JP2016194504A - Evaluation method and evaluation system of filter for treating high-boiling organic substance - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology for easily evaluating a filter for treating a high-boiling organic substance.SOLUTION: The present invention provides an evaluation method of a filter that is disposed in a VOC treating device for treating VOC contained in the air to be treated and is used for treating a high-boiling organic substance contained in the air to be treated. This method includes: an exposure process of exposing evaluation plates for evaluating the concentration of a high-boiling organic substance to the air to be treated on the upstream side of the filter and the air to be treated on the downstream side of the filter; and an evaluation process of dropping a water droplet to each of an upstream exposure plate exposed to the air to be treated on the upstream side, a downstream exposure plate exposed to the air to be treated on the downstream side, and a non-exposed plate before exposure, measuring the contact angles of the water droplets, and evaluating the filter on the basis of the comparison result of the contact angles of the evaluation plates.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a filter evaluation method and a filter evaluation system for processing high-boiling organic substances.

  There is a VOC processing apparatus that performs recovery processing or combustion processing of VOC (volatile organic compounds) by subjecting the air to be treated to an adsorption concentration treatment with an adsorbent such as zeolite or activated carbon. The air to be treated may contain a trace amount of high-boiling organic substances. The high boiling point organic substance is a general term for high molecular organic substances having a boiling point of 200 ° C. or more, for example, and is often hydrophobic. High boiling point organic substances cannot be completely desorbed by the regeneration treatment by high temperature treatment and may accumulate in the adsorbent. There is concern that accumulation of high-boiling organic substances in the adsorbent may reduce the adsorption / desorption performance (concentration performance) of the VOC to be treated. In order to reduce the decrease in the adsorption / desorption performance of VOC, a method of removing high-boiling organic substances with a filter such as activated carbon is known as a pretreatment of adsorption concentration treatment with an adsorbent. On the other hand, since the pre-processing filter used here breaks through in a relatively short period of time, for example, under a high load use condition, the replacement period is often set from half a year to one year and is often replaced. However, the replacement is often performed with a considerable remaining life, and as a result, the amount of filter used increases, leading to an increase in cost.

  If the concentration of the high-boiling organic substance can be evaluated, it is possible to evaluate a filter that processes the high-boiling organic substance, and more accurately grasp the replacement time of the filter that processes the high-boiling organic substance. However, since high-boiling organic substances have higher condensability than, for example, VOC, a technology that can evaluate the concentration in real time like VOC has not been established. It is known that the concentration of high-boiling organic substances can be evaluated by a gas chromatography (GC) apparatus. However, the GC device is a microanalyzer, and requires a relatively clean installation environment and a supply facility for high-purity gas such as hydrogen, helium, and argon as ancillary facilities. In other words, the evaluation by the GC device requires a lot of labor and cost.

  Here, for example, Patent Document 1 discloses an evaluation apparatus that evaluates the degree of organic contamination in a storage space (anterior room, transfer room, storage room). Further, Patent Document 1 discloses an evaluation apparatus that uses a change in contact angle of a droplet dropped on a surface of an insulating or conductive substrate. For example, Patent Document 2 discloses an evaluation apparatus for a semiconductor manufacturing environment. Further, Patent Document 2 discloses that a test chamber provided with a filter is provided and the contamination degree of an evaluation wafer placed on the downstream side of the filter is evaluated. Patent Document 3 discloses measuring the cleanliness of a measured object based on a scale and an image of a liquid droplet projected on a screen.

Japanese Patent Laid-Open No. 9-303838 JP-A-4-314348 JP 2006-308503 A

If the concentration of the high-boiling organic substance can be evaluated in real time, it is possible to evaluate a filter that processes the high-boiling organic substance, and more accurately grasp the replacement time of the filter that processes the high-boiling organic substance. However, a technique that can easily evaluate the concentration of high-boiling organic substances has not been established. Evaluation by the GC apparatus requires a lot of labor and cost. Patent Document 1 discloses an evaluation apparatus that uses a change in the contact angle of a droplet dropped on the surface of an insulating or conductive substrate. However, Patent Document 1 does not disclose or suggest a method for evaluating a filter that processes high-boiling organic substances. Also, Patent Documents 2 and 3 do not disclose or suggest an evaluation method for a filter that processes a high boiling point organic substance.

  This invention makes it a subject to provide the technique which evaluates easily the filter which processes a high boiling point organic substance in view of said problem.

  In order to solve the above-described problems, the present invention evaluates the concentration of high-boiling organic substances in the air to be treated based on the relationship between the amount of high-boiling organic substances adhering to the glass substrate and the contact angle of water droplets. We decided to evaluate the filter which processes.

  Specifically, the present invention is a filter evaluation method for evaluating a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated and that treats high-boiling organic substances contained in the air to be treated. An exposure step of exposing an evaluation plate for evaluating the concentration of boiling point organic substances to the air to be treated upstream of the filter and the air to be treated downstream of the filter, and an upstream of the exposure to the air to be treated upstream Drop water droplets on the side exposed plate, downstream exposed plate exposed to the downstream treated air, and unexposed plate before exposure, measure the contact angle of the water droplet, and compare the contact angle of each evaluation plate And an evaluation step for evaluating the filter based on the result.

  In the method for evaluating a filter for processing high-boiling organic substances according to the present invention (hereinafter also simply referred to as a filter evaluation method), an upstream exposed plate and a downstream side exposed to the air to be treated on the upstream side and downstream side of the filter, respectively. Based on the contact angle of the water droplets dropped on each of the exposed plates and the contact angle of the water droplets dropped on the unexposed plates used for comparison, the concentration of high boiling point organic substances can be evaluated in real time. The contact angle is an angle formed between the surface of the evaluation plate and the tangent of the dropped water droplet. The contact angle can be measured by, for example, an existing portable measuring instrument. Alternatively, a measuring instrument in which a plurality of contact angle measurement lines for measuring a contact angle on a transparent plate-like member are provided, for example, in increments of 1 degree may be prepared and used. For example, the smaller the amount of high-boiling organic substances attached to the evaluation plate, the smaller the contact angle. The larger the amount of high-boiling organic substances attached to the evaluation plate, the larger the contact angle. Therefore, for example, when the difference between the contact angle of the upstream exposure plate and the contact angle of the downstream exposure plate becomes small, it can be evaluated that the function of the filter is deteriorated. Further, the evaluation by the GC apparatus requires a lot of labor and cost, but according to the filter evaluation method according to the present invention, the filter can be evaluated more easily.

Here, the filter for treating high-boiling organic substances treats the high-boiling organic substances accumulated in the adsorbent, which cannot be completely desorbed by the regeneration treatment by the high-temperature treatment. For example, in a rotor of a VOC processing apparatus, a low boiling point organic substance having a lower boiling point than that of a high boiling point organic substance contained in the VOC is processed. Therefore, in the filter evaluation method according to the present invention, the plate may be adjusted to a temperature at which VOC is processed. For example, the filter evaluation method according to the present invention further includes a temperature adjustment step of adjusting the upstream exposure plate and the downstream exposure plate among the evaluation plates to a temperature at which the VOC is processed, and the evaluation In the process, the upstream exposed plate exposed to the upstream treated air and temperature adjusted, the downstream exposed plate exposed to the downstream treated air and temperature adjusted, and the unexposed before exposure Water drops may be dropped on each of the plates, the contact angle of the water drops may be measured, and the filter may be evaluated based on the comparison results of the contact angles of the evaluation plates. Thereby, the low boiling point organic substance having a lower boiling point than the high boiling point organic substance can be removed. In other words, the evaluation object can be narrowed down to high boiling point organic substances. As a result, more accurate filter evaluation is possible.

  The filter processing method according to the present invention is suitable as a method for evaluating a filter for processing high-boiling organic substances provided in a VOC processing apparatus for processing VOC (volatile organic compounds) contained in air to be processed. Can be used. Examples of the VOC treatment apparatus include a rotor having an adsorbent such as zeolite or activated carbon, and subjecting the air to be treated to adsorption concentration with an adsorbent of the rotor, and collecting the VOC contained in the air to be treated. A filter is provided in the upstream of a rotor, and processes the high boiling-point organic substance contained in to-be-processed air. The high boiling point organic substance is a general term for high molecular organic substances having a boiling point of 200 ° C. or higher, for example, and is hydrophobic.

  In the filter evaluation method according to the present invention, in the evaluation step, an actual contact angle formed by a difference between a contact angle of the upstream exposed plate and a contact angle of the downstream exposed plate, and a contact angle of the unexposed plate You may make it evaluate the remaining lifetime of the said filter by comparing with the reference | standard contact angle defined for every time.

  Thereby, the remaining life (or life) of the filter can be evaluated easily and accurately. The reference contact angle can be set, for example, every 1 degree. For example, the vertical axis shows the upstream contact angle, and the horizontal axis shows the difference between the upstream contact angle and the downstream contact angle. In this figure, there are multiple reference lines representing the reference contact angle. A life evaluation chart should be created. By creating such a remaining life evaluation diagram, the remaining life of the filter can be evaluated more easily and accurately.

  Here, the contact angle of the unexposed plate may be 15 degrees or less. In a relatively low contact angle range, it was confirmed that there was a relatively good proportional relationship between the increase in contact angle and the concentration of high-boiling organic substances. Therefore, the filter can be easily and accurately evaluated by setting the contact angle of the unexposed plate to 15 degrees or less. By setting the contact angle of the unexposed plate to 10 degrees or less, the filter can be evaluated more easily and accurately.

  In the temperature adjustment step, the temperature of the upstream exposure plate and the downstream exposure plate may be adjusted to 100 to 160 ° C. during or after the exposure step. By adjusting the plate to the above temperature, it is possible to evaluate the concentration of the high boiling point organic substance at the temperature at which the VOC is processed. As a result, more accurate filter evaluation is possible.

  Here, in the evaluation step, instead of or in combination with the comparison result of the contact angle of the water droplets dropped on each evaluation plate, the droplet diameter of the water droplets dropped on each evaluation plate (the diameter of the water droplets) ) Or the comparison result of the surface resistivity of each evaluation plate may be used to evaluate the filter. Here, the contact angle of the water droplets dropped on each evaluation plate and the droplet diameter of the water droplets dropped on each evaluation plate correspond to water droplet information relating to the state of the water droplets dropped on each evaluation plate. You may evaluate a filter based on the water droplet information regarding the state of the water droplet dripped at each plate for evaluation. By evaluating a filter based on different water droplet information, the evaluation accuracy of the filter can be further increased.

  Specifically, the present invention is a filter evaluation method for evaluating a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated and that treats high-boiling organic substances contained in the air to be treated. An exposure plate for evaluating the concentration of high-boiling organic substances was exposed to each of the air to be treated upstream of the filter and the air to be treated downstream of the filter, and the plate was exposed to the air to be treated upstream. Drop water droplets on the upstream exposed plate, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure to obtain water droplet information on the state of the water droplet, and based on the acquired water droplet information And an evaluation process for evaluating the filter. The filter can be specified as an evaluation method for a filter that processes high-boiling organic substances.

  In the filter evaluation method according to the present invention, the state of water droplets dropped on each of the upstream exposed plate and the downstream exposed plate exposed to the air to be treated on the upstream side and downstream side of the filter, respectively, and the un-used for comparison. Based on the water droplet information relating to the state of the water droplet dropped on the exposure plate, the concentration of the high boiling point organic substance can be evaluated in real time. The water droplet information includes the droplet diameter of the water droplet in addition to the contact angle of the water droplet described above. These may be used alone or in combination.

  The droplet diameter is a diameter of a water droplet dropped on the surface of the evaluation plate. The droplet diameter can be measured using graph paper (paper with grids). The interval of the graph paper can be set to 1 mm, for example. The measurement may be performed with the naked eye, but the accuracy can be further improved by using a magnifying glass or a magnifying glass. Moreover, you may measure using a camera. Moreover, you may make it measure a droplet diameter with the existing portable measuring instrument, for example. For example, as the amount of high-boiling organic substances attached to the evaluation plate increases, the droplet diameter tends to decrease. Therefore, for example, when the difference between the droplet diameter of the upstream exposure plate and the droplet diameter of the downstream exposure plate is increased, it can be evaluated that the function of the filter is deteriorated. According to the filter evaluation method of the present invention, the filter can be evaluated more easily.

  Here, if the amount of droplets is small, for example, the difference between the droplet size of the upstream exposure plate and the droplet size of the downstream exposure plate is small, and it is conceivable that the reliability of discrimination is reduced. Further, when the amount of droplets is large, for example, the difference between the droplet size of the upstream exposure plate and the droplet size of the downstream exposure plate increases. However, the shape of the water droplet is likely to be distorted, and the droplet diameter is also easily affected by the levelness and vibration, so that it is possible that the reliability of the determination is lowered. Therefore, in the present invention, the amount of water droplets to be dropped is preferably 1 to 200 μl, more preferably 5 to 50 μl. Thereby, a filter can be evaluated simply and accurately.

  In the filter evaluation method according to the present invention, in the evaluation step, an upstream exposure plate exposed to the upstream processing air, a downstream exposure plate exposed to the downstream processing air, a pre-exposure plate The filter may be evaluated based on the result of comparing the droplet diameters of the evaluation plates by dropping water droplets on each of the unexposed plates, measuring the droplet diameter.

  In addition, the filter evaluation method according to the present invention evaluates the filter based on the comparison result of the surface resistivity of each evaluation plate in the evaluation step without dropping water droplets on each evaluation plate. Also good. Specifically, the present invention is a filter evaluation method for evaluating a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated and that treats high-boiling organic substances contained in the air to be treated. An exposure plate for evaluating the concentration of high-boiling organic substances was exposed to each of the air to be treated upstream of the filter and the air to be treated downstream of the filter, and the plate was exposed to the air to be treated upstream. An evaluation step of evaluating the filter based on high-boiling point organic substance adhesion amount information on each of an upstream exposure plate, a downstream exposure plate exposed to the downstream treated air, and an unexposed plate before exposure. It can be specified as a method for evaluating a filter for treating high-boiling organic substances.

  In the present invention, at least the surface of the evaluation plate is insulative. In the evaluation step, the upstream exposure plate exposed to the upstream processing air and the downstream exposed to the downstream processing air. The surface resistivity of each of the side exposed plate and the unexposed plate before exposure may be measured under a constant relative humidity atmosphere, and the filter may be evaluated based on the comparison result of the surface resistivity of each evaluation plate.

The surface resistivity can be measured by, for example, an existing portable measuring instrument such as a surface resistivity meter. For example, when the amount of high-boiling organic substances attached to the evaluation plate increases, the surface resistivity tends to increase. Therefore, for example, when the difference between the surface resistivity of the upstream exposed plate itself and the surface resistivity of the downstream exposed plate itself is increased, it can be evaluated that the function of the filter is lowered. According to the filter evaluation method of the present invention, it is not necessary to use water droplets, and the filter can be evaluated more easily.

  Here, the present invention can be specified as a filter evaluation system that evaluates a filter that processes high-boiling organic substances. For example, the present invention is an evaluation system for a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated, and that evaluates a filter that treats high-boiling organic substances contained in the air to be treated. An evaluation plate comprising an upstream exposed plate exposed to upstream treated air, a downstream exposed plate exposed to treated air downstream of the filter, and an unexposed plate prior to exposure; An exposure apparatus including: an exposure unit that exposes the upstream exposure plate and the downstream exposure plate to the air to be processed upstream of the filter and the air to be processed downstream of the filter, respectively. Prepare.

  The filter evaluation system for evaluating a filter for processing high-boiling organic substances according to the present invention (hereinafter also simply referred to as an evaluation system) can be suitably used in the above-described filter evaluation method. According to the exposure apparatus, among the plates for evaluation, the upstream exposure plate and the downstream exposure plate can be exposed to the air to be treated containing high-boiling organic substances. Unexposed plates can be used for comparison between upstream exposed plates and downstream exposed plates. The filter can be evaluated by measuring the contact angle of the evaluation plate.

  In the filter evaluation system according to the present invention, the exposure apparatus may further include a temperature adjustment unit that adjusts the upstream exposure plate and the downstream exposure plate to a temperature at which the VOC is processed. Thereby, the low boiling point organic substance having a lower boiling point than the high boiling point organic substance can be removed. In other words, the evaluation object can be narrowed down to high boiling point organic substances. As a result, more accurate filter evaluation is possible.

  The filter evaluation system according to the present invention may further include a measuring instrument that measures a contact angle of a water droplet dropped on each of the evaluation plates. By providing a measuring instrument, the contact angle can be easily measured. The measuring instrument can include, for example, a transparent plate-shaped member and a contact angle measurement line for measuring the contact angle provided on the transparent plate-shaped member. For example, a plurality of contact angle measurement lines can be provided in increments of 1 degree. The measuring instrument may be an existing portable measuring instrument.

  Further, the filter evaluation system according to the present invention is an evaluation device for evaluating the filter based on a comparison result of the contact angle of the evaluation plate, and a standard defined for each contact angle of the unexposed plate is It is further provided with an evaluation device that is capable of evaluating the remaining life of the filter by plotting an actual contact angle that is displayed and plots an actual contact angle that is a difference between the contact angle of the upstream exposure plate and the contact angle of the downstream exposure plate Also good.

  By including the evaluation device, the filter can be easily evaluated. For example, the evaluation apparatus provides a table in which the vertical axis represents the upstream contact angle and the horizontal axis represents the difference between the upstream contact angle and the downstream contact angle, and a reference line representing the reference contact angle is provided on this table. A plurality of remaining life evaluation diagrams can be included. The remaining life evaluation chart may be described on a paper surface or displayed on a display. According to such a remaining life evaluation diagram, the remaining life of the filter can be evaluated more easily and accurately.

The evaluation plate is a hydrophilic plate, and may be made of any one of a glass plate, a glass coating plate, a Si wafer, and a SiO2 film coating plate. Since such an evaluation plate easily attaches high-boiling organic substances, the contact angle can be accurately measured.

  In addition, the filter evaluation system according to the present invention may further include a measuring instrument that measures a droplet diameter of a water droplet dropped on each of the evaluation plates. The filter evaluation system according to the present invention may further include a measuring device for measuring the surface resistivity of each evaluation plate itself. By providing such a measuring instrument and measuring device, the droplet diameter and the surface resistivity can be easily measured. The measuring instrument for measuring the droplet diameter can be, for example, graph paper. The interval of the graph paper can be set to 1 mm, for example. Further, the measuring instrument for measuring the droplet diameter may include a magnifying glass or a loupe. The measuring device for measuring the surface resistivity may be an existing portable measuring instrument such as a surface resistivity meter.

  ADVANTAGE OF THE INVENTION According to this invention, the technique which evaluates easily the filter which processes a high boiling point organic substance can be provided.

FIG. 1 shows a schematic configuration of the VOC processing apparatus according to the first embodiment. FIG. 2 shows a schematic configuration of the filter evaluation system according to the first embodiment. FIG. 3 shows an example of contact angle measurement using a contact angle measuring instrument according to the first embodiment. FIG. 4 shows an example of remaining life evaluation by the remaining life evaluation apparatus according to the first embodiment. FIG. 5 shows an evaluation flow of the filter according to the first embodiment. FIG. 6 shows the measurement result of the contact angle in the experimental example. FIG. 7 shows the remaining life evaluation result in the experimental example. FIG. 8 shows a schematic configuration of a filter evaluation system according to the second embodiment. FIG. 9 shows an evaluation flow of the filter according to the second embodiment. FIG. 10 shows a measurement example of the droplet diameter by the droplet diameter measuring instrument according to the second embodiment. FIG. 11 shows an example of the remaining life evaluation table. FIG. 12 shows a table of droplet diameter measurement results in the experimental example. FIG. 13 shows a graph of the measurement result of the droplet diameter in the experimental example. FIG. 14 shows a measurement example of the droplet diameter in the experimental example. FIG. 15 shows an example of a surface resistivity measuring apparatus according to the third embodiment. FIG. 16 shows an example of the remaining life evaluation table.

  Next, embodiments of the present invention will be described with reference to the drawings. The embodiment described below is merely an example, and the present invention is not limited to the embodiment described below.

<First Embodiment>
<Configuration of VOC processing device>
FIG. 1 shows a schematic configuration of the VOC processing apparatus according to the first embodiment. The VOC processing apparatus 100 is, for example, a circulation-type VOC recovery facility for recovering VOC contained in solvent exhaust (processed air) from a coating machine by adsorbing and concentrating with a VOC adsorption / desorption rotor 110 and then cooling and condensing it. It is. The VOC processing apparatus 100 includes a VOC adsorption / desorption rotor 110, a processing vent 120, and a regeneration vent 130. One end of the processing air passage 120 is connected to a discharge port of a coating machine (not shown). The other end is connected to a discharge port for discharging the processing air. In addition, you may comprise the process ventilation path 120 so that process air may be returned to the coating machine side which is an exhaust source. A VOC adsorption / desorption rotor 110 is provided in the middle of the processing aeration path 120. In the processing air passage 120, air to be processed including VOC discharged from the coating machine flows from one end to the VOC adsorption / desorption rotor 110. In addition, the processing air that has been purified by the VOC adsorption / desorption rotor 110 flows through the treatment ventilation path 120 on the downstream side of the VOC adsorption / desorption rotor 110. Further, the processing air passage 120 is provided with a first cooler 121, an activated carbon filter 140, and a second cooler 122 in order from the upstream side in the flow of the air to be treated, on the upstream side of the VOC adsorption / desorption rotor 110. The first cooler 121 cools the air to be treated on the upstream side of the activated carbon filter 140. The second cooler 122 cools the air to be processed before being supplied to the VOC adsorption / desorption rotor 110 on the downstream side of the activated carbon filter 140. The activated carbon filter 140 processes a small amount of high-boiling organic substances contained in the air to be treated. In addition, the range of the boiling point of the high-boiling organic substance in which adhesion to the VOC adsorption / desorption rotor 110 becomes a problem is a boiling point higher by several tens of degrees Celsius than the regeneration temperature of the VOC adsorption / desorption rotor 110. The equilibrium adsorption amount (the adsorption amount when new adsorption and desorption reaches an equilibrium concentration, the higher the boiling point, the higher the equilibrium adsorption amount) is the concentration of the air to be treated, the air when the VOC adsorption / desorption rotor 110 is regenerated. Concentration, regeneration temperature, regeneration time, and area ratio of the desorption zone 113 (regeneration zone) to the adsorption zone 111 and cooling zone 112 in the VOC adsorption / desorption rotor 110. For example, when the regeneration temperature of the VOC adsorption / desorption rotor 110 is 140 ° C., if the organic substance has a boiling point up to about 200 ° C., the influence on the adsorption / desorption performance of the VOC adsorption / desorption rotor 110 is slight. In the first embodiment, the activated carbon filter 140 treats high-boiling organic substances having a boiling point of 200 ° C. or higher, which are concerned about the influence on the adsorption / desorption performance of the VOC adsorption / desorption rotor 110.

  The VOC adsorption / desorption rotor 110 can be constituted by a rotor to which silica gel is attached, for example. The VOC adsorption / desorption rotor 110 may be constituted by a rotor impregnated with zeolite, a rotor impregnated with a polymer sorbent, or a rotor impregnated with a moisture absorbent such as lithium chloride. The VOC adsorption / desorption rotor 110 is rotatable by a drive source (not shown), and includes an adsorption zone 111, a cooling zone 112, and a desorption zone 113 (regeneration zone). The adsorption zone 111 adsorbs VOC contained in the air to be processed flowing through the processing air passage 120 and adjusts the humidity of the gas flowing through the processing air passage 120. The desorption zone 113 desorbs the adsorbed and concentrated VOC and regenerates the VOC adsorption / desorption rotor 110. The cooling zone 112 (purge zone) cools the VOC adsorption / desorption rotor 110 that has become high temperature due to regeneration.

  The regeneration air passage 130 is connected to the VOC cooling condensing coil 150 so that an inert gas (N2) can be introduced. More specifically, the regeneration ventilation path 130 regenerates the VOC adsorption / desorption rotor 110 with an inert gas, collects the VOC from the inert gas containing the high concentration VOC, and recycles the inert gas. It has become. The regenerative air passage 130 has an introduction part 134, a first blower 131, a VOC adsorption / desorption rotor 110 (cooling zone 112), a second blower 132, a heater 133, and a VOC adsorption / desorption rotor 110 in order from the upstream side in the flow of inert gas. (Desorption zone 113), a VOC cooling condensation coil 150, and a discharge part 135 are provided.

  The introduction part 134 is located at the uppermost stream of the regeneration ventilation path, and introduces an inert gas (N2). The 1st air blower 131 sends out inert gas, and can be comprised by the blower which compresses and sends out gas. As described above, the cooling zone 112 of the VOC adsorption / desorption rotor 2 cools the VOC adsorption / desorption rotor 110 that has become high temperature due to regeneration. The second blower 132 sends out an inert gas, and can be constituted by a so-called blower like the first blower 131. The heater 133 heats the inert gas. As described above, the desorption zone 113 of the VOC adsorption / desorption rotor 110 desorbs the adsorbed and concentrated VOC and regenerates the VOC adsorption / desorption rotor 110. The VOC cooling condensation coil 150 cools and collects the inert gas. The discharge unit 135 discharges the inert gas from which the VOC has been recovered.

Further, in the regeneration air passage 130, the first branch portion 1 is provided between the introduction portion 134 and the first blower 131.
36, a branching path 138 is provided between the VOC recovery cooling condensing coil 150 and the discharge part 135. The branching path 138 has one end connected to the second branching part 137 and the other end connected to the first branching part 136. It has been. The inert gas that has passed through the cooling zone 112 of the VOC adsorption / desorption rotor 110 is heated by the heater 133 to a high temperature and passes through the desorption zone 113. Passing through the desorption zone 113, the inert gas containing the high concentration VOC is cooled and condensed by the VOC cooling condensation coil 150, and the VOC is recovered. Further, in the present embodiment, a part of the inert gas from which VOC is recovered by the VOC cooling condensing coil 150 is returned to the regeneration air passage 130 via the second branch portion 137, the branch passage 138, and the first branch portion 136. It is.

<Configuration of filter evaluation system>
FIG. 2 shows a schematic configuration of the filter evaluation system according to the first embodiment. The filter evaluation system 200 according to the first embodiment takes in air to be treated containing high boiling point organic matter from the chamber 10 of the activated carbon filter housing the activated carbon filter 140, evaluates the concentration of the high boiling point organic matter, Evaluate the remaining life. In the activated carbon filter chamber 10, two activated carbon filters (upstream activated carbon filter 141 and downstream activated carbon filter 142) are accommodated in series. In the first embodiment, the activated carbon filter 140 that is the main target of evaluation is the upstream activated carbon filter 141, and the downstream activated carbon filter 142 is evaluated for comparison. The filter evaluation system 200 according to the first embodiment includes an exposure box 30, a ribbon heater 50, an evaluation plate 40, a contact angle measuring instrument 60, and a remaining life evaluation device 70.

<< Exposure box >>
The exposure box 30 is connected to the chamber 10 of the activated carbon filter through the heat-insulated tube 20, takes in the air to be treated containing high boiling point organic matter, and converts the evaluation plate 40 into the air to be treated containing high boiling point organic matter. Expose. The air to be treated is sucked by the exposure box pump 80 provided on the downstream side of the exposure box 30 and taken into the exposure box 30. The exposure box 30 includes an upstream exposure box 31, a middle exposure box 32, and a downstream exposure box 33. The upstream exposure box 31 is connected to the activated carbon filter chamber 10 via the heat-insulated tube 20 in the vicinity of the upstream side of the upstream activated carbon filter 141. The upstream exposure box 31 accommodates the evaluation plate 40 and exposes the stored evaluation plate 40 to the air to be treated before being treated with the activated carbon filter 140. The evaluation plate 40 exposed in the upstream exposure box 31 is referred to as an upstream exposure plate 41 in order to distinguish it from other evaluation plates 40. The middle stage exposure box 32 is connected to the activated carbon filter chamber 10 via the heat-insulated tube 20 between the upstream side activated carbon filter 141 and the downstream side activated carbon filter 142. The middle stage exposure box 32 accommodates the evaluation plate 40 and exposes the stored evaluation plate 40 to the air to be treated after passing through the upstream activated carbon filter 141 and before passing through the downstream activated carbon filter 142. The evaluation plate 40 exposed in the middle exposure box 32 is referred to as a middle exposure plate 42 in order to distinguish it from the other evaluation plates 40. The downstream exposure box 33 is connected to the activated carbon filter chamber 10 via the insulated tube 20 in the vicinity of the downstream side of the downstream activated carbon filter 142. The downstream exposure box 33 accommodates the evaluation plate 40 and exposes the stored evaluation plate 40 to the air to be treated after passing through the downstream activated carbon filter 142. The evaluation plate 40 exposed in the downstream exposure box 33 is referred to as a downstream exposure plate 43 in order to distinguish it from other evaluation plates 40.

<< Evaluation plate >>
The evaluation plate 40 includes an upstream exposure plate 41, a middle exposure plate 42, a downstream exposure plate 43, and an unexposed plate 44. The evaluation plate 40 is made of a glass plate treated with UV ozone. The evaluation plate 40 may be a hydrophilic plate, and may be a glass coating plate, a Si wafer, or a SiO2 film coating plate. The evaluation plate 40 treated with UV ozone is preferably placed in a sealed container that does not generate high boiling point organic gas. The evaluation plate 40 treated with UV ozone may be wrapped with a clean packing material. Thereby, it is possible to prevent the contact angle from changing until the evaluation plate 40 is exposed to the air to be processed. As a result, the accuracy of evaluation can be improved.

<< Tube with insulation >>
The heat-insulated tube 20 is connected to the activated carbon filter chamber 10 and supplies air to be treated containing high-boiling organic substances to the exposure box 30. The heat-insulated tube 20 has a heat insulating structure so that the temperature of the air to be treated containing high-boiling organic substances does not fluctuate due to the influence of the surrounding environment. The tube with heat insulation 20 according to the first embodiment is made of resin and is covered with a urethane-based heat insulating material. Moreover, although the inner surface of the tube 20 with heat insulation is processed by Teflon, it may be processed by silicon. The inner surface of the heat-insulated tube 20 should have less resistance on the inner surface so as to suppress adhesion of high-boiling organic substances to the inner surface of the tube and prevent deterioration in evaluation accuracy. In addition, the tube 20 with heat insulation may be provided with a heater so that it can be heated. In the insulated tube 20, it is preferable that the lengths of the tubes connected to the upstream exposure box 31, the middle exposure box 32, and the downstream exposure box 33 are all the same in order to suppress a decrease in evaluation accuracy. In addition, it is preferable that the heat-insulated tube 20 be as short as possible in order to suppress a decrease in evaluation accuracy.

<< Ribbon heater >>
In the ribbon heater 50, the temperature of the evaluation plate 40 (upstream exposure plate 41, middle exposure plate 42, downstream exposure plate 43) accommodated in the exposure box 30 is the same as the regeneration temperature of the VOC adsorption / desorption rotor 110, for example, Heat the exposure box 30 to 140 ° C. In the first embodiment, an evaluation plate 40 is placed directly in a metal exposure box 30, and a ribbon heater 50 whose surface is covered with aluminum foil is wound so as to cover the exposure box 30. The evaluation plate 40 may be heated so that the evaluation plate 40 has the same temperature as the regeneration temperature of the VOC adsorption / desorption rotor 110. Instead of the ribbon heater 50, the exposure box may be placed on a flat heating device (for example, a hot plate). For example, the plate 40 for evaluation may be placed directly on a hot plate or the like for 10 to 60 minutes after the exposure is completed and the temperature may be increased to the same temperature without being heated during the exposure. In this case, the measurement of the contact angle is preferably performed after the temperature of the hot plate returns to approximately room temperature. Moreover, a heater may be provided in the tube 20 with heat insulation, and the air to be processed may be heated by the heater of the tube 20 with heat insulation so that the evaluation plate 40 is heated. The heating temperature in the ribbon heater 50 can be appropriately changed based on the regeneration temperature of the VOC adsorption / desorption rotor 110. For example, the heating temperature in the ribbon heater 50 can be set to 140 ° C. to 180 ° C. The ribbon heater 50 may be omitted, and the filter evaluation system 200 may have a simpler configuration.

<< Contact angle measuring instrument >>
The contact angle measuring instrument 60 is used for measuring the contact angle. The contact angle measuring instrument 60 includes a transparent plate-like member 61, and the plate-like member 61 is provided with a plurality of contact angle measurement lines 62 for measuring the contact angle in increments of 1 degree. The contact angle measuring instrument 60 may be an existing portable measuring instrument (for example, a contact angle meter).

FIG. 3 shows an example of contact angle measurement by the contact angle measuring instrument 60 according to the first embodiment. FIG. 3A is an example when a small amount of high-boiling organic substances are contained, and the contact angle is about 12 degrees. For example, when the contact angle of the initial value of the evaluation plate 40 is 10 degrees, the contact angle when the evaluation plate 40 is exposed for several hours to one day with a sufficient amount of ventilation (for example, 2 l / min or more). When it becomes 12 to 15 degrees, it can be evaluated that the air to be treated contains a small amount of high-boiling organic substances. FIG. 3B is an example in which a large amount of high-boiling organic substances are contained, and the contact angle is about 16 degrees. For example, when the contact angle of the initial value of the evaluation plate 40 is 10 degrees, the contact angle when the evaluation plate 40 is exposed for several hours to one day with a sufficient amount of ventilation (for example, 2 l / min or more). When it becomes 16 degrees or more, it can be evaluated that the air to be treated contains a large amount of high-boiling organic substances. Although not shown in the drawing, for example, when the contact angle of the initial value of the evaluation plate 40 is 10 degrees, the evaluation plate 40 is moved from several hours to one day with a sufficient amount of ventilation (for example, 2 l / min or more). When the contact angle when exposed is less than 12 degrees, it can be evaluated that the high-boiling organic substances are hardly contained in the air to be treated. The contact angle greatly depends on the exposure time and also depends on the air flow rate. Therefore, when evaluating how much high-boiling organic substances are contained, it is preferable to consider the exposure time and the air flow rate.

<< Remaining life evaluation device >>
The remaining life evaluation device 70 includes a remaining life evaluation diagram 72 written on the paper surface 71. The remaining life evaluation diagram 72 has an upstream contact angle on the vertical axis and an upstream contact angle and a downstream contact on the horizontal axis. A table 73 is provided as a difference from the corner, and a plurality of reference lines 74 representing a reference contact angle are described in the table 73. If the difference between the contact angle of the upstream exposure plate 41 and the contact angle of the downstream exposure plate 43 (or middle exposure plate) is plotted, and there is a plot indicating this difference in the lower region of the reference line 74, there is a remaining life It is evaluated as (continuous use is possible). On the other hand, when a plot showing the difference exists in the upper region of the reference line 74, it is evaluated that there is no remaining life (unusable continuously). In the first embodiment, the reference line 74 is 5 to 10 degrees, but for example, the reference line 74 may be 5 to 15 degrees. Further, the position of the reference line 74 can be adjusted by the removal rate that is the life of the activated carbon filter 140. For example, in the first embodiment, the reference line 74 is set with a removal rate of about 70%. For example, when the removal rate at the end of the life is set higher than 70%, the reference line 74 can be moved slightly downward. On the other hand, for example, when the removal rate at the end of the lifetime is made lower than 70%, the reference line 74 can move slightly upward.

  FIG. 4 shows an example of remaining life evaluation by the remaining life evaluation apparatus according to the first embodiment. FIG. 4 shows a case where the contact angle of the unexposed plate 44 is 10 degrees, the contact angle of the upstream exposed plate 41 is 20 degrees, the contact angle of the downstream exposed plate 43 is 14, and the difference is 6 degrees. In FIG. 4, the “difference” is plotted at the location indicated by “x”. Since the plot showing the difference exists in the upper region of the reference line 74 of 10 degrees, the activated carbon filter 140 that is the evaluation target is evaluated as having no remaining life (unusable continuously).

<Filter evaluation method>
FIG. 5 shows an evaluation flow of the filter according to the first embodiment. In step S01, as an exposure process, the evaluation plate 40 is exposed to air to be treated containing high-boiling organic substances. The evaluation plate 40 subjected to UV ozone treatment is accommodated in the exposure box 30 (upstream exposure box 31, middle exposure box 32, downstream exposure box 33). In the UV ozone treatment, ultraviolet rays having a wavelength that generates ozone are irradiated in a chamber in which the evaluation plate 40 is installed. Organic substances are reduced in molecular weight and completely decomposed by direct decomposition (dissociation) by ultraviolet photon energy and oxidative decomposition by ozone. As a result, the surface of the evaluation plate 40 can be cleaned. In addition, you may make it raise the decomposition | disassembly rate of ozone itself by raising the process temperature at the time of performing UV ozone treatment. As a result, the cleaning effect by the ozone decomposition product can be improved, and the desorption rate of the organic substance having a reduced molecular weight from the substrate can be improved.

Among the evaluation plates 40, the exposure box 30 accommodates the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43, and the exposure box pump 80 causes air to be treated containing high-boiling organic substances in the exposure box 30. Is aspirated and exposure begins. In step S01, the temperature of the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 of the evaluation plate 40 is adjusted as a temperature adjustment process. Specifically, during the exposure, the temperature of the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 in the evaluation plate 40 is the same as the regeneration temperature of the VOC adsorption / desorption rotor 110 (for example, 140). The ribbon heater 50 heats the temperature so that the temperature becomes (° C.). The exposure time is 0.5 to 5 hours (h). The exposure time can be changed according to the concentration level of the high-boiling organic substance upstream of the filter. For example, when the concentration is low, set the exposure time longer. It is good to expose at least until the contact angle of the upstream exposure plate 41 increases by 5 degrees or more. For example, when the contact angle of the upstream exposure plate 41 is increased by about 4 degrees in the initial exposure for 1 hour, the upstream exposure plate 41 may be exposed again for about 1 hour. As a result, the contact angle of the upstream exposure plate 41 increases by about 8 degrees. The heating by the ribbon heater 50 may be omitted, and the filter evaluation method may be a simpler process.

  In step S02, the remaining life of the activated carbon filter 140 is evaluated as an evaluation step. First, when the exposure is completed, the exposure box 30 (upstream exposure box 31, middle exposure box 32, downstream exposure box 33) to evaluation plate 40 (upstream exposure plate 41, middle exposure plate 42, downstream exposure plate 43). ) Is taken out. Then, the surface of the evaluation plate 40, that is, the upstream exposure plate 41, the middle exposure plate 42, the downstream exposure plate 43, and the unexposed plate 44 used for comparison with these plates is obtained by a general-purpose instrument for dropping water drops. In addition, several tens of μg to several tens of mg of water droplets are dropped. Next, using the contact angle measurement instrument 60, water droplets dropped on the evaluation plate 40 for each of the evaluation plate 40, that is, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43. The contact angle of is measured. Further, the contact angle of the dropped water droplet is also measured for the unexposed plate 44.

  Next, the remaining life evaluation device 70 evaluates the remaining life of the activated carbon filter 140. For example, when the contact angle of the unexposed plate 44 is 10 degrees, the contact angle of the upstream exposed plate 41 is 20 degrees, and the contact angle of the downstream exposed plate 43 is 14 degrees, the contact angle of the upstream exposed plate 41 and the downstream side The difference from the contact angle of the exposure plate 43 is 6 degrees. This “difference” is plotted in the remaining life evaluation diagram 72 of the remaining life evaluation device 70 shown in FIG. In FIG. 4, “difference” is indicated by “x”. Since the plot showing the difference exists in the upper region of the reference line 74 of 10 degrees, the activated carbon filter 140 that is the evaluation target is evaluated as having no remaining life (unusable continuously). For example, when the contact angle of the unexposed plate 44 is 10 degrees, the contact angle of the upstream exposed plate 41 is 20 degrees, and the contact angle of the downstream exposed plate 43 is 11 degrees, the contact angle of the upstream exposed plate 41 and the downstream side The difference from the contact angle of the exposure plate 43 is 9 degrees. In FIG. 4, this “difference” is indicated by “Δ”. Since the plot indicating the difference exists in the lower region of the reference line 74 of 10 degrees, the activated carbon filter 140 that is the evaluation object is evaluated as having a remaining life (continuous use is possible). In other words, the contact angle of the unexposed unexposed plate 44 is used as a reference, and the difference between the contact angle of the upstream exposed plate 41 and the contact angle of the downstream exposed plate 43 is compared. It can be evaluated how much it has been reduced, that is, the remaining life of the activated carbon filter 140. Thus, the filter evaluation flow ends. Here, the contact angle of the upstream exposed plate 41, the contact angle of the downstream exposed plate 43, and the contact angle of the unexposed plate 44 correspond to the water droplet information and the high boiling point organic matter adhesion information in the present invention, respectively.

<Experimental example>
Next, experimental examples will be described. In the experimental example, the VOC processing apparatus 100 shown in FIG. 1 was used. The air to be treated is mainly composed of ethyl acetate. The activated carbon filter 140 used removes (treats) high-boiling organic substances having a boiling point of 200 ° C. or higher. As shown in FIG. 2, the activated carbon filter 140 includes an upstream side activated carbon filter 141 and a downstream side activated carbon filter 142, and is provided in series. When replacing the activated carbon filter 140, the upstream activated carbon filter 141 is removed, the downstream activated carbon filter 142 is used as the upstream activated carbon filter 141, and a new activated carbon filter is used as the downstream activated carbon filter 142. As the evaluation plate 40, a commercially available slide glass that is easy to obtain, inexpensive, and easy to handle was used. As pretreatment, a plurality of evaluation plates 40 made of slide glass were subjected to UV ozone cleaning treatment for 10 minutes. Among the evaluation plates 40, one evaluation plate 40 after the cleaning process. As the unexposed plate 44, the contact angle of water was measured, and it was confirmed that the contact angle was 7 degrees. Among the evaluation plates 40, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 are accommodated in the upstream exposure box 31, the middle exposure box 32, and the downstream exposure box 33, respectively. The processing air was sucked by the pumps 80, and the evaluation plate 40 was exposed to the processing air. In this experimental example, since the regeneration temperature of the VOC processing apparatus was 140 ° C., the upstream heater exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 among the evaluation plates 40 were set to 140 ° C. by the ribbon heater 50. Warmed up.

  FIG. 6 shows the measurement result of the contact angle in the experimental example. FIG. 6 shows the measurement results of the contact angle when the exposure time is 1 hour, 2 hours, and 3 hours. “X” (cross mark) in FIG. 6 indicates the measurement result of the contact angle of the upstream exposure plate 41 exposed in the upstream exposure box 31. “● (black circle)” in FIG. 6 shows the measurement result of the contact angle of the middle exposure plate 42 exposed in the middle exposure box 32. “◯ (open circle)” in FIG. 6 indicates the measurement result of the contact angle of the downstream exposure plate 43 exposed in the downstream exposure box 33. “Δ (open triangle mark)” in FIG. 6 indicates the measurement result of the contact angle of the middle exposure plate 42 exposed in the middle exposure box 32 after the activated carbon filter 140 is replaced in the manner described above. . In the present experimental example, as described above, the contact angle of the unexposed plate 44 was 7 degrees.

  As shown in FIG. 6, the change in the contact angle of the downstream exposure plate 43 is very small with respect to the change in the contact angle of the upstream exposure plate 41, and the concentration of high boiling point organic substances contained in the air to be treated is the activated carbon filter. It was confirmed that the downstream side of 140 was significantly reduced compared to the upstream side. On the other hand, the contact angle of the middle stage exposure plate 42 is considerably larger than the contact angle of the downstream side exposure plate 43, and it was confirmed that the removal performance of the upstream side activated carbon filter 141 was lowered.

  Here, FIG. 7 shows the remaining life evaluation result in the experimental example. In FIG. 7, the contact angle of the unexposed plate 44 is 7 degrees, the contact angle of the upstream exposed plate 41 is 12 degrees (exposure time 1 h), 21 degrees (exposure time 2 h), 33 degrees (exposure time 3 h), middle exposure. The contact angle of the plate 42 is 9 degrees (exposure time 1 h), 13 degrees (exposure time 2 h), and 18 degrees (exposure time 3 h). The difference between the contact angle of the upstream exposure plate 41 and the contact angle of the middle exposure plate 42 is 3 degrees (exposure time 1 h), 8 degrees (exposure time 2 h), and 15 degrees (exposure time 3 h). In FIG. 7, the difference between the contact angle of the upstream exposure plate 41 and the contact angle of the middle exposure plate 42 is plotted (“x” crosses) only for 3 degrees (exposure time 1 h) and 8 degrees (exposure time 2 h). ) As shown in FIG. 7, since the plot indicating “difference” exists in the upper region of the reference line 74, it is evaluated that there is no remaining life (unusable continuously).

  In addition, it was confirmed by exchanging the activated carbon filter 140 that the contact angle of the middle exposure plate 42 after filter replacement is substantially the same as the contact angle of the downstream exposure plate 43 before filter replacement. Therefore, it was confirmed that the removal performance of the upstream side activated carbon filter 141 was sufficiently high. The evaluation after replacement may be omitted.

<Effect>
Among the evaluation plates 40, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 of the evaluation plate 40 are converted into high-boiling organic substances by the exposure box 30 (upstream exposure box 31, middle exposure box 32, downstream exposure box 33). Can be exposed to air to be treated. Further, among the evaluation plates 40 accommodated in the exposure box 30 by the ribbon heater 50, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43.
Can be heated to be the same as the regeneration temperature of the VOC adsorption / desorption rotor 110, for example, 140 ° C. As a result, it is possible to remove low-boiling organic substances having a boiling point lower than that of high-boiling organic substances, that is, low-boiling organic substances to be processed by the VOC adsorption / desorption rotor 110. In other words, the evaluation object can be narrowed down to high boiling point organic substances. As a result, more accurate filter evaluation is possible. Moreover, the temperature fluctuation | variation of the to-be-processed air containing a high boiling point organic substance can be suppressed by using the tube 20 with heat insulation. As a result, more accurate filter evaluation is possible. Further, for example, the exposure time can be shortened as compared with the case of using a tube having no heat insulating function.

  Further, the contact angle measuring instrument 60 can easily measure the contact angles of the evaluation plate 40, that is, the unexposed plate 44, the upstream exposed plate 41, the middle exposed plate 42, and the downstream exposed plate 43. As a result, the concentration of the high boiling point organic substance can be evaluated.

  Also, by plotting the difference between the contact angle of the upstream exposure plate 41 and the contact angle of the middle exposure plate 42 (or the downstream exposure plate 43) by the remaining life evaluation device 70 including the remaining life evaluation diagram 72, The remaining life of the activated carbon filter 140 can be evaluated. By evaluating the filter using the filter evaluation system 200 according to the first embodiment, the remaining life of the activated carbon filter 140 can be easily evaluated. As a result, the activated carbon filter 140 can be used up to its original life, and resource saving and cost saving can be realized.

Second Embodiment
In the second embodiment, a case where a droplet diameter is measured and a filter is evaluated will be described. In addition, about the structure similar to 1st Embodiment, the same code | symbol is attached | subjected and description is omitted. The VOC processing device 100 is the same as that in the first embodiment (see FIG. 1). Therefore, explanation is omitted.

  FIG. 8 shows a schematic configuration of a filter evaluation system according to the second embodiment. Hereinafter, the difference from the filter evaluation system 200 according to the first embodiment will be mainly described. The filter evaluation system 210 according to the second embodiment includes a droplet diameter measurement instrument 220 and a magnifying glass 230 instead of the contact angle measurement instrument 60 and the remaining life evaluation apparatus 70.

<< Droplet diameter measuring instrument >>
The droplet diameter measuring instrument 220 is an existing portable measuring instrument that is used for measuring the droplet diameter. The droplet diameter measuring instrument 220 is made of graph paper, and in the second embodiment, as an example, the interval is set to 1 mm. The evaluation plate itself may be graduated. The magnifying glass 230 can be a general purpose one. Instead of the magnifier 230, a loupe may be used.

<Filter evaluation method>
FIG. 9 shows an evaluation flow of the filter according to the second embodiment. In step S01, as an exposure process, the evaluation plate 40 is exposed to air to be treated containing high-boiling organic substances. The evaluation plate 40 subjected to UV ozone treatment is accommodated in the exposure box 30 (upstream exposure box 31, middle exposure box 32, downstream exposure box 33). The exposure time depends on the concentration of high-boiling organic substances contained in the air to be treated. In the case of a high concentration, the exposure time can be set to 0.5 h, for example. In the case of a low concentration, the exposure time can be, for example, 5 to 10 h. Even when the exposure time is 5 to 10 h (low concentration), if there is no difference between the droplet diameter of the upstream exposure plate 41 and the droplet diameter of the downstream exposure plate 43, the concentration of the high boiling point organic substance is usually Since it is assumed that it is lower than the value, it is better to perform the measurement again. Further, in step S01, as the temperature adjustment process, among the evaluation plates 40, the upstream side exposure plate 41,
The temperature of the middle exposure plate 42 and the downstream exposure plate 43 is adjusted. An exposure process and a temperature adjustment process can be performed similarly to 1st Embodiment. Therefore, the detailed description is omitted.

  In step S02-1, the remaining life of the activated carbon filter 140 is evaluated as an evaluation step. First, when the exposure is completed, the exposure box 30 (upstream exposure box 31, middle exposure box 32, downstream exposure box 33) to evaluation plate 40 (upstream exposure plate 41, middle exposure plate 42, downstream exposure plate 43). ) Is taken out. Then, with a general-purpose instrument such as a pipette for dropping water drops, the evaluation plate 40, that is, the upstream exposure plate 41, the middle exposure plate 42, the downstream exposure plate 43, and the unexposed plate used for comparison with these plates. Several microliters to several tens of microliters of water droplets are dropped on the surface of 44. Next, the evaluation plate 40, that is, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 are each evaluated using the droplet diameter measuring instrument 220 and the magnifying glass 230. The droplet diameter of the water droplet dripped onto 40 is measured. Further, the droplet diameter of the dropped water droplet is also measured for the unexposed plate 44.

  The droplet diameter of the dropped water droplet can be measured by the following procedure. Hereinafter, a case where the remaining life of the activated carbon filter 140 is evaluated by measuring the droplet diameters of the upstream exposed plate 41, the downstream exposed plate 43, and the unexposed plate 44 will be described. First, the evaluation plate 40 is placed on the droplet diameter measuring instrument 220 made of graph paper. At this time, the scale of the graph paper (the grid) can be seen through the transparent evaluation plate 40. Next, several μl to several tens of μl of water droplets are dropped on the evaluation plate 40 using an instrument such as a pipette. If the amount of droplets is small, for example, the difference between the droplet size of the upstream exposure plate 41 and the droplet size of the downstream exposure plate 43 may be reduced, and the determination reliability may be reduced. Further, when the amount of droplets is large, for example, the difference between the droplet diameter of the upstream exposure plate 41 and the droplet diameter of the downstream exposure plate 43 increases. However, the shape of the water droplet is likely to be distorted, and the droplet diameter is also easily affected by the levelness and vibration, so that it is possible that the reliability of the determination is lowered. Therefore, the amount of droplets, that is, the amount of water droplets to be dropped is preferably 1 to 200 μl, more preferably 5 to 50 μl. Thereby, a filter can be evaluated simply and accurately.

  Next, the droplet diameter of the evaluation plate 40 is read from the scale (mesh) of the droplet diameter measuring instrument 220 made of graph paper. That is, for each of the upstream exposure plate 41 and the downstream exposure plate 43, the droplet diameter of the water droplets dropped on the evaluation plate 40 is measured. Further, the droplet diameter of the dropped water droplet is also measured for the unexposed plate 44.

Next, the remaining life of the activated carbon filter 140 is evaluated. First, the droplet diameter of the upstream exposed plate 41 is compared with the droplet diameter of the unexposed plate 44. When the droplet diameter of the upstream exposed plate 41 is less than 90% of the droplet diameter of the unexposed plate 44, it is determined that the evaluation is possible. In this case, the remaining life of the activated carbon filter 140 is evaluated in consideration of the droplet diameter of the downstream exposure plate 43. On the other hand, when the droplet diameter of the upstream exposed plate 41 is 90% or more of the droplet diameter of the unexposed plate 44, the difference between the droplet diameter of the upstream exposed plate 41 and the droplet diameter of the unexposed plate 44 is caused. In response, exposure continues. For example, when the droplet diameter of the upstream exposed plate 41 is 91 to 95% of the droplet diameter of the unexposed plate 44, a time equivalent to the previous time to about twice as long as the previous time, Be exposed. For example, when the droplet diameter of the upstream exposed plate 41 is 95% or more of the droplet diameter of the unexposed plate 44, the exposure is further performed for a time more than twice as long as before. Note that when the total exposure time is 5 to 10 hours and the droplet diameter of the upstream exposed plate 41 is 90% or more of the droplet diameter of the unexposed plate 44, the high boiling point organic substance contained in the air to be treated It can be determined that the concentration of is low. In this case, solvent exhaust from the coating machine (processed air) was performed, but it was interrupted due to trouble, product switching, etc., or a very small product was painted (produced) by the coating machine. It is possible to predict the cause such as that the temperature of the drying step is lower than usual and the amount of high-boiling organic substances desorbed in the air has been reduced. Therefore, the cause is confirmed based on the prediction, and the remaining life of the activated carbon filter 140 is evaluated again.

  Here, FIG. 10 shows a measurement example of the droplet diameter by the droplet diameter measuring instrument according to the second embodiment. 10A is an example of the droplet diameter of the unexposed plate, FIG. 10B is an example of the droplet size of the downstream exposed plate, and FIG. 10C is the upstream plate. It is an example of a droplet diameter. In the example of the unexposed plate 44 shown in FIG. 10A, the droplet diameter is 14.1 mm. In the example of the downstream exposure plate 43 shown in FIG. 10B, the droplet diameter is 13.9 mm. In the example of the upstream side exposure plate 41 shown in FIG. 10C, the droplet diameter is 11.9 mm. The evaluation plate 40 (unexposed plate 44, downstream exposed plate 43, upstream exposed plate 41) is made of a glass plate treated with UV ozone, as in the first embodiment. The evaluation plate 40 may be a hydrophilic plate, and may be a glass coating plate, a Si wafer, or a SiO2 film coating plate. In the measurement example shown in FIG. 10, the exposure time was 3 hours. The droplet volume was 20 μl.

  As shown in FIG. 10, the droplet diameter of the upstream exposed plate 41 is 11.9 mm, the droplet diameter of the unexposed plate 44 is 14.1 mm, and it can be determined that there is a difference in appearance. Further, when actually calculated, the droplet diameter of the upstream exposed plate 41 is about 84% of the droplet diameter of the unexposed plate 44, and it is determined that the evaluation is possible. On the other hand, the downstream exposed plate 43 is 13.9 mm, and the difference from the droplet diameter of 14.1 mm of the unexposed plate 44 is difficult to judge visually. From this result, the upstream activated carbon filter 141 has a high high boiling point organic substance concentration, the downstream activated carbon filter 142 has a low high boiling point organic substance concentration, and the upstream activated carbon filter 141 has sufficient removal performance and has not reached the end of its life. Judgment can be made.

  More specifically, the remaining life can be determined as follows, for example. When the droplet diameter of the unexposed plate 44 is X, the droplet diameter of the upstream exposed plate 41 is Y1, and the droplet diameter of the downstream exposed plate 43 is Y2, the reduction ratio A with respect to X of Y1 and X of Y2 The reduction ratio B with respect to is expressed by Expression 1 and Expression 2, respectively. Here, the droplet diameter of the upstream exposed plate 41, the droplet diameter of the downstream exposed plate 43, and the droplet diameter of the unexposed plate 44 correspond to the water droplet information in the present invention and to the high boiling point organic matter adhesion amount information, respectively. Equivalent to.

Reduction ratio A of Y1 with respect to X A = (X−Y1) / X Equation 1
Reduction ratio B of Y2 with respect to X = (X−Y2) / X Equation 2

  FIG. 11 shows an example of the remaining life evaluation table. In the remaining life evaluation table 240 shown in FIG. 11, when (1) A is 0.05 or more and B is (A / 5) or less, there is a remaining life of the activated carbon filter (continuous use is possible), (2) A Is 0.05 or more and B is (A / 5) to (2A / 5), the life of the activated carbon filter is near, (3) A is 0.05 or more, and B is (2A / 5) or more. In the case of, there is no remaining life (continuous use is impossible). In the measurement example of FIG. 10, the reduction rate A is 0.15, the reduction rate B is 0.01, and the reduction rate A / 5 is 0.03 or less. Therefore, in the measurement example of FIG. 10, it is evaluated that there is a remaining life. Thus, the remaining life is evaluated.

<Experimental example>
Also in the experimental example according to the second embodiment, the VOC processing apparatus 100 shown in FIG. 1 was used. The air to be treated is mainly composed of ethyl acetate. The activated carbon filter 140 used removes (treats) high-boiling organic substances having a boiling point of 200 ° C. or higher. As shown in FIG. 2, the activated carbon filter 140 includes an upstream side activated carbon filter 141 and a downstream side activated carbon filter 142, and is provided in series. When replacing the activated carbon filter 140, the upstream activated carbon filter 141 is removed, the downstream activated carbon filter 142 is used as the upstream activated carbon filter 141, and a new activated carbon filter is used as the downstream activated carbon filter 142. As the evaluation plate 40, a commercially available slide glass that is easy to obtain, inexpensive, and easy to handle was used. As pretreatment, a plurality of evaluation plates 40 made of slide glass were subjected to UV ozone cleaning treatment for 10 minutes. Among the evaluation plates 40, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 are accommodated in the upstream exposure box 31, the middle exposure box 32, and the downstream exposure box 33, respectively. The processing air was sucked by the pumps 80, and the evaluation plate 40 was exposed to the processing air. In this experimental example, since the regeneration temperature of the VOC processing apparatus was 140 ° C., the upstream heater exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 among the evaluation plates 40 were set to 140 ° C. by the ribbon heater 50. Warmed up.

  FIG. 12 shows the measurement result of the droplet diameter in the experimental example. FIG. 13 shows a graph of the measurement result of the droplet diameter in the experimental example. FIG. 14 shows a measurement example of the droplet diameter in the experimental example. The circled number 1 at the measurement point corresponds to the upstream exposure box 31 and indicates the measurement result of the droplet diameter of the upstream exposure plate 41. A circled number 2 at the measurement point corresponds to the middle exposure box 32 and indicates the measurement result of the droplet diameter of the middle exposure plate 42. A circled number 3 at the measurement point corresponds to the downstream exposure box 33 and indicates the measurement result of the droplet diameter of the downstream exposure plate 43. The blank at the measurement point indicates the measurement result of the droplet diameter of the unexposed plate 44. FIG. 14A shows the measurement result of the droplet diameter of the upstream exposed plate 41 11 days after the start of sampling (experiment start). FIG. 14B shows the measurement result of the droplet diameter of the middle stage exposure plate 42 11 days after the start of sampling (start of experiment). FIG. 14C shows the measurement result of the droplet diameter of the downstream exposed plate 43 11 days after the start of sampling (start of experiment).

  Immediately after the start of the experiment, the droplet diameter of the unexposed plate 44 is 14.0 mm (blank), whereas the droplet diameter of the middle-stage exposed plate 42 is 13.8 mm (measurement point: number 2 with circles), exposure on the downstream side. The droplet diameter of the plate 43 is 14.0 mm (measurement point: number 3 with a circle), and there is no significant difference. Therefore, it was confirmed that the high-boiling organic substances are hardly contained in the air to be treated. On the other hand, the droplet diameter of the upstream exposure plate 41 is 11.2 mm (measurement point: circled number 1), and there is a difference between the droplet diameter of the unexposed plate 44 and the middle exposure plate 42. It was confirmed that the droplet diameter is larger than the droplet diameter of the downstream exposure plate 43. From this result, it was confirmed that the removal performance of the upstream activated carbon filter 141 is sufficient.

  More specifically, the droplet diameter decreases sharply from the 11th day onward for the middle stage exposure plate 42 and 21st day onwards for the downstream side exposure plate 43, and the liquid on the upstream side exposure plate 41 is about 1 week later. The droplet size is approaching. Therefore, it can be evaluated that the life is about one week after the rapid decrease. For example, assuming that the removal rate is 20 to 30% as a range in which the filter removal function can be surely confirmed, the middle stage exposed plate 42 can be evaluated as having no remaining life (unusable continuously) around the 14th day. Similarly, the downstream exposed plate 43 can be evaluated as having no remaining life (unusable for continuous use) around the 28th day. The remaining life of the downstream side exposure plate 43 is about twice that of the middle stage exposure plate 42, and the filter removal function gradually decreases, so the reliability of this experimental result is considered to be high.

<Effect>
According to the filter evaluation system 210 according to the second embodiment, the evaluation plate 40, that is, the unexposed plate 44, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure is performed by the droplet diameter measuring instrument 220. The contact angle of the plate 43 can be easily measured. As a result, the concentration of the high boiling point organic substance can be evaluated.

Further, the reduction ratio A of the droplet diameter of the upstream exposed plate 41 with respect to the droplet diameter of the unexposed plate 44 and the reduction ratio B of the droplet diameter of the downstream exposed plate 43 with respect to the droplet diameter of the unexposed plate 44 are respectively shown. The remaining life of the activated carbon filter 140 can be evaluated by obtaining and comparing with the remaining life evaluation table 240. The remaining life of the activated carbon filter 140 can be easily evaluated by evaluating the filter with the filter evaluation system 210 according to the second embodiment. As a result, the activated carbon filter 140 can be used up to its original life, and resource saving and cost saving can be realized.

<Third Embodiment>
In the filter evaluation system according to the third embodiment, the surface resistivity is measured to evaluate the filter. Here, FIG. 15 shows an example of a surface resistivity measuring apparatus according to the third embodiment. In the surface resistivity measuring apparatus 250 according to the third embodiment, a metal electrode 251 for measuring surface resistivity is deposited on the glass substrate of the evaluation plate 40. The metal electrode 251 includes a circular first metal electrode 252 formed on the surface of the evaluation plate 40 (glass substrate), an annular second metal electrode 253 formed around the first metal electrode 252, and an evaluation And a third metal electrode 254 formed on the back surface of the plate 40 (glass substrate). A power source 255 and an ammeter 256 are connected in series between the first metal electrode 252 and the second metal electrode 253, and the third metal electrode 254 is grounded. (Ω / □) can be measured. The surface resistivity may be measured, for example, with a portable existing surface resistivity measuring device. The evaluation plate 40 is made of a glass plate treated with UV ozone as in the first embodiment. The evaluation plate 40 may be a plate having a high surface resistivity, and may be a glass coating plate. Further, when a plate having a low surface resistivity such as a Si wafer or a SiO2 film coating plate is used, an insulating film needs to be formed on the surface.

  The remaining life of the activated carbon filter 140 is evaluated as follows, for example. First, the surface resistivity of the upstream exposed plate 41 is compared with the surface resistivity of the unexposed plate 44. When the surface resistivity of the upstream exposed plate 41 is less than 1.5 times the surface resistivity of the unexposed plate 44, it is determined that the evaluation is possible. In this case, the remaining life of the activated carbon filter 140 is evaluated in consideration of the surface resistivity of the downstream exposed plate 43. In addition, since surface resistivity greatly depends on humidity, it is necessary to measure in the same environment. For example, the surface resistivity is measured after each plate 41, 43, 44 is stored in a predetermined temperature and humidity environment for a predetermined time (for example, 24 hours or more in an environment of 23 ° C. and 45% relative humidity).

  Assuming that the surface resistivity of the unexposed plate 44 is X, the surface resistivity of the upstream exposed plate 41 is Y1, and the surface resistivity of the downstream exposed plate 43 is Y2, the resistance value ratios A and Y2 of Y1 to X The resistance value ratio B with respect to X is expressed by Equation 3 and Equation 4, respectively. The surface resistivity of the upstream exposed plate 41, the surface resistivity of the downstream exposed plate 43, and the surface resistivity of the unexposed plate 44 are the upstream exposed plate exposed to the upstream air to be treated and the downstream exposed surface, respectively. This corresponds to the high-boiling point organic matter adhesion amount information on the downstream exposed plate exposed to the air to be treated and the unexposed plate before exposure.

Resistance value ratio of Y1 to X A = Y1 / X Equation 3
Resistance value ratio B of Y2 to X = Y2 / X Equation 4

  FIG. 16 shows an example of the remaining life evaluation table. In the remaining life evaluation table 260 shown in FIG. 16, for example, when (1) A is 2 or more and B is less than 1.2, based on the same idea as the remaining life evaluation using the droplet diameter in the second embodiment. Has a remaining life of the activated carbon filter (continuous use is possible), (2) when A is 2 or more and B is less than 1.2 to 1.5, the life of the activated carbon filter is near, (3) A is 2 When B is 1.5 or more, prepare a remaining life evaluation table with no remaining life (unusable for continuous use), and evaluate the remaining life by applying the resistance ratio A and resistance ratio B. Can do.

According to the filter evaluation system of the third embodiment, the surface resistivity measuring device 250 allows the evaluation plate 40, that is, the unexposed plate 44, the upstream exposed plate 41, the middle exposed plate 42, and the downstream exposed plate. The surface resistivity of 43 can be easily measured. As a result, the concentration of the high boiling point organic substance can be evaluated.

  Further, the resistance increase rate A of the surface resistivity of the upstream exposed plate 41 with respect to the surface resistivity of the unexposed plate 44, and the resistance increase rate B of the surface resistivity of the downstream exposed plate 43 with respect to the surface resistivity of the unexposed plate 44. The remaining life of the activated carbon filter 140 can be evaluated by obtaining each of them and comparing it with the remaining life evaluation table. The remaining life of the activated carbon filter 140 can be easily evaluated by evaluating the filter with the filter evaluation system according to the third embodiment. As a result, the activated carbon filter 140 can be used up to its original life, and resource saving and cost saving can be realized.

<Modification>
In the first embodiment, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 among the evaluation plates 40 are accommodated in the exposure box 30, but the upstream exposure plate 41 among the evaluation plates 40 is accommodated. The middle exposure plate 42 and the downstream exposure plate 43 are directly installed in the chamber 10 of the activated carbon filter, and among the evaluation plates 40, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 are set to the high boiling point. You may expose with the to-be-processed air containing an organic substance. Thereby, the exposure box 30, the tube 20 with heat insulation, and the pump 80 of the exposure box become unnecessary, and simplification of equipment can be realized. When the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 among the evaluation plates 40 are directly installed in the activated carbon filter chamber 10, an inspection port may be provided in the activated carbon filter chamber 10. Thereby, the upstream side exposure plate 41, the intermediate | middle stage exposure plate 42, and the downstream side exposure plate 43 can be easily taken in and out of the evaluation plate 40 through the inspection port. Further, in this case, since it is difficult to heat during exposure, after the exposure, for example, because it is a hot plate, among the evaluation plate 40, the upstream exposure plate 41, the middle exposure plate 42, and the downstream exposure plate 43 are heated. Good.

  Further, as described above, the ribbon heater 50 may be omitted. As a result, the filter evaluation system 200 has a simpler configuration. In addition, when the evaluation plate 40 (upstream exposure plate 41, middle exposure plate 42, downstream exposure plate 43) is not heated, low boiling point organic substances having a lower boiling point than high boiling point organic substances adhere to the evaluation plate 40. It is assumed that Therefore, it is assumed that the evaluation is shorter than the original remaining life. Therefore, the contact angle when the evaluation plate 40 is heated and when it is not heated is measured in advance, and the effect of not heating the evaluation plate 40 is set in advance as a safety factor based on this measurement result. It may be. In the remaining life evaluation apparatus 70 including the remaining life evaluation diagram 72, the reference line 74 may be set in consideration of the safety factor. As described above, when the evaluation plate 40 is not heated, it is assumed that the evaluation is made shorter than the original remaining life. For example, in consideration of the safety factor, the reference line 74 when not heated can be set to be positioned below the reference line 74 when heated. As a result, the filter evaluation system 200 has a simpler configuration, and the filter evaluation method can be performed more easily.

  Further, instead of the heat-insulated tube 20, a heater and a heat insulating material may be wound so that the temperature of the tube can be increased. Thereby, adsorption | suction of the high boiling-point organic substance to the inner wall face of a tube can be reduced.

  The various contents described above can be combined as much as possible without departing from the technical idea of the present invention.

10 ... Activated carbon filter chamber 30 ... Exposure box 31 ... Upstream exposure box 32 ... Middle exposure box 33 ... Downstream exposure box 40 ... Evaluation plate 41 ... Upstream side Exposed plate 42 ... Middle exposed plate 43 ... Downstream exposed plate 44 ... Unexposed plate 50 ... Ribbon heater 60 ... Contact angle measuring device 70 ... Remaining life evaluation device 100 ... -VOC treatment device 110 ... VOC adsorption / desorption rotor 111 ... adsorption zone 112 ... cooling zone 113 ... desorption zone 120 ... treatment vent 130 ... regeneration vent 140 ... activated carbon Filter 200, 210 ... Filter evaluation system

Claims (14)

A method for evaluating a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated, and that evaluates a filter that treats high-boiling organic substances contained in the air to be treated,
An exposure step of exposing an evaluation plate for evaluating the concentration of high-boiling organic substances to the air to be treated upstream of the filter and the air to be treated downstream of the filter;
Drop water droplets on the upstream exposed plate exposed to the upstream treated air, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure, and measure the contact angle of the water droplets And an evaluation step for evaluating the filter based on the comparison result of the contact angle of each evaluation plate,
Evaluation method for filters that process high-boiling organic substances. A temperature adjustment step of adjusting the upstream exposure plate and the downstream exposure plate among the evaluation plates to a temperature at which the VOC is processed;
In the evaluation step, the upstream exposure plate exposed to the upstream processing air and temperature adjusted, the downstream exposure plate exposed to the downstream processing air and temperature adjusted, and the pre-exposure plate The high boiling point organic substance according to claim 1, wherein a water droplet is dropped on each of the unexposed plates, a contact angle of the water droplet is measured, and the filter is evaluated based on a comparison result of a contact angle of each evaluation plate. Filter evaluation method.   In the evaluation step, an actual contact angle consisting of a difference between a contact angle of the upstream exposed plate and a contact angle of the downstream exposed plate, and a reference contact angle defined for each contact angle of the unexposed plate The evaluation method of the filter which processes the high boiling point organic substance of Claim 1 or 2 which evaluates the remaining life of the said filter by comparing these.   The method for evaluating a filter for treating high-boiling organic substances according to any one of claims 1 to 3, wherein a contact angle of the unexposed plate is 15 degrees or less.   5. The temperature adjustment step includes adjusting the temperature of the upstream exposure plate and the downstream exposure plate to 100 to 160 ° C. during or after the exposure step. 6. The evaluation method of the filter which processes the high boiling point organic substance as described in 2. A method for evaluating a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated, and that evaluates a filter that treats high-boiling organic substances contained in the air to be treated,
An exposure step of exposing an evaluation plate for evaluating the concentration of high-boiling organic substances to the air to be treated upstream of the filter and the air to be treated downstream of the filter;
The filter based on the high-boiling organic substance adhesion amount information on the upstream exposed plate exposed to the upstream treated air, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure. Including an evaluation process for evaluating
Evaluation method for filters that process high-boiling organic substances. A method for evaluating a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated, and that evaluates a filter that treats high-boiling organic substances contained in the air to be treated,
An exposure step of exposing an evaluation plate for evaluating the concentration of high-boiling organic substances to the air to be treated upstream of the filter and the air to be treated downstream of the filter;
Water droplet information on the state of water droplets by dropping water droplets on the upstream exposed plate exposed to the upstream treated air, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure. Evaluating the filter based on:
Evaluation method for filters that process high-boiling organic substances.   In the evaluation step, water drops are dropped on the upstream exposed plate exposed to the upstream treated air, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure. The method for evaluating a filter for processing a high-boiling organic substance according to claim 6 or 7, wherein the filter is evaluated based on a comparison result of a droplet diameter of each evaluation plate by measuring a droplet diameter. The evaluation plate has an insulating surface at least,
In the evaluation step, the surface resistivity of each of the upstream exposed plate exposed to the upstream treated air, the downstream exposed plate exposed to the downstream treated air, and the unexposed plate before exposure is set to a constant value. The method for evaluating a filter for treating high-boiling organic substances according to claim 6, wherein the filter is measured under a relative humidity atmosphere and the filter is evaluated based on a comparison result of surface resistivity of each evaluation plate. An evaluation system for a filter that is provided in a VOC processing apparatus that processes VOC contained in air to be treated and evaluates a filter that treats high-boiling organic substances contained in the air to be treated,
For evaluation, including an upstream exposed plate exposed to the treated air upstream of the filter, a downstream exposed plate exposed to the treated air downstream of the filter, and an unexposed plate before exposure An exposed portion that exposes the plate, the upstream exposed plate, and the downstream exposed plate to treated air upstream of the filter and treated air downstream of the filter, respectively. An evaluation system for a filter for processing high-boiling organic substances, comprising an exposure device.   11. The filter evaluation system according to claim 10, wherein the exposure apparatus further includes a temperature adjustment unit that adjusts the upstream exposure plate and the downstream exposure plate to a temperature at which the VOC is processed.   The high boiling point organic substance according to claim 10 or 11, further comprising a measuring instrument for measuring a contact angle or a droplet diameter of a water droplet dropped on each of the evaluation plates, or a surface resistivity of the evaluation plate. Filter evaluation system.   An evaluation apparatus for evaluating the filter based on a comparison result of a contact angle of the evaluation plate, wherein a standard set for each contact angle of the unexposed plate is displayed, and a contact angle of the upstream exposed plate and 13. The evaluation apparatus according to claim 10, further comprising an evaluation device capable of evaluating the remaining life of the filter by plotting an actual contact angle formed by a difference from a contact angle of the downstream exposure plate. Evaluation system for filters that process high boiling point organic matter.   14. The high plate according to claim 10, wherein the evaluation plate is a hydrophilic plate and is made of any one of a glass plate, a glass coating plate, a Si wafer, and a SiO 2 film coating plate. Evaluation system for filters that process boiling organic substances.

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