孔体により大きな表面積が形成される。また、金属多孔体自体、および金属多孔体表面に形成される凹凸によって冷媒の流れを乱すことができるため、バルク体のみからなるフィンと比較して、比表面積が大きくなる以上に熱交換が促進される効果がある。また、フィン芯部と金属多孔体とは焼結接合部を介して接合されているので、強固な接合が確保されるとともに、接合界面の熱抵抗も小さい。 This heat sink is provided with a porous metal body so as to cover the fin core portion of the bulk body, and the heat medium exchanges heat between the porous metal body and the surface of the fin core portion through the voids in the porous metal body. . In this case, a large surface area is formed by the metal porous body as the fin portion. In addition, since the flow of refrigerant can be disturbed by the metal porous body itself and the irregularities formed on the surface of the metal porous body, heat exchange is promoted more than the specific surface area is increased compared to fins made only of bulk bodies. There is an effect. Moreover, since the fin core part and the metal porous body are joined via the sintered joint part, strong joining is ensured and the thermal resistance of the joining interface is small.
そして、基板部の表面でフィン部が立設されている領域における平面積とフィン部の高さとの積で求められる全体体積に対するフィン部の金属部分を除く空間体積の比率（空隙率）が４０％以上９０％以下と設定しており、その空隙率が４０％未満であると、冷媒の流通に対する圧力損失が大きくなり、一方、空隙率が９０％を超えると熱交換性能が低くなる。したがって、圧力損失の増大を抑制しつつ熱交換性能を高めることができる。この場合、バルク体のフィン芯部と金属多孔体とは焼結接合部によって接合され、ろう材を用いていないので、ろう材の浸透による空隙率の低下も生じない。 And the ratio (void ratio) of the space volume excluding the metal part of the fin part with respect to the total volume calculated | required by the product of the flat area in the area | region where the fin part stands on the surface of a board | substrate part, and the height of a fin part is 40 When the porosity is less than 40%, the pressure loss with respect to the circulation of the refrigerant increases. On the other hand, when the porosity exceeds 90%, the heat exchange performance decreases. Therefore, heat exchange performance can be improved while suppressing an increase in pressure loss. In this case, since the fin core portion of the bulk body and the metal porous body are joined by the sintered joint portion and no brazing material is used, the porosity does not decrease due to penetration of the brazing material.
この場合、金属多孔体に金属繊維を含有すると、金属多孔体に微細な空隙が確保され、前述した空隙率の調整を容易にすることができ、また、金属繊維の長さ方向に熱が伝導するので、熱交換性能がより高められる。特に、Ｌ／Ｔを８未満とすることにより、金属繊維が金属多孔体の厚さ方向に沿って配置され易くなり、その結果、金属多孔体内部を熱媒が通過する際の圧力損失が抑制されるとともに、金属多孔体の厚さ方向への伝熱経路において熱抵抗となる金属繊維間の界面が少なくなり、フィン芯部と周辺空間との間の熱伝達を促進させることができる。 In this case, if metal fibers are contained in the metal porous body, fine voids are secured in the metal porous body, making it easy to adjust the porosity described above, and heat is conducted in the length direction of the metal fibers. Therefore, the heat exchange performance is further improved. In particular, when L / T is less than 8, the metal fibers are easily arranged along the thickness direction of the porous metal body, and as a result, the pressure loss when the heat medium passes through the inside of the porous metal body is suppressed. In addition, the interface between the metal fibers that becomes thermal resistance in the heat transfer path in the thickness direction of the porous metal body is reduced, and heat transfer between the fin core portion and the surrounding space can be promoted.
本発明のヒートシンクにおいて、前記フィン部の比表面積は、４×１０２ｍ２／ｍ３以上２×１０５ｍ２／ｍ３以下であるとよい。 In the heat sink of the present invention, the specific surface area of the fin portion is preferably 4 × 10 2 m 2 / m 3 or more and 2 × 10 5 m 2 / m 3 or less.
また、本発明のヒートシンクは、基板部と、該基板部の表面に立設したフィン部とを有するとともに、前記フィン部が、前記基板部に一体のフィン芯部と、該フィン芯部の表面を覆うように接合された三次元網目構造を有する金属多孔体とを有しており、前記基板部と前記フィン芯部とは金属のバルク体からなり、前記金属多孔体が前記フィン芯部に焼結接合部を介して接合されており、前記基板部の表面で前記フィン部が立設されている領域の平面積と前記フィン部の高さとの積で求められる全体体積のうち、前記フィン部の金属部分を除く空間体積の比率が、４０％以上９０％以下であり、かつ、前記フィン部の比表面積は、４×１０２ｍ２／ｍ３以上２×１０５ｍ２／ｍ３以下である。 The heat sink of the present invention has a substrate portion and a fin portion standing on the surface of the substrate portion, the fin portion being integrated with the substrate portion, and the surface of the fin core portion. A metal porous body having a three-dimensional network structure joined so as to cover the substrate, and the substrate portion and the fin core portion are made of a metal bulk body, and the metal porous body is attached to the fin core portion. Of the total volume determined by the product of the flat area of the region where the fin portion is erected on the surface of the substrate portion and the height of the fin portion, the fins are joined via a sintered joint portion. The ratio of the space volume excluding the metal part of the part is 40% or more and 90% or less, and the specific surface area of the fin part is 4 × 10 2 m 2 / m 3 or more and 2 × 10 5 m 2 / m 3. It is as follows.
本発明によれば、圧力損失を増大させることなくさらに熱交換面積を大きくして、熱交換性能を向上させることができる。 According to the present invention, the heat exchange area can be further increased without increasing the pressure loss, and the heat exchange performance can be improved.
以下に、本発明の実施形態を説明する。
第１実施形態のヒートシンク１は、図１及び図２に示すように、平板状の基板部２と、その基板部２の片面に立設した多数の帯板状のフィン芯部３と、これらフィン芯部３の表面を覆うように接合された三次元網目構造を有する金属多孔体４とを有しており、フィン芯部３とその表面の金属多孔体４とによりフィン部５が形成されている。
基板部２とフィン芯部３とは、銅又はアルミニウム等の金属のバルク体によって一体に形成された金属成形体６である。金属多孔体４は、基板部２及びフィン芯部３と同じ材質で形成され、基板部２及びフィン芯部３の表面に焼結によって接合されており、これらの表面との間に焼結接合部７を形成している。
Hereinafter, embodiments of the present invention will be described.
As shown in FIGS. 1 and 2, the heat sink 1 of the first embodiment includes a flat plate-like substrate portion 2, a large number of strip-like fin core portions 3 erected on one surface of the substrate portion 2, and these The metal porous body 4 having a three-dimensional network structure joined so as to cover the surface of the fin core portion 3 is formed, and the fin portion 5 is formed by the fin core portion 3 and the metal porous body 4 on the surface thereof. ing.
The substrate portion 2 and the fin core portion 3 are a metal molded body 6 that is integrally formed of a bulk body of metal such as copper or aluminum. The metal porous body 4 is formed of the same material as that of the substrate portion 2 and the fin core portion 3 and is bonded to the surfaces of the substrate portion 2 and the fin core portion 3 by sintering. Part 7 is formed.
この場合、基板部２は、例えば矩形状の平面形状を有しており、フィン芯部３は、基板部２の表面から所定の高さｈ、所定の厚さｔで立設されている。図１に示す例では、フィン芯部３は、基板部２の縦方向の全長にわたって設けられ、基板部２の横方向に所定の間隔Ｃをおいて相互に平行に並べられている。また、最も外側のフィン芯部３は、基板部２の両側縁よりも内側に配置されている。 In this case, the substrate portion 2 has, for example, a rectangular planar shape, and the fin core portion 3 is erected from the surface of the substrate portion 2 with a predetermined height h and a predetermined thickness t. In the example shown in FIG. 1, the fin core portions 3 are provided over the entire length in the vertical direction of the substrate portion 2, and are arranged in parallel with each other at a predetermined interval C in the horizontal direction of the substrate portion 2. Further, the outermost fin core portion 3 is disposed on the inner side than both side edges of the substrate portion 2.
一方、金属多孔体４は、フィン芯部３の両面に所定の厚さＴで形成されている。この場合、金属多孔体４の厚さＴは、前述したフィン芯部３の間隔Ｃを埋めることがないように、その間隔の半分よりも小さい（Ｔ＜（Ｃ／２））厚さに設定されており、したがって、金属多孔体４の相互間には空間部８がフィン部５の長さ方向に沿って形成される。
この金属多孔体４としては、多数の金属繊維Ｓの集合体が用いられている。この金属繊維Ｓは、例えば、その外径Ｄが２０μｍ以上３０００μｍ以下で、長さＬが０．２ｍｍ以上５０ｍｍ以下に形成される。
On the other hand, the metal porous body 4 is formed with a predetermined thickness T on both surfaces of the fin core portion 3. In this case, the thickness T of the metal porous body 4 is set to a thickness smaller than half of the interval (T <(C / 2)) so as not to fill the interval C of the fin core portion 3 described above. Therefore, a space portion 8 is formed between the metal porous bodies 4 along the length direction of the fin portion 5.
As the metal porous body 4, an aggregate of a large number of metal fibers S is used. For example, the metal fiber S has an outer diameter D of 20 μm to 3000 μm and a length L of 0.2 mm to 50 mm.
そして、基板部２の表面で熱媒が流通させられる領域の平面積とフィン部５の高さとの積で求められる全体体積のうち、フィン部（フィン芯部３及び金属多孔体４）５の金属部分を除く空間体積の比率（以下、空隙率と称す）が、４０％以上９０％以下である。
このうち、空隙率を計算するための全体体積は、図１に示す例のように、フィン部５が立設されている基板部２の表面の全体が大気等に露出し、その表面全体で熱媒（例えば空気や水）と熱交換する場合は、基板部２の全体の平面積とフィン部５の高さとの積とすればよい。
したがって、縦Ａｍｍ×横Ｂｍｍの基板部２の上に、その全長にわたって厚さｔｍｍ×高さｈｍｍのフィン芯部３がｎ個設けられている場合、全体体積Ｖは、Ｖ＝Ａ×Ｂ×ｈｍｍ３となる。そして、そのフィン芯部３の両面の全面に、気孔率がＸ％の金属多孔体４を厚さＴで接合してフィン部５を形成する場合、空間体積ＶｐはＶｐ（ｍｍ３）＝Ｖ−ｎ×（ｔ＋２×Ｔ×（１−Ｘ）／１００）×Ａ×ｈとなり、空隙率はＶｐ／Ｖで求められる。
また、フィン芯部３に金属多孔体４が接合されたフィン部５の比表面積（単位体積当たりの表面積）は、４×１０２ｍ２／ｍ３以上２×１０５ｍ２／ｍ３以下に設定される。
Of the total volume determined by the product of the flat area of the region through which the heat medium is circulated on the surface of the substrate part 2 and the height of the fin part 5, the fin part (fin core part 3 and porous metal body 4) 5 The ratio of the space volume excluding the metal part (hereinafter referred to as porosity) is 40% or more and 90% or less.
Of these, the entire volume for calculating the porosity is such that the entire surface of the substrate portion 2 on which the fin portion 5 is erected is exposed to the atmosphere or the like, as in the example shown in FIG. When exchanging heat with a heat medium (for example, air or water), the product of the overall flat area of the substrate portion 2 and the height of the fin portion 5 may be used.
Therefore, when n fin core portions 3 having a thickness tmm × height hmm are provided over the entire length of the substrate portion 2 of length Amm × width Bmm, the total volume V is V = A × B × hmm 3 Then, when the fin portion 5 is formed by joining the metal porous body 4 having a porosity of X% to the entire surface of both surfaces of the fin core portion 3 with the thickness T, the space volume Vp is Vp (mm 3 ) = V. −n × (t + 2 × T × (1−X) / 100) × A × h, and the porosity is obtained by Vp / V.
Further, the specific surface area (surface area per unit volume) of the fin portion 5 in which the metal porous body 4 is bonded to the fin core portion 3 is 4 × 10 2 m 2 / m 3 or more and 2 × 10 5 m 2 / m 3 or less. Set to
なお、上記のような基板部２の全面を熱交換に用いるヒートシンク１に対して、熱媒が管内に流通し、その管の壁に形成した孔部からフィン部を流路内に挿入して、基板部の周縁部を管の外壁面に固定するように設置されるヒートシンクの場合は、基板部の平面積のうち、管の外壁面に固定されている周縁部を除き、流路に接している部分の平面積とフィン部の高さとの積となる。また、この管の壁等に固定されるヒートシンクの場合は、基板部の周縁部を除く内側領域にフィン部が立設される。
本発明においては、空隙率を算出する場合、基板部の全体平面のうち、管等への固定部分を除いて、フィン部が立設されている領域（フィン部の立設領域）の平面積とフィン部の高さとの積で求められる体積を全体体積とし、その全体体積のうち、フィン部の金属部分が占める体積を除いた部分を空間体積とする。
In addition, with respect to the heat sink 1 that uses the entire surface of the substrate part 2 as described above for heat exchange, a heat medium circulates in the pipe, and the fin part is inserted into the flow path from the hole formed in the wall of the pipe. In the case of a heat sink installed so as to fix the peripheral part of the substrate part to the outer wall surface of the pipe, it touches the flow path except for the peripheral part fixed to the outer wall surface of the pipe out of the plane area of the substrate part. It is the product of the flat area of the portion that is present and the height of the fin. Further, in the case of a heat sink fixed to the wall of the tube or the like, the fin portion is erected in the inner region excluding the peripheral portion of the substrate portion.
In the present invention, when calculating the porosity, the flat area of the area where the fin part is erected (the erection area of the fin part), excluding the fixed part to the tube, etc., in the entire plane of the substrate part The volume obtained by the product of the height of the fin portion and the height of the fin portion is defined as the total volume, and the portion of the total volume excluding the volume occupied by the metal portion of the fin portion is defined as the spatial volume.
このように構成したヒートシンク１を製造する場合、例えばアルミニウムの押出成形により、基板部２とフィン芯部３とを有するバルク体の金属成形体６を一体に形成し、そのフィン芯部３に、図４に示す型２１を用いて金属多孔体４を接合する。その型２１は、例えばカーボン等、金属成形体６及び金属多孔体４のアルミニウムと反応しにくい材料からなり、図４（ａ）に示すように、片面に、フィン部５を形成するための溝状の凹部２２が相互に平行に形成された板状に形成され、その型２１を図４（ｂ）に示すように基板部２に対向するように重ね合わせると、フィン芯部３の両面側に金属多孔体４を形成するための空間２３が形成される。その空間２３にアルミニウムの金属繊維を充填した後、例えば不活性雰囲気で６００℃〜６６０℃の温度で０．５分〜６０分間、加熱することにより、金属繊維相互間で焼結させるとともにフィン芯部３との間で焼結接合部７を形成させ、これらが一体に接合したヒートシンク１を得ることができる。 When manufacturing the heat sink 1 configured as described above, a bulk metal formed body 6 having the substrate portion 2 and the fin core portion 3 is integrally formed, for example, by extrusion molding of aluminum. The metal porous body 4 is joined using the mold 21 shown in FIG. The mold 21 is made of a material that does not easily react with aluminum of the metal molded body 6 and the metal porous body 4 such as carbon, and as shown in FIG. 4A, a groove for forming the fin portion 5 on one side. When the concave portions 22 are formed in a plate shape formed in parallel to each other and the mold 21 is overlapped so as to face the substrate portion 2 as shown in FIG. A space 23 for forming the metal porous body 4 is formed. After filling the space 23 with metal fibers of aluminum, for example, by heating at a temperature of 600 ° C. to 660 ° C. for 0.5 minutes to 60 minutes in an inert atmosphere, the metal fibers are sintered between the metal fibers and the fin core. A sintered joint 7 can be formed between the parts 3 and the heat sink 1 can be obtained by joining them together.
そして、このヒートシンク１において、そのフィン部５は、金属成形体６のフィン芯部３を覆うように金属多孔体４が設けられており、熱媒は金属多孔体４内を通って金属多孔体４及びフィン芯部３表面との間で熱交換され、フィン部５として、金属多孔体４により大きな表面積が形成されている。また、金属多孔体４を構成する金属繊維Ｓおよび金属繊維Ｓの表面に形成される凹凸によって熱媒の流れを乱すことができるため、バルク体のみからなるフィンと比較して、比表面積が大きくなる以上に熱交換が促進される効果がある。また、フィン芯部３と金属多孔体４とは焼結接合部７を介して接合されているので、強固な接合が確保されるとともに、接合界面の熱抵抗も小さい。 In the heat sink 1, the fin portion 5 is provided with a metal porous body 4 so as to cover the fin core portion 3 of the metal molded body 6, and the heat medium passes through the metal porous body 4 to form the metal porous body. 4 and the surface of the fin core portion 3 are heat-exchanged, and a large surface area is formed as the fin portion 5 by the metal porous body 4. Moreover, since the flow of the heat medium can be disturbed by the metal fibers S constituting the metal porous body 4 and the unevenness formed on the surface of the metal fibers S, the specific surface area is large compared to fins made only of bulk bodies. There is an effect that heat exchange is promoted more than the above. Moreover, since the fin core part 3 and the metal porous body 4 are joined via the sintered joining part 7, a firm joining is ensured and the thermal resistance at the joining interface is small.
また、前述したように空隙率を４０％以上９０％以下と設定しているため、圧力損失の増大を抑制しつつ熱交換性能を高めることができる。その空隙率が４０％未満であると、熱媒の流通に対する圧力損失が大きくなり、一方、空隙率が９０％を超えると熱交換性能が低くなる。この場合、金属成形体６のフィン芯部３と金属多孔体４とは焼結接合部７によって接合され、ろう材を用いていないので、ろう材の浸透による空隙率の低下も生じない。 Moreover, since the porosity is set to 40% or more and 90% or less as described above, the heat exchange performance can be enhanced while suppressing an increase in pressure loss. When the porosity is less than 40%, the pressure loss with respect to the circulation of the heat medium becomes large. On the other hand, when the porosity exceeds 90%, the heat exchange performance becomes low. In this case, the fin core portion 3 and the metal porous body 4 of the metal molded body 6 are joined by the sintered joint portion 7 and no brazing material is used. Therefore, the porosity is not lowered due to penetration of the brazing material.
また、金属多孔体４は、金属繊維Ｓによって構成されているので、微細な空隙が確保され、前述した空隙率の調整を容易にすることができ、また、金属繊維Ｓの長さ方向に熱が伝導するので、熱交換性能がより高められる。特に、Ｌ／Ｔを８未満とすることにより、金属繊維Ｓが金属多孔体４の厚さ方向に沿って配置され易くなり、金属多孔体の厚さ方向への伝熱経路において熱抵抗となる金属繊維Ｓ間の界面が少なくなり、フィン芯部と周辺空間との間の熱伝達を促進させることができる。Ｌ／Ｔが８以上であると、図３（ｂ）に示すように、金属繊維Ｓがフィン芯部３の表面に沿った方向に配置され、金属多孔体４の厚さ方向に重なり易く、このため、金属多孔体４の厚さ方向の伝熱経路の途中に金属繊維Ｓの界面が多く存在し、厚さ方向の熱伝達に対して抵抗となるとともに金属多孔体内部を熱媒が通過する際の圧力損失が上がってしまう。Ｌ／Ｔを８未満とすることにより、図３（ａ）に示すように、金属繊維Ｓが金属多孔体４の厚さ方向に沿って配置され、金属多孔体４の厚さ方向の伝熱経路の途中に金属繊維Ｓ間の界面が少なくなり、フィン芯部３と周辺空間との間の熱伝達を良好にすることができるとともに金属多孔体４内部を熱媒が通過する際の圧力損失が抑制される。 In addition, since the metal porous body 4 is composed of the metal fibers S, a fine void is secured, the above-described porosity can be easily adjusted, and the metal fibers S are heated in the length direction. Heat conduction performance is further improved. In particular, when L / T is less than 8, the metal fibers S can be easily arranged along the thickness direction of the metal porous body 4, and heat resistance is provided in the heat transfer path in the thickness direction of the metal porous body. The interface between the metal fibers S is reduced, and heat transfer between the fin core portion and the surrounding space can be promoted. When L / T is 8 or more, as shown in FIG. 3 (b), the metal fibers S are arranged in the direction along the surface of the fin core portion 3, and are easily overlapped in the thickness direction of the metal porous body 4. For this reason, there are many interfaces of the metal fibers S in the middle of the heat transfer path in the thickness direction of the metal porous body 4, which becomes resistance to heat transfer in the thickness direction and the heat medium passes through the inside of the metal porous body. The pressure loss will increase. By setting L / T to less than 8, as shown in FIG. 3A, the metal fibers S are arranged along the thickness direction of the metal porous body 4, and the heat transfer in the thickness direction of the metal porous body 4 is performed. The interface between the metal fibers S is reduced in the middle of the path, the heat transfer between the fin core 3 and the surrounding space can be improved, and the pressure loss when the heat medium passes through the metal porous body 4 Is suppressed.
また、フィン部５の比表面積は、前述したように４×１０２ｍ２／ｍ３以上２×１０５ｍ２／ｍ３以下に設定されているため、熱交換性能の向上と圧力損失の低減に効果がある。比表面積が４×１０２ｍ２／ｍ３未満であると、熱交換面積が少なくなることによる熱交換性能の低下がおき、２×１０５ｍ２／ｍ３を超えていると圧力損失の増大を招く。 Moreover, since the specific surface area of the fin part 5 is set to 4 × 10 2 m 2 / m 3 or more and 2 × 10 5 m 2 / m 3 or less as described above, the heat exchange performance is improved and the pressure loss is reduced. It is effective for reduction. When the specific surface area is less than 4 × 10 2 m 2 / m 3 , the heat exchange performance decreases due to a decrease in the heat exchange area, and when it exceeds 2 × 10 5 m 2 / m 3 , the pressure loss Incurs an increase.
図５及び図６は本発明の第２実施形態のヒートシンクを示している。
第１実施形態のヒートシンク１は、金属成形体６のフィン芯部３が帯板状に形成されていたが、この第２実施形態のヒートシンク１１では、金属成形体１２のフィン芯部３がピン状に形成されており、その表面の外周面を覆うように金属多孔体４が設けられている。 したがって、この金属多孔体４は筒状に形成されている。
この場合も、フィン部５の立設領域における平面積とフィン部５の高さとの積で求められる体積に対するフィン部５の金属部分を除く空間体積の比率（空隙率）は４０％以上９０％以下に設定されている。また、金属多孔体４としては、第１実施形態のものと同様、多数の金属繊維Ｓの集合体が用いられており、その金属繊維Ｓの外径Ｄが２０μｍ以上３０００μｍ以下で、長さＬが０．２ｍｍ以上５０ｍｍ以下に形成され、金属多孔体４のフィン芯部３表面からの厚さＴに対して、Ｌ／Ｔが８未満に設定されている。また、フィン部５の比表面積は、４×１０２ｍ２／ｍ３以上２×１０５ｍ２／ｍ３以下である。
5 and 6 show a heat sink according to a second embodiment of the present invention.
In the heat sink 1 of the first embodiment, the fin core portion 3 of the metal molded body 6 is formed in a strip shape. However, in the heat sink 11 of the second embodiment, the fin core portion 3 of the metal molded body 12 is a pin. The metal porous body 4 is provided so that the outer peripheral surface of the surface may be covered. Therefore, this metal porous body 4 is formed in a cylindrical shape.
Also in this case, the ratio (void ratio) of the space volume excluding the metal portion of the fin portion 5 to the volume obtained by the product of the flat area in the standing region of the fin portion 5 and the height of the fin portion 5 is 40% or more and 90%. It is set as follows. Further, as the metal porous body 4, an aggregate of a large number of metal fibers S is used as in the first embodiment, and the outer diameter D of the metal fibers S is 20 μm or more and 3000 μm or less, and the length L Is 0.2 mm or more and 50 mm or less, and L / T is set to less than 8 with respect to the thickness T from the surface of the fin core portion 3 of the metal porous body 4. The specific surface area of the fin portion 5 is 4 × 10 2 m 2 / m 3 or more 2 × 10 5 m 2 / m 3 or less.
このヒートシンク１１は、基板部２及びフィン芯部３からなる金属成形体１２を例えば鍛造によって形成した後、そのピン状のフィン芯部３に第１実施形態と同様の型（図４参照。ただし、この第２実施形態の場合は、溝状の凹部２２に代えて、ピン状のフィン芯部３が挿入できる円形断面の凹部となる）を用いて金属繊維Ｓからなる金属多孔体４を焼結によって接合すればよい。
なお、図５及び図６において、第１実施形態と共通する要素には同一符号を付して説明を省略する。
The heat sink 11 is formed by, for example, forging a metal molded body 12 composed of the substrate portion 2 and the fin core portion 3, and the pin-shaped fin core portion 3 has a mold similar to that of the first embodiment (see FIG. 4, however, see FIG. 4). In the case of the second embodiment, the metal porous body 4 made of the metal fibers S is baked using a recess having a circular cross section into which the pin-shaped fin core portion 3 can be inserted instead of the groove-like recess 22. What is necessary is just to join by a tie.
5 and 6, elements common to the first embodiment are denoted by the same reference numerals and description thereof is omitted.
第１実施形態のプレート状のフィン部としたプレートフィン型ヒートシンク１と、第２実施形態のピン状のフィン部としたピンフィン型ヒートシンク１１とをそれぞれ作製した。この場合、基板部２は、縦Ａ・横Ｂとも６０ｍｍ、厚さ４ｍｍとし、プレートフィン型ヒートシンクにおいては、フィン芯部３を基板部２の全長にわたって形成し、その厚みｔを２ｍｍ、フィン芯部３の離間間隔Ｃを１０ｍｍとした。また、ピンフィン状ヒートシンクにおいては、フィン芯部３は直径２ｍｍ、フィン芯部３の離間間隔を５ｍｍで平面視正三角形の頂点に配置されるように設けた。いずれの場合も、フィン芯部３の高さｈは６ｍｍとした。
また、金属成形体６，１２及び金属多孔体４の材料としては、プレートフィン型ヒートシンクの場合はアルミニウム合金を用い、ピンフィン型ヒートシンクの場合は銅合金を用いた。
The plate fin type heat sink 1 as the plate-like fin portion of the first embodiment and the pin fin type heat sink 11 as the pin-like fin portion of the second embodiment were respectively produced. In this case, the substrate portion 2 is 60 mm in length A and width B and 4 mm in thickness. In the plate fin type heat sink, the fin core portion 3 is formed over the entire length of the substrate portion 2 and the thickness t is 2 mm. The spacing C of the part 3 was 10 mm. Further, in the pin fin-shaped heat sink, the fin core portion 3 was provided so as to be arranged at the apex of the regular triangle in plan view with a diameter of 2 mm and a spacing distance of the fin core portion 3 of 5 mm. In any case, the height h of the fin core portion 3 was 6 mm.
Further, as the material of the metal molded bodies 6 and 12 and the metal porous body 4, an aluminum alloy was used in the case of a plate fin type heat sink, and a copper alloy was used in the case of a pin fin type heat sink.
表１がプレートフィン型ヒートシンク、表２がピンフィン型ヒートシンクであり、それぞれ表に示す諸元（繊維径、繊維長さ、金属多孔体厚み、Ｌ／Ｄ、Ｌ／Ｔ）のものとした。
金属多孔体４を構成している金属繊維Ｓの直径、長さは、乾式粒子画像分析装置（Ｍａｌｂｅｒｎ社製 Ｍｏｒｐｈｏｌｏｇｉ Ｇ３Ｓ）により、繊維の画像解析を行い、繊維径Ｄ、繊維長Ｌを測定した。
フィン部５の比表面積は、ＢＥＴ法比表面積測定装置（ＳＨＩＭＡＤＺＵ社製 トライスターII ３０２０シリーズ）により、試験ガスとしてはクリプトンを用いて測定した。
圧力損失は、一方向に熱媒（空気）が流れる冷却性能測定装置を使用した。その測定装置にヒートシンク１，１１をはめ込み、フィン部５に３０℃の熱媒を体積流量１００ＮＬ／ｍｉｎ（一定）で流し、ヒートシンク前後の差圧を測定して、これを圧力損失とした。熱媒は、基板部２の縦方向（プレートフィン型ヒートシンクの場合はフィン部５の長さ方向）に流通させた。
Table 1 shows a plate fin type heat sink, and Table 2 shows a pin fin type heat sink, each of which has the specifications shown in the table (fiber diameter, fiber length, metal porous body thickness, L / D, L / T).
The diameter and length of the metal fiber S constituting the metal porous body 4 were measured for the fiber diameter D and the fiber length L by performing a fiber image analysis using a dry particle image analyzer (Morphology G3S manufactured by Malvern). .
The specific surface area of the fin part 5 was measured with a BET method specific surface area measuring device (Tristar II 3020 series manufactured by SHIMADZU) using krypton as a test gas.
For the pressure loss, a cooling performance measuring device in which a heat medium (air) flows in one direction was used. Heat sinks 1 and 11 were fitted into the measuring device, a heating medium of 30 ° C. was passed through the fin portion 5 at a volume flow rate of 100 NL / min (constant), and the differential pressure before and after the heat sink was measured, and this was taken as a pressure loss. The heat medium was circulated in the longitudinal direction of the substrate portion 2 (in the case of a plate fin heat sink, the length direction of the fin portion 5).
熱交換性能（素子温度上昇測定）については、圧力損失測定で用いた冷却性能装置を使用し、ヒートシンクの基板部２上（フィン部５とは反対面上）に柔軟性のあるＳｉゲル放熱シート、被冷却体（発熱素子）、断熱材の順で重ね、押さえ治具により被冷却体を４０ｃｍ・Ｎのトルクで圧着する。被冷却体とＳｉゲル発熱シートの間には熱電対が取り付けられており、常時被冷却体の温度測定を行っている。装置および被冷却体を３０℃の恒温槽に入れ、フィン部５に３０℃の熱媒を１００Ｌ／分（一定）で５分間流し、被冷却体の温度(発熱前温度Ｔ１)が安定していることを確認した後、１０Ｗの電力で被冷却体を５分間以上発熱させ、被冷却体の温度が安定した（1分当りの温度変化が＋／−０．１℃／ｍｉｎ以下）した時点での温度(発熱後温度Ｔ２)を測定し、発熱前温度（Ｔ１）から発熱後温度（Ｔ２）の温度上昇ΔＴをヒートシンクの熱交換性能指標として評価した。即ち、ΔＴが小さいほど熱交換性能に優れたヒートシンクである。
これらの結果を表１及び表２に示す。試料番号１４及び２４は、金属多孔体を設けず、金属成形体のみからなるヒートシンクである。
For heat exchange performance (element temperature rise measurement), use the cooling performance device used in the pressure loss measurement, and flexible Si gel heat dissipation sheet on the substrate part 2 (on the opposite side of the fin part 5) of the heat sink Then, the object to be cooled (heat generating element) and the heat insulating material are stacked in this order, and the object to be cooled is pressure-bonded with a holding jig with a torque of 40 cm · N. A thermocouple is attached between the cooled object and the Si gel heating sheet, and the temperature of the cooled object is constantly measured. Put device and the object to be cooled in a thermostat at 30 ° C., flowed for 5 minutes to 30 ° C. for a heating medium in the fin unit 5 at 100L / min (constant), the temperature of the object to be cooled (heating temperature before T 1) is stable After confirming that the object to be cooled was heated for 5 minutes or more with power of 10 W, the temperature of the object to be cooled was stabilized (temperature change per minute is +/− 0.1 ° C./min or less). The temperature at the time (post-heat generation temperature T 2 ) was measured, and the temperature increase ΔT from the pre-heat generation temperature (T 1 ) to the post-heat generation temperature (T 2 ) was evaluated as a heat exchange performance index of the heat sink. That is, the smaller the ΔT, the better the heat exchange performance.
These results are shown in Tables 1 and 2. Sample numbers 14 and 24 are heat sinks made of only a metal molded body without providing a metal porous body.
これらの結果からわかるように、試料番号１，２，４〜１３，１５〜２１は、圧力損失が４ｋＰａ以下、素子温度上昇が２５℃以下という良好な結果が得られた。これら試料は、空隙率が４０％以上９０％以下かつＬ／Ｔが８未満、又は、空隙率が４０％以上９０％以下かつ比表面積が４×１０２ｍ２／ｍ３以上２×１０５ｍ２／ｍ３以下のいずれかであった。
これらのうち、Ｌ／Ｔが８を超える試料番号８，９，１５，１８、及び比表面積が４×１０２ｍ２／ｍ３未満の試料番号５，６，１２，２１は、素子温度上昇が若干高めであり、また、比表面積が２×１０５ｍ２／ｍ３を超える試料番号２，１０，１６は、圧力損失が若干高めであったが、いずれも実用上は支障なく用いることができる。
以上の良好な試料のなかでも、空隙率が４０％以上９０％以下、Ｌ／Ｔが８未満、比表面積が４×１０２ｍ２／ｍ３以上２×１０５ｍ２／ｍ３以下の試料番号１，４，７，１１，１３，１７，１９，２０は、圧力損失が３ｋＰａ以下、素子温度上昇が２０℃以下であり、特に良好と言える。
空隙率が４０％未満の試料番号３，２２は、圧力損失が４ｋＰａを超える結果となった。逆に空隙率が９０％を超える試料番号２３，２４は素子温度上昇が２５℃を超えている。いずれも良好な結果を得られていない。
As can be seen from these results, Sample Nos. 1, 2, 4 to 13, and 15 to 21 gave good results that the pressure loss was 4 kPa or less and the device temperature increase was 25 ° C. or less. These samples have a porosity of 40% or more and 90% or less and L / T of less than 8, or a porosity of 40% or more and 90% or less and a specific surface area of 4 × 10 2 m 2 / m 3 or more and 2 × 10 5. m 2 / m 3 or less.
Among these, sample numbers 8, 9, 15, and 18 with L / T exceeding 8 and sample numbers 5, 6, 12, and 21 with a specific surface area of less than 4 × 10 2 m 2 / m 3 are increased in device temperature. Sample Nos. 2, 10 and 16 with a specific surface area exceeding 2 × 10 5 m 2 / m 3 had a slightly higher pressure loss, but they should be used without any practical problems. Can do.
Among these good samples, the porosity is 40% or more and 90% or less, L / T is less than 8, and the specific surface area is 4 × 10 2 m 2 / m 3 or more and 2 × 10 5 m 2 / m 3 or less. Sample Nos. 1, 4, 7, 11, 13, 17, 19, and 20 are particularly good because the pressure loss is 3 kPa or less and the device temperature rise is 20 ° C. or less.
Sample Nos. 3 and 22 having a porosity of less than 40% resulted in a pressure loss exceeding 4 kPa. On the other hand, sample Nos. 23 and 24 with a porosity exceeding 90% have an element temperature increase exceeding 25 ° C. None of them have obtained good results.
なお、本発明は上記実施形態に限定されるものではく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。
例えば、上記の実施形態では、金属多孔体はフィン部の両面にのみ形成されているが、フィン部の先端も覆うように設けてもよく、その場合は、フィンの高さは、フィン部の先端の金属多孔体の厚さ分も含む。
The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, in the above embodiment, the metal porous body is formed only on both surfaces of the fin portion, but it may be provided so as to cover the tip of the fin portion, and in that case, the height of the fin is the height of the fin portion. This includes the thickness of the metal porous body at the tip.
１…ヒートシンク
２…基板部
３…フィン芯部
４…金属多孔体
５…フィン部
６…金属成形体
７…焼結接合部
８…空間部
１１…ヒートシンク
１２…金属成形体
２１…型
２２…凹部
DESCRIPTION OF SYMBOLS 1 ... Heat sink 2 ... Substrate part 3 ... Fin core part 4 ... Metal porous body 5 ... Fin part 6 ... Metal molded object 7 ... Sintered joint part 8 ... Space part 11 ... Heat sink 12 ... Metal molded object 21 ... Mold 22 ... Concave
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111721143A (en) * | 2019-03-21 | 2020-09-29 | 北京康孚科技股份有限公司 | Temperature and humidity regulating heat exchange coil pipe with metal fiber layers attached to surfaces of fins |
| EP3664132A4 (en) * | 2017-08-02 | 2021-04-28 | Mitsubishi Materials Corporation | Heatsink |
| JPWO2021241642A1 (en) * | 2020-05-29 | 2021-12-02 | ||
| JPWO2021241643A1 (en) * | 2020-05-29 | 2021-12-02 | ||
| WO2022202247A1 (en) * | 2021-03-25 | 2022-09-29 | 株式会社巴川製紙所 | Thermal conductor |
| EP4075933A1 (en) * | 2021-04-14 | 2022-10-19 | Siemens Aktiengesellschaft | Heat exchanger assembly |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009250810A (en) * | 2008-04-07 | 2009-10-29 | Seiko Epson Corp | Temperature control device of electronic component, and handler device |
| US20140144609A1 (en) * | 2012-11-26 | 2014-05-29 | Zalman Tech Co., Ltd. | Evaporator for looped heat pipe system and method of manufacturing the same |
| JP2015026787A (en) * | 2013-07-29 | 2015-02-05 | アイシン精機株式会社 | Cooling member |
| WO2016002870A1 (en) * | 2014-07-02 | 2016-01-07 | 三菱マテリアル株式会社 | Porous aluminum heat exchange member |
| JP2016012618A (en) * | 2014-06-27 | 2016-01-21 | 大日本印刷株式会社 | Heat dissipation structure and solar cell module including heat dissipation structure |
-
2016
- 2016-01-27 JP JP2016013099A patent/JP6547641B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009250810A (en) * | 2008-04-07 | 2009-10-29 | Seiko Epson Corp | Temperature control device of electronic component, and handler device |
| US20140144609A1 (en) * | 2012-11-26 | 2014-05-29 | Zalman Tech Co., Ltd. | Evaporator for looped heat pipe system and method of manufacturing the same |
| JP2015026787A (en) * | 2013-07-29 | 2015-02-05 | アイシン精機株式会社 | Cooling member |
| JP2016012618A (en) * | 2014-06-27 | 2016-01-21 | 大日本印刷株式会社 | Heat dissipation structure and solar cell module including heat dissipation structure |
| WO2016002870A1 (en) * | 2014-07-02 | 2016-01-07 | 三菱マテリアル株式会社 | Porous aluminum heat exchange member |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3664132A4 (en) * | 2017-08-02 | 2021-04-28 | Mitsubishi Materials Corporation | Heatsink |
| CN111721143A (en) * | 2019-03-21 | 2020-09-29 | 北京康孚科技股份有限公司 | Temperature and humidity regulating heat exchange coil pipe with metal fiber layers attached to surfaces of fins |
| JPWO2021241642A1 (en) * | 2020-05-29 | 2021-12-02 | ||
| WO2021241642A1 (en) * | 2020-05-29 | 2021-12-02 | 株式会社巴川製紙所 | Temperature adjustment unit and method for manufacturing temperature adjustment unit |
| JPWO2021241643A1 (en) * | 2020-05-29 | 2021-12-02 | ||
| WO2021241643A1 (en) * | 2020-05-29 | 2021-12-02 | 株式会社巴川製紙所 | Temperature adjustment unit |
| JP7245391B2 (en) | 2020-05-29 | 2023-03-23 | 株式会社巴川製紙所 | Temperature control unit and temperature control unit manufacturing method |
| JP7245392B2 (en) | 2020-05-29 | 2023-03-23 | 株式会社巴川製紙所 | temperature control unit |
| WO2022202247A1 (en) * | 2021-03-25 | 2022-09-29 | 株式会社巴川製紙所 | Thermal conductor |
| TWI815354B (en) * | 2021-03-25 | 2023-09-11 | 日商巴川製紙所股份有限公司 | Heat transfer body |
| EP4318573A4 (en) * | 2021-03-25 | 2024-10-09 | Tomoegawa Co Ltd | Thermal conductor |
| EP4075933A1 (en) * | 2021-04-14 | 2022-10-19 | Siemens Aktiengesellschaft | Heat exchanger assembly |
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