JP2016194504A5 - Evaluation method of filter for processing high-boiling organic substances, filter evaluation system, and VOC processing apparatus - Google Patents
Evaluation method of filter for processing high-boiling organic substances, filter evaluation system, and VOC processing apparatus Download PDFInfo
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- JP2016194504A5 JP2016194504A5 JP2016005499A JP2016005499A JP2016194504A5 JP 2016194504 A5 JP2016194504 A5 JP 2016194504A5 JP 2016005499 A JP2016005499 A JP 2016005499A JP 2016005499 A JP2016005499 A JP 2016005499A JP 2016194504 A5 JP2016194504 A5 JP 2016194504A5
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- 238000011156 evaluation Methods 0.000 title claims 37
- 238000009835 boiling Methods 0.000 title claims 22
- 239000000126 substance Substances 0.000 title claims 21
- 238000011144 upstream manufacturing Methods 0.000 claims 28
- 238000000034 method Methods 0.000 claims 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 8
- 241001365789 Oenanthe crocata Species 0.000 claims 1
- 238000011143 downstream manufacturing Methods 0.000 claims 1
- 239000005416 organic matter Substances 0.000 claims 1
Claims (14)
高沸点有機物の濃度を評価する評価用プレートを前記フィルタの上流側の被処理空気と前記フィルタの下流側の被処理空気の夫々に暴露する暴露工程と、
前記上流側の被処理空気に暴露した上流側暴露プレート、前記下流側の被処理空気に暴露した下流側暴露プレート、暴露前の未暴露プレートの夫々に水滴を滴下し、水滴の接触角を測定し、各評価用プレートの接触角の比較結果に基づいて前記フィルタを評価する評価工程と、を含む、
高沸点有機物を処理するフィルタの評価方法。 A method for evaluating a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated, and that evaluates a filter that treats high-boiling organic substances contained in the air to be treated,
An exposure step of exposing an evaluation plate for evaluating the concentration of high-boiling organic substances to the air to be treated upstream of the filter and the air to be treated downstream of the filter;
Drop water droplets on the upstream exposed plate exposed to the upstream treated air, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure, and measure the contact angle of the water droplets And an evaluation step for evaluating the filter based on the comparison result of the contact angle of each evaluation plate,
Evaluation method for filters that process high-boiling organic substances.
前記評価工程では、前記上流側の被処理空気に暴露し、かつ温度調整された上流側暴露プレート、前記下流側の被処理空気に暴露し、かつ温度調整された下流側暴露プレート、暴露前の未暴露プレートの夫々に水滴を滴下し、水滴の接触角を測定し、各評価用プレートの接触角の比較結果に基づいて前記フィルタを評価する、請求項１に記載の高沸点有機物を処理するフィルタの評価方法。 A temperature adjustment step of adjusting the upstream exposure plate and the downstream exposure plate among the evaluation plates to a temperature at which the VOC is processed;
In the evaluation step, the upstream exposure plate exposed to the upstream processing air and temperature adjusted, the downstream exposure plate exposed to the downstream processing air and temperature adjusted, and the pre-exposure plate The high boiling point organic substance according to claim 1, wherein a water droplet is dropped on each of the unexposed plates, a contact angle of the water droplet is measured, and the filter is evaluated based on a comparison result of a contact angle of each evaluation plate. Filter evaluation method.
れる高沸点有機物を処理するフィルタを評価するフィルタの評価方法であって、
高沸点有機物の濃度を評価する評価用プレートを前記フィルタの上流側の被処理空気と前記フィルタの下流側の被処理空気の夫々に暴露する暴露工程と、
前記上流側の被処理空気に暴露した上流側暴露プレート、前記下流側の被処理空気に暴露した下流側暴露プレート、暴露前の未暴露プレートの夫々に関する高沸点有機物付着量情報に基づいて前記フィルタを評価する評価工程と、を含む、
高沸点有機物を処理するフィルタの評価方法。 A method for evaluating a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated, and that evaluates a filter that treats high-boiling organic substances contained in the air to be treated,
An exposure step of exposing an evaluation plate for evaluating the concentration of high-boiling organic substances to the air to be treated upstream of the filter and the air to be treated downstream of the filter;
The filter based on the high-boiling organic substance adhesion amount information on the upstream exposed plate exposed to the upstream treated air, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure. Including an evaluation process for evaluating
Evaluation method for filters that process high-boiling organic substances.
高沸点有機物の濃度を評価する評価用プレートを前記フィルタの上流側の被処理空気と前記フィルタの下流側の被処理空気の夫々に暴露する暴露工程と、
前記上流側の被処理空気に暴露した上流側暴露プレート、前記下流側の被処理空気に暴露した下流側暴露プレート、暴露前の未暴露プレートの夫々に水滴を滴下し、水滴の状態に関する水滴情報に基づいて前記フィルタを評価する評価工程と、を含む、
高沸点有機物を処理するフィルタの評価方法。 A method for evaluating a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated, and that evaluates a filter that treats high-boiling organic substances contained in the air to be treated,
An exposure step of exposing an evaluation plate for evaluating the concentration of high-boiling organic substances to the air to be treated upstream of the filter and the air to be treated downstream of the filter;
Water droplet information on the state of water droplets by dropping water droplets on the upstream exposed plate exposed to the upstream treated air, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure. Evaluating the filter based on:
Evaluation method for filters that process high-boiling organic substances.
前記評価工程では、前記上流側の被処理空気に暴露した上流側暴露プレート、前記下流側の被処理空気に暴露した下流側暴露プレート、暴露前の未暴露プレートの夫々の表面抵抗率を一定の相対湿度雰囲気下で測定し、各評価用プレートの表面抵抗率の比較結果に基づいて前記フィルタを評価する、請求項６に記載の高沸点有機物を処理するフィルタの評価方法。 The evaluation plate has an insulating surface at least,
In the evaluation step, the surface resistivity of each of the upstream exposed plate exposed to the upstream treated air, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure is set to a constant value. The method for evaluating a filter for treating high-boiling organic substances according to claim 6, wherein the filter is measured under a relative humidity atmosphere and the filter is evaluated based on a comparison result of surface resistivity of each evaluation plate.
前記フィルタの上流側の被処理空気に暴露される上流側暴露プレートと、前記フィルタの下流側の被処理空気に暴露される下流側暴露プレートと、暴露前の未暴露プレートとを含む、評価用プレートと、前記上流側暴露プレートと、前記下流側暴露プレートとを、前記フィルタの上流側の被処理空気と、前記フィルタの下流側の被処理空気との夫々に暴露する暴露部と、を含む暴露装置を備える、高沸点有機物を処理するフィルタの評価システム。 An evaluation system for a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated and evaluates a filter that treats high-boiling organic substances contained in the air to be treated,
For evaluation, including an upstream exposed plate exposed to the treated air upstream of the filter, a downstream exposed plate exposed to the treated air downstream of the filter, and an unexposed plate before exposure An exposed portion that exposes the plate, the upstream exposed plate, and the downstream exposed plate to treated air upstream of the filter and treated air downstream of the filter, respectively. An evaluation system for a filter for processing high-boiling organic substances, comprising an exposure device.
ら１２の何れか１項に記載の高沸点有機物を処理するフィルタの評価システム。 An evaluation apparatus for evaluating the filter based on a comparison result of a contact angle of the evaluation plate, wherein a standard set for each contact angle of the unexposed plate is displayed, and a contact angle of the upstream exposed plate and 13. The evaluation apparatus according to claim 10, further comprising an evaluation device capable of evaluating the remaining life of the filter by plotting an actual contact angle formed by a difference from a contact angle of the downstream exposure plate. Evaluation system for filters that process high boiling point organic matter.
被処理空気に含まれる高沸点有機物を処理するフィルタと、 A filter for processing high boiling point organic substances contained in the air to be treated;
前記フィルタの上流側の被処理空気に暴露される上流側暴露プレートと、前記フィルタの下流側の被処理空気に暴露される下流側暴露プレートと、暴露前の未暴露プレートとを含む、評価用プレートと、 For evaluation, including an upstream exposed plate exposed to the treated air upstream of the filter, a downstream exposed plate exposed to the treated air downstream of the filter, and an unexposed plate before exposure Plates,
前記上流側暴露プレートと、前記下流側暴露プレートとを、前記フィルタの上流側の被処理空気と、前記フィルタの下流側の被処理空気との夫々に暴露する暴露部と、を含む暴露装置と、を備え、 An exposure apparatus comprising: an exposure unit that exposes the upstream exposure plate and the downstream exposure plate to air to be processed upstream of the filter and air to be processed downstream of the filter; With
前記評価用プレートを用いた前記フィルタの評価が可能なＶＯＣ処理装置。 A VOC processing apparatus capable of evaluating the filter using the evaluation plate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP2015074125 | 2015-03-31 | ||
| JP2015074125 | 2015-03-31 |
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| JP2016194504A JP2016194504A (en) | 2016-11-17 |
| JP2016194504A5 true JP2016194504A5 (en) | 2019-02-28 |
| JP6767116B2 JP6767116B2 (en) | 2020-10-14 |
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| US5856198A (en) * | 1994-12-28 | 1999-01-05 | Extraction Systems, Inc. | Performance monitoring of gas-phase air filters |
| JP3039911B2 (en) * | 1995-06-13 | 2000-05-08 | 高砂熱学工業株式会社 | Apparatus and method for evaluating organic contamination on substrate surface |
| JP4014909B2 (en) * | 1997-05-08 | 2007-11-28 | 高砂熱学工業株式会社 | filter |
| JP4325868B2 (en) * | 2005-06-06 | 2009-09-02 | 株式会社フューチャービジョン | Wiring pattern forming method and display device manufacturing apparatus |
| US20070105494A1 (en) * | 2005-11-08 | 2007-05-10 | Esco Micro Pte Ltd | Ductless fume hood with improved filter monitoring system and extended filter life |
| US8252099B2 (en) * | 2010-03-26 | 2012-08-28 | Lifeaire Systems, Llc | Air filtration device |
| JP5744488B2 (en) * | 2010-11-29 | 2015-07-08 | 本田技研工業株式会社 | Exhaust gas treatment equipment |
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