JP2017032797A - 積層レンズ構造体およびその製造方法、並びに電子機器 - Google Patents

積層レンズ構造体およびその製造方法、並びに電子機器 Download PDF

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Publication number
JP2017032797A
JP2017032797A JP2015152919A JP2015152919A JP2017032797A JP 2017032797 A JP2017032797 A JP 2017032797A JP 2015152919 A JP2015152919 A JP 2015152919A JP 2015152919 A JP2015152919 A JP 2015152919A JP 2017032797 A JP2017032797 A JP 2017032797A
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JP
Japan
Prior art keywords
lens
substrate
laminated
resin
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015152919A
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English (en)
Japanese (ja)
Inventor
山本 篤志
Atsushi Yamamoto
篤志 山本
竹内 幸一
Koichi Takeuchi
幸一 竹内
利博 黒部
Toshihiro Kurobe
利博 黒部
松谷 弘康
Hiroyasu Matsutani
弘康 松谷
啓之 伊藤
Hiroyuki Ito
啓之 伊藤
齋藤 卓
Taku Saito
卓 齋藤
啓示 大島
Keiji Oshima
啓示 大島
宣年 藤井
Nobutoshi Fujii
藤井  宣年
田澤 洋志
Hiroshi Tazawa
洋志 田澤
白岩 利章
Toshiaki Shiraiwa
利章 白岩
石田 実
Minoru Ishida
実 石田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Semiconductor Solutions Corp
Original Assignee
Sony Semiconductor Solutions Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Semiconductor Solutions Corp filed Critical Sony Semiconductor Solutions Corp
Priority to JP2015152919A priority Critical patent/JP2017032797A/ja
Priority to PCT/JP2016/003371 priority patent/WO2017022192A1/en
Priority to EP16751020.5A priority patent/EP3329315B1/en
Priority to CN201680040007.3A priority patent/CN107850758A/zh
Priority to KR1020177036647A priority patent/KR20180034329A/ko
Priority to US15/741,528 priority patent/US10627549B2/en
Publication of JP2017032797A publication Critical patent/JP2017032797A/ja
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0075Arrays characterized by non-optical structures, e.g. having integrated holding or alignment means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00009Production of simple or compound lenses
    • B29D11/00278Lenticular sheets
    • B29D11/00307Producing lens wafers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00009Production of simple or compound lenses
    • B29D11/00365Production of microlenses
    • B29D11/00375Production of microlenses by moulding lenses in holes through a substrate
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/001Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0085Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing wafer level optics
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/32Fiducial marks and measuring scales within the optical system
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0037Arrays characterized by the distribution or form of lenses
    • G02B3/0062Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0037Arrays characterized by the distribution or form of lenses
    • G02B3/0062Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • G02B3/0068Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between arranged in a single integral body or plate, e.g. laminates or hybrid structures with other optical elements
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B30/00Camera modules comprising integrated lens units and imaging units, specially adapted for being embedded in other devices, e.g. mobile phones or vehicles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14625Optical elements or arrangements associated with the device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14625Optical elements or arrangements associated with the device
    • H01L27/14627Microlenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14685Process for coatings or optical elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14687Wafer level processing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/04Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Lens Barrels (AREA)
  • Studio Devices (AREA)
  • Cameras In General (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP2015152919A 2015-07-31 2015-07-31 積層レンズ構造体およびその製造方法、並びに電子機器 Pending JP2017032797A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2015152919A JP2017032797A (ja) 2015-07-31 2015-07-31 積層レンズ構造体およびその製造方法、並びに電子機器
PCT/JP2016/003371 WO2017022192A1 (en) 2015-07-31 2016-07-19 Stacked lens structure, method of manufacturing the same, and electronic apparatus
EP16751020.5A EP3329315B1 (en) 2015-07-31 2016-07-19 Stacked lens structure, method of manufacturing the same, and electronic apparatus
CN201680040007.3A CN107850758A (zh) 2015-07-31 2016-07-19 堆叠型透镜结构、堆叠型透镜结构制造方法和电子设备
KR1020177036647A KR20180034329A (ko) 2015-07-31 2016-07-19 적층 렌즈 구조체, 그 제조 방법 및 전자 기기
US15/741,528 US10627549B2 (en) 2015-07-31 2016-07-19 Stacked lens structure, method of manufacturing the same, and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015152919A JP2017032797A (ja) 2015-07-31 2015-07-31 積層レンズ構造体およびその製造方法、並びに電子機器

Publications (1)

Publication Number Publication Date
JP2017032797A true JP2017032797A (ja) 2017-02-09

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JP2015152919A Pending JP2017032797A (ja) 2015-07-31 2015-07-31 積層レンズ構造体およびその製造方法、並びに電子機器

Country Status (6)

Country Link
US (1) US10627549B2 (ko)
EP (1) EP3329315B1 (ko)
JP (1) JP2017032797A (ko)
KR (1) KR20180034329A (ko)
CN (1) CN107850758A (ko)
WO (1) WO2017022192A1 (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018173794A1 (ja) * 2017-03-23 2018-09-27 ソニーセミコンダクタソリューションズ株式会社 積層レンズ構造体及びその製造方法、並びに、電子機器
CN110383446A (zh) * 2017-03-16 2019-10-25 Ev 集团 E·索尔纳有限责任公司 用于接合至少三个衬底的方法
WO2020008591A1 (ja) * 2018-07-05 2020-01-09 オリンパス株式会社 撮像装置、内視鏡、および、撮像装置の製造方法
CN110383446B (zh) * 2017-03-16 2024-07-16 Ev集团E·索尔纳有限责任公司 用于接合至少三个衬底的方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6967830B2 (ja) * 2015-07-31 2021-11-17 ソニーセミコンダクタソリューションズ株式会社 半導体装置、レンズモジュール及びその製造方法、並びに、電子機器
CN106054289B (zh) * 2016-05-27 2019-01-25 京东方科技集团股份有限公司 一种显示面板、显示装置
JP6949515B2 (ja) 2017-03-15 2021-10-13 ソニーセミコンダクタソリューションズ株式会社 カメラモジュール及びその製造方法、並びに、電子機器
CN108132558B (zh) * 2018-01-26 2020-08-25 福州京东方光电科技有限公司 对位检测方法及显示装置
KR20200044252A (ko) * 2018-10-18 2020-04-29 삼성디스플레이 주식회사 표시 패널 검사 시스템, 표시 패널 검사 방법 및 이를 이용한 표시 패널.
CN109816733B (zh) * 2019-01-14 2023-08-18 京东方科技集团股份有限公司 相机参数初始化方法及装置、相机参数标定方法及设备、图像采集系统
US11626441B2 (en) * 2020-01-16 2023-04-11 Advanced Semiconductor Engineering, Inc. Optical module
CN115356792B (zh) * 2022-06-27 2023-12-08 杭州海康微影传感科技有限公司 光学镜头晶圆的制作方法与镜头成像模组的制作方法
EP4332642A1 (en) * 2022-08-29 2024-03-06 Schott Ag Structured substrate, method for manufacturing the structured substrate, and use of the structured substrate

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0577577A (ja) * 1991-09-18 1993-03-30 Hitachi Ltd 印刷マスク
JP2005268690A (ja) * 2004-03-22 2005-09-29 Sumitomo Bakelite Co Ltd 多層回路基板の製造方法
JP2010204635A (ja) * 2009-02-06 2010-09-16 Fujifilm Corp レンズアレイ
JP2012104753A (ja) * 2010-11-12 2012-05-31 Sony Corp 固体撮像装置及び電子機器
JP2014006329A (ja) * 2012-06-22 2014-01-16 Konica Minolta Inc ウエハレンズの製造方法及び撮像レンズ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5985764A (en) * 1997-12-22 1999-11-16 Taiwan Semiconductor Manufacturing Company, Ltd. Layer independent alignment system
JP4379102B2 (ja) 2003-12-12 2009-12-09 セイコーエプソン株式会社 半導体装置の製造方法
US7349140B2 (en) * 2005-05-31 2008-03-25 Miradia Inc. Triple alignment substrate method and structure for packaging devices
KR100969987B1 (ko) * 2008-01-10 2010-07-15 연세대학교 산학협력단 광학패키지 웨이퍼스케일 어레이 및 그 제조방법
JP2009279790A (ja) 2008-05-20 2009-12-03 Sharp Corp レンズ及びその製造方法、並びに、レンズアレイ、カメラモジュール及びその製造方法、電子機器
WO2010006219A2 (en) * 2008-07-09 2010-01-14 Baxter International Inc. Use of scaffold comprising fibrin for delivery of stem cells
JP2010204632A (ja) 2009-02-06 2010-09-16 Fujifilm Corp ウェハレベルレンズアレイの製造方法、ウェハレンズアレイ、レンズモジュール及び撮像ユニット
JP2010256563A (ja) 2009-04-23 2010-11-11 Sharp Corp レンズアレイおよび当該レンズアレイの製造方法、並びに、その利用
JP2011138089A (ja) 2010-01-04 2011-07-14 Fujifilm Corp ウェハレベルレンズアレイ、レンズモジュール及び撮像ユニット
JP2013001091A (ja) 2011-06-21 2013-01-07 Konica Minolta Advanced Layers Inc 光学素子の製造方法
JP2013174784A (ja) 2012-02-27 2013-09-05 Ricoh Co Ltd カメラモジュール、カメラモジュールの組み付け方法、レンズアレイの製造方法及び金型

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0577577A (ja) * 1991-09-18 1993-03-30 Hitachi Ltd 印刷マスク
JP2005268690A (ja) * 2004-03-22 2005-09-29 Sumitomo Bakelite Co Ltd 多層回路基板の製造方法
JP2010204635A (ja) * 2009-02-06 2010-09-16 Fujifilm Corp レンズアレイ
JP2012104753A (ja) * 2010-11-12 2012-05-31 Sony Corp 固体撮像装置及び電子機器
JP2014006329A (ja) * 2012-06-22 2014-01-16 Konica Minolta Inc ウエハレンズの製造方法及び撮像レンズ

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110383446A (zh) * 2017-03-16 2019-10-25 Ev 集团 E·索尔纳有限责任公司 用于接合至少三个衬底的方法
KR20190126072A (ko) * 2017-03-16 2019-11-08 에베 그룹 에. 탈너 게엠베하 적어도 세 개의 기판들을 결합하기 위한 방법
JP2020511784A (ja) * 2017-03-16 2020-04-16 エーファウ・グループ・エー・タルナー・ゲーエムベーハー 少なくとも3枚の基板を接合するための方法
KR102396022B1 (ko) * 2017-03-16 2022-05-09 에베 그룹 에. 탈너 게엠베하 적어도 세 개의 기판들을 결합하기 위한 방법
JP7177781B2 (ja) 2017-03-16 2022-11-24 エーファウ・グループ・エー・タルナー・ゲーエムベーハー 少なくとも3枚の基板を接合するための方法
CN110383446B (zh) * 2017-03-16 2024-07-16 Ev集团E·索尔纳有限责任公司 用于接合至少三个衬底的方法
WO2018173794A1 (ja) * 2017-03-23 2018-09-27 ソニーセミコンダクタソリューションズ株式会社 積層レンズ構造体及びその製造方法、並びに、電子機器
CN110431460A (zh) * 2017-03-23 2019-11-08 索尼半导体解决方案公司 层叠透镜结构、层叠透镜结构的制造方法和电子设备
US11374045B2 (en) 2017-03-23 2022-06-28 Sony Semiconductor Solutions Corporation Stacked lens structure with a lens portion having a black resin comprising a plurality of voids
WO2020008591A1 (ja) * 2018-07-05 2020-01-09 オリンパス株式会社 撮像装置、内視鏡、および、撮像装置の製造方法
US11287641B2 (en) 2018-07-05 2022-03-29 Olympus Corporation Image pickup apparatus, endoscope, and method for manufacturing image pickup apparatus

Also Published As

Publication number Publication date
US20180203164A1 (en) 2018-07-19
CN107850758A (zh) 2018-03-27
EP3329315B1 (en) 2021-03-31
US10627549B2 (en) 2020-04-21
KR20180034329A (ko) 2018-04-04
WO2017022192A1 (en) 2017-02-09
EP3329315A1 (en) 2018-06-06

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