JP2017108056A - Pick-up device and electronic component conveying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve high speed conveyance and improvement of reliability of a device in a pickup device formed by pulling out a wire from holding means or an electronic component conveying device including the pickup device.SOLUTION: Two pickup heads 51a and 5b are arranged facing diametrically opposite to each other, holding an electronic component in confronting relation to the accommodating body at the first stopping point, and at the second stop point, faces a conveyance path 1a, and releases holding of the electronic component. A rotary table 511 rotates the two pickup heads 51a and 51b back and forth by 180 degrees around the intermediate positions of both, and reciprocally rotates by 180 degrees around the center of the table orthogonal to the table plane that replaces the positions of the two pickup heads 51a and 51b with the first stop point and the second stop point. The wiring terminating at the two pickup heads 51a and 51b has no sliding contact point until reaching a fixed end.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a pickup device that takes out an electronic component from a container and supplies the electronic component to a conveyance path, and an electronic component conveyance device that includes the pickup device and performs a predetermined process while conveying the electronic component.

  Electronic parts undergo various inspections such as electrical characteristics and appearance, are classified according to quality, and undergo a post-process that is repackaged. The electronic component transport apparatus is a manufacturing apparatus that performs a post-process, and forms a transport path, and arranges processing units for performing various inspections, classifications, or packing in the transport path. And an electronic component conveyance apparatus moves an electronic component along a conveyance path | route, and processes an electronic component by various processing units.

  The electronic component transport apparatus includes a transport unit that forms a transport path for electronic components and a storage unit that stores electronic components. The electronic component is taken out of the storage unit and moved on the transport path. However, when it is necessary to leave a space between the transport unit and the storage unit, and when the transport unit and the storage unit cannot directly exchange electronic components, a pickup device is disposed between the transport unit and the storage unit.

  The pickup device is a device that relays transfer of electronic components between the storage unit and the transport unit. The pickup device includes an electronic component holding unit. The holding means picks up the electronic component toward the housing unit and drops off the electronic component toward the transport unit. Conventionally, there is a pickup device that has one holding means and reciprocates one holding means. In this pickup apparatus, one holding means is moved in one direction toward the housing unit, and the one holding means is moved in the opposite direction toward the transport unit. There is also a pickup device in which four holding means are arranged at intervals of 90 degrees and the four holding means are continuously rotated 360 degrees in one direction.

  In the pickup device having one holding means, one electronic component is carried from the storage unit to the transport unit by movement in one direction. The movement in the reverse direction is a process for returning the empty holding means to the housing unit, and does not involve movement of the electronic component. In other words, this pickup device can supply only one electronic component for a total of two reciprocating movements to the transport unit, and is poor in mass transportability. On the other hand, in the pickup device in which four holding means are arranged at intervals of 90 degrees, one electronic component can be supplied per 90-degree rotation, so that it is excellent in mass transportability.

JP 2003-209393 A JP 2009-170791 A

  A pickup device in which four holding means are arranged at intervals of 90 degrees cannot reciprocate clockwise and counterclockwise and needs to rotate 360 degrees in one direction. The pickup apparatus must connect various wirings to the holding means in order to achieve the function of the holding means. For example, when the holding means is an adsorption chuck, it is necessary to connect a pressure wiring for supplying a negative pressure to the holding means. In addition, when an actuator that can be moved forward and backward by itself is installed in the holding means in order to pick up and transfer the electronic components to the transport unit and the storage unit, it is necessary to draw in the holding means electrical wiring for operating the actuator.

  The opposite end to the holding means needs to be connected to a negative pressure generating source or a power source and a control device. Since the negative pressure generation source or the power source and the control device cannot be rotated in accordance with the holding means, the wiring extending from the holding means becomes a fixed end somewhere. For this reason, if the four holding means arranged at intervals of 90 degrees continue to rotate 360 degrees in one direction, the pressure wiring and electrical wiring are wound around the rotating body, and in the worst case, disconnection is caused.

  In order to solve this problem, conventionally, the rotating body of the wiring and the fixed end are connected by a sliding contact, or other holding means such as an electrostatic chuck is used instead of an adsorption chuck, or an external The actuator was installed in the passive drive means.

  When the sliding contact is provided in the pressure wiring, the following configuration is exemplified. That is, a double-structured sliding contact is interposed in the middle of the wiring. The double-structured sliding contact has a cylindrical manifold as a core and a ring container fitted into the outer shell. The manifold, for example, draws pressure piping from a negative pressure generation source in one plane and has a plurality of openings on the circumferential surface. The manifold is a non-moving object that is constantly exposed to negative pressure from a negative pressure source.

  On the other hand, the ring container is concentric with the manifold and rotates so that its inner peripheral surface rubs against the outer peripheral surface of the manifold. In this ring container, a plurality of through holes are radially formed from the inner peripheral surface to the outer peripheral surface. A tube is connected to the outer peripheral surface opening of the through hole, and the tube is connected to the holding means. In such a sliding contact, when the opening formed on the outer peripheral surface of the manifold and the through hole of the ring-shaped container coincide with each other, the negative pressure source, the pressure pipe, the manifold, the ring container, the tube, and the holding means are all in communication. Then, a negative pressure is supplied to the holding means.

  When the tube is directly connected to the manifold, which is a non-moving body, the tube is entangled in the pickup device in which the four holding means are arranged at 90 ° intervals and rotated 360 °. There is no wrapping. In addition, if a solenoid valve that shuts off negative pressure is installed in the manifold, electrical wiring for transmitting a control signal to the solenoid valve will not be entangled. However, in the system using this sliding contact, since the negative pressure cannot always be supplied to the holding means, the suction force generated in the holding means becomes weak. For this reason, there is a possibility that the electronic component is dropped before the electronic component is transported from the housing unit to the supply unit.

  When providing the sliding contact in the electrical wiring, the following configuration is exemplified. That is, a stationary electrode and a brush-like electrode are interposed in the middle of the wiring. The wiring portion led out from the actuator of the holding means is connected to the brush-like electrode. If the brush-like electrode is slid on the non-moving electrode in accordance with the movement of the holding means, even if the pickup device rotates 360 degrees by arranging the four holding means at intervals of 90 degrees, the electrical wiring is There is no entanglement. However, with this type of sliding contact, the stationary electrode and the brush-like electrode are worn due to sliding and need to be replaced. In the worst case, the holding means cannot be operated due to poor contact. End up.

  The present invention has been proposed in order to solve the above-described problems. In a pick-up device in which wiring is drawn from a holding means or an electronic component transport device including the pick-up device, high-speed transport and device reliability are provided. The aim is to achieve both improvements.

  A pickup device according to the present invention is a pickup device that takes out an electronic component from a container and supplies the electronic component to a conveyance path, and is disposed facing the opposite direction by 180 degrees and faces the container at a first stop point. Two holding means for releasing the holding of the electronic component by facing the conveyance path at the second stop point, and reciprocatingly rotating the two holding means by 180 degrees centering on both intermediate positions. A rotary table that alternately switches the positions of the two holding means to the first stop point and the second stop point, one end is a fixed end, the other end is connected to the holding means, And a wiring having no sliding contact.

  The holding means may be a suction chuck that is supplied with a negative pressure and holds an electronic component by a suction force, and the wiring may be a pressure wiring.

  A stationary manifold to which negative pressure is constantly applied may be provided, and the wiring may be a tube whose fixed end is directly connected to the manifold.

  A manifold to which negative pressure is always applied may be provided, and the wiring may include the manifold, be pulled out from the holding means via the manifold, and be fixed at a drawing destination.

  The holding unit includes a holding unit that holds an electronic component, and a voice coil motor that is mounted on the holding unit and moves the holding unit forward and backward, and the wiring is connected to the voice coil motor. It may be an electric wiring for supplying a control signal or electric power.

  The first stop point where the position of the electronic component of the container and one of the holding means is matched, and the second stop point where the position of the electronic component delivery point of the transport path and the other holding means are matched The rotary table may be further provided with a translation means for translating the rotary table along the arrangement plane of the electronic components in the container.

  You may make it further provide the position detection means of an electronic component which detects the position on the said array plane of a said 1st stop point.

  The present invention is also an electronic component transport apparatus, wherein the storage unit for mounting the storage body, the transport unit for forming the transport path, and the pickup device disposed between the storage unit and the transport unit. And comprising.

  According to the present invention, since electronic components are relayed by reciprocating rotation by 180 degrees, wiring defects do not occur, and both high-speed conveyance of electronic components and improvement in the reliability of the apparatus can be achieved.

1 is a side view showing an overall configuration of an electronic component transport apparatus 1. FIG. It is a perspective view which shows the structure of a wafer ring holder. It is a perspective view which shows the structure of a pick-up apparatus. It is a perspective view which shows the structure of a pickup head. It is a block diagram which shows the wiring with respect to a pickup head. It is a side view which shows the structure of a conveyance unit. It is a top view which shows the structure of a conveyance unit. It is a perspective view which shows the structure of an external appearance inspection unit. It is a perspective view which shows the structure of a taping unit. It is a schematic diagram which shows operation | movement of a pickup head.

(overall structure)
Hereinafter, the electronic component transport apparatus 1 according to the present embodiment will be described in detail with reference to the drawings. The electronic component conveying apparatus 1 shown in FIG. 1 performs a predetermined process while conveying an electronic component. An electronic component is a component used for an electrical product, and a semiconductor element or the like is packaged. Examples of the semiconductor element include discrete semiconductors such as transistors, diodes, capacitors, resistors, and integrated circuits.

  The electronic component transport apparatus 1 includes a transport unit 3, a wafer ring holder 4, a pickup device 5, an appearance inspection unit 6, and a taping unit 7. A transfer unit 3, an appearance inspection unit 6, and a taping unit 7 are placed on the upper surface of the table 2, and under the table 2, a wafer ring holder 4 is disposed horizontally on the plane of the table 2. A part of the base 2 is cut out, and the pickup device 5 protrudes from the top and bottom of the base 2 and is installed in the notched part.

  The wafer ring holder 4 is an example of a housing unit that houses electronic components to be visually inspected. The wafer ring holder 4 is mounted with a container made of a wafer ring. The pickup device 5 picks up the electronic component to be transferred from the wafer ring holder 4 and passes it to the transfer unit 3. The transport unit 3 forms an annular and constant height transport path 1a around the transport unit 3, and moves the electronic components along the transport path 1a. The pickup device 5 is disposed immediately below one point of the transfer path 1a, and the wafer ring holder 4 is placed horizontally along a plane extending in parallel with the transfer path 1a immediately below the pickup apparatus 5.

  The taping unit 7 is arranged immediately below one point of the transport path 1a. The taping unit 7 is disposed away from the pickup device 5. The taping unit 7 accommodates electronic components that have been visually inspected in a carrier tape. The appearance inspection unit 6 is an example of a processing unit that performs a predetermined process, and inspects the appearance of the electronic component. Arranged immediately below one point on the transport path 1 a between the pickup device 5 and the taping unit 7.

(Wafer ring holder)
A detailed configuration of the wafer ring holder 4 is shown in FIG. The wafer ring holder 4 lays and holds the wafer ring horizontally, and moves the wafer ring in two axial directions parallel to the horizontal plane and perpendicular to each other, thereby positioning the electronic component to be picked up directly below the pickup device 5. The wafer ring is formed by stretching a sheet on which a diced wafer is attached to the ring, and individual electronic components are arranged in an array.

  The wafer ring holder 4 includes a ring insertion portion 41 into which the wafer ring is inserted horizontally, a ring moving mechanism 42 for moving the ring insertion portion 41 horizontally, and the ring insertion portion 41 centered on a vertical axis perpendicular to the horizontal plane. A ring rotation mechanism 43 that rotates, and a push-up pin 44 that is installed at a fixed point and pushes up an electronic component from the back side of the wafer ring are provided.

  The ring insertion part 41 includes two donut plates 41a and 41b extending horizontally. One donut plate 41a and the other donut plate 41b are overlapped with a gap 41c. A wafer ring is inserted into the gap 41c. The hole provided in the center of the donut plates 41 a and 41 b includes the entire wafer ring inserted into the ring insertion portion 41.

  The ring moving mechanism 42 includes a further lower support plate 42a for fixing the lower donut plate 41a from its back surface, and rails 42b and 42c fixed to the back surface of the support plate 42a. A hole including the entire wafer ring inserted into the ring insertion portion 41 is also provided at the center of the support plate 42a. The rail 42b extends in one axial direction parallel to the horizontal plane, and the rail 42c extends in the second axial direction parallel to the horizontal plane and orthogonal to the rail 42b. When the support plate 42a slides along the rails 42b and 42c, the ring insertion portion 41 fixed to the support plate 42a moves two-dimensionally along the horizontal plane.

  The ring rotation mechanism 43 includes a timing pulley 43a fixed to the ring insertion portion 41, a belt 43b wound around the timing pulley 43a, and a motor 43c that runs the belt 43b. The timing pulley 43a has a ring shape that is concentric with the ring insertion portion 41, and a belt 43b is wound around the outer periphery thereof. The ring rotation mechanism 43 rotates the motor 43c to cause the belt 43b to travel, and rotates the timing pulley 43a as the belt 43b travels. The ring insertion portion 21 rotates in conjunction with the rotation of the timing pulley 43a.

  The push-up pin 44 is a double structure member composed of an inner shell pin tapered toward the tip and an outer shell cylinder accommodating the pin, and projects toward the hole of the ring insertion portion 41. The push-up pin 44 can be moved forward and backward from the cylinder. As the pin is advanced by the drive mechanism, the push pin 44 extends until a point on the wafer ring sheet is pushed up.

  The ring moving mechanism 42 moves the electronic component to a position pushed up by the push-up pin 44, and the ring insertion portion 41 corrects the direction of the electronic component pushed up by the push-up pin 44. The push-up pin 44 pushes up an electronic component, thereby expanding a dicing line with an adjacent electronic component and making it easier to pick up the electronic component.

(Pickup device)
A detailed configuration of the pickup device 5 is shown in FIG. The pickup device 5 receives a pair of pickup heads 51 a and 51 b that receive electronic components from the wafer ring holder 4 and passes them to the transfer unit 3, and direct the pickup heads 51 a and 51 b to the wafer ring holder 4 and the transfer unit 3 in order. A drive motor 52, a component position detection unit 53 that detects a displacement of an electronic component to be picked up, and a head translation mechanism 54 that matches the position of the pickup head 51a or 51b with the position of the electronic component.

  The pickup heads 51a and 51b are suction chucks that hold electronic components by suction, and are examples of holding means. The pickup heads 51a and 51b are supported on the same plane of the rotary table 511 so as to be opposite to each other by 180 degrees. The axial extension lines of the pickup heads 51a and 51b both pass through the center of the rotary table 511, and the pickup heads 51a and 51b are located radially outward from the center of the rotary table 511 with the base end as a base end. Sticks out. The total length of the pickup heads 51a and 51b is the same. That is, the tip ends of the pickup heads 51 a and 51 b are located on the same track concentric with the rotary table 511.

  The rotary table 511 repeats forward rotation and reverse rotation by 180 degrees intermittently by the direct drive motor 52 around the center of the table orthogonal to the table plane. The turntable 511 has a plane orthogonal to the plane in which the transfer path 1a and the wafer ring holder 4 extend. That is, the rotary table 511 including the pickup heads 51a and 51b is placed vertically.

  The positions of the pickup heads 51a and 51b are intermittently switched, and the pickup heads 51a and 51b are stopped at a first stop point facing right above and a second stop point facing right below. The pickup head 51a or 51b facing directly below faces the push pin 44 of the wafer ring holder 4 with the electronic component of the wafer ring interposed therebetween, and picks up and holds the electronic component pushed up by the push pin 44. The pick-up head 51a or 51b facing directly upward faces one point on the transport path 1a formed by the transport unit 3, and passes the electronic component picked up from the wafer ring holder 4 to the transport unit 3.

  The component position detection unit 53 detects the position on the wafer ring holder 4 where the electronic component to be picked up is located. The component position detection unit 53 includes a prism 51c and a camera 51d. The prism 51c is attached to the center of the rotary table 511 on the plane. The prism 51c bends an optical path coaxial with the central axis of the rotary table 511 right below. The camera 51d is disposed on this optical path. The camera 51d takes an image of the position of the electronic component on the wafer ring located on the extension line of the pickup head 51a or 51b facing downward. Based on the imaging result of the camera 51d, it is possible to analyze the positional relationship between the electronic component to be picked up and the pickup head 51a or 51b facing directly below.

  The head parallel movement mechanism 54 moves the pick-up heads 51a and 51b together with the rotary table 511 to a first axis (X axis) horizontal to the plane in which the wafer ring holder 4 extends and a second axis (Y axis) orthogonal to the first axis. Translate along. The plane in which the wafer ring holder 4 extends is an arrangement plane on which electronic components are arranged. The head translation mechanism 54 includes a ball screw mechanism 54x extending in the X-axis direction and a ball screw mechanism 54y extending in the Y-axis direction.

  Each of the ball screw mechanism 54x and the ball screw mechanism 54y includes a motor, a shaft that is threaded and rotated by the motor, and a slider that is screwed with the shaft and supports the rotary table 511. The shaft of the ball screw mechanism 54x is Extending in the X-axis direction, the shaft of the ball screw mechanism 54y extends in the Y-axis direction. The pickup heads 51a and 51b move in the X-axis direction and the Y-axis direction as the slider moves along the shaft by the rotation of the shaft accompanying the rotation of the motor.

  The pickup heads 51a and 51b will be described in more detail. FIG. 4 is a perspective view showing a detailed configuration of the pickup head 51a. Since the pickup head 51b has the same configuration as the pickup head 51a, detailed description thereof is omitted. The pickup head 51a has a nozzle portion 512, which is a hollow tube having an open end, as a main body. The nozzle portion 512 is opened outward in the radial direction of the rotary table 511. A collet 513 is fitted at the tip of the nozzle portion 512 to ease the load on the electronic component. When the negative pressure acts on the nozzle portion 512, the electronic component is held by the suction force. When the negative pressure on the pickup heads 51a and 51b is cut off, the electronic component is detached.

  The pickup head 51 a extends outward in the radial direction of the turntable 511 and contracts toward the center in the radial direction of the turntable 511. The pickup head 51a is provided with an actuator for expansion and contraction and can be driven by itself. That is, the pickup head 51a has a voice coil motor 514 at the end opposite to the head end. Specifically, the nozzle portion 512 is fixed to the movable portion of the voice coil motor 514. The movable part is, for example, a moving coil type coil bobbin.

  The voice coil motor 514 is fixed to the plane of the turntable 511 via the base frame 515. When the voice coil motor 514 is actuated, the pickup head 51a extends outward in the radial direction of the rotary table 511 as the movable part advances, and the radial center side of the rotary table 511 as the movable part moves backward. It will be reduced to.

  FIG. 5 is a schematic diagram showing wiring of the pickup heads 51a and 51b. As shown in FIG. 5, the pickup device 5 includes a manifold 92 that branches a pressure pipe 921 connected to the negative pressure generation source 91 into two paths 922a and 922b. An electromagnetic valve 923 is interposed in the middle of the distribution paths 922a and 922b. The negative pressure generation source 91 is, for example, a vacuum pump that is accommodated inside a gantry having the pedestal 2 as an upper surface. The pressure pipe 921 is connected to the negative pressure generation source 91 through the rotation shaft of the direct drive motor 52.

  A negative pressure is always supplied to the manifold 92 from the negative pressure generation source 91 via the pressure pipe 921. The tube 93 a is directly connected to the first distribution path 922 a of the manifold 92, and the tube 93 b is directly connected to the second distribution path 922 b of the manifold 92. The other end of the tube 93a is connected to the pickup head 51a, and the other end of the tube 93b is connected to the pickup head 51b. Therefore, negative pressure is always generated in the pickup heads 51a and 51b as long as the electromagnetic valve 923 is open.

  The manifold 92 is a non-moving body with respect to the pickup head 51a, the pickup head 51b, and the rotary table 511, which are rotating bodies. This is because the electrical wiring 923a for operating the electromagnetic valve 923 is routed. That is, the tube 93 and the tube 93b are connected to the pickup head 51a and the pickup head 51b, which are rotating bodies, without sliding contacts, with the manifold 92 that is a non-moving body as a fixed end.

  In addition, an electrical wiring 514 a is drawn from the voice coil motor 514 and connected to the control device 22. The control device 22 includes a computer and a power source, and inputs control signals and supplies power to the voice coil motor 514 through the electric wiring 514a. The control device 22 is housed inside a gantry with the table 2 as an upper surface, and controls the electronic component transport device 1 in an integrated manner. The electric wiring 514 a is passed through the rotation shaft of the direct drive motor 52 and is fixed by a stay or the like in the middle of the control device 22. That is, the electrical wiring 514a has no sliding contact between the voice coil motor 514, which is a rotating body, and a fixed end that is fixed by a stay or the like.

(Transport unit)
The detailed configuration of the transport unit 3 is shown in FIGS. The transport unit 3 includes a rotary table 31, a direct drive motor 32, and a suction nozzle 33. The turntable 31 has a circular envelope that extends radially from the center of a disk shape or a star shape on the same plane and is equidistant from the center to each outer edge. The rotary table 31 is supported on the rotary shaft of the direct drive motor 32 at the center of the circle, and is installed on the table 2 via the direct drive motor 32. A gap is formed between the outer peripheral side of the rotary table 31 and the table 2. The rotary table 31 is intermittently rotated in the circumferential direction by a direct drive motor 32.

  The suction nozzle 33 is a holding means that holds the electronic component by sucking it, and is supported on the edge of the rotary table 31 so as to be lifted and lowered at a circumferentially equidistant position. In the present embodiment, the rotary table 31 has a star shape in which the arms 31a extend radially along the radial direction, and the arms 31a extend at equal circumferential positions. The suction nozzle 33 is supported at the tip of the arm 31a, extends perpendicular to the plane on which the rotary table 31 expands, and hangs downward from the rotary table 31.

  Specifically, a guide rail 31b is provided at the tip of the arm 31a. The guide rail 31b extends perpendicular to the plane on which the rotary table 31 extends. The suction nozzle 33 can hold the guide rail 31b and move up and down. A coil spring 31c is provided in parallel with the guide rail 31b, and biases the suction nozzle 33 upward.

  The suction nozzle 33 has an internal hollow pipe shape, and a lower end is opened to form a suction port 33b. The hollow interior of the suction nozzle 33 communicates with a negative pressure generation source 91. A negative pressure is generated in the suction nozzle 33, and an electronic component can be held by a suction force at the suction port 33b. In addition, an electromagnetic valve is arranged on the path leading to the suction nozzle 33, and the electromagnetic valve is closed, whereby the vacuum breaks and the electronic component is detached.

  In the transport unit 3, the rotation angle per pitch of the rotary table 31 and the angle formed by the adjacent suction nozzle 33 are the same. The suction nozzle 33 is located at an equal distance from the circle center of the rotary table 32. Therefore, each suction nozzle 33 follows the same trajectory and stops at the same position. The trajectory followed by the suction part 33b of the suction nozzle 33 due to the intermittent rotation of the suction nozzle 33 becomes the transport path 1a of the electronic component. The positions of the pick-up heads 51a and 51b facing directly above the pick-up device 5, the installation position of the appearance inspection unit 6, and the installation position of the taping unit 7 are located immediately below any stop position of the suction nozzle 33. Adjusted.

(Appearance inspection unit)
A detailed configuration of the appearance inspection unit 6 is shown in FIG. A unit housing 61 is provided with a camera 62, a prism 63, a ring illumination 64, and a forward / backward drive device 8. The prism 63, the ring illumination 64, and the advancing / retreating drive device 8 are installed at the same position in the top view, with different heights, on the front side of the appearance inspection unit 6. The prism 63, the ring illumination 64, and the advance / retreat drive device 8 are arranged in order from the bottom to the top. Specifically, a standing column frame 611 extending higher than the position of the ring illumination 64 is extended in the unit casing 61, and the advancing / retreating drive device 8 is supported on the upper end portion of the standing column frame 611.

  The camera 62 takes an image via the prism 63. The prism 63 refracts the optical axis toward the camera 62. The ring illumination 64 is formed by annularly arranging light emitting elements such as LEDs inside a ring made of a transparent member such as silicon, and concentrates light above the ring and on the central axis of the ring. The advancing / retracting drive device 8 includes a rod 81 that moves forward and backward relative to the main body, and pushes an object with the tip of the rod 81. For example, the advancing / retracting drive device 8 includes a motor and a cylindrical cam, the rod 81 follows the cam surface of the cylindrical cam, the cylindrical cam converts the rotational force of the motor into a linear thrust, and the rod 81 serves as a cam follower. Move forward away from.

  The prism 63, the advance / retreat drive device 8 and the ring illumination 64 have an optical axis before the prism 63 refracts toward the camera 62, the axis of the rod 81 of the advance / retreat drive device 8, and the central axis of the ring illumination 64 as a common axis. The appearance inspection unit 6 is arranged so that the axis of the suction nozzle 33 stopped at the installation point of the appearance inspection unit 6 coincides with the common axis.

  The vertical frame 611 is erected on the rear side of the appearance inspection unit 6 with respect to the column of the prism 63, the advance / retreat drive device 8 and the ring illumination 64, and the space between the advance / retreat drive device 8 and the ring illumination 64 is The front side and both sides of the appearance inspection unit 6 are open except for the rear of the appearance inspection unit 6. Therefore, the upright column frame 611 does not become a physical obstacle to the movement of the suction nozzle 33.

  In this appearance inspection unit 6, the rod 81 of the advance / retreat drive device 8 pushes the head 33 a of the suction nozzle 33, lowers the suction nozzle 33 to a position illuminated by the ring illumination 64, and displays an image of the electronic component held by the suction nozzle 33. The light is guided to the camera 62 by the prism 63.

(Taping unit)
A detailed configuration of the taping unit 7 is shown in FIG. The taping unit 7 performs a process of storing electronic components on a carrier tape. In the carrier tape, pockets embossed along the longitudinal direction of the belt are arranged in parallel, and each pocket is a storage area for electronic components. The taping unit 7 has a running groove 71 that runs the carrier tape in a straight line, and runs the carrier tape along the running groove 71.

  The taping unit 7 runs the carrier tape intermittently. The travel amount per pitch of the carrier tape matches the length of the line segment connecting the centers of the adjacent pockets, and the taping unit 7 stops each pocket at the same location. One of the same stop points of the pocket is an electronic component storage work point 72.

  The taping unit 7 includes an advancing / retreating drive device 8 directly above the storage work location 72. A standing column frame 731 extending higher than the upper end of the running groove 71 is extended in the unit housing 73 of the taping unit 7, and the advancing / retreating drive device 8 is supported on the upper end portion of the standing column frame 731. In this taping unit 7, the rod 81 of the advance / retreat drive device 8 pushes the head 33 a of the suction nozzle 33, lowers the suction nozzle 33 to the storage work location 72, and inserts the electronic component into the empty pocket.

  The standing column frame 731 is erected on the rear side of the taping unit 7 with respect to the storage work location 72 and the row of the advance / retreat drive device 8, and the space between the advance / retreat drive device 8 and the storage work location 72 is taping. Except for the rear side of the unit 7, the front side and both sides of the appearance inspection unit 6 are open. The upright column frame 731 does not become a physical obstacle to the movement of the suction nozzle 33.

(Operation)
The operation of the electronic component transport apparatus 1 will be described. A wafer ring is set in advance in the ring insertion portion 41 of the wafer ring holder 4, and a carrier tape is set in the running groove 71 of the taping unit 7. In the wafer ring holder 4, electronic components sequentially move directly above the push-up pins 44 and are pushed up by the push-up pins 44. The pickup device 5 receives the electronic component pushed up by the push-up pin 44 and passes it to the transport unit 3.

  The transport unit 3 sequentially waits for empty suction nozzles 33 directly above the pickup device 5. When the suction nozzle 33 receives an electronic component from the pickup device 5, the rotary table 31 is intermittently rotated by the direct drive motor 32. The suction nozzle 33 holding the electronic component eventually stops at the place where the appearance inspection unit 6 is installed.

  The advancing / retreating drive device 8 included in the appearance inspection unit 6 advances the rod 81 downward, presses the head 33a of the suction nozzle 33 with the lower end of the rod 81, resists the biasing force of the coil spring 31c, and the suction nozzle 33. Is lowered along the guide rail 31b. The ring illumination 64 illuminates the electronic component sucked by the suction port 33b of the suction nozzle 33, the prism 63 introduces an image of the electronic component on the optical axis into the camera 62, and the camera 62 images the electronic component.

  When the imaging of the electronic component is completed, the advance / retreat drive device 8 included in the appearance inspection unit 6 retracts the rod 81 upward and raises the suction nozzle 33 by the urging force of the coil spring 31c. When the suction nozzle 33 is raised, the rotary table 31 is further intermittently rotated by the direct drive motor 32, and the suction nozzle 33 holding the electronic component is eventually stopped at the place where the taping unit 7 is installed.

  The taping unit 7 causes the carrier tape to travel one pitch until the suction nozzle 33 holding the electronic component stops immediately above the accommodation work location 72, and moves the empty pocket to the accommodation operation location 72. The advancing / retracting drive device 8 provided in the taping unit 7 advances the rod 81 downward, presses the head 33a of the suction nozzle 33 at the lower end of the rod 81, and moves the suction nozzle 33 against the urging force of the coil spring 31c. It is lowered along the guide rail 31b. Then, the suction nozzle 33 separates the electronic component by vacuum break and accommodates it in an empty pocket located at the accommodating work location 72.

  The operation of the pickup device 5 will be described in more detail. First, in the pick-up device 5 including the pick-up heads 51a and 51b facing in the opposite direction of 180 degrees, the electronic component is taken out from the wafer ring holder 4 once in each of the forward path and the backward path of the 180-degree reciprocating rotation, and one electronic Delivery of parts to the transport unit 3 is performed. Two electronic components are supplied to the transport path 1a by reciprocation.

  In the meantime, in the wafer ring holder 4, the ring moving mechanism 42 moves the ring insertion portion 41 in the X-axis direction and the Y-axis direction, and sequentially moves the electronic components to the pickup location directly above the push pins 44. At this time, the position and orientation of the electronic component to be picked up may be different from the prescribed position and orientation depending on how the electronic component is attached. In the pickup device 5, the component position detection unit 53 detects the deviation of the electronic component to be picked up with respect to the specified position and the specified direction before the pickup head 51 a is moving, for example.

  The specified position is an extension of the axis of the pickup heads 51a and 51b when the rotary table 511 returns to the origin position. The origin position is a position where the pickup heads 51a and 51b and the suction nozzle 33 that stops right above the pickup device 5 are aligned. The specified direction is a direction in which the tangent line in contact with the movement locus of the suction nozzle 33 and one side of the electronic component are parallel to each other at the point where the suction nozzle 33 stops immediately above the pickup device 5.

  The component position detection unit 53 captures an area including the specified position via the prism 51c, analyzes the image data, and analyzes each deviation between the electronic component to be picked up and the specified position and specified direction. The image analysis means is, for example, a computer and may be mounted on the pickup device 5 or may be a computer for integrated control provided in the electronic component transport device 1.

  The head parallel movement mechanism 54 operates the ball screw mechanism 54x and the ball screw mechanism 54y to move the rotary table 511 so as to eliminate the positional deviation of the electronic component from the specified position, and moves the pickup head 51a directed downward to the position. Move to the pick-up location of the misplaced electronic component. Further, the ring rotation mechanism 43 of the wafer ring holder 4 rotates the ring insertion portion 41 so as to align the electronic components whose directions are shifted in a specified direction. Then, the push-up pin 44 pushes up the electronic component toward the pickup head 51a facing downward. The voice coil motor 514 of the pick-up head 51a that faces right below advances the pick-up head 51a outward in the radial direction of the rotary table 511 toward the electronic component.

  The collet 513 contacts the electronic component by the operation of the voice coil motor 514. The voice coil motor 514 brings the pickup heads 51a and 51b into contact with the electronic component with a thrust proportional to the energization current. Therefore, precise load control for the electronic component is possible. The voice coil motor 514 brings the pickup heads 51a and 51b into contact with the electronic component with a load close to zero. The pickup heads 51 a and 51 b that are in contact with the electronic components are always connected to the negative pressure generation source 91. Therefore, the pickup heads 51a and 51b hold the electronic component with a strong suction force.

  As shown in the upper diagram of FIG. 10, when the pickup head 51a facing downward is holding an electronic component, the direct drive motor 52 rotates the rotary table 511 in one direction such as counterclockwise by 180 degrees, for example. The pick-up head 51a picking up the electronic component from the ring holder 4 is directed upward. The pick-up head 51b facing directly upward passes the electronic component to the transport unit 3, rotates 180 degrees in one direction such as counterclockwise, and faces downward.

  At this time, one end of the tubes 93a and 93b follows the pickup heads 51a and 51b, but the other end is fixed to a manifold 92 which is a non-moving body. Therefore, the tubes 93a and 93b are twisted 180 degrees in the forward path of rotation of 180 degrees. Further, one end of the electrical wiring 514a follows the voice coil motor 514, but since the other end is fixed by a stay or the like, the electrical wiring 514a is twisted 180 degrees in the forward path of 180 degrees rotation.

  However, as shown in the lower diagram of FIG. 10, this time, when the pickup head 51b facing directly downward holds the electronic component, the direct drive motor 52 rotates the rotary table 511 180 degrees in the reverse direction, for example, clockwise. Then, the pickup head 51b picking up the electronic component from the wafer ring holder 4 is directed upward. The pick-up head 51a facing directly upward passes the electronic component to the transport unit 3, and rotates 180 degrees in the opposite direction, such as clockwise, and faces downward.

  Therefore, the twist of the tubes 93a and 93b which has been twisted 180 degrees is eliminated in the return path of 180 degrees rotation. In addition, the electric wiring 514a is twisted 180 degrees on the outward path of 180 ° rotation, but returns to the original position on the return path of 180 ° rotation. As described above, the tubes 93a and 93b having one end connected to the rotating body and the other end connected to the non-moving body repeatedly twist and eliminate the twist, so that the twist does not exceed the degree, and the sliding contact Even if there is no, there is no blockage. In addition, the electrical wiring 514a having one end connected to the rotating body and the other end connected to the non-moving body repeatedly twists and eliminates the twist, so that the twist does not exceed the degree and the sliding contact is not required. There is no disconnection.

(effect)
As described above, the pickup device 5 that takes out an electronic component from the wafer ring mounted on the wafer ring holder 4 and supplies the electronic component to the transport path 1a includes the rotary table 511 and the two pickup heads 51a and 5b. One of the two pickup heads 51a and 51b is connected to one end thereof, and the other ends of the tubes 93a and 93b and the electric wires 514a and the like having a fixed end have no sliding contact therebetween.

  In this pickup device 5, the two pickup heads 51 a and 5 b are arranged so as to face opposite to each other by 180 degrees, face the container at the first stop point, hold the electronic components, and transport at the second stop point. The holding of the electronic component is released facing the path 1a. The rotary table 511 rotates the two pickup heads 51a and 51b reciprocally by 180 degrees centering on the intermediate position between the two pickup heads 51a and 51b, and sets the location of the two pickup heads 51a and 51b to the first stop point and the second point. Alternately switch to the stop point.

  As a result, two electronic components can be picked up from the wafer ring and delivered to the supply unit 3 for two 180 degree rotations of the two pickup heads 51a and 5b in the forward and return directions. . For this reason, the conveyance speed is doubled as compared with a conventional pickup apparatus including one pickup head. Note that the pickup heads 51a and 5b are not limited to suction chucks in order to achieve a double transport speed. The pickup heads 51a and 5b are an example of a holding unit that holds an electronic component. As the holding unit, an electrostatic adsorption method, a Bernoulli chuck method, or a chuck mechanism that mechanically holds an electronic component can be applied.

  In addition, even if the pickup heads 51a and 5b are used as suction chucks, the tubes 93a and 93b are always twisted back by reciprocal rotation by 180 degrees, so there is no possibility of the tubes 93a and 93b being blocked or disconnected. Therefore, a sliding contact is not required and negative pressure can be constantly supplied to the pickup heads 51a and 5b. Therefore, as compared with the conventional pickup apparatus in which four pickup heads are arranged at intervals of 90 degrees, the suction force of the pickup heads 51a and 5b is increased, and the electronic components can be prevented from falling off.

  In the present embodiment, the fixed ends of the tubes 93 a and 93 b are connected to the manifold 92 that is a non-moving body, but the manifold 92 may be rotated together with the rotary table 511. Even in this case, the pressure wiring extending to the negative pressure generation source 91 via the manifold 92 needs a fixed end somewhere because the negative pressure generation source 91 is stationary, and the pressure wiring further extending from the manifold 92 Although a twist of 180 degrees occurs in the pipe 921, the twist is restored by reverse rotation, so there is no possibility of the pressure pipe 921 being blocked or disconnected. Therefore, the sliding contact can be eliminated from the pressure pipe 921, and a negative pressure can always be supplied to the pickup heads 51a and 51b.

  In addition, the pickup heads 51a and 51b are equipped with a voice coil motor 514 that moves the nozzle portion 512, which is an electronic component holding portion, forward and backward. Even if the electric wiring 514a connected to the pickup heads 51a and 51b is twisted by the 180-degree rotation forward path, it returns to the original state by the 180-degree rotation return path, so that it is possible to eliminate the sliding contact for drawing in the electric wiring 514a. is there. Therefore, the assembly work man-hour of the pickup device 5 is reduced, and the cost of the pickup device 5 can be reduced.

  The drive source of the pickup heads 51a and 51b is not limited to the voice coil motor 514, and various actuators such as a rotary motor having a mechanism for converting a rotary motion into a linear motion by a cam can be applied. However, the load on the electronic component can be precisely controlled by the voice coil motor 514, and the risk of causing a defect in the electronic component can be reduced.

  Also, a pickup location where the position of the electronic component of the container and one pickup head 51a or 51b is matched, and a drop-off location where the location of the electronic component delivery location of the transport path 1a is matched with the position of the other pickup head 51a or 51b. A head translation mechanism 54 that translates the rotary table 511 along the arrangement plane of the electronic components in the wafer ring holder 4 so as to reciprocate is provided.

  The accommodation unit such as the wafer ring holder 4 is given priority to a mechanism for quickly moving electronic components, and has a long moving distance of one pitch. Therefore, the alignment accuracy between the electronic component and the pickup head 51a or the pickup head 51b is lowered. However, in this pickup device 5, the pickup head 51a or 51b also moves so as to be aligned with the electronic component, so that the accuracy of alignment between the electronic component and the pickup head 51a or the pickup head 51b can be improved.

  In the present embodiment, the wafer ring is used as a container, and the wafer ring holder 4 is described as a unit for mounting the container. However, the present invention is not limited to this. For example, a taping unit having a carrier tape as a container, a tray shift device having a tray as a container, and a parts feeder for positioning an electronic component from the bowl to the head of the linear rail may be provided. In the case of the parts feeder, the bowl and the straight rail can be regarded as a container, and the pick-up location where the pick-up head 51a or the pick-up head 51b facing directly below receives the electronic component is the head of the straight rail.

(Other embodiments)
Each embodiment of the present invention has been described above, but various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 1 Electronic component conveyance apparatus 1a Conveyance path 2 Stand 21 Rail 22 Control apparatus 3 Conveyance unit 31 Rotary table 32 Direct drive motor 33 Adsorption nozzle 4 Wafer ring holder 41 Ring insertion part 42 Ring movement mechanism 43 Ring rotation mechanism 44 Push-up pin 5 Pickup device 51a, 51b Pickup head 51c Prism 511 Rotary table 512 Nozzle part 512a, 512b Terminal 513 Collet 514 Voice coil motor 514a Electrical wiring 515 Base frame 52 Direct drive motor 53 Component position detection part 54 Head translation mechanism 6 Appearance inspection unit 61 Unit housing Body 611 Standing column frame 62 Camera 63 Prism 64 Ring illumination 65 Slider 7 Taping unit 71 Traveling groove 72 Storage work location 73 Unit housing 7 1 pillar frame 8 advancing drive unit 81 rod 91 a negative pressure generating source 92 manifold 921 pressure line 922a first distribution path 922b second distribution channels 923 solenoid valve 923a electrical wiring 93a, 93 b Tube

A pickup device according to the present invention is a pickup device that takes out an electronic component from a container and supplies the electronic component to a conveyance path, and is disposed facing the opposite direction by 180 degrees and faces the container at a first stop point. Two holding means for releasing the holding of the electronic component by facing the conveyance path at the second stop point, and reciprocatingly rotating the two holding means by 180 degrees centering on both intermediate positions. A rotary table that alternately switches the positions of the two holding means to the first stop point and the second stop point, one end is a fixed end, the other end is connected to the holding means, Positions of the wiring without a sliding contact, the first stopping point where the electronic parts of the container and one of the holding means are aligned, the electronic part delivery position of the transport path and the other holding means Between the second stop point As restored, be provided with a translation means to translate along the arrangement plane of the electronic component in said rotary table container, characterized by.

Claims (8)

A pickup device that takes out an electronic component from a container and supplies it to a conveyance path,
Two holding units that are arranged facing 180 degrees opposite to each other, hold the electronic component facing the container at the first stop point, and release the holding of the electronic component facing the transport path at the second stop point Means,
A rotary table that reciprocally rotates the two holding means by 180 degrees around both intermediate positions, and alternately switches the positions of the two holding means to the first stop point and the second stop point. When,
One end is a fixed end, the other end is connected to the holding means, and there is no sliding contact between them,
Providing
Pickup device characterized by this. The holding means is a suction chuck that is supplied with a negative pressure and holds an electronic component by a suction force;
The wiring is a pressure wiring;
The pickup device according to claim 1. It has a stationary manifold where negative pressure is always applied,
The wiring is a tube whose fixed end is directly connected to the manifold;
The pickup device according to claim 2. It has a manifold where negative pressure is always applied,
The wiring includes the manifold, is pulled out from the holding means via the manifold, and is fixed at a drawing destination;
The pickup device according to claim 2. The holding means is
A holding unit for holding electronic components;
A voice coil motor mounted on the holding means and moving the holding part forward and backward, and
Have
The wiring is an electrical wiring for supplying a control signal or power to the voice coil motor;
The pickup device according to claim 1, wherein The first stop point where the position of the electronic component of the container and one of the holding means is matched, and the second stop point where the position of the electronic component delivery point of the transport path and the other holding means are matched A translation means for translating the rotary table along the plane of arrangement of the electronic components in the container so as to reciprocate between
The pickup device according to claim 1, wherein: An electronic component position detecting means for detecting a position of the first stop point on the arrangement plane;
The pickup device according to claim 6. A storage unit for mounting the container;
A transport unit that forms the transport path;
The pickup device according to any one of claims 1 to 7, wherein the pickup device is disposed between the storage unit and the transport unit;
Providing
An electronic component conveying device characterized by the above.

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