JP2016519849A - 基板スタックを取り扱うための、収容システム及び装置及び方法 - Google Patents
基板スタックを取り扱うための、収容システム及び装置及び方法 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0608—Gripping heads and other end effectors with vacuum or magnetic holding means with magnetic holding means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
−機械的な装置を用いて、能動的且つ機械的に擦り取るか、又は転がして取る、
−温度及び/又は交番磁場を用いた消磁によって惹起される、磁石体のうちの少なくとも一方の磁力の消失でもって、受動的且つ機械的に落下させる、
−グリップを用いて、磁石体を機械的に把持する、及び/又は、
−1つ又は複数の磁石を用いて、磁石体を磁気的に吸引する。
・特に室温及び高温の用途を目的とした場合:鉄、ニッケル、コバルト、
・特に低温の用途を目的とした場合:ガドリニウム、テルビウム、ジスプロシウム、ホルミウム及びエルビウム、
・合金:AlNiCo,SmCO,Nd2Fe14B,EuO,CrO2,Ni80Fe20,NiFeCo合金、ホイスラー合金。
・鋼(フェライト鋼)、鉄、
・ミューメタル、
・強磁性アモルフ金属、
・強磁性ナノクリスタル金属、
1o 収容面
2 凹部
2o 当接セクション
3 アライメントモジュール
4 第1の基板
4h 保持面
4o 第1の接触面
5,5’,5” 磁石体
5p 磁石エレメントペア
5’o 円筒状の磁石の底面
6 半自動式又は全自動式の充填システム
7 ホース
8 保持部
9 弁
11 アライメントマーク
12 光学系
13 第2の基板
13h 保持面
13o 第2の接触面
14 本発明による基板スタック
15 ロボット搬送システム
16 ボンディングモジュール
17 高真空クラスタ
18 モジュール
19 中央チャンバ
20 ボンディングチャック
20o 収容面
21 ボンディングチャック凹部
21o 表面
22 圧力プレート
23 圧力プレート凹部
23o 表面
24 突き出しエレメント
25 支持プレート
25o 支持面
26 モジュールロックゲート
27 クラスタロックゲート
28 搬送システム
29 モジュールロックゲート
30 入口FOUP
31 出口FOUP
32 磁心
33 コイル
34 磁石
dmax 基板スタックの厚さ
Fmag 保持力、磁力
K1 磁化が弱い第1の磁性材料
K2 磁化が強い第2の磁性材料
Claims (14)
- 第2の基板(13)にボンディングすべき第1の基板(4)を取り扱うための収容システム(1,20)において、
−第1の基板(4)を収容するための収容面(1o,20o)と、
−前記収容面(1o,20o)に対して後退しており、且つ、前記第1の基板(4)を該第1の基板(4)にアライメントされている第2の基板(13)に対して固定するための、磁気的に作用する固定手段(5,5’,5”)を収容する、少なくとも1つの凹部(2,21)と、
を備えていることを特徴とする、収容システム(1,20)。 - 前記凹部(2,21)は、周縁に配置されている少なくとも1つの段部として形成されており、前記固定手段(5,5’,5”)を当接させるための当接セクション(2o,21o)と、当接面(1o,20o)の中心に向けられており、且つ、前記固定手段(5,5’,5”)を載置するための載置セクション(2o,21o)と、を備えている、請求項1に記載の収容システム。
- 前記当接セクション(2o,21o)は、前記収容面(1o,20o)に対して、60°よりも小さい角度a、特に45°よりも小さい角度a、有利には30°よりも小さい角度a、更に有利には15°よりも小さい角度aで傾斜されている、請求項1又は2に記載の収容システム。
- 前記凹部(2,21)は、前記収容面(1o,20o)の周縁に均一に分散されて配置されている、請求項1乃至3のいずれか一項に記載の収容システム。
- 第1の基板(4)と、該第1の基板(4)に対してアライメントされている第2の基板(13)と、から成る基板スタック(14)を、前記第1の基板(4)を前記第2の基板(13)に対して相対的にアライメントされた固定位置に固定するための、磁気的に作用する固定手段(5,5’,5”)によって取り扱うことを特徴とする、装置。
- 前記固定手段(5,5’,5”)は、少なくとも2つの磁石エレメントペア(5p)を有している、請求項5に記載の装置。
- 各磁石エレメントペア(5p)は、磁気的に作用する第1の磁石体(5,5’,5”)と、該第1の磁石体(5,5’,5”)によって磁気吸引される、特に磁気的に作用する第2の磁石体(5,5’,5”)と、から形成されている、請求項6に記載の装置。
- 前記第1の磁石体及び/又は前記第2の磁石体(5,5’,5”)は球形状に形成されている、請求項7に記載の装置。
- 前記第1の磁石体(5,5’,5”)及び/又は前記第2の磁石体(5,5’,5”)は、前記固定位置において、少なくとも大部分は前記磁石エレメントペア(5p)によって形成される磁力によって、特に前記磁石エレメントペア(5p)によって形成される磁力のみによって、前記基板スタック(14)に固定されている、請求項7又は8に記載の装置。
- 前記装置は、請求項1乃至4のいずれか一項に記載の収容システムを有している、請求項5乃至9のいずれか一項に記載の装置。
- 前記装置は、前記第1の基板(4)を、前記第2の基板(13)に対して相対的にアライメントするためのアライメントシステムと、前記両基板(4,13)を接触させるための接触システムと、を有している、請求項5乃至10のいずれか一項に記載の装置。
- 前記装置は、固定手段(5,5’,5”)、特に磁石体(5,5’,5”)を、前記基板スタック(14)の相互に背中合わせの面に位置決めするための位置決めシステム(6)を有している、請求項5乃至11のいずれか一項に記載の装置。
- 第1の基板(4)と、該第1の基板(4)に対してアライメントされている第2の基板と、から成る、ボンディングすべき基板スタック(14)を取り扱うための方法において、
前記基板スタック(14)を取り扱うために、前記第1の基板(4)を、前記第2の基板(13)に対して相対的に、磁気的に作用する固定手段(5,5’,5”)によって、アライメントされた固定位置に固定することを特徴とする、基板スタック(14)を取り扱うための方法。 - 前記固定手段(5,5’,5”)を、前記基板スタック(14)の相互に背中合わせの保持面(4h、13h)に位置決めする、請求項13に記載の方法。
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KR (1) | KR102092432B1 (ja) |
CN (1) | CN105074898B (ja) |
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EP2979298B9 (de) | 2013-03-27 | 2017-07-26 | EV Group E. Thallner GmbH | Aufnahmeeinrichtung, vorrichtung und verfahren zur handhabung von substratstapeln |
CN105283950B (zh) | 2013-06-17 | 2018-03-13 | Ev 集团 E·索尔纳有限责任公司 | 用于衬底对准的装置及方法 |
EP3312871A1 (de) | 2014-02-03 | 2018-04-25 | EV Group E. Thallner GmbH | Aufnahmeeinrichtung zur aufnahme eines substratstapels |
SG11201607719TA (en) | 2014-04-01 | 2016-11-29 | Ev Group E Thallner Gmbh | Method and device for the surface treatment of substrates |
SG11201603148VA (en) * | 2014-12-18 | 2016-07-28 | Ev Group E Thallner Gmbh | Method for bonding substrates |
SG11201704557PA (en) * | 2014-12-23 | 2017-07-28 | Ev Group E Thallner Gmbh | Method and device for prefixing substrates |
CN104637843B (zh) * | 2015-02-02 | 2017-12-05 | 京东方科技集团股份有限公司 | 封装设备和封装方法 |
DE102015108901A1 (de) | 2015-06-05 | 2016-12-08 | Ev Group E. Thallner Gmbh | Verfahren zum Ausrichten von Substraten vor dem Bonden |
WO2017217431A1 (ja) * | 2016-06-16 | 2017-12-21 | 株式会社ニコン | 積層装置および積層方法 |
TWI605536B (zh) * | 2017-04-12 | 2017-11-11 | 財團法人工業技術研究院 | 磁性轉移模組及轉移電子元件的方法 |
KR102030471B1 (ko) * | 2017-07-25 | 2019-10-14 | 세메스 주식회사 | 리프트 핀 유닛 및 이를 구비하는 기판 지지 유닛 |
WO2019029813A1 (de) * | 2017-08-10 | 2019-02-14 | Gebr. Schmid Gmbh | Klemmrahmen und transportvorrichtung zum transport von substraten |
US11227779B2 (en) * | 2017-09-12 | 2022-01-18 | Asm Technology Singapore Pte Ltd | Apparatus and method for processing a semiconductor device |
US11465840B2 (en) * | 2017-11-14 | 2022-10-11 | Hai Robotics Co., Ltd. | Handling robot |
USD954163S1 (en) | 2021-03-21 | 2022-06-07 | Drew Randolph | Extension and flexion mobility device |
KR102558483B1 (ko) | 2023-03-08 | 2023-07-21 | 랜드소프트 주식회사 | 차량 이동형 문서 스캔 장치 |
KR102558485B1 (ko) | 2023-03-08 | 2023-07-21 | 랜드소프트 주식회사 | 문서 스캔을 위한 높이 조절 장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0684735A (ja) * | 1992-08-31 | 1994-03-25 | Sony Corp | 張り合わせ基板の製造方法と張り合わせ装置 |
JP2009123741A (ja) * | 2007-11-12 | 2009-06-04 | Nikon Corp | 基板張り合わせ装置 |
JP2010084205A (ja) * | 2008-09-30 | 2010-04-15 | Canon Anelva Corp | 保持機構、当該保持機構を備えた処理装置、処理装置を用いた成膜方法及び画像表示装置の製造方法 |
WO2011010452A1 (ja) * | 2009-07-21 | 2011-01-27 | 株式会社ニコン | 基板ホルダシステム、基板接合装置およびデバイスの製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1904318A (en) * | 1931-07-06 | 1933-04-18 | Henry H Lehere | Frame |
US4588209A (en) * | 1984-09-11 | 1986-05-13 | Avery International Corporation | Powerful magnetic folio |
US5167085A (en) * | 1992-03-31 | 1992-12-01 | Yang H J | Picture frame assembly |
JPH09311629A (ja) * | 1996-03-18 | 1997-12-02 | Tatsu Kawabe | 紙片保定具 |
JP2002299406A (ja) | 2001-03-29 | 2002-10-11 | Dainippon Screen Mfg Co Ltd | 基板搬送装置およびこれを用いた基板処理装置 |
JP2003332403A (ja) * | 2002-05-10 | 2003-11-21 | Seiko Epson Corp | 基板保持装置、基板貼り合わせ装置、電気光学装置の製造方法、及び電子機器 |
US6742295B2 (en) * | 2002-06-20 | 2004-06-01 | James R. Gross | System for suspending or mounting priceless planar artwork and the like |
US6866237B2 (en) * | 2002-07-30 | 2005-03-15 | Gideon Dagan | Magnetic support structure for stably retaining a print medium or similar object in a desired position |
US20060274474A1 (en) * | 2005-06-01 | 2006-12-07 | Lee Chung J | Substrate Holder |
EP2979298B9 (de) * | 2013-03-27 | 2017-07-26 | EV Group E. Thallner GmbH | Aufnahmeeinrichtung, vorrichtung und verfahren zur handhabung von substratstapeln |
-
2013
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- 2013-03-27 CN CN201380075117.XA patent/CN105074898B/zh active Active
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- 2013-03-27 JP JP2016504501A patent/JP6316402B2/ja active Active
- 2013-03-27 KR KR1020157024906A patent/KR102092432B1/ko active IP Right Grant
- 2013-03-27 WO PCT/EP2013/056620 patent/WO2014154272A1/de active Application Filing
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0684735A (ja) * | 1992-08-31 | 1994-03-25 | Sony Corp | 張り合わせ基板の製造方法と張り合わせ装置 |
JP2009123741A (ja) * | 2007-11-12 | 2009-06-04 | Nikon Corp | 基板張り合わせ装置 |
JP2010084205A (ja) * | 2008-09-30 | 2010-04-15 | Canon Anelva Corp | 保持機構、当該保持機構を備えた処理装置、処理装置を用いた成膜方法及び画像表示装置の製造方法 |
WO2011010452A1 (ja) * | 2009-07-21 | 2011-01-27 | 株式会社ニコン | 基板ホルダシステム、基板接合装置およびデバイスの製造方法 |
Also Published As
Publication number | Publication date |
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US10347523B2 (en) | 2019-07-09 |
CN105074898A (zh) | 2015-11-18 |
EP2979298A1 (de) | 2016-02-03 |
SG2014013023A (en) | 2015-02-27 |
EP2979298B1 (de) | 2017-03-22 |
TWI614832B (zh) | 2018-02-11 |
TW201448101A (zh) | 2014-12-16 |
CN105074898B (zh) | 2019-11-12 |
US9941149B2 (en) | 2018-04-10 |
US20160020136A1 (en) | 2016-01-21 |
WO2014154272A1 (de) | 2014-10-02 |
JP6316402B2 (ja) | 2018-04-25 |
KR102092432B1 (ko) | 2020-03-24 |
US20170229336A1 (en) | 2017-08-10 |
US9666470B2 (en) | 2017-05-30 |
EP2979298B9 (de) | 2017-07-26 |
US20180190536A1 (en) | 2018-07-05 |
KR20150136482A (ko) | 2015-12-07 |
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