JP2017001943A5 - - Google Patents
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- JP2017001943A5 JP2017001943A5 JP2016112773A JP2016112773A JP2017001943A5 JP 2017001943 A5 JP2017001943 A5 JP 2017001943A5 JP 2016112773 A JP2016112773 A JP 2016112773A JP 2016112773 A JP2016112773 A JP 2016112773A JP 2017001943 A5 JP2017001943 A5 JP 2017001943A5
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- JP
- Japan
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015118635 | 2015-06-11 | ||
| JP2015118635 | 2015-06-11 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017001943A JP2017001943A (ja) | 2017-01-05 |
| JP2017001943A5 true JP2017001943A5 (enExample) | 2018-02-15 |
| JP6685549B2 JP6685549B2 (ja) | 2020-04-22 |
Family
ID=57751664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016112773A Active JP6685549B2 (ja) | 2015-06-11 | 2016-06-06 | 多孔質体及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6685549B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102773107B1 (ko) * | 2019-12-03 | 2025-02-27 | 가부시키가이샤 무라타 세이사쿠쇼 | 칩 형상 전자부품용 세터 |
| KR102402063B1 (ko) | 2020-01-31 | 2022-05-24 | 주식회사 케이티앤지 | 에어로졸 발생 장치용 단열재 및 이를 포함하는 에어로졸 발생 장치 |
| JP7621226B2 (ja) * | 2021-09-08 | 2025-01-24 | 東京エレクトロン株式会社 | 基板支持体アセンブリ及びプラズマ処理装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4351867A (en) * | 1981-03-26 | 1982-09-28 | General Electric Co. | Thermal insulation composite of cellular cementitious material |
| JPS5973466A (ja) * | 1982-10-20 | 1984-04-25 | 東洋ゴム工業株式会社 | 軽量セラミツク構造体及びその製法 |
| JPH06144959A (ja) * | 1992-11-12 | 1994-05-24 | Mitsubishi Materials Corp | 耐熱部材及びその製造方法 |
| JPH06247778A (ja) * | 1993-02-23 | 1994-09-06 | Osaka Cement Co Ltd | 傾斜配向した気孔をもつ軽量セラミックス成形体及びその製造方法 |
| JP3593535B2 (ja) * | 2000-11-14 | 2004-11-24 | 独立行政法人産業技術総合研究所 | 多孔質体及びその製造方法 |
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2016
- 2016-06-06 JP JP2016112773A patent/JP6685549B2/ja active Active