JP2017133947A - Electronic component conveyance device and electronic component inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electronic component conveyance device capable of properly determining that when at least one of a first ion generation part and a second ion generation part is not normal, the one ion generation part is not normal, and also to provide an electronic component inspection device.SOLUTION: An electronic component conveyance device includes: a first ion generation part for generating ions; a second ion generation part for generating ions; and a detection part for detecting at least one of ion balance and static elimination time. In the electronic component conveyance device, at least one of the first ion generation part and the second ion generation part is actuated.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an electronic component conveying device and an electronic component inspection device.

  2. Description of the Related Art Conventionally, an electronic component inspection apparatus that inspects the electrical characteristics of an electronic component such as an IC device has been known. A conveyance device is incorporated (see, for example, Patent Document 1). When inspecting the IC device, the IC device is disposed in the holding unit, and a plurality of probe pins provided in the holding unit are brought into contact with the terminals of the IC device.

  The electronic component conveying apparatus heats or cools the IC device in advance to adjust the temperature of the IC device to a temperature suitable for inspection, and the IC device whose temperature is adjusted by the soak plate to the vicinity of the inspection unit. A supply shuttle for carrying, a supply device carrying head for carrying the IC device between the tray on which the IC device is arranged and the soak plate, and carrying the IC device between the soak plate and the supply shuttle, A recovery shuttle that transports the IC device, an IC device transport head that transports the IC device between the supply shuttle and the inspection unit, and an IC device that transports the IC device between the inspection unit and the recovery shuttle, and the recovery shuttle. Device transport head for collection that transports the IC device to and from the tray on which the IC device is placed The has.

  Patent Document 1 discloses that an electronic component transport apparatus is provided with an ionizer. The ions generated by the ionizer can neutralize and remove (charge) the static electricity charged in the IC device.

  Usually, a plurality of ionizers are provided in the electronic component conveying apparatus. Moreover, if the ionizer fails, the ion balance may be lost. For this reason, a sensor for detecting ion balance is provided in the electronic component transport device, and the ion balance is detected by the sensor during operation of the electronic component transport device, and whether or not the ionizer is normal based on the detection result. Determine whether.

Special table 2000-533887

  However, in the conventional configuration, since the ion balance of ions generated by a plurality of ionizers is detected by one sensor, even if any ionizer fails, it is not known which ionizer is broken. Further, it may not be known that any ionizer is out of order.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as follows.

The electronic component transport apparatus of the present invention includes a first ion generating unit that generates ions,
A second ion generator for generating ions;
A detection unit that detects at least one of ion balance and static elimination time,
One of the first ion generation unit and the second ion generation unit is operated.

  Thus, detection is performed by detecting at least one of the ion balance and the static elimination time by the detection unit while one of the first ion generation unit and the second ion generation unit is activated. Based on the detection result of the part, it is possible to accurately determine whether one of the ion generation parts is normal.

  In the electronic component transport device of the present invention, when one of the first ion generation unit and the second ion generation unit is operated, it is preferable to stop the operation of the other ion generation unit. .

  Thereby, based on the detection result of a detection part, it can be judged exactly whether one ion generating part is normal.

  In the electronic component transport device of the present invention, the detection unit operates the first ion generation unit and stops the operation of the second ion generation unit, and the ion balance and static elimination time of the first ion generation unit. It is preferable to detect at least one of them.

  Thereby, based on the detection result of the detection unit, it is possible to accurately determine whether or not the first ion generation unit is normal.

In the electronic component transport device according to the aspect of the invention, it is preferable that the first ion generation unit is determined not to be normal when the detection result of the detection unit does not reach a reference value.
Thereby, it can be judged accurately whether the 1st ion generating part is normal.

  In the electronic component transport apparatus according to the present invention, it is preferable that the electronic component transport apparatus includes a notification unit that notifies that the first ion generation unit is not normal when the detection result of the detection unit does not reach a reference value.

  Thereby, the user can easily grasp whether or not the first ion generation unit is normal.

  In the electronic component transport device according to the aspect of the invention, the detection unit stops the operation of the first ion generation unit and operates the second ion generation unit, and the ion balance and the charge removal of the second ion generation unit. It is preferred to detect at least one of the times.

  Thereby, based on the detection result of a detection part, it can be judged accurately whether the 2nd ion generation part is normal.

In the electronic component transport apparatus according to the present invention, it is preferable that the second ion generation unit is determined not to be normal when the detection result of the detection unit does not reach a reference value.
Thereby, it can be judged accurately whether the 2nd ion generating part is normal.

  In the electronic component transport apparatus according to the present invention, it is preferable that the electronic component transport apparatus includes a notification unit that notifies that the second ion generation unit is not normal when the detection result of the detection unit does not reach a reference value.

  Thereby, the user can grasp | ascertain easily whether the 2nd ion generating part is normal.

  In the electronic component transport apparatus of the present invention, the detection by the detection unit is performed by collecting an inspection area for inspecting the electronic component, a supply area for supplying the electronic component to the inspection area, and the electronic component for which inspection has been completed. It is preferable to carry out in each recovery area.

  Thereby, in each of the supply region, the inspection region, and the recovery region, it is possible to accurately determine whether one of the ion generation units is normal based on the detection result of the detection unit.

  In the electronic component conveying apparatus of the present invention, it is preferable that the detection is performed by the detection unit independently for each of the supply area, the inspection area, and the collection area.

  As a result, detection by the detection unit can be performed simultaneously in the supply area, the inspection area, and the collection area, thereby shortening the time required for the detection.

  In the electronic component transport device according to the aspect of the invention, it is preferable that the detection unit is disposed below the first ion generation unit and the second ion generation unit.

  The ionizer ionizes dry air to generate ionized dry air. The ionized dry air usually has a specific gravity greater than that of the atmosphere. For this reason, the ion balance can be accurately detected by the sensor by disposing the detection unit below the first ion generation unit and the second ion generation unit.

The electronic component inspection apparatus of the present invention includes a first ion generating unit that generates ions,
A second ion generator for generating ions;
A detector that detects at least one of ion balance and static elimination time;
An inspection unit for inspecting the electronic component,
One of the first ion generation unit and the second ion generation unit is operated.

  Thus, detection is performed by detecting at least one of the ion balance and the static elimination time by the detection unit while one of the first ion generation unit and the second ion generation unit is activated. Based on the detection result of the part, it is possible to accurately determine whether one of the ion generation parts is normal.

It is the schematic perspective view which looked at the embodiment of the electronic component inspection device of the present invention from the front side. It is a schematic plan view which shows the operation state of the electronic component inspection apparatus shown in FIG. It is a schematic plan view for demonstrating arrangement | positioning of the ionizer and sensor in the electronic component inspection apparatus shown in FIG. It is a block diagram of the electronic component inspection apparatus shown in FIG. It is a figure which shows typically the test | inspection area | region of the electronic component test | inspection apparatus shown in FIG. 1, and is a side view for demonstrating arrangement | positioning of an ionizer and a sensor.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an electronic component conveying device and an electronic component inspection device according to the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

  The first embodiment will be described below with reference to FIGS. For convenience of explanation, as shown in FIG. 1, three axes orthogonal to each other are defined as an X axis, a Y axis, and a Z axis. Further, the XY plane including the X axis and the Y axis is horizontal, and the Z axis is vertical. A direction parallel to the X axis is also referred to as “X direction”, a direction parallel to the Y axis is also referred to as “Y direction”, and a direction parallel to the Z axis is also referred to as “Z direction”. The direction in which the arrow in each direction is directed is called “positive”, and the opposite direction is called “negative”. In addition, the upper side in FIGS. 1 and 5 may be referred to as “upper (or upper)” and the lower side may be referred to as “lower (or lower)”. In addition, the term “horizontal” in the specification of the present application is not limited to complete horizontal, and includes a state slightly inclined (for example, less than about 5 °) with respect to the horizontal as long as transportation of electronic components is not hindered.

  Further, in FIG. 2, illustration of the ionizer and the sensor is omitted in order to avoid the drawing from being complicated. Moreover, in FIG. 3, in order to show an ionizer and a sensor in an easy-to-understand manner, they are indicated by a solid line and other structures are indicated by a two-dot chain line.

  The inspection apparatus (electronic component inspection apparatus) 1 shown in FIGS. 1 to 3 conveys electronic components such as an IC device that is a BGA (Ball Grid Array) package, for example, and inspects and tests electrical characteristics during the conveyance process. (Hereinafter simply referred to as “inspection”). In the following, for convenience of explanation, the case where an IC device is used as the electronic component will be described as a representative, and this will be referred to as “IC device 90”.

  As shown in FIG. 2, the inspection apparatus 1 includes a tray supply area A1, a device supply area (hereinafter simply referred to as “supply area”) A2, an inspection area A3, and a device collection area (hereinafter simply referred to as “collection area”). Say) A4 and tray removal area A5. Then, the IC device 90 passes through the respective areas in order from the tray supply area A1 to the tray removal area A5, and the inspection is performed in the intermediate inspection area A3. As described above, the inspection apparatus 1 includes the electronic component conveyance device (handler) that conveys the IC device 90 in each region, and the inspection unit 16 that performs inspection in the inspection region A3. In addition, the electronic component transport apparatus includes a control unit 800, a monitor (display unit) 300 that is a notification unit, a signal lamp 400, a speaker 500, and an operation panel 700 (see FIGS. 1 and 4). .

  In the inspection apparatus 1, the direction in which the tray supply area A1 and the tray removal area A5 are arranged (the lower side in FIG. 2) is the front side, and the opposite side, that is, the direction in which the inspection area A3 is arranged (FIG. 2 is used as the back side.

  The tray supply area A1 is a material supply unit to which a tray (mounting member) 200 in which a plurality of uninspected IC devices 90 are arranged is supplied. In the tray supply area A1, a large number of trays 200 can be stacked.

  The supply area A2 is an area for supplying a plurality of IC devices 90 arranged on the tray 200 from the tray supply area A1 to the inspection area A3. Note that tray transport mechanisms 11A and 11B that transport the tray 200 one by one in the horizontal direction are provided so as to straddle the tray supply area A1 and the supply area A2. The tray transport mechanism 11 </ b> A is a moving unit that can move the tray 200 to the positive side in the Y direction together with the IC device 90 placed on the tray 200. Thereby, the IC device 90 can be stably fed into the supply area A2. The tray transport mechanism 11B is a moving unit that can move the empty tray 200 to the negative side in the Y direction, that is, from the supply area A2 to the tray supply area A1.

  In the supply area A2, a temperature adjustment unit (soak plate (English notation: soak plate, Chinese notation (example): soaking plate)) 12, a device transfer head 13, and a tray transfer mechanism 15 are provided. .

  The temperature adjustment unit 12 can collectively cool or heat the plurality of IC devices 90 and is sometimes referred to as a “soak plate”. With the soak plate, the IC device 90 before being inspected by the inspection unit 16 can be cooled or heated in advance and adjusted to a temperature suitable for the inspection. In the configuration shown in FIG. 2, two temperature adjusting units 12 are arranged and fixed in the Y direction. Then, the IC device 90 on the tray 200 carried (conveyed) from the tray supply area A1 by the tray transport mechanism 11A is transported to one of the temperature adjustment units 12.

  The device transport head 13 is supported so as to be movable in the X and Y directions and further in the Z direction within the supply area A2. As a result, the device transport head 13 transports the IC device 90 between the tray 200 loaded from the tray supply area A1 and the temperature adjustment unit 12, and between the temperature adjustment unit 12 and a device supply unit 14 described later. It is possible to carry the IC device 90.

  The device transport head 13 includes a plurality of hand units 131 as gripping portions for gripping the IC device 90 (in FIG. 2, only one symbol “131” is representatively described). The hand unit 131 includes a suction nozzle, and grips the IC device 90 by suction with the suction nozzle.

  The tray transport mechanism 15 is a mechanism that transports the empty tray 200 from which all IC devices 90 have been removed to the positive side in the X direction within the supply area A2. After this conveyance, the empty tray 200 is returned from the supply area A2 to the tray supply area A1 by the tray conveyance mechanism 11B.

  The inspection area A3 is an area where the IC device 90 is inspected. In the inspection area A3, an inspection unit 16 and a device transport head 17 are provided. In addition, a device supply unit 14 that moves so as to straddle the supply region A2 and the inspection region A3 and a device recovery unit 18 that moves so as to straddle the inspection region A3 and the recovery region A4 are also provided.

  The device supply unit 14 is a mounting unit on which the IC device 90 temperature-adjusted by the temperature adjusting unit 12 is mounted and can transport (move) the IC device 90 to the vicinity of the inspection unit 16. Sometimes referred to as “shuttle plate”.

  The device supply unit 14 has a plurality of recesses (pockets) 141 arranged in a matrix, that is, in the X direction and the Y direction, respectively (in FIG. 2, only one symbol “141” is representatively shown. Is listed). Each recess 141 accommodates one IC device 90 before being inspected by the inspection unit 16.

  The device supply unit 14 is supported so as to be movable in the horizontal direction along the X direction between the supply region A2 and the inspection region A3. In the configuration shown in FIG. 2, two device supply units 14 are arranged in the Y direction, and the IC device 90 on the temperature adjustment unit 12 is transported to one of the device supply units 14. The device supply unit 14 is configured to maintain the temperature adjusted state of the temperature-adjusted IC device 90. Thereby, the IC device 90 can be cooled or heated, and thus the temperature adjustment state of the IC device 90 can be maintained.

  The inspection unit 16 mounts (holds) the IC device 90 and inspects / tests (electrically inspects) the electrical characteristics of the IC device 90, that is, when inspecting the IC device 90. This is a member on which the IC device 90 is placed.

  On the upper surface of the inspection unit 16, there are provided a plurality of holding units 161 that are concave portions for housing (mounting) (holding) the IC device 90 (in FIG. 2, only one symbol “161” is representatively shown. Is listed). The IC device 90 is accommodated in the holding unit 161 and thereby placed on the inspection unit 16.

  In addition, probe pins that are electrically connected to the terminals of the IC device 90 in a state where the IC device 90 is held by the holding unit 161 are provided at positions corresponding to the holding units 161 of the inspection unit 16. Yes. Then, the terminal of the IC device 90 and the probe pin are electrically connected (contacted), and the IC device 90 is inspected via the probe pin. The IC device 90 is inspected by an inspection control unit provided in a tester (not shown) connected to the inspection unit 16 based on a program stored in the storage unit of the inspection control unit. In the inspection unit 16, similarly to the temperature adjustment unit 12, the IC device 90 can be heated or cooled to adjust the IC device 90 to a temperature suitable for the inspection.

  The device transport head 17 is supported so as to be movable in the Y direction and the Z direction within the inspection area A3. Further, the device transport head 17 can transport and place the IC device 90 on the device supply unit 14 carried in from the supply area A2 onto the inspection unit 16, and the IC device 90 on the inspection unit 16. Can be transported and placed on the device collection unit 18. When inspecting the IC device 90, the device transport head 17 presses the IC device 90 toward the inspection unit 16, thereby bringing the IC device 90 into contact with the inspection unit 16. Thereby, as described above, the terminals of the IC device 90 and the probe pins of the inspection unit 16 are electrically connected. The device transport head 17 can also cool or heat the IC device 90 to adjust the IC device 90 to a temperature suitable for inspection.

  The device transport head 17 has a plurality of hand units 175 as gripping parts for gripping the IC device 90 (in FIG. 2, only one symbol “175” is representatively shown). The hand unit 175 includes a suction nozzle, and grips the IC device 90 by suction with the suction nozzle.

  The device collection unit 18 is a placement unit on which the IC device 90 that has been inspected by the inspection unit 16 is placed, and the IC device 90 can be transported (moved) to the collection region A4. Sometimes called “shuttle plate”.

  The device collection unit 18 has a plurality of recesses (pockets) 181 arranged in a matrix form in each of the X direction and the Y direction (in FIG. 2, only one symbol “181” is representatively shown. Is listed).

  The device collection unit 18 is supported so as to be movable in the horizontal direction along the X direction between the inspection area A3 and the collection area A4. In the configuration shown in FIG. 2, two device collection units 18 are arranged in the Y direction, similarly to the device supply unit 14, and the IC device 90 on the inspection unit 16 is one of the device collection units 18. Are transported to and placed. This transport is performed by the device transport head 17.

  In the inspection apparatus 1, one device supply unit 14 and one device collection unit 18 are coupled in the X direction via a coupling unit (not shown), and a shuttle unit that moves collectively in the same direction. It is composed. The device supply unit 14 and the device collection unit 18 may be configured to be able to move independently.

  The collection area A4 is an area in which a plurality of IC devices 90 that have been inspected are collected. In the collection area A4, a collection tray 19, a device conveyance head 20, and a tray conveyance mechanism 21 are provided. An empty tray 200 is also prepared in the collection area A4.

  The collection tray 19 is a placement unit on which the IC device 90 inspected by the inspection unit 16 is placed, and is fixed so as not to move in the collection region A4. As a result, the inspected IC device 90 can be stably placed on the collection tray 19 even in the collection area A4 where a relatively large number of various movable parts such as the device transport head 20 are arranged. Become. In the configuration shown in FIG. 2, three collection trays 19 are arranged along the X direction.

  Three empty trays 200 are also arranged along the X direction. This empty tray 200 is also a placement unit on which the IC device 90 inspected by the inspection unit 16 is placed. Then, the IC device 90 on the device recovery unit 18 that has moved to the recovery area A4 is conveyed and placed on either the recovery tray 19 or the empty tray 200. Thereby, the IC device 90 is classified and collected for each inspection result.

  The device transport head 20 is supported so as to be movable in the X and Y directions and further in the Z direction within the collection area A4. Accordingly, the device transport head 20 can transport the IC device 90 from the device recovery unit 18 to the recovery tray 19 or the empty tray 200.

  The device transport head 20 has a plurality of hand units 201 as gripping parts for gripping the IC device 90 (in FIG. 2, only one symbol “201” is representatively shown). The hand unit 201 includes a suction nozzle, and grips the IC device 90 by suction with the suction nozzle.

  The tray transport mechanism 21 is a mechanism for transporting an empty tray 200 carried from the tray removal area A5 in the X direction within the collection area A4. Then, after this conveyance, the empty tray 200 is arranged at a position where the IC device 90 is collected, that is, it can be one of the three empty trays 200.

  The tray removal area A5 is a material removal unit from which the tray 200 in which a plurality of inspected IC devices 90 are arranged is collected and removed. In the tray removal area A5, a large number of trays 200 can be stacked.

  In addition, tray transport mechanisms 22A and 22B that transport the tray 200 one by one in the Y direction are provided so as to straddle the collection area A4 and the tray removal area A5. The tray transport mechanism 22A is a moving unit that can move the tray 200 in the Y direction. Thus, the inspected IC device 90 can be transported from the collection area A4 to the tray removal area A5. The tray transport mechanism 22B is a moving unit that can move an empty tray 200 for collecting the IC device 90 from the tray removal area A5 to the collection area A4.

  The control unit 800 includes, for example, the tray transport mechanisms 11A and 11B, the temperature adjustment unit 12, the device transport head 13, the device supply unit 14, the tray transport mechanism 15, the inspection unit 16, the device transport head 17, Device collection unit 18, device transport head 20, tray transport mechanism 21, tray transport mechanisms 22A and 22B, monitor 300, signal lamp 400, speaker 500, ionizers 31 to 39, 40 to 46, which will be described later, and the like. The drive of each part is controlled.

  A user (operator) can set or check the operating conditions of the inspection apparatus 1 via the monitor 300. The monitor 300 includes a display screen (display unit) 301 configured by, for example, a liquid crystal screen, and is disposed at the upper part on the front side of the inspection apparatus 1. As shown in FIG. 1, on the right side of the tray removal area A5 in the figure, there is provided a mouse table 600 on which a mouse used for operating a screen displayed on the monitor 300 is placed.

  An operation panel 700 is disposed on the lower right side in FIG. The operation panel 700 commands the inspection apparatus 1 to perform a desired operation separately from the monitor 300.

  Further, the signal lamp 400 can notify the operating state or the like of the inspection apparatus 1 by a combination of colors that emit light. The signal lamp 400 is arranged on the upper part of the inspection apparatus 1. Note that the inspection device 1 has a built-in speaker 500, and the operation state of the inspection device 1 can also be notified by the speaker 500.

  As shown in FIG. 2, in the inspection apparatus 1, the tray supply area A1 and the supply area A2 are separated (partitioned) by the first partition wall 61, and the supply area A2 and the inspection area A3 are separated. It is divided by the second partition wall 62, the inspection area A3 and the collection area A4 are separated by the third partition wall 63, and the collection area A4 and the tray removal area A5 are separated by the fourth partition wall 64. ing. The supply area A2 and the collection area A4 are also separated by the fifth partition wall 65.

  An opening 621 and an opening 622 are formed in the second partition wall 62. One device supply unit 14 can pass through the opening 621. Thereby, the opening 621 functions as an entrance when the device supply unit 14 enters the inspection region A3 from the supply region A2, and functions as an exit when the device supply unit 14 exits from the inspection region A3 to the supply region A2. Further, the other device supply unit 14 can pass through the opening 622. Accordingly, the opening 622 also functions as an entrance when the device supply unit 14 enters the inspection region A3 from the supply region A2, and functions as an exit when the device supply unit 14 exits from the inspection region A3 to the supply region A2.

  The third partition 63 is also formed with an opening 631 and an opening 632. One device recovery unit 18 can pass through the opening 631, and the other device recovery unit 18 can pass through the opening 632.

  The outermost exterior of the inspection apparatus 1 is covered with a cover, and examples of the cover include a front cover 70, a side cover 71, a side cover 72, a rear cover 73, and a top cover 74.

  As shown in FIG. 3, the inspection apparatus 1 has a plurality of ionizers (ion generators) that generate ions and neutralize and remove (static discharge) static electricity with the ions. 31 to 39 and 40 to 46, and a plurality (four in the illustrated configuration) of sensors (detecting units) 51 to 54 for detecting at least one of ion balance and static elimination time are installed.

  The ionizers 31 to 46 are devices that ionize dry air to generate the ionized dry air (hereinafter referred to as “ionized air”). The ionizers 31 to 46 are not particularly limited, and for example, those using corona discharge, those using ionizing radiation, and the like can be used.

  The surface of the IC device 90 may be charged with static electricity, for example, while the IC device 90 is being transported. For this reason, it is necessary to remove the static electricity. In the inspection apparatus 1, the ionizers 31 to 46 are operated to generate ionized air, and the IC device 90 and the like can be neutralized by the ionized air.

  Further, the ion balance of the ionizers 31 to 46 is preferably as the detection values of the sensors 51 to 54 are close to 0V, respectively.

  Moreover, the shorter the static elimination time of the ionizers 31 to 46, the better. The static elimination time is a time required for static elimination from a predetermined first voltage to a predetermined second voltage (a voltage having an absolute value smaller than the first voltage). The static elimination time corresponds to the ion amount (equivalent to the ion amount), and the shorter the static elimination time, the larger the ion amount.

  The sensors 51 to 54 may be any sensors that can detect at least one of ion balance and static elimination time. In the present embodiment, the sensors 51 to 54 are described as sensors that detect ion balance as an example. .

  A plurality (six in the illustrated configuration) of ionizers 31 to 36 are installed in the supply area A2. A single sensor 51 is installed in the supply area A2. In the supply region A2, one of any two ionizers among the ionizers 31 to 36 is a first ion generation unit, and the other is a second ion generation unit.

  The arrangement of the ionizers 31 to 36 and the sensor 51 is not particularly limited, but the ionizers 31 to 36 are preferably arranged so that the entire supply region A2 can be neutralized.

  Moreover, the ionizers 31-36 are each arrange | positioned at the ceiling of the test | inspection apparatus 1 in this embodiment. Moreover, the sensor 51 is arrange | positioned at the base of the inspection apparatus 1 in this embodiment. That is, the sensor 51 is disposed below the ionizers 31 to 36 in the vertical direction. The ionized air generated by the ionizers 31 to 36 usually has a higher specific gravity than the atmosphere. For this reason, the ion balance can be accurately detected by the sensor 51 by disposing the sensor 51 below the ionizers 31 to 36 in the vertical direction.

  A plurality (six in the illustrated configuration) of ionizers 37 to 39 and 40 to 42 are installed in the collection area A4. A single sensor 52 is installed in the collection area A4. In this collection | recovery area | region A4, one of the arbitrary two ionizers among the ionizers 37-42 is a 1st ion generation part, and the other is a 2nd ion generation part.

  The arrangement of the ionizers 37 to 42 and the sensor 52 is not particularly limited, but the ionizers 37 to 42 are preferably arranged so that the entire recovery region A4 can be neutralized.

  Moreover, the ionizers 37-42 are each arrange | positioned at the ceiling of the test | inspection apparatus 1 in this embodiment. Moreover, the sensor 52 is arrange | positioned at the base of the test | inspection apparatus 1 in this embodiment. That is, the sensor 52 is disposed below the ionizers 37 to 42 in the vertical direction. Thereby, the ion balance can be accurately detected by the sensor 52.

  The inspection area A3 is divided into a first area A31 on the left side in FIG. 3 and a second area A32 on the right side in FIG. 2 and 3, the conceptual boundary line between the first area A31 and the second area A32 is indicated by a two-dot chain line.

  In the first region A31, a plurality of (two in the illustrated configuration) ionizers 43 and 44 are installed. Moreover, the single sensor 53 is installed in 1st area | region A31. In the first region A31, one of the ionizers 43 and 44 is a first ion generator, and the other is a second ion generator.

  The arrangement of the ionizers 43 and 44 and the sensor 53 is not particularly limited, but the ionizers 43 and 44 are preferably arranged so that the entire first region A31 can be neutralized.

  Moreover, the ionizers 43 and 44 are each arrange | positioned in the wall 82 of the test | inspection apparatus 1 in this embodiment (refer FIG. 5). In the present embodiment, the sensor 53 is disposed on the base 81 of the inspection apparatus 1 (see FIG. 5). That is, the sensor 53 is disposed below the ionizers 43 and 44 in the vertical direction. Thereby, the ion balance can be accurately detected by the sensor 53.

  A plurality (two in the illustrated configuration) of ionizers 45 and 46 are installed in the second region A32. A single sensor 54 is installed in the second region A32. In the second region A32, one of the ionizers 45 and 46 is a first ion generator, and the other is a second ion generator.

  The arrangement of the ionizers 45 and 46 and the sensor 54 is not particularly limited, but the ionizers 45 and 46 are preferably arranged so that the entire second region A32 can be neutralized.

  Moreover, the ionizers 45 and 46 are each arrange | positioned at the wall 83 of the test | inspection apparatus 1 in this embodiment (refer FIG. 5). In the present embodiment, the sensor 54 is disposed on the base 81 of the inspection apparatus 1 (see FIG. 5). That is, the sensor 54 is disposed below the ionizers 45 and 46 in the vertical direction. Thereby, the ion balance can be accurately detected by the sensor 54.

  As described above, a plurality of ionizers and a single sensor are installed in each of the supply region A2, the recovery region A4, the first region A31, and the second region A32. By installing a plurality of ionizers in each region, it is possible to improve the charge removal capability, and in each region, the charge can be removed uniformly.

  Needless to say, the number of ionizers and the number of sensors are not limited to the above numbers.

  Moreover, the inspection apparatus 1 has a function (operation mode) for inspecting whether or not the ionizers 31 to 46 are normal. Below, what is not normal is also called "abnormal". In addition, as a specific example of the abnormality of an ionizer, generation | occurrence | production of malfunctions, such as a failure and deterioration, the cleaning is not fully performed, etc. are mentioned, for example.

  Hereinafter, although the inspection of the ionizers 31 to 46 will be described, the inspection of the ionizers 31 to 36 in the supply region A2 will be described below as a representative.

  In the supply area A <b> 2, the ionizers 31 to 36 are operated one by one under the control of the control unit 800, the ion balance is detected one by one by the sensor 51, and inspection is performed.

  That is, when one predetermined ionizer is activated, the other five ionizers are deactivated. Specifically, when the ionizer 31 is inspected, the ion balance is detected by the sensor 51 in a state where the ionizer 31 is operated and the other ionizers 32 to 36 are stopped. The same applies to the ionizers 32-36. In addition, the order of inspection of the ionizers 31 to 36 is not particularly limited, and is appropriately set according to various conditions.

  Thereby, when at least one of the ionizers 31 to 36 is abnormal, it can be detected that the abnormality has occurred, and the ionizer in which the abnormality has occurred can be identified.

  In addition, the detection can be performed by a single sensor 51, whereby the number of sensors can be reduced.

  In the inspection of the ionizer 31, the control unit 800 determines whether the ionizer 31 is normal based on the detection result of the sensor 51.

  That is, the control unit 800 determines that the ionizer 31 is abnormal (not normal) when the detection result of the sensor 51 does not reach the reference value. If the detection result reaches the reference value, the ionizer 31 is normal. Judge that there is.

  Since the sensor 51 detects the ion balance, when the voltage value (detection result) indicating the detected ion balance is larger than the reference value, it is determined that the ionizer 31 is abnormal.

  The reference value is not particularly limited and is appropriately set according to various conditions, but is preferably set to a value within a range of 5 V or more and 200 V or less, and is set to a value within a range of 10 V or more and 100 V or less. More preferably, it is set to a value within the range of 20V or more and 50V or less.

  If the reference value is larger than the upper limit value, it may be determined that the ionizer 31 is normal even if the ionizer 31 is abnormal depending on other conditions. If the reference value is smaller than the lower limit value, depending on other conditions, it may be determined that the ionizer 31 is abnormal even when the ionizer 31 is normal.

  When the sensor 51 detects the static elimination time, if the measured static elimination time (detection result) is longer than the reference value, it is determined that the ionizer 31 is abnormal.

  The result of this inspection is displayed on the monitor 300. That is, the monitor 300 displays information indicating that the ionizer 31 is abnormal when the ionizer 31 is abnormal, and information indicating that the ionizer 31 is normal when the ionizer 31 is normal. Is displayed.

  In addition, although description is abbreviate | omitted about the test | inspection of the ionizers 32-36, it is the same as that of the case of the said ionizer 31 test | inspection.

  In the recovery area A4, similarly to the supply area A2, the ionizers 37 to 42 are operated one by one under the control of the control unit 800, the ion balance is detected one by one by the sensor 52, and the inspection is performed.

  Also, in the first area A31, as in the case of the supply area A2, the ionizers 43 and 44 are operated one by one under the control of the control unit 800, and the ion balance is detected one by one by the sensor 53 to perform inspection. .

  In the second area A32, as in the case of the supply area A2, the ionizers 45 and 46 are operated one by one under the control of the control unit 800, and the ion balance is detected one by one by the sensor 54 to perform inspection. .

  In the supply region A2, the recovery region A4, the first region A31, and the second region A32, the ion balance is detected by a corresponding sensor independently for each region, and the inspection is performed. Therefore, the inspection in the supply area A2, the inspection in the collection area A4, the inspection in the first area A31, and the inspection in the second area A32 can be performed with a time lag, and any two It is also possible to perform inspection in a region, any three regions or four regions simultaneously. When it is performed simultaneously, the time required for the entire inspection can be shortened.

  Moreover, in the inspection apparatus 1, when at least one of the ionizers 31 to 46 is abnormal as a result of the inspection, the monitor 300 has information that specifies that the abnormality has occurred and the ionizer in which the abnormality has occurred. Is displayed. In addition, the signal lamp 400 is turned on or blinks, or the emission color changes, and an alarm is issued from the speaker 500. Further, when all of the ionizers 31 to 46 are normal, a message to that effect is displayed on the monitor 300.

  When the user sees the display on the monitor 300 and there is an abnormality in at least one of the ionizers 31 to 46, the user can easily grasp that the abnormality has occurred and the ionizer in which the abnormality has occurred. it can. Further, when all of the ionizers 31 to 46 are normal, it can be easily grasped.

  Further, the history of the inspection result is stored in the storage unit 801. The history can be used for maintenance, inspection, repair, and the like, for example.

  The timing for inspecting the ionizers 31 to 46 is not particularly limited. For example, when the inspection apparatus 1 is turned on (at startup), the IC device 90 to be inspected before the inspection apparatus 1 is turned off. For example, when a predetermined period elapses between the next lot and the next lot. It is also possible to start the inspection by a user operation.

  As described above, according to the inspection apparatus 1, when there is an abnormality in at least one of the ionizers 31 to 46, it can be accurately detected that the abnormality has occurred, and the abnormality has occurred. Can be identified. Thereby, the user can respond quickly and accurately.

  As mentioned above, although the electronic component conveyance apparatus and electronic component inspection apparatus of this invention were demonstrated based on embodiment of illustration, this invention is not limited to this, The structure of each part has the same function. Any configuration can be substituted. Moreover, other arbitrary components may be added.

  DESCRIPTION OF SYMBOLS 1 ... Inspection apparatus (electronic component inspection apparatus), 11A ... Tray conveyance mechanism, 11B ... Tray conveyance mechanism, 12 ... Temperature adjustment part, 13 ... Device conveyance head, 131 ... Hand unit, 14 ... Device supply part, 141 ... Recessed part ( Pocket), 15 ... tray transport mechanism, 16 ... inspection section, 161 ... holding section, 17 ... device transport head, 175 ... hand unit, 18 ... device recovery section, 181 ... recess (pocket), 19 ... recovery tray, 20 DESCRIPTION OF SYMBOLS ... Device transfer head, 201 ... Hand unit, 21 ... Tray transfer mechanism, 22A ... Tray transfer mechanism, 22B ... Tray transfer mechanism, 31-39 ... Ionizer, 40-46 ... Ionizer, 51-54 ... Sensor, 61 ... First Partition, 62 ... second partition, 621 ... opening, 622 ... opening, 63 ... third partition, 631 ... opening, 632 ... Mouth part 64 ... 4th partition, 65 ... 5th partition, 70 ... front cover, 71 ... side cover, 72 ... side cover, 73 ... rear cover, 74 ... top cover, 81 ... base, 82 ... wall, 83 ... wall 90 ... IC device 200 ... Tray (mounting member) 300 ... Monitor 301 ... Display screen 400 ... Signal lamp 500 ... Speaker 600 ... Mouse stand 700 ... Operation panel 800 ... Control unit 801 ... Storage unit, A1 ... tray supply area, A2 ... device supply area (supply area), A3 ... inspection area, A31 ... first area, A32 ... second area, A4 ... device collection area (collection area), A5 ... tray removal region

Claims (12)

A first ion generator for generating ions;
A second ion generator for generating ions;
A detection unit that detects at least one of ion balance and static elimination time,
One of the first ion generation unit and the second ion generation unit operates one ion generation unit.   The electronic component transport apparatus according to claim 1, wherein when one of the first ion generation unit and the second ion generation unit is operated, the operation of the other ion generation unit is stopped.   The detection unit detects at least one of an ion balance and a static elimination time of the first ion generation unit in a state where the first ion generation unit is operated and the operation of the second ion generation unit is stopped. Item 3. The electronic component conveying apparatus according to Item 1 or 2.   The electronic component transport apparatus according to claim 3, wherein when the detection result of the detection unit does not reach a reference value, the first ion generation unit is determined to be not normal.   5. The electronic component transport apparatus according to claim 3, further comprising: a notification unit that notifies that the first ion generation unit is not normal when a detection result of the detection unit does not reach a reference value.   The detection unit detects at least one of an ion balance and a static elimination time of the second ion generation unit in a state where the operation of the first ion generation unit is stopped and the second ion generation unit is operated. The electronic component conveyance apparatus of any one of Claim 1 thru | or 5.   The electronic component transport apparatus according to claim 6, wherein when the detection result of the detection unit does not reach a reference value, the second ion generation unit determines that the second ion generation unit is not normal.   The electronic component transport apparatus according to claim 6, further comprising a notification unit that notifies that the second ion generation unit is not normal when a detection result of the detection unit does not reach a reference value.   The detection by the detection unit is performed in each of an inspection area for inspecting an electronic component, a supply area for supplying the electronic component to the inspection area, and a collection area for collecting the electronic component after the inspection is completed. Item 9. The electronic component carrying device according to any one of Items 1 to 8.   The electronic component transport apparatus according to claim 9, wherein the detection is performed by the detection unit independently for each of the supply area, the inspection area, and the collection area.   The electronic component transport apparatus according to claim 1, wherein the detection unit is disposed below the first ion generation unit and the second ion generation unit. A first ion generator for generating ions;
A second ion generator for generating ions;
A detector that detects at least one of ion balance and static elimination time;
An inspection unit for inspecting the electronic component,
An electronic component inspection apparatus that operates one of the first ion generation unit and the second ion generation unit.

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