JP2017070030A5 - - Google Patents

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Publication number
JP2017070030A5
JP2017070030A5 JP2015190750A JP2015190750A JP2017070030A5 JP 2017070030 A5 JP2017070030 A5 JP 2017070030A5 JP 2015190750 A JP2015190750 A JP 2015190750A JP 2015190750 A JP2015190750 A JP 2015190750A JP 2017070030 A5 JP2017070030 A5 JP 2017070030A5
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JP
Japan
Prior art keywords
piezoelectric
electrode
driving device
provided above
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2015190750A
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English (en)
Japanese (ja)
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JP6531909B2 (ja
JP2017070030A (ja
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Priority to JP2015190750A priority Critical patent/JP6531909B2/ja
Priority claimed from JP2015190750A external-priority patent/JP6531909B2/ja
Priority to US15/268,972 priority patent/US20170092838A1/en
Priority to CN201610851955.7A priority patent/CN107017334A/zh
Publication of JP2017070030A publication Critical patent/JP2017070030A/ja
Publication of JP2017070030A5 publication Critical patent/JP2017070030A5/ja
Application granted granted Critical
Publication of JP6531909B2 publication Critical patent/JP6531909B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015190750A 2015-09-29 2015-09-29 圧電駆動装置、モーター、ロボット及びポンプ Active JP6531909B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015190750A JP6531909B2 (ja) 2015-09-29 2015-09-29 圧電駆動装置、モーター、ロボット及びポンプ
US15/268,972 US20170092838A1 (en) 2015-09-29 2016-09-19 Piezoelectric driving apparatus, method of manufacturing the same, motor, robot, and pump
CN201610851955.7A CN107017334A (zh) 2015-09-29 2016-09-26 压电驱动装置及其制造方法、马达、机器人以及泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015190750A JP6531909B2 (ja) 2015-09-29 2015-09-29 圧電駆動装置、モーター、ロボット及びポンプ

Publications (3)

Publication Number Publication Date
JP2017070030A JP2017070030A (ja) 2017-04-06
JP2017070030A5 true JP2017070030A5 (cg-RX-API-DMAC10.html) 2018-10-18
JP6531909B2 JP6531909B2 (ja) 2019-06-19

Family

ID=58495443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015190750A Active JP6531909B2 (ja) 2015-09-29 2015-09-29 圧電駆動装置、モーター、ロボット及びポンプ

Country Status (1)

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JP (1) JP6531909B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6946893B2 (ja) * 2017-09-22 2021-10-13 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008301557A (ja) * 2007-05-29 2008-12-11 Kyocera Corp 超音波モータ駆動装置
JP2012231595A (ja) * 2011-04-26 2012-11-22 Canon Inc 振動装置の駆動回路、塵埃除去装置及び振動型アクチュエータにおける振動装置の駆動回路
JP5983018B2 (ja) * 2012-05-16 2016-08-31 セイコーエプソン株式会社 圧電モーター、圧電モーター装置、駆動回路及び駆動方法

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