JP2016119300A5 - - Google Patents
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- Publication number
- JP2016119300A5 JP2016119300A5 JP2015243742A JP2015243742A JP2016119300A5 JP 2016119300 A5 JP2016119300 A5 JP 2016119300A5 JP 2015243742 A JP2015243742 A JP 2015243742A JP 2015243742 A JP2015243742 A JP 2015243742A JP 2016119300 A5 JP2016119300 A5 JP 2016119300A5
- Authority
- JP
- Japan
- Prior art keywords
- sample volume
- charged particle
- images
- reference mark
- imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims 22
- 238000000034 method Methods 0.000 claims 21
- 230000003287 optical effect Effects 0.000 claims 19
- 238000003384 imaging method Methods 0.000 claims 16
- 239000002105 nanoparticle Substances 0.000 claims 3
- 239000003550 marker Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 238000012634 optical imaging Methods 0.000 claims 2
- 238000012937 correction Methods 0.000 claims 1
- 238000003702 image correction Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000001000 micrograph Methods 0.000 claims 1
- 238000000386 microscopy Methods 0.000 claims 1
- 238000003801 milling Methods 0.000 claims 1
- 102000004169 proteins and genes Human genes 0.000 claims 1
- 108090000623 proteins and genes Proteins 0.000 claims 1
- 239000002096 quantum dot Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/579,056 | 2014-12-22 | ||
| US14/579,056 US9368321B1 (en) | 2014-12-22 | 2014-12-22 | Fiducial-based correlative microscopy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016119300A JP2016119300A (ja) | 2016-06-30 |
| JP2016119300A5 true JP2016119300A5 (https=) | 2019-01-31 |
Family
ID=54849802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015243742A Pending JP2016119300A (ja) | 2014-12-22 | 2015-12-15 | 基準マークに基づく相関顕微鏡法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9368321B1 (https=) |
| EP (1) | EP3037862A1 (https=) |
| JP (1) | JP2016119300A (https=) |
| CN (1) | CN105717078A (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109414673B (zh) | 2017-02-01 | 2021-09-07 | 伊鲁米那股份有限公司 | 具有响应于多个激发频率的基准的系统和方法 |
| GB201701691D0 (en) * | 2017-02-01 | 2017-03-15 | Illumina Inc | System and method with reflective fiducials |
| GB201701688D0 (en) * | 2017-02-01 | 2017-03-15 | Illumia Inc | System and method with fiducials in non-recliner layouts |
| GB201701686D0 (en) * | 2017-02-01 | 2017-03-15 | Illunina Inc | System & method with fiducials having offset layouts |
| GB201701689D0 (en) | 2017-02-01 | 2017-03-15 | Illumia Inc | System and method with fiducials of non-closed shapes |
| GB201704275D0 (en) * | 2017-03-17 | 2017-05-03 | Science And Tech Facilities Council | Super-resolution microscopy |
| US11676794B2 (en) | 2017-03-17 | 2023-06-13 | United Kingdom Research And Innovation | Super-resolution microscopy |
| US10252350B1 (en) | 2018-06-17 | 2019-04-09 | Arevo, Inc. | Fiducial marks for articles of manufacture with non-trivial dimensional variations |
| JP7110383B2 (ja) * | 2018-10-19 | 2022-08-01 | 株式会社日立ハイテク | アライメントシステム及び位置合わせ用シール |
| JP6901510B2 (ja) * | 2019-02-19 | 2021-07-14 | 日本電子株式会社 | 観察方法、画像処理装置、および電子顕微鏡 |
| CN111239085B (zh) * | 2019-03-06 | 2022-11-22 | 南昌工程学院 | 基于深度学习的显微视觉伺服控制方法 |
| EP3938763A4 (en) * | 2019-03-14 | 2022-12-07 | Applied Materials, Inc. | IDENTIFICATION OF LANDMARK MARKERS IN MICROSCOPE IMAGES |
| CN110865058A (zh) * | 2019-11-21 | 2020-03-06 | 成都博奥独立医学实验室有限公司 | 激光微阵列芯片扫描仪的浓度梯度荧光校准片及校准方法 |
| US11551906B1 (en) * | 2021-06-30 | 2023-01-10 | Fei Company | Time-gated detection, dual-layer SPAD-based electron detection |
| WO2024242993A2 (en) * | 2023-05-19 | 2024-11-28 | Yale University | Systems and methods for subvoxel sem based volume electron microscopy |
| JPWO2024261804A1 (https=) * | 2023-06-19 | 2024-12-26 | ||
| EP4679056A1 (en) * | 2024-07-08 | 2026-01-14 | Fei Company | Method for creating a sample for use in a charged particle microscope |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3746186B2 (ja) * | 2000-05-12 | 2006-02-15 | 株式会社日立製作所 | 試料台及びその試料台を備えた走査電子顕微鏡 |
| CN101630623B (zh) * | 2003-05-09 | 2012-02-22 | 株式会社荏原制作所 | 基于带电粒子束的检查装置及采用了该检查装置的器件制造方法 |
| JP4709278B2 (ja) * | 2005-05-23 | 2011-06-22 | エフ． ヘスス ハラルド | 光変換可能な光学標識を用いる光学顕微鏡法 |
| US7924432B2 (en) * | 2006-12-21 | 2011-04-12 | Howard Hughes Medical Institute | Three-dimensional interferometric microscopy |
| US8422777B2 (en) * | 2008-10-14 | 2013-04-16 | Joshua Victor Aller | Target and method of detecting, identifying, and determining 3-D pose of the target |
| US9104903B2 (en) * | 2012-03-16 | 2015-08-11 | University Of Utah Research Foundation | Microscopy visualization |
| CN103367085B (zh) * | 2012-04-05 | 2017-07-07 | Fei 公司 | 提供深度分辨图像的带电粒子显微镜 |
| CN104769422B (zh) * | 2012-09-07 | 2018-06-12 | 卡尔蔡司X射线显微镜公司 | 组合共焦x射线荧光和x射线计算机断层扫描的系统和方法 |
| US8872105B2 (en) * | 2013-02-19 | 2014-10-28 | Fei Company | In situ reactivation of fluorescence marker |
-
2014
- 2014-12-22 US US14/579,056 patent/US9368321B1/en active Active
-
2015
- 2015-12-14 EP EP15199728.5A patent/EP3037862A1/en not_active Withdrawn
- 2015-12-15 JP JP2015243742A patent/JP2016119300A/ja active Pending
- 2015-12-21 CN CN201510959643.3A patent/CN105717078A/zh active Pending
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