JP2016224323A - Electro-optical device, electronic apparatus and manufacturing method of electro-optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electro-optical device capable of suppressing luminance unevenness of an image even if positional deviations occur when a first substrate formed with pixel electrodes and a second substrate formed with optical elements such as lenses are bonded together, and an electronic apparatus and a manufacturing method of the electro-optical device.SOLUTION: In a first substrate 10 of an electro-optical device, a plurality of pixel electrodes 9a are arranged such that each distance between centers in a first direction X of two pixel electrodes 9a adjacent to each other in the first direction X is a first pitch Pax. In a second substrate 20, a plurality of optical elements 25 are arranged such that each distance between centers in the first direction X of two optical elements 25 adjacent to each other in the first direction X is a second pitch Pbx. The second pitch Pbx is longer than the first pitch Pax. Accordingly, the centers of the optical elements 25 positioned at end portions in the first direction X are positioned closer to outsides in the first direction X than the centers the pixel electrodes 9a facing the optical elements 25.SELECTED DRAWING: Figure 7

Description

The present invention relates to an electro-optical device including a substrate on which an optical element such as a lens is formed, an electronic apparatus including the electro-optical device, and a method for manufacturing the electro-optical device.

In an electro-optical device (liquid crystal device) used as a light valve or the like of a projection display device, liquid crystal is provided between a first substrate 10 provided with a plurality of pixel electrodes and a second substrate 20 as shown in FIG. An electro-optic layer such as a layer is provided. The second substrate 20 is provided with an optical element such as a so-called microlens or a black matrix, and light that reaches the pixel electrode via the optical element contributes to display (see Patent Documents 1 and 2). ). On the other hand, when forming the second substrate 20 (lens array substrate 30) having the lens, the pitch of the lens is narrowed at the end from the center of the lens array substrate 30 and added in the assembly process of the electro-optical device 100. A technique has been proposed in which a lens is appropriately opposed to a pixel electrode when the lens array substrate 30 is expanded by heat (see Patent Document 3).

JP 2009-63888 A JP 2011-22311 A JP 2004-61633 A

When the electro-optical device 100 described in Patent Documents 1 and 2 is mounted on a projection display device, FIG.
As shown in FIG. 4, the light emitted from the light source is converted into the polarization conversion element 164 and the condenser lens 16.
The electro-optical device 100 is irradiated via 5 or the like. At this time, the light incident on the electro-optical device 100 obliquely from the outside has higher intensity than the light incident on the electro-optical device 100 obliquely from the inside. Even in that case, in the light projected on the screen 111 or the like via the projection optical system 118, the light incident obliquely from the outside and the light obliquely incident from the inside are combined, so that the screen 1
In the image projected onto 11 etc., uneven brightness is unlikely to occur.

However, as shown in FIG. 18, when the second substrate 20 (lens array substrate 30) is bonded to the first substrate 10 in a shifted state, the electrooptic device 100 is inclined obliquely from the outside toward the one end side. It becomes difficult for the light incident on the light to be emitted from the electro-optical device 100. As a result, in the image projected on the screen 111 or the like, the luminance of the portion corresponding to one end side of the electro-optical device 100 is lowered. Such a problem is difficult to solve even by using the technique described in Patent Document 3.

In view of the above problems, the problem of the present invention is that even when a positional deviation occurs when a first substrate on which a pixel electrode is formed and a second substrate on which an optical element such as a lens is formed are bonded together. Another object of the present invention is to provide an electro-optical device capable of suppressing uneven brightness of an image, an electronic apparatus including the electro-optical device, and a method for manufacturing the electro-optical device.

In order to solve the above problems, an aspect of the electro-optical device according to the present invention is configured to correspond to each of the plurality of pixel electrodes, and the first substrate on which the plurality of pixel electrodes are arranged along the first direction. A plurality of optical elements arranged on the second substrate, and the plurality of pixel electrodes each have a distance between centers of the two pixel electrodes adjacent in the first direction in the first direction. The plurality of optical elements are arranged so as to have a first pitch, and the plurality of optical elements are arranged so that the distance between the centers in the first direction of two optical elements adjacent in the first direction becomes a second pitch. The second pitch is longer than the first pitch, and among the plurality of optical elements, the center of the optical element located at the end in the first direction is the corresponding pixel of the plurality of pixel electrodes. Located outside the center of the electrode And features.

In the present invention, each of the plurality of optical elements on the second substrate faces the plurality of pixel electrodes on the first substrate, but the distance between the centers in the first direction of the optical elements (second pitch) is the pixel electrode. Longer than the distance between the centers in the first direction (first pitch). For this reason, at the end in the first direction,
The center of the optical element is located outside the center of the pixel electrode in the first direction. Accordingly, when the electro-optical device is irradiated with light, the light incident obliquely from the outside in the first direction enters the approximate center of the pixel electrode via the optical element. Therefore, when the light incident obliquely from the outside in the first direction has a higher intensity than the light incident obliquely from the inside to the electro-optical device, the second substrate is displaced in the first direction with respect to the first substrate. Even when the images are pasted together, it is possible to suppress the occurrence of a situation in which the luminance is partially reduced in the projected image.

In the present invention, the plurality of pixel electrodes are arranged along a second direction intersecting the first direction, and the plurality of pixel electrodes are the two of the pixel electrodes adjacent in the second direction. The distances between the centers in the second direction are all arranged at a third pitch, and the plurality of optical elements are distances between the centers in the second direction of the two optical elements adjacent in the second direction. Are arranged so as to have a fourth pitch, the fourth pitch is longer than the third pitch, and among the plurality of optical elements, the center of the optical element located at the end in the second direction is Among the plurality of pixel electrodes, it is preferable that the pixel electrode is located outside the center of the corresponding pixel electrode. According to such a configuration, at the end in the second direction, the center of the optical element is located outside the center of the pixel electrode in the second direction. Accordingly, when the electro-optical device is irradiated with light, the light incident obliquely from the outside in the second direction enters the approximate center of the pixel electrode via the optical element. Therefore, when the light incident obliquely from the outside in the second direction is higher in intensity than the light incident obliquely from the inside to the electro-optical device, the second substrate is displaced in the second direction with respect to the first substrate. Even when the images are pasted together, it is possible to suppress the occurrence of a situation in which the luminance is partially reduced in the projected image.

In the present invention, it is possible to adopt an aspect in which each of the plurality of optical elements is a lens that collects incident light.

In the present invention, each of the plurality of optical elements is a first lens that condenses incident light, and the first substrate is a plurality of pixels arranged to correspond to each of the plurality of pixel electrodes. A second lens, and the plurality of second lenses are arranged such that the distance between the centers of the two second lenses adjacent in the first direction is the fifth pitch. The fifth pitch is preferably longer than the first pitch and shorter than the second pitch.

In the present invention, it is possible to adopt a mode in which each of the plurality of optical elements is a black matrix that blocks a part of incident light.

In the present invention, each of the plurality of optical elements may be a color filter that transmits light having a part of the wavelength of incident light.

In the present invention, each of the plurality of optical elements preferably has a width along the first direction larger than a width along the first direction of each of the plurality of pixel electrodes. According to this configuration, at the end portion in the first direction, similarly to the center in the first direction, light incident from the front or inside of the electro-optical device is easily transmitted through the optical element and incident on the pixel electrode.

In the present invention, among the plurality of optical elements, an optical element positioned at the end in the first direction has a width along the first direction that is closer to the center than the end in the first direction. The width of the element is preferably larger than the width along the first direction. According to this configuration, at the end portion in the first direction, similarly to the center in the first direction, light incident from the front or inside of the electro-optical device is easily transmitted through the optical element and incident on the pixel electrode.

The electro-optical device to which the present invention is applied is used for electronic apparatuses such as a projection display device and a direct view display device. When the electro-optical device according to the present invention is used in a projection display device, the projection display device projects a light source unit that emits light supplied to the electro-optical device and light modulated by the electro-optical device. A projection optical system.

One aspect of the method for manufacturing an electro-optical device according to the present invention includes a first substrate preparation step of preparing a first substrate on which a plurality of pixel electrodes are arranged along a first direction, and a plurality of the substrate along the first direction. A second substrate preparing step of preparing a second substrate on which the optical elements are arranged, and the first substrate and the second substrate are bonded so that the plurality of pixel electrodes and the plurality of optical elements correspond to each other. A plurality of pixel electrodes arranged such that the distance between the centers of the two pixel electrodes adjacent in the first direction is the first pitch. The plurality of optical elements are arranged such that the distance between the centers in the first direction of two optical elements adjacent in the first direction is the second pitch, and the second pitch is ,
In the bonding step, the center of the optical element located at the end in the first direction corresponds to the pixel electrode among the plurality of pixel electrodes. The first substrate and the second substrate are bonded to each other so as to be located outside the center of the pixel electrode.

In the method for manufacturing an electro-optical device according to the present invention, in the first substrate preparation step, the first substrate in which a first substrate side alignment mark is formed outside a region where the plurality of pixel electrodes are arranged is prepared. In the second substrate preparation step, the second substrate on which a second substrate-side alignment mark is formed outside a region where the plurality of optical elements are arranged is prepared. In the bonding step, the second substrate preparation step It is preferable that the first substrate side alignment mark and the second substrate side alignment mark are aligned to bond the first substrate and the second substrate together.

1 is a schematic configuration diagram of an aspect of a projection display device (electronic apparatus) using an electro-optical device to which the present invention is applied. FIG. 3 is an explanatory diagram illustrating an example of an incident angle characteristic of illumination light with respect to the electro-optical device in the projection display device illustrated in FIG. 1. 1 is a plan view of an electro-optical device according to Embodiment 1 of the present invention. FIG. 4 is a cross-sectional view of the electro-optical device shown in FIG. 3. FIG. 5 is an explanatory diagram schematically illustrating a cross-sectional configuration of a lens or the like in the electro-optical device illustrated in FIG. 4. FIG. 5 is an explanatory diagram illustrating an example of a planar positional relationship between a lens and a light shielding layer in the electro-optical device illustrated in FIG. 4. FIG. 3 is a plan view schematically showing a lens layout and the like in the electro-optical device according to the first embodiment of the invention. 3 is a cross-sectional view schematically showing a positional relationship between a lens and a pixel electrode in the electro-optical device according to Embodiment 1 of the present invention. FIG. FIG. 10 is a plan view schematically showing a lens layout and the like in an electro-optical device according to Modification 1 of Embodiment 1 of the present invention. FIG. 10 is a plan view schematically showing a lens layout and the like in an electro-optical device according to a second modification of the first embodiment of the present invention. FIG. 6 is an explanatory diagram schematically showing a cross-sectional configuration of a lens or the like in an electro-optical device according to Embodiment 2 of the invention. FIG. 6 is a plan view schematically showing a lens layout and the like in an electro-optical device according to Embodiment 2 of the present invention. FIG. 10 is a plan view schematically showing a lens layout and the like in an electro-optical device according to Modification 1 of Embodiment 2 of the present invention. FIG. 10 is a plan view schematically showing a lens layout and the like in an electro-optical device according to a second modification of the second embodiment of the present invention. FIG. 6 is a cross-sectional view of an electro-optical device according to a third embodiment of the present invention. FIG. 6 is a cross-sectional view of an electro-optical device according to Embodiment 4 of the present invention. It is explanatory drawing of the light which injects into an electro-optical apparatus. It is explanatory drawing which shows the influence of the position shift of a 1st board | substrate and a 2nd board | substrate.

Embodiments of the present invention will be described with reference to the drawings. In the drawings to be referred to in the following description, the scales are different for each layer and each member so that each layer and each member have a size that can be recognized on the drawing. In the following description, one of the two directions intersecting each other in the in-plane direction of the electro-optical device 100 will be described as the first direction X, and the other will be described as the second direction Y.

[Embodiment 1]
(Configuration of projection display device)
FIG. 1 is a schematic configuration diagram of an aspect of a projection display device 110 (electronic apparatus) using an electro-optical device 100 to which the present invention is applied. In the following description, a plurality of electro-optical devices 100 to which light having different wavelength ranges are supplied are used. However, the electro-optical device 100 to which the present invention is applied is used for any of the electro-optical devices 100. It has been.

A projection display device 110 shown in FIG. 1 is a liquid crystal projector using a transmissive electro-optical device 100, and irradiates light to a projection member made up of a screen 111 or the like to display an image. The projection display device 110 includes a lighting device 160 and a lighting device 160 along the device optical axis Lp.
A plurality of electro-optical devices 100 (liquid crystal light valves 115 to 1) supplied with light emitted from
17), a cross dichroic prism 119 (light combining optical system) that combines and outputs the light emitted from the plurality of electro-optical devices 100, and a projection optical system 118 that projects the light combined by the cross dichroic prism 119. Have. In addition, the projection display device 11
0 includes dichroic mirrors 113 and 114 and a relay system 120. In the projection display device 110, the electro-optical device 100 and the cross dichroic prism 1
19 constitutes an optical unit 200.

In the illumination device 160, along the device optical axis Lp, a light source unit 161, a first integrator lens 162 composed of a lens array such as a fly-eye lens, a second integrator lens 163 composed of a lens array such as a fly-eye lens, and a polarization conversion element 164 and a condenser lens 165 are arranged in this order. The light source unit 161 includes a light source 168 that emits white light including red light R, green light G, and blue light B, and a reflector 169. The light source 168 is configured by an ultra-high pressure mercury lamp or the like, and the reflector 169 has a parabolic cross section. The first integrator lens 162 and the second integrator lens 163 make the illuminance distribution of the light emitted from the light source unit 161 uniform. Polarization conversion element 16
4 changes the light emitted from the light source unit 161 into polarized light having a specific vibration direction such as s-polarized light.

The dichroic mirror 113 is a red light R included in the light emitted from the illumination device 160.
And green light G and blue light B are reflected. Dichroic mirror 11
4 transmits the blue light B and reflects the green light G out of the green light G and the blue light B reflected by the dichroic mirror 113. Thus, the dichroic mirror 113
, 114 constitute a color separation optical system that separates the light emitted from the illumination device 160 into red light R, green light G, and blue light B.

The liquid crystal light valve 115 is transmitted through the dichroic mirror 113 and reflected by the reflection mirror 123.
This is a transmissive liquid crystal device that modulates the red light R reflected by the light according to the image signal. The liquid crystal light valve 115 includes a λ / 2 retardation plate 115a, a first polarizing plate 115b, an electro-optical device 100 (red electro-optical device 100R), and a second polarizing plate 115d. Here, the red light R incident on the liquid crystal light valve 115 remains as s-polarized light because the polarization of the light does not change even if it passes through the dichroic mirror 113.

The λ / 2 phase difference plate 115a is an optical element that converts s-polarized light incident on the liquid crystal light valve 115 into p-polarized light. The first polarizing plate 115b is a polarizing plate that blocks s-polarized light and transmits p-polarized light. The electro-optical device 100 (red electro-optical device 100R) is configured to convert p-polarized light into s-polarized light (circularly polarized light or elliptically polarized light in the case of halftone) by modulation according to an image signal. The second polarizing plate 115d is a polarizing plate that blocks p-polarized light and transmits s-polarized light. Accordingly, the liquid crystal light valve 115 modulates the red light R according to the image signal, and emits the modulated red light R toward the cross dichroic prism 119. The λ / 2 phase difference plate 115a and the first polarizing plate 115b are arranged in contact with a light-transmitting glass plate 115e that does not convert the polarization, and the λ / 2 phase difference plate 115a and the first polarizing plate 115b are arranged. Distortion due to heat generation can be avoided.

The liquid crystal light valve 116 is a transmissive liquid crystal device that modulates green light G reflected by the dichroic mirror 114 after being reflected by the dichroic mirror 113 in accordance with an image signal. Similarly to the liquid crystal light valve 115, the liquid crystal light valve 116 includes a first polarizing plate 116b,
The electro-optical device 100 (green electro-optical device 100G) and the second polarizing plate 116d are provided. The green light G incident on the liquid crystal light valve 116 is emitted from the dichroic mirror 113,
The s-polarized light is reflected by 114 and incident. The first polarizing plate 116b blocks p-polarized light and s
It is a polarizing plate that transmits polarized light. The electro-optical device 100 (green electro-optical device 100G) converts the s-polarized light into p-polarized light (circularly polarized light or elliptically polarized light in the case of halftone) by modulating the image signal.
It becomes the composition to convert to. The second polarizing plate 116d is a polarizing plate that blocks s-polarized light and transmits p-polarized light. Therefore, the liquid crystal light valve 116 modulates the green light G according to the image signal, and emits the modulated green light G toward the cross dichroic prism 119.

The liquid crystal light valve 117 is a transmissive liquid crystal device that modulates the blue light B reflected by the dichroic mirror 113, transmitted through the dichroic mirror 114, and then passed through the relay system 120 in accordance with an image signal. Similarly to the liquid crystal light valves 115 and 116, the liquid crystal light valve 117 includes a λ / 2 phase difference plate 117a, a first polarizing plate 117b, an electro-optical device 100 (blue electro-optical device 100B), and a second polarizing plate 117d. I have. Liquid crystal light valve 11
7 is reflected by the dichroic mirror 113, passes through the dichroic mirror 114, and then is reflected by the two reflection mirrors 125a and 125b of the relay system 120, so that it is s-polarized light.

The λ / 2 phase difference plate 117a is an optical element that converts s-polarized light incident on the liquid crystal light valve 117 into p-polarized light. The first polarizing plate 117b is a polarizing plate that blocks s-polarized light and transmits p-polarized light. The electro-optical device 100 (blue electro-optical device 100B) is configured to convert p-polarized light into s-polarized light (circularly polarized light or elliptically polarized light in the case of halftone) by modulation according to an image signal. The second polarizing plate 117d is a polarizing plate that blocks p-polarized light and transmits s-polarized light. Accordingly, the liquid crystal light valve 117 modulates the blue light B according to the image signal, and emits the modulated blue light B toward the cross dichroic prism 119. The λ / 2 phase difference plate 11
7a and the first polarizing plate 117b are disposed in contact with the glass plate 117e.

The relay system 120 includes relay lenses 124a and 124b and reflection mirrors 125a and 125b.
And. The relay lenses 124a and 124b are provided to prevent light loss due to the long optical path of the blue light B. The relay lens 124a is disposed between the dichroic mirror 114 and the reflection mirror 125a. The relay lens 124b is disposed between the reflection mirrors 125a and 125b. The reflection mirror 125a transmits the blue light B transmitted through the dichroic mirror 114 and emitted from the relay lens 124a to the relay lens 1.
Reflected toward 24b. The reflection mirror 125b reflects the blue light B emitted from the relay lens 124b toward the liquid crystal light valve 117.

The cross dichroic prism 119 includes two dichroic films 119a and 119b.
Is a color synthesizing optical system in which X is orthogonally arranged in an X shape. The dichroic film 119a is a film that reflects blue light B and transmits green light G, and the dichroic film 119b is a film that reflects red light R and transmits green light G. Accordingly, the cross dichroic prism 119 combines the red light R, the green light G, and the blue light B that are modulated by the liquid crystal light valves 115 to 117, and emits the resultant light toward the projection optical system 118.

The light that enters the cross dichroic prism 119 from the liquid crystal light valves 115 and 117 is s-polarized light, and the cross dichroic prism 1 from the liquid crystal light valve 116.
The light incident on 19 is p-polarized light. Thus, by making the light incident on the cross dichroic prism 119 into different types of polarized light, the cross dichroic prism 11
9, the light incident from the liquid crystal light valves 115 to 117 can be synthesized. Here, in general, the dichroic films 119a and 119b are excellent in the reflection characteristics of s-polarized light. For this reason, red light R and blue light B reflected by the dichroic films 119a and 119b are s-polarized light, and green light G transmitted through the dichroic films 119a and 119b is p-polarized light. The projection optical system 118 has a projection lens (not shown), and projects the light combined by the cross dichroic prism 119 onto a projection target member such as the screen 111.

(Incident angle characteristics of illumination light to the electro-optical device 100)
FIG. 2 is an explanatory diagram illustrating an example of an incident angle characteristic of illumination light with respect to the electro-optical device 100 in the projection display device 110 illustrated in FIG. In FIG. 2, the white region is shown in a large direction in which the light intensity is high in each incident direction, “H” is attached to the side where the light intensity is high, and “L” is attached to the side where the light intensity is low. .

In the projection type display device 110 shown in FIG. 1, as described with reference to FIG. 17, among the light irradiated on the electro-optical device 100, the light incident obliquely on the electro-optical device 100 from the outside is electrically The intensity is higher than that of light incident obliquely on the optical device 100 from the inside. For example, as shown in FIG. 2, there is a bias in the incident angle distribution of the incident light with respect to each position B <b> 1 to B <b> 9 of the electro-optical device 100, and light incident obliquely from the outside to the electro-optical device 100 is The intensity is higher than the light incident on the electro-optical device 100 obliquely from the inside. Therefore, the electro-optical device 100
In the center position B5, the illumination light is incident on the left and right symmetrically and vertically symmetrical intensities toward the drawing. The intensity of light incident from the inside is higher than the intensity of light incident from the inside.

In the present invention, even if the positional deviation between the second substrate 20 and the first substrate 10 described with reference to FIG. 18 occurs in a state where the above-described incident angle distribution is biased, the luminance unevenness of the image is suppressed. For this purpose, the electro-optical device 100 is configured as described below.

(Overall configuration of electro-optical device 100)
FIG. 3 is a plan view of the electro-optical device 100 according to Embodiment 1 of the present invention. 4 is a cross-sectional view of the electro-optical device 100 shown in FIG.

As shown in FIGS. 3 and 4, in the electro-optical device 100, the light-transmitting first substrate 10 and the light-transmitting second substrate 20 are bonded to each other with a sealant 107 through a predetermined gap. An electro-optic layer 80 made of a liquid crystal layer is disposed in a region surrounded by the sealing material 107 between the first substrate 10 and the second substrate 20. The sealing material 107 is provided in a frame shape along the outer edge of the second substrate 20. The sealing material 107 is a photo-curing adhesive or a photo-curing and thermo-curing adhesive, such as glass fiber or glass beads for setting the distance between both substrates to a predetermined value. Gap material is blended. Such sealing material 107
As such, a photo-curable adhesive (ultraviolet light curable adhesive / UV curable adhesive) such as acrylic resin, epoxy resin, acrylic modified resin, and epoxy modified resin can be used.

The first substrate 10 and the second substrate 20 are both square, and a display area 10 a is provided as a square area in the approximate center of the electro-optical device 100. In response to such a shape,
The sealing material 107 is also provided in a substantially square shape, and a rectangular frame-shaped peripheral region 10b is provided between the inner peripheral edge of the sealing material 107 and the outer peripheral edge of the display region 10a. In the present embodiment, the display area 10a is a rectangle whose size in the first direction X is larger than the size in the second direction Y. here,
The first substrate 10 and the second substrate 20 have the same size in the first direction X, but the size of the first substrate 10 in the first direction X is larger than the size of the second substrate 20 in the first direction X, 1 substrate 10
The first direction X may be smaller than the size of the second substrate 20 in the first direction X.

On the surface of the first substrate 10 on the second substrate 20 side, the first substrate 1 is located outside the display area 10a.
A data line driving circuit 101 and a plurality of terminals 102 are formed along one side of 0, and a scanning line driving circuit 104 is formed along another side adjacent to the one side. A flexible wiring substrate (not shown) is connected to the terminal 102, and various potentials and various signals are input to the first substrate 10 through the flexible wiring substrate.

In addition, on the surface of the first substrate 10 on the second substrate 20 side, the display region 10a has ITO (I
A translucent pixel electrode 9a made of an ndium tin oxide) film and the like, and pixel transistors (not shown) electrically connected to the pixel electrode 9a are formed in a matrix. Accordingly, the display area 10a has the first direction X and the first direction as described later with reference to FIG.
It consists of a pixel electrode array region 10e in which a plurality of pixel electrodes 9a are arrayed along a second direction Y that intersects the direction X. An alignment film 16 is formed on the second substrate 20 side with respect to the pixel electrode 9a. In the first substrate 10, a dummy pixel electrode 9b that is formed simultaneously with the pixel electrode 9a is formed in the peripheral region 10b.

A translucent common electrode 21 made of an ITO film or the like is formed on the surface side of the second substrate 20 facing the first substrate 10, and the alignment film is disposed on the first substrate 10 side with respect to the common electrode 21. 26 is formed. In this embodiment, the common electrode 21 is formed on substantially the entire surface of the second substrate 20.

The alignment films 16 and 26 are made of a resin film such as polyimide or an oblique deposition film such as a silicon oxide film. In this embodiment, the alignment films 16 and 26 are made of SiOx (x <2), SiO ₂ , Ti.
This is an inorganic alignment film (vertical alignment film) made of an obliquely deposited film such as O ₂ , MgO, Al ₂ O ₃ , In ₂ O ₃ , Sb ₂ O ₃ , Ta ₂ O ₅ , and used for the electro-optical layer 80. The liquid crystal molecules having negative dielectric anisotropy are tilted to align the electro-optical device 100 with VA (Vertical Alignnm).
ent) mode liquid crystal device.

The first substrate 10 has an inter-substrate conduction electrode for providing electrical continuity between the first substrate 10 and the second substrate 20 in a region overlapping the corner portion of the second substrate 20 outside the sealing material 107. 1
09 is formed. The inter-substrate conducting electrode 109 includes an inter-substrate conducting material 1 containing conductive particles.
09a is disposed, and the common electrode 21 of the second substrate 20 is electrically connected to the first substrate 10 side via the inter-substrate conducting material 109a and the inter-substrate conducting electrode 109. For this reason, a common potential is applied to the common electrode 21 from the first substrate 10 side.

In the electro-optical device 100 of this embodiment, the pixel electrode 9a and the common electrode 21 are formed of a light-transmitting conductive film, and the electro-optical device 100 is configured as a transmissive liquid crystal device. In the electro-optical device 100, the light incident from one of the first substrate 10 and the second substrate 20 is modulated while being transmitted through the other substrate, and an image is displayed.
In this embodiment, as indicated by an arrow L, light incident from the second substrate 20 is modulated for each pixel by the electro-optic layer 80 while being transmitted through the first substrate 10 and emitted, thereby displaying an image.

(Configuration of the second substrate 20)
FIG. 5 is an explanatory diagram schematically showing a cross-sectional configuration of the lens 310 and the like in the electro-optical device 100 shown in FIG. 6 shows the lens and the light shielding layer 10 in the electro-optical device 100 shown in FIG.
It is explanatory drawing which shows an example of the planar positional relationship with 8b.

As shown in FIG. 4, in the electro-optical device 100 of this embodiment, the second substrate 20 is formed with a light-shielding light-shielding layer 108 made of a metal or a metal compound. The light shielding layer 108 is formed, for example, as a frame-shaped parting 108a that extends along the outer peripheral edge of the display region 10a. The light shielding layer 108 is formed as a light shielding layer 108b in a region overlapping with a region sandwiched between adjacent pixel electrodes 9a in plan view. Further, the light shielding layer 108 is provided in the display area 10.
An alignment mart 108c is formed outside a.

As shown in FIG. 5, the first substrate 10 has a translucent substrate 19, and a plurality of interlayer insulating films 18 are laminated on the surface of the translucent substrate 19 on the second substrate 20 side. Yes. Further, the first substrate 10 extends along a region that overlaps between adjacent pixel electrodes 9a by using the space between the translucent substrate 19 and the interlayer insulating film 18 or between the interlayer insulating films 18. The wiring 17 and the pixel transistor 14 are formed, and the wiring 17 and the pixel transistor 14 do not transmit light. Therefore, in the first substrate 10, among the regions overlapping the pixel electrode 9 a in plan view, the region overlapping the wiring 17 and the pixel transistor 14 in plan view, or the region sandwiched between adjacent pixel electrodes 9 a and overlapping in the plan view. Is a light shielding region 15b that does not transmit light, and of the region that overlaps the pixel electrode 9a in plan view, the region that does not overlap the wiring 17 and the pixel transistor 14 in plan view becomes an opening region 15a that transmits light. Yes. Therefore, only the light transmitted through the opening region 15a contributes to the image display, and the light traveling toward the light shielding region 15b does not contribute to the image display. In the present embodiment, the first substrate side alignment mark 14 c is formed by the light shielding layer constituting the wiring 17 and the pixel transistor 14.

The second substrate 20 includes an optical element such as a condensing element that collects incident light, a black matrix that blocks part of the incident light, and a color filter that transmits light having a part of the incident light. A plurality of elements 25 are formed. The plurality of optical elements 25 includes a plurality of pixel electrodes 9.
They are arranged so as to face each other. In the present embodiment, the second substrate 20 is
The lens array substrate 30 is configured, and the second substrate 20 (lens array substrate 30) includes a lens 310 as a condensing element 30a in the display region 10a (pixel electrode array region 10e).
A lens array 31 having a plurality of (microlenses) is formed. Multiple lenses 31
0 faces each of the plurality of pixel electrodes 9a. Accordingly, the plurality of lenses 310
The array area of the (optical element 25) overlaps with the pixel electrode array area 10e. Multiple lenses 310
Each constitutes an optical element 25 for converging light from the light source to the opening region 15a of the first substrate 10, and collimates the light incident on the electro-optic layer 80. Therefore, since the inclination of the optical axis of the light incident on the electro-optical layer 80 is small, the phase shift in the electro-optical layer 80 can be reduced, and the decrease in transmittance and contrast can be suppressed. In particular, in this embodiment, since the electro-optical device 100 is configured as a VA (Vertical Alignment) mode liquid crystal device,
The inclination of the optical axis of the light incident on the electro-optic layer 80 is likely to cause a decrease in contrast. However, according to this embodiment, a decrease in contrast is difficult to occur.

Here, as shown in FIG. 6, the lens 310 is arranged so that adjacent lenses 310 are in contact with each other, and in a region overlapping the region surrounded by the four lenses 310 in a plan view, FIG.
The light shielding layer 108b shown in FIG. Therefore, in the cross section taken along the line AA ′ in FIG. 6, the light shielding layer 108b appears as shown in FIG. 4, but in the cross section taken along the line BB ′ in FIG. 6, the light shielding layer as shown in FIG. 108b does not appear. The light shielding layer 108b may overlap the end of the lens 310 in plan view, but is formed so as not to overlap the center of the lens 310 in plan view.

As shown in FIG. 5, when configuring the lens array substrate 30 (second substrate 20), a plurality of concave portions 292 each having a concave curved surface are formed on one substrate surface 291 of the translucent substrate 29. The plurality of recesses 292 overlap with the plurality of pixel electrodes 9a in a one-to-one relationship in plan view. Further, on one substrate surface 291 of the translucent substrate 29, the translucent lens layer 51 (first
A lens layer), a translucent layer 52 (first translucent layer), and a translucent protective layer 55 are sequentially laminated. The lens layer 51 includes a surface 511 that covers the substrate surface 291 of the translucent substrate 29, and a flat surface 512 that is located on the opposite side of the surface 511. Further, the surface 511 of the lens layer 51 has a hemispherical convex portion 513 that fills the concave portion 292 of the translucent substrate 29. The light-transmitting substrate 29 and the lens layer 51 have different refractive indexes, and the concave portion 292 and the convex portion 513 are provided in the lens array 31.
The lens 310 is configured. In this embodiment, the refractive index of the lens layer 51 is larger than the refractive index of the translucent substrate 29. For example, the translucent substrate 29 is a quartz substrate (silicon oxide film, Si
O ₂₎ consists, with respect to the refractive index of 1.48, the lens layer 51 is made of a silicon oxynitride film (SiON), a refractive index of 1.58 to 1.68. Therefore, the lens 310 has the power to converge the light from the light source.

The translucent layer 52 includes a surface 521 that covers the flat surface 512 of the lens layer 51, and a surface 522 that is located on the opposite side of the surface 521. In this embodiment, the translucent layer 52 is formed of a silicon oxide film (S
iO _x ) with a refractive index of 1.48. The translucent layer 52 is an optical path length adjustment layer that adjusts the optical path length from the lens array 31 to the first substrate 10. Flat surface 522 of translucent layer 52
A protective layer 55 such as a silicon oxide film (SiO _x ) or a silicon oxynitride film (SiON) is formed, and the common electrode 21 is provided on the opposite side of the transparent substrate 29 with respect to the protective layer 55. Is formed. An alignment film 26 is formed on the opposite side of the common electrode 21 from the protective layer 55 and the translucent substrate 29.

(Detailed configuration of the metal film 108)
In the second substrate 20, the light shielding layer 108 (parting 108 a, light shielding layer 108 b, alignment mark 108 c) is constituted by, for example, a metal layer 56 formed between the layers of the light transmitting film. Specifically, the second substrate 20 has a flat surface 512 of the lens layer 51 and a surface 521 of the light transmitting layer 52 as a frame-shaped parting 108 a extending along the outer peripheral edge of the display region 10 a.
Between the two, a parting 56a made of the metal layer 56 is formed. In the display region 10a, a light shielding layer 56b made of the metal layer 56 is formed as the light shielding layer 108b. further,
On the outside of the display area 10a, a second metal layer 56 is formed as an alignment mark 56c.
A substrate-side alignment mark 56c is formed.

In this embodiment, each of the light shielding layers 108 (metal layer 56) is Ti (titanium), Al (aluminum), Cr (chromium), W (tungsten), Ta (tantalum), Mo (molybdenum), Pd (palladium), or the like. And a metal compound film such as a nitride film thereof. Further, the light shielding layer 108 may be either a single layer film or a multilayer film of the above metal film or metal compound film.

(Layout of optical element 25 etc.)
FIG. 7 is a plan view schematically showing the layout and the like of the lens 310 in the electro-optical device 100 according to Embodiment 1 of the present invention. FIG. 8 is a cross-sectional view schematically showing the positional relationship between the lens 310 and the pixel electrode 9a in the electro-optical device 100 according to Embodiment 1 of the present invention. In FIG. 7, the number of the plurality of pixel electrodes 9a is reduced to show a total of 25 pixel electrodes 9a. In the following description, the center of the lens 310 means the center of the top of the convex portion and the center of the bottom of the concave portion that constitute the lens surface. In FIG. 7, the first substrate 10 and the pixel electrode 9a are indicated by solid lines, and the second substrate 20 and the optical element 25 (lens 310) are indicated by dotted lines.

As shown in FIG. 7, in the electro-optical device 100 of the present embodiment, the plurality of pixel electrodes 9 a are arranged in the first direction of two pixel electrodes 9 a adjacent in the first direction X in the first direction X of the first substrate 10. They are arranged so that the distance between the centers in X is the first pitch Pax. The plurality of pixel electrodes 9a have the same width in the first direction X.

In the first direction X of the second substrate 20, the plurality of lenses 310 (optical element 25) has a distance between the centers in the first direction X of the two lenses 310 (optical elements 25) adjacent in the first direction X. Are also arranged to be the second pitch Pbx. The plurality of lenses 310 have the same width in the first direction X, and the width of the pixel electrode 9a in the first direction X is the lens 31.
It is equivalent to the width in the first direction X of 0 (optical element 25).

Here, the second pitch Pbx is longer than the first pitch Pax. Further, the center C in the first direction X
In x, the center of the pixel electrode 9a in the first direction X and the center of the lens 310 in the first direction X overlap. For this reason, as shown in FIGS. 7 and 8, among the plurality of lenses 310, the center of the lens 310 located on the first end portion Ex side that is the end portion in the first direction X of the pixel electrode array region 10e (see FIG. 7 (see the dotted line Lbx) is an outer side in the first direction X from the center (see the solid line Lax in FIG. 8) of the pixel electrode 9a located on the first end Ex side among the plurality of pixel electrodes 9a (see FIG. 8).
The direction is shifted in the direction indicated by the arrow Sx in FIG. Further, the lens 31 located on the first end Ex side.
0 is the amount of deviation from the center of the pixel electrode 9a in the first direction X to the outside in the first direction X from the lens 310 located between the center Cx in the first direction X and the first end Ex. It is getting bigger.

In addition, as shown in FIG. 7, the plurality of pixel electrodes 9 a have a distance between the centers in the second direction Y of the two pixel electrodes 9 a adjacent in the second direction Y in the second direction Y of the first substrate 10. All are arranged so as to be the third pitch Pay. The plurality of pixel electrodes 9a have the same width in the second direction Y.

In the second direction Y of the second substrate 20, the plurality of lenses 310 (optical element 25) has any distance between the centers in the second direction Y of the two lenses 310 (optical elements 25) adjacent in the second direction Y. Are also arranged to be the fourth pitch Pby. The plurality of lenses 310 is the second
The width in the direction Y is equal, and the width in the second direction Y of the pixel electrode 9a is equal to the width in the second direction Y of the lens 310 (optical element 25).

Here, the fourth pitch Pby is longer than the third pitch Pay. Also, the center C in the second direction Y
In y, the center of the pixel electrode 9a in the second direction Y and the center of the lens 310 in the second direction Y overlap. For this reason, as shown in FIGS. 7 and 8, among the plurality of lenses 310, the center of the lens 310 located on the second end Ey side which is the end in the second direction Y of the pixel electrode array region 10e (see FIG. 8 (see the dotted line Lby) is an outer side in the second direction Y from the center of the pixel electrode 9a located on the second end Ey side (see the solid line Lay in FIG. 7) among the plurality of pixel electrodes 9a (see FIG. 7).
The direction is shifted in the direction indicated by the arrow Sy in FIG. Further, the lens 31 located on the second end Ey side.
0 is the amount of shift from the center of the pixel electrode 9a in the second direction Y to the outside in the second direction Y from the lens 310 located between the center Cy in the second direction Y and the second end Ey. It is getting bigger.

(Method of manufacturing electro-optical device 100)
In the manufacturing process of the electro-optical device 100 of this embodiment, first, in the first substrate preparation process, the first
First substrate 1 provided with a plurality of pixel electrodes 9a arranged along direction X and second direction Y
Prepare 0. Here, as shown in FIG. 7, the plurality of pixel electrodes 9a are arranged such that the distance between the centers in the first direction X is the first pitch Pax, and the distance between the centers in the second direction Y is any. Are arranged so as to be the third pitch Pay.

In the second substrate preparation step, the second substrate 20 is prepared in which a plurality of optical elements 25 including the formation region of the lens 310 (the light collecting element 30a) are arranged along the first direction X and the second direction Y. . Here, the plurality of lenses 310 are arranged such that the distance between the centers in the first direction X is the second pitch Pbx, and the distance between the centers in the second direction Y is the fourth pitch Pby. Arranged in Further, the second pitch Pbx is set longer than the first pitch Pax, and the fourth pitch Pby is set longer than the third pitch Pay.

Next, in the bonding step, the first substrate 10 and the second substrate 20 are bonded so that the plurality of pixel electrodes 9a and the plurality of lenses 310 face each other. At this time, the center of the lens 310 located on the first end Ex side of the pixel electrode array region 10e is closer to the first direction X than the center of the pixel electrode 9a located on the first end Ex side of the pixel electrode array region 10e. The first substrate 10 and the second substrate 20 are bonded together so as to be located outside. Further, the center of the lens 310 located on the second end Ey side of the pixel electrode array region 10e is the second end portion Ey of the pixel electrode array region 10e.
The first substrate 10 and the second substrate 20 are bonded together so as to be positioned on the outer side in the second direction Y from the center of the pixel electrode 9a positioned on the side.

Here, in the first substrate preparation step, the first substrate 10 having the first substrate side alignment mark 14c formed outside the pixel electrode arrangement region 10e is prepared, and in the second substrate preparation step, a plurality of lenses 310 are arranged. A second substrate 20 having a second substrate-side alignment mark 56c formed outside the formed region is prepared. In the bonding step, the first substrate 10 and the second substrate 20 are bonded together by aligning the first substrate side alignment mark 14c and the second substrate side alignment mark 56c.

(Main effects of this form)
As described above, in the electro-optical device 100 of this embodiment, the plurality of lenses 310 (optical elements 25) of the second substrate 20 are opposed to the plurality of pixel electrodes 9a of the first substrate 10, respectively.
The distance between the centers of the lenses 310 in the first direction X (second pitch Pbx) is the pixel electrode 9a.
Longer than the distance between the centers in the first direction X (first pitch Pax). For this reason, on the end portion (first end portion Ex) side in the first direction X of the pixel electrode array region 10e, the center of the lens 310 is positioned outside the center of the pixel electrode 9a in the first direction X. Therefore, the light incident obliquely from the outside in the first direction X passes through the lens 310 and enters the approximate center of the pixel electrode 9a. Therefore, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the first direction X, the light incident obliquely from the outside of the first direction X is transmitted through the lens 310. , Pixel electrode 9
Incident on a. Therefore, in the projection type surface device 110 shown in FIG. 1, even when the intensity of light incident obliquely from the outside in the first direction X is higher than the intensity of light incident obliquely from the inside to the electro-optical device 100, the projection is performed. It is possible to suppress the occurrence of a situation where the luminance is partially reduced in the obtained image.

The distance between the centers in the second direction Y of the lens 310 (fourth pitch Pby) is longer than the distance between the centers in the second direction Y of the pixel electrodes 9a (third pitch Pay). For this reason,
On the end portion (second end portion Ey) side in the second direction Y of the pixel electrode array region 10e, the center of the lens 310 is located outside the center of the pixel electrode 9a in the second direction Y. Accordingly, the light incident obliquely from the outside in the second direction Y passes through the lens 310 and enters the approximate center of the pixel electrode 9a. Therefore, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the second direction Y, the light incident obliquely from the outside in the second direction Y is transmitted through the lens 310. , Is incident on the pixel electrode 9a. Therefore, in the projection type surface device 110 shown in FIG. 1, even when the intensity of light obliquely incident from the outside in the second direction Y is higher than the intensity of light obliquely incident on the electro-optical device 100 from the inside, the projection is performed. It is possible to suppress the occurrence of a situation where the luminance is partially reduced in the obtained image.

[Variation 1 of Embodiment 1]
FIG. 9 shows the lens 3 in the electro-optical device 100 according to the first modification of the first embodiment of the present invention.
FIG. 10 is a plan view schematically showing a layout 10 and the like. Since the basic configuration of this embodiment is the same as that of Embodiment 1, common portions are denoted by the same reference numerals and description thereof is omitted.

As shown in FIG. 9, in the electro-optical device 100 of the present embodiment as well, as in the first embodiment, the plurality of pixel electrodes 9a are all arranged to have the first pitch Pax, and the plurality of lenses 310 (
The optical elements 25) are all arranged so as to have the second pitch Pbx. The plurality of pixel electrodes 9a are all arranged so as to have the third pitch Pay, and the plurality of lenses 31 are arranged.
All 0s (optical elements 25) are arranged to have the fourth pitch Pby. Also,
The plurality of pixel electrodes 9a have the same width in the first direction X and the same width in the second direction Y.

In the present embodiment, the second pitch Pbx is longer than the first pitch Pax. For this reason, the center of the lens 310 located on the first end Ex side is located outside the center of the pixel electrode 9a located on the first end Ex side in the first direction X. The fourth pitch Pby is equal to the third pitch Pa.
longer than y. Therefore, the center of the lens 310 located on the second end Ey side is the second end Ey.
It is located outside in the second direction Y from the center of the pixel electrode 9a located on the side. Therefore, FIG.
In the projection type surface device 110 shown in FIG. 4, even when the intensity of light incident obliquely from the outside of the first direction X or the outside of the second direction Y is higher than the intensity of light incident obliquely from the inside to the electro-optical device 100. In the projected image, the same effects as in the first embodiment can be achieved, such as the occurrence of a situation where the brightness is partially reduced.

Here, the width of the lens 310 (optical element 25) in the first direction X is larger than the width of the pixel electrode 9a in the first direction X. For this reason, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the first direction X, the center Cx side in the first direction X and the first end E
In x, the lens 310 overlaps the pixel electrode 9a in a wide range. Therefore, the light incident obliquely from the inside and the outside in the first direction X passes through the lens 310 and easily enters the pixel electrode 9a. The width of the lens 310 (optical element 25) in the second direction Y is determined by the pixel electrode 9a.
Greater than the width in the second direction Y. For this reason, even when the second substrate 20 is bonded to the first substrate 10 in a state of being shifted in the second direction Y, the lens 310 is a pixel at the center Cy side and the second end Ey in the second direction Y. It overlaps the electrode 9a over a wide range. Therefore, the second direction Y
The light incident obliquely from the inside and the outside of the light passes through the lens 310 and easily enters the pixel electrode 9a. Therefore, there are effects such as high brightness in the entire projected image.

[Modification 2 of Embodiment 1]
FIG. 10 is a plan view schematically showing the layout and the like of the lens 310 in the electro-optical device 100 according to the second modification of the second embodiment of the present invention. Since the basic configuration of this embodiment is the same as that of Embodiment 1, common portions are denoted by the same reference numerals and description thereof is omitted.

As shown in FIG. 10, in the electro-optical device 100 of the present embodiment as well, as in the first embodiment, the plurality of pixel electrodes 9a are all arranged to have the first pitch Pax, and the plurality of lenses 310
(Optical elements 25) are all arranged to have the second pitch Pbx. Further, the plurality of pixel electrodes 9a are all arranged to have the third pitch Pay, and the plurality of lenses 3
10 (optical elements 25) are all arranged to have the fourth pitch Pby. The plurality of pixel electrodes 9a have the same width in the first direction X and the same width in the second direction Y.

In the present embodiment, the second pitch Pbx is longer than the first pitch Pax. For this reason, the center of the lens 310 located on the first end Ex side is located outside the center of the pixel electrode 9a located on the first end Ex side in the first direction X. The fourth pitch Pby is equal to the third pitch Pa.
longer than y. Therefore, the center of the lens 310 located on the second end Ey side is the second end Ey.
It is located outside in the second direction Y from the center of the pixel electrode 9a located on the side. Therefore, FIG.
In the projection type surface device 110 shown in FIG. 4, even when the intensity of light incident obliquely from the outside of the first direction X or the outside of the second direction Y is higher than the intensity of light incident obliquely from the inside to the electro-optical device 100. In the projected image, the same effects as in the first embodiment can be achieved, such as the occurrence of a situation where the brightness is partially reduced.

Here, at the center Cx in the first direction X, the width of the lens 310 (the optical element 25) in the first direction X is substantially equal to the width of the pixel electrode 9a in the first direction X, but is positioned on the first end Ex side. The width of the lens 310 in the first direction X is the lens 31 located on the center Cx side in the first direction X.
It is larger than the width in the first direction X of 0. Further, between the center Cx in the first direction X and the first end Ex, the width in the first direction X of the lens 310 gradually increases from the center Cx in the first direction X toward the first end Ex. It is getting bigger. For example, the width of the lens 310 in the first direction X is gradually increased with one lens 310 as a unit or a plurality of lenses 310 as a unit.

For this reason, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the first direction X, the lens 310 is a pixel at the center Cx side and the first end Ex in the first direction X. It overlaps the electrode 9a over a wide range. Therefore, the light incident obliquely from the inside and the outside in the first direction X passes through the lens 310 and easily enters the pixel electrode 9a. Therefore, there are effects such as high brightness in the entire projected image.

In the center Cy in the second direction Y, the width of the lens 310 (optical element 25) in the second direction Y is substantially equal to the width of the pixel electrode 9a in the second direction Y, but is positioned on the second end Ey side. The width of the lens 310 in the second direction Y is the lens 310 located on the center Cy side in the second direction Y.
Greater than the width in the second direction Y. Further, between the center Cy in the second direction Y and the second end Ey, the width of the lens 310 in the second direction Y gradually increases from the center Cy in the second direction Y toward the second end Ey. It has become. For example, the width of the lens 310 in the second direction Y is 1
The size is gradually increased in units of one lens 310 or in units of a plurality of lenses 310.

Therefore, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the second direction Y, the lens 310 is not connected to the pixel at the center Cy side and the second end Ey in the second direction Y. It overlaps the electrode 9a over a wide range. Therefore, the light incident obliquely from the inside and the outside in the second direction Y is transmitted through the lens 310 and easily enters the pixel electrode 9a. Therefore, there are effects such as high brightness in the entire projected image.

[Embodiment 2]
FIG. 11 is an explanatory diagram schematically showing a cross-sectional configuration of the lens 310 and the like in the electro-optical device 100 according to Embodiment 2 of the present invention. FIG. 12 is a plan view schematically showing the layout and the like of the lens 310 in the electro-optical device 100 shown in FIG. Since the basic configuration of this embodiment is the same as that of Embodiment 1, common portions are denoted by the same reference numerals and description thereof is omitted. In FIG. 12, the first substrate 10 and the pixel electrode 9a are indicated by solid lines, and the second substrate 20, the optical element 25 (lens 310), and the lens 320 are indicated by broken lines such as dotted lines and alternate long and short dash lines.

In FIG. 11, also in the electro-optical device 100 of the present embodiment, the light collecting element 3 is the same as in the first embodiment.
The optical element 25 is configured by the formation region of the lens 310 (first lens) as 0a. In the present embodiment, the second substrate 20 has a lens array 32 including a plurality of lenses 320 (second lenses) facing the lens 310 with the first substrate 10 in each of the plurality of optical elements 25. Yes. More specifically, a translucent lens layer 53 (second lens layer) and a translucent layer 54 (second translucent layer) are sequentially laminated between the translucent layer 52 and the protective layer 55. ing. The lens layer 53 includes a surface 531 that covers the surface 522 of the translucent layer 52, and a surface 532 that is opposite to the surface 531.
In the surface 532, a convex portion protruding toward the opposite side of the translucent substrate 29 or a concave portion toward the translucent substrate 29 at a position overlapping the concave portion 292 in plan view. A recess is formed. In this embodiment, a convex portion 533 is formed on the surface 532 of the lens layer 53 at a position overlapping the concave portion 292 in a plan view and protrudes in a hemispherical shape toward the opposite side of the translucent substrate 29.
Therefore, the translucent layer 54 has a concave surface 543 formed of a concave curved surface in which the convex portion 533 of the lens layer 53 is located on the surface 541 covering the surface 532 of the lens layer 53. The translucent layer 54 is
A flat surface 542 is provided on the side opposite to the surface 541.

Here, the refractive index is different between the lens layer 53 and the translucent layer 54, and the concave portion 543 and the convex portion 533 constitute a lens 320. In this embodiment, the refractive index of the lens layer 53 is larger than the refractive index of the light transmitting layer 54. For example, the lens layer 53 includes a silicon oxynitride film (SiON
) And the refractive index is 1.58 to 1.68, whereas the translucent layer 54 is made of a silicon oxide film (SiO _x ) and has a refractive index of 1.48. Therefore, the lens 320 has a power for converging light from the light source. In this embodiment, the light transmissive layer 54 is an optical path length adjustment layer that adjusts the optical path length from the lens array 32 to the first substrate 10.

On the flat surface 542 of the translucent layer 54, a silicon oxide film (SiO _x ) or a silicon oxynitride film (S
iON) is formed, and the common electrode 21 is formed on the side opposite to the light transmitting layer 54 and the light transmitting substrate 29 with respect to the protective layer 55. An alignment film 26 is formed on the opposite side of the common electrode 21 from the protective layer 55 and the translucent substrate 29.

As shown in FIG. 12, in the electro-optical device 100 of the present embodiment, as in the first embodiment,
The plurality of pixel electrodes 9a are all arranged to have the first pitch Pax, and the plurality of lenses 310 (optical elements 25) are all arranged to have the second pitch Pbx. The plurality of pixel electrodes 9a are all arranged to have the third pitch Pay, and the plurality of lenses 310 (optical elements 25) are all arranged to have the fourth pitch Pby. The plurality of pixel electrodes 9a have the same width in the first direction X and the same width in the second direction Y. The plurality of lenses 310 (optical element 25) have the same width in the first direction X and the same width in the second direction Y.

In the present embodiment, the second pitch Pbx is longer than the first pitch Pax. For this reason, the center of the lens 310 located on the first end Ex side is located outside the center of the pixel electrode 9a located on the first end Ex side in the first direction X. The fourth pitch Pby is equal to the third pitch Pa.
longer than y. Therefore, the center of the lens 310 located on the second end Ey side is the second end Ey.
It is located outside in the second direction Y from the center of the pixel electrode 9a located on the side.

In addition, the plurality of lenses 320 includes a first direction X of two lenses 320 adjacent in the first direction X.
The distances between the centers in the second direction Y of the two lenses 320 adjacent to each other in the second direction Y are all the sixth pitch Pc.
They are arranged to be cy. The plurality of lenses 320 have the same width in the first direction X and the same width in the second direction Y.

Here, the fifth pitch Pcx is longer than the first pitch Pax and shorter than the second pitch Pbx. For this reason, the center of the lens 320 located on the first end Ex side is located on the outer side in the first direction X from the center of the pixel electrode 9a located on the first end Ex side, and on the first end Ex side. It is located inside the first direction X from the center of the lens 310 that is positioned. The sixth pitch Pcy is longer than the third pitch Pay and shorter than the fourth pitch Pby. Therefore, the center of the lens 320 located on the second end Ey side is second from the center of the pixel electrode 9a located on the second end Ey side.
It is located outside in the direction Y and is located inside in the second direction Y from the center of the lens 310 located on the first end Ex side.

Even in such a configuration, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the first direction X, the light incident obliquely from the outside of the first direction X is a lens. 31
0 and 320 are transmitted and enter the pixel electrode 9a. Therefore, the projection type surface device 11 shown in FIG.
In 0, even when the intensity of light obliquely incident from the outside in the first direction X is higher than the intensity of light incident obliquely from the inside to the electro-optical device 100, the luminance is partially reduced in the projected image. Occurrence of the situation of doing can be suppressed.

Even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the second direction Y, the light incident obliquely from the outside in the second direction Y passes through the lenses 310 and 320. And enters the pixel electrode 9a. Therefore, in the projection type surface device 110 shown in FIG. 1, even when the intensity of light obliquely incident from the outside in the second direction Y is higher than the intensity of light obliquely incident on the electro-optical device 100 from the inside, the projection is performed. It is possible to suppress the occurrence of a situation where the luminance is partially reduced in the obtained image.

[Modification 1 of Embodiment 2]
FIG. 13 is a plan view schematically showing the layout and the like of the lens 310 in the electro-optical device 100 according to the first modification of the second embodiment of the present invention. Since the basic configuration of this embodiment is the same as that of Embodiment 1, common portions are denoted by the same reference numerals and description thereof is omitted.

As shown in FIG. 13, in the electro-optical device 100 of the present embodiment as well, in the same way as in the first and second embodiments, the plurality of pixel electrodes 9a are all arranged to have the first pitch Pax, and the plurality of lenses 3
10 (optical elements 25) are all arranged to have the second pitch Pbx. The plurality of pixel electrodes 9a are all arranged to have the third pitch Pay, and the plurality of lenses 310 (optical elements 25) are all arranged to have the fourth pitch Pby.
The plurality of pixel electrodes 9a have the same width in the first direction X and the same width in the second direction Y. Similarly to the second embodiment, the plurality of lenses 320 are all arranged so as to have the fifth pitch Pcx in the first direction X and arranged so as to have the sixth pitch Pcy in the second direction Y. .

In the present embodiment, the second pitch Pbx is longer than the first pitch Pax. For this reason, the center of the lens 310 located on the first end Ex side is located outside the center of the pixel electrode 9a located on the first end Ex side in the first direction X. The fourth pitch Pby is equal to the third pitch Pa.
longer than y. Therefore, the center of the lens 310 located on the second end Ey side is the second end Ey.
It is located outside in the second direction Y from the center of the pixel electrode 9a located on the side. The fifth pitch Pcx is longer than the first pitch Pax and shorter than the second pitch Pbx. For this reason, the first
The center of the lens 320 positioned on the end portion Ex side is positioned outside the center of the pixel electrode 9a positioned on the first end portion Ex side in the first direction X, and the lens 310 positioned on the first end portion Ex side. It is located inside the first direction X from the center. The sixth pitch Pcy is equal to the third pitch Pa.
It is longer than y and shorter than the fourth pitch Pby. For this reason, the lens 3 located on the second end Ey side.
The center of 20 is located on the outer side in the second direction Y from the center of the pixel electrode 9a located on the second end Ey side, and is located on the inner side in the second direction Y from the center of the lens 310 located on the first end Ex side. Located in.

Here, the width of the lens 310 (optical element 25) in the first direction X is the first of the pixel electrode 9a.
Greater than width in direction X The width of the lens 320 in the first direction X is the pixel electrode 9.
a is larger than the width in the first direction X, and smaller than the width of the lens 310 in the first direction X. Therefore, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the first direction X, the lens 310 and the lens are located at the center Cx side and the first end Ex in the first direction X. 320 overlaps the pixel electrode 9a over a wide range. Therefore, the light incident obliquely from the inside and the outside in the first direction X passes through the lens 310 and easily enters the pixel electrode 9a.

The width of the lens 310 (optical element 25) in the second direction Y is larger than the width of the pixel electrode 9a in the second direction Y. The width of the lens 320 in the second direction Y is the pixel electrode 9a.
Is larger than the width in the second direction Y, and smaller than the width of the lens 310 in the second direction Y.
For this reason, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the second direction Y, the lens 310 and the lens are arranged at the center Cy side and the second end Ey in the second direction Y. 320 overlaps the pixel electrode 9a over a wide range. Therefore, the light incident obliquely from the inside and the outside in the second direction Y is transmitted through the lens 310 and easily enters the pixel electrode 9a.

[Modification 2 of Embodiment 2]
FIG. 14 is a plan view schematically showing the layout and the like of the lens 310 in the electro-optical device 100 according to the second modification of the second embodiment of the present invention. Since the basic configuration of this embodiment is the same as that of Embodiment 1, common portions are denoted by the same reference numerals and description thereof is omitted.

As shown in FIG. 14, also in the electro-optical device 100 of the present embodiment, as in the first and second embodiments, the plurality of pixel electrodes 9 a are all arranged to have the first pitch Pax, and the plurality of lenses 3.
10 (optical elements 25) are all arranged to have the second pitch Pbx. The plurality of pixel electrodes 9a are all arranged to have the third pitch Pay, and the plurality of lenses 310 (optical elements 25) are all arranged to have the fourth pitch Pby.
The plurality of pixel electrodes 9a have the same width in the first direction X and the same width in the second direction Y. Similarly to the second embodiment, the plurality of lenses 320 are all arranged so as to have the fifth pitch Pcx in the first direction X and arranged so as to have the sixth pitch Pcy in the second direction Y. .

In the present embodiment, the second pitch Pbx is longer than the first pitch Pax. For this reason, the center of the lens 310 located on the first end Ex side is located outside the center of the pixel electrode 9a located on the first end Ex side in the first direction X. The fourth pitch Pby is equal to the third pitch Pa.
longer than y. Therefore, the center of the lens 310 located on the second end Ey side is the second end Ey.
It is located outside in the second direction Y from the center of the pixel electrode 9a located on the side. The fifth pitch Pcx is longer than the first pitch Pax and shorter than the second pitch Pbx. For this reason, the first
The center of the lens 320 positioned on the end portion Ex side is positioned outside the center of the pixel electrode 9a positioned on the first end portion Ex side in the first direction X, and the lens 310 positioned on the first end portion Ex side. It is located inside the first direction X from the center. The sixth pitch Pcy is equal to the third pitch Pa.
It is longer than y and shorter than the fourth pitch Pby. For this reason, the lens 3 located on the second end Ey side.
The center of 20 is located on the outer side in the second direction Y from the center of the pixel electrode 9a located on the second end Ey side, and is located on the inner side in the second direction Y from the center of the lens 310 located on the first end Ex side. Located in.

Here, at the center Cx in the first direction X, the width of the lens 310 (the optical element 25) in the first direction X is substantially equal to the width of the pixel electrode 9a in the first direction X, but is positioned on the first end Ex side. The width of the lens 310 in the first direction X is the lens 31 located on the center Cx side in the first direction X.
It is larger than the width in the first direction X of 0. Further, between the center Cx in the first direction X and the first end Ex, the width in the first direction X of the lens 310 gradually increases from the center Cx in the first direction X toward the first end Ex. It is getting bigger. At the center Cx in the first direction X, the lens 32
Although the width in the first direction X of 0 is substantially equal to the width in the first direction X of the pixel electrode 9a, the width in the first direction X of the lens 320 located on the first end Ex side is the center of the first direction X. It is larger than the width in the first direction X of the lens 320 located on the Cx side. Also, the center Cx in the first direction X
And the first end portion Ex, the width of the lens 320 in the first direction X gradually increases from the center Cx in the first direction X toward the first end portion Ex. However, the center C in the first direction X
On the first end Ex side of x, the width of the lens 320 in the first direction X is smaller than the width of the lens 310 in the first direction X.

For this reason, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the first direction X, the lens 310 and the first end X are located at the center Cx side and the first end Ex in the first direction X. The two lenses 320 overlap the pixel electrode 9a in a wide range. Therefore, the light incident obliquely from the inside and the outside in the first direction X passes through the lens 310 and easily enters the pixel electrode 9a. Therefore, there are effects such as high brightness in the entire projected image.

In the center Cy in the second direction Y, the width of the lens 310 (optical element 25) in the second direction Y is substantially equal to the width of the pixel electrode 9a in the second direction Y, but is positioned on the second end Ey side. The width of the lens 310 in the second direction Y is the lens 310 located on the center Cy side in the second direction Y.
Greater than the width in the second direction Y. Further, between the center Cy in the second direction Y and the second end Ey, the width of the lens 310 in the second direction Y gradually increases from the center Cy in the second direction Y toward the second end Ey. It has become. Further, at the center Cy in the second direction Y, the width of the lens 320 in the second direction Y is substantially equal to the width of the pixel electrode 9a in the second direction Y, but the second end Ey.
The width in the second direction Y of the lens 320 located on the side is larger than the width in the second direction Y of the lens 320 located on the center Cy side in the second direction Y. Also, the center Cy in the second direction Y and the second
Between the end Ey, the lens 32 extends from the center Cy in the second direction Y toward the second end Ey.
The width of 0 in the second direction Y gradually increases. However, on the side of the second end Ey from the center Cy in the second direction Y, the width of the lens 320 in the second direction Y is smaller than the width of the lens 310 in the second direction Y.

For this reason, even when the second substrate 20 is bonded to the first substrate 10 in a state shifted in the second direction Y, the lens 310 and the lens are arranged at the center Cy side and the second end Ey in the second direction Y. 320 overlaps the pixel electrode 9a over a wide range. Therefore, the light incident obliquely from the inside and the outside in the second direction Y is transmitted through the lens 310 and easily enters the pixel electrode 9a. Therefore, there are effects such as high brightness in the entire projected image.

[Embodiment 3]
FIG. 15 is a cross-sectional view of the electro-optical device 100 according to Embodiment 2 of the present invention. In the first and second embodiments, the optical element 25 of the second substrate 20 is defined by the formation region of the lens 310 as the light condensing element 30a. On the other hand, in this embodiment, as shown in FIG. 15, the lens 310 is not formed on the second substrate 20, and the pixel electrode 9 is not formed on the second substrate 20.
The optical element 25 facing a is composed of a light shielding layer 108e formed as a black matrix. The black matrix (light shielding layer 108e) shields a part of the incident light and transmits the incident light to a region surrounded by the black matrix (light shielding layer 108e).

Also in such a configuration, the optical element 25 (a region surrounded by the light shielding layer 108e) is provided in the first embodiment.
If the layout is performed as described in 2, it is possible to suppress the occurrence of luminance unevenness due to the positional deviation between the first substrate 10 and the second substrate 20.

[Embodiment 4]
FIG. 16 is a cross-sectional view of the electro-optical device 100 according to Embodiment 4 of the present invention. In the first and second embodiments, the optical element 25 of the second substrate 20 is defined by the formation region of the lens 310 as the light condensing element 30a. On the other hand, in this embodiment, as shown in FIG. 16, the lens 310 is not formed on the second substrate 20, and the pixel electrode 9 is not formed on the second substrate 20.
The optical element 25 facing a includes a region in which color filters 24 (R), 24 (G), and 24 (B) corresponding to red (R), green (G), and blue (B) are formed. . The color filters 24 (R), 24 (G), and 24 (B) transmit light of a part of the incident light. In the embodiment shown in FIG. 16, in the second substrate 20, the optical element 25 facing the pixel electrode 9a is formed with a light shielding layer 108e formed as a black matrix.

Even in such a configuration, the optical element 25 (color filters 24 (R), 24 (G), 24
If the (B) formation region) is laid out as described in the first and second embodiments, the first substrate 1
Occurrence of luminance unevenness due to the positional deviation between 0 and the second substrate 20 can be suppressed.

[Embodiment 5]
In the first and second embodiments, the second region is formed by the formation region of the lens 310 as the light condensing element 30a.
Although the optical element 25 of the substrate 20 is defined, when a prism is formed on the second substrate 20 as the light condensing element 30a, the region where the prism is formed is described as the optical element 25 in the first and second embodiments. You may lay out as you did.

[Application example to other electro-optical devices]
In the above embodiment, the liquid crystal device has been described as an example of the electro-optical device. However, the present invention is not limited to this, and the present invention may be applied to an electro-optical device using an electrophoretic display panel. .

[Other projection display devices]
In the projection type display device, the transmission type electro-optical device 100 is used. However, the reflection type electro-optical device 100 may be used to form the projection type display device. In the projection display device, an LED light source that emits light of each color may be used as the light source unit, and the color light emitted from the LED light source may be supplied to another liquid crystal device. .

[Other electronic devices]
The electro-optical device 100 to which the present invention is applied includes, in addition to the above-described electronic apparatus, a mobile phone, a personal digital assistant (PDA: Personal Digital Assistants).
), Digital camera, LCD TV, car navigation device, video phone, POS terminal,
You may use as a direct view type | mold display apparatus in electronic devices, such as an apparatus provided with the touch panel.

9a pixel electrode, 10 first substrate, 10a display area, 10e pixel electrode arrangement area, 14
Pixel transistor, 14c First substrate side alignment mark, 15a Open region, 1
5b Light-shielding area, 20 Second substrate, 21 Common electrode, 25 Optical element, 29 Translucent substrate, 30 Lens array substrate, 30a Condensing element, 31 Lens array (first lens array), 32 Lens array (second lens) Array), 56c second substrate side alignment mark, 80 electro-optic layer, 100 electro-optic device, 110 projection display device, 111 screen, 118 projection optical system, 161 light source unit, 310 lens (first lens), 320
Lens (second lens), Cx first direction center, Cy second direction center, Ex first end, Ey second end, Pax first pitch, Pay third pitch, Pbx second pitch, P
by 4th pitch, Pcx 5th pitch, Pcy 6th pitch, X 1st direction, Y 2nd
direction

Claims (12)

A first substrate on which a plurality of pixel electrodes are arranged along a first direction;
A second substrate on which a plurality of optical elements are arranged to correspond to each of the plurality of pixel electrodes;
Have
The plurality of pixel electrodes are arranged so that the distance between the centers of the two pixel electrodes adjacent in the first direction in the first direction is a first pitch,
The plurality of optical elements are arranged so that the distance between the centers of the two optical elements adjacent in the first direction in the first direction is a second pitch,
The second pitch is longer than the first pitch,
Among the plurality of optical elements, the center of the optical element located at the end in the first direction is located outside the center of the corresponding pixel electrode among the plurality of pixel electrodes. Optical device. The electro-optical device according to claim 1.
The plurality of pixel electrodes are arranged along a second direction intersecting the first direction,
The plurality of pixel electrodes are arranged such that the distance between the centers in the second direction of two pixel electrodes adjacent in the second direction is a third pitch,
The plurality of optical elements are arranged so that the distance between the centers in the second direction of the two optical elements adjacent in the second direction is a fourth pitch,
The fourth pitch is longer than the third pitch,
Among the plurality of optical elements, the center of the optical element located at the end in the second direction is located outside the center of the corresponding pixel electrode among the plurality of pixel electrodes. Optical device. The electro-optical device according to claim 1,
Each of the plurality of optical elements is a lens that collects incident light, respectively. The electro-optical device according to claim 1,
Each of the plurality of optical elements is a first lens that condenses incident light.
The first substrate includes a plurality of second electrodes arranged to correspond to each of the plurality of pixel electrodes.
With a lens,
The plurality of second lenses are arranged such that the distance between the centers of the two second lenses adjacent in the first direction in the first direction is a fifth pitch.
The electro-optical device, wherein the fifth pitch is longer than the first pitch and shorter than the second pitch. The electro-optical device according to claim 1,
Each of the plurality of optical elements is a black matrix that blocks a part of incident light. The electro-optical device according to claim 1,
Each of the plurality of optical elements is a color filter that transmits light having a part of wavelengths among incident light. The electro-optical device according to any one of claims 1 to 6,
Each of the plurality of optical elements has a width along the first direction larger than a width along the first direction of each of the plurality of pixel electrodes. The electro-optical device according to any one of claims 1 to 6,
Of the plurality of optical elements, the width along the first direction of the optical element located at the end in the first direction is the first width of the optical element located closer to the center than the end in the first direction. An electro-optical device having a width greater than one direction. An electronic apparatus comprising the electro-optical device according to claim 1. The electronic device according to claim 9,
A light source unit that emits light supplied to the electro-optical device;
A projection optical system that projects light modulated by the electro-optical device;
An electronic device comprising: A first substrate preparation step of preparing a first substrate on which a plurality of pixel electrodes are arranged along a first direction;
A second substrate preparation step of preparing a second substrate on which a plurality of optical elements are arranged along the first direction;
A bonding step of bonding the first substrate and the second substrate so that the plurality of pixel electrodes and the plurality of optical elements respectively correspond;
Have
The plurality of pixel electrodes are arranged so that the distance between the centers of the two pixel electrodes adjacent in the first direction in the first direction is a first pitch,
The plurality of optical elements are arranged such that the distance between the centers of the two optical elements adjacent in the first direction in the first direction is a second pitch.
The second pitch is set longer than the first pitch,
In the bonding step, among the plurality of optical elements, the center of the optical element located at the end in the first direction is located outside the center of the corresponding pixel electrode among the plurality of pixel electrodes. In this way, the electro-optical device manufacturing method is characterized in that the first substrate and the second substrate are bonded together. The method of manufacturing an electro-optical device according to claim 11.
In the first substrate preparation step, the first substrate on which a first substrate side alignment mark is formed outside a region where the plurality of pixel electrodes are arranged is prepared,
In the second substrate preparation step, the second substrate on which a second substrate side alignment mark is formed outside a region where the plurality of optical elements are arranged is prepared,
In the bonding step, the first substrate side alignment mark and the second substrate side alignment mark are aligned to bond the first substrate and the second substrate together. Method.

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