JP6888281B2 - Stage device, image projection device and image pickup device equipped with the stage device - Google Patents

Description

The present invention relates to a stage device capable of accurately detecting the position of a movable movable member, an image projection device provided with the stage device, and an image pickup device.

Conventionally, in a single-lens reflex camera, in order to perform camera shake correction, an image is taken using a drive means using a bale-shaped planar drive coil and a permanent magnet as an in-body camera shake correction device that drives an image sensor in the camera body. Image stabilization that drives the element in the X direction (X-axis direction) and Y direction (Y-axis direction) orthogonal to the optical axis, and further drives the image sensor in the Z direction (Z-axis direction), which is the optical axis direction, by a piezoelectric actuator. The device is known (Patent Document 1).
In a conventional camera shake correction device, in order to detect the positions in the X and Y directions in a plane orthogonal to the optical axis of the image sensor (optical axis orthogonal plane) and the rotation angle in the same plane, the drive coil is empty. A position detecting means in which one hall sensor is provided in the core region is known.

Japanese Unexamined Patent Publication No. 2012-226205

However, when the image sensor moves in the Z direction, when the position in the Z direction changes, the distance between the Hall sensor and the magnet changes, the magnetic flux density changes, and the output of the Hall sensor changes. It was difficult to detect accurately and with high accuracy. Further, when the position changes in the X and Y directions, it is difficult to accurately detect the position in the Z direction with high accuracy.

The present invention has been made based on the above awareness of the problem, and is a stage device capable of accurately detecting the position of the movable member even if the movable member is translated or tilted, an image projection device and an imaging device provided with this stage device. The purpose is to get.

In the present invention, a base member, a movable member that is relatively movable with respect to the base member, and a plurality of thrusts that exert different thrusts in the first, second, and third directions on the movable member. A stage device including a generating means and a position detecting means for detecting a translational direction position and a tilting position of the movable member with respect to the base member, wherein the thrust generating means is the first, second, and third generation means. The movable member is levitated relative to the base member by the interaction of thrusts in the directions, translated in the first, second and third directions in the levitated state, tilted in each of the directions, and during tilting. The first, second and third thrust generating means capable of translating and tilting after translation and tilting after translation are provided, and the first, second and third thrust generating means are the movable member. It is provided with a coil fixed to one of the base members and a permanent magnet fixed to the other, and the position detecting means is a permanent magnet fixed to one of the movable member and the base member and fixed to the other. A pair of second units are provided with magnetic sensors arranged in the air core region of the coil, and the magnetic sensors are fixed in the air core region of the coil of the second thrust generating means in a second direction at predetermined intervals. And a pair of third-direction magnetic sensors fixed in the third direction at predetermined intervals in the air-core region of the coil constituting the third thrust generating means. The position detecting means translates the movable member in the second and third directions with respect to the base member by the signals detected by the pair of second-direction magnetic sensors and the pair of third-direction magnetic sensors. It is characterized by detecting a position and a tilting position in the first direction.

It said first thrust generating means comprises a plurality of first thrust generating means for generating a thrust in a first direction, the movable member, the interaction of the thrust of the plurality of first direction, the movable relatively member relative to the base member, levitation, the first direction translating different directions around the tilt to the first direction, the translation in the tilt, translational and tilting after the translation after the tilting It is possible, and the position detecting means is the first in the air core region of the coil forming the permanent magnet fixed to one of the movable member and the base member and the first thrust generating means provided on the other. A pair of magnetic sensors for the first direction for detecting the magnetic force of the permanent magnet, which are fixed at predetermined intervals in the direction of the above, and a pair of detection signals detected by the pair of magnetic sensors for the first direction are used. It is practical to detect the translational position in the first direction and detect the tilting position in the second and third directions by a plurality of pairs of detection signals.

Said second thrust producing means third thrust generating means is above a first direction to generate a second direction different from the thrust of the third directions, the first and the second and third thrust generating means, the interaction of thrust of the first direction of thrust and the second direction of the thrust and the third direction, the first, second and third direction translation, first, 2 and the third direction about the tilting, the translation of being tilted, is Rukoto is tilted after translation and the translation after tilting preferred.

At least one of the thrust generating means in the second direction and the thrust generating means in the third direction is composed of a plurality, and the movable member is formed by the interaction of the thrusts in the plurality of second or third directions. It can tilt in one direction.
At least one of the pair of second-direction magnetic sensors and permanent magnets and the pair of third-direction magnetic sensors and permanent magnets is composed of a plurality of the plurality of pairs of second- or third-direction magnetic sensors. The tilt position in the first direction can be detected by the detection signal of.

The movable member is in non-contact with the base member in the floating state.
A thin driven member having a flat front surface is fixed to the movable member, and the direction orthogonal to the front surface is the first direction, and the second and third directions are the first direction. The direction is parallel to the front surface orthogonal to each other.

The base member includes front and rear fixed yokes facing each other from the front and back of the movable member, and the first, second and third thrust generating means are fixed to one of the movable member and the front and rear fixed yokes. It has a plurality of drive coils and a plurality of permanent magnets fixed to the other, and the pair of magnetic sensors are arranged in the air core region of each drive coil, and the permanent magnets fixed to the other are arranged. It can be configured to detect magnetic force.

In the first thrust generating means , the driving coil and the permanent magnet are outside the driven member, and are substantially circumferentially spaced from the first direction passing through the center of the plane of the driven member. It is preferable to arrange them at at least three places at equal intervals.

The drive coil of the first thrust generating means is a circular planar drive coil fixed to the movable member, and each pair of first directional magnetic sensors is of the drive coil. It can be arranged in the air core region in the first direction at predetermined intervals.

The driving coil of the first thrust generating means is a circular planar driving coil fixed to the front and rear fixed yokes, and the pair of first directional magnetic sensors are the front and rear magnetic sensors. It can be arranged in the air core region of the drive coil fixed to the fixed yoke.

It is preferable that the permanent magnets of the first thrust generating means are arranged so that the same poles face the front and rear fixed yokes.

The position detecting means is a sum signal of two detection signals of the plurality of pairs of magnetic sensors for the first direction arranged in the air core region of the driving coil of the first thrust generating means and the two detection signals. It is preferable to detect the position of the movable member in the first direction and the tilting position in the second or third direction by the quotient of the difference signal.

The driving coils and permanent magnets of the second and third thrust generating means are arranged outside the driven member, and the second thrust generating means is orthogonal to the second direction. It has a flat drive coil that is long in the direction, and the permanent magnets that face each of the drive coils are two plate-like plates that extend parallel to the longitudinal direction of the drive coil and are separated in the lateral direction. The third thrust generating means composed of a permanent magnet has a planar driving coil long in a direction orthogonal to the third direction, and the permanent magnet facing each driving coil is for driving. The pair of second and third directional magnetic sensors, each of which consists of two plate-shaped permanent magnets extending parallel to the longitudinal direction of the coil and separated in the lateral direction, are the second and third directional magnets. It can be arranged at predetermined intervals in the lateral direction in the air core region of the driving coil of the thrust generating means.

The position detecting means detects the second directional position by the sum signal of the detection signals of the pair of second directional magnetic sensors, and the second directional position is detected by the sum signal of the detection signals of the pair of third directional magnetic sensors. It is preferable to detect the directional position of 3.

At least one of the second and third thrust generating means is composed of a pair separated in a direction orthogonal to the second or third direction, and is a driving coil of the pair of second or third thrust generating means. A pair of second or third directional magnetic sensors are arranged in the air core region, and the position detecting means is a sum signal of the detection signals of one pair of second or third directional magnetic sensors. It is preferable to detect the tilt position in the first direction by the sum signal of the detection signals of the other pair of second or third magnetic sensors for the direction.

The driving coil and the magnetic sensor may be provided on the movable member, and the permanent magnets may be provided on the front and rear fixed yokes.

The drive coil is provided so as to face the front and rear fixed yokes, the magnetic sensor is provided in the air core region of one of the front and rear fixed yokes, and the permanent magnet is provided on the movable member. You may.

In the stage device of the present invention, the driven member can be an image pickup element on which a subject image is projected by a photographing optical system.

The first direction is parallel to the optical axis of the photographing optical system, and the second and third directions can be set to be orthogonal to each other and orthogonal to the first direction.

As the driven member, through a projection optical system receives light from the light source can be mounted an image forming device for projecting an image.

The image forming element is a liquid crystal panel that transmits a light beam emitted from a side opposite to the projection optical system toward the projection optical system, and the first direction is parallel to the optical axis of the projection optical system. can do.

The image forming element is a DMD panel that reflects light emitted from a direction different from the first direction toward the projection optical system, and the first direction is the optical axis of the projection optical system. Can be parallel.

The present invention is characterized in that, in the aspect of the image projection device, the stage device, the projection optical system for projecting an image, and the projection optical system are fixed to the movable member of the stage device .

The present invention is characterized in that, in the aspect of the image pickup device, the stage device and an image pickup element for capturing a subject image projected by a photographing optical system are provided, and the image pickup device is fixed to the movable member. And.

The stage device of the present invention can accurately detect at least one of the translation direction position and the tilt position of the movable member with respect to the base member even if the movable member is translated, tilted, tilted during translation, and translated after tilting.
The image projection device provided with the stage device of the present invention can accurately adjust the projection direction of the image with high accuracy.
The image pickup device provided with the stage device of the present invention can accurately and highly accurately adjust the position and tilt angle of the image pickup device in the direction orthogonal to the optical axis.

It is a block diagram which shows the main component of the digital camera which carries the image pickup apparatus equipped with the stage apparatus of this invention. FIG. 2A is a rear view showing an embodiment of an imaging device including a stage device having 6 degrees of freedom of the present invention, the right half is a view showing the rear yoke and the movable stage excluded, and FIG. 2B is IIB of FIG. 2A. -It is a cross-sectional view along the IIB cutting line. It is sectional drawing which shows the one X drive part of FIG. 2B enlarged. FIG. 2 is an enlarged cross-sectional view taken along the IV-IV cutting line of FIG. 2A. It is a rear view which shows the movable stage alone. It is a rear view which shows the other embodiment of the movable stage. It is an enlarged sectional view which shows one X drive part of still another Embodiment of the stage apparatus of this invention. It is an enlarged sectional view which shows the Z drive part of the same other embodiment. It is sectional drawing corresponding to FIG. 2B which shows the embodiment of the aspect of the image projection apparatus of this invention. It is sectional drawing corresponding to FIG. 2B which shows the embodiment which applied this invention to the camera shake correction apparatus of a photographing lens.

Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 8. FIG. 1 is a conceptual diagram showing the main components and main circuit elements of a digital camera equipped with an image pickup device equipped with the stage device of the present invention in blocks. In the figure, in the present embodiment, one direction parallel to the optical axis O of the photographing optical system is the first direction (Z direction, Z axis direction), and one direction orthogonal to the first direction is the second direction. One direction orthogonal to both the direction (X direction, X-axis direction), the first direction, and the second direction is defined as the third direction (Y direction, Y-axis direction). For example, assuming that the X-axis, Y-axis, and Z-axis are the coordinate axes of a three-dimensional Cartesian coordinate system, when the optical axis O is the Z-axis, the axes in two directions orthogonal to the Z-axis and orthogonal to each other are the X-axis. And Y-axis. When the camera is in the normal position (horizontal position), the first direction (Z direction, Z axis, optical axis O) and the second direction (X direction, X axis) are horizontal and the third direction (Y). The direction (Y-axis) shall be vertical, and the subject direction shall be front and front. Further, in the present specification, tilting or rotating in the first direction means tilting or rotating around a virtual axis parallel to the first direction. Similarly, tilting or rotating in the second direction means tilting or rotating around a virtual axis parallel to the second direction, and tilting or rotating in the third direction means tilting or rotating in the third direction. It means tilting or rotating around a virtual axis parallel to the direction of.

The digital camera 10 includes a camera body 11 and a photographing lens 101 as a photographing optical system. The camera body 11 includes a body CPU 20 that controls, calculates, and drives the functions of the entire camera, and an image pickup block 30 having an image pickup element 31 that captures a subject image projected by the photographing lens 101. The body CPU 20 drives and controls the image sensor 31, processes the captured image signal in the image processing unit 32, displays the captured subject image on the image display unit (monitor) 33, and stores the image data of the captured subject image in a memory. Write to card 34.

The digital camera 10 includes a contrast detection unit 35 that detects the contrast of a subject from an image signal processed by the image processing unit 32, a camera operation unit 21 that has a switch for the photographer to operate all the functions of the camera, and a photographing lens 101. The AF unit 22, the aperture, the shutter, etc., which adjust the focal length by driving the focal length adjustment optical system (not shown) in the optical axis direction, are opened and closed to adjust the amount of incident light on the image pickup element 31 and drive the image pickup element 31. It includes an exposure control unit 23 that controls image pickup, and a lens communication unit 24 that communicates with the photographing lens 101 and inputs the focal length of the photographing lens 101 and the like.

The digital camera 10 has roll (tilt (rotation) in the Z direction) detection unit GSα, pitch (tilt (rotation) in the X direction) detection unit GSβ, as detection means for detecting camera shake (vibration) of the camera body 11. Yaw (tilt (rotation) in the Y direction) detection unit GSγ, X direction acceleration detection unit GSX, Y direction acceleration detection unit GSY, and Z direction acceleration detection unit GSZ are provided, and these are connected to the camera shake detection circuit 44. .. Each of these detection means is formed by, for example, a 6-axis sensor, or a 3-axis gyro sensor and a 3-axis acceleration sensor.

The image pickup block 30 includes an image pickup element 31 and a stage device 60 that supports the image pickup element 31. The stage device 60 includes a movable stage 61 on which the image sensor 31 is mounted, a front fixed yoke 62 and a rear fixed yoke 63 located in front of and behind the movable stage 61, and the movable stage 61 is mounted on the front and rear fixed yokes 62 when energized. , 63 can be floated (floated against gravity and kept in a stationary state (floating stationary state)). The image sensor 31 constitutes a thin driven member having a flat front surface. The stage device 60 translates the floating movable stage 61 in the Z direction (first direction), in the X direction (second direction) orthogonal to the Z direction, and in the Y direction orthogonal to both the Z direction and the X direction. (Third direction) Translation, tilt (rotation) around the X direction (second direction), tilt (rotation) around the Y direction (third direction), and tilt around the Z direction (first direction). (Rotation) (movement of 6 degrees of freedom, movement of 6 axes) is possible. Further, the movable stage 61 of the stage device 60 is capable of moving by combining a plurality of translations and tilts of these six degrees of freedom, translation during tilting, translation after tilting, and tilting after translation (see FIGS. 2 to 5). ). "Translation" means moving straight ahead without changing the orientation and tilt of the image plane (imaging plane of the image sensor 31) with respect to the camera body, and "tilt" means the orientation or tilt of the image plane with respect to the camera body. It is a movement that changes the inclination, and includes rotating the image plane in the Z direction (the optical axis O or the virtual axis parallel to the optical axis O). “Floating” means holding the movable stage 61 between the front fixed yoke 62 and the rear fixed yoke 63 in a non-contact manner, and the movable stage 61 is held at the center position where the center of the imaging surface of the image sensor 31 intersects the optical axis O (imaging). This is a concept including a case where the front fixing yoke 62 and the rear fixing yoke 63 are held in non-contact with each other at the initial position).

The body CPU 20 inputs focal length f information from the photographing lens 101 via, for example, the lens communication unit 24, and pitch (tilt (rotation) in the X direction) detection unit GSβ, yaw (tilt (rotation) in the Y direction). ) Digital camera 10 based on the detection signals of the detection unit GSγ, the roll (tilt (rotation) in the Z direction) detection unit GSα, the X direction acceleration detection unit GSX, the Y direction acceleration detection unit GSY, and the Z direction acceleration detection unit GSZ. The blur direction, blur speed, etc. are calculated, and the direction, drive speed, drive amount, etc. for driving the image pickup element 31 are calculated so that the subject image projected on the image pickup element 31 does not move relative to the image pickup element 31. Based on the calculation result, the stage device 60 is translated, tilted, translated during tilting, translated after tilting, and tilted after translation. The order of these operations does not matter.

The stage device 60 functions as a support member for holding the movable stage 61 to which the image sensor 31 is fixed with respect to the front fixed yoke 62 and the rear fixed yoke 63 in translation, tilting, translation during tilting, and translational freedom after tilting. To do. The movable stage 61 is a rectangular plate (frame) -shaped member larger than the image sensor 31 when viewed from the front. The front fixed yoke 62 and the rear fixed yoke 63 are composed of rectangular plate (frame) -shaped members having the same shape whose outer shape is slightly larger than that of the movable stage 61 in a plan view, and are respectively in the central portion in a front view (viewed from the Z direction). ), Rectangular openings 62a and 63a larger than the outer shape of the image sensor 31 are formed. The front fixed yoke 62 and the rear fixed yoke 63 are connected by a plurality of connecting columns (not shown) at positions where the movable stage 61 does not interfere with each other even if the movable stage 61 moves (translates, tilts, rotates) within a predetermined range, and is parallel and at a predetermined interval. It is being held.

The rear surface of the front fixed yoke 62 (the surface opposite to the subject side) is located at least on the left and right (X direction) of the opening 62a with the Y axis as the center line and on both sides of the left and right sides in the illustrated embodiment. In the embodiment, an X-direction magnet (second-direction magnet) MX1 composed of a pair of left and right permanent magnets having the same specifications is fixed. A pair of X-direction magnets MX2 having the same specifications as the pair of X-direction magnets MX1 are fixed to the front surface (the surface on the subject side) of the rear fixing yoke 63 so as to face the pair of X-direction magnets MX1. .. The left and right magnets MX1 and MX2 for the X direction are each long in the Y direction and thin in the Z direction, and are arranged in pairs parallel to the Y axis and separated in the X direction. In both the pair of left and right X-direction magnets MX1, one (left side) magnet in FIG. 2B has an S pole on the front surface (the surface on the front fixed yoke 62 side) and an N pole on the rear surface, and the other (right side) magnet is the front surface. Is the north pole and the rear surface is the south pole. The pair of left and right X-direction magnets MX2 have magnetic poles different from those of the opposite X-direction magnets MX1 facing the X-direction magnet MX1. Then, the front fixing yoke 62 and the rear fixing yoke 63 pass the magnetic fluxes of the X direction magnets MX1 and MX2, so that the X direction magnets MX1 and MX2 and the rear fixing yoke 63 face each other in the X direction (second). It constitutes a part of a magnetic circuit that generates thrust in the direction) (see FIG. 3). The X-direction magnet MX serves as a levitation means for holding the movable stage 61 in the central position (initial position) regardless of the posture of the camera body 11, for example, even in vertical position shooting in which the grip of the camera body 11 is held up or down. It works (functions).

A pair of magnets with the same specifications as the Y-direction magnet MYA1 consisting of a pair of permanent magnets with the same specifications are located on the rear surface of the front fixing yoke 62 below the opening 62a with the Y-axis as the center line and away from the Z-axis. The Y-direction magnet MYB1 is fixed. A pair of Y-direction magnets MYA1 and MYB2 having the same specifications as the pair of Y-direction magnets MYA1 and MYB1 are fixed to the front surface of the rear fixing yoke 63 so as to face the pair of Y-direction magnets MYA1 and MYB1. .. These Y-direction magnets MYA1 and MYB1, and MYA2 and MYB2 are each composed of a pair of plate-shaped magnets that are long in the X direction and thin in the Z direction, and the pair of magnets are separated in the Y direction in parallel with the X axis. Are arranged. In both the pair of Y-direction magnets MYA1 and the pair of Y-direction magnets MYB1, the upper magnet in FIG. 2A has an S pole on one front and rear surface (front surface) and an N pole on the other surface (rear surface). One of the front and rear surfaces of the magnet on the side is the north pole, and the other surface (rear surface) is the south pole. The pair of Y-direction magnets MYA2 and MYB2 have magnetic poles different from the pair of Y-direction magnets MYA1 and MYB1 facing the pair of Y-direction magnets MYA1 and MYB1. Then, the front fixing yoke 62 and the rear fixing yoke 63 pass the magnetic fluxes of the Y direction magnets MYA1 and MYA2, the Y direction magnets MYB1 and MYB2, so that they pass between the Y direction magnets MYA1 and MYA2 and the Y direction magnets MYB1. A part of a magnetic circuit that generates a thrust in the Y direction (third direction) is formed between the and MYB2, respectively. The Y-direction magnets MYA1 and MYA2, and the Y-direction magnets MYB1 and MYB2 are levitated to hold the movable stage 61 in the center position (initial position), especially in the lateral position (normal position) shooting, regardless of the posture of the camera body 11. Acts (functions) as a means.

Further, on the rear surface of the front fixing yoke 62, Z-direction magnets MZA1, MZB1, and MZC1 made of permanent magnets are fixed at three places different from the X-direction magnets MX1, the Y-direction magnets MYA1 and MYB1 (). See FIG. 2A). Z-direction magnets MZA2, MZB2, and MZC2 are fixed to the front surface of the rear fixing yoke 63.

The Z-direction magnets MZA1, MZB1, MZC1, MZA2, MZB2, and MZC2 have a rectangular plate shape in the front view, and the Z-direction magnets MZA1, MZB1, and MZC1 have S poles on the front surface (fixed yoke 62 contact surface) and S poles on the rear surface. It is fixed so as to have an N pole, and the Z-direction magnets MZA2, MZB2, and MZC2 are fixed so that the same magnetic poles as the Z-direction magnets MZA1, MZB1, and MZC1 face each other. The six Z-direction magnets MZA1, MZB1, MZC1 and the Z-direction magnets MZA2, MZB2, and MZC2 have the same aspect (specifications), and are substantially separated from each other by a predetermined length in a Z-axis orthogonal plane with the Z-axis as the center. They are evenly spaced. The front fixing yoke 62 and the rear fixing yoke 63 pass the magnetic fluxes of the Z direction magnets MZA1 and MZA2, MZB1 and MZB2, MZC1 and MZC2, so that the Z direction magnets MZA1, MZB1, MZC1 and Z direction magnets MZA2, MZB2, It constitutes a part of a plurality of magnetic circuits (thrust generating means, thrust controlling means) that generate a thrust in the Z direction (first direction) with the MZC2.

The movable stage 61 located between the front fixing yoke 62 and the rear fixing yoke 63 is a non-magnetic member integrally molded from a non-magnetic material by press molding. A front-view rectangular image sensor mounting hole 61a is bored in the central portion of the movable stage 61, and the image sensor 31 is fitted and fixed in the image sensor mounting hole 61a. The image sensor 31 projects forward from the image sensor mounting hole 61a in the optical axis O direction of the movable stage 61.

The image sensor 31 is arranged so that the long side is parallel to the X direction and the short side is parallel to the Y direction when the movable stage 61 is located at the initial position (initial position where the magnetic levitation is performed). And. When the movable stage 61 is in the initial position, the center of the image pickup surface of the image pickup element 31 is located on the optical axis O of the photographing lens 101, and the optical axes O and the Z axis coincide with each other. The Z direction (first direction), the X direction (second direction), and the Y direction (third direction) are relative to the camera body 11 and the photographing lens 101 whose Z direction coincides with or is parallel to the optical axis O. Although the direction will be described below as a constant direction, the direction may be constant with respect to the image pickup element 31.

A pair of X drive coils (X drive units) CX are fixed to the movable stage 61 so as to be located on the outer sides of both left and right sides (short sides) of the image sensor 31, and one side (short side) below the image sensor 31 is fixed. A pair of Y drive coil (YA drive unit) CYA and Y drive coil (YB drive unit) CYB are fixed to each other at a position below the long side (long side) and separated from each other to the left and right. The pair of X drive coils CX are vertically long in the Y direction, and are arranged at symmetrical positions (equal distances) across the Y axis so that the longitudinal direction is parallel to the Y direction, and overlaps with the X axis. The pair of Y drive coils CYA and CYB are horizontally long in the X direction and are arranged at symmetrical positions (equal distance from the Y axis) with the Y axis in between so that the longitudinal direction is parallel to the X direction. ing. This arrangement facilitates manufacturing, adjustment and control.

A circular Z drive coil (ZA drive unit) CZA is further fixed to the movable stage 61 so as to be located between the pair of Y drive coils CYA and CYB (intermediate position), and the pair of X drive coils CX A pair of circular Z drive coils (ZB drive unit) CZB and Z drive coil (ZC drive unit) CZC are fixed so as to be positioned above. The Z drive coil CZA is arranged on the Y axis, and the Z drive coils CZB and CZC are arranged symmetrically with respect to the Y axis (equidistant distance from the Y axis). The center of gravity of the Z drive coils CZA, CZB, and CZC (the center of gravity of the whole) substantially coincides with the center of gravity of the movable stage 61. Two of the Z drive coils CZA, CZB and CZC, in the illustrated embodiment, the line connecting the Z drive coils CZB and CZC and the perpendicular line drawn from the other one to the above line are parallel to the Y axis. (Or coincide with the Y axis). The arrangement of the Z drive coils CZA, CZB, and CZC is arbitrary, but the line connecting any two of them becomes parallel to the X-axis or the Y-axis, and the other one is lowered to the line connecting the two. It is preferable to arrange the vertical line so as to be parallel to the Y-axis or the X-axis. This arrangement facilitates manufacturing, adjustment and control.

In the pair of X drive coils CX and the pair of Y drive coils CYA, CYB and the three Z drive coils CZA, CZB, CZC, the coil wires are spirally wound a plurality of times in the XY plane, and the movable stage 61 It is a planar (thin) coil that is laminated a plurality of times in the plate thickness direction (Z direction) and is parallel to the optical axis orthogonal plane (XY plane).

The pair of X drive coils CX are arranged in such a manner that the longitudinal portions are parallel to the Y axis and the front and rear surfaces face each other between the corresponding X direction magnets MX1 and MX2, and the pair of Y drive coils CYA and CYB are longitudinal. The portions are arranged in a manner in which the front and rear surfaces face each other of a pair of Y-direction magnets MYA1 and MYA2, and MYB1 and MYB2, which are parallel to the X-axis and correspond to each other.

The above X drive coil (X drive unit) CX, Y drive coil (YA drive unit) CYA and Y drive coil (YB drive unit) CYB, Z drive coil (ZA drive unit) CZA, Z drive coil The (ZB drive unit) CZB and the Z drive coil (ZC drive unit) CZC are connected to the actuator drive circuit 42 and are energized and controlled via the actuator drive circuit 42.

The X-driving coil CX, the pair of X-direction magnets MX1 and the pair of X-direction magnets MX2 constitute a second thrust generating means (thrust controlling means) for generating thrust in the X direction (second direction). ing. The movable stage 61 can be translated in the X direction by the thrust in the X direction generated by the current control flowing through the X drive coil CX.

One Y drive coil CYA and each pair of Y direction magnets MYA1 and MYA2, and the other Y drive coil CYB and each pair of Y direction magnets MYB1 and MYB2 have thrusts in the Y direction (third direction). A pair of third thrust generating means (thrust controlling means) for generating the above-mentioned is configured. The movable stage 61 is translated in the Y direction and tilted (rotated) in the Z direction by the interaction of a pair of thrusts in the Y direction separated in the X direction generated by controlling the current flowing through the Y drive coil CYA and CYB. be able to.

The three Z drive coils CZA, CZB, and CZC are arranged between each pair of Z direction magnets MZA1 and MZA2, MZB1 and MZB2, and MZC1 and MZC2 so that the front and rear surfaces face each other, and are arranged in the Z direction (first). It constitutes three first thrust generating means for generating thrust in (direction). Three sets of Z-direction magnets MZA1, MZA2 and Z-drive coil CZA, Z-direction magnet MZB1, MZB2 and Z-drive coil CZB, and Z-direction magnet MZC1 separated from each other around the Z-axis when viewed in the Z direction. , MZC2 and Z drive coil CZC move the movable stage 61 to the front and rear fixed yoke 62 by the interaction of three Z direction thrusts generated by the current control flowing through the three Z drive coils CZA, CZB, and CZC. , 63 (3 pairs of Z-direction magnets MZA1 and MZA2, MZB1 and MZB2, MZC1 and MZC2), and in the floating state, translate in the Z direction, tilt in the X direction, and tilt in the Y direction. Can be made to.

Further, the movable stage 61 is levitated (neutral) to the initial position (center position) by the interaction of the thrusts in the X and Y directions generated by the current control of the X drive coil CX and the Y drive coil CYA and CYB. can do.

The movable stage 61 has a pair of Hall elements HX1 and HX2 (X position detection unit HX) for the X direction located in the air core region of the X drive coil CX, and the air core regions of the Y drive coils CYA and CYB, respectively. A pair of Y-direction Hall elements HYA1 and HYA2 (YA position detection unit HXA), HYB1 and HYB2 (YB position detection unit HYB), and a pair of Z drive coils CZA, CZB, and CZC located in the air core region. Hall elements for the Z direction HZA1 and HZA2 (ZA position detection unit HZA), HZB1 and HZB2 (ZB position detection unit HZB), and HZC1 and HZC2 (ZC position detection unit HZC) are fixed. The pair of Hall elements HX1 and HX2 for the X direction are arranged at predetermined intervals in the X direction (longitudinal direction) at substantially the center position of the X drive coil CX in the Y direction (short direction). The pair of Hall elements for the Y direction, HYA1 and HYA2, and HYB1 and HYB2, are arranged at predetermined intervals in the Y direction (short direction) at substantially the center position of the Y drive coils CYA and CYB in the X direction (longitudinal direction). There is. The pair of Z-direction Hall elements HZA1 and HZA2, HZB1 and HZB2, and HZC1 and HZC2 are arranged at predetermined intervals in the Z direction on the center lines of the Z drive coils CZA, CZB, and CZC.

Hall elements for the X direction HX1 and HX2 (X position detection unit HX), Hall elements for the Y direction HYA1 and HYA2 (YA position detection unit HXA), HYB1 and HYB2 (YB position detection unit HYB), Hall elements for the Z direction HZA1 HZA2 (ZA position detection unit HZA), HZB1 and HZB2 (ZB position detection unit HZB), and HZC1 and HZC2 (ZC position detection unit HZC) are connected to the position detection circuit 43.

The X-direction Hall elements HX1 and HX2 detect the magnetic force (magnetic flux of the X-direction magnetic circuit) of the corresponding X-direction magnets MX1 and MX2, and the X-direction position of the movable stage 61 (translational position in the X-direction) by the detection signal. The X-direction position detecting means (translational direction position detecting means) for detecting the above is configured.

The Y-direction Hall elements YA1 and HYA2 detect the magnetic force (magnetic flux of the Y-direction magnetic circuit) of the corresponding Y-direction magnets MYA1 and MYA2, and the Y-direction Hall elements HYB1 and HYB2 are the corresponding Y-direction magnets MYB1 and MYB2. (Magnetic flux of Y-direction magnetic circuit) is detected. Then, the Y-direction position and the Z-direction tilt position of the movable stage 61 are detected by the detection signals of both the Y-direction Hall elements HYA1 and HYA2 and HYB1 and HYB2. That is, each pair of Y-direction Hall elements HYA1 and HYA2, and HYB1 and HYB2 are the Y-direction position detecting means (translational direction position detecting means) for detecting the Y-direction position (translation direction position in the Y direction) of the movable stage 61. , The tilt position detecting means (tilting position detecting means) around the Z direction for detecting the tilting position of the movable stage 61 in the Z direction is configured.

Three pairs of Z-direction Hall elements HZA1 and HZA2, HZB1 and HZB2, HZC1 and HZC2 are the corresponding three pairs of Z-direction magnets MZA1 and MZA2, MZB1 and MZB2, MZC1 and MZC2 magnetic flux (magnetic flux of Z-direction magnetic circuit). Is detected. Then, based on the detection signals of the Z-direction Hall elements HZA1 and HZA2, HZB1 and HZB2, and HZC1 and HZC2 that form each pair, the Z-direction position, the X-direction tilt position, and the Y-direction tilt position of the movable stage 61 are used. Is detected. That is, each pair of Z-direction Hall elements HZA1 and HZA2, HZB1 and HZB2, and HZC1 and HZC2 are Z-direction position detecting means (translational direction) for detecting the Z-direction position (Z-direction translation direction position) of the movable stage 61. Position detecting means), tilting position detecting means (tilting position detecting means) around the X direction for detecting the tilting position of the movable stage 61 in the X direction, and Y direction for detecting the tilting position of the movable stage 61 in the Y direction. It constitutes a tilting position detecting means (tilting position detecting means) around it.

The above X drive coils CX, Y drive coils CYA and CYB, Z drive coils CZA, CZB, CZC, X direction hall elements HX (HX1, HX2), Y direction hall elements HYA (HYA1 and HYA2). ), HYB (HYB1 and HYB2), and Z-direction hole elements HZA (HZA1 and HZA2), HZB (HZB1 and HZB2), and HZC (HZC1 and HZC2) are mounted on a flexible printed circuit board FPC (not shown). , The flexible printed circuit board FPC extending from the movable stage 61 is electrically connected to each circuit such as the actuator drive circuit 42 and the position detection circuit 43 built in the camera body 11 (see FIG. 1).

The pair of X drive coils CX, the pair of Y drive coils CYA and CYB, and the three Z drive coils CZA, CZB and CZC are energized and controlled by the actuator drive circuit 42. The actuator drive circuit 42 is controlled by the body CPU 20 via the vibration isolation control circuit 41.

The position detection circuit 43 is a detection signal output by the X-direction Hall elements HX1 and HX2, the Y-direction Hall elements HYA1 and HYA2, HYB1 and HYB2, and the Z-direction Hall elements HZA1 and HZA2, HZB1 and HZB2, and HZC1 and HZC2. As a result, the movable stage 61 has an X-direction position, a Y-direction position, a Z-direction position, an X-direction tilt position (tilt (rotation) angle around the X-direction, a pitch angle), and a Y-direction tilt position (Y-direction tilt). (Rotation) angle, yaw angle), and tilt position around the Z direction (tilt (rotation) angle around the Z direction, roll angle) are detected.

The digital camera 10 sets the movable stage 61, that is, the X-direction position, the Y-direction position, the Z-direction position, the X-direction rotation tilt position, the Y-direction rotation tilt position, and the Z-direction rotation tilt position of the image sensor 31 in the following embodiments. To detect.
The position detection circuit 43 calculates and detects the position (movement amount) of the movable stage 61 in the X direction from the sum signal of the detection signals detected by the pair of Hall elements HX1 and HX2 for the X direction.

The position detection circuit 43 calculates the Y-direction position based on the sum signal of the detection signals detected by one pair of Y-direction Hall elements HYA1 and HYA2, and the other pair of Y-direction Hall elements HYB1 and HYB2 detects the position. The Y-direction position is calculated using, for example, a sum signal, and based on these two Y-direction positions separated in the X-direction, the Y-direction position (movement amount) of the movable stage 61 and the Z-direction rotation The tilt position (rotation amount) is detected by calculation.

Further, the position detection circuit 43 sets the Z-direction position, the X-direction tilt position, and the Y-direction tilt position of the movable stage 61 to three pairs of Z-direction Hall elements HZA1 and HZA2, HZB1 and HZB2, and HZC1 and HZC2. Using the signals detected by each of the above, the Z direction position is detected by calculation, for example, by the quotient of the sum signal of the pair of detection signals and the difference signal of the pair of detection signals. Then, the position detection circuit 43 determines the Z direction position (movement amount) of the movable stage 61, the tilt position (rotation amount) around the X direction, and the Y direction rotation based on the detected three different Z direction positions of the movable stage 61. The tilt position (rotation amount) of is detected by calculation.

In the above embodiment, the pair of X-direction Hall elements HX1 and HX2 for detecting the X-direction position of the movable stage 61 are provided at predetermined intervals in the X-direction, and the pair of Y-direction Hall elements HYA1 for detecting the Y-direction position are provided. Since the HYA2 is provided at predetermined intervals in the Y direction and the pair of Hall elements HYB1 and HYB2 for the Y direction are provided at predetermined intervals in the Y direction, the positions in the X and Y directions even if the movable stage 61 moves in the Z direction. The detection accuracy does not change.

Since three pairs of Z-direction Hall elements HZA1 and HZA2, HZB1 and HZB2, and HZC1 and HZC2 for detecting the Z-direction position of the movable stage 61 are provided at predetermined intervals in the Z direction, the movable stage 61 is provided in the X-direction and the Y-direction. Even if it moves or tilts, the Z-direction position detection accuracy does not deteriorate.

The above digital camera 10 can perform the following operations when performing a shooting operation. First, under the control of the body CPU 20, the movable stage 61 is moved forward by energizing a pair of X drive coils CX, a pair of Y drive coils CYA, CYB, and three Z drive coils CZA, CZB, and CZC. It is held (floated) in an initial position that is not in contact with other members such as the fixed yoke 62 and the rear fixed yoke 63.

After that, the digital camera 10 can perform the following drive control based on each position calculated by the body CPU 20 (position detection circuit 43) with the movable stage 61 levitated.

The movable stage 61 is held at a predetermined position in the optical axis direction by the interaction of three equivalent thrusts in the Z direction generated by equally energizing and controlling the Z drive coils CZA, CZB, and CZC, and translated in the Z direction. The movable stage 61 is tilted (rotated) in the X direction and tilted in the Y direction (rotation) due to the interaction of three different thrusts in the Z direction generated by individually energizing and controlling the Z drive coils CZA, CZB, and CZC. It can be rotated) and held in a tilted state.

The movable stage 61 can be held at a predetermined position in the X direction and translated in the X direction by the thrust in the X direction generated by controlling the energization of each X drive coil CX.

The movable stage 61 is held at a fixed position in the Y direction by the interaction of two equivalent thrusts in the Y direction generated by equally energizing and controlling the Y drive coils CYA and CYB, translated in the Y direction, and driven in Y. The movable stage 61 is tilted (rotated) in the Z direction by the interaction of two different thrusts in the Y direction generated by individually energizing the coils CYA and CYB, and the movable stage 61 is brought into a predetermined tilted (rotated) state. Can be retained.

Further, a plurality of thrusts in the Z direction generated by energization control of the above Z drive coils CZA, CZB, CZC, X drive coils CX, Y drive coils CYA, and CYB, and (plural) thrusts in the X direction. The movable stage 61 is levitated by the interaction of a plurality of thrusts in the Y direction, and in the levitated state, it is translated and tilted in all directions of 6 degrees of freedom (6 axes). Can be tilted.

The digital camera 10 (body CPU 20) operates the camera shake correction (shake reduction) by synchronizing the drive control of the movable stage 61 with the camera shake (vibration) of the camera body 11 detected by the camera shake detection circuit 44. be able to.

According to this embodiment, the X-direction magnet MX1 of the front fixing yoke 62 and the X-direction magnet MX2 of the rear fixing yoke 63, the Y-direction magnets MYA1 and MYB1 of the front fixing yoke 62 and the Y-direction magnet of the rear fixing yoke 63 In MYA2 and MYB2, different magnetic poles face each other across the longitudinal direction portion of the X drive coil CX, Y drive coil CYA, and CYB of the movable stage 61, so that the magnetic field line is the optical axis O (Z axis, first). ) It becomes possible to generate it substantially perpendicularly to the direction, and even if the movable stage 61 moves in the Z direction, the fluctuation of the thrust is small.

The Z-direction magnets MZA1, MZB1, and MZC1 of the front fixed yoke 62 and the Z-direction magnets MZA2, MZB2, and MZC2 of the rear fixed yoke 63 sandwich the annular Z drive coils CZA, CZB, and CZC of the movable stage 61. Since the same magnetic poles face each other, the fluctuation of the thrust is small even if the Z drive coils CZA, CZB, and CZC (movable stage 61) move in the Z direction.

In the above embodiment, the movable stage 61 has three Z directions (first) at intermediate positions between the pair of Y drive coils CYA and CYB constituting the two Y direction (third) thrust generating means. Since the Z drive coil (ZA drive unit) CZA, which is one of the thrust generating means, is arranged, the thrust generating means can be compactly configured in a narrow area.

In the present embodiment, the centers of gravity of the Z drive coils (ZA, ZB, ZC drive units) CZA, CZB, and CZC constituting a plurality (three) thrust generating means in the Z direction are substantially one with the center of gravity of the movable stage 61. Therefore, the thrust (driving force) of the thrust generating means in each Z direction can be made equal, and the thrust can be set small.

There are two Z drive coils (ZA, ZB, ZC drive units) CZA, CZB, and CZC that form a plurality of thrust generating means in the Z direction. In this embodiment, a line connecting the Z drive coils CZB and CZC. Is parallel to the X-axis or Y-axis, and the vertical line drawn from the other one to the line connecting these two is arranged so as to be parallel to the Y-axis. The detection axis by the sensor and the control axis can be matched, and the configuration of the control system can be simplified. For example, the tilt in the Y direction can be controlled by the difference between the ZC drive unit and the ZB drive unit, and the tilt in the X direction can be controlled by the ZA drive unit.

In the above embodiment, a pair of X drive coils CX having the same specifications are provided on the left and right sides of the image sensor 31 of the movable stage 61, and a pair of magnets MX for the X direction having the same specifications are placed in the front and rear fixed yokes 62. , 63 are provided on both the left and right sides of the openings 62a and 63a, but the X drive coil CX and the X direction magnets MX1 and MX2 may be provided on only one of the left and right sides. One embodiment is shown in FIG. FIG. 6 is a rear view of the movable stage 61, in which the Z drive coils CZA, CZB, CZC and the Z direction Hall elements HZA1 and HZA2, HZB1 and HZB2, and HZC1 and HZC2 are omitted. The same members and members having the same functions as those in the embodiments of FIGS. 2 to 5 are designated by the same reference numerals, and the description thereof will be omitted.

A pair of X drive coils CXA and CXB having the same specifications are separated from each other in the Y direction at the vertical position of the X axis so that the longitudinal direction is parallel to the Y axis orthogonal to the optical axis O on the right side of the image sensor 31. It is arranged. A Hall element HX for the X direction is arranged in the air core region of the upper X drive coil CXA. Although not shown, a pair of magnets for the X direction having the same specifications are arranged on the front fixed yoke and the rear fixed yoke at the opposite portions of the X drive coils CXA and CXB, and a magnetic circuit for the X direction (thrust generation). Means). In this embodiment, by controlling the same energization of the X driving coils CXA and CXB, two thrusts in the X direction are generated, and the interaction of these thrusts generates the thrust (driving force) in the X direction. , The movable stage 61 can be translated in the X direction. Further, only one X drive coil CX may be used. In that case, it is preferable that the X drive coil CX is arranged at a position overlapping the X axis when viewed in the Z direction.

In the above embodiment, the driving coil is provided on the movable stage (movable member), and the permanent magnet is provided on the fixed yoke (fixed base member). In the stage device of the present invention, a driving coil may be provided on a fixed yoke (fixed base member), and a permanent magnet may be provided on a movable stage (movable member).

7 and 8 are another embodiments in which the driving coil is provided on the fixed yoke (fixed base member) and the permanent magnet is provided on the movable stage (movable member), and are shown in FIGS. 3 and 4. The cross-sectional view cut at the same position as the embodiment is shown. The same members and members having the same functions as those of the embodiments shown in FIGS. 2 to 5 are designated by the same reference numerals, and the description thereof will be omitted.

The X drive coil CXA'and the Z drive coil CZA' are fixed to the front fixed yoke 62, and the X drive coil CXA'and the Z drive coil CZA' are opposed to the rear fixed yoke 63. The drive coil CXA1'and the Z drive coil CZA1' are fixed. On the movable stage 61, a pair of X-direction magnets MX1'and MX2' are fixed between the opposite X drive coils CXA'and CXA1', and Z is between the opposite Z drive coils CZA'and CZA1'. The directional magnet MZA'is fixed.
At least one of the X drive coils CXA'and CXA1', in the illustrated embodiment, a pair of X direction Hall elements HX1'and HX2' are fixed in the air core region of the X drive coil CXA1'(FIG. 7). The Z-direction Hall element HZA1'is fixed in the air-core region of the Z-drive coil CZA', and the Z-direction Hall element HZA2'is fixed in the air-core region of the Z-drive coil CZA1'(FIG. 8). Although not shown, a pair of Y drive coils are fixed to the front and rear fixed yokes 62 and 63 so as to face each other, and a pair of Y direction Hall elements are fixed to the air core region of the pair of Y drive coils. A Y-direction magnet is fixed to the movable stage 61 between a pair of opposing Y-driving coils.

By controlling the energization of the X drive coil CXA', CXA1', the Z drive coil CZA', CZA1' and the Y drive coil (not shown), the movable stage 61 floats, translates and tilts in the floating state. Then, it translates during tilting, and after tilting further, it translates in the tilted state.

In this embodiment, the X-direction position is detected by the detection signals of the X-direction Hall elements HX1'and HX2', and the Z-direction position and the tilt position around the X-direction are detected by the Z-direction Hall elements HZA1'and HZA2'. , The fact that the tilt position in the Y direction can be accurately detected is the same as in the embodiments shown in FIGS. 2 to 6.

In this embodiment, all the driving coils and Hall elements are fixed to the front and rear fixing yokes 62 and 63, which are fixed base members, and the driving magnets are fixed to the movable stage 61, which is a movable member. Since the number of FPCs drawn from the 61 is reduced and the load on the movable stage 61 by the FPC is reduced, the responsiveness of the movable stage 61 is improved and the movable stage 61 can be driven with high accuracy. The embodiment in which the driving coil and the Hall element are fixed to the front and rear fixing yokes 62 and 63 and the driving magnet is fixed to the movable stage 61 can be applied to all the embodiments.

In the above embodiments, the first direction is the Z direction (Z axis) parallel to the optical axis O, and the second and third directions are the X direction (X axis) orthogonal to the Z direction (Z axis). Although the Y direction (Y axis) is used, in the present invention, the first direction does not have to be parallel to the optical axis O, and the first, second, and third directions do not have to be orthogonal to each other. It can be in any direction. The thrust generating means (thrust controlling means) may generate thrust in only one direction.

In the present embodiment, a pair of Hall elements HX1 and HX2 for the X direction are provided in the air core region of the left and right X drive coils CX as the X direction position detecting means, respectively. It may be provided only in the air core region of. Further, in the present embodiment, paired Hall elements (HX1 and HX2, HYA1 and HYA2, HYB1 and HYB2, HZA1 and HZA2, HZB1 and HZB2, HZC1 and HZC2) are provided in the air core region of the drive coil. It may be provided on the outside of the coil, and the Hall element detects the magnetic force of the driving magnet. However, a permanent magnet for magnetic force detection may be provided separately from the driving magnet to detect the magnetic force of the magnetic force detecting magnet. Good. Other magnetic sensors may be used instead of the Hall element.

In the digital camera 10 equipped with the stage device 60 of the present embodiment, as an automatic focus adjustment function, the subject contrast detection unit 35 drives the focus adjustment optical system of the photographing lens 101 in the optical axis direction by the AF unit 22. It has an automatic focus adjustment function of the contrast detection method that detects and adjusts the focus by detecting the in-focus state where the contrast peaks. In the digital camera 10 of the present invention, in addition to image stabilization, the stage device 60 also wobbles the image sensor 31 to finely move (translate) the image sensor 31 in the optical axis direction to finely adjust the focus in the automatic focus adjustment operation. It is also possible to detect the peak of contrast. Further, the present invention can easily perform special shooting such as shooting in which the image sensor 31 is tilted by the stage device 60, and composition adjustment for tilting, panning, and rolling.

The stage device of the present invention can be applied to various optical devices such as so-called mirrorless digital cameras, single-lens digital cameras, compact digital cameras, digital video cameras, interchangeable lens barrels, and camera-integrated lenses.
The present invention can also be applied to a projector, a laser scanner, or the like that projects images, data, or the like, in addition to an imaging device. In the case of a projector, projected light is incident on the substantially center of the movable stage 61 of the stage device from one side (rear) of the thickness direction (first direction, Z direction) of the movable stage 61, and the other side (rear). The first projection light beam incident on the image forming element (liquid crystal panel) emitted toward the projection optical system (front) or substantially the center of the movable stage 61 from a direction different from the first direction (Z direction). A DMD (Digital Mirror Device, Digital Micromirror Device) panel that reflects in the direction of (projection optical system direction) can be mounted. The movable stage 61 may be equipped with a projection optical system instead of the image forming element.

FIG. 9 shows an outline of an embodiment of an image projection device (projector) including a stage device 60 having a movable stage 61. This embodiment includes a light source 81, an illumination optical system 82 that homogenizes the light emitted from the light source 81, an image forming element 83 that forms an image by receiving illumination light emitted from the illumination optical system 82, and the image. It includes a movable stage 61 in which the forming element 83 is fixed in the opening 61c, and a projection optical system 84 that projects an image formed by the image forming element 83. The image forming element 83 is specifically a liquid crystal panel or a DMD panel. The image forming element 83 is provided in the housing of the projector or the projection optical system 84 via the movable stage 61, and the image forming element 83 is in a state where the movable stage 61 is not driven (held in the initial position). The plane on which the image is formed is arranged in the projector so as to be perpendicular to the optical axis O of the projection optical system 84 or the optical axis of any lens in the projection optical system 84. .. The image forming element 83 is obtained by translating the movable stage 61 in the optical axis O direction (first direction), the second or third direction, or tilting the movable stage 61 in the first, second or third direction. The projection direction and projection position can be adjusted or projected by changing the direction of the projected light beam transmitted through the (liquid crystal panel) toward the projection optical system 84 or the direction of the projected light reflected by the DMD panel and directed toward the projection optical system 84. The tilt of the image can be adjusted, and the distance between the liquid crystal panel or DMD panel and the projection optical system can be adjusted to adjust the focus.

The present invention can also be applied to a lens barrel (Japanese Patent Laid-Open No. 2015-4769, etc.) provided with a correction optical system that drives one of the optical elements of the photographing optical system as a correction optical element. For example, in the photographing lens 101, one or a plurality of optical elements constituting the photographing optical system can be used as an adaptive optics element (driven member). In this embodiment, the lens between the first lens group 91 and the second lens group 93 is a driven member (correction optical element) 92 (FIG. 10). In the case of this embodiment, the correction optical element 92 is mounted in the opening 61c formed at substantially the center of the movable stage 61. According to this embodiment, the movable stage (correction optical element 92) 61 is translated in the optical axis O direction (first direction), the second or third direction, or the first, second or third direction. By tilting it around, special shooting such as image stabilization and tilt shooting is possible. Further, in this embodiment, the focusing can be finely adjusted by slightly translating the movable stage (correction optical element 92) 61 in the optical axis O direction (first direction).

Further, the digital camera 10 of the present invention can also perform a camera shake correction operation or a special shooting operation by cooperating the camera shake correction device mounted on the photographing lens and the camera shake correction device on the camera body 11 side.

10 Digital camera 11 Camera body 20 Body CPU (position detection means)
21 Camera operation unit 22 AF unit 23 Exposure control unit 24 Lens communication unit 30 Image sensor 31 Image sensor 32 Image processing unit 33 Image display unit (monitor)
34 Memory card 35 Contrast detection unit 41 Anti-vibration control circuit 42 Actuator drive circuit 43 Position detection circuit (position detection means)
44 Camera shake detection circuit 60 Stage device 61 Movable stage (movable member)
61a Image sensor mounting hole 62 Front fixed yoke (base member)
62a Opening 63 Rear fixed yoke (base member)
63a Aperture 101 Shooting lens CX CXA1'X Drive coil (drive coil, thrust generating means, second thrust generating means)
CYA CYBY drive coil (drive coil, thrust generating means, third thrust generating means)
CZA CZB CZC CZA'CZA1' Z drive coil (drive coil, thrust generating means, first thrust generating means)
HX1 HX2 HX1'HX2' Hall element for X direction (position detecting means, magnetic sensor, magnetic sensor for second direction)
HYA1 HYA2 HYB1 HYB2 Hall element for Y direction (position detecting means, magnetic sensor, magnetic sensor for third direction)
HZA1 HZA2 HZB1 HZB2 HZC1 HZC2 HZA1'HZA2' Z direction Hall element (position detecting means, magnetic sensor, first direction magnetic sensor)
MX1 MX2 MX1'MX2' X direction magnet (permanent magnet, thrust generating means, second thrust generating means)
MYA1 MYB1 MYA2 MYB2 Y direction magnet (permanent magnet, thrust generating means, third thrust generating means)
MZA1 MZA2 MZB1 MZB2 MZC1 MZC2 MZA'Z direction magnet (permanent magnet, thrust generating means, first thrust generating means)

Claims (25)

With the base member
A movable member that can move relative to the base member,
A plurality of thrust generating means that exert different thrusts in the first, second, and third directions on the movable member, and
A stage device including a position detecting means for detecting a translational direction position and a tilting position of the movable member with respect to the base member.
The thrust generating means causes the movable member to levitate relative to the base member by the interaction of thrusts in the first, second and third directions, and in the levitated state, the first, second and first It is provided with first, second and third thrust generating means capable of translating in three directions, tilting in each of the above directions, translating during tilting, translating after tilting, and tilting after translation. The second and third thrust generating means include a coil fixed to one of the movable member and the base member and a permanent magnet fixed to the other.
The position detecting means includes a permanent magnet fixed to one of the movable member and the base member, and a magnetic sensor arranged in the air core region of the coil fixed to the other, and the magnetic sensor is the first. In the air core region of the coil of the second thrust generating means , a pair of magnetic sensors for the second direction fixed in the second direction at predetermined intervals and the air core region of the coil constituting the third thrust generating means. A pair of magnetic sensors for the third direction fixed at predetermined intervals in the third direction are provided, and the position detecting means includes the pair of magnetic sensors for the second direction and the pair of third directions. Using the signal detected by the magnetic sensor, the translational position in the second and third directions and the tilting position in the first direction with respect to the base member of the movable member are detected.
A stage device characterized by. In the stage apparatus according to claim 1,
The first thrust generating means includes a plurality of first thrust generating means for generating thrust in the first direction.
The movable member floats the movable member relative to the base member due to the interaction of thrusts in the plurality of first directions, translates in the first direction, and has a direction different from the first direction. It is possible to tilt around, translate during tilt, translate after the tilt, and tilt after the translation.
The position detecting means is provided at a predetermined interval in the first direction in the air core region of the permanent magnet fixed to one of the movable member and the base member and the coil constituting the first thrust generating means provided on the other. It is provided with at least a pair of first-direction magnetic sensors that detect the magnetic force of the permanent magnet fixed by
The translational position in the first direction is detected by the pair of detection signals detected by the pair of magnetic sensors for the first direction, and the tilt position in the second and third directions is detected by the pair of detection signals. Stage device to detect. In the stage apparatus according to claim 2,
The second thrust generating means and the third thrust generating means generate thrusts in the second direction and the third direction which are different from the first direction.
The first, second, and third thrust generating means are the first, second, and third thrust generating means by the interaction of the thrust in the first direction, the thrust in the second direction, and the thrust in the third direction. A stage device that translates in three directions, tilts in the first, second, and third directions, translates during tilt, translates after tilt, and tilts after translation. In the stage apparatus according to claim 3,
At least one of the thrust generating means in the second direction and the thrust generating means in the third direction is composed of a plurality of the thrust generating means, and the movable member is formed by the interaction of the thrusts in the second or third direction. A stage device that can tilt in a direction. In the stage apparatus according to claim 4,
At least one of the pair of second-direction magnetic sensors and permanent magnets and the pair of third-direction magnetic sensors and permanent magnets is composed of a plurality of the plurality of pairs of second- or third-direction magnetic sensors. A stage device that detects the tilting position in the first direction by the detection signal of. In the stage apparatus according to any one of claims 1 to 5,
The movable member is a stage device that is in non-contact with the base member in the floating state. In the stage apparatus according to any one of claims 2 to 6.
A thin driven member having a flat front surface is fixed to the movable member, and the direction orthogonal to the front surface is the first direction, and the second and third directions are the first direction. A stage device whose direction is parallel to the front surface orthogonal to each other. In the stage apparatus according to claim 7,
The base member includes front and rear fixed yokes facing each other from the front and back of the movable member.
The first, second, and third thrust generating means include a plurality of driving coils fixed to one of the movable member, the front and rear fixed yokes, and a plurality of permanent magnets fixed to the other.
The pair of magnetic sensors are stage devices that are arranged in the air core region of each of the driving coils and detect the magnetic force of a permanent magnet fixed to the other. In the stage apparatus according to claim 8,
In the first thrust generating means, the driving coil and the permanent magnet are outside the driven member and pass through the center of the plane of the driven member in the circumferential direction at substantially predetermined intervals from the first direction. Stage devices arranged at at least three locations at approximately equal intervals. In the stage apparatus according to claim 9,
The driving coil of the first thrust generating means is a circular planar driving coil fixed to the movable member, and each pair of the first directional magnetic sensors is empty of the driving coil. A stage device arranged in the core region at predetermined intervals in the first direction. In the stage apparatus according to claim 9,
The drive coil of the first thrust generating means is a circular planar drive coil fixed to the front and rear fixed yokes.
Each of the pair of first-direction magnetic sensors is a stage device arranged in an air-core region of a drive coil fixed to the front and rear fixed yokes. In the stage device according to claim 10, the permanent magnet of the first thrust generating means is a stage device in which the same poles are arranged so as to face the front and rear fixed yokes. In the stage apparatus according to any one of claims 9 to 12,
The position detecting means is a sum signal of two detection signals of a plurality of pairs of first directional magnetic sensors arranged in the air core region of the driving coil of the first thrust generating means, and the two detection signals. A stage device that detects the position of the movable member in the first direction and the tilting position in the second or third direction by the quotient of the difference signal. In the stage apparatus according to claim 8,
The driving coils and permanent magnets of the second and third thrust generating means are arranged outside the driven member.
The second thrust generating means has a long planar drive coil in a direction orthogonal to the second direction, and the permanent magnet facing each drive coil is in the longitudinal direction of the drive coil. It consists of two plate-shaped permanent magnets extending in parallel and separated in the lateral direction.
The third thrust generating means has a long planar drive coil in a direction orthogonal to the third direction, and the permanent magnet facing each drive coil is in the longitudinal direction of the drive coil. It consists of two plate-shaped permanent magnets extending in parallel and separated in the lateral direction.
The pair of second and third direction magnetic sensors are stage devices arranged at predetermined intervals in the short direction in the air core region of the driving coil of the second and third thrust generating means. In the stage apparatus according to claim 14,
The position detecting means detects the second directional position by the sum signal of the detection signals of the pair of second directional magnetic sensors, and the first by the sum signal of the detection signals of the pair of third directional magnetic sensors. A stage device that detects the directional position of 3. In the stage apparatus according to claim 14,
At least one of the second and third thrust generating means is composed of a pair separated in a direction orthogonal to the second or third direction, and is a driving coil of the pair of second or third thrust generating means. A pair of second or third directional magnetic sensors are arranged in the air core region.
The position detecting means is based on the sum signal of the detection signals of one pair of second or third directional magnetic sensors and the sum signal of the detection signals of the other pair of second or third directional magnetic sensors. A stage device that detects the tilt position in the first direction. In the stage apparatus according to any one of claims 8 to 16.
A stage device in which the driving coil and the magnetic sensor are provided on the movable member, and the permanent magnets are provided on the front and rear fixed yokes. In the stage apparatus according to any one of claims 8 to 16.
The drive coil is provided so as to face the front and rear fixed yokes, the magnetic sensor is provided in the air core region of one of the front and rear fixed yokes, and the permanent magnet is provided on the movable member. Stage equipment. In the stage apparatus according to any one of claims 8 to 18.
The driven member is a stage device that is an image pickup element on which a subject image is projected by a photographing optical system. In the stage apparatus according to claim 19.
A stage device in which the first direction is parallel to the optical axis of the photographing optical system, and the second and third directions are orthogonal to each other and orthogonal to the first direction. In the stage apparatus according to any one of claims 8 to 18.
The driven member is a stage device that is an image forming element that receives light from a light source and projects an image through a projection optical system. In the stage apparatus according to claim 21,
The image forming element is a liquid crystal panel that transmits a light beam emitted from a side opposite to the projection optical system toward the projection optical system, and the first direction is parallel to the optical axis of the projection optical system. A stage device. In the stage apparatus according to claim 21,
The image forming element is a DMD panel that reflects light emitted from a direction different from the first direction toward the projection optical system, and the first direction is the optical axis of the projection optical system. Stage equipment that is parallel. The stage apparatus according to any one of claims 1 to 18.
Equipped with a projection optical system that projects an image,
An image projection device, characterized in that the projection optical system is fixed to a movable member of the stage device. The stage apparatus according to any one of claims 1 to 18.
It is equipped with an image sensor that captures the subject image projected by the photographing optical system.
An image pickup device characterized in that the image pickup element is fixed to the movable member.

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