JP2016504567A - 検出器結晶のためのサブバンド赤外照射 - Google Patents
検出器結晶のためのサブバンド赤外照射 Download PDFInfo
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- 238000001514 detection method Methods 0.000 abstract description 8
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- 229910004611 CdZnTe Inorganic materials 0.000 description 23
- 238000005259 measurement Methods 0.000 description 9
- 238000001465 metallisation Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 4
- 229910004613 CdTe Inorganic materials 0.000 description 3
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- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
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- 229910052732 germanium Inorganic materials 0.000 description 1
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- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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- G—PHYSICS
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- G—PHYSICS
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- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
- H01L31/02966—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe including ternary compounds, e.g. HgCdTe
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- H—ELECTRICITY
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/085—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors the device being sensitive to very short wavelength, e.g. X-ray, Gamma-rays
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/09—Devices sensitive to infrared, visible or ultraviolet radiation
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
- H01L31/1832—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe comprising ternary compounds, e.g. Hg Cd Te
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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Abstract
Description
更に、前述の実施形態では、サブバンド赤外光が記述されているが、他の放射線波長も、分極効果を減らすことが可能でありうる。それゆえ、本発明は、サブバンド放射線に制限されることを意図しない。記述されている赤外線源は、赤外線LED30に代わって赤外線レーザダイオード又は他の波長を有する他の線源であってもよい。更に、読み出しチップ50は、CMOS技術に制限されることを意図せず、他の任意の半導体技術に基づいて実現されることもできる。直接変換材料は、CZTに限定されない。そうではなく、CdTe、CdTeSe、CdZnTeSe、CdMnTe、InP、TIBr2又はHGI2の形の他の任意の適切な半導体が、X線又は他の放射線光子を検出するために、CZT結晶60の代わりに使用されることができる。
Claims (15)
- a)入射放射線を電気信号に変換する直接変換半導体層と、
b)前記直接変換半導体層に配されるピクセルパッドを通じて前記電気信号を受け取る読み出し電子部品を有する基板と、
c)前記基板に接続され又は集積化され、前記直接変換半導体層を照射するように構成される複数の放射源と、
を有する放射線検出器。 - 前記複数の放射源は、前記直接変換半導体層のバンドギャップより小さい光子エネルギーを有するサブバンド赤外放射により前記直接変換半導体層を照射するように構成される、請求項1に記載の放射線検出器。
- 複数の赤外放射源が、前記直接変換半導体層と前記基板の読み出しチップとの間に配された赤外線源層に設けられ、前記赤外線源層は、前記ピクセルパッドを通じて前記直接変換半導体層にフリップチップ接合される、請求項1に記載の放射線検出器。
- 前記複数の赤外放射源の各々が、前記ピクセルパッドの間隙部分に配される、請求項3に記載の放射線検出器。
- 前記赤外光源層が、前記読み出しチップ上の関連する接点部分に前記ピクセルパッドを電気的に接続するスルー接続部分を有する、請求項3に記載の放射線検出器。
- 複数の赤外線源が、それぞれ異なる波長のサブバンド赤外放射をもつ個々の赤外線源を各々が有する複数のグループを構成する、請求項1に記載の放射線検出器。
- 前記複数のグループのうち1つのグループの各赤外線源が、前記直接変換半導体層の個別のピクセルパッドの異なる角に配される、請求項6に記載の放射線検出器。
- 複数の赤外線源が、アノード側から前記直接変換半導体層を照射するように配される、請求項1に記載の放射線検出器。
- 赤外線源の各々が、前記放射線検出器のピクセルのサブセットに割り当てられる、請求項1に記載の放射線検出器。
- 前記直接変換半導体層が、Cd[Zn]Te結晶で作られている、請求項1に記載の放射線検出器。
- 放射線を検出する方法であって、
a)直接変換半導体層において、放射線を電気信号に変換するステップと、
b)前記直接変換半導体層に配されたピクセルパッドを通じて、読み出しチップにおいて前記電気信号を受け取るステップと、
c)前記読み出しチップに接続され又は集積された複数の放射源による放射によって、前記直接変換半導体層を照射するステップと、
を含む方法。 - 放射線検出器を製造する方法であって、
a)入射放射線を電気信号に変換する直接変換半導体層に、複数のピクセルパッドを配するステップと、
b)前記ピクセルパッドに、前記電気信号を受け取る読み出しチップを接続するステップと、
c)前記読み出しチップに、複数の赤外放射源を接続し又は集積化するステップと、
を含む方法。 - 前記複数の赤外放射源を有する赤外線源層を、前記直接変換半導体層と前記読み出しチップとの間に配するステップを更に含む、請求項12に記載の方法。
- 前記接続され又は集積された赤外放射源を有する前記読み出しチップに、前記直接変換半導体層をフリップチップ接合するステップを更に含む、請求項12に記載の方法。
- 前記読み出しチップに前記赤外線源層を取り付ける前に、前記直接変換半導体層をテストするために前記赤外線源層を介在物として使用するステップを更に含む、請求項13に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US201261724317P | 2012-11-09 | 2012-11-09 | |
US61/724,317 | 2012-11-09 | ||
PCT/IB2013/059990 WO2014072939A1 (en) | 2012-11-09 | 2013-11-08 | Sub-band infra-red irradiation for detector crystals |
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JP2016504567A true JP2016504567A (ja) | 2016-02-12 |
JP2016504567A5 JP2016504567A5 (ja) | 2016-12-28 |
JP6310471B2 JP6310471B2 (ja) | 2018-04-11 |
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JP2015541280A Active JP6310471B2 (ja) | 2012-11-09 | 2013-11-08 | 検出器結晶のためのサブバンド赤外照射 |
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US (1) | US9664558B2 (ja) |
EP (1) | EP2917766B1 (ja) |
JP (1) | JP6310471B2 (ja) |
CN (1) | CN104781695B (ja) |
BR (1) | BR112015010277A2 (ja) |
RU (1) | RU2015121968A (ja) |
WO (1) | WO2014072939A1 (ja) |
Cited By (1)
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JP2020525768A (ja) * | 2017-06-28 | 2020-08-27 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 直接変換放射線検出 |
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WO2016046014A1 (en) | 2014-09-26 | 2016-03-31 | Koninklijke Philips N.V. | Radiation detector with heating device |
US9571765B2 (en) | 2015-06-25 | 2017-02-14 | General Electric Company | Universal four-side buttable digital CMOS imager |
EP3320375B1 (en) * | 2015-07-09 | 2019-02-06 | Koninklijke Philips N.V. | Direct conversion radiation detector |
EP3365706B1 (en) | 2015-10-20 | 2023-12-06 | Koninklijke Philips N.V. | Polarization correction for direct conversion x-ray detectors |
DE102015220793A1 (de) * | 2015-10-23 | 2017-04-27 | Siemens Healthcare Gmbh | Röntgendetektor und/oder Gammadetektor mit Lichtbias |
US9588240B1 (en) | 2015-10-27 | 2017-03-07 | General Electric Company | Digital readout architecture for four side buttable digital X-ray detector |
US10686003B2 (en) | 2015-12-31 | 2020-06-16 | General Electric Company | Radiation detector assembly |
US10283557B2 (en) | 2015-12-31 | 2019-05-07 | General Electric Company | Radiation detector assembly |
DE102016210935B4 (de) * | 2016-06-20 | 2020-07-09 | Siemens Healthcare Gmbh | Röntgendetektor mit intransparenter Zwischenschicht |
CN109690355B (zh) * | 2016-09-23 | 2022-10-21 | 深圳帧观德芯科技有限公司 | 具有多层半导体x射线检测器的系统 |
CN112384827A (zh) * | 2018-07-12 | 2021-02-19 | 深圳帧观德芯科技有限公司 | 制造辐射探测器的方法 |
EP3605151A1 (en) * | 2018-08-01 | 2020-02-05 | Koninklijke Philips N.V. | Photon counting detector |
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- 2013-11-08 CN CN201380058602.6A patent/CN104781695B/zh active Active
- 2013-11-08 US US14/440,609 patent/US9664558B2/en active Active
- 2013-11-08 RU RU2015121968A patent/RU2015121968A/ru not_active Application Discontinuation
- 2013-11-08 EP EP13799686.4A patent/EP2917766B1/en active Active
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JP2020525768A (ja) * | 2017-06-28 | 2020-08-27 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 直接変換放射線検出 |
JP7198782B2 (ja) | 2017-06-28 | 2023-01-04 | コーニンクレッカ フィリップス エヌ ヴェ | 直接変換放射線検出 |
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RU2015121968A (ru) | 2017-01-10 |
WO2014072939A1 (en) | 2014-05-15 |
US20150285676A1 (en) | 2015-10-08 |
US9664558B2 (en) | 2017-05-30 |
CN104781695B (zh) | 2019-06-28 |
EP2917766A1 (en) | 2015-09-16 |
JP6310471B2 (ja) | 2018-04-11 |
BR112015010277A2 (pt) | 2017-07-11 |
EP2917766B1 (en) | 2019-11-06 |
CN104781695A (zh) | 2015-07-15 |
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