JP2016149599A - Vibrator, oscillator, real-time clock, electronic apparatus, and mobile body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrator capable of reducing an impact added to a vibration arm when the vibration arm deforms in a thickness direction by an external impact.SOLUTION: A vibrator 100 includes a base 122, a basal portion 10 including a fitting portion 18 mounted on the base 122, vibration arms 20a, 20b extending from the basal portion 10, and an impact buffering arm 30 extending from the basal portion 10. A protrusion 150 is disposed on at least either a region in a main surface of the base 122 opposing to the impact buffering arm 30 or a region in the impact buffering arm 30 opposing to the main surface of the base 122.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a vibrator, an oscillator, a real-time clock, an electronic device, and a moving object.

  Electronic devices such as vibrators and oscillators are used in small information devices such as HDDs (hard disk drives), mobile computers, and IC cards, and mobile communication devices such as mobile phones, car phones, and paging systems. Widely used. In recent years, along with the downsizing and thinning of electronic devices, the vibrators have been further downsized and thinned. As such vibrators become smaller and thinner, impact resistance has become a problem.

  For example, in a vibrator that has been reduced in size and thickness, when the vibrating arm is deformed in the thickness direction due to an external impact, the vibrating arm may come into contact with the package base and a large impact may be applied to the vibrating arm.

  In order to solve this problem, for example, in the vibrator described in Patent Document 1, the mounting surface of the base portion has a recess formed in a portion adjacent to the free end of the vibrating arm, and the vibrating arm is mounted on the mounting surface. The middle portion of the vibrating arm comes into contact with the corner portion of the concave portion with a flat surface in its entire width when it is swung toward. Therefore, when the vibrating arm swings up and down greatly due to an impact such as falling, the vibrating arm can be received by distributing the shock over the entire width of the vibrating arm by contacting the corner of the recess. Can do.

  For example, in the vibrator described in Patent Document 2, a recess is formed in a region of the bottom surface of the package facing the tip of the vibrating arm, and the recess is filled with a damper. Therefore, even if the vibrating arm is deformed by an impact such as dropping, the vibrating arm can come into contact with the damper and the damper can absorb the kinetic energy of the vibrating arm. As a result, the vibration arm can be prevented from being greatly deformed.

  Further, for example, in the vibrator described in Patent Document 3, a bump (buffer part) having a resin core is provided on the base facing the tip side of the vibrating arm, and even when an impact is applied by dropping or the like, Bumps (buffer parts) absorb the impact.

  Further, for example, in the vibrator described in Patent Document 4, the mounting portions (mounting portions) of the holding arms arranged on both sides of the vibrating arm are arranged on the distal end side of the vibrating arm with respect to the center of gravity of the vibrating arm. For this reason, it is possible to prevent the vibration arm base from colliding with the package by preferentially displacing the base side of the vibration piece when an impact due to dropping is applied.

  Further, for example, in the vibrator described in Patent Document 5, since the fixing arms arranged on both sides of the vibrating arm are bonded to the base body at a position near the center of gravity of the vibrating piece, the bonding portion is the vibrating piece. It will be located in the vicinity of the center of gravity, and the bending moment of the vibrating arm can be distributed on both sides of the joint. As a result, when an external impact is applied, the amount of displacement of the tip of the vibrating arm can be reduced, and collision with the inside of the package can be effectively prevented.

JP 2010-119127 A JP 2010-141387 A JP 2009-212905 A JP 2010-119128 A JP 2004-297198 A

  However, the vibrator described above may not be able to sufficiently reduce the impact applied to the vibrating arm, and a vibrator that can further reduce the impact applied to the vibrating arm is desired.

  One of the objects according to some aspects of the present invention is to provide a vibrator that can reduce the impact applied to the vibrating arm when the vibrating arm is deformed in the thickness direction by an external impact. is there. Another object of some aspects of the present invention is to provide an oscillator, a real-time clock, an electronic device, and a moving body including the vibrator.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following aspects or application examples.

[Application Example 1]
The vibrator according to this application example is
Base and
A base including a mounting portion attached to the base;
A vibrating arm extending from the base;
An impact buffer arm extending from the base;
Including
Protrusions are provided in at least one of a region of the main surface of the base that faces the shock buffer arm and a region of the shock vibration arm that faces the main surface of the base.

  In such a vibrator, a convex portion is provided in at least one of the region facing the shock absorbing arm on the main surface of the base and the region facing the main surface of the base of the shock vibrating arm. When the vibrating arm is deformed in the thickness direction by an impact from the outside, the shock can be absorbed by the shock absorbing arm before the vibrating arm contacts the main surface of the base. Therefore, in such a vibrator, when the vibrating arm is deformed in the thickness direction by an external shock, the shock can be absorbed by the shock absorbing arm, and the shock applied to the vibrating arm can be reduced.

[Application Example 2]
In the vibrator according to this application example,
The material of the convex part may be the same as the material of the base.

  In such a vibrator, for example, the convex portion can be formed integrally with the base.

[Application Example 3]
In the vibrator according to this application example,
The surface of the convex part may be softer than at least one of the base and the shock absorbing arm.

  In such a vibrator, since the surface of the convex portion is softer than at least one of the base and the shock absorbing arm, the shock can be absorbed more by the shock absorbing arm, and the shock applied to the vibrating arm can be further reduced. .

[Application Example 4]
In the vibrator according to this application example,
The base may include a lid that forms a space for accommodating the base, the vibrating arm, and the shock absorbing arm.

  In such a vibrator, the base, the vibrating arm, and the shock absorbing arm can be protected.

[Application Example 5]
The oscillator according to this application example is
One of the above vibrators,
An oscillation circuit electrically connected to the vibrator;
It has.

  Since such an oscillator includes any one of the vibrators described above, the impact resistance can be improved.

[Application Example 6]
The real-time clock according to this application example is
One of the above vibrators,
An oscillation circuit electrically connected to the vibrator;
Based on a signal output from the oscillation circuit, a clock circuit that generates date and time data,
It has.

  Since such a real-time clock includes any one of the vibrators described above, impact resistance can be improved.

[Application Example 7]
The electronic device according to this application example is
One of the above vibrators is provided.

  Since such an electronic device includes any one of the vibrators described above, impact resistance can be improved.

[Application Example 8]
The mobile object according to this application example is
One of the above vibrators is provided.

  Since such a moving body includes any one of the vibrators described above, impact resistance can be improved.

FIG. 3 is a plan view schematically showing the vibrator according to the first embodiment. FIG. 3 is a cross-sectional view schematically showing the vibrator according to the first embodiment. FIG. 3 is a cross-sectional view schematically showing the vibrator according to the first embodiment. Sectional drawing which shows typically the modification of the convex part of the vibrator | oscillator which concerns on 1st Embodiment. FIG. 3 is a cross-sectional view schematically showing the vibrator according to the first embodiment. FIG. 6 is a plan view schematically showing a vibrator according to a first modification of the first embodiment. FIG. 6 is a cross-sectional view schematically showing a vibrator according to a first modification of the first embodiment. FIG. 6 is a cross-sectional view schematically showing a vibrator according to a first modification of the first embodiment. FIG. 6 is a plan view schematically showing a vibrator according to a second modification of the first embodiment. FIG. 6 is a plan view schematically showing a vibrator according to a third modification of the first embodiment. FIG. 6 is a cross-sectional view schematically showing a vibrator according to a third modification of the first embodiment. The top view which shows typically the vibrator | oscillator concerning 2nd Embodiment. The top view which shows typically the vibrator | oscillator which concerns on the 1st modification of 2nd Embodiment. The top view which shows typically the vibrator | oscillator which concerns on the 2nd modification of 2nd Embodiment. FIG. 10 is a plan view schematically showing a vibrator according to a third modification of the second embodiment. The top view which shows typically the vibrator | oscillator concerning 3rd Embodiment. Sectional drawing which shows typically the vibrator | oscillator concerning 3rd Embodiment. The figure for demonstrating the modification of the connection method of a base end part and an outer frame part. The figure for demonstrating the modification of the connection method of a base end part and an outer frame part. Sectional drawing which shows the oscillator which concerns on 4th Embodiment typically. The functional block diagram of the real-time clock which concerns on 5th Embodiment. The top view which shows typically the electronic device which concerns on 6th Embodiment. The perspective view which shows typically the electronic device which concerns on 6th Embodiment. The perspective view which shows typically the electronic device which concerns on 6th Embodiment. The perspective view which shows typically the electronic device which concerns on 6th Embodiment. The top view which shows typically the mobile body which concerns on 7th Embodiment. Sectional drawing which shows typically an example of the vibrator | oscillator which concerns on this modification.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. 1. First embodiment 1.1. First, the vibrator according to the first embodiment will be described with reference to the drawings. FIG. 1 is a plan view schematically showing the vibrator 100 according to the first embodiment. 2 is a cross-sectional view taken along the line II-II of FIG. 1 schematically showing the vibrator 100 according to the first embodiment. FIG. 3 is a cross-sectional view taken along the line III-III in FIG. 1 schematically showing the vibrator 100 according to the first embodiment. 1 to 3 and FIGS. 5 to 20 shown below, an X axis, a Y axis, and a Z axis are illustrated as axes orthogonal to each other.

  As shown in FIGS. 1 and 2, the vibrator 100 includes a vibrating piece 110 and a package (container) 120 having a base 122 and a lid (lid) 124. In FIG. 1, the lid 124 is not shown for convenience.

(1) Vibrating piece The vibrating piece 110 includes a base 10, vibrating arms 20 a and 20 b, and an impact buffer arm 30.

  The base 10 has a substantially flat plate shape. The base portion 10 includes a main body portion 12, a connecting portion 14, and a base end portion 16. The main body 12 is located on the −Y axis direction side of the base 10. The connecting portion 14 connects the main body portion 12 and the base end portion 16. The length of the connecting portion 14 in the X-axis direction is smaller than the length of the main body portion 12 and the base end portion 16 in the X-axis direction. Thereby, the so-called vibration leakage, in which the vibration energy of the vibrating arms 20a and 20b leaks to the outside through the mounting portion, can be reduced.

The base end portion 16 is located on the + Y axis direction side of the base portion 10. The base end portion 16 has an attachment portion (mount portion) 18. The attachment portion 18 is attached to the base 122 by joining members 130a and 130b. The attachment portion 18 is a portion that overlaps with a contact portion between the joining members 130 a and 130 b and the vibrating piece 110 of the base portion 10 in a plan view (viewed from the Z-axis direction). Specifically, in the illustrated example, the attachment portion 18 is a portion of the base portion 10 where the electrode pads 40a and 40b are provided. In the illustrated example, two attachment portions 18 are provided, one is provided at the end of the base end portion 16 on the + X-axis direction side, and the other is the end of the base end portion 16 on the −X-axis direction side. Provided in the department. In addition, the number of the attachment parts 18 is not specifically limited, One may be sufficient and three or more may be sufficient.

  The vibrating arms 20a and 20b are aligned with each other and extend from the main body 12 of the base 10 in the -Y-axis direction. In the illustrated example, the first vibrating arm 20 a is provided on the + X axis direction side of the shock absorbing arm 30, and the second vibrating arm 20 b is provided on the −X axis direction side of the shock absorbing arm 30. The vibrating arms 20 a and 20 b have an arm portion 22 connected to the main body portion 12 of the base portion 10 and a weight portion 24 connected to the arm portion 22.

  A bottomed groove portion 23 is provided on main surfaces (main surfaces that are in a relationship of front and back) 22a and 22b of the arm portion 22 of the vibrating arms 20a and 20b that are orthogonal to the Z axis. The groove 23 extends along the Y axis in plan view. In the illustrated example, the distal end of the groove portion 23 is located at the boundary between the arm portion 22 and the weight portion 24, and the proximal end of the groove portion 23 is located at the base portion 10 (main body portion 12). Since the grooves 23 are provided in the vibrating arms 20a and 20b in this way, the path of heat generated by the bending vibration is narrowed, so that it is possible to suppress the diffusion (heat conduction) of heat, and in the adiabatic region. It is possible to reduce thermoelastic loss (vibration energy loss caused by heat conduction generated between the compression part and the extension part of the vibration piece that flexes and vibrates).

  As shown in FIG. 3, the arm portion 22 has a substantially H-shaped cross-sectional shape. The distance W between the groove 23 and the side surfaces 22c and 22d (the inner side surface 22c and the outer side surface 22d) of the vibrating arms 20a and 20b is preferably 6 μm or less. Furthermore, when the maximum depth of the groove 23 is t and the thickness of the vibrating arms 20a and 20b (the length along the Z axis) is T, η expressed by 2t / T is 0.6 or more. It is preferable. As a result, the equivalent series resistance and CI (Crystal Impedance) value of the resonator element 110 can be reduced, and power consumption can be reduced. In addition, the length along the Y axis of the groove part 23 is not particularly limited, and the groove part 23 may also be provided in the weight part 24.

  The weight portions 24 of the vibrating arms 20a and 20b have a substantially flat plate shape. In the illustrated example, the width (length along the X axis) W <b> 1 of the weight portion 24 is larger than the width W <b> 2 of the arm portion 22. The ratio of the width W1 to the width W2 (W1 / W2) is 2 or more and 10 or less, preferably 5 or more and 7 or less. Thereby, the vibration leakage by twisting the weight part 24 can be reduced, reducing a thermoelastic loss.

  The shape of the weight portion 24 is not particularly limited as long as the mass per unit length is larger than that of the arm portion 22. For example, the weight portion 24 may have a width that is the same as the width of the arm portion 22 and may be thicker than the arm portion 22. Further, the weight portion 24 may be configured by forming a concave portion on the surface of the vibrating arms 20a and 20b corresponding to the weight portion 24 and providing a metal such as gold on the surface. Further, the weight portion 24 may be made of a material having a mass density higher than that of the arm portion 22. That is, when the mass per unit length (the length in the Y-axis direction) in the arm portion 22 and the weight portion 24 is Ma and Mb, respectively, Ma <Mb in all the arm portions 22 or all the weight portions 24. As long as the relationship is satisfied.

A pair of excitation electrodes (not shown) is formed on each of the vibrating arms 20a and 20b, and a pair of electrode pads 40a and 40b electrically connected to the excitation electrodes are formed on the base portion 10 (mounting portion 18). ing. Excitation electrodes and electrode pads 40a, 40b are, for example, chromium,
It is a metal film in which nickel is used as a base layer and gold and silver are laminated thereon.

  The shock absorbing arm 30 is disposed between the pair of vibrating arms 20a and 20b. The shock absorbing arm 30 extends in the −Y axis direction from the main body 12 of the base 10. That is, the extension direction of the shock buffer arm 30 is the same as the extension direction of the vibrating arms 20a and 20b. The length (length in the extending direction) along the Y axis of the shock absorbing arm 30 is smaller than the length (length in the extending direction) along the Y axis of the vibrating arms 20a and 20b. The front end of the impact buffering arm 30 is located closer to the base 10 (the main body 12 side) than the front ends of the vibrating arms 20a and 20b in plan view.

  The base 10 of the vibrating piece 110, the vibrating arms 20a and 20b, and the impact buffering arm 30 (hereinafter, also referred to as “vibrating arms 20a and 20b”) are integrally provided. Specifically, the vibrating arms 20a, 20b, and the like are cut out from a quartz crystal (Lambard) at a predetermined angle (for example, a Z plate whose thickness direction is the crystal Z-axis (optical axis) is an X-axis). It is formed on a single quartz wafer using a technique such as photolithography or etching.

The vibrating arms 20a, 20b, etc. are not limited to quartz wafers. For example, aluminum nitride (AlN), lithium niobate (LiNbO ₃ ), lithium tantalate (LiTaO ₃ ), lead zirconate titanate (PZT) , Oxide substrates such as lithium tetraborate (Li ₂ B ₄ O ₇ ) and langasite (La ₃ Ga ₅ SiO ₁₄ ), piezoelectric materials such as aluminum nitride and tantalum pentoxide (Ta ₂ O ₅ ) on a glass substrate You may form from the laminated piezoelectric material board | substrate comprised by laminating | stacking material or a piezoelectric ceramic substrate. Further, the vibrating arms 20a and 20b may be formed using a silicon semiconductor material.

  Next, the operation of the resonator element 110 will be described.

  An electric field is generated in the resonator element 110 by a drive signal (alternating voltage) applied to the excitation electrode from the outside via the electrode pads 40a and 40b. Then, due to the inverse piezoelectric effect of the crystal, the direction of the arrow A shown in FIG. Bending vibrations that are alternately displaced in the direction of approaching) (vibrating arms 20a, 20b vibrate in the bending vibration mode in the opposite phase in the X-axis direction).

  Note that the vibration (drive) method of the resonator element 110 is not limited to piezoelectric drive. For example, the vibrating piece 110 may be an electrostatic driving type using an electrostatic force or a Lorentz driving type using a magnetic force, in addition to a piezoelectric driving type using a piezoelectric substrate.

(2) Package The package 120 has a base 122 and a lid 124. The base 122 has a recess 121. A plate-shaped lid 124 is joined to the base 122 so as to close the opening of the recess 121. Such a package 120 has a storage space formed by closing the recess 121 with a lid 124, and the vibration piece 110 is stored and installed in the storage space in an airtight manner. That is, the vibration piece 110 is accommodated in the package 120. Thereby, the vibration piece 110 can be protected.

  In addition, the inside of the storage space (recess 121) in which the resonator element 110 is stored may be in a reduced pressure state, or may be filled with an inert gas such as nitrogen, helium, or argon. Thereby, the vibration characteristics of the resonator element 110 are improved.

The material of the base 122 is, for example, an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, a silicon carbide sintered body, a glass ceramic sintered body obtained by forming, laminating and firing ceramic green sheets. Ceramic insulating materials such as body, crystal, glass, silicon (high resistance silicon) and the like. The material of the lid 124 is the same material as the base 122, or a metal such as Kovar or 42 alloy.

  The base 122 and the lid 124 are joined by providing a seal ring 125 on the base 122, placing the lid 124 on the seal ring 125, and welding the seal ring 125 to the base 122 using, for example, a resistance welding machine. Is done by. The joining of the base 122 and the lid 124 is not particularly limited, and may be performed using an adhesive or may be performed by seam welding.

  Internal terminals 140 a and 140 b are provided on the main surface 123 a of the base 122 at positions facing the electrode pads 40 a and 40 b of the vibrating piece 110. In the illustrated example, the main surface 123a of the base 122 is the inner bottom surface (inner bottom surface) of the recess 121, and is a mounting surface on which the vibrating piece 110 is mounted. The electrode pad 40a of the resonator element 110 is bonded to the internal terminal 140a via the bonding member 130a, and the electrode pad 40b is bonded to the internal terminal 140b via the bonding member 130b.

  Electrode terminals 142a and 142b are provided on a main surface (outer bottom surface) 123b opposite to the main surface 123a of the base 122. The electrode terminal 142a is electrically connected to the internal terminal 140a by an internal wiring (not shown). The electrode terminal 142b is electrically connected to the internal terminal 140b by an internal wiring (not shown). The internal terminals 140a and 140b and the electrode terminals 142a and 142b are metal films in which a film such as nickel or gold is laminated on a metallized layer such as tungsten or molybdenum by plating or the like.

  Although not illustrated, the package 120 may include a flat base 122 and a lid 124 having a recess. Further, the package 120 may be provided with recesses in both the base 122 and the lid 124.

  The joining members 130 a and 130 b electrically and mechanically connect the internal terminals 140 a and 140 b provided on the base 122 and the electrode pads 40 a and 40 b of the vibrating piece 110. The joining members 130a and 130b are, for example, a conductive adhesive containing an epoxy, silicone, polyimide, acrylic, bismaleimide, or the like mixed with a conductive material such as a metal filler, gold, aluminum, and the like. These are metal bumps such as solder bumps, and resin bumps in which metal wiring is formed on a metal layer or resin core. When the joining members 130a and 130b are resin bumps, the joining members 130a and 130b are formed by, for example, a screen printing technique. Since the screen printing technique is excellent in positional accuracy, it is possible to suppress the vibration arms 20a and 20b and the joining members 130a and 130b from coming into contact with each other to attenuate the vibration or short-circuit.

  The distance between the joining members 130a and 130b and the vibrating arms 20a and 20b is, for example, 5 μm to 200 μm, and preferably 20 μm to 100 μm. If the distance is smaller than 5 μm, the bonding member adheres to the vibrating arm, which may cause a short circuit or vibration attenuation. If the distance is larger than 200 μm, it may be difficult to reduce the size.

A convex portion 150 is provided on the main surface 123 a of the base 122. The protrusion 150 protrudes from the main surface 123a of the base 122 in the + Z-axis direction. The convex portion 150 is provided in a region facing the impact buffer arm 30 on the main surface 123 a of the base 122. That is, the impact buffer arm 30 and the convex portion 150 overlap each other in plan view. In the illustrated example, the convex portion 150 is provided in a region facing the tip side of the impact buffer arm 30. The convex part 150 has the vibrating arms 20a and 20b.
It is not provided in the area facing. That is, the projection 150 and the vibrating arms 20a and 20b do not overlap in plan view.

  For example, there is a gap between the impact buffer arm 30 and the convex portion 150. The distance between the shock absorbing arm 30 and the convex portion 150 is smaller than the distance between the vibrating arms 20 a and 20 b and the main surface 123 a of the base 122. Therefore, when an impact in the thickness direction of the vibrating arms 20a and 20b is applied from the outside, as shown in FIG. 5, the shock absorbing arm 30 is projected before the vibrating arms 20a and 20b come into contact with the main surface 123a. The part 150 can be contacted.

  The height (size in the Z-axis direction) and position of the convex portion 150 is greater than when the vibrating arms 20a and 20b come into contact with the main surface 123a when an impact in the thickness direction of the vibrating arms 20a and 20b is applied from the outside. First, there is no particular limitation as long as the impact buffer arm 30 is at a height or position where it comes into contact with the convex portion 150. For example, the convex portion 150 may be provided to avoid a region facing the tip of the shock buffer arm 30 in the + Y-axis direction. Thereby, when the impact buffer arm 30 contacts the convex portion 150, the tip of the impact buffer arm 30 can be prevented from colliding with the convex portion 150, and the possibility that the impact buffer arm 30 is missing can be reduced.

  The planar shape of the convex portion 150 is a quadrangle in the illustrated example. In addition, the planar shape of the convex part 150 is not specifically limited, A circle | round | yen, an ellipse, a polygon etc. may be sufficient. Further, the length (width) along the X-axis of the convex portion 150 is larger than the length (width) along the X-axis of the impact buffer arm 30 as shown in FIG. Although not shown, the length (width) along the X axis of the convex portion 150 may be equal to or less than the length (width) along the X axis of the shock absorbing arm 30.

  The material of the convex part 150 is the same as the material of the base 122, for example. In the example shown in FIG. 2, the convex portion 150 is configured integrally with the base 122. In addition, the structure of the convex part 150 is not limited to this. Hereinafter, modifications of the convex portion 150 will be described with reference to the drawings. 4A to 4D are cross-sectional views for explaining a modification of the convex portion 150. FIG.

  For example, as shown in FIG. 4A, the convex portion 150 includes a first portion 150a formed integrally with the base 122, and a second portion 150b provided on the first portion 150a. May be. For example, the second portion 150b is softer than the base 122 and the shock absorbing arm 30. That is, the Young's modulus of the second portion 150b is smaller than the Young's modulus of the base 122 and the shock absorbing arm 30. The material of the second portion 150b is an epoxy resin, silicone resin, polyimide resin, acrylic resin, bismaleimide resin, or the like. The material of the second portion 150b is not limited to resin, and is not particularly limited as long as it is a material softer than at least one of the shock absorbing arm 30 and the base 122 (that is, a material having a lower Young's modulus). In such a convex portion 150, when an impact in the thickness direction of the vibrating arms 20 a and 20 b is applied from the outside, the surface of the convex portion 150 with which the shock absorbing arm 30 contacts is made softer than the base 122 and the shock absorbing arm 30. It is possible to absorb (relax) the impact when the impact buffer arm 30 comes into contact.

  Further, for example, as shown in FIG. 4B, the convex portion 150 includes a first portion 150a formed integrally with the base 122 and a second portion 150b covering the first portion 150a. Also good.

Further, for example, as shown in FIG. 4C, the material of the convex portion 150 may be different from the material of the base 122. That is, the convex portion 150 may not be provided integrally with the base 122. In the illustrated example, the convex portion 150 is a resin protrusion formed on the main surface 123 a of the base 122. The material of the convex portion 150 is not limited to resin, and is not particularly limited as long as the material is softer than at least one of the impact buffer arm 30 and the base 122 (that is, a material having a low Young's modulus). As a material of the convex part 150 shown in FIG.4 (C), what was illustrated as a material of the 2nd part 150b mentioned above, for example can be used.

  For example, as shown in FIG. 4D, the shape of the convex portion 150 may be a hemispherical shape (dome shape).

  In the vibrator 100, for example, the vibration piece 110 is excited by bending vibration by a drive signal applied via the electrode terminals 142a and 142b from an oscillation circuit integrated in an IC chip of an electronic device, and has a predetermined frequency. Resonates (oscillates) and outputs a resonance signal (oscillation signal) from the electrode terminals 142a and 142b.

  The vibrator 100 has the following features, for example.

  In the vibrator 100, a convex portion 150 is provided in a region of the main surface 123 a of the base 122 facing the impact buffer arm 30. Therefore, when the vibrating arms 20a and 20b are deformed in the thickness direction due to an external shock, the shock absorbing arm 30 is moved to the convex portion 150 before the vibrating arms 20a and 20b come into contact with the main surface 123a of the base 122. Can be contacted. As described above, the impact buffer arm 30 comes into contact with the convex portion 150 first, so that the impact buffer arm 30 can absorb (relax) the impact. For example, the vibrating arms 20 a and 20 b can be connected to the main surface 123 a of the base 122. Can not be touched. Further, when the shock absorbing arm 30 comes into contact with the convex portion 150 first, for example, even when the vibrating arms 20a and 20b come into contact with the main surface 123a of the base 122, the vibrating arms 20a and 20b come into contact with the main surface 123a. Can reduce the impact. As described above, in the vibrator 100, the convex portion 150 is provided in the region facing the shock buffering arm 30, so that when the vibrating arms 20 a and 20 b are deformed in the thickness direction by an external shock, the shock buffering is performed. The arm 30 can absorb (relax) the impact, and the impact applied to the vibrating arms 20a and 20b can be reduced.

  In the vibrator 100, the material of the convex portion 150 is the same as the material of the base 122. Therefore, for example, the convex 150 can be formed integrally with the base 122. Therefore, for example, the manufacturing process can be simplified.

  In the vibrator 100, the surface of the convex portion 150 is softer than at least one of the base 122 and the shock absorbing arm 30. Therefore, it is possible to absorb (relax) the impact when the impact buffer arm 30 contacts the convex portion 150. Therefore, in the vibrator 100, the shock can be absorbed (relaxed) more by the shock buffer arm 30, and the shock applied to the vibrating arms 20a and 20b can be further reduced.

  Although not shown, a softer film than at least one of the base 122 and the shock absorbing arm 30 may be formed in a region in contact with the convex portion 150 of the shock absorbing arm 30. Thereby, the impact when the impact buffer arm 30 contacts the convex portion 150 can be absorbed (relaxed) more.

  In the vibrator 100, the length along the Y-axis direction of the shock absorbing arm 30 is smaller than the length along the Y-axis of the vibrating arms 20a and 20b. Compared with the case where the length is larger than the length along the Y axis of the vibrating arms 20a, 20b, the apparatus can be reduced in size.

1.2. Next, a modification of the vibrator according to the first embodiment will be described. Hereinafter, in the vibrator according to each modification of the first embodiment, members having the same functions as those of the constituent members of the vibrator 100 according to the first embodiment are given the same reference numerals, and detailed descriptions thereof are omitted. .

(1) First Modification First, a vibrator according to a first modification of the first embodiment will be described with reference to the drawings. FIG. 6 is a plan view schematically showing the vibrator 200 according to the first modification of the first embodiment. FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 6 schematically showing a vibrator 200 according to a first modification of the first embodiment. In FIG. 6, the lid 124 is not shown for convenience.

  In the vibrator 100 described above, as shown in FIGS. 1 and 2, the length along the Y axis of the shock absorbing arm 30 is smaller than the length along the Y axis of the vibrating arms 20a and 20b.

  On the other hand, in the vibrator 200, as shown in FIGS. 6 and 7, the length of the shock absorbing arm 30 along the Y-axis direction is larger than the length of the vibrating arms 20a and 20b along the Y-axis. . Therefore, in the vibrator 200, the vibration arms 20a and 20b are caused by an external impact as compared with the case where the length of the shock buffer arm 30 along the Y axis is smaller than the length of the vibration arms 20a and 20b along the Y axis. Can be brought into contact with the main surface 123 a of the base 122 before the vibrating arms 20 a and 20 b come into contact with the main surface 123 a of the base 122.

  When the material of the joining members 130a and 130b is sufficiently soft as compared to the vibrating arms 20a and 20b of the vibrator 200 as in the above-described resin (Young's modulus ratio is 0.001 or more and 0.07 or less), In the initial response when an impact is applied, the vibrating arms 20a, 20b and the like are not greatly deformed and only the joining members 130a, 130b are largely deformed. 8 is larger than the length along the Y-axis of the vibrating arms 20a and 20b. Therefore, when the vibrating arms 20a and 20b are deformed in the thickness direction by an external impact, as shown in FIG. The shock absorbing arm 30 can be brought into contact with the main surface 123 a of the base 122 before the vibrating arms 20 a and 20 b come into contact with the main surface 123 a of the base 122. As a result, in the vibrator 200, when the vibrating arms 20a and 20b are deformed in the thickness direction by an external shock, the shock absorbing arm 30 can absorb the shock, and the shock applied to the vibrating arms 20a and 20b can be absorbed. Can be reduced. However, the initial response described above is that the shock absorbing arm 30 is first applied to the convex portion 150 after an external shock is applied to the vibrator 200 such that the vibrating arms 20a, 20b and the like are displaced in the −Z-axis direction. It means the time until it hits.

  Although not shown, in the vibrator 200, the length along the Y-axis direction of the shock absorbing arm 30 is made larger than the length along the Y-axis of the vibrating arms 20a and 20b, and the main surface 123a of the base 122 is used. Convex part 150 may be provided in.

(2) Second Modification Next, a vibrator according to a second modification of the first embodiment will be described with reference to the drawings. FIG. 9 is a plan view schematically showing a vibrator 300 according to the second modification of the first embodiment.

  In the vibrator 100 described above, as shown in FIG. 1, the base portion 10 has a main body portion 12, a connecting portion 14, and a base end portion 16.

  On the other hand, in the vibrator 300, as shown in FIG. 9, the base portion 10 has a main body portion 12 and a joint portion 210.

  The main body 12 has a reduced width portion 13 whose width (size in the X-axis direction) decreases gradually or intermittently as it goes in the + Y-axis direction. Thereby, a vibration leak can be reduced and it can suppress that a leak vibration is transmitted to the junction part 310. FIG.

  The joint portion 310 is connected to the first portion 312 extending from the main body portion 12 in the + Y-axis direction, and the second portion 314 is connected to the end portion of the first portion 312 in the + Y-axis direction and extends in the −X-axis direction. And is composed of. That is, the joining part 310 is formed in a substantially L shape in plan view. The second portion 314 of the joint portion 310 has the attachment portion 18.

  In the vibrator 300, since the two fixed places are close to each other as compared with the resonator element 100, the fixed load on the package 120 in the spurious mode (the in-phase bending vibration mode in the X-axis direction) is weakened. The resonance frequency of the spurious mode decreases so as to be separated from the resonance frequency of the main mode (the anti-bending vibration mode in the X-axis direction). Thereby, since the coupling | bonding of both modes can be reduced, the vibration leakage in the main mode of the vibration piece 300 can be suppressed.

(3) Third Modification Next, a vibrator according to a third modification of the first embodiment will be described with reference to the drawings. FIG. 10 is a plan view schematically showing a vibrator 400 according to a third modification of the first embodiment. FIG. 11 is a cross-sectional view taken along line XI-XI in FIG. 10 schematically showing a vibrator 400 according to a third modification of the first embodiment.

  In the vibrator 100 described above, as shown in FIGS. 1 and 2, the convex portion 150 is provided in a region of the main surface 123 a of the base 122 facing the impact buffer arm 30.

  On the other hand, in the vibrator 400, as shown in FIGS. 10 and 11, the convex portion 150 is provided on the impact buffer arm 30.

  The convex portion 150 is provided on a surface of the shock absorbing arm 30 that faces the main surface 123a of the base 122 (in the illustrated example, the surface facing the −Z-axis direction of the shock absorbing arm 30). The distance between the convex portion 150 provided on the shock absorbing arm 30 and the main surface 123 a of the base 122 is smaller than the distance between the vibrating arms 20 a and 20 b and the main surface 123 a of the base 122. Therefore, when an impact in the thickness direction of the vibrating arms 20 a and 20 b is applied from the outside, the convex portion provided on the shock absorbing arm 30 before the vibrating arms 20 a and 20 b contact the main surface 123 a of the base 122. 150 can be brought into contact with the main surface 123 a of the base 122.

  For example, the convex portion 150 is made of a material whose surface is softer than at least one of the impact buffer arm 30 and the main surface 123 a of the base 122. For example, the convex portion 150 is a protrusion (resin protrusion) formed of resin. The material of the convex portion 150 may be the same as the material of the impact buffer arm 30. That is, the convex portion 150 and the impact buffering arm 30 may be integrally formed.

  In the vibrator 400, the convex portion 150 is provided on the surface of the impact buffer arm 30 that faces the main surface 123 a of the base 122. Therefore, in the vibrator 400, when an impact in the thickness direction of the vibrating arms 20a and 20b is applied from the outside, the vibrating arms 20a and 20b are applied to the shock absorbing arm 30 before contacting the main surface 123a of the base 122. The provided convex portion 150 can be brought into contact with the main surface 123 a of the base 122. Therefore, in the vibrator 400, when the vibrating arms 20a and 20b are deformed in the thickness direction due to an external impact, the shock can be absorbed by the shock absorbing arm 30 and the vibrating arm 20a. , 20b can be reduced in impact.

2. Second Embodiment 2.1. Next, a vibrator according to a second embodiment will be described with reference to the drawings. FIG.
6 is a plan view schematically showing a vibrator 500 according to a second embodiment. FIG. In FIG. 12, the lid 124 is not shown for convenience. Hereinafter, in the vibrator 500 according to the second embodiment, members having the same functions as those of the constituent members of the vibrator 100 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the vibrator 100 described above, as shown in FIG. 1, the impact buffer arm 30 is disposed between the pair of vibrating arms 20a and 20b.

  On the other hand, as shown in FIG. 12, the vibrator 500 includes two shock buffering arms 30a and 30b, and a pair of vibration arms 20a and 20b is disposed between the two shock buffering arms 30a and 30b. ing.

  The base 10 includes a main body 12, a support arm 510 extending from the main body 12 in the + X-axis direction, and a support arm 512 extending from the main body 12 in the −X-axis direction. The support arms 510 and 512 extend in opposite directions from the + Y-axis direction end of the main body 12.

  The shock absorbing arm 30a extends in the −Y axis direction from the end of the support arm 510 on the + X axis direction side. The shock absorbing arm 30b extends in the −Y axis direction from the end portion of the support arm 512 on the −X axis direction side. The pair of vibrating arms 20a and 20b respectively extend from the main body portion 12 in the −Y axis direction. The impact buffer arms 30a and 30b extend to the −Y axis direction side from the base portion 10 (main body portion 12). Between the shock buffer arm 30a and the shock buffer arm 30b, the base 10 and part of the vibrating arms 20a and 20b are located.

  The main body 12 of the base 10 has an attachment 18. In the illustrated example, the main body portion 12 has two attachment portions 18. One attachment portion 18 is provided in the vicinity of the end portion of the support arm 510 on the −X axis direction side, and the other attachment portion 18. Is provided in the vicinity of the end of the support arm 512 on the + X-axis direction side.

  The shock buffer arm 30a and the shock buffer arm 30b have the same length (width) along the X axis. Further, the shock buffer arm 30a and the shock buffer arm 30b have the same length along the Y axis. The length along the Y-axis direction of the impact buffer arms 30a and 30b is smaller than the length along the Y-axis of the vibrating arms 20a and 20b.

  Convex portions 150 are respectively provided in a region of the main surface 123a of the base 122 facing the shock buffering arm 30a and a region of the main surface 123a of the base 122 facing the shock buffering arm 30b. That is, in the vibrator 500, two convex portions 150 are provided corresponding to the two shock absorbing arms 30a and 30b.

  The vibrator 500 has the following features, for example.

  The vibrator 500 can achieve the same effects as the vibrator 100 described above. Furthermore, since a plurality of shock buffer arms 30a and 30b are provided in the vibrator 500, for example, the vibration arms 20a and 20b are thicker due to an external shock compared to a case where one shock buffer arm is provided. When deformed in the vertical direction, the shock absorbing arms 30a and 30b can absorb the shock more, and the shock applied to the vibrating arms 20a and 20b can be further reduced.

  In the vibrator 500, the length of the shock buffering arms 30a and 30b along the Y-axis direction is smaller than the length of the vibrating arms 20a and 20b along the Y-axis. As compared with the case where the length along the Y axis is larger than the length along the Y axis of the vibrating arms 20a and 20b, the apparatus can be downsized.

  In addition, even when only one of the support arm 510 and the shock buffer arm 30a and the support arm 512 and the shock buffer arm 30b is formed, the same effect as the vibrator 100 described above can be obtained. In this case, the length along the X-axis can be reduced as compared with the case where both the support arm 510 and the shock buffer arm 30a and the support arm 512 and the shock buffer arm 30b are formed.

2.2. Next, a modification of the vibrator according to the second embodiment will be described. Hereinafter, in the vibrator according to each modification of the second embodiment, members having the same functions as those of the constituent members of the vibrators 100 and 500 according to the first and second embodiments described above are given the same reference numerals, Detailed description thereof is omitted.

(1) First Modification First, a vibrator according to a first modification of the second embodiment will be described with reference to the drawings. FIG. 13 is a plan view schematically showing a vibrator 600 according to the first modification of the second embodiment. In FIG. 13, the lid 124 is not shown for convenience.

  In the vibrator 500 described above, as shown in FIG. 12, the lengths of the shock buffer arms 30a and 30b along the Y axis are smaller than the lengths of the vibrating arms 20a and 20b along the Y axis.

  On the other hand, in the vibrator 600, as shown in FIG. 13, the length along the Y-axis direction of the shock absorbing arms 30a and 30b is larger than the length along the Y-axis of the vibrating arms 20a and 20b. Therefore, in the vibrator 600, the vibration arm 20a is caused by an external impact compared to the case where the length along the Y axis of the shock buffer arms 30a and 30b is smaller than the length along the Y axis of the vibration arms 20a and 20b. When the vibration arms 20a and 20b are brought into contact with the main surface 123a of the base 122, the shock absorbing arms 30a and 30b can be brought into contact with the main surface 123a of the base 122. it can.

  In the vibrator 600, the base portion 10 includes a main body portion 12, a connecting portion 14, a base end portion 16, and support arms 510 and 512. The support arm 510 extends from the base end portion 16 in the + X axis direction. The support arm 512 extends in the −X axis direction from the base end portion 16. Each of the support arm 510 and the support arm 512 has a mounting portion 18.

  When the material of the joining members 130a and 130b is sufficiently soft as compared with the vibrating arms 20a and 20b of the vibrator 600 as in the above-described resin (Young's modulus ratio is 0.001 or more and 0.07 or less), external In the initial response when an impact is applied, the vibrating arms 20a, 20b and the like are not greatly deformed and only the joining members 130a, 130b are largely deformed. Is longer than the length along the Y axis of the vibrating arms 20a and 20b, so that when the vibrating arms 20a and 20b are deformed in the thickness direction by an external impact, the vibrating arms 20a and 20b The impact buffer arms 30 a and 30 b can be brought into contact with the main surface 123 a of the base 122 before contacting the main surface 123 a of the base 122. As a result, in the vibrator 600, when the vibrating arms 20a and 20b are deformed in the thickness direction due to an external shock, the shock absorbing arms 30a and 30b can absorb the shock and are applied to the vibrating arms 20a and 20b. Impact can be reduced.

Further, even when only one of the support arm 510 and the shock buffer arm 30a and the support arm 512 and the shock buffer arm 30b is formed, the same operational effects as those of the vibrator 200 described above can be achieved. In this case, the length along the X-axis can be reduced as compared with the case where both the support arm 510 and the shock buffer arm 30a and the support arm 512 and the shock buffer arm 30b are formed.

(2) Second Modification Next, a vibrator according to a second modification of the second embodiment will be described with reference to the drawings. FIG. 14 is a plan view schematically showing a vibrator 700 according to a second modification of the second embodiment. In FIG. 14, the lid 124 is not shown for convenience.

  In the vibrator 500 described above, as shown in FIG. 12, the main body portion 12 of the base portion 10 has the attachment portion 18.

  On the other hand, in the vibrator 700, as shown in FIG. 14, the support arm 710 extending from the main body portion 12 of the base portion 10 has an attachment portion 18. In the vibrator 700, the length of the support arm 710 along the Y axis is larger than the length of the vibrating arms 20a and 20b along the Y axis.

  In the vibrator 700, the base portion 10 includes a main body portion 12, a connecting portion 14, a base end portion 16, support arms 510 and 512, and a support arm 710. The support arm 710 extends from the main body portion 12. The support arm 710 extends between the pair of vibrating arms 20a and 20b from the base 10 in the -Y-axis direction, and ends of the first extension 712 in the -Y-axis direction. And a second extending portion 714 that is connected and orthogonal to the first extending portion 712. The length of the first extending portion 712 along the Y axis is larger than the length of the vibrating arms 20a and 20b along the Y axis. The second extending portion 714 has a portion extending in the + X-axis direction from the connection portion with the first extending portion 712 and a portion extending in the −X-axis direction from the connecting portion. Yes. Therefore, the support arm 710 is formed in a substantially T shape in plan view. Attachment portions 18 are provided at the end portion of the second extension portion 714 on the + X-axis direction side and the end portion of the second extension portion 714 on the −X-axis direction side, respectively.

  In the vibrator 700, since the attachment portion 18 is provided on the support arm 710, the vibration propagation path between the attachment portion 18 and the vibrating arms 20a and 20b can be lengthened. , 20b can be sufficiently damped. Therefore, in the vibrator 700, vibration leakage to the outside can be reduced. Further, the vibrator 700 can achieve the same effects as the vibrator 500 described above.

  In addition, even when only one of the support arm 510 and the shock buffer arm 30a and the support arm 512 and the shock buffer arm 30b is formed, the same effect as that of the vibrator 500 can be obtained. In this case, the length along the X-axis can be reduced as compared with the case where both the support arm 510 and the shock buffer arm 30a and the support arm 512 and the shock buffer arm 30b are formed.

(3) Third Modification Next, a vibrator according to a third modification of the second embodiment will be described with reference to the drawings. FIG. 15 is a plan view schematically showing a vibrator 800 according to a third modification of the second embodiment. In FIG. 15, the lid 124 is not shown for convenience.

  In the vibrator 500 described above, as shown in FIG. 12, the main body portion 12 of the base portion 10 has the attachment portion 18.

  On the other hand, in the vibrator 800, as shown in FIG. 15, the support arm 810 extending from the main body portion 12 of the base portion 10 has the attachment portion 18. In the vibrator 800, the length of the support arm 810 along the Y axis is smaller than the length of the vibration arms 20a and 20b along the Y axis.

  In the vibrator 800, the base portion 10 includes a main body portion 12, a connecting portion 14, a base end portion 16, support arms 510 and 512, and a support arm 810. The support arm 810 extends from the main body 12 in the −Y axis direction. The support arm 810 is disposed between the pair of vibrating arms 20a and 20b.

  The support arm 810 includes, for example, a constricted portion 812 provided at the base on the main body portion 12 side, and a wide portion 814 connected to the constricted portion 812 and having a flat plate shape. The constricted portion 812 is a portion that is provided between the main body portion 12 and the wide portion 814 and has a width smaller than the width of the wide portion 814. Thereby, the vibration leakage which generate | occur | produced by the vibration of the vibrating arms 20a and 20b can be reduced. The wide portion 814 has an attachment portion 18. Two attachment portions 18 are provided along the Y-axis.

  The vibrator 800 can achieve the same effects as the vibrator 500 described above. In addition, even when only one of the support arm 510 and the shock buffer arm 30a and the support arm 512 and the shock buffer arm 30b is formed, the same effect as that of the vibrator 500 can be obtained. In this case, the length along the X-axis can be reduced as compared with the case where both the support arm 510 and the shock buffer arm 30a and the support arm 512 and the shock buffer arm 30b are formed.

3. Third Embodiment Next, a vibrator according to a third embodiment will be described with reference to the drawings. FIG. 16 is a plan view schematically showing a vibrator 900 according to the third embodiment. FIG. 17 is a cross-sectional view taken along the line XVII-XVII in FIG. 16 schematically showing the vibrator 900 according to the third embodiment. For convenience, the lid 124 and the joining member 930 are omitted in FIG. Hereinafter, in the vibrator 900 according to the third embodiment, members having the same functions as those of the constituent members of the vibrator 100 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  The above-described vibrator 100 has one convex portion 150 provided on the main surface 123a of the base 122 as shown in FIGS.

  On the other hand, as shown in FIGS. 16 and 17, the vibrator 900 includes a convex portion 150 (hereinafter also referred to as “first convex portion 150”) provided on the main surface 123 a of the base 122, and a lid 124. And a second convex portion 152 provided on the main surface 126.

  The lid 124 has a recess 127. In the package 120, a storage space is formed by the recess 121 of the base 122 and the recess 127 of the lid 124.

  A second convex portion 152 is provided on the main surface 126 of the lid 124. In the illustrated example, the main surface 126 of the lid 124 is an inner bottom surface (an inner bottom surface) of the recess 127 and is a surface facing the vibrating element 110 side. The main surface 123a of the base 122 and the main surface 126 of the lid 124 face each other (oppose each other). The second convex portion 152 is provided in a region facing the shock absorbing arm 30 on the main surface 126 of the lid 124. That is, the impact buffer arm 30 and the second convex portion 152 overlap each other in plan view. The 1st convex part 150 and the 2nd convex part 152 may overlap in planar view.

For example, there is a gap between the impact buffer arm 30 and the second convex portion 152. The distance between the shock absorbing arm 30 and the second convex portion 152 is smaller than the distance between the vibrating arms 20 a and 20 b and the main surface 126 of the lid 124. Therefore, when an impact in the thickness direction of the vibrating arms 20 a and 20 b is applied from the outside, the shock absorbing arm 30 is moved to the second convex portion 152 before the vibrating arms 20 a and 20 b come into contact with the main surface 126 of the lid 124. Can be contacted.

  The height (size in the Z-axis direction) and position of the second convex portion 152 are such that the vibrating arms 20a and 20b come into contact with the main surface 126 when an impact in the thickness direction of the vibrating arms 20a and 20b is applied from the outside. There is no particular limitation as long as the impact buffer arm 30 is at a height or position where it comes into contact with the second convex portion 152. For example, the second convex portion 152 may be provided so as to avoid a region facing the tip of the shock buffer arm 30 in the + Y-axis direction. Thereby, when the impact buffering arm 30 contacts the second convex part 152, the tip of the impact buffering arm 30 can be prevented from colliding with the second convex part 152, and the possibility that the impact buffering arm 30 is missing can be reduced. it can.

  The planar shape of the second convex portion 152 is a quadrangle in the illustrated example. The planar shape of the second convex part 152 is not particularly limited, and may be a circle, an ellipse, a polygon, or the like.

  The material of the 2nd convex part 152 is the same as the material of the lid 124, for example. As the material of the lid 124, for example, those exemplified as the material of the base 122 can be used. In the example illustrated in FIG. 17, the second convex portion 152 is configured integrally with the lid 124. In addition, the structure of the 2nd convex part 152 is not limited to this, For example, what was illustrated as a structure of the 1st convex part 150 can be used.

  The base portion 10 of the resonator element 110 includes a main body portion 12, a connecting portion 14, a base end portion 16, support arms 910a and 910b, and an outer frame portion 920.

  The support arm 910a extends from the base end portion 16 in the + X axis direction. The support arm 910b extends from the base end portion 16 in the −X axis direction. The support arms 910a and 910b connect the base end portion 16 and the outer frame portion 920.

  As described above, in the example illustrated in FIG. 16, the base end portion 16 and the outer frame portion 920 are connected by the pair of support arms 910 a and 910 b extending in the opposite directions from the base end portion 16. As shown in FIG. 18, the base end portion 16 may be directly connected to the outer frame portion 920.

  In the example shown in FIG. 16, the support arms 910a and 910b are linearly provided. However, as shown in FIG. 19, the support arms 910a and 910b may be bent. In the example illustrated in FIG. 19, the support arm 910 a includes a first beam portion 911 a extending in the + X axis direction from the base end portion 16, and an end portion in the + X axis direction of the first beam portion 911 a in the −Y axis direction. A second beam portion 912a that extends and a third beam portion 913a that extends in the + X-axis direction from the end portion in the −Y-axis direction of the second beam portion 912a and is connected to the outer frame portion 920. Has been. The support arm 910b extends in the −Y axis direction from the −X axis direction end portion of the first beam portion 911b and the first beam portion 911b extending from the base end portion 16 in the −X axis direction. The second beam portion 912b and the third beam portion 913b extending in the -X axis direction from the end portion in the -Y axis direction of the second beam portion 912b and connected to the outer frame portion 920. Yes. Thereby, vibration leakage to the outside can be reduced, and it is possible to make it difficult to transmit an external temperature change or impact to the vibrating arms 20a and 20b.

As shown in FIG. 16, the outer frame portion 920 is formed so as to surround the vibrating arms 20 a and 20 b and the impact buffering arm 30 in a plan view. The outer frame portion 920 is joined to the base 122. That is, the outer frame portion 920 has the attachment portion 18 attached to the base 122. In the illustrated example, the entire outer frame portion 920 is the attachment portion 18. The outer frame portion 920 is further joined to the lid 124. That is, the outer frame portion 920 is sandwiched between the base 122 and the lid 124. The base 122 and the outer frame portion 920 are joined together and the lid 124 and the outer frame portion 920 are joined together using a joining member 930 such as an adhesive in the illustrated example. May be.

  In the vibrator 900, similarly to the vibrator 100, the first convex portion 150 is provided in the region facing the impact buffer arm 30 of the main surface 123 a of the base 122. When the arms 20a and 20b are deformed in the thickness direction, the shock absorbing arm 30 can be brought into contact with the first convex portion 150 before the vibrating arms 20a and 20b come into contact with the main surface 123a of the base 122. .

  Further, in the vibrator 900, a second convex portion 152 is provided in a region of the main surface 126 of the lid 124 facing the impact buffer arm 30. Therefore, in the vibrator 900, when the vibrating arms 20a and 20b are deformed in the thickness direction due to an external impact, the vibrating arms 20a and 20b are in contact with the main surface 126 of the lid 124 before the shock absorbing arms. 30 can be brought into contact with the second convex portion 152. Therefore, in the vibrator 900, when the vibrating arms 20a and 20b are deformed in the thickness direction due to an external shock, the shock can be absorbed by the shock buffer arm 30, and the shock applied to the vibrating arms 20a and 20b is reduced. Can be made.

4). Fourth Embodiment Next, an oscillator according to a fourth embodiment will be described with reference to the drawings. FIG. 20 is a cross-sectional view schematically showing an oscillator 1000 according to the fourth embodiment.

  Hereinafter, in the oscillator 1000 according to the present embodiment, members having the same functions as the constituent members of the vibrator 100 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  The oscillator 1000 includes the vibrator according to the present invention. Hereinafter, an oscillator 1000 including the vibrator 100 will be described as the vibrator according to the present invention. As shown in FIG. 20, the oscillator 1000 includes a vibrator 100 and an IC chip 1010.

  The main surface 123a of the base 122 is provided with a receiving portion 1012 formed in a concave shape. The IC chip 1010 is housed in the housing portion 1012. The IC chip 1010 incorporates an oscillation circuit. The IC chip 1010 is fixed to the bottom surface of the housing portion 1012 with an adhesive (not shown) or the like.

  The IC chip 1010 is connected to internal connection terminals 1016a and 1016b provided on the bottom surface of the housing portion 1012 by a wire 1014 such as gold or aluminum. The internal connection terminals 1016a and 1016b are metal films in which a film made of nickel, gold or the like is laminated on a metallized layer such as tungsten or molybdenum by plating or the like. The internal connection terminals 1016a and 1016b are connected to the electrode terminals 142a and 142b and the internal terminals 140a and 140b via internal wiring (not shown). That is, the IC chip (oscillation circuit) 1010 is electrically connected to the resonator element 110.

  Although not shown, the connection between the IC chip 1010 and the internal connection terminals 1016a and 1016b is not limited to the connection direction by wire bonding using the wire 1014, but the connection method by flip chip mounting by inverting the IC chip 1010, etc. May be used. Further, the IC chip 1010 may be mounted in a recess provided in the outer bottom surface 123b of the base 122 and sealed with a molding material.

In the oscillator 1000, the resonator element 110 is excited by bending vibration by a drive signal applied from the IC chip 1010 via the internal connection terminals 1016a and 1016b and the internal terminals 140a and 140b, and resonates (oscillates) at a predetermined frequency. . The oscillator 1000 outputs an oscillation signal generated along with the oscillation to the outside through the IC chip 1010, the electrode terminals 142a and 142b, and the like.

  Since the oscillator 1000 includes the vibrator 100, impact resistance can be improved.

5. Fifth Embodiment Next, a real-time clock according to a fifth embodiment will be described with reference to the drawings. FIG. 21 is a functional block diagram of a real-time clock 1100 according to the fifth embodiment.

  The real time clock 1100 includes the oscillator according to the present invention. Hereinafter, a real-time clock 1100 including the oscillator 1000 will be described as an oscillator according to the present invention. As shown in FIG. 21, the real-time clock 1100 includes an oscillator 1000, a time measuring circuit 1110, an event detection circuit 1120, a memory 1130, and a control circuit 1140.

  The oscillator 1000 includes a vibrator 100 and an oscillation circuit (IC chip) 1010 that is electrically connected to the vibrator 100. The vibrator 100 receives an electrical signal via the oscillation circuit 1010. As a result, it vibrates at a predetermined frequency. The oscillation circuit 1010 amplifies the signal output from the vibrator 100 and outputs the amplified signal.

  An oscillator 1000 is connected to the timer circuit 1110. When a frequency of 1 [Hz] is obtained by dividing the signal output from the oscillator 1000, the year, month is obtained using this 1 [Hz] signal. , Day, hour, minute, and second are measured in each time register (not shown). That is, the timer circuit 1110 generates date / time data based on the signal output from the oscillation circuit 1010 of the oscillator 1000. By having such a timer circuit 1110, time data can be obtained, and the date and time when an event occurs (every event detection cycle) can be recorded in the memory 1130. In addition to the above year, month, day, hour, minute, and second, the timer circuit 1110 can store data regarding the day of the week by setting.

  The event detection circuit 1120 is connected to an event input terminal 1122 that is an external terminal of the real-time clock 1100. The event detection circuit 1120 is configured to set an event occurrence flag when an electric signal indicating that an event has occurred is input to the event input terminal 1122. Thus, by indicating the occurrence of an event by a flag, it is possible to determine the presence or absence of the event based on the flag.

  The memory 1130 is a storage unit that records the above-described time data and data related to event occurrence.

  The control circuit 1140 is connected to the above-described timing circuit 1110, event detection circuit 1120, memory 1130, and interrupt output terminal 1142 as an external terminal. The control circuit 1140 is configured to be able to read from the time measuring circuit 1110 the time data when it is detected that the flag is set based on the flag information input from the event detection circuit 1120.

  Note that the interrupt output terminal 1142 plays a role of interrupting and outputting a signal to the CPU simultaneously with recording of time data and data related to the occurrence of an event when an arbitrary event input occurs.

  Since the real-time clock 1100 includes the vibrator 100, impact resistance can be improved.

6). Sixth Embodiment Next, an electronic apparatus according to a sixth embodiment will be described with reference to the drawings. An electronic apparatus according to the sixth embodiment includes the vibrator according to the invention. Hereinafter, an electronic device including the vibrator 100 will be described as the vibrator according to the present invention.

  FIG. 22 is a plan view schematically showing a smartphone 1300 as an electronic apparatus according to the sixth embodiment. The smartphone 1300 includes an oscillator 1000 having a vibrator 100 as shown in FIG.

  The smartphone 1300 uses the oscillator 1000 as a timing device such as a reference clock oscillation source, for example. The smartphone 1300 can further include a display unit (such as a liquid crystal display or an organic EL display) 1310, an operation unit 1320, and a sound output unit 1330 (such as a microphone). The smartphone 1300 may also use the display unit 1310 as an operation unit by providing a contact detection mechanism for the display unit 1310.

  Note that an electronic device typified by the smartphone 1300 preferably includes an oscillation circuit that drives the vibrator 100 and a temperature compensation circuit that corrects a frequency variation caused by a temperature change of the vibrator 100.

  According to this, the electronic device represented by the smartphone 1300 includes the oscillation circuit that drives the vibrator 100 and the temperature compensation circuit that corrects the frequency variation accompanying the temperature change of the vibrator 100. Therefore, it is possible to provide temperature compensation for the resonance frequency at which oscillation occurs and to provide an electronic device having excellent temperature characteristics.

  FIG. 23 is a perspective view schematically showing a mobile (or notebook) personal computer 1400 as an electronic apparatus according to the sixth embodiment. As shown in FIG. 23, the personal computer 1400 includes a main body portion 1404 having a keyboard 1402 and a display unit 1406 having a display portion 1405. The display unit 1406 is a hinge structure portion with respect to the main body portion 1404. It is supported so that rotation is possible. Such a personal computer 1400 includes a vibrator 100 that functions as a filter, a resonator, a reference clock, and the like.

  FIG. 24 is a perspective view schematically showing a mobile phone (including PHS) 1500 as an electronic apparatus according to the sixth embodiment. A cellular phone 1500 includes a plurality of operation buttons 1502, an earpiece 1504, and a mouthpiece 1506, and a display portion 1508 is disposed between the operation buttons 1502 and the earpiece 1504. Such a cellular phone 1500 incorporates the vibrator 100 that functions as a filter, a resonator, or the like.

  FIG. 25 is a perspective view schematically showing a digital still camera 1600 as an electronic apparatus according to the sixth embodiment. In FIG. 25, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1600 photoelectrically converts a light image of a subject with an image sensor such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

A display unit 1603 is provided on the back of a case (body) 1602 in the digital still camera 1600, and is configured to perform display based on an imaging signal from the CCD. The display unit 1603 displays an object as an electronic image. Functions as a viewfinder. A light receiving unit 1604 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1602.

  When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1606, the CCD image pickup signal at that time is transferred and stored in the memory 1608. In the digital still camera 1600, a video signal output terminal 1612 and an input / output terminal 1614 for data communication are provided on the side surface of the case 1602. As shown in the figure, a television monitor 1630 is connected to the video signal output terminal 1612 and a personal computer 1640 is connected to the input / output terminal 1614 for data communication as necessary. Further, the imaging signal stored in the memory 1608 is output to the television monitor 1630 or the personal computer 1640 by a predetermined operation. Such a digital still camera 1600 includes a vibrator 100 that functions as a filter, a resonator, and the like.

  Since the electronic devices 1300, 1400, 1500, and 1600 include the vibrator 100, impact resistance can be improved.

  The electronic device including the vibrator of the present invention is not limited to the above example. For example, an ink jet type ejection device (for example, an ink jet printer), a laptop personal computer, a television, a video camera, a video tape recorder, Car navigation devices, pagers, electronic notebooks (including communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, videophones, security TV monitors, electronic binoculars, POS terminals, medical devices (eg electronic thermometers) , Blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring instruments, instruments (eg, vehicles, aircraft, ship instruments), flight simulator, etc. can do.

7). 7th Embodiment Next, the mobile body which concerns on 7th Embodiment is demonstrated, referring drawings. FIG. 26 is a perspective view schematically showing an automobile as the moving body 1700 according to the seventh embodiment.

  The moving body according to the seventh embodiment includes the vibrator according to the present invention. Hereinafter, a moving body including the vibrator 100 will be described as the vibrator according to the present invention.

  The mobile body 1700 according to the seventh embodiment further includes a controller 1720, a controller 1730, a controller 1740, a battery 1750, and a backup battery 1760 that perform various controls such as an engine system, a brake system, and a keyless entry system. Has been. Note that the moving body 1700 according to the seventh embodiment may omit or change some of the components (each unit) illustrated in FIG. 26, or may have a configuration in which other components are added.

  As such a moving body 1700, various moving bodies can be considered, and examples thereof include automobiles (including electric automobiles), aircraft such as jets and helicopters, ships, rockets, and artificial satellites.

  Since the moving body 1700 includes the vibrator 100, impact resistance can be improved.

In addition, this invention is not limited to embodiment mentioned above, A various deformation | transformation implementation is possible within the range of the summary of this invention.

  For example, in each embodiment described above, one groove portion is provided on the main surface of each vibrating arm, but the number of grooves is not particularly limited, and may be two or more. For example, two or more grooves arranged along the X-axis direction may be provided on each main surface.

  FIG. 27 is a cross-sectional view schematically showing an example of a vibrator according to this modification, and shows the same cross section as FIG. Hereinafter, in the vibrator according to this modification, members having the same functions as those of the constituent members of the vibrator 100 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the vibrator according to this modification, as shown in FIG. 27, two groove portions 23 arranged along the X-axis direction are respectively formed on the main surfaces 22a and 22b of the vibrating arm 20a and the main surfaces 22a and 22b of the vibrating arm 20b. Is provided. The vibrator according to this modification is the same as the vibrator 100 according to the first embodiment described above except that the number of groove portions 23 provided on the main surfaces 22a and 22b of the vibrating arms 20a and 20b is different. . Even in such a configuration of the groove portion 23, the thermoelastic loss can be reduced.

  The above-described embodiments and modifications are merely examples, and the present invention is not limited to these. For example, each embodiment and each modification can be combined as appropriate.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

DESCRIPTION OF SYMBOLS 10 ... Base part, 12 ... Main-body part, 14 ... Connection part, 16 ... Base end part, 18 ... Mounting part, 20a ... 1st vibration arm, 20b ... 2nd vibration arm, 22 ... Arm part, 22a, 22b ... Main surface 22c ... inner side surface, 22d ... outer side surface, 23 ... groove portion, 24 ... weight portion, 30, 30a, 30b ... impact buffer arm, 40a, 40b ... electrode pad, 100 ... vibrator, 110 ... vibrating piece, 120 ... package , 121 ... recess, 122 ... base, 123 a ... main surface, 123 b ... outer bottom surface, 124 ... lid, 125 ... seal ring, 126 ... main surface, 127 ... recess, 130a, 130b ... joining members, 140a, 140b ... internal terminals 142a, 142b ... electrode terminal, 150 ... convex portion, 150a ... first portion, 150b ... second portion, 152 ... second convex portion, 200 ... vibrator, 210 ... junction, 212 ... first portion, 214 ... First Part, 300, 400, 500 ... vibrator, 510 ... support arm, 512 ... support arm, 600, 700 ... vibrator, 710 ... support arm, 712 ... first extension part, 714 ... second extension part, 800 ... vibrator, 810 ... support arm, 812 ... constricted part, 814 ... wide part, 900 ... vibrator, 910a, 910b ... support arm, 911a, 911b ... first beam part, 912a, 912b ... second beam part, 913a , 913b ... third beam portion, 920 ... outer frame portion, 930 ... joining member, 1000 ... oscillator, 1010 ... IC chip, 1012 ... accommodating portion, 1014 ... wire, 1016a, 1016b ... internal connection terminal, 1100 ... real time clock, 1110: Timing circuit, 1120: Event detection circuit, 1122 ... Event input terminal, 1130 ... Memory, 1140 ... Control circuit, 1142 ... Interrupt Power terminal, 1300 ... Smartphone, 1310 ... Display unit, 1320 ... Operation unit, 1330 ... Sound output unit, 1400 ... Personal computer, 1402 ... Keyboard, 1404 ... Main unit, 1405 ... Display unit, 1406 ... Display unit, 1500 ... Mobile phone Telephone, 1502 ... operation buttons, 1504 ... earpiece, 1506 ... mouthpiece, 1508 ... display unit, 1600 ... digital still camera, 1602
... Case, 1603 ... Display unit, 1604 ... Light receiving unit, 1606 ... Shutter button, 1608 ... Memory, 1612 ... Video signal output terminal, 1614 ... Input / output terminal, 1630 ... TV monitor, 1640 ... Personal computer, 1700 ... Moving object, 1720 ... Controller, 1730 ... Controller, 1740 ... Controller, 1750 ... Battery, 1760 ... Backup battery

Claims (8)

Base and
A base including a mounting portion attached to the base;
A vibrating arm extending from the base;
An impact buffer arm extending from the base;
Including
A vibrator having a convex portion provided in at least one of a region of the main surface of the base that faces the shock buffer arm and a region of the shock vibration arm that faces the main surface of the base . In claim 1,
The material of the convex portion is the same as the material of the base. In claim 1,
The surface of the convex portion is a vibrator that is softer than at least one of the base and the shock absorbing arm. In any one of Claims 1 thru | or 3,
A vibrator comprising, together with the base, a lid forming a space for accommodating the base, the vibrating arm, and the shock absorbing arm. A vibrator according to any one of claims 1 to 4,
An oscillation circuit electrically connected to the vibrator;
Equipped with an oscillator. A vibrator according to any one of claims 1 to 4,
An oscillation circuit electrically connected to the vibrator;
Based on a signal output from the oscillation circuit, a clock circuit that generates date and time data,
Real-time clock with   An electronic apparatus comprising the vibrator according to claim 1.   A moving body comprising the vibrator according to claim 1.

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