JP2017107190A - Imaging device, image projection device, and stage device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an imaging device in which sliding resistance does not occur and which has high degree of freedom of movement of a movable member on which an imaging element is mounted, when the movable member is driven.SOLUTION: An imaging device comprises: a movable member on which an imaging element, on which a subject image is projected by an imaging optical system, is fixed; a base member for holding the movable member in a freely relatively movable manner; and thrust generation means for generating thrust in a plurality of directions acting on the movable member. The thrust generation means generates thrust for translating the movable member in first, second and third directions different from one another including the first direction which is parallel to an optical axis of the imaging optical system and thrust for tilting the movable member around the first, second and third directions, relatively to the base member with thrust in one or a plurality of directions.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an imaging device, an image projection device, and a stage device that can perform movement control with six degrees of freedom.

  2. Description of the Related Art Conventionally, in a single-lens reflex camera, in order to perform camera shake correction, as an in-body camera shake correction device that drives an image sensor in a camera body, imaging is performed using a driving means using a flat-shaped planar driving coil and a permanent magnet. Image stabilization by driving the element in the X direction (X axis direction) and Y direction (Y axis direction) orthogonal to the optical axis, and further driving the image sensor in the Z direction (Z axis direction), which is the optical axis direction, by a piezoelectric actuator An apparatus is known (Patent Document 1). Patent Document 2 discloses an imaging apparatus that performs focus adjustment by moving an imaging element back and forth in the optical axis direction. In Patent Document 3, an image sensor is supported by a coil spring stretched in the X, Y, and Z directions so as to be movable in the X, Y, and Z directions, and the image sensor is rotated around the X direction (X axis). An imaging apparatus including a vibration reduction device that rotates (tilts) around a direction (Y axis) and around a Z direction is disclosed. Japanese Patent Application Laid-Open No. 2004-228561 discloses an imaging apparatus that enables tilt imaging by rotating an imaging element around the X direction and the Y direction.

  In recent years, the image sensor is rotated (tilted) around the X direction, rotated (tilted) around the Y direction, moved in the X direction, moved in the Y direction, and rotated (tilted) around the Z direction (optical axis). A camera equipped with a camera shake correction device is known.

JP 2012-226205 A JP 59-11071 A Japanese Unexamined Patent Publication No. 08-265612 JP 2008-35308 A

  However, in these conventional image pickup apparatuses, when the image pickup element is driven, the movable stage that supports the image pickup element is in contact with some support base (base member), and generation of sliding (moving) resistance can be avoided. There wasn't. In addition, since sliding resistance is generated, the actual situation is that the degree of freedom in moving the image sensor is limited.

  The present invention has been made on the basis of the above problem awareness, and an imaging device capable of increasing the degree of freedom of movement of the movable member without causing sliding resistance when driving the movable member, An object is to obtain an image projection apparatus and a stage apparatus.

  An imaging apparatus according to the present invention includes a movable member to which an imaging element on which a subject image is projected by a photographing optical system is fixed; a base member that holds the movable member in a relatively movable manner; and a plurality of directions that act on the movable member. Thrust generating means for generating a thrust of a predetermined amount, wherein the thrust generating means is configured to move the movable member relative to the base member by one-way thrust or interaction of thrusts in a plurality of directions. , A thrust for translation in different first, second and third directions including a first direction parallel to the optical axis of the photographing optical system, and tilting around the first, second and third directions. Generating thrust.

  The second and third directions are perpendicular to the first direction and perpendicular to each other, and the thrust generating means includes first thrust generating means for generating thrust in the first direction; A second thrust generating means for generating a thrust in the second direction; and a third thrust generating means for generating a thrust in a third direction, wherein at least one of the second and third thrust generating means is A pair of thrusts in the second direction or the third direction, which is composed of at least a pair separated in the third direction or the second direction, and generated by one of the second or third pair of thrust generating means. By this interaction, it is preferable that the movable member is translated in the second direction or the third direction and tilted around the first direction.

  The other of the second and third thrust generating means consists of a pair arranged in a symmetrical position with the optical axis in between, and a pair of second directions generated by the second and third thrust generating means. The movable member can be translated in the second direction or the third direction by the interaction of the thrust or the pair of thrusts in the third direction.

  The other of the second and third thrust generating means is a pair separated in the second direction or the third direction, and the second of the second and third thrust generating means is generated by the second. The movable member may be translated in the second direction or the third direction by the interaction of a pair of thrusts in the direction or a pair of thrusts in the third direction.

  A plurality of the first thrust generating means are arranged at different positions around the optical axis, and the movable member is moved in the first direction by the interaction of a plurality of thrusts in the first direction generated by the thrust generating means. Translation in one direction, tilting around the second direction and tilting around the third direction can be made.

  At least one thrust generating means for generating the thrust in the first direction is disposed between the second or third pair of thrust generating means.

  It is preferable that the center of gravity of the first thrust generating means coincides with the center of gravity of the movable member.

  The first thrust generating means, when viewed from the optical axis direction, a line connecting any two of them is parallel to the second direction or the third direction, and a line connecting the two; It is preferable that the perpendicular line drawn from the other one to the line connecting the two is arranged so as to be parallel to the third direction or the second direction.

  The thrust generation means may include a driving coil fixed to one of the base member and the movable member, and a permanent magnet fixed to the other.

  The base member includes a front fixed yoke and a rear fixed yoke that face the movable member from the front and the rear in the first direction, respectively, and each of the thrust generating means includes a drive coil and a permanent magnet, The driving coil is fixed to the movable member or at least one of the front fixed yoke and the rear fixed yoke, and the permanent magnet is fixed to at least one of the front fixed yoke and the rear fixed yoke or the movable member.

  The thrust generating means can hold the movable member in a floating state with respect to the front and rear fixed yokes by the interaction of the thrusts in the plurality of directions.

  The second thrust generating means and the third thrust generating means have permanent magnets fixed to the front and rear fixed yokes, and different magnetic poles are opposed to the permanent magnets fixed to the front and rear fixed yokes. It is preferable.

  The first thrust generating means has a permanent magnet fixed to the front and rear fixed yokes and a driving coil fixed to the movable member, and the permanent magnets fixed to the front and rear fixed yokes have the same magnetic pole. It is preferable that they are facing each other.

  The first thrust generating means includes piezoelectric elements that are provided at a plurality of positions between the movable member and the imaging element and extend and contract in a first direction in which the imaging element contacts and separates from the movable member. Can be included.

  A plurality of position detecting means for detecting a relative position of the movable member with respect to the base member at a plurality of different positions of the movable member; and a detection result of the plurality of position detecting means based on a detection result of the movable member with respect to the base member. It is practical to further comprise a translation position in the first, second and third directions and a calculation means for calculating the tilt positions around the first, second and third directions.

  The position detection means includes a magnetic sensor provided in the air core region of the first drive coil, the air core region of the second drive coil, and the air core region of the third drive coil, The calculation means is configured to detect the translation position of the movable member relative to the base member in the first, second, and third directions, and about the first, second, and third directions based on the detection signals of the magnetic sensors. The tilt position can be calculated.

  The plurality of position detecting means includes a plurality of sets of light emitting elements and light receiving elements provided on one of the movable member and the fixed yoke, and the arithmetic means emits light from the light emitting means and the fixed yoke or the movable member. The detection position of the light receiving element that has received the detection light reflected at the position of the movable member relative to the base member in the first, second, and third directions, and the first, second, and third directions. Can be calculated.

  The present invention in the form of a stage apparatus includes a movable member that can move relative to the base member, and a thrust generation means that generates thrust in multiple directions that acts on the movable member. The member is characterized in that it can be translated, tilted, or translated and tilted relative to the base member by the interaction of thrust in one direction or thrust in a plurality of directions.

  It is practical that the movable member is held in a non-contact state with respect to the base member by the interaction of thrusts in a plurality of directions of the thrust generating means.

  The thrust generation means includes first, second, and third thrust generation means for applying thrusts in first, second, and third directions different from each other to the movable member, and the first to second thrust generation means. The movable member translates in the first to third directions relative to the base member by the interaction of the thrusts in the first to third directions generated by the three thrust generating means. Or tilting around the third direction, translation during tilting, and translation after tilting.

  The movable member is held in a non-contact state with respect to the base member by the interaction of thrusts in a plurality of directions of the thrust generating means.

  In the stage apparatus of the present invention, based on the detection results of the plurality of position detection means and the plurality of position detection means for detecting the relative position of the movable member with respect to the base member at different positions of the movable member. And a calculating means for calculating a relative position of the movable member in the first, second and third directions with respect to the base member and a tilting position about the first, second and third directions. it can.

  A driven member can be mounted on the movable member.

  The driven member may be an image forming element or a projection optical system that receives light from a light source and forms a projection image.

  The image forming element is a liquid crystal panel that transmits a light beam emitted from the light source toward the projection optical system, and the first direction is set in parallel to the optical axis of the projection optical system.

  The image forming element is a DMD panel that reflects a light beam emitted from a direction different from the first direction toward the projection optical system, and the first direction is an optical axis of the projection optical system. Set to parallel.

  The stage apparatus according to another aspect of the present invention includes a base member, a movable member movable relative to the base member, and a one-way thrust or a plurality of directions of thrust acting on the movable member. Thrust control means for controlling, wherein the movable member is translated, tilted, or moved relative to the base member by the interaction of one-way thrust or a plurality of thrusts controlled by the thrust control means, or It can be translated and tilted.

  The invention of the aspect of the image projection apparatus includes a projection optical system that projects an image, a movable member to which an image forming element on which the image is formed is fixed, a base member that holds the movable member in a relatively movable manner, Thrust generating means for generating thrust in a plurality of directions acting on the movable member, and the thrust generating means causes the movable member to move relative to the base member by one-way thrust or interaction of thrusts in a plurality of directions. Relative to each other, including a first direction parallel to the optical axis of the projection optical system, the first, second, and third directions, and a thrust that translates in different first, second, and third directions. It is characterized by generating a thrust that tilts around.

The image pickup apparatus of the present invention can translate the image sensor in different first, second, and third directions including a first direction parallel to the optical axis of the photographing optical system, and can tilt about each direction. Camera shake correction in all directions and special shooting are possible.
Since the image projection apparatus of the present invention can move the image forming element in all directions with six degrees of freedom, various adjustments such as projection direction adjustment, image inclination, and rotation adjustment are easy.
The stage apparatus of the present invention translates and tilts the movable member in all directions with six degrees of freedom, translates while tilting, translates after tilting, and tilts after translation, so that it can project an image such as an imaging device such as a camera or a projector. It is useful not only for apparatuses but also for various optical devices such as laser scanners and electronic devices.

It is a block diagram which shows the main structural members of the digital camera carrying the imaging device provided with the stage apparatus of this invention. FIG. 2A is a rear view showing a first embodiment of an image pickup apparatus including a stage device having six degrees of freedom according to the present invention, in which the right half is a view excluding a rear yoke and a movable stage, and FIG. It is sectional drawing which follows the IIB-IIB cutting line of 2A. It is a rear view which shows a movable stage in the said 1st Embodiment. It is sectional drawing which expands and shows the X drive part of one (left side) of FIG. 2B. It is an expanded sectional view which follows the VV cut line of Drawing 2A. FIG. 6A is a rear view showing a second embodiment of the stage apparatus, the right half is a view showing the rear yoke and the movable stage removed, and FIG. 6B is a sectional view taken along the line VIB-VIB in FIG. 6A. is there. It is sectional drawing which expands and shows the X direction drive part of the one (left side) of FIG. 6B. It is an expanded sectional view which follows the VIII-VIII cutting line of Drawing 6A. FIG. 9 is a front view showing a third embodiment of the stage apparatus. It is an expanded sectional view which follows the XX cut line of FIG. FIG. 11A is a rear view showing a fourth embodiment of the stage apparatus, in which the left half is a view excluding a part of the rear yoke and the movable stage, and FIG. 11B is along the XIB-XIB cutting line of FIG. 11A. It is sectional drawing. 12A and 12B are cross-sectional views showing examples of different operation modes of the Z-direction drive unit in the fourth embodiment, cut at the same cutting position as in FIG. 11B. It is a rear view which shows another embodiment of the stage apparatus of this invention. It is an expanded sectional view which shows one X direction drive part of further another embodiment of the stage apparatus of this invention. It is an expanded sectional view showing the Z direction drive part of another embodiment. It is sectional drawing corresponding to FIG. 2B which shows embodiment of the aspect of the image projector of this invention. It is sectional drawing corresponding to FIG. 2B which shows embodiment which applied this invention to the camera-shake correction apparatus of the imaging lens.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS. FIG. 1 is a conceptual diagram showing, in block form, main constituent members and main circuit elements of a digital camera equipped with an imaging apparatus equipped with a stage device of the present invention. In this figure, in the present embodiment, one direction (one direction) parallel to the optical axis O of the photographing optical system is defined as a first direction (Z direction, Z axis direction), and one direction orthogonal to the first direction. (One direction) is the second direction (X direction, X axis direction), and one direction (one direction) orthogonal to both the first direction and the second direction is the third direction (Y direction, Y axis). Direction). For example, assuming that the X axis, the Y axis, and the Z axis are coordinate axes of a three-dimensional orthogonal coordinate system, when the optical axis O is the Z axis, the two axes orthogonal to the Z axis and orthogonal to each other are the X axis. And the Y axis. When the camera is in the normal position (lateral position), the first direction (Z direction, Z axis, optical axis O) and the second direction (X direction, X axis) are horizontal, and the third direction (Y (Direction, Y axis) is vertical, and the subject direction is front and front. In addition, in this specification, tilting or turning around the first direction means tilting or turning about a virtual axis parallel to the first direction. Similarly, tilting or turning around the second direction means tilting or turning around a virtual axis parallel to the second direction, and tilting or turning around the third direction is the third This means tilting or turning about a virtual axis parallel to the direction of.

  The digital camera 10 includes a camera body 11 and a photographing lens 101 as a photographing optical system. The camera body 11 includes a body CPU 20 that controls, calculates, and drives and controls functions of the entire camera, and an imaging block 30 that includes an imaging element 31 that captures a subject image projected by the imaging lens 101. The body CPU 20 drives and controls the image sensor 31, processes the captured image signal by the image processing unit 32, displays the captured subject image on the image display unit (monitor) 33, and stores the image data of the captured subject image in the memory Write to card 34.

  The digital camera 10 includes a contrast detection unit 35 that detects the contrast of a subject from an image signal processed by the image processing unit 32, a camera operation unit 21 that has a switch and the like for a photographer to operate the entire camera functions, and a photographic lens 101. The focus adjusting optical system (not shown) is driven in the direction of the optical axis to adjust the focus, the aperture, the shutter, etc. are opened and closed to adjust the amount of light incident on the image sensor 31, and the image sensor 31 is driven. An exposure control unit 23 that controls imaging and a lens communication unit 24 that communicates with the photographing lens 101 and inputs a focal length of the photographing lens 101 and the like.

  The digital camera 10 has, as detection means for detecting camera shake (vibration) of the camera body 11, a roll (tilt (rotation) around the Z direction) detection unit GSα, a pitch (tilt (rotation around the X direction)) detection unit GSβ, A yaw (tilt (rotation) around Y direction) detection unit GSγ, an X direction acceleration detection unit GSX, a Y direction acceleration detection unit GSY, and a Z direction acceleration detection unit GSZ are provided, and these are connected to a camera shake detection circuit 44. . Each of these detection means is formed by, for example, a 6-axis sensor, or a 3-axis gyro sensor and a 3-axis acceleration sensor.

  The imaging block 30 includes an imaging element 31 and a stage device 60 that supports the imaging element 31. The stage device 60 includes a movable stage 61 on which the image sensor 31 is mounted, a front fixed yoke 62 and a rear fixed yoke 63 positioned in front of and behind the movable stage 61, and at least when energized, the stage 61 is fixed to the front and rear fixed yokes. 62 and 63 can be floated (floated against gravity and kept stationary (floating stationary state)). The imaging device 31 constitutes a thin driven member whose front surface is planar. The stage device 60 moves the movable stage 61 in the floating state in the Z direction (first direction), the X direction (second direction) orthogonal to the Z direction, and the Y direction orthogonal to both the Z direction and the X direction. (Third direction) Translation, tilting (rotation) around the X direction (second direction), tilting (rotation) around the Y direction (third direction), and tilting around the Z direction (first direction) (Rotation) (6 degrees of freedom movement, 6 axis movement) is possible. Further, the movable stage 61 of the stage device 60 is capable of moving by combining a plurality of these six degrees of freedom of translation and tilting, translation during tilting, translation after tilting, and tilting after translation (see FIGS. 2 to 5). ). “Translation” is to move straight without changing the orientation and tilt of the image plane (imaging plane of the imaging device 31) with respect to the camera body, and “tilt” refers to the orientation of the image plane with respect to the camera body or This is a movement that changes the tilt, and includes rotating the image plane around the Z direction (the optical axis O or a virtual axis parallel to the optical axis O). “Floating” means that the movable stage 61 is held in a non-contact manner between the front fixed yoke 62 and the rear fixed yoke 63, and the movable stage 61 is positioned at the center position where the center of the imaging surface of the imaging device 31 intersects the optical axis O ( This is a concept including the case of non-contact holding with respect to the front fixed yoke 62 and the rear fixed yoke 63 at the imaging initial position).

  For example, the body CPU 20 inputs focal length f information from the photographing lens 101 via the lens communication unit 24, and the pitch (tilt (rotation) around the X direction) detection unit GSβ, yaw (tilt (rotation) around the Y direction). ) Detection unit GSγ, roll (tilt (rotation) around Z direction) detection unit GSα, X direction acceleration detection unit GSX, Y direction acceleration detection unit GSY, and Z direction acceleration detection unit GSZ based on the detection signal A blur direction, a blur speed, and the like, and a driving direction, a driving speed, a driving amount, and the like of the image sensor 31 so as not to move relative to the image sensor 31 are calculated. Based on the calculation result, the stage device 60 is translated, tilted, translated during tilting, translated after tilting, and tilted after the translation. The order of these operations does not matter.

  The stage device 60 functions as a support member that holds the movable stage 61 to which the imaging device 31 is fixed relative to the front fixed yoke 62 and the rear fixed yoke 63 so as to be able to translate, tilt, translate during tilting, and translate after tilting. To do. The movable stage 61 is a rectangular plate (frame) -like member that is larger than the image sensor 31 in a front view. The front fixed yoke 62 and the rear fixed yoke 63 are formed of a rectangular plate (frame) member having the same shape whose plan view and outer shape are slightly larger than the movable stage 61, and each has a central portion in front view (viewed from the Z direction). ), Rectangular openings 62a and 63a larger than the outer shape of the image sensor 31 are formed. The front fixed yoke 62 and the rear fixed yoke 63 are coupled by a plurality of connecting struts (not shown) at positions where they do not interfere even when the movable stage 61 moves (translates, tilts, rotates) within a predetermined range, and is parallel and at a predetermined interval. Is retained.

  The rear surface of the front fixed yoke 62 (the surface opposite to the object side) is located on at least one of the left and right sides (X direction) of the opening 62a with the Y axis as the center line and the Z axis in between. In the aspect, the X-direction magnet MX composed of a pair of left and right permanent magnets having the same specifications is fixed. Each of the left and right X-direction magnets MX is composed of a pair of plate-like magnets that are long in the Y direction and thin in the Z direction, and each pair of magnets is arranged in parallel to the Y axis and spaced apart in the X direction. Yes. As for the pair of left and right X-direction magnets MX, one (left side) magnet in FIG. 2B has the front surface (surface on the front fixed yoke 62 side) as the S pole, the rear surface is the N pole, and the other (right side) magnet is the front surface. Is the N pole and the rear surface is the S pole. The front fixed yoke 62 and the rear fixed yoke 63 pass the magnetic flux of the left and right X direction magnets MX, so that the X direction (second The magnetic circuit (thrust generation means, thrust control means) that generates (direction) thrust is configured (see FIG. 4). Regardless of the posture of the camera body 11, the X-direction magnet MX serves as a floating means for holding the movable stage 61 at the center position (initial position), for example, in vertical position shooting where the grip of the camera body 11 is held up or down. It works (functions).

  On the rear surface of the front fixed yoke 62, a pair of the same specifications as the Y-direction magnet MYA made of a pair of permanent magnets having the same specifications is arranged below the opening 62a and spaced apart from the Z axis with the Y axis as the center line. A Y-direction magnet MYB is fixed. These left and right Y-direction magnets MYA and MYB are each made up of a pair of plate-like magnets that are long in the X direction and thin in the Z direction, and each pair of magnets is arranged parallel to the X axis and spaced apart in the Y direction. ing. Both the pair of Y-direction magnets MYA and the pair of Y-direction magnets MYB have an S-pole on one side (front side) on the front and back and an N-pole on the other side (rear side), as shown in FIG. One side (front surface) of the magnet on the side is an N pole, and the other surface (rear surface) is an S pole. The front fixed yoke 62 and the rear fixed yoke 63 pass the magnetic fluxes of the Y direction magnet MYA and the Y direction magnet MYB, so that the Y direction magnet MYA, the Y direction magnet MYB, and the rear fixed yoke 63 are interposed between them. , Part of a magnetic circuit (thrust generating means, thrust control means) for generating thrust in the Y direction (third direction). The Y-direction magnet MYA and the Y-direction magnet MYB act as levitation means for holding the movable stage 61 at the center position (initial position) regardless of the posture of the camera body 11, particularly in the horizontal position (normal position) shooting ( Function.

  Further, Z direction magnets MZA, MZB and MZC made of permanent magnets of the same specification are fixed to the rear surface of the front fixed yoke 62 at three positions different from the X direction magnet MX and the Y direction magnets MYA and MYB. (See FIG. 2A and FIG. 5). The Z-direction magnets MZA, MZB, and MZC have a rectangular plate shape when viewed from the front, and the front surface (contact surface of the fixed yoke 62) has an S pole and the rear surface has an N pole. The three Z-direction magnets MZA, MZB, and MZC are arranged at substantially equal intervals in the Z-axis orthogonal plane with the Z axis as the center. When the front fixed yoke 62 and the rear fixed yoke 63 pass the magnetic fluxes of the Z direction magnets MZA, MZB, and MZC, the Z direction magnets (MZB, MZB, MZC) and the rear fixed yoke 63 are arranged in the Z direction (first A part of a plurality of magnetic circuits (thrust generation means, thrust control means).

  The movable stage 61 located between the front fixed yoke 62 and the rear fixed yoke 63 is a nonmagnetic member integrally formed by press molding from a nonmagnetic material. A rectangular image pickup device mounting hole 61a is formed in the center of the movable stage 61, and the image pickup device 31 is fitted and fixed in the image pickup device mounting hole 61a. The image sensor 31 protrudes forward in the optical axis O direction of the movable stage 61 from the image sensor mounting hole 61a.

  The image sensor 31 is arranged so that the long side is parallel to the X direction and the short side is parallel to the Y direction when the movable stage 61 is located at the initial position (initial position where the magnetic levitation is performed). And When the movable stage 61 is at the initial position, the center of the imaging surface of the imaging element 31 is located on the optical axis O of the photographing lens 101, and the optical axis O and the Z axis coincide. The Z direction (first direction), the X direction (second direction), and the Y direction (third direction) are relative to the camera body 11 and the taking lens 101 whose Z direction coincides with or is parallel to the optical axis O. However, the direction may be constant with respect to the image sensor 31.

  A pair of X driving coils (X driving unit) CX is fixed to the movable stage 61 at positions outside the left and right sides (short sides) of the image sensor 31, and one side below the image sensor 31 ( A pair of Y driving coil (YA driving unit) CYA and Y driving coil (YB driving unit) CYB are fixed at a lower part of the long side and separated from each other on the left and right. The pair of X driving coils CX are long and long in the Y direction, and are arranged at symmetrical positions (equal distance) across the Y axis so that the longitudinal direction is parallel to the Y direction and overlapping the X axis. The pair of Y drive coils CYA and CYB are horizontally long and long in the X direction, and are arranged at symmetrical positions (equal distance from the Y axis) across the Y axis so that the longitudinal direction is parallel to the X direction. ing. This arrangement is easy to manufacture, adjust and control.

  Further, a circular Z driving coil (ZA driving unit) CZA is fixed to the movable stage 61 between the pair of Y driving coils CYA and CYB (intermediate position). A pair of circular Z drive coils (ZB drive unit) CZB and Z drive coil (ZC drive unit) CZC are fixed to be positioned above. The Z drive coil CZA is arranged on the Y axis, and the Z drive coils CZB and CZC are arranged at symmetrical positions (equal distance from the Y axis) with respect to the Y axis. The center of gravity (total center of gravity) of the Z driving coils CZA, CZB, and CZC substantially coincides with the center of gravity of the movable stage 61. Any two of the Z drive coils CZA, CZB, and CZC, in the illustrated embodiment, a line connecting the Z drive coils CZB and CZC, and a perpendicular line drawn from the other one to the above line are parallel to the Y axis (Or coincides with the Y axis). The arrangement of the Z drive coils CZA, CZB, and CZC is arbitrary, but the line connecting any two is parallel to the X axis or Y axis, and the other one is lowered to the line connecting the two. It is preferable to arrange the vertical line so that it is parallel to the Y axis or the X axis. This arrangement is easy to manufacture, adjust and control.

  The pair of X driving coils CX, the pair of Y driving coils CYA and CYB, and the three Z driving coils CZA, CZB, and CZC are wound in a spiral shape on the XY plane. A planar (thin) coil parallel to the optical axis orthogonal plane (XY plane), which is laminated a plurality of times in the plate thickness direction (Z direction).

  The pair of X driving coils CX is arranged in such a manner that the longitudinal portion is parallel to the Y axis and faces the corresponding X direction magnet MX, and the pair of Y driving coils CYA and CYB are parallel to the X axis. Each corresponding one is arranged in a manner facing the pair of Y-direction magnets MYA and MYB.

  X driving coil (X driving unit) CX, Y driving coil (YA driving unit) CYA and Y driving coil (YB driving unit) CYB, Z driving coil (ZA driving unit) CZA, Z driving coil (ZB Drive Unit) CZB and Z drive coil (ZC drive unit) CZC are connected to the actuator drive circuit 42 and are energized and controlled via the actuator drive circuit 42.

  The X driving coil CX and the pair of X direction magnets MX constitute second thrust generating means (thrust control means) for generating thrust in the X direction (second direction). The movable stage 61 can be translated in the X direction by thrust in the X direction generated by controlling the current flowing through the X driving coil CX.

  One Y driving coil CYA and a pair of Y-direction magnets MYA, and the other Y driving coil CYB and a pair of Y-direction magnets MYB generate a pair of Y-direction (third direction) thrusts. 3 thrust generation means (thrust control means). The movable stage 61 is translated in the Y direction and tilted (rotated) about the Z direction by the interaction of a pair of thrusts in the Y direction separated in the X direction generated by the current control applied to the Y driving coils CYA and CYB. be able to.

  The three Z driving coils CZA, CZB, CZC and the three Z direction magnets MZA, MZB, MZC are provided with three first thrust generating means for generating thrust in the Z direction (first direction) ( (Thrust control means). Three Z driving coils CZA, CZB, CZC and three Z direction magnets MZA, MZB, MZC, which are separated from each other in the XY plane, are controlled by current control through the three Z driving coils CZA, CZB, CZC. The movable stage 61 is lifted with respect to the front and rear fixed yokes 62 and 63 (three Z-direction magnets MZA, MZB, and MZC) by the interaction of the three generated Z-direction thrusts. Can be translated in the direction, tilted about the X direction, and tilted about the Y direction.

  Further, the movable stage 61 is levitated (neutral) to the initial position (center position) by the interaction of the thrust in the X direction and the Y direction generated by current control to the X driving coil CX and the Y driving coils CYA and CYB. can do.

  The movable stage 61 includes an X-direction hall element (X position detector) HX located in the air core region of the X driving coil CX, and a Y direction coil located in the air core regions of the Y driving coils CYA and CYB, respectively. Hall element (Y position detection unit) HYA, Y direction hall element (YB position detection unit) HYB, and Z direction hall element (ZA position) respectively located in the air core region of each of the Z drive coils CZA, CZB, CZC Detection unit) HZA, Z-direction hall element (ZB position detection unit) HZB, and Z-direction hall element (ZC position detection unit) HZC are fixed. Hall element for X direction (X position detector) HX, Hall element for Y direction (YA position detector) HYA, Hall element for Y direction (YB position detector) HYB, Hall element for Z direction (ZA position detector) The HZA, Z-direction Hall element (ZB position detection unit) HZB, and the Z-direction Hall element (ZC position detection unit) HZC are connected to the position detection circuit 43.

  The X-direction hall element HX constitutes position detection means for detecting the magnetic force of the corresponding X-direction magnet MX (magnetic flux of the X-direction magnetic circuit). The position detection circuit 43 detects the X direction position of the movable stage 61 by a predetermined calculation from the detection signal of the X direction hall element HX. The translation position in the X direction can be detected by the detection signal from the X direction hall element HX.

  The Y-direction hall element HYA constitutes position detecting means for detecting the magnetic force of the corresponding Y-direction magnet MYA (the magnetic flux of the Y-direction magnetic circuit), and the Y-direction hall element HYB is the corresponding Y-direction magnet MYB. It constitutes position detecting means for detecting magnetic force (magnetic flux of the Y direction magnetic circuit). The position detection circuit 43 detects the Y-direction position and the tilt position around the Z-direction by a predetermined calculation using the detection signals of both the Y-direction hall elements HYA and HYB. A translation position in the Y direction and a tilt position around the Z direction can be detected from detection signals from the Y direction hall elements HYA and HYB.

  Each Z-direction hall element HZA, HZB, HZC constitutes a position detecting means for detecting the magnetic force (magnetic flux of the Z-direction magnetic circuit) of the corresponding Z-direction magnets MZA, MZB, MZC. The position detection circuit 43 calculates the Z-direction translation position, the X-direction tilt position, and the Y-direction tilt position by a predetermined calculation using the detection signals of the Z-direction hall elements HZA, HZB, and HZC. Is detected. The translation position in the Z direction, the tilt position about the X direction, and the tilt position about the Y direction can be detected by the detection signals of the respective hall elements HZA, HZB, and HZC for Z direction.

  The position detection circuit 43 detects the Z direction (first direction) of the movable stage 61 based on a plurality of detection signals of the X direction hall element HX, the Y direction hall elements HYA, HYB, and the Z direction hall elements HZA, HZB, HZC. ), X-direction (second direction) and Y-direction (third direction) translation positions, Z-direction (first direction), X-direction (second direction) and Y-direction (third direction) Computation means for computing the tilting position around is constructed.

  X driving coil CX, Y driving coils CYA and CYB, Z driving coils CZA, CZB, CZC, X direction hall element HX, Y direction hall elements HYA, HYB, and Z direction hall elements HZA, HZB, and HZC are mounted on a flexible printed circuit board FPC (not shown), and are incorporated in the camera body 11 via the flexible printed circuit board FPC extending from the movable stage 61, the position detection circuit 43, and the like. Are electrically connected to each circuit (see FIG. 1).

  The pair of X driving coils CX, the pair of Y driving coils CYA, CYB, and the three Z driving coils CZA, CZB, CZC are energized and controlled by the actuator driving circuit 42. The actuator drive circuit 42 is controlled by the body CPU 20 via the image stabilization control circuit 41.

  The position detection circuit 43 detects the X-direction position and the Y-direction position of the movable stage 61 based on the detection signals output from the X-direction hall element HX, the Y-direction hall elements HYA, HYB, and the Z-direction hall elements HZA, HZB, HZC. , Z position, tilt position around X direction (tilt (rotation) angle, pitch angle around X direction), tilt position around Y direction (tilt (rotation) angle, yaw angle around Y direction), and Z direction Rotating position (tilting (rotation) angle around the Z direction, roll angle) is detected.

  The above digital camera 10 can perform the following operations when performing a photographing operation. First, under the control of the body CPU 20, by energizing the pair of X driving coils CX, the pair of Y driving coils CYA and CYB, and the three Z driving coils CZA, CZB, and CZC, the movable stage 61 is moved forward. The fixed yoke 62 and the rear fixed yoke 63 are held (floated) in an initial position that is not in contact with other members.

  Thereafter, the digital camera 10 can perform the following drive control based on each position calculated by the body CPU 20 (position detection circuit 43) in a state where the movable stage 61 is lifted.

  The movable stage 61 is held at a predetermined position in the optical axis direction by the interaction of three thrusts in the Z direction that are generated by equally energizing the Z driving coils CZA, CZB, CZC, and translated in the Z direction. The movable stage 61 is tilted (rotated) in the X direction and tilted in the Y direction by the interaction of three different thrusts in the Z direction generated by individually energizing the Z driving coils CZA, CZB, CZC ( And can be held in a tilted state.

  The movable stage 61 can be held at a predetermined position in the X direction and translated in the X direction by the X-direction thrust generated by energizing each X driving coil CX.

  The movable stage 61 is held at a fixed position in the Y direction by the interaction of two equivalent thrusts in the Y direction generated by controlling the energization of the Y driving coils CYA and CYB equally, and the Y stage is translated into Y direction. The movable stage 61 is tilted (rotated) around the Z direction by the interaction of two different thrusts in the Y direction generated by individually controlling the energization of the coils CYA and CYB, and brought into a predetermined tilted (rotated) state. Can be held.

  Further, a plurality of thrusts in the Z direction generated by energization control to the above Z driving coils CZA, CZB, CZC, X driving coil CX, Y driving coils CYA, CYB, Due to the interaction of the thrusts in the Y direction, the movable stage 61 is levitated, and in the levitating state, it is translated and tilted in all directions with six degrees of freedom (six axes), tilted during translation, and after translation and after translation Can be tilted.

  The digital camera 10 (body CPU 20) performs the above-described drive control of the movable stage 61 in synchronization with the camera shake (vibration) of the camera body 11 detected by the camera shake detection circuit 44, thereby performing a camera shake correction (shake reduction) operation. be able to.

[Second Embodiment]
In the first embodiment, the permanent magnet is provided only on the front fixed yoke 62. On the other hand, FIGS. 6 to 8 show a second embodiment in which permanent magnets are provided on both the front fixed yoke 62 and the rear fixed yoke 63. The same members as those in the first embodiment and the members having the same functions are denoted by the same reference numerals and description thereof is omitted. X-direction magnet MX1, Y-direction magnet MYA1 having the same specifications in a manner facing the X-direction magnet MX, Y-direction magnets MYA, MYB, Z-direction magnets MZA, MZB, MZC fixed to the front fixed yoke 62 , MYB1, and Z direction magnets MZA1, MZB1, and MZC1 are fixed to the rear fixed yoke 63. The X-direction magnet MX1 and the Y-direction magnets MYA1 and MYB1 of the rear fixed yoke 63 are opposed to the opposite magnetic poles MX and Y-direction magnets MYA and MYB of the front fixed yoke 62, respectively. (FIGS. 6B and 7). On the other hand, the Z-direction magnets MZA1, MZB1, and MZC1 of the rear fixed yoke 63 are arranged so that the same magnetic poles as the Z-direction magnets MZA, MZB, and MZC of the front fixed yoke 62 that face each other are opposed (see FIG. 8). X-direction magnet MX1, Y-direction magnets MYA1, MYB1, Z-direction magnets MZA1, MZB1, MZC1, X-direction magnet MX, Y-direction magnets MYA, MYB, and Z-direction magnets MZA, MZB, MZC Is set to be substantially the same as the interval between the rear fixed yoke 63 and the X direction magnet MX, the Y direction magnets MYA, MYB, the Z direction magnets MZA, MZB, MZC of the first embodiment.

  According to the second embodiment, the X-direction magnet MX, the Y-direction magnets MYA, MYB of the front fixed yoke 62, the X-direction magnet MX1, the Y-direction magnets MYA1, MYB1 of the rear fixed yoke 63 are movable. Since different magnetic poles face each other across the longitudinal direction portions of the X driving coil CX and the Y driving coils CYA and CYB of the stage 61, it is possible to generate magnetic field lines almost perpendicular to the optical axis O (Z axis) direction. Thus, even if the movable stage 61 moves in the Z direction, fluctuations in thrust (driving force) in the X direction and the Y direction are small.

  The Z-direction magnets MZA, MZB, MZC of the front fixed yoke 62 and the Z-direction magnets MZA1, MZB1, MZC1 of the rear fixed yoke 63 sandwich the annular Z drive coils CZA, CZB, CZC of the movable stage 61. Since the same magnetic poles face each other, the Z direction thrust (driving force) fluctuates even when the Z driving coils CZA, CZB, CZC (movable stage 61) move in the Z direction as compared with the first embodiment. Is small.

[Third Embodiment]
In the first and second embodiments, the Z-direction position, the tilt position about the X direction, and the tilt position about the Y direction of the movable stage 61 are detected by the Z-direction hall elements HZA, HZB, and HZC. 9 and 10 show photoreflectors PZA, PZB, PZC instead of Hall elements HZA, HZB, HZC as Z-direction position detection means, tilt position detection means around the X direction, and tilt position detection means around the Y direction. The 3rd Embodiment using is shown. The same members as those in the first and second embodiments are denoted by the same reference numerals, and description thereof is omitted.

  The photo reflectors PZA, PZB, and PZC include a light emitting element and a light receiving element. The light emitting element emits light, and the light receiving element receives the detection light reflected by the reflection region 61b of the movable stage 61. Depending on the light receiving position, the photo reflector PZA , PZB, PZC and the movable stage 61 (reflection area 61b) are detected in the Z direction.

  In the third embodiment, the photo reflectors PZA, PZB, and PZC allow the movable stage 61 to move in the Z direction regardless of the position of the movable stage 61 in the X direction, the Y direction, or the tilt position around the Z direction with respect to the front fixed yoke 62. The position can be detected accurately.

[Fourth Embodiment]
In the first, second, and third embodiments described above, the imaging device 31 is fixed to the movable stage 61, and the movable stage 61 is levitated and supported in a non-contact manner with respect to the front and rear fixed yokes 62 and 63, and has six degrees of freedom. (6 axis drive). On the other hand, in the fourth embodiment shown in FIGS. 11 and 12, a piezoelectric element 71a that translates the imaging element 31 in the Z direction, tilts in the X direction, and tilts in the Y direction on the movable stage 61. 71b and 71c are provided. The same members as those in the first to third embodiments are denoted by the same reference numerals, and description thereof is omitted.

  The three piezoelectric elements 71a, 71b, 71c connect the rear surface (back surface) of the image sensor 31 and the front surface of the movable stage 61 via expansion / contraction variable members 72a, 72b, 72c. The piezoelectric element 71 a is disposed at the approximate center in the X direction of the lower edge portion of the image sensor 31, and the piezoelectric elements 71 b and 71 c are disposed near the left and right ends of the upper edge portion of the image sensor 31. The three piezoelectric elements 71a, 71b, 71c are preferably arranged at equal intervals from the optical axis O (Z axis).

  The piezoelectric elements 71a, 71b, 71c are single elements or laminates of piezoelectric elements that expand and contract (generate thrust) in the Z direction according to their strength (height) and polarity when a voltage is applied. The piezoelectric elements 71a, 71b, 71c are driven and controlled by a piezoelectric element driving circuit (not shown). The expansion / contraction variable members 72a, 72b, 72c are formed of an elastic body such as rubber. The piezoelectric elements 71a, 71b, 71c and the expansion / contraction variable members 72a, 72b, 72c constitute first thrust generating means for generating a thrust in the first direction.

  FIG. 12A shows a case where substantially the same voltage is applied so that the piezoelectric elements 71a, 71b, 71c extend to substantially the same length. The piezoelectric elements 71 a, 71 b, 71 c extend substantially the same amount from the initial state of FIG. 11B to separate (translate) the imaging element 31 from the movable stage 61. When the voltage applied to the piezoelectric elements 71 a, 71 b, 71 c is reversed, the piezoelectric elements 71 a, 71 b, 71 c contract and translate in the direction in which the imaging element 31 approaches the movable stage 61.

  When the polarity and voltage of the voltage applied to each piezoelectric element 71a, 71b, 71c are independently adjusted, thrust in the Z direction is generated by expansion and contraction in the Z direction, and the imaging element 31 is moved by the interaction of the three thrusts. In contrast, it translates in the Z direction, tilts around the X direction, or tilts around the Y direction. FIG. 12B shows a state in which the piezoelectric element 71 c and the piezoelectric element 71 a are contracted and the piezoelectric element 71 b is expanded, and the imaging element 31 is tilted about the Y direction with respect to the movable stage 61. As the piezoelectric elements 71 a, 71 b, 71 c expand and contract differently, the expansion / contraction variable members 72 a, 72 b, 72 c that couple the piezoelectric elements 71 a, 71 b, 71 c and the image sensor 31 expand and contract to allow the image sensor 31 to tilt. ing.

  Note that the same mechanism as that of the first to third embodiments can be used as the mechanism that causes the movable stage 61 to float and tilt in the Z direction and translate in the X direction and the Y direction in the floating state.

  In the above embodiment, the movable stage 61 has three Z-direction (first) at the intermediate position between the pair of Y drive coils CYA and CYB constituting the two Y-direction (third) thrust generating means. Since the Z driving coil (ZA driving unit) CZA, which is one of the thrust generating means, is disposed, the thrust generating means can be compactly configured within a small area.

  In the present embodiment, the center of gravity of the Z driving coils (ZA, ZB, ZC driving units) CZA, CZB, CZC constituting the plurality (three) of thrust generating means in the Z direction is substantially the same as the center of gravity of the movable stage 61. Therefore, the thrust (driving force) of the thrust generating means in each Z direction can be made equal, and the thrust can be set small.

  There are any two Z driving coils (ZA, ZB, ZC driving units) CZA, CZB, CZC constituting the thrust generating means in the Z direction, and in this embodiment, the Z driving coils CZB and CZC are connected. Is parallel to the X-axis or Y-axis, and the perpendicular line drawn from the line connecting the two to the line connecting the two is parallel to the Y-axis. The detection axis by the sensor and the control axis can be matched, and the configuration of the control system can be simplified. For example, the tilt around the Y direction can be controlled by the difference between the ZC drive unit and the ZB drive unit, and the tilt around the X direction can be controlled by the ZA drive unit.

  In the above embodiment, a pair of X driving coils CX having the same specifications are provided on both the left and right sides of the image pickup device 31 of the movable stage 61, and the pair of X direction magnets MX having the same specifications are provided on the front and rear fixed yokes. Although provided on both the left and right sides of the openings 62a and 63a of the 62 and 63, the X driving coil CX and the X direction magnet MX or MX1 may be provided only on one of the left and right sides. FIG. 13 shows an embodiment (fifth embodiment) in which the X driving coil CX and the X direction magnet MX are provided on one of the left and right sides. FIG. 13 is a rear view of the movable stage 61. The same members and members having the same functions as those in the embodiment of FIGS.

  A pair of X driving coils CXA and CXB having the same specifications are arranged on the right side of the image sensor 31 with the longitudinal direction parallel to the Y axis orthogonal to the optical axis O and spaced apart in the Y direction at the vertical position of the X axis. Has been placed. An X-direction hall element HX is disposed in the air core region of the upper X driving coil CXA. Although not shown, the front fixed yoke and the rear fixed yoke have a pair of X direction magnets of the same specification at the opposing portions of the X driving coils CXA and CXB, and a magnetic circuit for X direction (thrust generation) Means). In this embodiment, the same energization control is performed on the X driving coils CXA and CXB, so that two thrusts in the X direction are generated, and the thrust in the X direction (driving force) is generated by the interaction of these thrusts. The movable stage 61 can be translated in the X direction.

  Further, only one X driving coil CX may be used. In that case, the X driving coil CX is preferably arranged at a position overlapping the X axis when viewed in the Z direction.

  In the above embodiment, the driving coil is provided on the movable stage (movable member), and the permanent magnet is provided on the fixed yoke (fixed base member). In the stage apparatus of the present invention, the driving coil can be provided on the fixed yoke (fixed base member), and the permanent magnet can be provided on the movable stage (movable member).

  14 and 15 show a sixth embodiment in which the drive coil is provided on the fixed yoke (fixed base member) and the permanent magnet is provided on the movable stage (movable member), which are shown in FIGS. 7 and 8. Sectional drawing cut | disconnected in the same position as the embodiment mentioned above is shown. The same members and members having the same functions as those in the embodiment shown in FIG. 1 to FIG.

  An X driving coil CXA1 ′ and a Z driving coil CZA1 ′ are fixed to the front fixed yoke 62, and an X driving is performed on the rear fixed yoke 63 at a position facing the X driving coil CXA1 ′ and the Z driving coil CZA1 ′. The coil CXA ′ and the Z driving coil CZA ′ are fixed. On the movable stage 61, an X direction magnet MX ′ is fixed between the X drive coils CXA1 ′ and CXA ′, and a Z direction magnet MZA ′ is fixed between the Z drive coils CZA1 ′ and CZA ′. ing. In the illustrated embodiment, at least one of the front and rear fixed yokes 62 and 63, in the illustrated embodiment, the X-direction hall element HX ′ is fixed to the air core region of the X drive coil CXA1 ′ of the rear fixed yoke 63, and the Z of the front fixed yoke 62 A Z-direction hall element HZA ′ is fixed to the air core region of the drive coil CZA ′. Although not shown, each pair of Y driving coils is fixed to the front and rear fixed yokes 62 and 63 so as to face each other, and Y is placed in one air core region of one Y driving coil facing in the front-rear direction. A direction Hall element is fixed, and a Y-direction magnet is fixed to the movable stage 61 between the opposing Y driving coils.

  The movable stage 61 floats, translates and tilts in the levitating state by controlling the energization of the X driving coils CXA1 ′, CXA ′, the Z driving coils CZA1 ′, CZA ′ and the Y driving coil (not shown). Then, it tilts while translating, and after further tilting, it translates in the tilted state.

  In the sixth embodiment, all the driving coils and Hall elements are fixed to the front and rear fixed yokes 62 and 63, which are fixed base members, and the driving magnet is fixed to the movable stage 61, which is a movable member. Since the number of FPCs drawn out from the movable stage 61 is reduced and the load on the movable stage 61 due to the FPC is reduced, the responsiveness of the movable stage 61 is improved and it can be driven with high accuracy. A mode in which the driving coil and the Hall element are fixed to the front and rear fixed yokes 62 and 63 and the driving magnet is fixed to the movable stage 61 can be applied to all the embodiments.

  In the above embodiment, the first direction is the Z direction (Z axis) parallel to the optical axis O, and the second and third directions are the X direction (X axis) orthogonal to the Z direction (Z axis), In the present invention, the first direction may not be parallel to the optical axis O, and the first, second, and third directions may not be orthogonal to each other. It can be in any direction. The thrust generation means (thrust control means) may generate thrust in only one direction.

  In the first to fourth embodiments described above, the hall elements are provided in the air core regions of the left and right X driving coils CX as the X direction position detecting means. You may provide only in an air core area | region. Although the Hall element is provided in the air core region of the driving coil, it may be provided outside the driving coil. The Hall element detects the magnetic force of the driving magnet. A permanent magnet for detection may be provided to detect the magnetic force of the magnetic force detection magnet. Instead of the Hall element, another magnetic sensor may be used.

  The digital camera 10 equipped with the stage device 60 according to the present embodiment has a subject contrast detection unit 35 that controls the subject contrast while the AF unit 22 drives the focus adjustment optical system of the photographing lens 101 in the optical axis direction as an automatic focus adjustment function. And a focus detection automatic focus adjustment function for adjusting the focus by detecting an in-focus state where the contrast reaches a peak. The digital camera 10 according to the present invention allows the stage device 60 to finely adjust the focus by moving the image sensor 31 slightly forward / backward (translation) in the optical axis direction in the automatic focus adjustment operation in addition to the camera shake correction. It is also possible to detect the peak of contrast. Furthermore, the digital camera 10 of the present invention can easily perform special photography such as tilt photography in which the image sensor 31 is tilted by the stage device 60 and composition adjustment to tilt, pan, and roll.

The present invention can be applied to various optical devices such as so-called mirrorless digital cameras, single-lens digital cameras, compact digital cameras, digital video cameras, interchangeable lens barrels, camera-integrated lenses, and the like.
The present invention can also be applied to projectors, laser scanners, and the like that project video, data, and the like in addition to imaging devices. In the case of a projector, projection light is incident on the approximate center of the movable stage 61 of the stage apparatus from one side (rear side) of the movable stage 61 in the thickness direction (first direction, Z direction), and the other side ( An image forming element (liquid crystal panel) that is emitted toward the front projection optical system or a projection light beam that is incident on the approximate center of the movable stage 61 from a direction different from the first direction (Z direction) DMD (digital mirror device, digital micromirror device) panel that reflects in the direction (projection optical system direction) can be mounted. The movable stage 61 may be equipped with a projection optical system instead of the image forming element.

  FIG. 16 shows an outline of an embodiment of an image projection apparatus (projector) provided with a stage apparatus 60 having a movable stage 61. This embodiment includes a light source 81, an illumination optical system 82 that uniformizes the light emitted from the light source 81, an image forming element 83 that receives the illumination light emitted from the illumination optical system 82 and forms an image, and the image A movable stage 61 having a forming element 83 fixed in the opening 61c and a projection optical system 84 for projecting an image formed by the image forming element 83 are provided. Specifically, the image forming element 83 is a liquid crystal panel or a DMD panel. The image forming element 83 is provided in the housing of the projector or the projection optical system 84 via the movable stage 61, and the image forming element 83 is in a state where the movable stage 61 is not driven (held in the initial position). The plane on which the image is formed is arranged in the projector so as to be perpendicular to the optical axis O of the projection optical system 84 or the optical axis of any lens in the projection optical system 84. . The movable stage 61 is translated in the optical axis O direction (first direction), the second or third direction, or tilted around the first, second, or third direction, and the like, thereby causing the image forming element 83 to move. The projection direction and projection position can be adjusted by changing the direction of the projection light beam that passes through the (liquid crystal panel) and travels toward the projection optical system 84, or the direction of the projection light that reflects off the DMD panel and travels toward the projection optical system 84. The tilt of the image can be adjusted, or the focus can be adjusted by adjusting the distance between the liquid crystal panel or DMD panel and the projection optical system.

  The present invention can also be applied to a lens barrel (Japanese Patent Laid-Open No. 2015-4769) having a correction optical system that drives one of the optical elements of the photographing optical system as a correction optical element. For example, in the photographing lens 101, one or a plurality of optical elements constituting the photographing optical system can be used as a correction optical element (driven member). In this embodiment, a lens between the first lens group 91 and the second lens group 93 is used as a driven member (correcting optical element) 92 (FIG. 17). In the case of this embodiment, the correction optical element 92 is mounted in the opening 61 c formed at the approximate center of the movable stage 61. According to this embodiment, the movable stage (correcting optical element 92) 61 is translated in the optical axis O direction (first direction), the second or third direction, or the first, second, or third direction. By tilting around, special shooting such as camera shake correction and tilt shooting is possible. Furthermore, in this embodiment, focusing fine adjustment is possible by moving the movable stage (correcting optical element 92) 61 in the optical axis O direction (first direction).

  The digital camera 10 of the present invention can also perform a camera shake correction operation or a special shooting operation by cooperating a camera shake correction device mounted on a photographing lens and a camera shake correction device on the camera body 11 side.

10 Digital camera 11 Camera body 20 Body CPU (calculation means, position detection means, thrust control means)
21 Camera operation unit 22 AF unit 23 Exposure control unit 24 Lens communication unit 30 Imaging unit 31 Imaging element (driven member)
32 Image processing unit 33 Image display unit (monitor)
34 Memory card 35 Contrast detector 41 Anti-vibration control circuit 42 Actuator drive circuit 43 Position detection circuit 44 Camera shake detection circuit 60 Stage device 61 Movable stage (movable member)
61a Image sensor mounting hole 61b Reflection area 62 Front fixed yoke (base member)
62a Opening 63 Rear fixed yoke (base member)
63a Opening 71a 71b 71c Piezoelectric element (thrust generating means, first thrust generating means, thrust control means)
72a 72b 72c Expansion / contraction variable member 101 Shooting lens CX CXA CXB CXA 'CXA1' X driving coil (driving coil, thrust generating means, second thrust generating means, thrust control means)
CYA CYB Y drive coil (drive coil, thrust generating means, third thrust generating means, thrust control means)
CZA CZB CZC CZA 'CZA1' Z driving coil (driving coil, thrust generating means, first thrust generating means, thrust control means)
HX HX 'Hall element for X direction (position detection means)
HYA HYB Hall element for Y direction (position detection means)
HZA HZB HZC HZA 'Hall element for Z direction (position detection means)
MX MX1 X direction magnet (thrust generating means, second thrust generating means)
MYA MYB MYA1 MYB1 Y direction magnet (thrust generating means, third thrust generating means)
MZA, MZB, MZC MZA1, MZB1, MZC1 MZA 'Z-direction magnet (thrust generating means, first thrust generating means)
PZA PZB PZC Photo reflector (Position detection means)

Claims (27)

A movable member to which an image sensor on which a subject image is projected by a photographing optical system is fixed;
A base member for holding the movable member so as to be relatively movable; and a thrust generating means for generating thrust in a plurality of directions acting on the movable member;
The thrust generation means includes a first direction parallel to the optical axis of the imaging optical system, relative to the base member, by moving the movable member relative to the base member by an interaction of a thrust in one direction or a plurality of directions. Generating a thrust that translates in different first, second, and third directions and a thrust that tilts about the first, second, and third directions;
An imaging apparatus characterized by the above. The imaging apparatus according to claim 1,
The second and third directions are orthogonal to the first direction and orthogonal to each other,
The thrust generating means generates first thrust generating means for generating thrust in the first direction, second thrust generating means for generating thrust in the second direction, and thrust in a third direction. And a third thrust generating means
At least one of the second and third thrust generating means includes at least a pair separated from each other in the third direction or the second direction, and one of the second or third pair of thrust generating means is generated. An imaging apparatus that translates the tilting of the movable member in the second direction or the third direction and tilts the first direction by the interaction of a pair of thrust forces in the second direction or the third direction. The imaging apparatus according to claim 2, wherein
The other of the second and third thrust generating means consists of a pair arranged in a symmetrical position with the optical axis in between, in the second direction generated by the second and third pair of thrust generating means. An imaging device that translates the movable member in a second direction or a third direction by an interaction of a pair of thrusts or a pair of thrusts in a third direction. The imaging apparatus according to claim 2, wherein
The other of the second and third thrust generating means is a pair separated in the second direction or the third direction, and the second of the second and third thrust generating means is generated by the second. An imaging device that translates the movable member in a second direction or a third direction by the interaction of a pair of thrusts in a direction or a pair of thrusts in a third direction. The imaging device according to any one of claims 2 to 4,
A plurality of the first thrust generating means are arranged at different positions with the optical axis as a center, and the movable is generated by the interaction of a plurality of thrusts in the first direction generated by the first thrust generating means. An imaging apparatus that translates a member in a first direction, tilts around a second direction, and tilts around a third direction. The imaging device according to claim 5.
An imaging apparatus in which at least one thrust generating means for generating thrust in the first direction is disposed between the second or third pair of thrust generating means. The imaging device according to claim 5 or 6,
An imaging apparatus in which the center of gravity of the first thrust generating means coincides with the center of gravity of the movable member. The imaging device according to any one of claims 5 to 7,
The first thrust generating means, when viewed from the optical axis direction, a line connecting any two of them is parallel to the second direction or the third direction, and a line connecting the two; An imaging apparatus in which a perpendicular line drawn from the other one to a line connecting the two is arranged so as to be parallel to the third direction or the second direction. 9. The imaging apparatus according to claim 1, wherein the thrust generation unit includes a driving coil fixed to one of the base member and the movable member, and a permanent magnet fixed to the other. 9. apparatus. The imaging apparatus according to claim 9, wherein
The base member includes a front fixed yoke and a rear fixed yoke that face the movable member from the front and the rear in the first direction, respectively.
Each of the thrust generating means includes a driving coil and a permanent magnet,
The driving coil is fixed to the movable member or at least one of the front fixed yoke and the rear fixed yoke, and the permanent magnet is fixed to at least one of the front fixed yoke and the rear fixed yoke or the movable member. Imaging device. The imaging device according to claim 9 or 10,
Each said thrust generation means is an imaging device which hold | maintains the said movable member in the floating state with respect to the said front and back fixed yoke by interaction of the said thrust of several directions. The imaging device according to any one of claims 9 to 11,
The second thrust generating means and the third thrust generating means have permanent magnets fixed to the front and rear fixed yokes, and different magnetic poles are opposed to the permanent magnets fixed to the front and rear fixed yokes. Imaging device. The imaging device according to any one of claims 9 to 12,
The first thrust generating means has a permanent magnet fixed to the front and rear fixed yokes and a driving coil fixed to the movable member, and the permanent magnets fixed to the front and rear fixed yokes have the same magnetic pole. Opposing imaging device. The imaging device according to any one of claims 9 to 12,
The first thrust generating means includes piezoelectric elements that are provided at a plurality of positions between the movable member and the imaging element and extend and contract in a first direction in which the imaging element contacts and separates from the movable member. Including imaging device. The imaging device according to any one of claims 9 to 14,
A plurality of position detecting means for detecting relative positions of the movable member with respect to the base member at a plurality of different positions of the movable member; and a detection result of the plurality of position detecting means based on a detection result of the movable member with respect to the base member. An imaging apparatus further comprising: translation positions in the first, second, and third directions; and a calculation unit that calculates the tilt positions around the first, second, and third directions. The imaging device according to claim 15, wherein
The position detecting means includes an air core region of the driving coil that generates the thrust in the first direction, an air core region of the driving coil that generates the thrust in the second direction, and a thrust in the third direction. A magnetic sensor provided in an air core region of the generated driving coil, wherein the computing means is in first, second and third directions of the movable member with respect to the base member according to a detection signal of the magnetic sensor; An image pickup apparatus that calculates the translation position of and the tilt position about the first, second, and third directions. The imaging device according to claim 15, wherein
The plurality of position detecting means includes a plurality of sets of light emitting elements and light receiving elements provided on one of the movable member and the fixed yoke, and the arithmetic means emits light from the light emitting means and the fixed yoke or the movable member. The detection position of the light receiving element that has received the detection light reflected at the position of the movable member relative to the base member in the first, second, and third directions, and the first, second, and third directions. An imaging device that calculates the tilt position of the camera. A base member;
A movable member movable relative to the base member;
A thrust generating means for generating thrust in a plurality of directions acting on the movable member,
The stage is characterized in that the movable member can translate, tilt, or translate and tilt relative to the base member by the interaction of the thrust in one direction or the thrust in a plurality of directions. apparatus. The stage apparatus according to claim 18, wherein
The thrust generating means includes first, second and third thrust generating means for applying thrusts in different first, second and third directions to the movable member,
The movable member moves in the first to third directions relative to the base member by the interaction of the first to third thrusts generated by the first to third thrust generating means. A stage device capable of translation, tilting around the first to third directions, translation during tilting, and translation after tilting. The stage device according to claim 18 or 19,
A stage device in which the movable member is held in a non-contact state with respect to the base member by the interaction of thrusts in a plurality of directions of the thrust generating means. The stage apparatus according to any one of claims 18 to 20,
A plurality of position detecting means for detecting a relative position of the movable member with respect to the base member at a plurality of different positions of the movable member; and a detection result of the plurality of position detecting means based on a detection result of the movable member with respect to the base member. A stage apparatus further comprising: a calculation unit that calculates a relative position in the first, second, and third directions and a tilt position about the first, second, and third directions. The stage device according to any one of claims 18 to 21,
A stage device in which a driven member is mounted on the movable member. The stage apparatus according to any one of claims 18 to 22,
The stage member is an image forming element or a projection optical system in which the driven member receives light from a light source to form a projection image. The stage device according to claim 23, wherein
The image forming element is a liquid crystal panel that transmits a light beam emitted from the light source toward a projection optical system, wherein the first direction is parallel to the optical axis of the projection optical system. The stage apparatus according to claim 23,
The image forming element is a DMD panel that reflects a light beam emitted from a direction different from the first direction toward the projection optical system, and the first direction is an optical axis of the projection optical system. Stage device that is parallel. A base member;
A movable member movable relative to the base member;
A thrust control means for controlling a thrust in one direction or a thrust in a plurality of directions acting on the movable member,
The movable member can be translated, tilted, or translated and tilted relative to the base member by the interaction of one-way thrust or a plurality of thrusts controlled by the thrust control means. A stage device. A projection optical system for projecting an image;
A movable member to which an image forming element on which the image is formed is fixed;
A base member for holding the movable member in a relatively movable manner;
Thrust generating means for generating thrust in a plurality of directions acting on the movable member,
The thrust generating means includes a first direction parallel to the optical axis of the projection optical system relative to the base member relative to the base member by the interaction of one-way thrust or a plurality of thrusts. Generating a thrust that translates in different first, second, and third directions and a thrust that tilts about the first, second, and third directions;
An image projection apparatus characterized by the above.

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