JP2016506281A5 - - Google Patents

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Publication number
JP2016506281A5
JP2016506281A5 JP2015551864A JP2015551864A JP2016506281A5 JP 2016506281 A5 JP2016506281 A5 JP 2016506281A5 JP 2015551864 A JP2015551864 A JP 2015551864A JP 2015551864 A JP2015551864 A JP 2015551864A JP 2016506281 A5 JP2016506281 A5 JP 2016506281A5
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Japan
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component
sensor device
conformal sensor
exposure
processing device
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JP2015551864A
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Japanese (ja)
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JP2016506281A (ja
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Priority claimed from PCT/US2014/010740 external-priority patent/WO2014110176A1/en
Publication of JP2016506281A publication Critical patent/JP2016506281A/ja
Publication of JP2016506281A5 publication Critical patent/JP2016506281A5/ja
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JP2015551864A 2013-01-08 2014-01-08 表面の特性のモニタリングの応用 Pending JP2016506281A (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201361750269P 2013-01-08 2013-01-08
US61/750,269 2013-01-08
US201361750596P 2013-01-09 2013-01-09
US201361750587P 2013-01-09 2013-01-09
US61/750,596 2013-01-09
US61/750,587 2013-01-09
PCT/US2014/010740 WO2014110176A1 (en) 2013-01-08 2014-01-08 Application for monitoring a property of a surface

Publications (2)

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JP2016506281A JP2016506281A (ja) 2016-03-03
JP2016506281A5 true JP2016506281A5 (enExample) 2016-12-08

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JP2015551864A Pending JP2016506281A (ja) 2013-01-08 2014-01-08 表面の特性のモニタリングの応用

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US (1) US20150335254A1 (enExample)
EP (1) EP2943901A4 (enExample)
JP (1) JP2016506281A (enExample)
KR (1) KR20150110570A (enExample)
CN (1) CN105359148A (enExample)
CA (1) CA2897403A1 (enExample)
WO (1) WO2014110176A1 (enExample)

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