JP2017041586A - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JP2017041586A JP2017041586A JP2015163512A JP2015163512A JP2017041586A JP 2017041586 A JP2017041586 A JP 2017041586A JP 2015163512 A JP2015163512 A JP 2015163512A JP 2015163512 A JP2015163512 A JP 2015163512A JP 2017041586 A JP2017041586 A JP 2017041586A
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- 238000012545 processing Methods 0.000 claims abstract description 67
- 238000005259 measurement Methods 0.000 claims abstract description 39
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- 235000012431 wafers Nutrition 0.000 description 69
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- 230000009257 reactivity Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- CGRVKSPUKAFTBN-UHFFFAOYSA-N N-silylbutan-1-amine Chemical compound CCCCN[SiH3] CGRVKSPUKAFTBN-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- SEQDDYPDSLOBDC-UHFFFAOYSA-N Temazepam Chemical compound N=1C(O)C(=O)N(C)C2=CC=C(Cl)C=C2C=1C1=CC=CC=C1 SEQDDYPDSLOBDC-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- JYXPWUYLZPYOAH-UHFFFAOYSA-N methylhydrazine Chemical compound CN=N JYXPWUYLZPYOAH-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- LXEXBJXDGVGRAR-UHFFFAOYSA-N trichloro(trichlorosilyl)silane Chemical compound Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl LXEXBJXDGVGRAR-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
- C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
- C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Abstract
Description
本実施形態の成膜装置の一例について説明する。図2は、本実施形態の成膜装置の概略縦断面図である。図3は、本実施形態の成膜装置の概略平面図である。尚、図3では、説明の便宜上、天板の図示を省略している。
本実施形態の成膜装置による成膜方法の一例について説明する。
まず、搬送口17に設けられたゲートバルブ18を開き、処理容器11の外部から搬送機構2Aにより搬送口17を介してウエハWを回転テーブル12の凹部16内に受け渡す。この受け渡しは、凹部16が搬送口17に臨む位置に停止したときに凹部16の底面の貫通孔を介して処理容器11の底部側から不図示の昇降ピンが昇降することにより行われる。このようなウエハWの受け渡しを、回転テーブル12を間欠的に回転させて行い、回転テーブル12の5つの凹部16内にそれぞれウエハWを載置する。
次に、ゲートバルブ18を閉じ、排気口26に接続された不図示の真空ポンプにより処理容器11内を引き切りの状態にする。分離ガスノズル22、24から分離ガスであるN2ガスを所定流量で吐出し、回転テーブル12の中心部領域の空間28にN2ガスを所定流量で供給する。これに伴い、排気口26に接続された不図示の圧力調整手段により処理容器11内を予め設定した圧力に調整する。
ウエハWの表面に所望の膜厚の反応生成物が形成された後、処理容器11へのガスの供給が停止され、回転テーブル12の回転が停止され、処理容器11内にウエハWを搬入したときの手順と逆の手順により、処理容器11内からウエハWを搬出する。
本実施形態の成膜装置による温度制御方法について説明する。
本実施形態では、制御手段5は、ウエハWに対して所定の成膜処理を行う場合、放射温度測定手段4により測定される測定値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことによりヒータ20へ供給する電力を制御する。また、制御手段5は、処理容器11に対してウエハWの搬入又は搬出を行う場合、熱電対3により測定される測定値と放射温度測定手段4により測定される測定値とに基づいて算出される算出値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことによりヒータ20へ供給する電力を制御する。
本実施形態では、制御手段5は、ウエハWに対して所定の成膜処理を行う場合、放射温度測定手段4により測定される測定値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことによりヒータ20へ供給する電力を制御する。また、制御手段5は、処理容器11に対してウエハWの搬入又は搬出を行う場合、熱電対3により測定される測定値及び放射温度測定手段4により測定される測定値を参照することなく、ヒータ20へ供給する電力を制御する。
本実施形態では、制御手段5は、ウエハWに対して所定の成膜処理を行う場合、放射温度測定手段4により測定される測定値が予め定められた所定の温度に維持されるようにPID制御を行うことによりヒータ20へ供給する電力を制御する。また、制御手段5は、処理容器11に対してウエハWの搬入又は搬出を行う場合、放射温度測定手段4により測定される測定値が予め定められた所定の温度に維持されるようにPID制御を行うことによりヒータ20へ供給する電力を制御する。さらに、制御手段5は、ウエハWに対して所定の成膜処理を行う場合と、処理容器11に対してウエハWの搬入又は搬出を行う場合とにおいて、PID制御のパラメータを変更する。
本実施形態では、制御手段5は、ウエハWに対して所定の成膜処理を行う場合、熱電対3により測定される測定値と放射温度測定手段4により測定される測定値とに基づいて算出される算出値を用いて、熱電対3により測定される測定値を補正し、その補正された測定値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことによりヒータ20へ供給する電力を制御する。また、制御手段5は、処理容器11に対してウエハWの搬入又は搬出を行う場合、熱電対3により測定される測定値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことによりヒータ20へ供給する電力を制御する。
11 処理容器
12 回転テーブル
20 ヒータ
3 熱電対
4 放射温度測定手段
5 制御手段
W ウエハ
Claims (6)
- 処理容器内に設けられた回転テーブルの上面に基板を載置し、回転テーブルを回転させながら加熱手段により基板を加熱して所定の成膜処理を行う成膜装置であって、
前記加熱手段の温度を測定する接触型の第1温度測定手段と、
前記回転テーブルに載置された基板の温度を測定する非接触型の第2温度測定手段と、
前記第1温度測定手段により測定される第1測定値及び/又は前記第2温度測定手段により測定される第2測定値に基づいて前記加熱手段へ供給する電力を制御する制御手段と、
を備え、
前記制御手段は、前記基板に対して所定の成膜処理を行う場合と、前記処理容器に対して前記基板の搬入又は搬出を行う場合とにおいて、前記加熱手段へ供給する電力の制御方法を変更する、
成膜装置。 - 前記制御手段は、
前記基板に対して所定の成膜処理を行う場合、前記第2温度測定手段により測定される第2測定値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことにより前記加熱手段へ供給する電力を制御し、
前記処理容器に対して前記基板の搬入又は搬出を行う場合、前記第1温度測定手段により測定される第1測定値と前記第2温度測定手段により測定される第2測定値とに基づいて算出される算出値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことにより前記加熱手段へ供給する電力を制御する、
請求項1に記載の成膜装置。 - 前記制御手段は、
前記基板に対して所定の成膜処理を行う場合、前記第2温度測定手段により測定される第2測定値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことにより前記加熱手段へ供給する電力を制御し、
前記処理容器に対して前記基板の搬入又は搬出を行う場合、前記第1温度測定手段により測定される第1測定値及び前記第2温度測定手段により測定される第2測定値を参照することなく、前記加熱手段へ供給する電力を制御する、
請求項1に記載の成膜装置。 - 前記制御手段は、
前記基板に対して所定の成膜処理を行う場合、前記第2温度測定手段により測定される第2測定値が予め定められた所定の温度に維持されるようにPID制御を行うことにより前記加熱手段へ供給する電力を制御し、
前記処理容器に対して前記基板の搬入又は搬出を行う場合、前記第2温度測定手段により測定される第2測定値が予め定められた所定の温度に維持されるようにPID制御を行うことにより前記加熱手段へ供給する電力を制御し、
前記基板に対して所定の成膜処理を行う場合と、前記処理容器に対して前記基板の搬入又は搬出を行う場合とにおいて、前記PID制御のパラメータを変更する、
請求項1に記載の成膜装置。 - 前記制御手段は、
前記基板に対して所定の成膜処理を行う場合、前記第1温度測定手段により測定される第1測定値と前記第2温度測定手段により測定される第2測定値とに基づいて算出される算出値を用いて前記第1測定値を補正し、補正された前記第1測定値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことにより前記加熱手段へ供給する電力を制御し、
前記処理容器に対して前記基板の搬入又は搬出を行う場合、前記第1温度測定手段により測定される第1測定値が予め定められた所定の温度に維持されるようにフィードバック制御を行うことにより前記加熱手段へ供給する電力を制御する、
請求項1に記載の成膜装置。 - 前記第1温度測定手段は、熱電対であり、
前記第2温度測定手段は、前記基板から放射される赤外線を検出する温度測定手段である、
請求項1乃至5のいずれか一項に記載の成膜装置。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06177116A (ja) * | 1992-12-09 | 1994-06-24 | Hitachi Ltd | ガス処理装置 |
JP2000064029A (ja) * | 1998-08-20 | 2000-02-29 | Toshiba Mach Co Ltd | 半導体製造装置の温度制御機構 |
JP2000188261A (ja) * | 1998-12-22 | 2000-07-04 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
JP2001210596A (ja) * | 2000-01-28 | 2001-08-03 | Hitachi Kokusai Electric Inc | 半導体製造装置の温度制御方法、半導体製造装置、および半導体デバイスの製造方法 |
JP2003257873A (ja) * | 2002-03-04 | 2003-09-12 | Hitachi Ltd | 半導体製造方法および半導体製造装置 |
JP2003282461A (ja) * | 2002-03-27 | 2003-10-03 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09246261A (ja) * | 1996-03-08 | 1997-09-19 | Tokyo Electron Ltd | 熱処理装置とその温度制御方法 |
JP2009144211A (ja) | 2007-12-15 | 2009-07-02 | Tokyo Electron Ltd | 処理装置、その使用方法及び記憶媒体 |
US8961691B2 (en) * | 2008-09-04 | 2015-02-24 | Tokyo Electron Limited | Film deposition apparatus, film deposition method, computer readable storage medium for storing a program causing the apparatus to perform the method |
WO2012139006A2 (en) * | 2011-04-07 | 2012-10-11 | Veeco Instruments Inc. | Metal-organic vapor phase epitaxy system and process |
JP5630379B2 (ja) | 2011-05-26 | 2014-11-26 | 東京エレクトロン株式会社 | 温度測定装置、温度測定方法、記憶媒体及び熱処理装置 |
JP6091932B2 (ja) | 2012-03-22 | 2017-03-08 | 株式会社ニューフレアテクノロジー | 炭化珪素の成膜装置および炭化珪素の成膜方法 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06177116A (ja) * | 1992-12-09 | 1994-06-24 | Hitachi Ltd | ガス処理装置 |
JP2000064029A (ja) * | 1998-08-20 | 2000-02-29 | Toshiba Mach Co Ltd | 半導体製造装置の温度制御機構 |
JP2000188261A (ja) * | 1998-12-22 | 2000-07-04 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
JP2001210596A (ja) * | 2000-01-28 | 2001-08-03 | Hitachi Kokusai Electric Inc | 半導体製造装置の温度制御方法、半導体製造装置、および半導体デバイスの製造方法 |
JP2003257873A (ja) * | 2002-03-04 | 2003-09-12 | Hitachi Ltd | 半導体製造方法および半導体製造装置 |
JP2003282461A (ja) * | 2002-03-27 | 2003-10-03 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021527963A (ja) * | 2018-06-19 | 2021-10-14 | アイクストロン、エスイー | Cvdリアクタのサセプタ表面温度を計測するための装置 |
JP7377824B2 (ja) | 2018-06-19 | 2023-11-10 | アイクストロン、エスイー | Cvdリアクタのサセプタ表面温度を計測するための装置 |
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