CN105717078A - 基于基准点的相关显微术 - Google Patents

基于基准点的相关显微术 Download PDF

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Publication number
CN105717078A
CN105717078A CN201510959643.3A CN201510959643A CN105717078A CN 105717078 A CN105717078 A CN 105717078A CN 201510959643 A CN201510959643 A CN 201510959643A CN 105717078 A CN105717078 A CN 105717078A
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China
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datum mark
sample volume
charged particle
imaging
described sample
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CN201510959643.3A
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English (en)
Chinese (zh)
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S.兰多尔夫
J.米亚萨基
M.斯特劳
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FEI Co
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FEI Co
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6486Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/22Optical, image processing or photographic arrangements associated with the tube
    • H01J37/222Image processing arrangements associated with the tube
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6428Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6456Spatial resolved fluorescence measurements; Imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6456Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458Fluorescence microscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/0076Optical details of the image generation arrangements using fluorescence or luminescence
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008Details of detection or image processing, including general computer control
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/16Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365Control or image processing arrangements for digital or video microscopes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6428Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N2021/6439Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22Treatment of data
    • H01J2237/221Image processing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245Detection characterised by the variable being measured
    • H01J2237/24571Measurements of non-electric or non-magnetic variables
    • H01J2237/24578Spatial variables, e.g. position, distance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/2611Stereoscopic measurements and/or imaging

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Biomedical Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Molecular Biology (AREA)
  • General Engineering & Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
  • Sampling And Sample Adjustment (AREA)
CN201510959643.3A 2014-12-22 2015-12-21 基于基准点的相关显微术 Pending CN105717078A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/579,056 US9368321B1 (en) 2014-12-22 2014-12-22 Fiducial-based correlative microscopy
US14/579056 2014-12-22

Publications (1)

Publication Number Publication Date
CN105717078A true CN105717078A (zh) 2016-06-29

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Family Applications (1)

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CN201510959643.3A Pending CN105717078A (zh) 2014-12-22 2015-12-21 基于基准点的相关显微术

Country Status (4)

Country Link
US (1) US9368321B1 (https=)
EP (1) EP3037862A1 (https=)
JP (1) JP2016119300A (https=)
CN (1) CN105717078A (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109416325A (zh) * 2017-02-01 2019-03-01 伊鲁米那股份有限公司 具有在非直线布局中的基准的系统和方法
CN111239085A (zh) * 2019-03-06 2020-06-05 南昌工程学院 基于深度学习的显微视觉伺服控制方法
US11262307B2 (en) 2017-02-01 2022-03-01 Illumina, Inc. System and method with reflective fiducials for locating or registering locations receiving biological samples in successive cycles of fluorescent imaging
US11427868B2 (en) 2017-02-01 2022-08-30 Illumina, Inc. System and method with fiducials of non-closed shapes
US11835460B2 (en) 2017-02-01 2023-12-05 Illumina, Inc. System and method with fiducials having offset layouts
US11896944B2 (en) 2017-02-01 2024-02-13 Illumina, Inc. System and method with fiducials responding to multiple excitation frequencies

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11676794B2 (en) 2017-03-17 2023-06-13 United Kingdom Research And Innovation Super-resolution microscopy
GB201704275D0 (en) * 2017-03-17 2017-05-03 Science And Tech Facilities Council Super-resolution microscopy
US10589360B2 (en) 2018-06-17 2020-03-17 Arevo, Inc. Systems of articles of manufacture with corresponding fiducial marks and dimensional variations
JP7110383B2 (ja) * 2018-10-19 2022-08-01 株式会社日立ハイテク アライメントシステム及び位置合わせ用シール
JP6901510B2 (ja) * 2019-02-19 2021-07-14 日本電子株式会社 観察方法、画像処理装置、および電子顕微鏡
WO2020186029A1 (en) * 2019-03-14 2020-09-17 Applied Materials, Inc. Identifying fiducial markers in microscope images
CN110865058A (zh) * 2019-11-21 2020-03-06 成都博奥独立医学实验室有限公司 激光微阵列芯片扫描仪的浓度梯度荧光校准片及校准方法
US11551906B1 (en) * 2021-06-30 2023-01-10 Fei Company Time-gated detection, dual-layer SPAD-based electron detection
WO2024242993A2 (en) * 2023-05-19 2024-11-28 Yale University Systems and methods for subvoxel sem based volume electron microscopy
WO2024261804A1 (ja) * 2023-06-19 2024-12-26 日本電信電話株式会社 マーカ、位置合わせ装置、及び位置合わせ方法
EP4679056A1 (en) * 2024-07-08 2026-01-14 Fei Company Method for creating a sample for use in a charged particle microscope

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CN1820346A (zh) * 2003-05-09 2006-08-16 株式会社荏原制作所 基于带电粒子束的检查装置及采用了该检查装置的器件制造方法
WO2006127692A2 (en) * 2005-05-23 2006-11-30 Hess Harald F Optical microscopy with phototransformable optical labels
US20100231922A1 (en) * 2006-12-21 2010-09-16 Howard Hughes Medical Institute Three-dimensional interferometric microscopy
CN103367085A (zh) * 2012-04-05 2013-10-23 Fei公司 提供深度分辨图像的带电粒子显微镜
CN103994987A (zh) * 2013-02-19 2014-08-20 Fei公司 荧光标记的原位再活化

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JP3746186B2 (ja) * 2000-05-12 2006-02-15 株式会社日立製作所 試料台及びその試料台を備えた走査電子顕微鏡
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US9104903B2 (en) * 2012-03-16 2015-08-11 University Of Utah Research Foundation Microscopy visualization
JP6353450B2 (ja) * 2012-09-07 2018-07-04 カール・ツァイス・エックス−レイ・マイクロスコピー・インコーポレイテッドCarl Zeiss X−Ray Microscopy, Inc. 共焦点x線蛍光・x線コンピュータ断層撮影複合システムおよび方法

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WO2006127692A2 (en) * 2005-05-23 2006-11-30 Hess Harald F Optical microscopy with phototransformable optical labels
US20100231922A1 (en) * 2006-12-21 2010-09-16 Howard Hughes Medical Institute Three-dimensional interferometric microscopy
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CN103994987A (zh) * 2013-02-19 2014-08-20 Fei公司 荧光标记的原位再活化

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109416325A (zh) * 2017-02-01 2019-03-01 伊鲁米那股份有限公司 具有在非直线布局中的基准的系统和方法
US11249025B2 (en) 2017-02-01 2022-02-15 Illumina, Inc. System and method with fiducials in non-rectilinear layouts
US11262307B2 (en) 2017-02-01 2022-03-01 Illumina, Inc. System and method with reflective fiducials for locating or registering locations receiving biological samples in successive cycles of fluorescent imaging
US11427868B2 (en) 2017-02-01 2022-08-30 Illumina, Inc. System and method with fiducials of non-closed shapes
US11835460B2 (en) 2017-02-01 2023-12-05 Illumina, Inc. System and method with fiducials having offset layouts
US11896944B2 (en) 2017-02-01 2024-02-13 Illumina, Inc. System and method with fiducials responding to multiple excitation frequencies
CN111239085A (zh) * 2019-03-06 2020-06-05 南昌工程学院 基于深度学习的显微视觉伺服控制方法
CN111239085B (zh) * 2019-03-06 2022-11-22 南昌工程学院 基于深度学习的显微视觉伺服控制方法

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US9368321B1 (en) 2016-06-14
US20160181060A1 (en) 2016-06-23
JP2016119300A (ja) 2016-06-30
EP3037862A1 (en) 2016-06-29

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Application publication date: 20160629