JP2016517970A5 - Ｖｌｓｉ装置用の最適波長光子放射顕微鏡 - Google Patents

Ｖｌｓｉ装置用の最適波長光子放射顕微鏡 Download PDF

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JP2016517970A5
JP2016517970A5 JP2016507666A JP2016507666A JP2016517970A5 JP 2016517970 A5 JP2016517970 A5 JP 2016517970A5 JP 2016507666 A JP2016507666 A JP 2016507666A JP 2016507666 A JP2016507666 A JP 2016507666A JP 2016517970 A5 JP2016517970 A5 JP 2016517970A5
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photon emission
optimal wavelength
emission microscope
wavelength photon
vlsi
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JP2016507666A
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JP6412922B2 (ja
JP2016517970A (ja
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本発明は、光子放射顕微鏡法（ＰｈｏｔｏｎＥｍｉｓｓｉｏｎ Ｍｉｃｒｏｓｃｏｐｙ）の分野に属する。本出願は、２０１３年４月１０日に出願された米国仮出願第６１／８１０，６４５号の優先権利益を主張し、そのすべての内容が本明細書に参考として援用される。
JP2016507666A 2013-04-10 2014-04-10 Ｖｌｓｉ装置用の最適波長光子放射顕微鏡 Active JP6412922B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361810645P 2013-04-10 2013-04-10
US61/810,645 2013-04-10
PCT/US2014/033701 WO2014169154A1 (en) 2013-04-10 2014-04-10 Optimized wavelength photon emission microscope for vlsi devices

Publications (3)

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JP2016517970A JP2016517970A (ja) 2016-06-20
JP2016517970A5 true JP2016517970A5 (ja) 2017-01-26
JP6412922B2 JP6412922B2 (ja) 2018-10-24

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JP2016507666A Active JP6412922B2 (ja) 2013-04-10 2014-04-10 Ｖｌｓｉ装置用の最適波長光子放射顕微鏡

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US (1) US9817060B2 (ja)
JP (1) JP6412922B2 (ja)
SG (2) SG10201708329XA (ja)
WO (1) WO2014169154A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10514418B2 (en) 2013-04-10 2019-12-24 Fei Company Optimized wavelength photon emission microscope for VLSI devices
WO2014169154A1 (en) 2013-04-10 2014-10-16 Dcg Systems, Inc. Optimized wavelength photon emission microscope for vlsi devices
JP2017073548A (ja) * 2015-10-05 2017-04-13 エフイーアイ カンパニー Ｖｌｓｉ装置用の最適波長光子放射顕微鏡 ［関連出願の参照］ 本出願は、２０１５年１０月５日に出願された米国仮出願第６２／２３７，３９９号の優先権利益を主張し、そのすべての内容が本明細書に参考として援用される。［政府許認可権］ 本発明は、空軍研究所（ａｆｒｌ）の契約番号ｆａ８６５０−１１−ｃ−７１０５を介した、アメリカ合衆国国家情報長官官房（ｏｄｎｉ）、情報先端研究プロジェクト活動（ｉａｒｐａ）による支援事業に基づくものである。本明細書に含まれるアイデア及び結果は、本発明者らのアイデア及び結果であり、ｏｄｎｉ、ｉａｒｐａ、ａｆｒｌ又は米国政府の公式承認を必ずしも有するものとして解釈されるべきでない。
US20210109267A1 (en) * 2019-10-09 2021-04-15 Viavi Solutions Inc. Optical filter and device

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