JP2017028247A5 - - Google Patents

Download PDF

Info

Publication number
JP2017028247A5
JP2017028247A5 JP2016081747A JP2016081747A JP2017028247A5 JP 2017028247 A5 JP2017028247 A5 JP 2017028247A5 JP 2016081747 A JP2016081747 A JP 2016081747A JP 2016081747 A JP2016081747 A JP 2016081747A JP 2017028247 A5 JP2017028247 A5 JP 2017028247A5
Authority
JP
Japan
Prior art keywords
silicon
graphite
intermediate layer
oxygen
conjugates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016081747A
Other languages
English (en)
Japanese (ja)
Other versions
JP6590322B2 (ja
JP2017028247A (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2017028247A publication Critical patent/JP2017028247A/ja
Publication of JP2017028247A5 publication Critical patent/JP2017028247A5/ja
Application granted granted Critical
Publication of JP6590322B2 publication Critical patent/JP6590322B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016081747A 2015-07-16 2016-04-15 グラファイトとシリコンとの結合体及びその製造方法 Active JP6590322B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015141731 2015-07-16
JP2015141731 2015-07-16

Publications (3)

Publication Number Publication Date
JP2017028247A JP2017028247A (ja) 2017-02-02
JP2017028247A5 true JP2017028247A5 (enExample) 2019-01-24
JP6590322B2 JP6590322B2 (ja) 2019-10-16

Family

ID=57775434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016081747A Active JP6590322B2 (ja) 2015-07-16 2016-04-15 グラファイトとシリコンとの結合体及びその製造方法

Country Status (2)

Country Link
US (1) US10357942B2 (enExample)
JP (1) JP6590322B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7124088B2 (ja) * 2018-06-21 2022-08-23 ジーナン ジンジョン エレクトロニクス カンパニー リミテッド 複合単結晶薄膜
EP3905305A4 (en) 2018-12-28 2022-09-21 National Institute Of Advanced Industrial Science And Technology GRAPHITE THIN FILM/SILICON SUBSTRATE LAMINATE, METHOD OF MANUFACTURE THEREOF AND SUBSTRATE FOR ELECTRONIC DEVICES WITH HIGH EXHAUST HEAT
JPWO2023243225A1 (enExample) * 2022-06-14 2023-12-21

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS505212B1 (enExample) 1966-04-09 1975-03-01
JPS586712B2 (ja) 1976-07-01 1983-02-05 財団法人特殊無機材料研究所 耐熱性高強度接合体の製造方法
JPS6311509A (ja) * 1986-07-03 1988-01-19 Hitachi Chem Co Ltd 黒鉛モノクロメ−タ−の製造法
JP4182323B2 (ja) 2002-02-27 2008-11-19 ソニー株式会社 複合基板、基板製造方法
JP5138244B2 (ja) * 2007-03-20 2013-02-06 日本電信電話株式会社 電子デバイス用基板の製造方法
JP2008294110A (ja) 2007-05-23 2008-12-04 Nippon Telegr & Teleph Corp <Ntt> 電子デバイス用基板およびその製造方法
JP5091920B2 (ja) * 2009-06-23 2012-12-05 株式会社沖データ 半導体ウエハの製造方法
US8822306B2 (en) * 2010-09-30 2014-09-02 Infineon Technologies Ag Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core

Similar Documents

Publication Publication Date Title
JP2008235603A5 (enExample)
WO2013044094A3 (en) Methods for reducing thermal resistance of carbon nanotube arrays or sheets
WO2015022661A3 (en) Graphene quantum dots, their composites and preparation of the same
WO2017119779A8 (ko) 고분자-그래핀 복합체 및 그 제조방법, 그리고 이를 이용한 고분자-그래핀 복합체 조성물
JP2017028247A5 (enExample)
JP2013160637A5 (enExample)
MX374487B (es) Materiales ajustables.
JP2014205915A5 (enExample)
JP2011127185A5 (enExample)
JP2010525935A5 (enExample)
CN105752962A (zh) 三维石墨烯宏观体材料及其制备方法
MY166311A (en) System and method of semiconductor manufacturing with energy recovery
JP2013504665A5 (enExample)
PH12012501869A1 (en) Selectively etching of a carbon nano tubes (cnt) polymer matrix on a plastic substructure
AU2010332803A8 (en) Process for the manufacture of a multilayer material sheet, multilayer material sheet and use hereof
JP2017065959A5 (enExample)
JP2010223942A5 (enExample)
RU2011144413A (ru) Способ получения графеновой пленки
JP2013501834A5 (enExample)
WO2016109830A3 (en) Quinolines, polyquinolines, molecular segments of fullerenes and graphene nanoribbons, and graphene nanoribbons and methods of their synthesis
JP2012190865A5 (enExample)
CL2016000574A1 (es) Nanotubos de carbono de pared múltiple (mwcnt) para adsorción de hidrógeno. método de obtención de los nanotubos por técnica de deposición química en fase vapor asistida por aerosol (aacvd), y método de purificación.
CN105714141B (zh) 一种制备铜/石墨烯复合材料的方法
JP2020147826A5 (enExample)
US20150195654A1 (en) Manufacturing method and usage of vebration membrane