JP2016206326A - Electro-optic device, electronic apparatus, and lens array substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electro-optic device, an electronic apparatus and a lens array substrate, in which uneven luminance of an image can be suppressed even when misalignment is caused upon bonding a lens array substrate and an element substrate.SOLUTION: An electro-optic device 100 includes a plurality of first lenses 310 and a plurality of second lenses 320 opposing to a plurality of pixel electrodes 9a in a one-to-one relationship. At the center in a region where the first lenses 310 are arranged, the center of the pixel electrode 9a overlaps the center of the second lens 320, while in an end of the region, the center of the first lens 310 and the center of the second lens 320 are deviated outward with respect to the center of the pixel electrode 9a. Thereby, even when light obliquely incident from the outside to the electro-optic device 100 has a higher intensity than light obliquely incident from the inside to the electro-optic device 100, light as a whole converges substantially to the center of the pixel electrode 9a.SELECTED DRAWING: Figure 4

Description

  The present invention relates to an electro-optical device in which a plurality of lenses are formed, an electronic apparatus including the electro-optical device, and a lens array substrate.

  In an electro-optical device (liquid crystal device) used as a light valve of a projector, a plurality of pixels are arranged in a matrix in a display area. In such a pixel, only light that reaches a light-transmitting portion (pixel opening region) surrounded by wiring or the like on the element substrate contributes to display. For this reason, a configuration has been proposed in which microlenses are arranged in the light traveling direction so as to converge light in the pixel aperture region and to make the light approach parallel light (see Patent Documents 1 and 2). Patent Document 2 proposes a configuration in which a plurality of stages of microlenses are provided in the light traveling direction on one substrate.

  On the other hand, when manufacturing the lens array substrate, the pitch of the microlenses is narrowed from the center of the substrate to the end, and when the lens array substrate expands due to heat applied in the assembly process of the electro-optical device, A technique for appropriately facing the electrode has been proposed (see Patent Document 3).

JP 2009-63888 A JP 2011-22311 A JP 2004-61633 A

  When the electro-optical device described in Patent Documents 1 and 2 is mounted on a projection display device, as shown in FIG. 14A, the light emitted from the light source passes through the polarization conversion element 164, the condenser lens 165, and the like. Then, the electro-optical device 100 is irradiated. At this time, the light incident on the electro-optical device 100 obliquely from the outside has higher intensity than the light incident on the electro-optical device 100 obliquely from the inside. Even in such a case, the light projected on the screen 111 or the like via the projection optical system 118 is combined with the light incident obliquely from the outside and the light incident obliquely from the inside, so that the light is projected onto the screen 111 or the like. Brightness unevenness hardly occurs in the image.

  However, as shown in FIG. 14B, when the element substrate 10 is bonded to the lens array substrate 30 (counter substrate 20) in a state of being shifted to one side, the electro-optical device 100 is directed to one side. Light incident obliquely from the outside is not easily emitted from the electro-optical device 100. As a result, the luminance of a portion corresponding to one side of the electro-optical device 100 is reduced in the image projected on the screen 111 or the like. Such a problem is difficult to solve even by using the technique described in Patent Document 3.

  In view of the above-described problems, an object of the present invention is to provide an electro-optical device and an electric device that can suppress luminance unevenness of an image even when a positional deviation occurs when a lens array substrate and an element substrate are bonded together. An object is to provide an electronic apparatus including an optical device and a lens array substrate.

  In order to solve the above-described problem, one aspect of the electro-optical device according to the invention includes a plurality of pixel electrodes arranged along a first direction and a second direction intersecting the first direction. And a first lens array including a plurality of first lenses arranged so as to face each of the plurality of pixel electrodes, on the one surface side of the element substrate. A lens array substrate disposed oppositely, an electro-optic layer provided between the element substrate and the lens array substrate, and a plurality of first electrodes arranged to face each of the plurality of pixel electrodes. A second lens array including two lenses, and is located on a first end side which is an end portion in the first direction of an area where the pixel electrodes are arranged among the plurality of first lenses. And adjacent to each other in the first direction The first center distance, which is the distance between the centers of the two matching first lenses, is located closer to the center of the region where the pixel electrodes are arranged than the first end, and in the first direction. It is characterized by being longer than the distance between the centers of two adjacent first lenses.

  In the present invention, the plurality of first lenses and the plurality of second lenses are opposed to the plurality of pixel electrodes in a one-to-one relationship, but the end in the first direction of the region where the pixel electrodes are arranged On the part side, the center of the first lens is shifted outward in the first direction with respect to the center of the pixel electrode. For this reason, when light is incident on the electro-optical device, even if the light incident on the electro-optical device obliquely from the outside is higher in intensity than the light incident on the electro-optical device obliquely from the inside, the light is Condensed at approximately the center of Therefore, when manufacturing the electro-optical device, even when the element substrate is bonded to the lens array substrate in a state shifted in the first direction, the occurrence of a situation in which the luminance of the image partially decreases is suppressed. Can do.

  In the present invention, among the plurality of first lenses, the pixel electrodes are located on the second end side which is the end portion in the second direction of the region where the pixel electrodes are arranged, and are adjacent to each other in the second direction. The second center distance, which is the distance between the centers of the two matching first lenses, is located closer to the center of the region where the pixel electrodes are arranged than the second end portion, and in the second direction. It is preferable that the distance is longer than the distance between the centers of two adjacent first lenses. According to such a configuration, on the end side in the second direction of the region in which the pixel electrodes are arranged, the center of the second lens is shifted outward in the second direction with respect to the center of the pixel electrode. For this reason, when light is incident on the electro-optical device, even if the light incident on the electro-optical device obliquely from the outside is higher in intensity than the light incident on the electro-optical device obliquely from the inside, the light is Condensed at approximately the center of Therefore, when the electro-optical device is manufactured, even when the element substrate is bonded to the lens array substrate in a state shifted in the second direction, the occurrence of a situation in which the luminance of the image partially decreases is suppressed. Can do.

  In the present invention, among the plurality of first lenses, the first lens located between the first end and the center of the region where the pixel electrodes are arranged is two first lenses adjacent in the first direction. The distance between the centers of the lenses gradually decreases from the first end toward the center of the region where the pixel electrodes are arranged, and among the plurality of first lenses, the second end The distance between the centers of the two first lenses adjacent to each other in the second direction is such that the distance between the second end and the pixel electrode is between the first lens and the center of the region where the pixel electrodes are arranged. It is possible to adopt a mode in which the length is gradually shortened toward the center side of the arranged region. According to this configuration, the position of the first lens in the first direction can be optimized for each first lens.

  In the present invention, among the plurality of first lenses, the first lens located between the first end and the center of the region where the pixel electrodes are arranged is two first lenses adjacent in the first direction. The distance between the centers of the lenses gradually decreases from the first end portion toward the center of the region where the pixel electrodes are arranged, with a plurality of lenses as a unit. The first lens between the second end and the center of the region where the pixel electrodes are arranged has a distance between the centers of two first lenses adjacent in the second direction. You may employ | adopt the aspect gradually shortened for several lens as a unit as it goes to the center side of the area | region where the said pixel electrode was arranged from the edge part. According to such a configuration, the position of the first lens in the first direction can be optimized in units of the plurality of first lenses.

  In the present invention, the lens array substrate includes the second lens array so as to be positioned between the first lens array and the electro-optic layer, and the pixel electrodes are arranged among the plurality of second lenses. The third center-to-center distance that is the distance between the centers of two second lenses that are located on the side of the first end that is the end in the first direction of the formed region and that are adjacent to each other in the first direction Is longer than the distance between the centers of two second lenses that are located closer to the center of the region where the pixel electrodes are arranged than the first end and are adjacent to each other in the first direction. Each of the two first lenses adjacent to each other in the first direction, which is the first center distance, is the third center distance among the plurality of second lenses. Two second lenses adjacent to each other in the first direction And overlapping, the third center distance is preferably the a first center distance less in length. According to such a configuration, on the end side in the first direction of the region where the pixel electrodes are arranged, the center of the second lens is shifted outward in the first direction with respect to the center of the pixel electrode. For this reason, when light is incident on the electro-optical device, even if the light incident on the electro-optical device obliquely from the outside is higher in intensity than the light incident on the electro-optical device obliquely from the inside, the light is Condensed at approximately the center of Therefore, when manufacturing the electro-optical device, even when the element substrate is bonded to the lens array substrate in a state shifted in the first direction, the occurrence of a situation in which the luminance of the image partially decreases is suppressed. Can do.

  In the present invention, among the plurality of second lenses, the pixel electrodes are located on the second end side which is the end portion in the second direction of the region where the pixel electrodes are arranged, and are adjacent to each other in the second direction. The fourth center distance, which is the distance between the centers of two matching second lenses, is located closer to the center side of the region where the pixel electrodes are arranged than the second end portion, and is mutually in the second direction. Each of the two first lenses that are longer than the distance between the centers of the two adjacent second lenses and are adjacent to each other in the second direction, which is the second center distance among the plurality of first lenses, Each of the plurality of second lenses overlaps with two second lenses adjacent to each other in the second direction, which is the fourth center distance, and the fourth center distance is equal to or less than the second center distance. The length is preferred. According to such a configuration, on the end side in the second direction of the region in which the pixel electrodes are arranged, the center of the second lens is shifted outward in the second direction with respect to the center of the pixel electrode. For this reason, when light is incident on the electro-optical device, even if the light incident on the electro-optical device obliquely from the outside is higher in intensity than the light incident on the electro-optical device obliquely from the inside, the light is Condensed at approximately the center of Therefore, when the electro-optical device is manufactured, even when the element substrate is bonded to the lens array substrate in a state shifted in the second direction, the occurrence of a situation in which the luminance of the image partially decreases is suppressed. Can do.

  In the present invention, among the plurality of second lenses, the second lens between the first end and the center of the region where the pixel electrodes are arranged is two second lenses adjacent to each other in the first direction. The distance between the centers of the lenses gradually decreases from the first end toward the center of the region where the pixel electrodes are arranged, and among the plurality of second lenses, the second end The second lens between the second electrode and the center of the region where the pixel electrodes are arranged has a distance between the centers of two second lenses adjacent in the second direction from the second end to the pixel electrode. It is possible to adopt a mode in which the length is gradually shortened toward the center side of the arranged region. According to this configuration, the position of the second lens in the first direction can be optimized for each second lens.

  In the present invention, among the plurality of second lenses, the second lens between the first end and the center of the region where the pixel electrodes are arranged is two second lenses adjacent to each other in the first direction. The distance between the centers of the lenses gradually decreases from the first end toward the center of the region where the pixel electrodes are arranged in units of a plurality of lenses. The second lens between the second end and the center of the region where the pixel electrodes are arranged has a distance between the centers of the two second lenses adjacent in the second direction. You may employ | adopt the aspect gradually shortened for several lens as a unit as it goes to the center side of the area | region where the said pixel electrode was arranged from the edge part. According to such a configuration, the position of the second lens in the first direction can be optimized in units of the plurality of second lenses.

  In the present invention, on the line connecting the center of one first lens among the plurality of first lenses and the center of the second lens overlapping the one first lens among the plurality of second lenses, You may employ | adopt the aspect in which the center of the pixel electrode which overlaps with the said 1st 1st lens among several pixel electrodes is located.

  In the present invention, the element substrate may include an aspect including the second lens array.

  In the present invention, the element substrate may include a third lens array including a plurality of third lenses arranged to face each of the plurality of pixel electrodes. .

  Such an electro-optical device can be used in various electronic devices. For example, the electro-optical device is used as a light valve of a projection display device. When the electronic apparatus according to the invention is a projection display device, the projection display device projects a light source unit that emits light supplied to the electro-optical device and light modulated by the electro-optical device. A projection optical system.

  An aspect of the lens array substrate according to the present invention includes a first lens array including a plurality of first lenses arranged along a first direction and a second direction intersecting the first direction, and the plurality of the plurality of first lenses. A second lens array including a plurality of second lenses arranged to face each of the first lenses, and among the plurality of first lenses, the arrangement of the first lenses The first center-to-center distance that is the distance between the centers of two first lenses that are located on the side of the first end that is the end in the first direction of the region that is adjacent to each other in the first direction Is longer than the distance between the centers of two first lenses that are located closer to the center of the region where the pixel electrodes are arranged than the first end and are adjacent to each other in the first direction. And

  In the lens array substrate according to the present invention, of the plurality of first lenses, the first lens is located on a second end side which is an end portion in the second direction of the region where the first lenses are arranged, and The second center distance, which is the distance between the centers of the two first lenses adjacent in the second direction, is located closer to the center of the region where the pixel electrodes are arranged than the second end, and It is preferable that the distance is longer than the distance between the centers of two first lenses adjacent to each other in the second direction.

  In the lens array substrate according to the present invention, among the plurality of second lenses, the first lens is located on the first end side which is an end portion in the first direction of the region where the first lenses are arranged, and The third center distance, which is the distance between the centers of two second lenses adjacent in the first direction, is located closer to the center of the region where the pixel electrodes are arranged than the first end, and Two second lenses adjacent to each other in the first direction that are longer than the distance between the centers of the two second lenses adjacent to each other in the first direction and are the first center distance among the plurality of first lenses. Each of the lenses overlaps at least one of the second lenses adjacent to each other in the first direction, which is the third center distance among the plurality of second lenses, and the third center distance is The length is not more than the distance between the first centers. It is preferred.

  In the lens array substrate according to the present invention, among the plurality of second lenses, the second lens is located on a second end side which is an end portion in the second direction of the region where the first lenses are arranged, and The fourth center distance, which is the distance between the centers of two second lenses adjacent in the second direction, is located closer to the center of the region where the pixel electrodes are arranged than the second end, and Two second lenses adjacent to each other in the second direction that are longer than the distance between the centers of the two second lenses adjacent to each other in the second direction and are the distance between the second centers among the plurality of first lenses. Each of the lenses overlaps at least one of the second lenses adjacent to each other in the second direction, which is the fourth center distance among the plurality of second lenses, and the fourth center distance is The length is equal to or shorter than the distance between the second centers. It is preferred.

1 is a schematic configuration diagram of an aspect of a projection display device (electronic apparatus) using an electro-optical device to which the present invention is applied. FIG. 3 is an explanatory diagram illustrating an example of an incident angle characteristic of illumination light with respect to the electro-optical device in the projection display device illustrated in FIG. 1. 1 is an explanatory diagram of an aspect of an electro-optical device according to Embodiment 1 of the invention. FIG. FIG. 4 is an explanatory diagram illustrating a configuration example of a microlens and the like in the electro-optical device illustrated in FIG. 3. FIG. 4 is an explanatory diagram illustrating an example of a planar positional relationship between a microlens and a light shielding layer in the electro-optical device illustrated in FIG. FIG. 6 is an explanatory diagram illustrating one aspect of microlens scaling in the electro-optical device according to the first embodiment of the invention. It is explanatory drawing which shows the state which shifted the center of the 1st lens and the center of the 2nd lens with respect to the center of a pixel electrode by the scaling shown in FIG. It is explanatory drawing which shows the method of setting the shift amount of a micro lens in the case of the scaling shown in FIG. FIG. 6 is an explanatory diagram of region division for scaling a microlens in the electro-optical device according to the first embodiment of the invention. FIG. 6 is an explanatory diagram schematically showing a cross-sectional configuration of an electro-optical device according to a second embodiment of the invention. FIG. 6 is an explanatory diagram schematically showing a cross-sectional configuration of an electro-optical device according to a third embodiment of the invention. FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of an electro-optical device according to a fourth embodiment of the invention. FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of an electro-optical device according to a fifth embodiment of the invention. It is explanatory drawing which shows the influence of the position shift of a lens array substrate and an element substrate.

  Embodiments of the present invention will be described with reference to the drawings. In the drawings to be referred to in the following description, the scales are different for each layer and each member so that each layer and each member have a size that can be recognized on the drawing.

[Embodiment 1]
(Configuration of projection display device)
FIG. 1 is a schematic configuration diagram of an aspect of a projection display device 110 (electronic apparatus) using an electro-optical device 100 to which the present invention is applied. In the following description, a plurality of electro-optical devices 100 to which light having different wavelength ranges are supplied are used. However, the electro-optical device 100 to which the present invention is applied is used for any of the electro-optical devices 100. It has been.

  A projection display device 110 shown in FIG. 1 is a liquid crystal projector using a transmissive electro-optical device 100, and irradiates light to a projection member made up of a screen 111 or the like to display an image. The projection display device 110 includes an illumination device 160 along the device optical axis Lp, a plurality of electro-optical devices 100 (liquid crystal light valves 115 to 117) to which light emitted from the illumination device 160 is supplied, and a plurality of A cross dichroic prism 119 (color synthesis optical system) that synthesizes and emits light emitted from the electro-optical device 100 and a projection optical system 118 that projects the light synthesized by the cross dichroic prism 119 are provided. In addition, the projection display device 110 includes dichroic mirrors 113 and 114 and a relay system 120. In the projection display device 110, the electro-optical device 100 and the cross dichroic prism 119 constitute an optical unit 200.

  In the illumination device 160, along the device optical axis L, a light source unit 161, a first integrator lens 162 composed of a lens array such as a fly-eye lens, a second integrator lens 163 composed of a lens array such as a fly-eye lens, and a polarization conversion element 164 and a condenser lens 165 are arranged in this order. The light source unit 161 includes a light source 168 that emits white light including red light R, green light G, and blue light B, and a reflector 169. The light source 168 is configured by an ultra-high pressure mercury lamp or the like, and the reflector 169 has a parabolic cross section. The first integrator lens 162 and the second integrator lens 163 make the illuminance distribution of the light emitted from the light source unit 161 uniform. The polarization conversion element 164 turns the light emitted from the light source unit 161 into polarized light having a specific vibration direction such as s-polarized light.

  The dichroic mirror 113 transmits the red light R included in the light emitted from the illumination device 160 and reflects the green light G and the blue light B. The dichroic mirror 114 transmits the blue light B and reflects the green light G out of the green light G and the blue light B reflected by the dichroic mirror 113. As described above, the dichroic mirrors 113 and 114 constitute a color separation optical system that separates the light emitted from the illumination device 160 into red light R, green light G, and blue light B.

  The liquid crystal light valve 115 is a transmissive liquid crystal device that modulates the red light R transmitted through the dichroic mirror 113 and reflected by the reflection mirror 123 in accordance with an image signal. The liquid crystal light valve 115 includes a λ / 2 retardation plate 115a, a first polarizing plate 115b, an electro-optical device 100 (red electro-optical device 100R), and a second polarizing plate 115d. Here, the red light R incident on the liquid crystal light valve 115 remains as s-polarized light because the polarization of the light does not change even if it passes through the dichroic mirror 113.

  The λ / 2 phase difference plate 115a is an optical element that converts s-polarized light incident on the liquid crystal light valve 115 into p-polarized light. The first polarizing plate 115b is a polarizing plate that blocks s-polarized light and transmits p-polarized light. The electro-optical device 100 (red electro-optical device 100R) is configured to convert p-polarized light into s-polarized light (circularly polarized light or elliptically polarized light in the case of halftone) by modulation according to an image signal. The second polarizing plate 115d is a polarizing plate that blocks p-polarized light and transmits s-polarized light. Accordingly, the liquid crystal light valve 115 modulates the red light R according to the image signal, and emits the modulated red light R toward the cross dichroic prism 119. The λ / 2 phase difference plate 115a and the first polarizing plate 115b are arranged in contact with a light-transmitting glass plate 115e that does not convert the polarization, and the λ / 2 phase difference plate 115a and the first polarizing plate 115b are arranged. Distortion due to heat generation can be avoided.

  The liquid crystal light valve 116 is a transmissive liquid crystal device that modulates green light G reflected by the dichroic mirror 114 after being reflected by the dichroic mirror 113 in accordance with an image signal. As with the liquid crystal light valve 115, the liquid crystal light valve 116 includes a first polarizing plate 116b, an electro-optical device 100 (green electro-optical device 100G), and a second polarizing plate 116d. Green light G incident on the liquid crystal light valve 116 is s-polarized light that is reflected by the dichroic mirrors 113 and 114 and then incident. The first polarizing plate 116b is a polarizing plate that blocks p-polarized light and transmits s-polarized light. The electro-optical device 100 (green electro-optical device 100G) is configured to convert s-polarized light into p-polarized light (circularly polarized light or elliptically polarized light in the case of halftone) by modulation according to an image signal. The second polarizing plate 116d is a polarizing plate that blocks s-polarized light and transmits p-polarized light. Therefore, the liquid crystal light valve 116 modulates the green light G according to the image signal, and emits the modulated green light G toward the cross dichroic prism 119.

  The liquid crystal light valve 117 is a transmissive liquid crystal device that modulates the blue light B reflected by the dichroic mirror 113, transmitted through the dichroic mirror 114, and then passed through the relay system 120 in accordance with an image signal. Similarly to the liquid crystal light valves 115 and 116, the liquid crystal light valve 117 includes a λ / 2 phase difference plate 117a, a first polarizing plate 117b, an electro-optical device 100 (blue electro-optical device 100B), and a second polarizing plate 117d. I have. Since the blue light B incident on the liquid crystal light valve 117 is reflected by the dichroic mirror 113 and transmitted through the dichroic mirror 114 and then reflected by the two reflection mirrors 125a and 125b of the relay system 120, it is s-polarized light.

  The λ / 2 phase difference plate 117a is an optical element that converts s-polarized light incident on the liquid crystal light valve 117 into p-polarized light. The first polarizing plate 117b is a polarizing plate that blocks s-polarized light and transmits p-polarized light. The electro-optical device 100 (blue electro-optical device 100B) is configured to convert p-polarized light into s-polarized light (circularly polarized light or elliptically polarized light in the case of halftone) by modulation according to an image signal. The second polarizing plate 117d is a polarizing plate that blocks p-polarized light and transmits s-polarized light. Accordingly, the liquid crystal light valve 117 modulates the blue light B according to the image signal, and emits the modulated blue light B toward the cross dichroic prism 119. The λ / 2 phase difference plate 117a and the first polarizing plate 117b are arranged in contact with the glass plate 117e.

  The relay system 120 includes relay lenses 124a and 124b and reflection mirrors 125a and 125b. The relay lenses 124a and 124b are provided to prevent light loss due to the long optical path of the blue light B. The relay lens 124a is disposed between the dichroic mirror 114 and the reflection mirror 125a. The relay lens 124b is disposed between the reflection mirrors 125a and 125b. The reflection mirror 125a reflects the blue light B transmitted through the dichroic mirror 114 and emitted from the relay lens 124a toward the relay lens 124b. The reflection mirror 125b reflects the blue light B emitted from the relay lens 124b toward the liquid crystal light valve 117.

  The cross dichroic prism 119 is a color combining optical system in which two dichroic films 119a and 119b are arranged orthogonally in an X shape. The dichroic film 119a is a film that reflects blue light B and transmits green light G, and the dichroic film 119b is a film that reflects red light R and transmits green light G. Accordingly, the cross dichroic prism 119 combines the red light R, the green light G, and the blue light B that are modulated by the liquid crystal light valves 115 to 117, and emits the resultant light toward the projection optical system 118.

  Note that light incident on the cross dichroic prism 119 from the liquid crystal light valves 115 and 117 is s-polarized light, and light incident on the cross dichroic prism 119 from the liquid crystal light valve 116 is p-polarized light. Thus, by making the light incident on the cross dichroic prism 119 into different types of polarized light, the light incident from the liquid crystal light valves 115 to 117 can be synthesized in the cross dichroic prism 119. Here, in general, the dichroic films 119a and 119b are excellent in the reflection characteristics of s-polarized light. For this reason, red light R and blue light B reflected by the dichroic films 119a and 119b are s-polarized light, and green light G transmitted through the dichroic films 119a and 119b is p-polarized light. The projection optical system 118 has a projection lens (not shown), and projects the light combined by the cross dichroic prism 119 onto a projection target member such as the screen 111.

(Incident angle characteristics of illumination light to the electro-optical device 100)
FIG. 2 is an explanatory diagram illustrating an example of an incident angle characteristic of illumination light with respect to the electro-optical device 100 in the projection display device 110 illustrated in FIG. In FIG. 2 (b), the white region is greatly shown in the direction in which the light intensity is high in each incident direction.

  In the projection display device 110 shown in FIG. 1, as described with reference to FIG. 14A, light incident on the electro-optical device 100 obliquely from the outside out of the light irradiated on the electro-optical device 100. Is higher in intensity than light incident on the electro-optical device 100 obliquely from the inside. For example, as shown in FIGS. 2A and 2B, there is a bias in the incident angle distribution of incident light with respect to each position B <b> 1 to B <b> 9 of the electro-optical device 100, and the outer side with respect to the electro-optical device 100. The light incident obliquely from the light has a higher intensity than the light incident obliquely on the electro-optical device 100 from the inside. For this reason, illumination light is incident at a central position B5 of the electro-optical device 100 with symmetrical and vertical symmetric intensities toward the drawing, but at positions B1 to B4 and B6 to B9 that are close to the end portions, the drawing is directed to the drawing. Therefore, the intensity of light incident from the outside is higher than the intensity of light incident from the inside in the left, right, and top and bottom.

  Therefore, the electro-optical device 100 is configured as described below for the purpose of suppressing the luminance unevenness of the image due to the positional deviation between the lens array substrate and the element substrate described with reference to FIG. It is.

(Overall configuration of electro-optical device 100)
3A and 3B are explanatory views of one aspect of the electro-optical device 100 according to Embodiment 1 of the present invention. FIGS. 3A and 3B each illustrate the electro-optical device 100 together with each component of the counter substrate. It is the top view seen from the side, and its sectional drawing.

  As shown in FIG. 3, the electro-optical device 100 includes a translucent element substrate 10 and a translucent counter substrate 20 that are bonded to each other with a sealant 107 with a predetermined gap therebetween. An electro-optic layer 80 made of a liquid crystal layer is disposed in a region surrounded by the sealing material 107 between the substrate 20. The sealing material 107 is provided in a frame shape along the outer edge of the counter substrate 20. The sealing material 107 is a photo-curing adhesive or a photo-curing and thermo-curing adhesive, such as glass fiber or glass beads for setting the distance between both substrates to a predetermined value. Gap material is blended. As the sealing material 107, an acrylic resin-based, epoxy resin-based, acrylic-modified resin-based, epoxy-modified resin-based or the like photocurable adhesive (ultraviolet light curable adhesive / UV curable adhesive) can be used. .

  The element substrate 10 and the counter substrate 20 are both square, and a display area 10 a is provided as a square area in the approximate center of the electro-optical device 100. Corresponding to this shape, the sealing material 107 is also provided in a substantially square shape, and a rectangular frame-shaped peripheral region 10b is provided between the inner peripheral edge of the sealing material 107 and the outer peripheral edge of the display region 10a.

  A data line driving circuit 101 and a plurality of terminals 102 are formed along one side of the element substrate 10 outside the display region 10a on the surface of the element substrate 10 on the counter substrate 20 side. A scanning line driving circuit 104 is formed along the sides. A flexible wiring board (not shown) is connected to the terminal 102, and various potentials and various signals are input to the element substrate 10 through the flexible wiring board.

  Further, on the surface of the element substrate 10 on the counter substrate 20 side, the display region 10a includes a transparent pixel electrode 9a made of an ITO (Indium Tin Oxide) film and the like, and a pixel transistor electrically connected to the pixel electrode 9a. (Not shown) are formed in a matrix, and an alignment film 16 is formed on the counter substrate 20 side with respect to the pixel electrode 9a. In the element substrate 10, a dummy pixel electrode 9 b formed simultaneously with the pixel electrode 9 a is formed in the peripheral region 10 b.

  A translucent common electrode 21 made of an ITO film or the like is formed on the surface of the counter substrate 20 facing the element substrate 10, and an alignment film 26 is formed on the element substrate 10 side with respect to the common electrode 21. Has been. In this embodiment, the common electrode 21 is formed on substantially the entire surface of the counter substrate 20.

The alignment films 16 and 26 are made of a resin film such as polyimide or an oblique deposition film such as a silicon oxide film. In this embodiment, the alignment films 16 and 26 are obliquely deposited such as SiOx (x <2), SiO ₂ , TiO ₂ , MgO, Al ₂ O ₃ , In ₂ O ₃ , Sb ₂ O ₃ , and Ta ₂ O _5. This is an inorganic alignment film (vertical alignment film) made of a film, in which the liquid crystal molecules having negative dielectric anisotropy used in the electro-optical layer 80 are tilted and aligned to make the electro-optical device 100 in a VA (Vertical Alignment) mode. Operate as a liquid crystal device.

  On the element substrate 10, an inter-substrate conduction electrode 109 is formed in a region overlapping the corner portion of the counter substrate 20 on the outer side of the sealing material 107 to establish electrical continuity between the element substrate 10 and the counter substrate 20. ing. The inter-substrate conducting electrode 109 is provided with an inter-substrate conducting material 109 a containing conductive particles, and the common electrode 21 of the counter substrate 20 is connected via the inter-substrate conducting material 109 a and the inter-substrate conducting electrode 109. It is electrically connected to the element substrate 10 side. For this reason, a common potential is applied to the common electrode 21 from the element substrate 10 side.

  In the electro-optical device 100 of this embodiment, the pixel electrode 9a and the common electrode 21 are formed of a light-transmitting conductive film, and the electro-optical device 100 is configured as a transmissive liquid crystal device. In the electro-optical device 100, the light incident from one of the element substrate 10 and the counter substrate 20 is modulated while being transmitted through the other substrate and emitted to display an image. In this embodiment, as indicated by an arrow L, the light incident from the counter substrate 20 is modulated for each pixel by the electro-optical layer 80 while being transmitted through the element substrate 10 and emitted to display an image.

(Configuration of counter substrate 20)
FIG. 4 is an explanatory diagram illustrating a configuration example of a microlens and the like in the electro-optical device 100 illustrated in FIG. 3, and FIGS. 4A and 4B schematically illustrate a cross-sectional configuration of the electro-optical device 100. It is explanatory drawing which shows a figure and the position of a micro lens, etc. typically. FIG. 5 is an explanatory diagram illustrating an example of a planar positional relationship between the microlens 30a and the light shielding layer 108b in the electro-optical device 100 illustrated in FIG. In FIG. 4, the illustration of the light shielding layer 108 is omitted.

  As shown in FIG. 3B, in the electro-optical device 100 of the present embodiment, the counter substrate 20 has a light-shielding property made of a metal or a metal compound on the opposite side of the common electrode 21 from the element substrate 10. A light shielding layer 108 is formed. The light shielding layer 108 is formed, for example, as a frame-shaped parting 108a that extends along the outer peripheral edge of the display region 10a. The light shielding layer 108 is formed as a light shielding layer 108b in a region overlapping with a region sandwiched between adjacent pixel electrodes 9a in plan view.

  As shown in FIG. 4A, the element substrate 10 has a translucent substrate 19 and a plurality of interlayer insulating films 18 are laminated on the surface of the translucent substrate 19 on the counter substrate 20 side. ing. Further, the element substrate 10 extends along a region overlapping with adjacent pixel electrodes 9a by using the space between the translucent substrate 19 and the interlayer insulating film 18 or between the interlayer insulating films 18. The wiring 17 and the pixel transistor 14 are formed, and the wiring 17 and the pixel transistor 14 do not transmit light. For this reason, in the element substrate 10, among the regions overlapping with the pixel electrode 9 a in plan view, the region overlapping with the wiring 17 and the pixel transistor 14 in plan view, or the region overlapping with the adjacent pixel electrode 9 a in plan view. Is a light shielding region 15b that does not transmit light, and of the region that overlaps the pixel electrode 9a in plan view, the region that does not overlap the wiring 17 and the pixel transistor 14 in plan view becomes an opening region 15a that transmits light. Yes. Therefore, only the light transmitted through the opening region 15a contributes to the image display, and the light traveling toward the light shielding region 15b does not contribute to the image display.

  Therefore, in the present embodiment, the counter substrate 20 is configured as a lens array substrate 30 formed with a plurality of microlenses 30a facing the pixel electrodes 9a in a one-to-one relationship in plan view. The array substrate 30 converges light from the light source into the opening region 15a. In the lens array substrate 30 of the present embodiment, a multi-stage lens array is configured along the light traveling direction. More specifically, the lens array substrate 30 includes a first lens array 31 including a plurality of first lenses 310 positioned on the light incident side, and the element substrate 10 side with respect to the first lens array 31. The second lens array 32 having a plurality of second lenses 320 is configured, and each of the plurality of first lenses 310 and the plurality of second lenses 320 has a one-to-one relationship with the plurality of pixel electrodes 9a. Are facing each other. For this reason, in the electro-optical device 100 of this embodiment, the first lens 310 of the first lens array 31 and the second lens 320 of the second lens array 32 converge the light from the light source on the opening region 15a and The light incident on the optical layer 80 is collimated. Therefore, since the inclination of the optical axis of the light incident on the electro-optical layer 80 is small, the phase shift in the electro-optical layer 80 can be reduced, and the decrease in transmittance and contrast can be suppressed. In particular, in this embodiment, since the electro-optical device 100 is configured as a VA (Vertical Alignment) mode liquid crystal device, the inclination of the optical axis of the light incident on the electro-optical layer 80 is likely to cause a decrease in contrast. Accordingly, it is difficult for a decrease in contrast or the like to occur.

  Here, as shown in FIG. 5, the microlenses 30a are arranged so that adjacent microlenses 30a are in contact with each other, and in a region overlapping the region surrounded by the four microlenses 30a in a plan view, as shown in FIG. A light shielding layer 108b shown in b) is formed. Therefore, in FIG. 3B, the light shielding layer 108b is shown as being a cross section taken along the line AA 'in FIG. 5, but in FIG. 4, the cross section taken along the line BB' in FIG. As it is, the light shielding layer 108b is not shown. The light shielding layer 108b may overlap the end of the micro lens 30a in plan view, but is formed so as not to overlap the center of the micro lens 30a in plan view.

  As shown in FIG. 4A, when the lens array substrate 30 (counter substrate 20) is configured, a plurality of concave curved surfaces are formed on the first surface 41 composed of one substrate surface 291 of the translucent substrate 29. A first recess 292 is formed. Further, on one substrate surface 291 (first surface 41) of the translucent substrate 29, a translucent first lens layer 51, a first translucent layer 52, and a translucent second lens described below are provided. The layer 53, the second light transmissive layer 54, and the light transmissive protective layer 55 are sequentially stacked. The plurality of first recesses 292 are opposed to the plurality of pixel electrodes 9a so as to overlap in a one-to-one relationship in plan view. Among the plurality of translucent films, the first lens layer 51 includes a surface 511 (second surface 42) and a surface 511 (second surface 42) that cover the substrate surface 291 (first surface 41) of the translucent substrate 29. And a flat surface 512 (third surface 43) located on the opposite side. Further, the surface 511 (second surface 42) of the first lens layer 51 has a hemispherical first convex portion 513 that fills the first concave portion 292 of the translucent substrate 29.

Here, the translucent substrate 29 and the first lens layer 51 have different refractive indexes, and the first concave portion 292 and the first convex portion 513 are the first lenses 310 (microlenses 30a) of the first lens array 31. ). In this embodiment, the refractive index of the first lens layer 51 is larger than the refractive index of the translucent substrate 29. For example, the translucent substrate 29 is made of a quartz substrate (silicon oxide film, SiO ₂ ) and has a refractive index of 1.48, whereas the first lens layer 51 is made of a silicon oxynitride film (SiON). The refractive index is 1.58 to 1.68. Therefore, the first lens 310 has the power to converge the light from the light source.

The first light transmissive layer 52 is located on the opposite side of the surface 521 (fourth surface 44) covering the flat surface 512 (third surface 43) of the first lens layer 51 and the surface 521 (fourth surface 44). And a surface 522 (fifth surface 45). In the present embodiment, the first light transmissive layer 52 is made of a silicon oxide film (SiO _x ) and has a refractive index of 1.48. The first light transmission layer 52 is a first optical path length adjustment layer that adjusts the optical path length from the first lens array 31 to the second lens array 32.

  The second lens layer 53 includes a surface 531 (sixth surface 46) that covers the surface 522 (fifth surface 45) of the first light transmitting layer 52 and a surface 532 (the sixth surface 46) opposite to the surface 531 (sixth surface 46). A convex surface projecting toward the opposite side of the translucent substrate 29 at a position overlapping the first concave portion 292 in plan view. Or a recess that is recessed toward the translucent substrate 29 is formed.

  In the present embodiment, the surface 532 (seventh surface 47) of the second lens layer 53 protrudes in a hemispherical shape toward the side opposite to the translucent substrate 29 at a position overlapping the first recess 292 in plan view. A second convex portion 533 is formed. For this reason, the second light transmitting layer 54 has a surface 541 (eighth surface 48) covering the surface 532 (seventh surface 47) of the second lens layer 53, and the second convex portion 533 of the second lens layer 53 on the inner side. The 2nd recessed part 543 which consists of a concave curved surface located in is formed. The second light transmissive layer 54 includes a flat surface 542 (the ninth surface 49) on the opposite side of the surface 541 (the eighth surface 48).

Here, the second lens layer 53 and the second light transmitting layer 54 have different refractive indexes, and the second concave portion 543 and the second convex portion 533 are the second lens 320 (microlens) of the second lens array 32. 30a). In this embodiment, the refractive index of the second lens layer 53 is larger than the refractive index of the second light transmissive layer 54. For example, the second lens layer 53 is made of a silicon oxynitride film (SiON) and has a refractive index of 1.58 to 1.68, whereas the second light transmissive layer 54 is made of a silicon oxide film (SiO _x). The refractive index is 1.48. Therefore, the first lens 310 has the power to converge the light from the light source. In the present embodiment, the second light transmissive layer 54 is a second optical path length adjustment layer that adjusts the optical path length from the second lens array 32 to the element substrate 10.

A protective layer 55 such as a silicon oxide film (SiO _x ) or a silicon oxynitride film (SiON) is formed on the flat surface 542 (the ninth surface 49) of the second light transmitting layer 54. On the other hand, the common electrode 21 is formed on the side opposite to the second light transmissive layer 54 and the light transmissive substrate 29. An alignment film 26 is formed on the opposite side of the common electrode 21 from the protective layer 55 and the translucent substrate 29.

(Detailed configuration of the light shielding layer 108)
As shown in FIG. 3B, in the lens array substrate 30, the light shielding layer 108 (parting 108a, light shielding layer 108b) includes, for example, a first metal layer 56 and a second metal layer 56 formed between the light transmitting films. The metal layer 57 is used.

  Specifically, the lens array substrate 30 has a flat surface 512 (third surface 43) of the first lens layer 51 and a first transparent as a frame-shaped parting 108a extending along the outer peripheral edge of the display region 10a. A parting 56a made of the first metal layer 56 is formed between the surface 521 (fourth surface 44) of the optical layer 52, and the surface 522 (fifth surface 45) of the first light transmissive layer 52 and the second lens layer. A parting line 57 a made of the second metal layer 57 is formed between the surface 531 (sixth surface 46) of 53. In the display region 10a, a light shielding layer 57b made of the second metal layer 57 is formed as the light shielding layer 108b. The light shielding layer 57b may overlap the end portion of the micro lens 30a in plan view, but does not overlap the center of the micro lens 30a in plan view.

  In this embodiment, the light shielding layer 108 (the first metal layer 56 and the second metal layer 57) is Ti (titanium), Al (aluminum), Cr (chromium), W (tungsten), Ta (tantalum), Mo (respectively). Molybdenum), a metal film such as Pd (palladium), or a metal compound film such as a nitride film thereof. Further, the light shielding layer 108 may be either a single layer film or a multilayer film of the above metal film or metal compound film.

(Scaling of the first lens 310)
FIG. 6 is an explanatory diagram showing one aspect of scaling of the microlens 30a in the electro-optical device 100 according to the first embodiment of the present invention. FIGS. 6A, 6B, and 6C are pixel electrodes. FIG. 9A is an explanatory diagram showing the layout of 9a, an explanatory diagram showing the layout of the second lens 320, and an explanatory diagram showing the layout of the first lens 310; FIG. 7 is an explanatory diagram illustrating a state in which the center of the first lens 310 and the center of the second lens 320 are shifted with respect to the center of the pixel electrode 9a by the scaling illustrated in FIG. In FIG. 6, the shift amount when scaling the first lens 310 and the second lens 320 is exaggerated, and even after the first lens 310 and the second lens 320 are scaled, the plurality of first lenses 310 and the plurality of second lenses 320 are opposed to the plurality of pixel electrodes 9a in a one-to-one relationship.

  As shown in FIG. 6A, in the electro-optical device 100 of the present embodiment, the pixel electrodes 9a are arranged at equal intervals in the first direction X at the first pitch Px and intersect the first direction X. They are arranged at equal intervals in the second direction Y at the second pitch Py.

  In contrast, the plurality of first lenses 310 and the plurality of second lenses 320 are opposed to the plurality of pixel electrodes 9a in a one-to-one relationship, but are shown in FIGS. 6B and 6C. As shown, the center-to-center distance of the first lens 310 and the center-to-center distance of the second lens 320 are made different depending on the position. In the present invention, the center of the first lens 310 and the center of the second lens 320 mean the center of the top of the convex portion and the center of the bottom of the concave portion constituting the lens surface, and the distance between the centers is adjacent. It means the distance between the centers of the matching first lenses 310 and the distance between the centers of the adjacent second lenses 320.

  Here, the center-to-center distance of the first lens 310 in the first direction X is different for each first lens 310 in the first direction X, and a plurality of first lenses 310 in the first direction X are used as a unit. Any of the configurations different for each of the plurality of first lenses 310 may be adopted. However, in this embodiment, a total of 20 × 15 first lenses 310 are equally divided into five regions in the first direction X, A case where the distance between the centers of the first lenses 310 is changed for each region is illustrated. That is, in the first direction X, the four first lenses 310 are used as a unit, and the center-to-center distance is changed for each unit (for each of the four first lenses 310). Further, the distance between the centers of the first lenses 310 in the second direction Y is different for each first lens 310 in the second direction Y, and a plurality of first lenses 310 in the second direction Y are used as a unit. Any of the configurations different for each first lens 310 may be adopted. However, in this embodiment, a total of 20 × 15 first lenses 310 are equally divided into five regions in the second direction Y, and each The case where the distance between the centers of the 1st lens 310 is changed for every area | region is illustrated. That is, in the second direction Y, the three first lenses 310 are used as a unit, and the center distance is changed for each unit (for each of the three first lenses 310).

  More specifically, as shown in FIG. 6C, in the region 315 where the first lens 310 is arranged (the region where the pixel electrode 9a is arranged), the center in the first direction X (first center). On the Cx) side, the distance between the centers of the first lens 310 in the first direction X is reduced, and the first direction of the first lens 310 is increased toward the end portion (first end portion Ex) in the first direction X. The distance between the centers of X is increased. For this reason, the distance between the centers of the first lenses 310 adjacent in the first direction X on the first end Ex side (the first center distance dE1x) is the first distance on the first center Cx side of the first lens 310. It is longer than the distance dC1x between the centers of the first lenses 310 adjacent in the direction X. In addition, among the plurality of first lenses 310, the first lens 310 between the first end Ex and the center in the first direction X (first center Cx) includes two second lenses adjacent to each other in the first direction X. The distance between the centers of the one lens 310 gradually decreases from the first end Ex toward the first center Cx side with the plurality of first lenses 310 as a unit. When the distance between the centers of the first lenses 310 in the first direction X is different for each first lens 310, the distance between the first end Ex and the center in the first direction X (first center Cx). The first lens 310 is located at each of the first lenses 310 as the distance between the centers of the two first lenses 310 adjacent in the first direction X moves from the first end Ex toward the first center Cx. Gradually becomes shorter.

  Here, at the first center Cx, the center-to-center distance dC1x in the first direction X of the first lens 310 is equal to the first pitch Px in the first direction X of the pixel electrode 9a. Accordingly, as shown in FIGS. 4B and 7A, in the vicinity of the first center Cx, the center of the pixel electrode 9a and the center of the first lens 310 overlap, but the first end Ex is not reached. At a close position, the center of the first lens 310 is shifted outward in the first direction X with respect to the center of the pixel electrode 9a. Further, as shown in FIG. 7A, the center of the first lens 310 is closer to the first end Ex side (outer side) with respect to the center of the pixel electrode 9a toward the first end Ex from the first center Cx. ) Has become larger (shift amount).

  Further, as shown in FIG. 6C, in the region 315 where the first lens 310 is arranged (the region where the pixel electrode 9a is arranged), the center in the second direction Y (second center Cy) side. Then, the distance between the centers of the first lenses 310 in the second direction Y is narrowed, and the distance between the centers of the first lenses 310 in the second direction Y is increased toward the end in the second direction Y (second end Ey). The distance is widened. For this reason, the distance between the centers of the first lenses 310 adjacent in the second direction Y on the second end Ey side (second center distance dE1y) is the second distance on the second center Cy side of the first lens 310. It is longer than the distance dC1y between the centers of the first lenses 310 adjacent in the direction Y. In addition, among the plurality of first lenses 310, the first lens 310 between the second end Ey and the center in the second direction Y (second center Cy) includes two second lenses adjacent to each other in the second direction Y. The distance between the centers of the one lens 310 gradually decreases from the second end Ey toward the second center Cy side with the plurality of first lenses 310 as a unit. When the distance between the centers of the first lenses 310 in the second direction Y is different for each first lens 310, the distance between the second end Ey and the center in the second direction Y (second center Cy). The first lens 310 is located in each of the first lenses 310 as the distance between the centers of the two first lenses 310 adjacent in the second direction Y moves from the second end Ey to the second center Cy side. Gradually becomes shorter.

  Here, at the second center Cy, the center distance dC1y in the second direction Y of the first lens 310 is equal to the second pitch Py in the second direction Y of the pixel electrode 9a. Therefore, as shown in FIG. 4B and FIG. 7A, in the vicinity of the second center Cy, the center of the pixel electrode 9a and the center of the first lens 310 overlap, but the second end Ey. At a close position, the center of the first lens 310 is shifted outward in the second direction Y with respect to the center of the pixel electrode 9a. Further, as shown in FIG. 7A, the center of the first lens 310 is closer to the second end Ey side (outside) with respect to the center of the pixel electrode 9a as it goes from the second center Cy to the second end Ey. ) Has become larger (shift amount).

(Scaling of the second lens 320)
The distance between the centers of the second lenses 320 in the first direction X is different for each second lens 320 in the first direction X, and a plurality of second lenses 320 in the first direction X with a plurality of second lenses 320 as a unit. Any of the configurations that are different for each of the two lenses 320 may be adopted. In this embodiment, a case where a total of 20 × 15 second lenses 310 are equally divided into five regions in the first direction X and the distance between the centers of the second lenses 320 is changed for each region is illustrated. . That is, in the first direction X, the four second lenses 320 are used as a unit, and the center distance is changed for each unit (for each of the four second lenses 320). In addition, the distance between the centers of the second lenses 320 in the second direction Y is different for each second lens 320 in the second direction Y, and a plurality of second lenses 320 are used in the second direction Y as a unit. Any of the configurations different for each second lens 320 may be adopted. In this embodiment, a total of 20 × 15 second lenses 320 are equally divided into five regions in the second direction Y, and the distance between the centers of the second lenses 320 is changed for each region. . That is, in the second direction Y, the three second lenses 320 are used as a unit, and the center distance is changed for each unit (for each of the three second lenses 320).

  More specifically, as shown in FIG. 6B, in the region 315 where the first lens 310 is arranged (the region where the pixel electrode 9a is arranged, the second lens 320 is arranged), At the center (first center Cx) side in the first direction X, the distance between the centers of the second lenses 320 in the first direction X is narrowed toward the end portion (first end portion Ex) in the first direction X. Accordingly, the distance between the centers of the second lenses 320 in the first direction X is increased. Therefore, the distance between the centers of the second lenses 320 adjacent in the first direction X on the first end Ex side (the third center distance dE2x) is the first distance on the first center Cx side of the second lens 320. It is longer than the distance dC2x between the centers of the second lenses 320 adjacent in the direction X. Of the plurality of second lenses 320, the second lens 320 between the first end Ex and the center in the first direction X (first center Cx) includes two second lenses 320 adjacent to each other in the first direction X. The distance between the centers of the two lenses 320 gradually decreases from the first end Ex toward the first center Cx side with the plurality of second lenses 320 as a unit. When the distance between the centers of the second lenses 320 in the first direction X is different for each second lens 320, the distance between the first end Ex and the center in the first direction X (first center Cx). The second lens 320 in each of the second lenses 320 is provided for each second lens 320 as the distance between the centers of the two second lenses 320 adjacent in the first direction X moves from the first end Ex toward the first center Cx. Gradually becomes shorter.

  Here, at the first center Cx, the center-to-center distance dC2x in the first direction X of the second lens 320 is equal to the first pitch Px in the first direction X of the pixel electrode 9a. Therefore, as shown in FIGS. 4B and 7A, in the vicinity of the first center Cx, the center of the pixel electrode 9a and the center of the second lens 320 overlap, but the first end Ex is not reached. At a close position, the center of the second lens 320 is shifted outward in the first direction X with respect to the center of the pixel electrode 9a. Further, as shown in FIG. 7A, the center of the second lens 320 is closer to the first end Ex side (outside) with respect to the center of the pixel electrode 9a as it goes from the first center Cx to the first end Ex. ) Has become larger (shift amount).

  Further, as shown in FIG. 6B, in the region 315 where the second lens 320 is arranged (the region where the pixel electrode 9a is arranged), the center in the second direction Y (second center Cy) side. Then, the distance between the centers of the second lenses 320 in the second direction Y is narrowed, and the distance between the centers of the second lenses 320 in the second direction Y is increased toward the end in the second direction Y (second end Ey). The distance is widened. Therefore, the distance between the centers of the second lenses 320 adjacent in the second direction Y on the second end Ey side (fourth center distance dE2y) is the second distance on the second center Cy side of the second lens 320. It is longer than the distance dC2y between the centers of the second lenses 320 adjacent in the direction Y. In addition, among the plurality of second lenses 310, the second lens 320 between the second end Ey and the center in the second direction Y (second center Cy) includes two second lenses adjacent to each other in the second direction Y. The distance between the centers of the two lenses 320 gradually decreases from the second end Ey toward the second center Cy side with the plurality of first lenses 320 as a unit. When the distance between the centers of the second lenses 320 in the second direction Y is different for each second lens 320, the distance between the second end Ey and the center in the second direction Y (second center Cy). The second lens 320 in each of the second lenses 320 is provided for each second lens 320 as the distance between the centers of the two second lenses 320 adjacent in the second direction Y moves from the second end Ey to the second center Cy side. Gradually becomes shorter.

  Here, at the second center Cy, the center distance dC2y in the second direction Y of the second lens 320 is equal to the second pitch Py in the second direction Y of the pixel electrode 9a. Therefore, as shown in FIGS. 4B and 7A, in the vicinity of the second center Cy, the center of the pixel electrode 9a and the center of the second lens 320 are overlapped, but the second end Ey. At a close position, the center of the second lens 320 is shifted outward in the second direction Y with respect to the center of the pixel electrode 9a. Further, as shown in FIG. 7A, the center of the second lens 320 is closer to the second end Ey side (outer side) with respect to the center of the pixel electrode 9a as it goes from the second center Cy to the second end Ey. ) Has become larger (shift amount).

(Shift amount setting)
FIG. 8 is an explanatory diagram showing a method of setting the shift amount of the microlens 30a at the time of scaling shown in FIG.

  In setting the shift amount at the time of the above scaling, first, as shown in FIG. 8, the first lens 310 and the second lens 320 are not subjected to the above scaling, and the first lens at each position. The angle θ of the barycentric line of light incident on the pixel electrode 9a through 310 and the second lens 320 is obtained. Next, an air conversion length d1 from the first lens 310 to the pixel electrode 9a and an air conversion length d2 from the second lens 320 to the pixel electrode 9a are obtained.

Then, the shift amount of each of the plurality of first lenses 310 is expressed by the following equation: d1 × tan θ
Ask from. Further, the shift amount of each of the plurality of second lenses 320 is expressed by the following equation: d2 × tan θ
Ask from.

  Here, the air equivalent length d1 from the first lens 310 to the pixel electrode 9a is longer than the air equivalent length d2 from the second lens 320 to the pixel electrode 9a. Accordingly, among the plurality of first lenses 310 and the plurality of second lenses 320, the first lens 310 and the second lens 320 that overlap in the first end portion Ex in the plan view have a distance between the centers of the second lenses 320 ( The third center distance dE2x) is set shorter than the center distance of the first lens 310 (first center distance dE1x). Further, among the plurality of first lenses 310 and the plurality of second lenses 320, the first lens 310 and the second lens 320 that overlap in the second end portion Ey in plan view have a distance between the centers of the second lenses 320 ( The fourth center distance dE2y) is set shorter than the center distance of the first lens 310 (second center distance dE1y).

  When the shift amount is set for each of the plurality of first lenses 320 in the first lens 310 as in the present embodiment, the average value of the optimum shift amounts for the plurality of first lenses 310 is obtained, and the plurality of first lenses 310 are determined. The shift amount for each lens 320 is determined. Further, in the second lens 320, when the shift amount is set for each of the plurality of second lenses 320, an average value of the optimum shift amounts for the plurality of second lenses 320 is obtained, and each of the plurality of second lenses 320 is determined. Determine the scaling amount. With this configuration, the lens array substrate 30 can be easily designed. In such a case, as shown in FIG. 7B, in the pixel electrode 9a, the first lens 310, and the second lens 320 that are overlapped in plan view, the center O1 of the first lens 310 and the center of the second lens 320 are substantially the same. The center O3 of the pixel electrode 9a is positioned on the line connecting O2. As a result, as shown in FIG. 4A, the light incident on the electro-optical device 100 is condensed at substantially the center of the pixel electrode 9a as indicated by an arrow L in FIG.

  On the other hand, when the shift amount is set for each first lens 320 and the shift amount is set for each second lens 320, as shown in FIG. In the pixel electrode 9a, the first lens 310, and the second lens 320 that overlap in plan view, the center O3 of the pixel electrode 9a is located on a line connecting the center O1 of the first lens 310 and the center O2 of the second lens 320. become. According to such a configuration, the centers of all the first lenses 310 and the centers of all the second lenses 320 can be appropriately shifted with respect to the center of the pixel electrode 9a. Therefore, as shown in FIG. 4A, the light incident on any position of the electro-optical device 100 is condensed at substantially the center of the pixel electrode 9a as indicated by an arrow L in FIG. It will be.

(Configuration for scaling by region)
FIG. 9 is an explanatory diagram of region division for scaling of the microlens 30a in the electro-optical device 100 according to Embodiment 1 of the present invention. FIGS. 9 (a), 9 (b), and 9 (c) It is explanatory drawing at the time of dividing | segmenting area | region into * 3, explanatory drawing at the time of dividing | segmenting area | region into 9 * 9, and explanatory drawing at the time of dividing | segmenting area | region into 15 * 15.

  When setting the shift amount for each region, as shown in FIG. 9C, when the region is divided into 15 × 15, for example, a difference in shift amount of 0.093 μm occurs between the divided regions. To do. On the other hand, as shown in FIG. 9B, when the area is divided into 9 × 9, if scaling equivalent to the example shown in FIG. 9C is performed, 0.163 μm between the divided areas is obtained. A difference in shift amount will occur.

  On the other hand, as shown in FIG. 9A, when the area is divided into 3 × 3, if scaling equivalent to the example shown in FIG. 9C is performed, 0.650 μm between the divided areas is obtained. A difference in scaling amount (shift amount) occurs. In such a case, a clear boundary occurs between the areas, and such a boundary may appear as a light / dark boundary in the displayed image. On the other hand, in the case of the area division shown in FIGS. 9B and 9C, the result that the border of light and darkness was not visually recognized in the displayed image was obtained. Therefore, when performing region division for scaling, it is preferable to perform more than three region divisions in the first direction X and more than three region divisions in the second direction Y.

(Main effects of this form)
As described above, in the electro-optical device 100 of the present embodiment, the plurality of first lenses 310 and the plurality of second lenses 320 are opposed to the plurality of pixel electrodes 9a in a one-to-one relationship. The center-to-center distance of the first lens 310 and the center-to-center distance of the second lens 320 are optimized according to the position. Therefore, in the region 315 where the first lens 310 is arranged (the region where the pixel electrode 9a is arranged), the vicinity of the center in the first direction X (first center Cx) and the center in the second direction Y (first In the vicinity of 2 center Cy), the center of the pixel electrode 9a, the center of the first lens 310, and the center of the second lens 320 overlap. On the other hand, at a position close to the end portions (first end portion Ex and second end portion Ey) of the region 315 where the first lens 310 is arranged (region where the pixel electrode 9a is arranged), the pixel The centers of the first lens 310 and the second lens 320 are shifted outward from the center of the electrode 9a. For this reason, when the light is incident on the electro-optical device 100, even if the light incident on the electro-optical device 100 obliquely from the outside is higher in intensity than the light incident on the electro-optical device 100 obliquely from the inside, the light is Then, the light passes through the first lens 310 and the second lens 320 and is condensed at the approximate center of the pixel electrode 9a. Therefore, when the electro-optical device 100 is manufactured, even when the element substrate 10 is bonded to the lens array substrate 30 (counter substrate 20) in a state of being shifted in the first direction X and the second direction Y, FIG. In the image projected on the screen 111 or the like shown, it is possible to suppress the occurrence of a situation in which the luminance is partially reduced.

[Embodiment 2]
FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of the electro-optical device 100 according to Embodiment 2 of the present invention. In the first embodiment, the first lens 310 and the second lens 320 are provided only on the counter substrate 20 side. However, in the present embodiment, as shown in FIG. 10, the element substrate 10 includes the pixel electrode 9a. In contrast, a third lens array 33 including a third lens 330 (microlens) facing the pixel electrode 9a is provided on the side opposite to the counter substrate 20. The third lens array 33 can be configured, for example, by forming a concave portion on the translucent substrate 19 shown in FIG. 4A and then providing a translucent film that fills the concave portion.

  Here, in any position of the third lens 330, the center of the pixel electrode 9a and the center of the third lens 330 overlap. On the other hand, the center of the first lens 310 and the center of the second lens 320 are shifted outward by a predetermined distance from the center of the pixel electrode 9a at the ends. Even in such a configuration, when the electro-optical device 100 is manufactured, even when the element substrate 10 is bonded to the lens array substrate 30 (counter substrate 20) in a state shifted in the first direction X and the second direction Y, FIG. The image projected onto the screen 111 shown in FIG. 1 has the same effects as those of the first embodiment, such as the suppression of the occurrence of a situation where the luminance is partially reduced.

[Embodiment 3]
FIG. 11 is an explanatory view schematically showing a cross-sectional configuration of the electro-optical device 100 according to Embodiment 3 of the present invention. In the first embodiment, the shift amount with respect to the pixel electrode 9a is different between the first lens 310 and the second lens 320 provided on the counter substrate 20, but in this embodiment, as shown in FIG. The provided first lens 310 and second lens 320 are provided outside with the same shift amount with respect to the center of the pixel electrode 9a. That is, in the first lens 310 and the second lens 320 that overlap in plan view, the third center distance dE2x and the first center distance dE1x described with reference to FIG. 6 are equal. The described fourth center distance dE2y is equal to the second center distance dE1y.

  Even in such a configuration, when the electro-optical device 100 is manufactured, even when the element substrate 10 is bonded to the lens array substrate 30 (counter substrate 20) in a state shifted in the first direction X and the second direction Y, FIG. The image projected onto the screen 111 shown in FIG. 1 has the same effects as those of the first embodiment, such as the suppression of the occurrence of a situation where the luminance is partially reduced.

[Embodiment 4]
FIG. 12 is an explanatory diagram schematically showing a cross-sectional configuration of the electro-optical device 100 according to Embodiment 4 of the present invention. As shown in FIG. 12, in the present embodiment, as in the third embodiment, the first lens 310 and the second lens 320 provided at the end are on the outside with the same shift amount with respect to the center of the pixel electrode 9a. Is provided. Similarly to the second embodiment, the element substrate 10 includes a third lens having a third lens 330 (microlens) facing the pixel electrode 9a on the side opposite to the counter substrate 20 with respect to the pixel electrode 9a. An array 33 is provided. In any position of the third lens 330, the center of the pixel electrode 9a and the center of the third lens 330 overlap.

  Also in this configuration, as in the third embodiment, the center of the first lens 310 and the center of the second lens 320 are shifted outward at a predetermined distance from the center of the pixel electrode 9a at the ends. Therefore, when the electro-optical device 100 is manufactured, even when the element substrate 10 is bonded to the lens array substrate 30 (counter substrate 20) in a state of being shifted in the first direction X and the second direction Y, FIG. In the image projected on the screen 111 or the like shown, the same effects as in the first embodiment can be achieved, such as the occurrence of a situation where the luminance is partially reduced.

[Embodiment 5]
FIG. 13 is an explanatory view schematically showing a cross-sectional configuration of the electro-optical device 100 according to Embodiment 5 of the present invention. In the first embodiment, the first lens 310 and the second lens 320 are provided on the counter substrate 20. In this embodiment, as shown in FIG. 13, the counter substrate 20 is provided with the first lens 310, but the second lens 320 is not provided. On the other hand, the element substrate 10 includes a second lens layer 325 (microlens array) including a second lens 326 (microlens) facing the pixel electrode 9a on the opposite side of the pixel electrode 9a from the counter substrate 20. Is provided. Here, the second lens 326 overlaps the center of the pixel electrode 9a at any position. On the other hand, the first lens 310 provided at the end is provided outside the center of the pixel electrode 9a. Therefore, when the electro-optical device 100 is manufactured, even when the element substrate 10 is bonded to the lens array substrate 30 (counter substrate 20) in a state of being shifted in the first direction X and the second direction Y, FIG. In the image projected on the screen 111 or the like shown, the same effects as in the first embodiment can be achieved, such as the occurrence of a situation where the luminance is partially reduced.

[Other embodiments]
In Embodiment 1 or the like, in the first lens 310, the center of the first lens 310 provided at the end in both the first direction X and the second direction Y is outside the center of the pixel electrode 9a. Although shifted, only in the first direction X, the center of the first lens 310 provided at the end may be shifted outward from the center of the pixel electrode 9a. Also in the second lens 320, the center of the second lens 320 provided at the end may be shifted outward from the center of the pixel electrode 9a only in the first direction X.

[Application example to other electro-optical devices]
In the above embodiment, the liquid crystal device has been described as an example of the electro-optical device. However, the present invention is not limited to this, and the present invention may be applied to an electro-optical device using an electrophoretic display panel. .

[Other projection display devices]
In the projection type display device, the transmission type electro-optical device 100 is used. However, the reflection type electro-optical device 100 may be used to form the projection type display device. In the projection display device, an LED light source that emits light of each color may be used as the light source unit, and the color light emitted from the LED light source may be supplied to another liquid crystal device. .

[Other electronic devices]
Regarding the electro-optical device 100 to which the present invention is applied, in addition to the above-described electronic apparatus, a head-mounted display device, a mobile phone, an information mobile terminal, a digital camera, a liquid crystal television, a car navigation device, a video phone, and a POS terminal In addition, it may be used as a direct-view display device in an electronic device such as a device provided with a touch panel.

9a ... Pixel electrode, 10 ... Element substrate, 10a ... Display area, 14 ... Pixel transistor, 15a ... Open area, 15b ... Shading area, 20 ... Counter substrate, 21 ... Common electrode, 29 ... -Translucent substrate, 30-Lens array substrate, 30a-Micro lens, 31-First lens array, 32-Second lens array, 33-Third lens array, 80-Electro-optical layer, 100 ... Electro-optical device 110 ... Projection type display device 111 ... Screen 118 ... Projection optical system 161 ... Light source unit 310 ... First lens 320 ... Second lens 330 ... Third lens, Cx... First center, Cy... Second center, Ex... First end, Ey .. second end, O1... First lens center, O2. Center, O3 ... Pixel electrode center, Px ... Pitch, Py ··· 2nd pitch, X · · 1st direction, Y · · 2nd direction, dC1x, dC1y, dC2x, dC2y · · Center distance on the center side, dE1x · · 1st center distance, dE1y .. Second center distance, dE2x, Third center distance, dE2y, Fourth center distance

Claims (17)

A plurality of pixel electrodes arranged along a first direction and a second direction intersecting the first direction, an element substrate provided on one side;
A lens array substrate including a first lens array including a plurality of first lenses arranged to face each of the plurality of pixel electrodes, the lens array substrate being disposed facing the one surface side of the element substrate; ,
An electro-optic layer provided between the element substrate and the lens array substrate;
A second lens array comprising a plurality of second lenses arranged to face each of the plurality of pixel electrodes;
Have
Among the plurality of first lenses, two second lenses that are located on the first end side that is the end in the first direction of the region where the pixel electrodes are arranged and are adjacent to each other in the first direction. The first center distance, which is the distance between the centers of one lens, is located closer to the center side of the region where the pixel electrodes are arranged than the first end, and is adjacent to each other in the first direction. An electro-optical device characterized by being longer than the distance between the centers of the first lenses. The electro-optical device according to claim 1.
Of the plurality of first lenses, two second lenses that are located on the second end side that is the end portion in the second direction of the region in which the pixel electrodes are arranged and that are adjacent to each other in the second direction. The second center distance, which is the distance between the centers of one lens, is located closer to the center of the region where the pixel electrodes are arranged than the second end, and is adjacent to each other in the second direction. An electro-optical device characterized by being longer than the distance between the centers of the first lenses. The electro-optical device according to claim 2.
Of the plurality of first lenses, the first lens between the first end and the center of the region where the pixel electrodes are arranged is between the centers of two first lenses adjacent in the first direction. Is gradually shortened from the first end toward the center of the region where the pixel electrodes are arranged,
Of the plurality of first lenses, the first lens between the second end and the center of the region where the pixel electrodes are arranged is between the centers of two first lenses adjacent in the second direction. The distance is gradually shortened from the second end toward the center of the region where the pixel electrodes are arranged. The electro-optical device according to claim 2.
Of the plurality of first lenses, the first lens between the first end and the center of the region where the pixel electrodes are arranged is between the centers of two first lenses adjacent in the first direction. Is gradually shortened in units of a plurality of lenses as the distance from the first end toward the center side of the region where the pixel electrodes are arranged,
Of the plurality of first lenses, the first lens between the second end and the center of the region where the pixel electrodes are arranged is between the centers of two first lenses adjacent in the second direction. The distance is gradually reduced from the second end toward the center of the region where the pixel electrodes are arranged in units of a plurality of lenses. The electro-optical device according to any one of claims 2 to 4,
The lens array substrate includes the second lens array so as to be positioned between the first lens array and the electro-optic layer,
Among the plurality of second lenses, two second lenses that are located on the first end side that is the end portion in the first direction of the region where the pixel electrodes are arranged and that are adjacent to each other in the first direction. The third center distance, which is the distance between the centers of the two lenses, is located closer to the center side of the region where the pixel electrodes are arranged than the first end, and is adjacent to each other in the first direction. Longer than the distance between the centers of the second lenses,
Of the plurality of first lenses, each of the two first lenses adjacent to each other in the first direction, which is the first center distance, is the third center distance among the plurality of second lenses, respectively. Overlapping two second lenses adjacent to each other in the first direction,
The electro-optical device, wherein the third center distance is a length equal to or shorter than the first center distance. The electro-optical device according to claim 5.
Among the plurality of second lenses, two second lenses that are located on the second end side that is the end portion in the second direction of the region in which the pixel electrodes are arranged and that are adjacent to each other in the second direction. The fourth center distance, which is the distance between the centers of the two lenses, is located closer to the center side of the region where the pixel electrodes are arranged than the second end portion, and is adjacent to each other in the second direction. Longer than the distance between the centers of the second lenses,
Among the plurality of first lenses, each of the two first lenses adjacent to each other in the second direction which is the second center distance is the fourth center distance among the plurality of second lenses. Overlapping two second lenses adjacent to each other in the second direction,
The electro-optical device, wherein the fourth center distance is a length equal to or shorter than the second center distance. The electro-optical device according to claim 6.
Among the plurality of second lenses, a second lens between the first end and the center of the region where the pixel electrodes are arranged is between the centers of two second lenses adjacent in the first direction. Is gradually shortened from the first end toward the center of the region where the pixel electrodes are arranged,
Among the plurality of second lenses, a second lens between the second end and the center of the region where the pixel electrodes are arranged is between the centers of two second lenses adjacent in the second direction. The distance is gradually shortened from the second end toward the center of the region where the pixel electrodes are arranged. The electro-optical device according to claim 6.
Among the plurality of second lenses, a second lens between the first end and the center of the region where the pixel electrodes are arranged is between the centers of two second lenses adjacent in the first direction. Is gradually shortened in units of a plurality of lenses as the distance from the first end toward the center side of the region where the pixel electrodes are arranged,
Among the plurality of second lenses, a second lens between the second end and the center of the region where the pixel electrodes are arranged is between the centers of two second lenses adjacent in the second direction. The distance is gradually reduced from the second end toward the center of the region where the pixel electrodes are arranged in units of a plurality of lenses. The electro-optical device according to any one of claims 5 to 8,
The plurality of pixel electrodes on a line connecting a center of one first lens among the plurality of first lenses and a center of a second lens overlapping the one first lens among the plurality of second lenses. An electro-optical device, wherein a center of a pixel electrode overlapping the one first lens is located. The electro-optical device according to any one of claims 1 to 4,
The electro-optical device, wherein the element substrate includes the second lens array. The electro-optical device according to any one of claims 5 to 9,
The electro-optical device, wherein the element substrate includes a third lens array including a plurality of third lenses arranged to face each of the plurality of pixel electrodes.   An electronic apparatus comprising the electro-optical device according to claim 1. The electronic device according to claim 12,
A light source unit that emits light supplied to the electro-optical device;
A projection optical system that projects light modulated by the electro-optical device;
An electronic device comprising: A first lens array comprising a plurality of first lenses arranged along a first direction and a second direction intersecting the first direction;
A second lens array comprising a plurality of second lenses arranged to face each of the plurality of first lenses;
Have
Two of the plurality of first lenses that are located on the side of the first end that is the end in the first direction of the region in which the first lenses are arranged and that are adjacent to each other in the first direction. The first center distance, which is the distance between the centers of the first lenses, is located closer to the center of the region where the pixel electrodes are arranged than the first end, and is adjacent to each other in the first direction. A lens array substrate characterized by being longer than the distance between the centers of two first lenses. The lens array substrate according to claim 14,
Two of the plurality of first lenses that are located on the second end side that is the end portion in the second direction of the region in which the first lenses are arranged and that are adjacent to each other in the second direction. The second center distance, which is the distance between the centers of the first lenses, is located closer to the center of the region where the pixel electrodes are arranged than the second end portion, and is adjacent to each other in the second direction. A lens array substrate characterized by being longer than the distance between the centers of two first lenses. The lens array substrate according to claim 15,
Two of the plurality of second lenses that are located on the first end side that is the end portion in the first direction of the region in which the first lenses are arranged and that are adjacent to each other in the first direction. The third center distance, which is the distance between the centers of the second lenses, is located closer to the center of the region where the pixel electrodes are arranged than the first end, and is adjacent to each other in the first direction. Longer than the distance between the centers of the two second lenses,
Of the plurality of first lenses, each of the two first lenses adjacent to each other in the first direction, which is the first center distance, is the third center distance among the plurality of second lenses, respectively. Overlapping at least one of the two second lenses adjacent to each other in the first direction,
The lens array substrate according to claim 1, wherein the third center distance is equal to or shorter than the first center distance. The lens array substrate according to claim 16,
Two of the plurality of second lenses that are located on the second end side that is the end portion in the second direction of the region where the first lenses are arranged and that are adjacent to each other in the second direction. The fourth center distance, which is the distance between the centers of the second lenses, is located closer to the center of the region where the pixel electrodes are arranged than the second end, and is adjacent to each other in the second direction. Longer than the distance between the centers of the two second lenses,
Among the plurality of first lenses, each of the two first lenses adjacent to each other in the second direction which is the second center distance is the fourth center distance among the plurality of second lenses. Overlapping at least one of the two second lenses adjacent to each other in the second direction,
The lens array substrate, wherein the fourth center distance is a length equal to or shorter than the second center distance.

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