JP2017067471A - 部材変位量測定装置 - Google Patents
部材変位量測定装置 Download PDFInfo
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Abstract
Description
11 支持部材
12 取付部材
13 固定部材
14 ミラー
15 変位測定器
21 鏡面部
21a 第1鏡面部
21b 第2鏡面部
23 光分離合成器
24 ミラー
25 変位測定器
25a,25b 変位測定器
Claims (4)
- 機器が取り付けられる取付部材が支持部材に固着された際の、当該支持部材に対する前記取付部材の変位量を測定する部材変位量測定装置であって、
前記取付部材の面を鏡面研磨して形成された鏡面部と、
前記鏡面部の異なる位置に検出光を照射し、その反射光を受光して、受光点のズレ量から前記変位量を測定する変位測定器と、
を備えることを特徴とする部材変位量測定装置。 - 請求項1に記載の部材変位量測定装置であって、
前記鏡面部は少なくとも2つ以上設けられ、各鏡面部に前記検出光が照射されることを特徴とする部材変位量測定装置。 - 請求項1又は2に記載の部材変位量測定装置であって、
1つの前記変位測定器からの検出光を2つ以上の光路に分けて前記鏡面部に照射させ、また前記鏡面部からの反射光を同一光路に纏めて前記変位測定器に入射させる光分離合成器を備えることを特徴とする部材変位量測定装置。 - 請求項1又は2に記載の部材変位量測定装置であって、
前記変位測定器を複数設けて、それぞれの前記変位測定器が前記鏡面部の異なる位置に前記検出光を照射して、当該位置における前記変位量を計測することを特徴とする部材変位量測定装置。
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JP2017067471A true JP2017067471A (ja) | 2017-04-06 |
JP6619189B2 JP6619189B2 (ja) | 2019-12-11 |
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