JP2016533063A5 - - Google Patents
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- Publication number
- JP2016533063A5 JP2016533063A5 JP2016524210A JP2016524210A JP2016533063A5 JP 2016533063 A5 JP2016533063 A5 JP 2016533063A5 JP 2016524210 A JP2016524210 A JP 2016524210A JP 2016524210 A JP2016524210 A JP 2016524210A JP 2016533063 A5 JP2016533063 A5 JP 2016533063A5
- Authority
- JP
- Japan
- Prior art keywords
- amplitude
- drivers
- phase signal
- signals
- pixel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 15
- 238000003384 imaging method Methods 0.000 claims 14
- 230000010354 integration Effects 0.000 claims 3
- 238000006243 chemical reaction Methods 0.000 claims 2
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361839768P | 2013-06-26 | 2013-06-26 | |
| US61/839,768 | 2013-06-26 | ||
| US14/308,383 | 2014-06-18 | ||
| US14/308,383 US9658170B2 (en) | 2013-06-26 | 2014-06-18 | TDI imaging system with variable voltage readout clock signals |
| PCT/US2014/044411 WO2014210359A1 (en) | 2013-06-26 | 2014-06-26 | Tdi imaging system with variable voltage readout clock signals |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016533063A JP2016533063A (ja) | 2016-10-20 |
| JP2016533063A5 true JP2016533063A5 (enExample) | 2017-08-03 |
| JP6312822B2 JP6312822B2 (ja) | 2018-04-18 |
Family
ID=52115216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016524210A Active JP6312822B2 (ja) | 2013-06-26 | 2014-06-26 | 可変電圧読出クロック信号を有するｔｄｉ撮像システム |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9658170B2 (enExample) |
| JP (1) | JP6312822B2 (enExample) |
| IL (1) | IL243084A0 (enExample) |
| TW (1) | TWI605247B (enExample) |
| WO (1) | WO2014210359A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3107281B1 (en) * | 2015-06-17 | 2020-03-18 | IMEC vzw | Device for imaging and method for acquiring a time delay and integration image |
| KR102332942B1 (ko) * | 2015-11-27 | 2021-12-01 | 에스케이하이닉스 주식회사 | 전력 소모 감소를 위한 카운팅 장치 및 그를 이용한 아날로그-디지털 변환 장치와 씨모스 이미지 센서 |
| ES2854000T3 (es) * | 2016-11-07 | 2021-09-20 | Dnae Diagnostics Ltd | Matriz ISFET |
| EP3534872B1 (en) | 2016-12-20 | 2022-03-23 | Colgate-Palmolive Company | Two-phase oral care whitening compositions |
| US11263737B2 (en) * | 2019-01-10 | 2022-03-01 | Lam Research Corporation | Defect classification and source analysis for semiconductor equipment |
| CN112055157B (zh) * | 2020-09-21 | 2021-06-29 | 中国科学院长春光学精密机械与物理研究所 | 多组tdi成像的摄像同步性控制系统 |
| DE102024111144A1 (de) * | 2024-04-22 | 2025-10-23 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben einer Maskeninspektionsvorrichtung, EUV-Kamera, Maskeninspektionsvorrichtung, Computerprogrammprodukt |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6597446B2 (en) | 2001-03-22 | 2003-07-22 | Sentec Corporation | Holographic scatterometer for detection and analysis of wafer surface deposits |
| US7952633B2 (en) | 2004-11-18 | 2011-05-31 | Kla-Tencor Technologies Corporation | Apparatus for continuous clocking of TDI sensors |
| US7609309B2 (en) | 2004-11-18 | 2009-10-27 | Kla-Tencor Technologies Corporation | Continuous clocking of TDI sensors |
| US8624971B2 (en) | 2009-01-23 | 2014-01-07 | Kla-Tencor Corporation | TDI sensor modules with localized driving and signal processing circuitry for high speed inspection |
| WO2010148293A2 (en) | 2009-06-19 | 2010-12-23 | Kla-Tencor Corporation | Euv high throughput inspection system for defect detection on patterned euv masks, mask blanks, and wafers |
| US9279774B2 (en) | 2011-07-12 | 2016-03-08 | Kla-Tencor Corp. | Wafer inspection |
| WO2015120328A1 (en) * | 2014-02-07 | 2015-08-13 | Rambus Inc. | Feedthrough-compensated image sensor |
-
2014
- 2014-06-18 US US14/308,383 patent/US9658170B2/en active Active
- 2014-06-26 JP JP2016524210A patent/JP6312822B2/ja active Active
- 2014-06-26 TW TW103122162A patent/TWI605247B/zh active
- 2014-06-26 WO PCT/US2014/044411 patent/WO2014210359A1/en not_active Ceased
-
2015
- 2015-12-22 IL IL243084A patent/IL243084A0/en active IP Right Grant
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