JP2021109158A - Micro flow channel chip - Google Patents

Abstract

To provide a micro flow channel chip capable of suppressing residual air inside a flow channel and also capable of suppressing displacement between a resin film and a resin substrate.SOLUTION: A micro flow channel chip 100 includes: a resin substrate 10 with a flow channel groove 11 formed at least on one face; and a resin film 20 joined on one face of the resin substrate 10 so as to cover the flow channel groove 11. A bottom face 11a of the flow channel groove 11, two inner walls 11b of the flow channel groove 11 and the resin film 20 define a flow channel 40. In the resin film 20, a portion (a bulge part 20a) facing the flow channel 40 is bulging so that a center in width direction of the flow channel 40 comes closer to the flow channel 40 than an end part. In a cross section of the flow channel 40, a film side corner part 40a formed by an intersection of the two inner walls 11b and the portion facing the flow channel 40 of the resin film 20 has an acute angle at a side of the flow channel 40.SELECTED DRAWING: Figure 2

Description

The present invention relates to a microchannel chip used in the pharmaceutical industry and the like.

In the field of the pharmaceutical industry related to the production of pharmaceuticals and reagents, microchannel chips may be used for analysis, synthesis, screening and the like of nucleic acids, proteins, sugar chains and the like. In this microchannel chip, a microchannel groove (also referred to as a microchannel) is formed on a substrate or the like made of a resin or the like by utilizing microfabrication technology. The microchannel chip can perform a chemical reaction, separation, detection, analysis, and the like of a sample in a microspace including the inside of the microchannel.

As microchannel chips used for such chemical reactions, for example, Patent Document 1 describes a channel groove (described as a channel groove in the same document) and a port communicating with the channel groove. A resin substrate having (in the same document, it is described as an inlet) (in the same document, it is simply described as a substrate), and a plurality of degassing holes and ports penetrating in the thickness direction of the cover base material, and a liquid sample. A resin film having a through hole for introducing the above (described as a cover member in the same document) and a microchannel chip (described as a microchip in the same document) including the same are disclosed.
The degassing hole discharges the air (air bubbles) remaining in the flow path groove to the outside of the chip. In this microchannel chip, a first joint surface provided on one surface of the resin substrate on which the channel groove and the port are formed and a first surface provided on one surface of the resin film covering the channel groove. 2 The joint surface is joined.
The flow path groove described in Patent Document 1 is a recess having a rectangular cross section having a minute depth formed in a substantially linear shape and formed in the thickness direction of the substrate.

Japanese Unexamined Patent Publication No. 2011-215006

However, it was difficult to make all the bubbles remaining in the flow path groove reach the degassing pores and discharge them to the outside.
Further, when the liquid sample is flowed through the flow path groove which is a depression having a rectangular cross section, the flow velocity at both ends becomes smaller than the flow velocity at the central portion in the width direction of the flow path due to the influence of the viscosity of the liquid sample. Due to such a difference in flow velocity, the liquid sample travels in a swirling manner in the flow path, and it is easy to generate residual air in the flow path.
Further, it is not easy to join the resin substrate to the resin film at a position where the through holes of the resin film are accurately overlapped with the ports of the resin substrate, and the positions of the ports and the through holes may be misaligned.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a microchannel chip capable of suppressing residual air in a flow path and suppressing a positional deviation between a resin film and a resin substrate. And.

The microchannel chip according to the present invention includes a resin substrate having a channel groove formed on at least one surface, and a resin film bonded to the one surface of the resin substrate so as to cover the channel groove. The flow path is defined by the bottom surface of the flow path groove, both inner side walls of the flow path groove, and the resin film, and the portion of the resin film facing the flow path is described as described above. The central side in the width direction of the flow path bulges so as to protrude toward the flow path side from the end side, and in the cross section of the flow path, both inner side walls and a portion of the resin film facing the flow path. , Are formed by intersecting each other, and the angle on the flow path side of the corner on the film side is sharp.

According to the present invention, it is possible to provide a microchannel chip capable of suppressing the residual air in the flow path and suppressing the positional deviation between the resin film and the resin substrate.

It is a front view of the microchannel chip which concerns on this embodiment. It is a figure which shows the II-II cross section of FIG. It is a figure which shows the cross section corresponding to the II-II cross section of FIG. It is a figure which shows the cross section corresponding to the II-II cross section of FIG.

Hereinafter, embodiments of the microchannel chip according to the present invention will be described with reference to the drawings.
It should be noted that the embodiments described below are merely examples for facilitating the understanding of the present invention, and do not limit the present invention. That is, the shapes, dimensions, arrangements, etc. of the members described below can be changed and improved without departing from the gist of the present invention, and it goes without saying that the present invention includes equivalents thereof.
Further, in all the drawings, similar components are designated by the same reference numerals, and duplicate description will be omitted as appropriate. The dimensional ratio of each member shown in the drawings may differ from the actual dimensional ratio in order to facilitate understanding of the invention.

<Overview>
First, an outline of the microchannel chip 100 according to the present embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a front view of the microchannel chip 100 according to the present embodiment, and FIG. 2 is a schematic enlarged cross-sectional view of the vicinity of the channel groove 11 of the microchannel chip 100 according to the present embodiment. be.

As shown in FIG. 2, the microchannel chip 100 according to the present embodiment has a resin substrate 10 having a channel groove 11 formed on at least one surface (upper surface of FIG. 2) and one surface of the resin substrate 10. A resin film 20 bonded so as to cover the flow path groove 11 is provided.
The flow path 40 is defined by the bottom surface 11a of the flow path groove 11, both inner side walls 11b of the flow path groove 11, and the resin film 20.
The portion (bulging portion 20a) of the resin film 20 facing the flow path 40 is bulged so that the central side of the flow path 40 in the width direction protrudes toward the flow path 40 side rather than the end side.
In the cross section of the flow path 40, the angle on the flow path 40 side of the film side corner 40a formed by intersecting the inner side walls 11b and the portion of the resin film 20 facing the flow path 40 becomes an acute angle. It is characterized by being.

The film-side corner portion 40a according to the present embodiment is formed in the cross section of FIG. 2 by intersecting the curved hem portion of the bulging portion 20a and the curved portion on the upper edge of the inner side wall 11b.
In this case, the angle of the film-side corner 40a on the flow path 40 side refers to the angle formed by the tangents of the respective curves at the intersection of the resin film 20 and the resin substrate 10.
The resin film 20 and the resin substrate 10 intersect each other to form a film-side corner 40a, but one of the portions forming the film-side corner 40a is linear (planar) and the other. It may be curved (curved) or both may be straight (planar).

As described above, in the resin film 20, the portion (bulging portion 20a) on the center side in the width direction of the flow path 40 is bulging, so that the position where the resin film 20 is joined to the resin substrate 10 is determined by the bulging portion. 20a can be easily determined by arranging it so as to fit in the flow path groove 11.
In particular, on the central side in the width direction of the flow path 40 where the flow velocity of the liquid sample tends to increase, the bulging portion 20a protrudes toward the flow path 40 side, so that the viscosity of the liquid sample in contact with the bulging portion 20a depends on the viscosity of the liquid sample. Due to the influence, the flow velocity of the liquid sample can be kept small.
Since the angle of the film side corner 40a is acute, the flow velocity of the liquid sample flowing through the film side corner 40a, which tends to be limited by the viscosity of the liquid sample, can be increased by the capillary phenomenon. As a result, the deviation of the flow velocity distribution of the flow path 40 can be reduced and the generation of eddy currents can be suppressed, so that the residual bubbles can be suppressed.

In the microchannel chip 100 according to the present embodiment, as shown in FIG. 1, one or more ports 13 that can serve as an introduction port or an discharge port for a sample or the like, a degassing port, or the like are provided on the resin substrate 10 or the like. It may be formed. The port 13 may have a cylindrical shape as shown in FIG. 1, or may have another shape such as a square cylindrical shape. Further, the overall shape of the microchannel chip 100 according to the present embodiment is preferably a square plate shape from the viewpoint of ease of use in equipment or the like, but even if it is a circular plate shape or the like. Well, if it is plate-shaped, it is not particularly limited.

<About resin substrate>
The resin substrate 10 according to this embodiment will be described in detail.
The resin substrate 10 according to the present embodiment is a plate-shaped substrate made of resin in which a flow path groove 11 is formed on at least one surface (upper surface of FIG. 2). The size of the resin substrate 10 is, for example, 10 mm or more and 100 mm or less × 10 mm or more and 200 mm or less, and a thickness of 0.5 mm or more and 3.0 mm or less in the case of a square.

Further, the flow path groove 11 may be a fine groove and may have a width and a depth capable of passing a sample by electrophoresis or the like. For example, the opening width W (the length of the flow path groove 11 in the lateral direction) of the flow path groove 11 is 1 mm or less, and the depth D is 10 μm or more and 500 μm or less, and further 20 μm or more and 100 μm or less.
Then, the flow path groove 11 uses a mold that can form the flow path groove 11 when the resin substrate 10 is molded by injection molding of the resin, or the molded resin substrate 10 is microfabricated (cut). Or by adding a member).

As shown in FIG. 2, the flow path groove 11 according to the present embodiment extends upward from both ends of the bottom surface 11a and the bottom surface 11a in the width direction (perpendicular to the bottom surface 11a (including substantially vertical)). A wall 11b and the like. The bottom side corner portion 40b is a corner portion formed by intersecting the bottom surface 11a and the inner side wall 11b, and the angle on the flow path 40 side thereof is 90 degrees.

The shape of the flow path groove 11 is not particularly limited, for example, the cross-sectional shape is rectangular, polygonal, or semicircular. Further, the number of flow path grooves 11 is not limited to one, and a plurality of flow path grooves 11 may be formed. The flow path groove 11 may be branched or intersected, and can be appropriately designed according to the intended use, including the number of channels.

Here, the depth D of the flow path groove 11 formed in the resin substrate 10 of the microchannel chip 100 according to the present embodiment is the length in the thickness direction of the resin substrate 10 as shown in FIG. ..
That is, the depth D is a perpendicular line (in the thickness direction of the resin substrate 10) from the virtual outer surface of the resin substrate 10 that existed before the flow path groove 11 was formed in the flow path groove 11 formed in the resin substrate 10. It is the longest distance among the distances to the points where they intersect with the surfaces forming the flow path groove 11 when a line parallel to) is drawn.
For example, in the embodiment shown in FIG. 2, the depth D of the flow path groove 11 is a perpendicular line drawn from the upper side line (virtual outer surface) of the flow path groove 11 formed on the resin substrate 10 to the lower side. Occasionally, this perpendicular is the longest distance between two points that intersect the bottom surface 11a of the flow path groove 11.

Further, the resin substrate 10 may have a layer made of a material other than resin (for example, glass) on the surface side that does not bond with the resin film 20, but the entire resin substrate 10 is made of resin (particularly the same resin). ) Is preferable. This is because it is easy to mold the resin substrate 10 itself and bond it to the resin film 20. The flow path groove 11 may also be formed on the surface side of the resin substrate 10 that does not join with the resin film 20.

Further, the surface of the flow path groove 11 (the surface constituting the flow path groove 11) may be subjected to surface treatment such as hydrophilization treatment or surface treatment functional group formation treatment. As such a surface treatment, for example, a treatment for introducing an oxygen-containing functional group is shown. By introducing this oxygen-containing functional group, the hydrophilicity of the surface is improved, and a smoother flow of the sample can be achieved. Examples of the oxygen-containing functional group include a group of functional groups having polarities such as a carbonyl group such as an aldehyde group and a ketone group, a carboxyl group, a hydroxyl group, an ether group, a peroxide group, and an epoxy group.
Further, as the introduction treatment, for example, plasma treatment, corona discharge treatment, excimer laser treatment, frame treatment and the like can be used. This surface treatment may be similarly applied to the surface covering the flow path groove 11 of the resin film 20, which will be described later.

The resin material used for producing the resin substrate 10 includes polyolefins such as polyethylene (PE), polypropylene (PP), and polymethylpentene (PMP), polyvinyl such as polystyrene (PS), polycarbonate (PC), and polymethylmethacrylate. Polyacrylics such as (PMMA), polyesters such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyethylene naphthalate (PEN), cycloolefin polymers (COP), cycloolefin copolymers (COC) and the like can be used. However, it is not limited to these.
In addition, since it is easy to transmit visible light from a light source used in fluorescence detection and the like, that is, it is easy to secure the transparency of the resin substrate 10, polymethylmethacrylate (PMMA), polycarbonate (PC), and cycloolefin copolymer ( It is more preferable to use any one selected from the group consisting of COC) as the resin material.

<About resin film>
Next, the resin film 20 according to the present embodiment will be described in detail.
The resin film 20 according to the present embodiment is a film made of a resin capable of transmitting at least visible light. Since the resin film 20 is capable of transmitting at least visible light, it is possible to illuminate and detect at least from the resin film 20 side in fluorescence detection and the like. It is more preferable that not only the resin film 20 but also the resin substrate 10 described above can transmit visible light, because illumination and detection can be performed from any surface side of the microchannel chip 100.

The size of the resin film 20 is, for example, in the case of a square, the same size as the resin substrate 10 described above, that is, 10 mm or more and 100 mm or less × 10 mm or more and 200 mm or less, and the thickness is 0.01 mm or more and 1 It is 0.0 mm or less, further 0.02 mm or more and 0.5 mm or less, and further 0.03 mm or more and 0.1 mm or less. By setting the resin film 20 to the above-mentioned thickness, transparency and thermal conductivity can be made more preferable. Further, the resin film 20 may be a laminated film in which a plurality of film layers are laminated.

The resin material used for producing the resin film 20 is not particularly limited as long as it is a material that can transmit at least visible light. For example, the resin material of the resin film 20 is the same as the resin material used for the resin substrate 10, that is, polyethylene (PE), polypropylene (PP), polyolefins such as polymethylpentene (PMP), polystyrene (PS), and the like. Polyacrylics such as polyvinyl, polycarbonate (PC), polymethylmethacrylate (PMMA), polyesters such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyethylene naphthalate (PEN), cycloolefin polymers (COP) and cycloolefins. Examples thereof include polypropylene (COC).

Further, similarly to the resin substrate 10 described above, it is easy to transmit visible light from a light source used for fluorescence detection and the like, that is, it is easy to secure the transparency of the resin film 20, so that polymethylmethacrylate (PMMA) and polycarbonate It is preferable to use any one selected from the group consisting of (PC) and cycloolefin copolymer (COP) as the resin material. Further, in the case of a laminated film in which a plurality of film layers are laminated, it is preferable that the resin materials constituting the respective layers are the same, because the resin film 20 having the desired properties can be easily obtained.

In particular, the above-mentioned resin substrate 10 and the resin film 20 contain the same resin material as a base material, and the resin material is a group consisting of polymethylmethacrylate (PMMA), polycarbonate (PC), and cycloolefin copolymer (COC). If any one of the above is selected, visible light from a light source or the like easily passes through both the resin substrate 10 and the resin film 20, so that fluorescence detection and the like are more easily performed, which is extremely preferable.

Further, the resin film 20 may be formed with an electrode portion made of metal vapor deposition, a metal thin film, or the like so as to correspond to the flow path groove 11 or the port 13 formed in the resin substrate 10, for example. In the case of the resin film 20 on which such an electrode portion is formed, the electrode portion is preferably treated with a solvent such as a lower alcohol because the bondability with the resin substrate 10 is further enhanced. ..

<About micro flow path chips>
The microchannel chip 100 according to the present embodiment is manufactured by joining the resin substrate 10 and the resin film 20 described above. The bonding between the resin substrate 10 and the resin film 20 is performed between one surface of the resin substrate 10 on which the flow path groove 11 is formed and one surface of the resin film 20. The joining is preferably performed by this joining or thermocompression bonding with a hot press machine or the like, but it may be performed by a method using an adhesive (hot melt adhesive or the like), an ultrasonic fusion method, a laser fusion method or the like. In either method, it is preferable to join the resin substrate 10 and the resin film 20 so that the joining surfaces are uniform.

Then, for example, when this joining is performed by thermocompression bonding, the conditions include a force of 1500 N or more and 3000 N or less, a temperature of 95 ° C. or more and 150 ° C. or less, and a thermocompression bonding time of about 30 seconds. .. This thermocompression bonding may be performed in two or more steps by changing the temperature or the like. Incidentally, in the case where the resin film 20 a resin substrate 10 having a magnitude above thermocompression bonding, for example, the pressure of the thermocompression bonding 0.05 N / mm ² or more 30 N / mm ² or less, more 0.15N It may be / mm ² or more and 15 N / mm ² or less, and further may be 0.3 N / mm ² or more and 10 N / mm ² or less.

Then, after joining, an annealing treatment may be performed in which the temperature is maintained at a temperature of 80 ° C. or higher and 100 ° C. or lower for several seconds to several tens of seconds without pressurization. By joining the resin substrate 10 and the resin film 20 in this way, the microchannel chip 100 according to the present embodiment can be obtained.

The ratio of the bulging amount Q (maximum thickness of the bulging portion 20a) of the central portion (bulging portion 20a) of the portion of the resin film 20 facing the flow path 40 to the depth D of the flow path groove 11 is 4%. More than 6%.
For example, the depth D of the flow path groove 11 according to the present embodiment is about 26 μm, while the bulge amount Q of the bulge portion 20a is 1.2 to 1.5 μm.
According to the above configuration, when the ratio of the swelling amount Q to the depth D is 4% or more, the film side corner 40a can be relatively sharpened and the flow velocity of the liquid sample can be increased by the capillary phenomenon. When the ratio of the swelling amount Q to the depth D is less than 6%, the flow path cross-sectional area of the flow path groove 11 can be widened and the flow rate of the liquid sample can be secured.

The bulging portion 20a may be formed from the stage before joining the resin film 20 to the resin substrate 10. According to such a configuration, the bulging portion 20a can be fitted into the flow path groove 11, and the relative positions of the resin substrate 10 and the resin film 20 can be determined at the stage before joining.

Further, the upper surface of the resin film 20 is flat (including those that are substantially flat), or even if the upper surface of the resin film 20 is recessed, the upper surface of the resin film 20 is larger than the bulging amount Q of the bulging portion 20a. It is preferable that the amount of dents in the film is smaller.
According to such a configuration, since the upper surface of the resin film 20 is not recessed, a recess (not shown) is not formed on the upper surface. Further, since the amount of dents on the upper surface of the resin film 20 is small, the amount of curvature of the recesses (not shown) formed on the upper surface is reduced according to the amount of dents. As a result, according to such a configuration, it is possible to suppress the deterioration of the fluorescence observability of the microchannel chip 100.

The ratio of the bulging amount Q of the central portion (bulging portion 20a) of the portion of the resin film 20 facing the flow path 40 to the opening width W of the flow path groove 11 is 0.5% or more and less than 2%.
According to the above configuration, when the ratio of the swelling amount Q to the opening width W is 0.5% or more, the region of the film side corner 40a on the flow path 40 side can be inevitably narrowed, and the film side. The flow velocity of the fluid at the corner 40a can be increased by capillarity. Further, since the ratio of the bulging amount Q to the opening width W is less than 2%, the flow path area of the flow path 40 can be widened to secure the flow rate.

The microchannel chip 100 according to the present embodiment can be further combined with a film body, a pump, a valve, a sensor, a motor, a mixer, a gear, a clutch, a microlens, an electric circuit, and the like.

<First modification>
Next, the microchannel chip 100X according to the first modification will be described mainly with reference to FIG. FIG. 3 is a view showing a cross section corresponding to the II-II cross section of FIG. 1, and is an enlarged cross-sectional view of the vicinity of the flow path groove 11X of the micro flow path chip 100X according to the first modification.

In the cross section of the flow path 40 shown in FIG. 3, the angle of the bottom side corner 40Xb formed by intersecting the inner side walls 11Xb and the bottom surface 11a of the flow path groove 11X is an obtuse angle on the flow path 40 side. There is. An obtuse angle is, in other words, an angle within a range greater than 90 degrees and less than 180 degrees.
More specifically, the inner side wall 11Xb of the flow path groove 11X formed in the resin substrate 10X according to the first modification is formed so as to be inclined toward the center side in the width direction of the flow path 40 on the lower side. Therefore, the bottom surface 11a and the inner side wall 11Xb intersect with each other so that the flow path 40 side has an obtuse angle to form the bottom side corner portion 40Xb.

According to such a configuration, since the bottom corner portion 40Xb has an obtuse angle, the liquid sample can be distributed to the bottom corner portion 40Xb rather than the bottom corner portion 40b formed at a right angle according to the above embodiment. It is possible to prevent air bubbles from remaining in the bottom corner portion 40Xb.
The inner side wall 11Xb is not limited to the one formed so as to be inclined on the lower side, and is formed in a curved surface shape so that the angle with respect to the bottom surface 11a gradually increases from the bottom surface 11a toward the opening side of the flow path 40. It may be the one that is.

<Second modification>
Finally, the microchannel chip 100Y according to the second modification will be described mainly with reference to FIG. FIG. 4 is a view showing a cross section corresponding to the II-II cross section of FIG. 1, and is an enlarged cross-sectional view of the vicinity of the flow path groove 11Y of the micro flow path chip 100Y according to the second modification.

Both inner side walls 11Yb of the flow path groove 11Y formed in the resin substrate 10Y according to the second modification are formed on the resin film 20 from the bottom surface 11a (bottom side corner 40Yb) of the flow path groove 11Y in the cross section of the flow path 40. It is formed in a flat shape that is inclined so that it spreads toward the end. That is, the cross-sectional shape of the flow path 40 has a bowl-shaped silhouette (an inverted trapezoidal shape in which the central portion of the upper side on the resin film 20 side is curved downward) so as to widen the opening width of the flow path 40 toward the upper side. Is formed.

According to the above configuration, both inner side walls 11Yb are formed so as to expand toward the opening side from the bottom surface 11a, so that both inner side walls 11b are bottom surfaces as in the above embodiment described with reference to FIG. The liquid sample can be distributed from the bottom corner 40Yb to the film side corner 40a as compared with the case where the liquid sample is formed perpendicular to 11a. Therefore, it is possible to prevent bubbles from remaining in the flow path 40.

The microchannel chip according to the present invention including the above-described embodiment can be used for sample separation, detection, analysis, etc., and two or more types of samples are brought into contact with each other to carry out a chemical reaction or the like. Is also possible. When detecting the fluorescence of this sample, a halogen lamp, a xenon lamp, a mercury lamp or the like containing a small amount of ultraviolet rays in the emitted light may be used as a light source, or an excitation wavelength peak or a fluorescence wavelength peak closer to the ultraviolet region may be used. Even if a sample is labeled using a fluorescent reagent having the above, there is very little false detection due to the influence of ultraviolet rays, so that it does not interfere with fluorescence detection or the like.

The above-described embodiment includes the following technical ideas.
(1) A resin substrate having a flow path groove formed on at least one surface,
A resin film bonded so as to cover the flow path groove is provided on one surface of the resin substrate.
The flow path is defined by the bottom surface of the flow path groove, both inner side walls of the flow path groove, and the resin film.
The portion of the resin film facing the flow path is bulged so that the central side in the width direction of the flow path protrudes toward the flow path side rather than the end side.
In the cross section of the flow path, the angle on the flow path side of the film side corner formed by intersecting the inner side walls of the resin film and the portion of the resin film facing the flow path is an acute angle. A featured microchannel chip.
(2) In the cross section of the flow path, the angle on the flow path side of the bottom corner formed by intersecting the inner side walls of the flow path and the bottom surface of the flow path groove is obtuse (1). ). The microchannel chip.
(3) Both inner side walls are formed so as to be inclined so as to diverge from the bottom surface of the flow path groove to the resin film in the cross section of the flow path (1) or (2). The microchannel chip described.
(4) Any of (1) to (3), the ratio of the amount of swelling of the central portion of the resin film facing the flow path to the depth of the flow path groove is 4% or more and less than 6%. The microchannel chip according to item 1.
(5) The ratio of the amount of swelling of the central portion of the resin film facing the flow path to the opening width of the flow path groove is 0.5% or more and less than 2% (1) to (4). The microchannel chip according to any one of the above.

10, 10X, 10Y Resin substrate 11, 11X, 11Y Flow path groove 11a Bottom surface 11b, 11Xb, 11Yb Inner side wall 13 Port 20 Resin film 20a Protruding part 40 Flow path 40a Film side corner 40b, 40Xb, 40Yb Bottom side corner 100, 100X, 100Y Micro flow path chip D Depth Q Swelling amount W Opening width

Claims (4)

A resin substrate having a flow path groove formed on at least one surface,
A resin film bonded so as to cover the flow path groove is provided on one surface of the resin substrate.
The flow path is defined by the bottom surface of the flow path groove, both inner side walls of the flow path groove, and the resin film.
The portion of the resin film facing the flow path is bulged so that the central side in the width direction of the flow path protrudes toward the flow path side rather than the end side.
In the cross section of the flow path, the angle on the flow path side of the film side corner formed by intersecting the inner side walls of the resin film and the portion of the resin film facing the flow path is an acute angle. A featured microchannel chip. The first aspect of the present invention, wherein in the cross section of the flow path, the angle of the bottom side corner formed by intersecting the inner side walls of the flow path and the bottom surface of the flow path groove is an obtuse angle. Micro flow path chip. The microchannel according to claim 1 or 2, wherein both inner side walls are formed so as to be inclined so as to diverge from the bottom surface of the channel groove to the resin film in the cross section of the channel. Tip. The method according to any one of claims 1 to 3, wherein the ratio of the amount of swelling of the central portion of the resin film facing the flow path to the depth of the flow path groove is 4% or more and less than 6%. Micro flow path chip.

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