JP2017039079A - Two-fluid spray apparatus and control method for same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent liquid dripping that occurs when a two-fluid nozzle stops operating.SOLUTION: A two-fluid spray apparatus comprises: a liquid pipe 5 which includes a liquid separation part 2 separating a pressurized liquid into a liquid supply side liquid and a liquid discharge side liquid, and includes a liquid rising part 4 formed between the liquid separation part and a connection part of a liquid drain pipe 3 and extending to a location where a height of an end portion of the connection part is larger than a height in a direction perpendicular to the liquid separation part; and a liquid drain valve 7 provided between the liquid rising part and the liquid separation part, turned into an open state when the liquid within the liquid drain pipe is discharged, and turned into the open state until a next spray operation of a two-fluid nozzle 9 starts, and further comprises a liquid storage mechanism 8 causing the pressurized liquid to naturally remain in a pipe passage when a liquid supply stop valve 10 and the liquid drain valve are turned into open states to supply the pressurized liquid, the two-fluid spray apparatus being configured such that the two-fluid nozzle is disposed in a location where a height in the perpendicular direction is larger than a highest portion of the liquid rising part in the liquid storage mechanism, and liquid dripping from the two-fluid nozzle is prevented when the spray operation of the two-fluid nozzle stops.SELECTED DRAWING: Figure 2

Description

  Embodiments described herein relate generally to a two-fluid spray device and a control method thereof.

  For example, various two-fluid spraying apparatuses applied to a clean room have been developed.

JP 2007-154733 A JP-A-8-278047 JP 2010-63960 A

  However, the conventional two-fluid spray device has the following problems. For example, in Patent Document 1, the liquid remaining in the pipe is blown in by blowing air from another flow path to prevent dripping. However, this method has the following problems.

(1) When the amount to be sprayed is reduced, there is a risk that the liquid will be ejected after stopping due to the residual pressure of the pipe, or that the liquid in the pipe will droop.

(2) When the amount to be sprayed is increased, it takes a considerable time to blow, and thus cannot be used for a control device that requires finely controlling the spray amount.

(3) When used in a large-scale spray system (for example, when 20 nozzles are arranged at equal intervals in a 20 m length), dripping of all the nozzles is effective and low cost. It was difficult to prevent dripping.

  In Patent Document 2, there are up to four nozzles that can be attached to one ball, and the nozzles can be arranged only in a concentrated manner, and there are problems with the cost of the balls and the difficulty of installation.

  In Patent Document 3, since a large amount of air enters the liquid pipe, the compressed air in the water pipe is not supplied when the supply of air to the nozzle is stopped unless almost all the water in the water pipe is returned to the buffer tank. Due to the expansion, there is a problem in that a little water remaining in various places in the system is pushed out and dripping occurs.

  The present embodiment has been made to solve the above-described problems, and provides a two-fluid spraying device that can easily prevent dripping that occurs when the spraying operation of the two-fluid nozzle is stopped, and a control method therefor. The purpose is to provide.

  The embodiment is configured as follows.

That is, a liquid supply unit that supplies pressurized liquid, and a liquid separation unit that separates the pressurized liquid from the liquid supply unit into a liquid supply side and a liquid discharge side, and are separated into the liquid discharge side. The pressurized liquid can be discharged to the drainage part of the drainage pipe, and the height of the end of the connection part formed between the liquid separation part and the connection part of the drainage pipe is the liquid separation. A liquid pipe having a liquid rising part extending to a position higher than the vertical height from the part, and a gas supply means capable of stopping the supply of compressed gas,
A two-fluid nozzle for spraying an atomized fluid obtained by supplying a compressed gas from the gas supply means and a pressurized liquid from the liquid separation unit to a desired position; and the liquid pipe and the liquid separation unit And a liquid supply stop valve for stopping the supply of pressurized liquid, the liquid pipe, provided between the liquid rising part and the liquid separation part, and the drain pipe. A drain valve that is opened when the liquid inside is drained, and is opened until the next spraying operation of the two-fluid nozzle is started, the liquid pipe, the liquid separation unit, and the two-fluid A general term for a piping path including a portion to which a nozzle is connected, the liquid separation unit, the drainage valve, and the liquid rising portion, and the liquid supply stop valve and the drainage valve are opened. When the pressurized liquid is supplied from the liquid supply means, A liquid storage mechanism in which the pressurized liquid remains in the path naturally, and the two-fluid nozzle is disposed at a position where the vertical height of the liquid storage mechanism is higher than the uppermost part of the liquid rising portion, The two-fluid spraying device is configured to prevent dripping from the two-fluid nozzle when the spraying operation of the two-fluid nozzle is stopped.

  According to this embodiment, it is possible to easily prevent dripping that occurs when the spraying operation of the two-fluid nozzle is stopped.

The figure for demonstrating the outline | summary of the system to which this embodiment is applied. The schematic block diagram for demonstrating the two fluid spraying apparatus of this embodiment. The time chart for demonstrating the control method of the two fluid spraying apparatus of this embodiment.

  Hereinafter, embodiments will be described with reference to the drawings.

  First, an outline of a system to which a two-fluid spray device 100 of the present embodiment described below is applied will be described with reference to FIG.

  For example, the semiconductor manufacturing apparatus 02 is installed in the clean room 01, and air is supplied to and returned from the air conditioner 03 so that the temperature and humidity inside the clean room 01 become predetermined values. The temperature and humidity in 01 are detected by a detector, and this is taken into the air conditioning control panel 09 and proportional to the chilled water supply system supplied to the cooling coil 04 in the air conditioner 03 according to the difference between these and the target value. The command of the control valve 011 is changed, and further, the command of the proportional control valve 012 of the hot water supply system supplied to the heating coil 05 provided in the air conditioner 03 is changed.

  As a configuration other than this, in the air conditioner 03, the two-fluid spray header unit 06 having a plurality of two-fluid nozzles 9 and the atmosphere sprayed from the two-fluid spray header unit 06 are forced into the clean room 01. And a steam humidifying unit 08 to be described later. The steam humidification unit 08 is supplied with the steam on the secondary side of the proportional control valve 013 provided in the steam system installed outside the air conditioner 03, and the command of the proportional control valve 013 is from a nozzle control panel 010 described later. It has come to be given.

The nozzle control panel 010 is given an existing steam humidification command from the air conditioning control panel 09, and based on this, a command is given to the proportional control valve 013. The nozzle control panel 010 is connected to a nozzle unit 06 described later. A pressurized liquid supply system such as a pressurized pure water supply system W and a compressed gas supply system such as a compressed air (compressed air) supply system A are connected, and the two-fluid spray of this embodiment is placed in the middle of these systems W and A. An apparatus 100 is provided. Pipes are provided so that the pure water w from the pressurized pure water supply system W and the compressed air a from the compressed air supply system A are supplied to the plurality of two-fluid nozzles 9 via the nozzle unit 06, respectively. Yes.

  The plurality of two-fluid nozzles 9 spray the atomized fluid obtained by mixing the compressed air a and the pure water w onto a desired location. For example, the pressure of the compressed air a is applied to the pure water supply system W. If there is an influence and the pure water w of the pure water supply system W is not pressurized, the compressed air a has a characteristic of flowing backward to the pure water supply system W.

  FIG. 2 is a diagram for explaining a schematic configuration of the two-fluid spraying apparatus of the present embodiment, which includes a pressurized liquid supply system W, a compressed gas supply system A, and a two-fluid nozzle 9 described below. Yes.

  The pressurized liquid supply system W includes a liquid supply means for supplying a pressurized liquid, for example, a liquid supply source 1, and a liquid separation unit 2 that separates the pressurized liquid from the liquid supply source 1 into a liquid supply side and a liquid discharge side. The pressurized liquid separated on the liquid discharge side can be discharged to the drainage part of the drainage pipe 3 and is formed and connected between the liquid separation part 2 and the connection part 11 of the drainage pipe 3. A liquid pipe 5 having a liquid rising portion 4 extending to a position where the height of the end portion of the portion 11 is higher than the height in the vertical direction from the liquid separation portion 2 is provided. The liquid pipe 5 is provided between the liquid separation unit 2 and the liquid supply source 1, and the liquid supply stop valve 10 for stopping the supply of pressurized liquid, and the liquid pipe 5 and the liquid rising part 4 are separated from the liquid supply source 1. A drainage valve 7 provided between the liquid parts 2 and opened when the liquid in the drainage pipe 3 is drained and opened until the next spraying operation of the two-fluid nozzle 9 described later is started. And a pipe line including the liquid pipe 5 and the connection part 12 to which the liquid separation part 2 and the two-fluid nozzle 9 are connected, the liquid separation part 2, the drainage valve 7, and the liquid rising part 4. And a liquid storage mechanism 8 in which the pressurized liquid naturally remains in the piping path when the pressurized liquid from the liquid supply source 1 is supplied with the liquid supply stop valve 10 and the drain valve 7 opened. Yes.

  The compressed gas supply system A is a gas supply means capable of stopping supply of compressed gas, for example, a gas supply source 6, and a compressed gas from the gas supply source 6 via the gas pipe 12. The gas supply stop valve 021 for stopping the supply is provided.

  The two-fluid nozzle 9 sprays the spray fluid obtained by supplying the compressed gas from the gas pipe 12 and the pressurized liquid from the liquid pipe 5 in a desired space.

  In such a configuration, the two-fluid nozzle 9 is disposed at a position where the vertical height of the liquid storage mechanism 8 is higher than the uppermost part of the liquid rising portion, and the spraying operation of the two-fluid nozzle 9 is stopped. In addition, no dripping from the two-fluid nozzle 9 occurs.

  Specifically, the control method is performed as follows. The two-fluid nozzle 9 is arranged at a position where the vertical height of the liquid storage mechanism 8 is higher than the uppermost part of the liquid rising portion 4, and the drain valve 7 is sprayed by the two-fluid nozzle 9 as shown in FIG. 3. This is a control method for a two-fluid spraying device that is in an open state when it is stopped, and is in an open state until the next spray operation of the two-fluid nozzle 9 is started.

  According to the embodiment described above, it is possible to easily prevent the dripping that occurs when the spraying operation of the two-fluid nozzle 9 is stopped, particularly in the spraying apparatus using a plurality of two-fluid nozzles 9 having a counter pressure. A control method for a fluid spraying device and a two-fluid spraying device can be provided.

  According to the embodiment described above, it is possible to improve a point that becomes a problem when the E10696JP01 filed earlier by the present applicant is put into practical use. Specifically, the problem is that if the drain valve is open, all the water in the water header will be drained, and more water will be consumed than necessary, so it is necessary to close the drain valve. It was. At this time, when the drain valve is closed, there are falling pipes with different lengths, and if water remains somewhere, water may flow out of the nozzle, so the piping structure does not create a rising pipe. Or, it was necessary to open the drain valve until almost all of the water in the water header was discharged. For this reason, when the nozzles are arranged at a long distance, it is necessary to arrange the liquid manifold within a certain distance from the nozzles.

  The embodiment described above can be implemented with the following modifications. In other words, at least the internal volume of the liquid rising portion 4 of the liquid storage mechanism 8 may be variable. Further, the liquid rising portion 4 of the liquid storage mechanism 8 may be made of a flexible material. Further, when the two-fluid nozzle 9 supplies only the compressed gas without supplying the pressurized liquid, the pressure of the compressed gas is transmitted to the liquid path of the liquid supply source 1 and the compressed gas is transmitted to the liquid supply source 1. Those having the characteristic of flowing in the direction opposite to the direction in which the pressurized liquid originally flows may be used.

  Moreover, it is desirable that the diameter of the liquid rising portion 4 of the liquid storage mechanism 8 is 25 mm or less.

  The liquid rising portion 4 of the liquid storage mechanism 8 may be subjected to surface tension when the pressurized liquid in the liquid storage mechanism 8 is discharged.

  In the control method of the above-described two-fluid spraying device, when the liquid storage mechanism 8 is sufficiently drained, the drainage valve 7 is closed after the liquid level in the liquid pipe 5 becomes balanced. May be.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 1 ... Liquid supply source, 2 ... Separation part, 3 ... Drainage piping, 4 ... Liquid rise part, 5 ... Liquid piping, 6 ... Gas supply source, 7 ... Drainage valve, 8 ... Liquid storage mechanism, 9 ... Two Fluid nozzle, 10... Liquid supply stop valve, 11, 12.

Claims (8)

Liquid supply means for supplying pressurized liquid;
A liquid separation unit that separates the pressurized liquid from the liquid supply means into a liquid supply side and a liquid discharge side; and the pressurized liquid separated into the liquid discharge side is supplied to a drainage part of a drainage pipe. Liquid rising that can be discharged and extends to a position where the height of the end of the connecting portion is higher than the height in the vertical direction from the separating portion, formed between the separating portion and the connecting portion of the draining pipe. A liquid pipe having a section;
Gas supply means capable of stopping supply of compressed gas;
A two-fluid nozzle for spraying the atomized fluid obtained by supplying the compressed gas from the gas supply means and the pressurized liquid from the liquid separation unit to a desired position;
A liquid supply stop valve that is provided between the liquid separation unit and the liquid supply means in the liquid pipe and stops supplying pressurized liquid;
The liquid pipe, which is provided between the liquid rising part and the liquid separation part, is opened when the liquid in the drain pipe is drained, and the next spraying operation of the two-fluid nozzle is started. A drain valve that remains open until
The liquid pipe is a general term for a pipe path including a portion where the liquid separation portion and the two-fluid nozzle are connected, the liquid separation portion, the drainage valve, and the liquid rising portion, A liquid storage mechanism in which when the liquid supply stop valve and the drainage valve are opened to supply the pressurized liquid from the liquid supply means, the pressurized liquid naturally remains in the piping path;
The two-fluid nozzle is arranged at a position where the vertical height of the liquid storage mechanism is higher than the uppermost part of the liquid rising portion, and when the spraying operation of the two-fluid nozzle is stopped, A two-fluid spraying device characterized by preventing dripping.   2. The two-fluid spraying device according to claim 1, wherein at least the internal volume of the liquid rising portion of the liquid storage mechanism is variable.   The two-fluid spray device according to claim 1, wherein the liquid rising portion of the liquid storage mechanism is made of a flexible material.   When the two-fluid nozzle supplies only the compressed gas without supplying the pressurized liquid, the pressure of the compressed gas is transmitted to the liquid path of the liquid supply means, and the compressed gas is supplied to the liquid. The two-fluid spraying device according to claim 1, wherein the device has a characteristic of flowing in the direction opposite to the direction in which the pressurized liquid flows. Liquid supply means for supplying pressurized liquid;
A liquid separation unit that separates the pressurized liquid from the liquid supply means into a liquid supply side and a liquid discharge side; and the pressurized liquid separated into the liquid discharge side is supplied to a drainage part of a drainage pipe. Liquid rising that can be discharged and extends to a position where the height of the end of the connecting portion is higher than the height in the vertical direction from the separating portion, formed between the separating portion and the connecting portion of the draining pipe. A liquid pipe having a section;
Gas supply means capable of stopping supply of compressed gas;
A two-fluid nozzle for spraying the atomized fluid obtained by supplying the compressed gas from the gas supply means and the pressurized liquid from the liquid separation unit to a desired position;
A liquid supply stop valve that is provided between the liquid separation unit and the liquid supply means in the liquid pipe and stops supplying pressurized liquid;
A drainage valve that is provided between the liquid rising portion and the liquid separation portion in the liquid pipe and is opened when draining the liquid in the drainage pipe;
The liquid pipe is a general term for a pipe path including a portion where the liquid separation portion and the two-fluid nozzle are connected, the liquid separation portion, the drainage valve, and the liquid rising portion, A two-fluid spraying device comprising: a liquid storage mechanism in which the pressurized liquid naturally remains in the pipe path when the pressurized liquid from the liquid supply means is supplied with the liquid supply stop valve and the drain valve opened. In
The two-fluid nozzle is disposed at a position where the vertical height of the liquid storage mechanism is higher than the uppermost part of the liquid rising portion, and the drain valve is opened when the spray operation of the two-fluid nozzle is stopped, A control method for a two-fluid spraying device in which the two-fluid nozzle is opened until the next spraying operation of the two-fluid nozzle is started.   6. The drain valve according to claim 5, wherein when the liquid storage mechanism is sufficiently drained, the drain valve is closed after the liquid level is balanced in the liquid pipe. Control method for two-fluid spraying device.   The two-fluid spray device according to claim 1, wherein a diameter of a liquid rising portion of the liquid storage mechanism is 25 mm or less.   The two-fluid spray device according to claim 1, wherein a surface tension acts on the liquid rising portion of the liquid storage mechanism when the pressurized liquid in the liquid storage mechanism is discharged.

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