JP2016156061A - Method for manufacturing metal or metal oxide laminated plastic film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal or metal oxide laminated plastic film capable of enduring use in electronic paper, organic EL display and lighting application, etc., and extremely high in gas barrier performance.SOLUTION: A method for manufacturing a metal or metal oxide laminated plastic film 55 includes continuously depositing a metal or metal oxide film on a plastic film 2 using a vacuum film deposition apparatus having means 3 for feeding the plastic film 2, means 6 and 60 for depositing a metal or metal oxide film and winding means 10 in a vacuum vessel 1. The vacuum film formation apparatus has exhaust speed control means for controlling an exhaust time until a pressure in the vacuum vessel 1 reaches a pressure of 1kPa from the atmospheric pressure, and the exhaust time is 270 sec/mor more to the volume of the vacuum vessel 1. The film deposition surface on the plastic film 2 is subjected to foreign matter removal treatment before the plastic film 2 enters into the film deposition means 6 and 60 and enters into the winding means 10.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a metal or metal oxide laminated plastic film having extremely excellent gas barrier performance used for packaging for food, pharmaceuticals, etc., and for electronic devices such as solar cells, electronic paper, organic EL displays and lighting. It relates to the manufacturing method.

  On the surface of a plastic film, a physical vapor deposition method (PVD method) such as a vacuum deposition method, a sputtering method, an ion plating method, a plasma chemical vapor deposition method, a thermal chemical vapor deposition method, a photochemical vapor deposition method, etc. Inorganic compounds such as metal oxides such as aluminum oxide, silicon oxide, and magnesium oxide, nitrides such as aluminum nitride and silicon nitride, and carbides such as silicon carbide, using the chemical vapor deposition method (CVD method) of The gas barrier film formed by forming a thin film is used as a packaging material for foods and pharmaceuticals that needs to be blocked from water vapor and oxygen, and as a member for electronic devices such as solar cells, electronic paper, organic EL displays, and lighting. ing.

  As a technology for producing a gas barrier film having excellent gas barrier properties, for example, a gas containing an organic silicon compound vapor and oxygen on a plastic film is mainly used for silicon oxide by a plasma CVD method, and carbon, hydrogen, silicon And a method of improving gas barrier properties while maintaining transparency by forming a compound containing at least one kind of oxygen (Patent Document 1).

  Many of the processing steps to manufacture these gas barrier films use a vacuum process, and foreign substances such as dust and dust of inorganic compounds adhering to the vacuum vessel rise by the sudden air flow by evacuation, and the plastic film substrate If these foreign substances adhere to the surface, the inorganic compound thin film having a uniform thickness is not formed on the plastic film when the inorganic compound thin film is formed, and surface defects such as irregularities are likely to occur. In addition, if a foreign substance adheres to the surface of the plastic film opposite to the surface on which the inorganic compound thin film layer is formed, the inorganic compound thin film layer forming surface is wound up facing the surface, so that it is stacked on the wound roll. The protrusion-like deformation thus formed is formed, the defect of cracks and scratches occurs in the inorganic compound thin film layer, and the deterioration of the gas barrier property becomes a problem.

JP 2011-201302 A

  It is an object of the present invention to provide a method for producing a metal or metal oxide laminated plastic film having extremely high gas barrier performance that can withstand the use of electronic paper, organic EL displays, lighting applications, etc., which has been difficult with the prior art. To do.

  In order to solve the above problems, the present invention has the following configuration.

In the first invention, a metal or metal oxide is continuously formed on a plastic film by using a vacuum film forming apparatus having a plastic film unwinding means, a metal or metal oxide film forming means, and a winding means in a vacuum vessel. A method of manufacturing a metal or metal oxide laminated plastic film for forming a film, wherein the vacuum film forming apparatus adjusts an exhaust time until the pressure in the vacuum vessel is changed from atmospheric pressure to 1 kPa. A speed adjusting means, wherein the evacuation time is 270 seconds / m ³ or more with respect to the volume of the vacuum vessel, and the film-forming surface of the plastic film is disposed before the plastic film enters the film-forming means and the winding It is a manufacturing method of the metal or metal oxide laminated plastic film characterized by carrying out a foreign substance removal process before entering the removing means.

  According to a second aspect of the present invention, a foreign matter removing process is performed on the surface of the plastic film opposite to the metal or metal oxide film forming surface after the plastic film has passed through the metal or metal oxide film forming means. And

  According to a third aspect of the present invention, the foreign matter removing process comprises a method of removing foreign matter by bringing a slightly adhesive roll into contact therewith.

  The fourth invention is characterized in that the metal or metal oxide film forming means is sputtering.

  The fifth invention is characterized in that the metal or metal oxide comprises at least one of zinc, silicon, aluminum, copper, tin, zinc oxide, silicon oxide, and aluminum oxide.

  A sixth invention is characterized in that, in the fifth invention, the metal or the metal oxide comprises a mixture of zinc oxide, silicon oxide, and aluminum oxide.

  It is possible to provide a method for producing a metal or metal oxide laminated plastic film having extremely high gas barrier performance that can withstand the use of electronic paper, organic EL displays, lighting applications, and the like, which has been difficult with conventional techniques.

It is a schematic side view which shows an example of the structure in the vacuum chamber of the vacuum film-forming apparatus in this invention. It is a schematic side view which shows another example of the winding mechanism in the vacuum film-forming apparatus in this invention. It is the schematic which shows an example of the foreign material removal processing method in this invention. It is an exhaust system diagram of the vacuum vessel in the present invention.

  Below, the manufacturing method of the metal or metal oxide laminated plastic film of this invention is demonstrated.

The method for producing a metal or metal oxide laminated plastic film of the present invention uses a vacuum film forming apparatus having a plastic film unwinding means, a metal or metal oxide film forming means, and a winding means in a vacuum vessel. A method for producing a metal or metal oxide laminated plastic film in which a metal or metal oxide is continuously formed on a plastic film, wherein the vacuum film forming apparatus is configured such that the pressure in the vacuum container is from atmospheric pressure to 1 kPa. An evacuation speed adjusting means for adjusting an evacuation time until the evacuation time reaches 270 seconds / m ³ or more with respect to the volume of the vacuum vessel, and the plastic film is formed on the film forming surface. Foreign matter removal treatment is performed before entering the metal or metal oxide film forming means and before entering the winding means.

  In the present invention, the plastic film is not particularly limited as long as it is a film made of an organic polymer compound. For example, polyolefin such as polyethylene or polypropylene, polyester such as polyethylene terephthalate or polyethylene naphthalate, polyamide, polycarbonate, polystyrene, polyvinyl Films made of various polymers such as alcohol, saponified ethylene vinyl acetate copolymer, polyacrylonitrile, polyacetal, and the like can be used. A film made of polyethylene terephthalate or polypropylene is preferable. The polymer constituting the plastic film may be either a homopolymer or a copolymer, and may be used alone or in combination.

  The metal or metal oxide in the present invention comprises at least one of zinc, silicon, aluminum, copper, tin, zinc oxide, silicon oxide, and aluminum oxide, but other than these can also be used. When a metal oxide is used, a gas barrier film can be formed transparently. When it is necessary to obtain a transparent gas barrier film, it is more preferable to use a metal oxide. The metal oxide is particularly preferably a mixture of all the metal compounds from the viewpoint of improving gas barrier properties. Silicon is a metalloid element, but is referred to as a metal element in the present invention.

  In the present invention, a vacuum film forming apparatus as shown in FIG. 1 can be used. FIG. 1 is a schematic side view showing an example of the structure in the vacuum chamber of the vacuum film forming apparatus of the present invention.

  In FIG. 1, the plastic film 2 is unwound in the vacuum container 1 in the order of unwinding means 3, guide rolls 7 and 50, cooling roll 5, guide rolls 51, 52 and 53, and winding means 10. It is arranged so that it can be taken. Further, foreign matter removing means 4, 8, and 9 are provided on the surfaces of the cooling roll 5, the guide roll 51, and the guide roll 53 so as to contact the plastic film 2 or the metal or oxide laminated plastic film. Further, film forming means 6 and 60 are installed facing the peripheral surface of the cooling roll 5. After the plastic film 2 mounted on the unwinding means 3 passes through the guide rolls 7 and 50, the foreign matter adhered to the metal or metal oxide film forming surface by the foreign matter removing device 4 is removed immediately before the cooling roll 5, Thereafter, while being transported on the surface of the cooling roll 5, a desired metal or metal oxide material is formed into a film on the plastic film 2 by sputtering or reactive vapor deposition by the film forming means 6 and 60.

  In the example of FIG. 1, two film forming units 6 and 60 are installed, and a metal or metal oxide material to be formed is installed here to form a film on the surface of the plastic film 2. Sputtering is preferable as the film forming means. The metal or metal oxide laminated plastic film 55 on which the metal or metal oxide film is processed is removed by the foreign substance removing device 8 on the back surface of the film formation surface while being supported by the guide roll 51. Thereafter, after the metal or metal oxide laminated plastic film passes through the guide roll 52, the foreign matter attached to the film formation surface is removed by the foreign matter removing device 9 on the surface of the guide roll 53. Thereafter, the metal or metal oxide laminated plastic film 55 is wound up by the winding means 10.

  The plastic film 2 and the metal or metal oxide laminated plastic film 55 in the vacuum container 1 can be transported by a roll driven by a motor and several guide rolls. For example, the unwinding means 3, the winding means 10 and the cooling roll 5 are preferably drive rolls, and may be guide rolls 7, 50, 51, 52, 53 drive rolls or free rotating rolls.

  Next, the adjustment / adjustment means for the exhaust time of the air in the vacuum vessel in the present invention will be described. The vacuum film forming apparatus includes an exhaust speed adjusting unit that adjusts an exhaust time until the pressure in the vacuum vessel is changed from atmospheric pressure to 1 kPa.

  FIG. 4 is an exhaust system diagram of the vacuum vessel. Generally, vacuum pumping is performed using a rotary pump 13 (hereinafter referred to as RP), a mechanical booster pump 14 (hereinafter referred to as MBP), and an oil diffusion pump 15 (hereinafter referred to as DP) in order. A main pulling valve 16 (hereinafter referred to as MV) is provided between the vacuum vessel and DP, and a roughing valve 17 (hereinafter referred to as RV) is provided between the vacuum vessel and MVP. An auxiliary valve 18 (hereinafter referred to as FV) is installed between DP and MBP to partition main pulling and roughing.

  Roughing means depressurizing the vacuum container with RP and MBP, and main pulling refers to depressurizing the vacuum container with DP.

  In the present invention, one preferred embodiment of exhausting without raising dust is a method of installing an exhaust valve 19. When starting to depressurize the vacuum vessel, the moment the RV is opened, the metal or metal oxide dust or dust accumulated in the vacuum chamber is raised by the impact of exhausting the air in the vacuum chamber, and the plastic film 2 Foreign matter adheres to it, or adheres to the fine adhesive roll 11 and strong adhesive roll 12 and reduces the foreign matter removal capability. By installing the exhaust valve 19 between MBP and RV, it is possible to slowly raise the dust without raising it. Can be exhausted. For example, it is preferable to use a device that variably adjusts the exhaust velocity, such as a variable soft back filter automatic control system manufactured by Covalent Materials Corporation. However, a single pipe with a small inner diameter may be used as long as the exhaust can be performed slowly without a function for adjusting the exhaust speed, and a single pipe with a different inner diameter may be switched.

About the speed | rate to exhaust, although it changes with the capacity | capacitance of a vacuum vessel, it is important to exhaust in time of 270 second / m < ³ > or more, More preferably, it is 300 second / m < ³ > or more. However, the upper limit is preferably in the range of 540 seconds / m ³ . When a time exceeding 540 seconds / m ³ is applied, although dust winding does not occur, it takes a longer time than necessary to reach the degree of vacuum used for film formation. At a pressure of 1 kPa or less, even if the pump is fully opened and exhausted, foreign matter hardly rises and does not adhere to the plastic film or the adhesive roll.

  In the present invention, the foreign matter removing device 4 is used before film formation on the plastic film 2 deposition surface, and the foreign matter adhered to the back surface and the film formation surface by the foreign matter removal devices 8 and 9 after film formation is formed. It is preferred that it be removed.

  In the present invention, one preferred embodiment of the foreign matter removing means includes a method using a slightly adhesive roll. FIG. 2 is a schematic side view showing another example of a winding mechanism in the vacuum film forming apparatus. In FIG. 2, the slightly adhesive roll 11 as the foreign matter removing means removes foreign matter from the metal or metal oxide laminated plastic film 55. The material of the slightly adhesive roll is not particularly limited, but a material based on butyl rubber or silicon rubber can be used. For example, “MIMOSA” ST and “MIMOSA” B-MT manufactured by Miyagawa Roller Co., Ltd., XCH390 manufactured by TEKNEK Co., Ltd., and EC Cleaner S, Kauki Roller Manufacturing Co., Ltd. are suitable. can do. The diameter of the slightly adhesive roll is preferably as large as possible within the range that can be installed in the film forming apparatus.

  Further, in order to maintain the foreign matter removal performance of the fine adhesive roll, the strong adhesive roll 12 is installed in the rear, brought into contact with the fine adhesive roll, and the foreign matter removed by the fine adhesive roll is transferred to remove the foreign matter from the fine adhesive roll 12. Performance can be sustained. The strong adhesive roll 12 needs to have a stronger adhesive force than the slightly adhesive roll. However, if the adhesive strength is too strong, care should be taken because the adhesive material of the slightly adhesive roll may be peeled off.

  As shown in FIG. 3, the foreign matter removing method may be a method in which the traveling plastic film 2 or the metal or metal oxide laminated plastic film 55 is vertically sandwiched between fine adhesive rolls and the adhered foreign matter on both sides is removed simultaneously. Also in that case, the foreign matter removal performance of the fine adhesive roll can be maintained by installing a strong adhesive roll behind the fine adhesive roll, contacting the fine adhesive roll, and transferring the foreign matter removed by the fine adhesive roll.

  However, when the slightly adhesive roll is brought into contact with the metal or metal oxide laminated plastic film, care should be taken because the metal or metal oxide thin film may be damaged if the contact pressure is too high.

  As the type of the slightly adhesive roll 11, (a) a type in which one slightly adhesive roll 11 is applied to the metal oxide laminated plastic film and the surface of the slightly adhesive roll 11 is cleaned for each batch, and (b) the adhesive sheet is used as a roll. A type in which the slightly adhesive roll 11 is applied to the surface of the metal or metal oxide laminated plastic film, and the adhesive sheet is exchanged for each batch. (C) A separate roll is nipped on the slightly adhesive roll 11 and the adhesive sheet is wound around the nip roll. A type in which the pressure-sensitive adhesive sheet is replaced every time can be selected as necessary.

  It is preferable to select an appropriate range for the adhesive strength of the slightly adhesive roll 11 for a plastic film on which a metal or metal oxide is formed. Moreover, it is preferable to select the slightly adhesive roll 11 and the strong adhesive roll 12 that are made of a material that minimizes the bleed-out of low-molecular substances from the adhesive surface.

  According to a preferred embodiment of the method for producing a metal or metal oxide laminated plastic film of the present invention, it is preferable to use a slightly adhesive roll having as little adhesive force as possible to the adherend surface. Regarding the adhesive strength, those having an adhesive strength in the range of 200 to 800 hPa are suitable in the evaluation method described later. As for the lower limit of adhesive strength, fine adhesive strength (foreign matter removal property) is such that a small amount of fine powder such as magnesium oxide is sprayed on the adherend surface, and the fine adhesive roll is rolled onto it. ).

  Moreover, the measurement of adhesive force can also be performed as follows. Attach a stainless steel rectangular sample table that can be overlapped with two upper and lower 10 mm square planes to a tensile tester, and attach a piece of adhesive material on one side and a piece of adherend on the other side using double-sided adhesive tape After applying a load of 3 kg at room temperature and normal humidity for 10 seconds, a tensile test is performed, and the maximum stress when the adhesive material and the adherend peel off is defined as the adhesive strength. In the adhesive force by such a forced test, the suitable range of the adhesive force with respect to the film-forming surface of the plastic film 2 or the film-forming surface of the metal or metal oxide laminated plastic film or the back surface of the film-forming surface was 200 to 800 hPa.

  In addition, when the slightly adhesive roll is brought into contact with the plastic film to be transported or the metal or metal oxide laminated plastic film, if the holding angle is too large, wrinkles or poor flatness may be caused. The range of an appropriate holding angle is preferably 1 to 50 °, more preferably 5 to 30 °.

  In the present invention, in order to prevent the metal or metal oxide laminated plastic film from being wound around the fine adhesive roll 11, the roll is driven immediately after the fine adhesive roll 11 or the subsequent roll, and the fine adhesive roll 11 is compared with before the fine adhesive roll 11. Draw may be applied so that the speed of the subsequent metal or metal oxide laminated plastic film is slightly increased. The draw value is about 0.1% or less as a general value in the conveyance of a metal or metal oxide laminated plastic film.

  In addition, as an index of a preferable form of the surface of the slightly adhesive roll, there is a change amount of the contact angle. It is preferable that the adhesive roll is rolled back and forth on the plastic film, and the change in contact angle with pure water before and after that does not exceed 30 °.

Hereinafter, although the specific example of the manufacturing method of the metal or metal oxide laminated plastic film of this invention is demonstrated, this invention is not limited to these Examples.
[Evaluation method]
An evaluation method in each example and comparative example will be described. The number of evaluation n was n = 5 and the average value was obtained unless otherwise specified.

(1) Confirmation of surface quality The surface of a metal or metal oxide laminated plastic film (300 mm x 500 mm) is observed with a stereomicroscope (magnification 40 times), and surface defects with a size of 20 μm or more are marked, and these defects are further observed. Was measured with a laser microscope (VK8500, manufactured by Keyence Corporation) to determine whether it was a protrusion or a dent, and the number of dents having a depth of 2.0 μm or more was counted. 0 to 4 pieces were accepted, and 5 or more pieces were judged unacceptable because the surface quality was uneven.

(2) Thickness of laminated metal or metal oxide layer Samples for stepped surface observation using the microsampling system (Hitachi FB-2000A) by the FIB method (specifically “Polymer Surface Processing Studies” (Akira Iwamori) Author) Based on the method described in p. The cross section of the observation sample was observed with a transmission electron microscope (H-9000UHRII manufactured by Hitachi) at an acceleration voltage of 300 kV, and the metal or metal oxide laminate thickness was determined.

(3) Water vapor transmission rate (g / (m ² · 24h))
The measurement was performed using a water vapor transmission rate measuring device “DELTAPERRM” manufactured by Technolox of England under the conditions of a temperature of 40 ° C., a relative humidity of 90%, and a measurement area of 50 cm ² . The number of samples was 2 samples per level, the number of measurements was 5 for each sample, and the average value of the 10 points obtained was the water vapor transmission rate (g / (m ² · 24 h)). Value metal oxide laminate film of water vapor permeability is ^{1 × 10 -3 g / (m} 2 · 24h) below, the metal laminated film is evaluated as acceptable of less than ^{1.0g / (m 2 · 24h)} , more Things were rejected.

Example 1
In FIG. 1, a polyethylene terephthalate film (“Lumirror” (registered trademark) U48 manufactured by Toray Industries, Inc.) having a thickness of 100 μm was used as the plastic film 2. The capacity of the vacuum vessel 1 was 0.65 m ³ , and the unwinding means 3, the cooling roll 5, and the winding means 10 were drive rolls. The guide rolls 7, 50, 51, 52 and 53 were free rotating rolls, and the film forming means 6 and 60 were sputtering devices. The exhaust system of FIG. 4 was used as the exhaust system for exhausting the vacuum apparatus, and the variable-type soft back filter automatic control system manufactured by Covalent Materials was used as the exhaust speed adjusting means. This device measures the degree of vacuum in the vacuum vessel 1 with a vacuum gauge (not shown) and automatically controls the exhaust port diameter, and can be set to an arbitrary exhaust time from atmospheric pressure to 1 kPa. In this example, the exhaust was performed from atmospheric pressure to 1 kPa over 330 seconds, and thereafter, the pump was fully opened and exhausted to 2.5 × 10 ⁻³ Pa. As a foreign matter removing means, a slightly adhesive roll “MIMOSA” B-ST manufactured by Miyagawa Roller Co., Ltd. was used for the sputtering film formation surface before and after sputtering, and for the non-sputtering surface only after sputtering. (Adhesive strength: 500 hPa) A sputtering apparatus uses a target obtained by sintering a mixture of zinc oxide / silicon dioxide / aluminum oxide, and argon gas and oxygen gas (oxygen gas partial pressure is 2 × 10 ⁻¹ Pa). 10%). Argon / oxygen gas plasma was generated by applying an applied power of 4000 W from a DC power source, and an oxide layer was formed to 150 nm on the surface of the plastic film 2 by sputtering to produce a metal oxide laminated plastic film.

The thickness of the oxide layer was adjusted by the film conveyance speed. As a result, the surface quality inspection was 0 with the number of dents, and the water vapor transmission rate passed with 5 × 10 ⁻⁴ g / (m ² · 24 h).

(Example 2)
In Example 1, only the exhaust time from atmospheric pressure to 1 kPa was changed to 180 seconds, and other conditions were the same. As a result, the surface quality inspection was acceptable with a number of dents of 4 and a water vapor transmission rate of 9 × 10 ⁻⁴ g / (m ² · 24 h), but a lower quality than in Example 1 was confirmed.

(Example 3)
In Example 1, only the slightly adhesive roll on the non-sputtering surface was removed, and the others were the same. As a result, the surface quality inspection was acceptable with a dent number of 2 and a water vapor transmission rate of 6 × 10 ⁻⁴ g / (m ² · 24 h), but a slight deterioration in quality was confirmed compared to Example 1.

(Example 4)
In Example 1, aluminum having a purity of 99.99% was used as a target in the sputtering apparatus, and the only introduced gas was argon gas. A 150 nm aluminum metal layer was formed on the surface of the plastic film 2 by sputtering to produce a metal laminated plastic film.

The thickness of the metal layer was adjusted by the film conveyance speed. As a result, the surface quality inspection passed with 0 dents and a water vapor transmission rate of 0.6 g / (m ² · 24 h).

(Comparative Example 1)
In Example 1, the exhaust speed adjusting means was exhausted from atmospheric pressure to 1 kPa without being controlled in the exhaust port diameter fully opened state. The exhaust time was 100 seconds. Further, without using the foreign matter removing means, the fine adhesive roll was removed, and the film was formed without changing the others, and an oxide layer was formed on the surface of the plastic film 2 to produce a metal oxide laminated plastic film. did.

As a result, the surface quality inspection was 10 dents and the water vapor transmission rate was 6 × 10 ⁻³ g / (m ² · 24 h), both of which were unacceptable.

(Comparative Example 2)
In Example 1, the exhaust speed adjusting means was not controlled in the exhaust port diameter fully opened state, and the exhaust time was 100 seconds from atmospheric pressure to 1 kPa. However, other conditions and foreign matter removing means were the same as in Example 1. As a result, the surface quality inspection was 7 dents and the water vapor transmission rate was 3 × 10 ⁻³ g / (m ² · 24 h), both of which were unacceptable.

(Comparative Example 3)
In Example 1, the fine adhesive roll was removed without using the foreign matter removing means. Other conditions and the exhaust speed adjusting means were the same as those in Example 1. As a result, the surface quality inspection had 8 dents and the water vapor transmission rate was 5 × 10 ⁻³ g / (m ² · 24 h), both of which were unacceptable.

  Table 1 shows the results of the examples and comparative examples.

(Comparative Example 4)
In Example 4, the exhaust speed adjusting means was exhausted from atmospheric pressure to 1 kPa without being controlled in the exhaust port diameter fully opened state. The exhaust time was 100 seconds. Further, without using the foreign matter removing means, the film was formed without changing the other with the slightly adhesive roll removed, and an aluminum metal layer having a thickness of 150 nm was formed on the surface of the plastic film 2 to produce a metal laminated plastic film.

As a result, the surface quality inspection was 9 dents and the water vapor transmission rate was 1.8 g / (m ² · 24 h), both of which were unacceptable.

  Since the metal or metal oxide laminated plastic film according to the present invention is excellent in gas barrier performance such as water vapor and oxygen, it can be used for display elements such as solar cells and organic EL displays. For example, in an organic thin-film solar cell, an organic thin-film solar cell with a small decrease in power generation performance is provided by sandwiching a light-emitting layer from one side or both sides with a metal or metal oxide laminated plastic film according to the present invention. Can do. Further, in the organic EL display, an organic EL display with a small decrease in light emission characteristics can be provided by sandwiching the light emitting layer from one side or both sides with the metal or metal oxide laminated plastic film according to the present invention.

DESCRIPTION OF SYMBOLS 1 Vacuum container 2 Plastic film 3 Unwinding means 4 Foreign matter removal means 5 Cooling roll 6 Film forming means 7 Guide roll 8 Foreign matter removal means 9 Foreign matter removal means 10 Winding means 11 Slightly adhesive roll 12 Slightly adhesive roll 13 Rotary pump (RP)
14 Mechanical booster pump (MBP)
15 Oil diffusion pump (DP)
16-pull valve (MV)
17 Roughing valve (RV)
18 Auxiliary valve (FV)
19 Exhaust valve 50 Guide roll 51 Guide roll 52 Guide roll 53 Guide roll 55 Metal or metal oxide laminated plastic film 60 Film forming means

Claims (6)

Metal that continuously deposits metal or metal oxide on a plastic film using a vacuum film forming apparatus having a plastic film unwinding means, a metal or metal oxide film forming means, and a winding means in a vacuum vessel Or a method for producing a metal oxide laminated plastic film,
The vacuum film-forming apparatus has an exhaust speed adjusting means for adjusting an exhaust time until the pressure in the vacuum container is changed from atmospheric pressure to a pressure of 1 kPa,
The evacuation time is 270 seconds / m ³ or more with respect to the volume of the vacuum vessel;
A method for producing a metal or metal oxide laminated plastic film, wherein the film-forming surface of the plastic film is subjected to foreign matter removal treatment before the plastic film enters the film forming means and before entering the winding means. 2. The foreign matter removing treatment is performed on the surface of the plastic film opposite to the metal or metal oxide film forming surface after the plastic film passes through the metal or metal oxide film forming means. The manufacturing method of the metal or metal oxide laminated plastic film of description. The method for producing a metal or metal oxide laminated plastic film according to claim 1 or 2, wherein the foreign matter removal treatment comprises a method of removing the foreign matter by contacting a slightly adhesive roll. The method for producing a metal or metal oxide laminated plastic film according to any one of claims 1 to 3, wherein the metal or metal oxide film forming means is sputtering. The metal according to any one of claims 1 to 4, wherein the metal or metal oxide comprises at least one of zinc, silicon, aluminum, copper, tin, zinc oxide, silicon oxide, and aluminum oxide. Or the manufacturing method of a metal oxide laminated plastic film. 6. The method for producing a metal or metal oxide laminated plastic film according to claim 5, wherein the metal or metal oxide comprises a mixture of zinc oxide, silicon oxide, and aluminum oxide.