JP2017111029A - Micro channel device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a micro channel device which suppresses occurrence of backflow and pulsating flow, stably feeds a liquid, and makes a liquid sample spontaneously flow.SOLUTION: There is provided a micro channel device which includes a resin substrate having a plurality of flow channels that supply two or more kinds of fluids and a resin film joined to a surface in a side where a groove is provided on the resin substrate, where the micro channel device includes a flow channel 20 that supplies a first fluid and a flow channel 40 that supplies a second fluid, a crossing portion 50 is formed at a position on the downstream side rather than supply holes provided on each of the flow channel 20 and the flow channel 40, a side wall shape of the flow channel 20 in the crossing portion 50 has a tapered region 80 spreading from the upstream side toward the downstream side of the flow channel 20 when viewed from a direction perpendicular to a flow direction of the fluid, and when a flow channel width on the uppermost side of the flow channel 20 in the tapered region 80 is represented by H1 and a flow channel width on the lowermost side of the flow channel 20 in the tapered region 80 is represented by H2, a value of H2/H1 is 1.3 or more and 1.6 or less.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a microchannel device.

  Applying semiconductor technology and microfabrication technology, micro-channel devices such as Lab-on-a-chip (lab-on-a-chip) in which sample separation systems and detection systems are integrated on a small chip Various reports have been made on techniques related to fluid devices.

  For example, Patent Document 1 discloses that a sample supply unit, an analysis unit that analyzes a liquid sample, and a waste liquid unit that stores the liquid sample that has passed through the analysis unit, in order to suppress the backflow or pulsation of the liquid sample. A microfluidic device configured to stably feed a liquid sample from the sample supply unit toward the waste liquid unit by a suction force of a pump provided downstream of the analysis unit. Have been described.

JP 2010-276430 A

  However, in recent years, the technical level required for miniaturization and higher functionality of microchannel devices has been increasing. In view of such circumstances, the use environment of such microchannel devices is also diversifying. For this reason, in the conventional technique described in Patent Document 1 and the like, it may be difficult to stably feed liquid in an environment where a suction mechanism such as a pump cannot be sufficiently used.

  Therefore, the present invention provides a microchannel device capable of realizing a stable liquid feeding and allowing a liquid sample to flow spontaneously while suppressing the occurrence of backflow or pulsating flow.

According to the present invention, a resin substrate formed of a resin composition and provided with a plurality of flow paths for supplying two or more fluids to one surface,
A resin film bonded to a surface of the resin substrate on which the groove is provided;
A microchannel device comprising:
The plurality of flow paths provided in the resin substrate include a first flow path for supplying one fluid and a second flow for supplying another fluid different from the first fluid. Including roads,
The first channel and the second channel intersect each other at positions downstream of the supply holes provided in each of the first channel and the second channel. Forming part,
The side wall shape of the first flow path at the intersecting portion is a tapered shape spreading from the upstream side to the downstream side of the first flow path when viewed from a direction perpendicular to the fluid flow direction. And
When the region in which the side wall shape is the tapered shape is a tapered region, the flow channel width on the most upstream side of the first flow channel in the tapered region is H1, and the first flow in the tapered region is Provided is a microchannel device having a value of H2 / H1 of 1.3 or more and 1.6 or less, where H2 is the channel width on the most downstream side of the path.

  According to the present invention, it is possible to provide a microchannel device capable of realizing stable liquid feeding and allowing a liquid sample to flow spontaneously while suppressing the occurrence of backflow or pulsating flow.

It is the figure which looked at the microchannel device concerning this embodiment from the direction perpendicular to the flow direction of fluid. It is the enlarged view which looked at the crossing part neighborhood field formed in the microchannel device concerning this embodiment from the direction perpendicular to the flow direction of fluid.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same reference numerals are given to the same components, and the description will be omitted as appropriate.

FIG. 1 is a view of the microchannel device 100 according to the present embodiment as viewed from a direction perpendicular to the fluid flow direction. The microchannel device 100 shown in FIG. 1 is provided with two channels on the premise that two types of fluid samples are supplied. However, the microchannel device 100 according to the present embodiment includes two types. The above fluid can be supplied, and two or more flow paths may be provided to cope with such an aspect.
As shown in FIG. 1, the microchannel device 100 according to the present embodiment is formed of a resin composition and provided with a plurality of channels for supplying two or more kinds of fluids on one surface. A resin substrate and a resin film bonded to a surface of the resin substrate on which a groove is provided are provided. In the microchannel device 100, the plurality of channels provided on the resin substrate supply the first channel 20 for supplying one fluid and another fluid different from the one fluid. Supply, the first flow path 20 and the second flow path 40 are provided in each of the first flow path 20 and the second flow path 40. An intersecting portion 50 that intersects with each other is formed at a position downstream of the holes 10 and 30.

FIG. 2 is an enlarged view of a region near the intersection 50 formed in the microchannel device 100 according to the present embodiment as viewed from a direction perpendicular to the fluid flow direction.
As shown in FIG. 2, when the microchannel device 100 according to the present embodiment is viewed from a direction in which the side wall shape of the first channel 20 at the intersection 50 is perpendicular to the fluid flow direction, The taper shape is widened from the upstream side to the downstream side of one channel 20. Further, in the microchannel device 100, when the region where the side wall shape is tapered is the tapered region 80, the channel width on the most upstream side of the first channel 20 in the tapered region 80 is H1, When the flow path width on the most downstream side of the first flow path 20 in the tapered region 80 is H2, a configuration in which the value of H2 / H1 is 1.3 or more and 1.6 or less is adopted. By doing so, it is possible to realize a microfluidic device 100 capable of realizing stable liquid feeding and allowing a liquid sample to flow spontaneously while suppressing the occurrence of backflow or pulsating flow. Is possible. In the microchannel device 100 according to the present embodiment, the driving force of various fluids is due to gravity.

  Also in the conventional microchannel device, for example, as in Patent Document 1, a technique for realizing stable liquid feeding while suppressing the occurrence of backflow and pulsating flow has been reported. However, in the conventional microchannel device, in most cases, stable liquid feeding is realized using a suction mechanism such as a pump from the most downstream side.

  However, in recent years, the technical level required for miniaturization and higher functionality of microchannel devices has been increasing. In view of such circumstances, the use environment of such microchannel devices is also diversifying. Therefore, there is a tendency to realize a micro-channel device that enables stable liquid feeding by spontaneous flow of fluid without using a suction mechanism such as a pump.

Therefore, the present inventor has intensively studied to realize a microchannel device 100 that enables stable liquid feeding by spontaneous flow of fluid. As a result, it was found that adopting a configuration that satisfies both of the following two conditions is effective as a design guideline.
The first condition is that when the shape of the side wall of the first flow path 20 at the intersection 50 is viewed from a direction perpendicular to the fluid flow direction, the first flow path 20 is directed from the upstream side to the downstream side. It is to control so that the taper shape spreads. By doing so, it is possible to increase the contact area between the fluid flowing in the first flow path 20 and the fluid flowing in the second flow path 40 at the intersecting portion 50, so that both are mixed. It is possible to suppress the occurrence of backflow when performing the operation. Further, as described above, by controlling the side wall shape of the first flow path 20 at the intersecting portion 50 to be a tapered shape spreading from the upstream side to the downstream side of the first flow path 20, It is also possible to suppress an increase in the surface tension due to the wettability of the fluid with respect to the member constituting the side wall of one flow path 20.
The second condition is that when the region where the side wall shape is tapered is the tapered region 80, the flow width on the most upstream side of the first flow channel 20 in the tapered region 80 is H1, and the tapered region 80 When the flow path width on the most downstream side of the first flow path 20 is H2, the configuration in which the value of H2 / H1 is 1.3 or more and 1.6 or less is adopted. By doing so, in the previous stage where the fluid flowing in the first flow path 20 and the fluid flowing in the second flow path 40 are in contact and mixed at the intersection 50, the first flow path The liquid feeding speed of the fluid flowing in the inside 20 can be reduced. Therefore, in the intersection 50, it is possible to mix both fluids so that the fluid flowing in the first flow path 20 is caught in the fluid flowing in the second flow path 40, As a result, generation of turbulent flow can be suppressed.

  In the present embodiment, the H2 / H1 value is 1.3 or more and 1.6 or less, preferably 1.35 or more and 1.55 or less, and more preferably 1.4 or more and 1 or less. .55 or less, and most preferably 1.48 or more and 1.52 or less. By doing so, it is possible to effectively reduce the liquid feeding speed of the fluid flowing in the first flow path 20 that enters the intersecting portion 50, and thus more stable liquid feeding becomes possible. .

  Here, when the side wall shape of the first flow path 20 and the side wall shape of the second flow path 40 at the intersecting portion 50 are viewed from the direction perpendicular to the fluid flow direction, the first shape in the tapered region 80 is obtained. When the flow path width on the most downstream side of one flow path 20 is H2 and the flow path width on the most upstream side of the second flow path 40 at the intersection 50 is H3, both are such that H3 <H2. Is preferably controlled. By doing so, it is possible to control the liquid feeding speed of the fluid flowing in the first flow path 20 entering the intersection 50 and the liquid feeding speed of the fluid flowing in the second flow path 40. . Specifically, the liquid feeding speed of the fluid flowing in the second flow path 40 can be controlled to be higher than the liquid feeding speed of the fluid flowing in the first flow path 20. Therefore, as a result, it becomes possible to improve the entrainment efficiency of the fluid flowing in the first flow path 20 with respect to the fluid flowing in the second flow path 40.

  Further, in the intersection 50 provided in the microchannel device 100 according to the present embodiment, the intersection angle formed by the first channel 20 and the second channel 40 is required for the microchannel device 100. From the viewpoint of enabling stable liquid feeding by spontaneous flow of fluid while maintaining the basic characteristics, it is preferably 85 ° or more and 95 ° or less, and more preferably 87 ° or more and 93 ° or less. It is. In addition, the said crossing angle refers to the side where an angle is small among the angles which the 1st flow path 20 and the 2nd flow path 40 form.

  In addition, the side wall shape of the first channel 20 forming the tapered region 80 in the microchannel device 100 according to the present embodiment is the first channel from the upstream side to the downstream side of the first channel 20. It is preferable that the shape has a convex curve outward from the center point of the 20 channel widths. By doing so, it is possible to suppress the occurrence of convection in the fluid before the fluid flowing in the first flow path 20 enters the intersecting portion 50. Thereby, as a result, it becomes possible to perform liquid feeding more stably.

  In the microchannel device 100 according to the present embodiment, the channel width H1 on the most upstream side of the first channel 20 in the tapered region 80 is within the first channel 20 entering the intersection 50. From the viewpoint of controlling the balance between the fluid flow rate and the liquid feeding speed of the fluid flowing in the second flow path 40, the flow rate is preferably 20 μm or more and 500 μm or less, and more preferably 30 μm or more and 250 μm or less.

  Further, in the microchannel device 100 according to the present embodiment, the channel width H2 on the most downstream side of the first channel 20 in the tapered region 80 is the first for the fluid flowing in the second channel 40. From the viewpoint of improving the entrainment efficiency of the fluid flowing in one flow path 20, it is preferably 26 μm or more and 850 μm or less, and more preferably 40 μm or more and 400 μm or less.

  In the microchannel device 100 according to the present embodiment, the channel width H3 on the most upstream side of the second channel 40 in the intersecting portion 50 is the first for the fluid flowing in the second channel 40. From the viewpoint of improving the entrainment efficiency of the fluid flowing in the flow path 20, it is preferably 20 μm or more and 200 μm or less, and more preferably 30 μm or more and 100 μm or less.

  In the microchannel device 100 according to the present embodiment, the surfaces of a plurality of channels (first channel 20 and second channel 40) provided in the resin substrate, that is, grooves provided in the resin substrate are provided. The contact angle of water on the surface of the resin film to be covered is preferably 20 ° or more and 80 ° or less, and more preferably 25 ° or more and 60 ° or less. By doing so, the surface tension generated between the fluid and the side wall member is reduced due to the bubbles remaining in the flow path and the hydrophilicity (wetting property) of the side wall member of the flow path in contact with the fluid. It is possible to effectively suppress the increase. As a result, smooth sample feeding is possible.

  Hereinafter, the details of the configuration of the microchannel device 100 according to the present embodiment will be described.

  First, the microchannel device 100 is a structure in which structures such as a microchannel, a reaction layer, an electric induction column, and a membrane separation mechanism are formed, and is a microreaction device that is widely used in chemistry, biochemistry, and the like. (Microreactor); microanalytical devices such as integrated DNA analysis devices, microelectrophoresis devices, and microchromatography devices; microdevices for preparation of analytical samples such as mass spectra and liquid chromatography; physics such as extraction, membrane separation, and dialysis Used in applications such as chemical processing devices. Advantages of using such a device include: (1) the amount of samples and reagents used in chemical reactions and antigen-antibody reactions can be reduced, and the amount of exhaust gas can be reduced. (2) The power required for the process can be reduced. ) By improving the surface area to volume ratio, it is possible to increase the speed of heat transfer and mass transfer. As a result, precise control of reaction and separation, high speed and high efficiency, and suppression of side reactions can be achieved. (4 It is possible to handle many samples simultaneously on the same substrate, (5) to be able to carry out from sampling to detection on the same substrate, and (6) to realize an inexpensive system that can be carried in a small space. In order to further promote these advantages, it is required to form a finer structure. On the other hand, since the flow and movement of fluid strongly depend on the channel structure, it is important to form a desired microstructure with high accuracy.

  Moreover, the microchannel device 100 according to the present embodiment can immobilize a physiologically active substance in a part of the channel. Examples of such physiologically active substances include nucleic acids, proteins, sugar chains, glycoproteins and the like, and an optimal physiologically active substance can be appropriately selected depending on the characteristics of the detection target. A plurality of physiologically active substances may be immobilized on the same channel, or different microchannels may be produced in the same microchannel device 100 and the physiologically active substances may be separately immobilized. In order to immobilize the physiologically active substance on the microchannel surface of the microchannel device 100, surface modification on the plastic surface, for example, introduction of functional groups, immobilization of functional materials, imparting hydrophilicity, imparting hydrophobicity, etc. It is also possible to implement.

  The microchannel device 100 according to this embodiment includes a resin substrate provided with a plurality of channels and a resin film bonded to a surface of the resin substrate on which a groove is provided. . Then, supply holes 10 and 30 for supplying a fluid as an analysis sample are provided in the most upstream portion of each flow path (the first flow path 20 and the second flow path 40) provided in the resin substrate. Each is provided. In addition, a discharge hole 70 for collecting a fluid as an analysis sample is provided in the most downstream portion of each flow path (the first flow path 20 and the second flow path 40) provided in the resin substrate. ing.

  The resin substrate is formed of a resin composition. Such resin compositions include high density polyethylene, low density polyethylene, polypropylene, polystyrene, various cyclic polyolefins, polymethyl methacrylate, polynorbornene, polyphenylene oxide, polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polymethylpentene, cycloolefin copolymer. , Cycloolefin polymers, polyamides, polyimides, polyesters, semi-cured phenol resins, semi-cured epoxy resins, tetrafluoroethylene, polyvinylidene chloride, polyvinyl chloride, and other resin materials can be used. Among them, those containing one or more thermosetting resins selected from the group consisting of polycarbonate, polymethylpentene, polystyrene, polymethyl methacrylate, cycloolefin copolymer, cycloolefin polymer, and polyethylene terephthalate are preferable. In particular, those containing a cycloolefin polymer or a cycloolefin copolymer are preferred from the viewpoints of moldability, hardness of the molded resin substrate, and chemical resistance. Moreover, the resin composition mentioned above may further contain additives such as pigments, dyes, antioxidants, flame retardants and the like as long as they do not impair the object of the present invention.

  The outer shape of the resin substrate may be any shape as long as it is suitable for an analysis method or an analysis apparatus, but may be a square shape, a rectangular shape, a circular shape, or the like, for example. . Further, the size is preferably 10 mm × 10 mm or more and 200 mm × 200 mm or less, more preferably 10 mm × 10 mm or more and 100 mm × 100 mm or less, from the viewpoint of handling properties and ease of analysis.

  And the groove | channel for supplying a fluid and making it flow is formed in the surface of the resin substrate. The cross-sectional shape of the groove may be any shape, but is preferably a semicircular shape from the viewpoint of efficiently feeding fluid.

  Next, as described above, the microchannel device 100 according to this embodiment includes the resin film bonded to the surface of the resin substrate on which the groove is provided. Such a resin film is preferably formed of the same material as the resin composition forming the resin substrate from the viewpoint of improving the adhesion between the resin film and the resin substrate. Therefore, as a material for forming the resin film, high density polyethylene, low density polyethylene, polypropylene, polystyrene, various cyclic polyolefins, polymethyl methacrylate, polynorbornene, polyphenylene oxide, polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polymethylpentene , Cycloolefin copolymer, cycloolefin polymer, polyamide, polyimide, polyester, semi-cured phenol resin, semi-cured epoxy resin, tetrafluoroethylene, polyvinylidene chloride, polyvinyl chloride, and other resin compositions can do. Among them, those containing one or more thermosetting resins selected from the group consisting of polycarbonate, polymethylpentene, polystyrene, polymethyl methacrylate, cycloolefin copolymer, cycloolefin polymer, and polyethylene terephthalate are preferable. In particular, those containing a cycloolefin polymer or a cycloolefin copolymer are preferred from the viewpoints of moldability, hardness of the molded resin substrate, and chemical resistance. Moreover, the resin composition mentioned above may further contain additives such as pigments, dyes, antioxidants, flame retardants and the like as long as they do not impair the object of the present invention.

  Further, the thickness of the resin film is preferably 0.01 mm or more and 1 mm or less, and more preferably 0.02 mm or more and 0.8 mm or less. By setting the thickness of the resin film to be equal to or less than the above upper limit value, it is possible to keep light transmittance and heat conductivity favorable. On the other hand, by setting the thickness of the resin film to be equal to or more than the above lower limit value, when the fluid as the analysis sample is supplied to the microchannel device 100, the resin film is prevented from being corroded by the fluid. Can do. Moreover, when bonding a resin film with respect to a resin substrate, it becomes possible to suppress that a wrinkle generate | occur | produces in the said resin film and to fully seal the surface of a flow path.

  Here, a plurality of surfaces provided on the resin substrate provided in the microchannel device 100 according to the present embodiment, that is, the surface of the resin film covering the groove provided in the resin substrate is subjected to hydrophilic treatment or functional group formation. It is preferable that surface treatment such as treatment is performed. By doing so, the hydrophilicity of the side wall member of the flow path in contact with the fluid is improved, so that it is possible to effectively suppress an increase in the surface tension generated between the fluid and the side wall member. As a result, smooth sample feeding is possible. Further, as one of the surface treatments mentioned above, there is a treatment for introducing an oxygen-containing functional group, and specific examples thereof include plasma treatment, corona discharge treatment, excimer laser treatment, flame treatment, and surface coating treatment with a hydrophilic polymer. Etc. Of these, plasma treatment, corona discharge treatment, or surface coating treatment with a hydrophilic polymer is preferable from the viewpoint of realizing stable liquid feeding. In addition, examples of the oxygen-containing functional group described above include groups of functional groups having polarity such as carbonyl groups such as aldehyde groups and ketone groups, carboxyl groups, hydroxyl groups, ether groups, peroxide groups, and epoxy groups.

  In addition, the microchannel device 100 according to the present embodiment includes a membrane, a valve, a sensor, a motor, a mixer, a gear, and a clutch from the viewpoint of improving the fluid feeding characteristics and improving the reaction characteristics of the analysis sample. In addition, a microlens, an electric circuit, or the like may be provided, or a plurality of microchannels may be processed on the same substrate to be combined.

  Next, the manufacturing method of the microchannel device 100 of this embodiment is demonstrated.

The manufacturing method of the microchannel device 100 according to the present embodiment is different from the conventional manufacturing method, and at least various factors related to conditions such as injection speed, injection resin temperature, and mold temperature in the injection molding are advanced. Need to control. That is, it is possible to obtain the microchannel device 100 that satisfies both of the following two conditions for the first time by highly controlling the various factors described above. However, cutting may be performed on the obtained injection-molded product as necessary.
The first condition is that when the shape of the side wall of the first flow path 20 at the intersection 50 is viewed from a direction perpendicular to the fluid flow direction, the first flow path 20 is directed from the upstream side to the downstream side. It is to control so that the taper shape spreads.
The second condition is that when the region where the side wall shape is tapered is the tapered region 80, the flow width on the most upstream side of the first flow channel 20 in the tapered region 80 is H1, and the tapered region 80 When the flow path width on the most downstream side of the first flow path 20 is H2, the configuration in which the value of H2 / H1 is 1.3 or more and 1.6 or less is adopted.

However, as described above, the microchannel device 100 in the present embodiment is described below on the assumption that various factors related to conditions such as the injection speed, injection resin temperature, and mold temperature in injection molding are highly controlled. It can be produced by the procedure described.
First, a resin substrate having a groove formed on the surface is produced by an injection molding method or a transfer molding method. Next, the resin film is bonded so as to cover the surface of the resin substrate on which the groove is formed. Examples of the bonding method of the resin film include a method using an adhesive, a thermocompression bonding method, an ultrasonic bonding method, and the like, but a thermocompression bonding method is preferable from the viewpoint of maintaining the shape stability of the flow path. In this way, a desired microchannel device 100 can be manufactured.

  As mentioned above, although embodiment of this invention was described, these are illustrations of this invention and various structures other than the above are also employable.

  Hereinafter, although an example and a comparative example explain the present invention, the present invention is not limited to these.

<Production of substrate with groove for microchannel>
Using a polyolefin resin (manufactured by Nippon Zeon Co., Ltd.) as a resin material, an original substrate created under the manufacturing conditions of a mold temperature of 60 ° C., a molten resin temperature of 220 ° C., an injection speed of 100 mm / sec, and an injection pressure of 700 bar is processed by cutting Then, the substrate with groove for microchannel according to each example and comparative example having the structure shown in FIG. The depth of the channel groove provided on the obtained substrate was 0.050 mm in all cases.

<Production of microchannel device>
A polyolefin resin (manufactured by Zeon Corporation) is injection-molded on the surface on which the flow channel is provided in the substrate with groove for micro flow channel according to each example and comparative example obtained by the above-described method. The obtained resin films were laminated, and bonded by thermocompression bonding using a heater, thereby producing microchannel devices according to Examples and Comparative Examples.

  In each of the obtained microchannel devices, the intersection angle formed by the first channel and the second channel was 90 °. In addition, the side wall shape of the first channel at the intersection provided in the microchannel device according to each of the examples and the comparative examples is the first when viewed from the direction perpendicular to the fluid flow direction. A taper shape spreading from the upstream side of the first channel toward the downstream side, and outward from the center point of the channel width of the first channel from the upstream side to the downstream side of the first channel. It was a shape with a convex curve.

  The following evaluation was performed using the microchannel device obtained in Examples and Comparative Examples. The results are shown in Table 1. Table 1 below shows the channel width H1 on the most upstream side of the first channel in the tapered region formed in the microchannel device obtained in the example and the comparative example, and the first channel The value of the channel width H2 on the most downstream side is also shown together with the evaluation result.

<Evaluation items>
Fluidity: 100 μL of sample solution is introduced into the first channel formed in the microchannel device obtained in Examples and Comparative Examples, and the behavior of the liquid flowing in the channel is as follows: Observational evaluation was performed according to the criteria.
A: The time from when the introduced test solution starts to enter the intersection from the first flow path to when all the introduced test solutions completely enter the intersection is within 10 seconds, and Such test solution diffuses uniformly into the second flow path.
○: The time from when the introduced test solution starts to enter the intersection from the first flow path to when all the introduced test solutions completely enter the intersection is within 20 seconds, and Such test solution diffuses uniformly into the second flow path.
(Triangle | delta): Although the introduce | transduced test solution penetrate | invades into a cross | intersection part from a 1st flow path, this test solution does not spread | diffuse uniformly in a 2nd flow path.
X: Stops when the flow of the introduced test solution enters the intersection from the first flow path.

Separability: The first channel and the second channel formed in the microchannel device obtained in the example and the comparative example are filled with the same fluid, and the most upstream side of the second channel In the state where the supply hole provided in the airtight state is sealed, the different fluid is introduced from the supply hole provided on the most upstream side of the first flow path. Next, the fluid introduced into each channel from the discharge hole is sucked. At this time, the depth at which the other fluid enters the second channel from the first channel at the intersection formed in the microchannel device was evaluated according to the following criteria.
A: When the microchannel device is viewed from a direction perpendicular to the fluid flow direction, the depth of entry into the second channel is 1 μm or less.
○: When the microchannel device is viewed from the direction perpendicular to the fluid flow direction, the depth of entry into the second channel is 5 μm or less.
(Triangle | delta): When seeing a microchannel device from the direction perpendicular | vertical toward the flow direction of a fluid, it penetrates into a 2nd channel and the depth is 10 micrometers or less.
X: When the microchannel device is viewed from the direction perpendicular to the fluid flow direction, the depth of entry into the second channel is greater than 10 μm.

DESCRIPTION OF SYMBOLS 10 Supply hole 20 1st flow path 30 Supply hole 40 2nd flow path 50 Intersection 70 Discharge hole 80 Taper area | region 100 Micro flow path device

Claims (9)

A resin substrate formed of a resin composition and provided with a plurality of flow paths for supplying two or more fluids to one surface;
A resin film bonded to a surface of the resin substrate on which the groove is provided;
A microchannel device comprising:
The plurality of flow paths provided in the resin substrate include a first flow path for supplying one fluid and a second flow for supplying another fluid different from the first fluid. Including roads,
The first channel and the second channel intersect each other at positions downstream of the supply holes provided in each of the first channel and the second channel. Forming part,
The side wall shape of the first flow path at the intersecting portion is a tapered shape spreading from the upstream side to the downstream side of the first flow path when viewed from a direction perpendicular to the fluid flow direction. And
When the region in which the side wall shape is the tapered shape is a tapered region, the flow channel width on the most upstream side of the first flow channel in the tapered region is H1, and the first flow in the tapered region is A microchannel device in which the value of H2 / H1 is 1.3 or more and 1.6 or less, where H2 is the channel width on the most downstream side of the channel.   2. The microchannel device according to claim 1, wherein an intersection angle formed by the first channel and the second channel at the intersection is 85 ° or more and 95 ° or less.   The shape of the side wall of the flow path at the intersecting portion draws a convex curve outward from the center point of the flow path width of the first flow path from the upstream side to the downstream side of the first flow path. The microchannel device according to claim 1 or 2, which has a shape.   4. The micro according to claim 1, wherein the supply hole is provided in the most upstream portion of the first flow path and the second flow path to supply the fluid. 5. Channel device.   The microchannel device according to claim 1, wherein the resin composition includes a thermoplastic resin.   The said thermoplastic resin contains any 1 or more types selected from the group which consists of a polycarbonate, a polymethylpentene, a polystyrene, a polymethylmethacrylate, a cycloolefin copolymer, a cycloolefin polymer, and a polyethylene terephthalate of Claim 5. Microchannel device.   The microchannel device according to any one of claims 1 to 6, wherein the channel width H1 on the most upstream side of the first channel in the tapered region is 20 µm or more and 500 µm or less.   The microchannel device according to any one of Claims 1 to 7, wherein the channel width H2 on the most downstream side of the first channel in the tapered region is 26 µm or more and 850 µm or less.   The microchannel device according to any one of claims 1 to 8, wherein a contact angle with respect to water of the surfaces of the plurality of channels provided on the resin substrate is 20 ° or more and 80 ° or less.

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