JP2008129326A - Stage device, camera-shake correcting device and method of driving the stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage device and a camera-shake correcting device which are capable of surely wiping dust, etc. adhering to especially the friction portions of the stage device and the camera-shake correcting device and to provide a method of driving the stage device. <P>SOLUTION: In the stage device, a movable section 50 on which a CCD 45 is mounted and an X-direction driving coil CX and Y-direction driving coils CYA and CYB are formed is held between a base yoke plate 31 and a driving yoke plate 32 and smooth surfaces 40a and 41a formed on the front and rear surfaces of the movable section 50 are supported to freely linearly and rotatably move by a pressing pin 63 and a substrate supporting projection 65 which freely frictionally hold and press the smooth surfaces 40a and 41a. The stage device is provided with a vortex drive signal source 83 for outputting a vortex signal for moving the movable section 50 to describe a spiral locus diverging from the center of the movable range of the movable section 50 to the coils CX, CYA and CYB. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a stage apparatus, a camera shake correction apparatus, and a driving method thereof, and more particularly, to a stage apparatus, a camera shake correction apparatus, and a driving method thereof that can remove dust and the like that do not adhere to a movable part and perform wiping driving.

  In the case of the XY guide friction drive system, which is the main method of the conventional camera shake correction apparatus that moves the image sensor to correct camera shake, the dust adhering to the apparatus is individually driven in the XY friction direction in a straight-forward alternating manner. A method of wiping is known (Patent Document 1).

Furthermore, as a camera shake correction device that moves the image sensor to correct camera shake, a so-called non-guided camera shake correction device that corrects not only the XY direction orthogonal to the optical axis but also the rotation in the rotational direction that rotates in the XY plane. Is known (Patent Document 2). In this non-guide-type image stabilization device, the image pickup device is slidably held between the front and back directions of the image pickup device by a support member so that the image pickup device can freely move and rotate in an XY plane orthogonal to the optical axis. ing.
Japanese Patent No. 3044067 JP 2005-316222 A

In the case of an XY guide friction drive type shake correction device, the friction portion, that is, the XY guide member is generally a cylindrical shaft shape, and even if dust adheres to the surface, dust is generated by friction in the XY direction. Can be removed.
However, in the case of a non-guided shake correction device, the rubbing portion is the rubbing surface of the movable body on which the image sensor is placed, and with simple XY driving, sufficient dust cannot be removed and is movable. There is a need to drive to remove dust adhering to the entire rubbing surface in the range. In the case of a non-guided shake correction device, if dust adheres to the friction part of the shake correction device, frictional friction increases or gets caught, making it impossible to control smooth movement, resulting in reduced shake correction performance and operation. There is a risk that a defect may occur, and the dust removal operation must be performed more reliably and over a wider range than in the case of the XY guide friction drive type blur correction device.

  The present invention has been made in view of the problem of the camera shake correction device in the conventional clamping friction method, in particular, a stage device, a stage device that can reliably wipe off dust and the like adhering to the friction portion of the camera shake correction device, An object of the present invention is to provide a shake correction apparatus and a driving method thereof.

  The stage apparatus according to the present invention includes a fixed support substrate, a stage plate arranged parallel to the fixed support substrate at a predetermined interval, and a parallel smooth surface formed on the front and back surfaces of the stage plate so as to be slidable on the front and back sides. The stage plate mounted on the fixed support substrate and the stage plate is moved in a desired direction by means of friction support means for supporting the stage plate so as to be movable in any direction within a reference plane. And a drive means for controlling the drive means so that the stage plate moves in a movable range while drawing a movement trajectory around the movable center.

  A parallel smooth surface is formed on both sides of the stage plate, and the frictional support means slidably presses the parallel smooth surface by a member to which one side is fixed and the other is elastically biased.

  More practically, the driving means receives at least two magnetic flux generating members mounted on one of the fixed support substrate and the stage plate, and a magnetic flux generated by each of the magnetic flux generating members mounted on the other. Two driving coils that generate driving forces in different directions within the reference plane, and the control means outputs a driving signal of a predetermined period simultaneously to each of the driving coils so that the stage is Draw a movement trajectory around the movable center and move it.

  The magnetic flux generating member includes an X-direction permanent magnet and a Y-direction permanent magnet arranged in orthogonal directions, and the drive coil is an X drive arranged to face the X-direction permanent magnet and the Y-direction permanent magnet. It is preferable to include a coil and a drive coil for Y.

  The movement trajectory is preferably a spiral trajectory in which the stage plate circulates in a spiral shape that diverges from the center of the movable range, or a circular trajectory that circulates in the center of the movable range of the stage plate.

  An image stabilization apparatus according to the present invention includes a fixed support substrate, a stage plate arranged parallel to the fixed support substrate at a predetermined interval, and a parallel smooth surface formed on the front and back surfaces of the stage plate. Friction support means for supporting the stage plate so as to be movable in any direction within a reference plane by clamping from the back side, imaging means attached to the stage plate, and attached to the fixed support substrate and the stage plate A drive means for moving the stage plate in a desired direction, a vibration detection means for detecting the vibration of the mounted equipment, and an imaging optical system of the equipment based on the detection result of the vibration detection means. Separately from the shake correction drive control means for performing the shake correction drive of the drive means so as to reduce the shake of the subject image formed on the imaging means, and the stage correction plate, the stage plate has a movable range thereof. For movement drawing a moving locus orbiting the center it characterized in that a dust-removal driving control means for driving said drive means.

  A parallel smooth surface is formed on both sides of the stage plate, and the frictional support means slidably presses the parallel smooth surface by a member to which one side is fixed and the other is elastically biased.

  Preferably, the driving means receives at least two magnetic flux generating members mounted on one of the fixed support substrate and the stage plate, and receives the magnetic flux generated by each of the magnetic flux generating members mounted on the other. Two drive coils that generate driving force in different directions in the reference plane are provided, and the dust removal drive control means outputs a spiral drive signal of a predetermined period simultaneously to each of the drive coils to output the stage plate Is drawn and moved around the center of the movable range.

  More practically, the magnetic flux generation member includes an X-direction permanent magnet and a Y-direction permanent magnet arranged in orthogonal directions, and the driving coil faces the X-direction permanent magnet and the Y-direction permanent magnet. The dust removal drive control means outputs a drive signal of a predetermined period to each of the X drive coil and the Y drive coil, and the stage is moved to the stage. Draw a movement trajectory around the center of the movable range and move it.

  The blur correction unit energizes the X drive coil and the Y drive coil to move the stage plate so that the blur of the subject image formed on the imaging unit by the imaging optical system of the camera is reduced. The dust removal drive control means includes a spiral drive signal source for energizing the X drive coil and the Y drive coil so that the stage plate moves along a circular trajectory, and the X drive coil and the Y drive coil Switching means for switching energization to the drive coil between the shake correction device and the vortex drive signal source, and the control means applies the vortex drive signal source to the switching means when the dust removal control is performed. It is preferable to switch.

  The movement trajectory is preferably a spiral trajectory that circulates in a spiral shape where the stage plate diverges from the center of the movable range, or a circular trajectory that circulates around the center of the movable range of the stage plate.

  The pitch in the radial direction of the spiral trajectory is preferably equal to or less than half the diameter of a member that slidably contacts the stage plate and supports the stage plate movably.

  Preferably, the dust removal drive control means moves the stage plate to a movable center position at the start of the dust removal operation, and moves the stage plate to the center of the movable range after the dust removal operation is completed.

  The dust removal drive control means performs the dust removal operation when the power of the mounted camera is turned on, immediately before the exposure, during the movable mirror up operation, after the exposure is completed, or when a predetermined switch operation is received. It is preferable to run for hours.

  A stage apparatus driving method according to the present invention is a stage apparatus driving method including a stage plate that is arranged in parallel to a fixed support substrate at a predetermined interval and is movably supported in a reference plane. It is characterized in that the stage plate is moved while drawing a movement trajectory that goes around the center of the movable range.

  According to the stage apparatus of the present invention, the driving means is driven so that the stage plate moves along a movement trajectory that goes around the center of the movable range, so that dust or the like adhering to the stage plate is moved outside the stage plate. The dust that causes the malfunction is removed.

According to the shake correction apparatus of the present invention, the stage plate on which the imaging element means is mounted moves along a movement trajectory that circulates around the center of the movable range, so that dust or the like adhering to the stage plate is moved outside the stage plate. The dust that causes the malfunction is removed.
When the power of the mounted camera is turned on, just before the exposure, during the movable mirror up operation, after the end of the exposure, or when a predetermined switch operation is received, the dust removal movement is repeated to ensure dust etc. Can be wiped off.

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. In the following description, as indicated by the arrows in FIGS. 1 and 2, the left-right direction of the camera body 11 (camera shake correction device 30) is defined as the X direction, the up-down direction is defined as the Y direction, and the front-back direction is defined as the Z direction.
As shown in FIG. 1, an optical system including a plurality of lenses L1, L2, and L3 is disposed in a camera body 11 (lens barrel), and a camera shake correction device (stage device) is disposed behind the lens L3. ) 30 is provided.

The camera shake correction device 30 has a structure shown in FIGS.
As shown in FIGS. 2 to 8, the camera shake correction device 30 includes a base yoke plate 31 made of a magnetic material such as soft iron and having an outer shape that is horizontally rectangular in front view, and a magnetic shape such as soft iron that has the same front shape as the base yoke plate 31. And a drive yoke plate 32 which is made of a body and is located behind the base yoke plate 31. Four columnar columns 33 extending rearward are projected at the four corners of the rear surface (back surface) of the base yoke plate 31, and the rear end surface of each column 33 is the front surface of the drive yoke plate 32 ( It is fixed to the four corners of the surface. The base yoke plate 31 and the drive yoke plate 32 are fixed in parallel with each other at a predetermined interval. The front surface of the base yoke plate 31 is fixed to the inner surface of the camera body by a fixing screw (not shown).

  A square opening 34 is formed in the central portion of the base yoke plate 31. On both sides of the square opening 34 on the rear surface of the base yoke plate 31, two columnar movable range restricting pins (movable range restricting means) 35 are provided so as to extend rearward. The rear end surface of the restriction pin 35 is fixed to the front surface of the drive yoke plate 32.

  X permanent magnets MX in which S poles and N poles are arranged in the X direction are fixed to the left and right ends of the rear surface of the base yoke plate 31, respectively. These left and right X permanent magnets MX are arranged in the X direction, and their Y direction positions coincide with each other. The base yoke plate 31 and the drive yoke plate 32 pass the magnetic flux of the X permanent magnet MX, so that the X direction drive is performed between the base yoke plate 31 and the left and right X permanent magnets MX and the drive yoke plate 32. A high magnetic flux density space MCX is formed (see FIG. 8). Although not shown, an X-direction driving high magnetic flux density space MCX is also formed on the other X permanent magnet MX side in the same manner.

  On the other hand, a pair of permanent magnets MY for Y, in which the S pole and the N pole are arranged in the Y direction, is fixed to the lower end portion of the rear surface of the base yoke plate 31. The left and right Y permanent magnets MY are arranged in the X direction, and the positions in the Y direction coincide with each other. As shown in FIG. 8, the base yoke plate 31 and the drive yoke plate 32 pass the magnetic flux of the left and right Y permanent magnets MY, whereby the base yoke plate 31 and the left and right Y permanent magnets MY and the drive yoke are driven. A high magnetic flux density space MCY for driving in the Y direction is formed between the plates 32 (not shown, but the high magnetic flux density space MCY for driving in the Y direction is similarly provided on the other Y permanent magnet MY side. Is formed).

  Between the base yoke plate 31 and the drive yoke plate 32, a flat electric substrate (stage plate) 40 parallel to the base yoke plate 31 and the drive yoke plate 32 is located. A reinforcing plate (stage plate) 41 having the same front shape as that of the electric substrate 40 is fixed to the rear surface (back surface) of the electric substrate 40, and the electric substrate 40 and the reinforcing plate 41 are integrated. The electric board 40 and the reinforcing plate 41 are provided with a pair of left and right movable range restricting holes (movable range restricting means) 42 penetrating them in the Z direction. The left and right movable range restricting holes 42 are both square holes, and the left and right movable range restricting pins 35 penetrate the left and right movable range restricting holes 42, respectively. The electric board 40 and the reinforcing plate 41 can move on the XY plane including the X direction and the Y direction with respect to the base yoke plate 31 from the initial position shown in FIG. 3 (not only linear movement but also rotation). The movable range on the XY plane of the electric board 40 and the reinforcing plate 41 is limited by the left and right movable range restriction pins 35 and the movable range restriction hole 42.

  A CCD 45 as an image sensor is fixed to the front (surface) center of the electric substrate 40. As shown in FIG. 3, the CCD 45 has a rectangular shape when viewed from the front, and in FIG. 3 (when the electric board 40 is at the initial position), a pair of upper and lower X direction side edges 45X parallel to the X direction, A pair of left and right Y direction side edges 45Y parallel to the Y direction are provided. The front surface of the CCD 45 is an imaging surface 46 orthogonal to the optical axis O, and the center of the imaging surface 46 is located on the optical axis O when the electric substrate 40 is in the initial position.

  A CCD holder 47 surrounding the CCD 45 is fixed to the front surface of the electric substrate 40. As shown in FIG. 4, the front end portion of the CCD holder 47 projects forward of the base yoke plate 31 through the rectangular opening 34. A window hole 48 is formed in the front wall of the CCD holder 47. An optical low-pass filter 49 is fitted and fixed between the front wall of the CCD holder 47 and the CCD 45, and the space between the optical low-pass filter 49 and the front wall of the CCD holder 47 is kept airtight. The imaging surface 46 of the CCD 45 is an imaging surface on which an image transmitted through the lenses L1 to L3 and the optical low-pass filter 49 is formed.

  On the front surface of the electric board 40, X-direction driving coils (drive units) CX having the same specifications are fixed to both left and right ends with the CCD holder 47 interposed therebetween. The X-direction drive coil CX is a coil parallel to the XY plane in which the coil wire is wound in a spiral shape more than 100 times (winded in the direction parallel to the electric substrate 40 or in the thickness direction of the electric substrate 40). Yes, the left and right X-direction drive coils CX are arranged in a direction parallel to the X-direction side 45X (X direction in FIG. 3). In other words, the positions of the left and right X-direction drive coils CX in the direction parallel to the Y-direction side 45Y (the positions in the Y-direction in FIG. 3) match. The left and right X direction driving coils CX face the left and right X permanent magnets MX in the Z direction regardless of the position of the electric board 40 and the reinforcing plate 41 (the left and right X direction driving high magnetic flux density spaces). Located in MCX). The X direction driving means is constituted by the X direction driving coil CX, the base yoke plate 31, the driving yoke plate 32, and the X permanent magnet MX.

  Further, Hall elements SX positioned at the center of the left and right X-direction drive coils CX are fixed to the front surface of the electric board 40, respectively. These Hall elements SX respectively detect the X-direction positions of the left and right X-direction driving coils CX using the magnetic flux density distribution of the corresponding X-direction driving high magnetic flux density space MCX.

  A Y-direction drive coil (drive unit) CYA and a Y-direction drive coil (drive unit) CYB having the same specifications are fixed to the lower end of the front surface of the electric board 40. Both the Y-direction driving coil CYA and the Y-direction driving coil CYB have coil wires wound in a spiral shape more than 100 times (in the direction parallel to the electric board 40 and in the thickness direction of the electric board 40). ) The coil is parallel to the XY plane, and the Y-direction driving coil CYA and the Y-direction driving coil CYB are arranged along the lower X-direction side 45X (in FIG. 3, they are arranged in the X direction). . In other words, the Y-direction driving coil CYA and the Y-direction driving coil CYB have the same position in the direction parallel to the Y-direction side 45Y (Y-direction position in FIG. 3). The Y-direction driving coil CYA and the Y-direction driving coil CYB are opposed to the left and right Y permanent magnets MY in the Z direction regardless of the position of the electric board 40 and the reinforcing plate 41 (left and right Y direction driving). For high magnetic flux density space MCY). The Y direction driving coil CYA and the Y direction driving coil CYB, the base yoke plate 31, the driving yoke plate 32, and the Y permanent magnet MY constitute Y direction driving means.

  Further, on the front surface of the electric substrate 40, a pair of Hall elements SY respectively positioned inside the Y direction driving coil CYA and the Y direction driving coil CYB are fixed. These Hall elements SY detect the Y-direction positions of the corresponding Y-direction driving coils CYA and CYB, respectively, using the magnetic flux density distribution of the corresponding Y-direction driving high magnetic flux density space MCY.

  The above-described X-direction driving coil CX, Y-direction driving coil CYA, Y-direction driving coil CYB, Hall element SX and Hall element SY are all control means CTL configured by a CPU or the like built in the camera (FIG. 1). Is electrically connected).

Further, on the rear surface of the base yoke plate 31, there is a substrate support extending rearward at three locations that are outside the rectangular opening 34 and correspond to the apex of a substantially equilateral triangle centered on the center of the rectangular opening 34. A column 61 is provided. Each substrate support column 61 includes a push pin column 62 erected on the base yoke plate 31, a push pin 63 in which a shaft hole 63 b is slidably fitted to the push pin column 62, and the tip of the push pin column 62. A coil spring 64 inserted between the surface and the shaft hole 63b is provided (see FIG. 9). Thus, the front end surface 63a of the push pin 63 is formed flat, and the peripheral edge portion of the front end surface 63a is chamfered. The front end surface of the substrate support column 61 is also formed in the same manner as the front end surface 63 a of the push pin 63.
Each of the substrate support columns 61 and the push pins 63 is preferably formed of a low friction material such as a fluororesin.

  On the other hand, on the front surface of the drive yoke plate 32, substrate support protrusions 65 that are in contact with the smooth surface 41 a of the rear surface (back surface) of the reinforcing plate 41 are provided at three positions facing the three substrate support columns 61. Yes. Each of the substrate support protrusions 65 is formed of a low friction material, and is formed flat so that the front end surface 65a is located on one plane parallel to the drive yoke plate 32, and the peripheral edge portion of the front end surface 65a is chamfered. Has been processed.

  The push pin 63 of each substrate support column 61 has its tip surface 63a abutted against the smooth surface 40a formed on the front surface (front surface) of the electric substrate 40 by the urging force of the coil spring 64 and presses it backward. On the other hand, the smooth surface 41 a formed on the rear surface (back surface) of the reinforcing plate 41 in parallel with the smooth surface 40 a is in contact with and supported by the front end surface 65 a of the substrate support protrusion 65. That is, the electric substrate 40, the reinforcing substrate 41, and the member such as the CCD 45 mounted on the electric substrate 40 are supported by the substrate support pillar 61 and the substrate support protrusion 65 so as to be movable and rotatable in an arbitrary direction within the XY plane. The Therefore, when a force in the X direction, Y direction, or rotation direction acts on the electric substrate 40, the push pin 63 and the electric substrate 40, the substrate support protrusion 65, and the reinforcing plate 41 are kept in a parallel state while being in sliding contact with each other. Move in the Y direction and rotate again. A member that moves integrally with the electric substrate 40 and the reinforcing plate 41, such as the above-described electric substrate 40 and the reinforcing plate 41, and the CCD 45 and the coils CYA, CYB, CX mounted on the electric substrate 40, is the movable portion 50. It is a stage substrate. The smooth surfaces 40a and 41a are parallel smooth surfaces formed in parallel to each other on both surfaces of the stage substrate, the push pin 63 being a movable member, and the substrate support protrusion 65 being a fixed member. The cross-sectional shape and size of the push pin 63 and the substrate support protrusion 65 are arbitrary. The smooth surfaces 40 a and 41 a are formed in a shape and size that can cover the movable range of the movable portion 50. It is preferable to form with a low friction member or to coat a low friction material such as a fluororesin.

  The camera shake correction device 30 having the above-described configuration performs the camera shake correction operation by causing a current to flow from the control unit CTL to the X direction driving coil CX, the Y direction driving coil CYA, and the Y direction driving coil CYB. That is, when a current is passed through the X direction driving coil CX, a driving force in the direction of the arrow FX1 or FX2 in FIG. 3 is generated in the X direction driving coil CX. Further, when a current is passed through the Y-direction driving coils CYA and CYB, a driving force in the direction of the arrow FY1 or FY2 in FIG. 3 is generated in the Y-direction driving coils CYA and CYB.

  As is well known, when the camera body 11 vibrates in the X or Y direction due to camera shake, vibrations in the X and Y directions of the camera body 11 are detected by a vibration detection sensor SDS (see FIG. 1) built in the camera body 11. (Camera shake, angular velocity) is detected, and the CCD 45 is moved relative to the camera body 11 while the Hall element SX and the Hall element SY grasp the relative positions of the CCD 45 (the magnets MX and MY) with respect to the camera body 11. Thus, if the subject image on the imaging surface 46 caused by camera shake is moved at the same speed in the same direction as the moving direction and speed, the blur of the subject image on the imaging surface 46 is reduced or corrected. Therefore, if current is supplied from the control means CTL to the X direction driving coils CX and the Y direction driving coils CYA and CYB so that the CCD 45 performs such a linear movement, blurring of the subject image on the CCD 45 due to camera shake is caused. Reduced (corrected).

  Further, since the electric board 40 and the reinforcing plate 41 (CCD 45) can be rotated relative to the base yoke plate 31 and the driving yoke plate 32, the electric circuit 40 and the reinforcing plate 41 (CCD 45) are supplied from the control means CTL to the Y direction driving coil CYA and the Y direction driving coil CYB. If different currents or different directions are generated in the Y-direction driving coil CYB and the Y-direction driving coil CYB by causing the currents to flow differently or in opposite directions, the electric board 40 and the reinforcing plate 41 (CCD45) rotates. Therefore, when the camera body 11 rotates on the XY plane, the vibration detection sensor SDS detects the rotation speed (camera shake speed) of the camera body 11, and the electric board 40 and the reinforcing plate 41 (CCD 45) are opposite to the rotation blur direction. If currents individually adjusted are supplied from the control means CTL to the Y-direction drive coil CYA and the Y-direction drive coil CYB so as to rotate at the same rotational speed as this rotational speed (camera shake speed), so-called rotational shake is generated. It is corrected.

As mentioned above, although this invention was demonstrated using one Embodiment, this invention is not limited to this embodiment, It can implement by giving various deformation | transformation.
Further, it goes without saying that an image pickup device other than a CCD, for example, a CMOS image sensor can be used.
Further, although the Hall elements SX and XY are used as position change detection sensors in the X direction and the Y direction, sensors other than the Hall elements, for example, an MR sensor or an MI sensor can be used.

  An outline of a sensor for detecting camera shake of the camera body 11 is shown in FIGS. The camera body 11 includes a Y-direction gyro sensor GSY and an X-direction gyro sensor as vibration detection sensors SDS that detect a longitudinal (Y) direction angular velocity, a lateral (X) direction angular velocity of the optical axis O, and a rotational angular velocity around the optical axis O. GSX and rotation detection gyro sensor GSR are provided. In this embodiment, these Y direction, X direction, and rotation detection gyro sensors GSY, GSX, and GSR are provided at the lower right corner of the digital camera 10 when viewed from the front. The Y-direction gyro sensor GSY detects the angular velocity around the gyro sensor axis GSYO (X axis), that is, the vertical (Y) direction angular velocity of the camera body 11, with the gyro sensor axis GSYYO arranged in the lateral direction (parallel to the X direction). To do. The X direction gyro sensor GSX has a gyro sensor axis GSXO arranged in the vertical direction (parallel to the Y direction), and detects the angular velocity around the gyro sensor axis GSXO (Y axis), that is, the lateral (X) direction angular velocity of the camera body 11. . The rotation detection gyro sensor GSR has a gyro sensor axis GSRO arranged in parallel with the optical axis O (Z direction), and the angular velocity around the gyro sensor axis GSRO (Z axis), that is, the angular velocity around the optical axis O of the camera body 11. To detect.

  The arrangement of these Y direction, X direction, and rotation detection gyro sensors GSY, GSX, and GSR is an example. The Y direction, X direction, and rotation detection gyro sensors GSY, GSX, and GSR may be individually configured and arranged, but an integrated two-axis gyro sensor and a single-axis gyro sensor may be combined, or an integrated three-axis Gyro sensors may be used and their arrangement is not limited to the illustrated embodiment. If the Y direction, X direction, and rotation detection gyro sensors GSY, GSX, and GSR are individually arranged, the degree of freedom of arrangement becomes high, and if an integrated three-axis gyro sensor is used, assembly becomes easy.

  Next, the operation of the image blur correction apparatus 25 having such a configuration will be described with reference to a control circuit block diagram which is an embodiment of the control system shown in FIG. When the control is performed by the CPU, the operations of the integration circuit, the error amplification circuit, the PID calculation circuit, and the PWM driver in FIG. 13 can be realized by software. When the camera body 11 shakes (vibrates) due to camera shake of the photographer, angular shake and rotation shake (rotation shake within the reference plane) of the optical axis O occur, and the image shakes. Image blur correction is performed so as to cancel out the shaking of the image.

  The subject light transmitted through the photographing lens L (lenses L1 to L3) passes through the optical low-pass filter 49 from the opening 51 to form a subject image on the imaging surface 46 of the CCD 45. At this time, if the image blur correction switch SW (see FIG. 1) of the camera body 11 is turned on, when camera shake in the X and Y directions and camera shake around the optical axis O occur in the camera body 11, X The output of the direction gyro sensor GSX, the output of the Y direction gyro sensor GSY, and the output of the rotation detection gyro sensor GSR are integrated by the integration circuit 82, the integration circuit 70, and the integration circuit 71, respectively, according to the amount of angular blur in the X direction and the Y direction. The output value is converted into an output value corresponding to the amount of rotational blur around the optical axis O and output.

First, an image blur correction operation in the X direction and the Y direction without rotation correction will be described.
The output value of the integrating circuit 82 and the output value of the Hall element SX corresponding to the lateral shake signal corresponding to the amount of vibration in the X direction of the camera body 11 (the movement in the X direction relative to the base yoke plate 31 of the CCD 45 (X direction driving coil CX). Quantity signal) is compared by the error amplifying circuit 75, and a signal corresponding to the difference is output, so that the PID calculating circuit 78 performs a PID calculation based on the output signal of the error amplifying circuit 75, and the integrating circuit 72 A signal related to the voltage applied to the X-direction drive coil CX is calculated so that the difference between the output value of the output element and the output value of the Hall element SX becomes small. A PWM pulse is applied to the X direction driving coil CX from the PWM driver 81. Then, a driving force in the FX1 direction or the FX2 direction is generated in the X direction driving coil CX. By the power, so the difference between the output value and the output value of the Hall element SX of the integration circuit 72 is reduced CCD 45 (the movable portion 50) moves in the FX1 direction or FX2 direction.

  Similarly, the output value of the integration circuit 70 corresponding to the vertical shake signal corresponding to the vibration of the camera body 11 in the Y direction and the output values of the Hall elements SYA and SYB (Y direction driving coils CYA and CYB with respect to the camera body 11). Direction movement amount signal) is compared by the error amplification circuits 73 and 74, and an output value corresponding to the difference is output. Then, PID calculation is performed by the PID calculation circuits 76 and 77 based on the output values of the error amplification circuits 73 and 74 so that the output values of the error amplification circuits 73 and 74 become smaller, that is, the output of the integration circuit 70. A value related to the voltage applied to the Y-direction driving coils CYA and CYB is calculated so that the difference between the value and the output value of the Hall elements SYA and SYB becomes small. Further, based on the calculation results of the PID calculation circuits 76 and 77, a PWM pulse is applied from the PWM driver 79 to the Y-direction drive coil CYA, and a PWM pulse is applied from the PWM driver 80 to the Y-direction drive coil CYB. At this time, the magnitude and direction of the PWM pulse applied to the Y-direction driving coils CYA and CYB are the same. Accordingly, the difference between the output value of the integration circuit 70 and the output value of the Hall element SYA, and the output value of the integration circuit 70 and the Hall element SYB, depending on the driving force generated in the Y1 direction driving coils CYA and CYB in the FY1 or FY2 direction. The CCD 45 (movable unit 50) moves in the FY1 direction or the FY2 direction so that the difference between the output values becomes smaller.

  As described above, the CCD 45 (movable unit 50) linearly moves in the FX1 direction or the FX2 direction and the FY1 direction or the FY2 direction following the amount of angular blur of the optical axis O due to camera shake, and image blurring on the CCD 45 due to camera shake occurs. Reduced (corrected). Note that while the CCD 45 is linearly moved in the FX1 and FX2 directions and in the FY1 and FY2 directions, the imaging surface 46 of the CCD 45 always maintains a state orthogonal to the optical axis O.

Next, the rotational image blur correction operation will be described mainly with reference to FIG.
When rotation about the optical axis O occurs in the camera body 11, the output of the rotation detection gyro sensor GSR that detects the rotation is integrated by the integration circuit 71 and converted to an output value corresponding to the amount of rotation blur of the CCD 45. To do. An output value detected by the Y-direction gyro sensor GSY is input from the integrating circuit 70 to the error amplifiers 73 and 74. As shown in FIG. 13, the error amplification circuit 73 receives a value obtained by adding an output value corresponding to the rotational shake of the rotation detection gyro sensor GSR to an output value corresponding to the vertical shake of the Y-direction gyro sensor GSY. The error amplifying circuit 74 receives a value obtained by subtracting the output value corresponding to the rotational shake of the rotation detection gyro sensor GSR from the output value corresponding to the vertical shake of the Y-direction gyro sensor GSY.

  Further, the sum of the output value of the integration circuit 70 and the output value of the integration circuit 71 and the output value of the Hall element SYA are compared by the error amplification circuit 73, and the difference between the output value of the integration circuit 70 and the output value of the integration circuit 71 is calculated. The error amplification circuit 74 compares the output value of the Hall element SYB. Then, PID calculation is performed by the PID calculation circuits 76 and 77 based on the output values of the error amplification circuits 73 and 74 so that the output values of the error amplification circuits 73 and 74 become smaller, that is, the output of the integration circuit 70. And the difference between the output value of the integration circuit 70 and the output value of the integration circuit 71 and the difference between the output value of the Hall element SYB and the sum of the output value of the integration circuit 71 and the output value of the integration circuit 71 are small. A value related to the voltage applied to the Y-direction driving coils CYA and CYB is calculated so as to decrease. Further, based on the calculation results of the PID calculation circuits 76 and 77, a PWM pulse is applied from the PWM driver 79 to the Y-direction drive coil CYA, and a PWM pulse is applied from the PWM driver 80 to the Y-direction drive coil CYB. As a result, a driving force difference is generated between the Y-direction driving coil CYA and the Y-direction driving coil CYB, so that the CCD 45 (movable part 50) moves relative to the base yoke plate 31 with an axis parallel to the optical axis O as the center. Rotation in the FY1 or FY2 direction, and the rotational image blur due to the rotational blur of the camera body 11 is also corrected.

  In order to facilitate understanding, the image blur correction control and the rotation image blur correction control in the X direction and the Y direction have been described separately. Usually, since these image blurs occur at the same time, the image blur correction in the X direction and the Y direction is performed. Correction control and rotational image blur correction control are executed simultaneously.

  The above is the normal camera shake (image blur) correction operation. Next, the dust removal drive device and its operation, which are features of the present embodiment, will be described. In this dust removal drive, the movable portion 50 is spirally swung in the divergence direction so that the front surface of the electric board 40, particularly the smooth surface 40a, the back surface of the reinforcing plate 41, particularly the smooth surface 41a, and the optical low-pass filter 49 Dust adhering to the front surface can be wiped off.

  In this embodiment, a vortex drive signal source 83 that outputs a signal for driving the movable part in a vortex is provided. Two types of vortex drive signals are output from the vortex drive signal source 83. One is a Y-direction drive signal for driving the Y-direction drive coils CYA and CYB, and the other is an X-direction drive signal for driving the X-direction drive coil CX. The Y direction drive signal is input to the error amplifying circuits 73 and 74 via the Y signal switches 85a and 85b of the changeover switch 85, and the X direction drive signal is supplied to the error amplifying circuit via the X signal switch 85c of the changeover switch 85. 75.

  One Y signal switch 85a selectively switches one input of the error amplification circuit 73 between the output signals of the integration circuits 70 and 71 and the Y direction drive signal, and the other Y signal switch 85b is an error amplification. One input of the circuit 74 is alternatively switched between the output signals of the integrating circuits 70 and 71 and the Y-direction drive signal. The X signal switch 85c selectively switches one input of the error amplifying circuit 75 between the integrating circuit 82 and the X direction driving signal.

When executing the dust removal operation, the control means CTL switches the switches 85a to 85c of the changeover switch 85 to the spiral drive signal source 83 side. Then, the Y-direction drive signal and the X-direction drive signal are output from the spiral drive signal source 83. In this embodiment, the Y-direction drive signal and the X-direction drive signal are output so that the movable portion 50 moves while drawing a spiral trajectory counterclockwise from the center position. Thus, in this embodiment, when a locus for seven laps is drawn, the movable portion 50 is returned to the center position, and the spiral action (wiping action) is completed. FIG. 14A shows a trajectory when the movable portion can freely move. In this embodiment, the movement of the movable portion 50 is caused by the movable range restriction pin 35 and the movable range restriction hole 42. It is limited to the range indicated by the broken line. Therefore, actually, as shown in FIG. 14B, in a portion where the theoretical movement locus exceeds the movable range, the movement moves so as to draw a square locus along the movement restriction range.
The dust adhering to the smooth surface 40a of the electric substrate 40 and the smooth surface 41a of the reinforcing substrate 41 is moved out of the movable range by the push pin 63 and the substrate support protrusion 65 by the spiral drive of the movable portion 50. And wiped out. Therefore, the parallelism and planarity are maintained constant within the movable range of the movable part 50.

FIG. 15 shows the Y-direction drive signal and the X-direction drive signal output from the vortex drive signal source 83 in order to draw and move the above vortex locus. In this embodiment, the Y direction drive signal is
at ・ sin (2πft)
X direction drive signal is an equation,
a ・ cos (2πft)
Can appear.
Here, a is a constant, f is a period, and t is an elapsed time.

Here, the constant a is a value that is set according to the situation in which the movable part 50 is actually driven, and the period f is preferably about 10 Hz to 20 Hz, and the movable part 50 moves inside and outside the movable range at the period f. The constant a is set as follows.
The time for outputting these Y-direction drive signal and X-direction drive signal is set at the time of manufacture, but a configuration that can be set by the user is preferable.

Also, the Y direction drive signal is expressed by
at ・ sin (2πft−π / 2)
May be set.

  The pitch in the radial direction of the spiral locus is preferably set to be ½ or less (the radius or less) of the diameter of the push pin 63 and the substrate support protrusion 65.

  The timing for executing the above dust removal operation may be periodically executed, for example, when the camera is turned on or immediately before the start of exposure. Moreover, it is good also as a structure performed when the switch which a photographer can operate is operated. Furthermore, characteristics such as the time, waveform, or intensity for outputting the X direction drive signal and the Y direction drive signal may be different between the case of executing immediately before the start of exposure and the other cases. For example, if the output time is shortened immediately before the start of exposure and the output time is lengthened or increased (the constant a is increased) when manually operated, the shutter time lag can be reduced during exposure. In the case of manual dust removal start operation, it is possible to increase the dust removal capability.

  The X direction drive signal and the Y direction drive signal may be generated by converting digital data into an analog signal. In this case, the digital data is previously written in the nonvolatile memory means, and the control means CTL reads out the dust removal operation and converts it into analog X direction drive signal and Y direction drive signal by the D / A converter. Good.

  As described above, according to the embodiment of the present invention, the movable part 50 moves on the plane of the rubbing part by moving in a spiral locus from the movable central part toward the outside as shown in FIG. The dust adhering to the moving part 50 moves outward with respect to the central part of the movable part 50 and is wiped away. Therefore, the cause of the malfunction is removed, and dust or the like is removed from the tip surface 63a of the push pin 63 and the electric board 40 (smooth During the surface 40a), malfunctions caused by entering between the front end surface 65a of the substrate support protrusion 65 and the reinforcing plate 41 (smooth surface 41a) 1 are eliminated. In Cited Document 1, once dust or the like has entered the gap of the rubbing portion, it cannot be easily removed. However, according to the present invention, dust or the like can be removed from the tip surface 63a of the push pin 63 and the electric board 40 (smooth). Even if it enters between the front end surface 65a of the substrate support protrusion 65 and the reinforcing plate 41 (smooth surface 41a) during the surface 40a), it is removed by one or more removal operations.

  In the above embodiment, the same Y-direction drive signal is input to the Y-direction drive coils CYA and CYB during the dust removal operation. However, a different Y-direction drive signal is input and a swing operation is applied to the movable unit 50. Also good.

1 is a vertical side view of a digital camera including a camera shake correction device according to an embodiment of the present invention. It is the disassembled perspective view which looked at the camera shake correction device from the front. It is a rear view of the camera-shake correction apparatus which cuts and shows the drive yoke plate. It is sectional drawing which follows the IV-IV arrow line of FIG. It is sectional drawing which follows the VV arrow line of FIG. It is sectional drawing which follows the VI-VI arrow line of FIG. It is a rear view of a base yoke plate and a magnet. It is an enlarged view of the lower half part of FIG. It is an enlarged view which shows the structure of the board | substrate support pillar and board | substrate support protrusion which support a movable part to an arbitrary direction so that a movement and rotation are possible. It is a perspective view of a camera body showing an example of arrangement of a gyro sensor that detects shake in the X and Y directions and rotational shake around the optical axis. It is a front view of the camera body. It is a side view of the camera body. It is a figure which shows the Example of the control circuit which performs the image blurring correction | amendment of the X and Y direction, the rotation blurring correction | amendment around an axis | shaft parallel to an optical axis, and dust removal operation | movement with a block. It is a figure which shows the movement locus | trajectory of the movable part in the dust removal operation | movement of the said camera shake correction apparatus, Comprising: (A) is a theoretical movement locus | trajectory, (B) is a figure which shows an actual movement locus | trajectory. It is a figure which shows the waveform of the Y direction drive signal and X direction drive signal at the time of making the camera shake correction apparatus perform dust removal operation.

Explanation of symbols

20 Digital camera (camera)
30 Shake correction device (stage device)
31 Base yoke plate 32 Driving yoke plate 33 Support column 35 Movable range regulating pin (movable range regulating means)
40 Electric board (stage board)
40a Smooth surface 41 Reinforcement plate (stage plate)
41a Smooth surface 42 Movable range regulating hole (movable range regulating means)
45 CCD (imaging device)
DESCRIPTION OF SYMBOLS 50 Movable part 61 Board | substrate support pillar 62 Push pin support | pillar 63 Push pin 63a Front end surface 64 Coil spring 65 Substrate support protrusion 65a Front end surface 70 71 72 Integration circuit 73 74 75 Error amplification circuit 76 77 PID calculation circuit 78 79 80 81 PWM driver 82 Integration circuit 83 Spiral drive signal source 85 selector switch 85a 85b Y signal switch 85c X signal switch CTL control means CL correction lens CX X direction drive coil (drive unit)
CYA CYB Y direction drive coil (drive unit)
MCX X-direction driving high magnetic flux density space MCY Y-direction driving high magnetic flux density space ML Magnetic fluid MX X permanent magnet MY Y permanent magnet SDS Vibration detection sensor SX SY Hall element (position sensor)
O Optical axis

Claims (17)

A fixed support substrate;
A stage plate arranged parallel to the fixed support substrate at a predetermined interval;
Friction support means for supporting the stage plate movably in an arbitrary direction within a reference plane by squeezing the parallel smooth surfaces formed on the front and back surfaces of the stage plate from the front and back sides.
Driving means mounted on the fixed support substrate and the stage plate for moving the stage plate in a desired direction;
A stage apparatus comprising: control means for controlling the driving means so that the stage plate moves along a moving trajectory that goes around the center of the movable range of the stage plate. 2. The stage apparatus according to claim 1, wherein the stage plate is formed with parallel smooth surfaces on both sides thereof, and the friction support means is fixed on one side and elastically biased on the other side. A stage device that slidably clamps the surface. 3. The stage apparatus according to claim 1, wherein the driving means includes at least two magnetic flux generating members mounted on one of the fixed support substrate and the stage plate, and each of the magnetic flux generating members mounted on the other. And two driving coils that generate a driving force in different directions within the reference plane in response to the generated magnetic flux, and the control means outputs a driving signal of a predetermined cycle to each of the driving coils. A stage device that moves the stage by drawing a movement trajectory that goes around its movable center. 4. The stage apparatus according to claim 3, wherein the magnetic flux generating member includes an X-direction permanent magnet and a Y-direction permanent magnet arranged in directions orthogonal to each other, and the driving coil includes the X-direction permanent magnet and the Y-direction permanent magnet. A stage apparatus including an X drive coil and a Y drive coil arranged to face a magnet. 5. The stage device according to claim 1, wherein the movement trajectory is a spiral trajectory in which the stage plate circulates in a spiral shape that diverges from the center of the movable range. 6. 5. The stage device according to claim 1, wherein the movement locus is a circular locus that goes around the center of the movable range of the stage plate. 6. A fixed support substrate;
A stage plate arranged parallel to the fixed support substrate at a predetermined interval;
Friction support means for supporting the stage plate movably in an arbitrary direction within a reference plane by squeezing the parallel smooth surfaces formed on the front and back surfaces of the stage plate from the front and back sides.
Imaging means mounted on the stage plate;
Driving means mounted on the fixed support substrate and the stage plate for moving the stage plate in a desired direction;
Vibration detection means for detecting vibration of the mounted device;
Based on the detection result of the vibration detection means, the shake correction drive control means for driving the drive means to perform shake correction so that the blur of the subject image formed on the imaging means is reduced by the imaging optical system of the mounted device. When,
In addition to the blur correction drive, the stage plate includes dust removal drive control means for driving the drive means so as to move along a movement trajectory that goes around the center of the movable range. An image stabilization device. 8. The camera shake correction apparatus according to claim 7, wherein the stage plate is formed with parallel smooth surfaces on both sides thereof, and the friction support means is fixed on one side and elastically biased on the other side. An image stabilization device that slidably clamps the surface. 9. The camera shake correction apparatus according to claim 7, wherein the driving means includes at least two magnetic flux generating members mounted on one of the fixed support substrate and the stage plate, and each magnetic flux generating mounted on the other. The apparatus includes two drive coils that receive magnetic flux generated by the member and generate driving force in different directions within the reference plane, and the dust removal drive control means includes a spiral drive for each drive coil with a predetermined period. An image stabilization device that outputs a signal and moves the stage plate while drawing a movement trajectory that goes around the center of the movable range. 10. The camera shake correction apparatus according to claim 9, wherein the magnetic flux generating member includes an X-direction permanent magnet and a Y-direction permanent magnet arranged in orthogonal directions, and the driving coil includes the X-direction permanent magnet and the Y-direction. An X drive coil and a Y drive coil disposed opposite to the permanent magnet are provided, and the dust removal drive control means outputs a drive signal of a predetermined cycle to each of the X drive coil and the Y drive coil. A camera shake correction apparatus that moves the stage while drawing a movement trajectory that goes around the center of the movable range. 11. The camera shake correction apparatus according to claim 10, wherein the camera shake correction unit is energized to the X drive coil and the Y drive coil so that blur of a subject image formed on the image pickup unit is reduced by an imaging optical system of a camera. And move the stage plate,
The dust removal drive control means includes a spiral drive signal source for energizing the X drive coil and the Y drive coil so that the stage plate moves in a circular path.
Switching means for switching energization to the X drive coil and Y drive coil between the shake correction device and the spiral drive signal source;
The camera shake correction device, wherein the control means switches the switching means to the spiral drive signal source when the dust removal control is performed. 12. The camera shake correction device according to claim 7, wherein the movement trajectory is a vortex trajectory in which the stage plate circulates in a vortex shape that diverges from the center of the movable range. 12. The camera shake correction device according to claim 7, wherein the movement locus is a circular locus that goes around the center of the movable range of the stage plate. The camera shake correction apparatus according to claim 12, wherein a radial pitch of the spiral trajectory is equal to or less than half of a diameter of the fixed member or the pressing member bar-shaped member. In the camera shake correction device according to any one of claims 7 to 14, the dust removal drive control means moves the stage plate to a movable center position at the start of the dust removal operation, and after the dust removal operation ends, An image stabilization apparatus for moving the stage plate to the center of the movable range. 16. The camera shake correction apparatus according to claim 7, wherein the dust removal drive control unit is configured to immediately before exposure, during a movable mirror up operation, or after completion of exposure when a mounted camera is powered on. Or a camera shake correction device that executes the dust removal operation for a predetermined time when a predetermined switch operation is received. A driving method of a stage apparatus including a stage plate arranged parallel to a fixed support substrate at a predetermined interval and supported so as to be movable in an arbitrary direction within a reference plane,
A stage apparatus driving method, characterized in that the stage plate is moved while drawing a movement trajectory that goes around the center of the movable range.