JP2016101023A - Vibration wave motor and optical device including the same - Google Patents

Vibration wave motor and optical device including the same Download PDF

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JP2016101023A
JP2016101023A JP2014237414A JP2014237414A JP2016101023A JP 2016101023 A JP2016101023 A JP 2016101023A JP 2014237414 A JP2014237414 A JP 2014237414A JP 2014237414 A JP2014237414 A JP 2014237414A JP 2016101023 A JP2016101023 A JP 2016101023A
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vibrator
vibration wave
wave motor
pressurizing
sliding member
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俊之 上原
Toshiyuki Uehara
俊之 上原
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Canon Inc
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Canon Inc
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Abstract

PROBLEM TO BE SOLVED: To provide a compact thin vibration wave motor capable of applying pressure to a transducer even when posture of the transducer is tilted.SOLUTION: A vibration wave motor includes: a vibrator having a projection; a slide member having a friction contact surface with which the projection is frictionally in contact; a vibrator holding member for holding the vibrator; and a pressure applying part for pressing the vibrator to the slide member. By making the vibrator to generate vibrations, the vibrator and the slide member are relatively moved. The pressure applying part is mounted to the vibrator holding member so as to be capable of rotating around an axis line in a direction perpendicular to a direction in which the vibrator and the slide member are relatively moved and to a pressure applying direction by the pressure applying part.SELECTED DRAWING: Figure 1

Description

本発明は振動波モータに関し、特に振動子に発生する超音波振動によって、振動子と振動子に摩擦接触する摺動部材とが相対移動する超音波モータに関する。   The present invention relates to a vibration wave motor, and more particularly to an ultrasonic motor in which a vibrator and a sliding member that is in frictional contact with the vibrator are relatively moved by ultrasonic vibration generated in the vibrator.

近年、デジタルカメラやビデオカメラ等の撮影装置では、フォーカシングやズーミングの駆動源として、電磁型モータよりも優れる振動波モータとしての超音波モータが用いられている。   In recent years, in an imaging apparatus such as a digital camera or a video camera, an ultrasonic motor as a vibration wave motor superior to an electromagnetic motor is used as a driving source for focusing and zooming.

超音波モータは、圧電素子を有する振動子において超音波振動を励振させ、この振動子を摺動部材に加圧して接触させることで、両者間に発生する摩擦力による駆動力を得るモータである。このように超音波モータは摩擦力による駆動力を得るため、安定した加圧下における安定した摩擦力を得ることが重要となる。しかしながら、安定した加圧を行う為には、複雑な加圧機構と、そのためのスペースが必要となり、超音波モータが大型化してしまう問題がある。それに対して、従来から安定した加圧を小型な機構で実現するための超音波モータの例が提案されている。   An ultrasonic motor is a motor that obtains a driving force by a frictional force generated between the two by exciting ultrasonic vibration in a vibrator having a piezoelectric element and pressurizing and contacting the vibrator with a sliding member. . As described above, since an ultrasonic motor obtains a driving force based on a frictional force, it is important to obtain a stable frictional force under stable pressure. However, in order to perform stable pressurization, a complicated pressurization mechanism and a space for it are required, and there is a problem that the ultrasonic motor becomes large. On the other hand, an example of an ultrasonic motor for realizing stable pressurization with a small mechanism has been proposed.

例えば、特許文献1では、加圧ばねを板ばねとし、その両端部をケース部材で保持し、板ばねの中央部で振動子の中央の突起部を加圧する構成を用いて小型化を実現している。特許文献2では、振動子の定在波の節に対応する位置の振動子の両端面に支持軸を設け、コイルばねで付勢される加圧板がこの支持軸を加圧する構成を用いて小型化を実現している。上記特許文献1、特許文献2は共に振動子の中心に向けて加圧を行うことで、安定した加圧を実現している。   For example, in Patent Document 1, the pressure spring is a leaf spring, both ends thereof are held by a case member, and the size is reduced by using a configuration in which the center protrusion of the leaf spring is pressed by the center portion of the leaf spring. ing. In Patent Document 2, a support shaft is provided on both end faces of a vibrator at a position corresponding to a node of a standing wave of the vibrator, and a compact structure is configured using a configuration in which a pressure plate biased by a coil spring presses the support shaft. Has been realized. In both Patent Document 1 and Patent Document 2, stable pressurization is realized by performing pressurization toward the center of the vibrator.

特開2009−268236号公報JP 2009-268236 A 特開平9−215350号公報JP-A-9-215350

上述の特許文献1や特許文献2に開示された従来技術による超音波モータでは、製造誤差等何らかの要因により振動子の姿勢に傾きがある場合に、加圧の方向が、振動子の中央位置に向かう方向からずれてしまい、安定した摩擦力を得ることが出来なくなる。   In the conventional ultrasonic motor disclosed in Patent Document 1 and Patent Document 2 described above, when the posture of the vibrator is inclined due to some factor such as a manufacturing error, the direction of pressurization is at the center position of the vibrator. It will deviate from the direction it heads, making it impossible to obtain a stable friction force.

そこで、本発明の目的は、振動子の姿勢に傾きがある場合でも、振動子に安定した加圧を行うことが可能なコンパクトな構成の振動波モータを提供することである。   Accordingly, an object of the present invention is to provide a vibration wave motor having a compact configuration that can stably pressurize a vibrator even when the posture of the vibrator is inclined.

上記目的を達成するために、本発明では、突起部を有する振動子と、突起部が摩擦接触する摩擦接触面を有する摺動部材と、振動子を保持する振動子保持部材と、振動子を摺動部材に加圧する加圧部とを備え、振動子に振動を発生させることにより振動子と摺動部材とが相対移動する振動波モータにおいて、振動子と摺動部材が相対移動する方向と加圧部による加圧方向とに直交する方向の軸線まわりに回動可能なように、加圧部が振動子保持部材に取り付けられている構成とした。   In order to achieve the above object, in the present invention, a vibrator having a protrusion, a sliding member having a friction contact surface with which the protrusion comes into frictional contact, a vibrator holding member that holds the vibrator, and a vibrator are provided. A vibration wave motor that includes a pressurizing unit that pressurizes the sliding member and causes the vibrator and the sliding member to move relative to each other by generating vibration in the vibrator; and a direction in which the vibrator and the sliding member move relative to each other The pressurizing unit is attached to the vibrator holding member so as to be rotatable around an axis in a direction orthogonal to the pressurizing direction by the pressurizing unit.

本発明により、振動子の姿勢に傾きがある場合でも、振動子に安定した加圧を行うことが可能なコンパクトな構成の振動波モータを得ることができる。   According to the present invention, it is possible to obtain a vibration wave motor having a compact configuration that can stably pressurize a vibrator even when the posture of the vibrator is inclined.

本発明の実施例1における超音波モータの構成を示す駆動方向の断面図である。It is sectional drawing of the drive direction which shows the structure of the ultrasonic motor in Example 1 of this invention. 本発明の実施例1における超音波モータの構成を示す駆動方向に対し直交する方向の断面図であり、図1のA−A矢視での断面図である。It is sectional drawing of the direction orthogonal to the drive direction which shows the structure of the ultrasonic motor in Example 1 of this invention, and is sectional drawing in the AA arrow of FIG. 本発明の実施例1における超音波モータの加圧部の斜視図である。It is a perspective view of the pressurization part of the ultrasonic motor in Example 1 of the present invention. 本発明の実施例1における超音波モータの振動子保持部材の斜視図である。It is a perspective view of a vibrator holding member of an ultrasonic motor in Example 1 of the present invention. 本発明の実施例1における超音波モータの振動子保持部材に振動子が取り付けられた状態を示す斜視図である。It is a perspective view which shows the state by which the vibrator | oscillator was attached to the vibrator holding member of the ultrasonic motor in Example 1 of this invention. 本発明の実施例1における超音波モータが使用されたレンズ鏡筒の構成を示す側部断面図である。It is side part sectional drawing which shows the structure of the lens barrel in which the ultrasonic motor in Example 1 of this invention was used. 本発明の実施例1における超音波モータにおいて、振動子が傾いた状態を示す断面図である。In the ultrasonic motor in Example 1 of this invention, it is sectional drawing which shows the state in which the vibrator | tilt inclined. 本発明の実施例2における超音波モータの構成を示す駆動方向の断面図である。It is sectional drawing of the drive direction which shows the structure of the ultrasonic motor in Example 2 of this invention. 本発明の実施例2における超音波モータの構成を示す駆動方向に対し直交する方向の断面図であり、図8のB−B矢視での断面図である。It is sectional drawing of the direction orthogonal to the drive direction which shows the structure of the ultrasonic motor in Example 2 of this invention, and is sectional drawing in the BB arrow of FIG. 本発明の実施例2における超音波モータの振動子の製作誤差により振動子が傾いた状態を示す断面図である。It is sectional drawing which shows the state which the vibrator | oscillator inclined by the manufacturing error of the vibrator | oscillator of the ultrasonic motor in Example 2 of this invention.

以下に、本発明の好ましい実施の形態を、添付の図面に基づいて詳細に説明する。また、以下の各実施例の説明において図面との関連において理解を容易ならしめるべく、振動子と摺動部材との相対移動方向を「X軸」と規定し、説明を行う。また、超音波モータの振動子製造誤差等の何らかの要因による傾きが無い場合に加圧ばねにより振動子が摺動部材に対して加圧される方向を「Z軸」、X軸とZ軸とに直交する方向を「Y軸」と規定し、説明を行う。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of each embodiment, the relative movement direction of the vibrator and the sliding member is defined as “X-axis” to facilitate understanding in relation to the drawings. In addition, the direction in which the vibrator is pressed against the sliding member by the pressurizing spring when there is no inclination due to some factor such as a vibrator manufacturing error of the ultrasonic motor is expressed as “Z axis”, X axis and Z axis. The direction orthogonal to the direction is defined as the “Y-axis” and will be described.

(実施例1)
以下、図1から図5を用いて、本発明の振動波モータとしての超音波モータの実施例1の構成を説明する。
Example 1
Hereinafter, the configuration of the first embodiment of the ultrasonic motor as the vibration wave motor of the present invention will be described with reference to FIGS. 1 to 5.

図1は本発明の実施例1における超音波モータの構成を示しており、振動子と摺動部材との相対移動方向における断面図(XZ断面)である。図2は本発明の実施例1における超音波モータの構成を示しており、振動子と摺動部材との相対移動方向に対し直交する方向の断面図(YZ断面)である。図3は本発明の実施例1における超音波モータの加圧部の斜視図である。図4は本発明の実施例1における超音波モータの振動子保持部材の斜視図である。図5は本発明の実施例1における超音波モータの振動子保持部材に振動子が取り付けられた状態を示す斜視図である。   FIG. 1 shows a configuration of an ultrasonic motor according to a first embodiment of the present invention, and is a cross-sectional view (XZ cross section) in a relative movement direction between a vibrator and a sliding member. FIG. 2 shows a configuration of the ultrasonic motor according to the first embodiment of the present invention, and is a cross-sectional view (YZ cross section) in a direction orthogonal to the relative movement direction of the vibrator and the sliding member. FIG. 3 is a perspective view of the pressure unit of the ultrasonic motor according to the first embodiment of the present invention. FIG. 4 is a perspective view of the vibrator holding member of the ultrasonic motor according to the first embodiment of the present invention. FIG. 5 is a perspective view showing a state in which the vibrator is attached to the vibrator holding member of the ultrasonic motor according to the first embodiment of the present invention.

図1および図2において、8は超音波モータユニット全体を支えるユニットベースである。ユニットベース8には、Z軸方向の下側に摺動部材3が固定され、Z軸方向の上側にカバー部材としての天板9が固定される。そして、天板9には4つの転動部材6が組み込まれている。転動部材6は天板9と振動子保持部材5とに設けられたガイド溝により挟持された状態で転動することにより、振動子保持部材5が図1における移動方向6a(X軸方向)に移動可能となっている。   1 and 2, reference numeral 8 denotes a unit base that supports the whole ultrasonic motor unit. On the unit base 8, the sliding member 3 is fixed on the lower side in the Z-axis direction, and the top plate 9 as a cover member is fixed on the upper side in the Z-axis direction. Four rolling members 6 are incorporated in the top plate 9. The rolling member 6 rolls in a state of being sandwiched by guide grooves provided in the top plate 9 and the vibrator holding member 5, so that the vibrator holding member 5 moves in the moving direction 6a (X-axis direction) in FIG. It is possible to move to.

図4に示すように、振動子保持部材5には4つのガイド溝5bが設けられ、天板9にもガイド溝5bと対向する位置に同様の4つのガイド溝が設けられ(不図示)、これらのガイド溝に転動部材6が挟持されて組み込まれている。   As shown in FIG. 4, the vibrator holding member 5 is provided with four guide grooves 5b, and the top plate 9 is also provided with the same four guide grooves at positions facing the guide grooves 5b (not shown). Rolling members 6 are sandwiched and incorporated in these guide grooves.

図5に示すように、振動子保持部材5には、振動子保持部材5の駆動時に高周波駆動電圧が印加されて励振する圧電素子2と、圧電素子2により超音波振動が励起される振動板1とからなる振動子101が取り付けられている。X軸方向に二か所設けられた振動子保持部材5の取付け部において、振動子101が接着剤などで振動子保持部材5に取り付けられている。なお、圧電素子2と振動板1は接着剤で貼り付けられて振動子101を構成している。振動板1には先端が球形状の突起部1aが駆動方向であるX軸方向に並んで2つ形成されている。   As shown in FIG. 5, the vibrator holding member 5 includes a piezoelectric element 2 that is excited by being applied with a high-frequency driving voltage when the vibrator holding member 5 is driven, and a vibration plate in which ultrasonic vibration is excited by the piezoelectric element 2. 1 is attached. The vibrator 101 is attached to the vibrator holding member 5 with an adhesive or the like at the attachment portion of the vibrator holding member 5 provided at two locations in the X-axis direction. Note that the piezoelectric element 2 and the diaphragm 1 are bonded with an adhesive to constitute the vibrator 101. The diaphragm 1 has two protrusions 1a having a spherical tip arranged side by side in the X-axis direction, which is the driving direction.

図3に示すように、振動子101を摺動部材3に加圧力により付勢するための薄板状の板ばねである加圧部材11が2つのブラケット10に取り付けられている。本実施例においては、支持部材としての2つのブラケット10と加圧部材11とにより加圧部を構成している。   As shown in FIG. 3, a pressure member 11, which is a thin plate spring for biasing the vibrator 101 to the sliding member 3 by pressure, is attached to the two brackets 10. In the present embodiment, the two brackets 10 serving as support members and the pressure member 11 constitute a pressure unit.

図1及び図2に示すように、この加圧部材11からの加圧力を、球面を有する突起部7aで受ける加圧ベース7が、振動子101において、圧電素子2の振動板1が貼り付けられている側とは逆側の圧電素子2に固定されている。そして、加圧ベース7の上方に配置された加圧部材11からの加圧力を加圧ベース7が受け、加圧ベース7が振動子101を摺動部材3に対して加圧することで、突起部1aが摺動部材3の摩擦接触面3aに摩擦接触する。   As shown in FIGS. 1 and 2, the pressure base 7 that receives the pressure applied from the pressure member 11 by a projection 7 a having a spherical surface is attached to the vibrator 101 and the diaphragm 1 of the piezoelectric element 2 is attached to the vibrator 101. It is fixed to the piezoelectric element 2 on the side opposite to the side where it is provided. The pressurization base 7 receives pressure from the pressurization member 11 disposed above the pressurization base 7, and the pressurization base 7 pressurizes the vibrator 101 against the sliding member 3. The part 1a is in frictional contact with the frictional contact surface 3a of the sliding member 3.

図4に示すように、振動子保持部材5には、加圧部材11とブラケット10とから成る加圧部を回転自在に保持する支承軸5aが設けられている。支承軸5aは、振動子101と摺動部材3が相対移動する方向6a(X軸方向)と加圧部材11による加圧方向(Z軸方向)とに直交する方向、すなわち、振動子保持部材5を横断する方向であるY軸方向において離間し対向して設けられている。ここで、支承軸5aは、振動子101の2つの突起部1aと摺動部材3とが接触する摩擦接触面3aの近傍に位置するように配置される。また、支承軸5aは、振動子保持部材5を横断する方向における両縁部から互いに向き合うように内方に突出するように設けられている。   As shown in FIG. 4, the vibrator holding member 5 is provided with a support shaft 5 a that rotatably holds a pressurizing unit including a pressurizing member 11 and a bracket 10. The support shaft 5a is a direction orthogonal to the direction 6a (X-axis direction) in which the vibrator 101 and the sliding member 3 move relative to each other and the pressurizing direction (Z-axis direction) by the pressurizing member 11, that is, the vibrator holding member. 5 in the Y-axis direction, which is a direction crossing 5. Here, the support shaft 5a is disposed so as to be positioned in the vicinity of the friction contact surface 3a where the two protrusions 1a of the vibrator 101 and the sliding member 3 are in contact with each other. Further, the support shaft 5 a is provided so as to protrude inward so as to face each other from both edges in a direction crossing the vibrator holding member 5.

図3に示すように、2つのブラケット10のそれぞれには穴部10aが形成されている。それぞれの穴部10aに振動子保持部材5のそれぞれの支承軸5aが受け入れられるように取り付けられる。図3に示す加圧部材11とブラケット10とから成る加圧部を振動子保持部材5に組み込む際には、薄板状の加圧部材11を弾性変形させることで、容易にそれらを組み込むことが可能である。なお、ブラケット10と加圧部材11から成る加圧部は、振動子保持部材5の支承軸5aのまわりに回動可能に保持される。すなわち、図1及び図2に示すように、加圧部は、振動子101と摺動部材8が相対移動する方向(X軸方向)と加圧部による加圧方向(Z軸方向)とに直交する方向(Y軸方向)の軸線54まわりに回動可能なように、振動子保持部材に取り付けられる。好適には、この軸線54が摩擦接触面上3aまたはその近傍に位置するように、振動子101を摺動部材3に対して安定して加圧することが可能となる。詳細については後述する。   As shown in FIG. 3, a hole 10 a is formed in each of the two brackets 10. Respective support shafts 5a of the vibrator holding member 5 are attached to the respective hole portions 10a so as to be received. When the pressurizing unit composed of the pressurizing member 11 and the bracket 10 shown in FIG. 3 is incorporated into the vibrator holding member 5, they can be easily incorporated by elastically deforming the thin plate-like pressurizing member 11. Is possible. Note that the pressurizing portion including the bracket 10 and the pressurizing member 11 is rotatably held around the support shaft 5 a of the vibrator holding member 5. That is, as shown in FIG. 1 and FIG. 2, the pressurizing unit is divided into a direction in which the vibrator 101 and the sliding member 8 are relatively moved (X-axis direction) and a pressurizing direction by the pressurizing unit (Z-axis direction). It is attached to the vibrator holding member so as to be rotatable around an axis line 54 in the orthogonal direction (Y-axis direction). Preferably, the vibrator 101 can be stably pressed against the sliding member 3 so that the axis 54 is positioned on the friction contact surface 3a or in the vicinity thereof. Details will be described later.

また、図2に示すように、移動方向に直交する方向(Y軸方向)において、加圧部材11及びブラケット10から成る加圧部は振動子101を跨ぐように配置されている。このように、加圧部のブラケット10を振動子101の両側に配置して振動子保持部材5に装着されるように構成することで、超音波モータをコンパクトに薄型化することが可能となり、かつ、安定した加圧をコンパクトな構成で実現している。   In addition, as shown in FIG. 2, the pressurizing unit including the pressurizing member 11 and the bracket 10 is disposed so as to straddle the vibrator 101 in the direction orthogonal to the moving direction (Y-axis direction). Thus, by arranging the bracket 10 of the pressurizing unit on both sides of the vibrator 101 so as to be attached to the vibrator holding member 5, it becomes possible to make the ultrasonic motor compact and thin, In addition, stable pressurization is realized with a compact configuration.

本実施例においては、振動子保持部材5に支承軸5aを設け、加圧部のブラケット10に穴部10aを設けているが、振動子保持部材5に穴部を設け、ブラケット10に支承軸を設けるものであってもよい。すなわち、振動子保持部材5が支承軸と穴部とのいずれか一方を有し、加圧部が支承軸と穴部のいずれか他方を有する構成でもよい。また、加圧部材を支持する支持部材と振動子保持部材の双方に穴部を設け、これら穴部に別体の支持軸を挿入するような構成でもよい。   In this embodiment, the support shaft 5a is provided in the vibrator holding member 5 and the hole 10a is provided in the bracket 10 of the pressurizing portion. However, the hole is provided in the vibrator holding member 5 and the support shaft is provided in the bracket 10. May be provided. That is, the vibrator holding member 5 may have one of the support shaft and the hole, and the pressurizing portion may have either the support shaft and the hole. Also, a configuration may be adopted in which holes are provided in both the support member that supports the pressure member and the vibrator holding member, and separate support shafts are inserted into these holes.

以上のような構成で本発明の振動波モータとしての超音波モータは構成される。図1及び図2に示すように、加圧部材11は、振動子101を摺動部材3に対して矢印の方向11a(Z軸方向)に加圧力を付与している。すなわち、加圧力は、振動板1の二つの突起部1aの間の、振動子101の中心線52と一致する方向11aに向けて付与される。そして、振動子101に超音波振動を発生させることにより突起部1aと摺動部材3の間での摩擦による駆動力が生じ、振動子101が摺動部材3に対し移動方向6a(X軸方向)に相対移動する。なお、本実施例では振動子101が移動し、摺動部材3が固定される構成としたが、振動子101を固定し、摺動部材3が移動する構成でもよい。   The ultrasonic motor as the vibration wave motor of the present invention is configured as described above. As shown in FIGS. 1 and 2, the pressurizing member 11 applies pressure to the sliding member 3 in the arrow direction 11 a (Z-axis direction). That is, the applied pressure is applied toward the direction 11 a that coincides with the center line 52 of the vibrator 101 between the two protrusions 1 a of the diaphragm 1. Then, by generating ultrasonic vibration in the vibrator 101, a driving force is generated by friction between the protrusion 1a and the sliding member 3, and the vibrator 101 moves in the moving direction 6a (X-axis direction) with respect to the sliding member 3. ). In this embodiment, the vibrator 101 is moved and the sliding member 3 is fixed. However, the vibrator 101 may be fixed and the sliding member 3 may be moved.

次に、図6において、レンズ鏡筒のフォーカシングの駆動源に、本発明の超音波モータを用いたレンズ鏡筒の構成を説明する。   Next, referring to FIG. 6, the configuration of the lens barrel using the ultrasonic motor of the present invention as a driving source for focusing the lens barrel will be described.

図6は本発明の実施例1における超音波モータが使用されたレンズ鏡筒の構成を示す側部断面図である。図6において、光学装置であるレンズ鏡筒の光軸方向と、超音波モータの振動子101が摺動部材3に対し移動する方向6a(X軸方向)とは一致する。   FIG. 6 is a side sectional view showing a configuration of a lens barrel using the ultrasonic motor according to the first embodiment of the present invention. In FIG. 6, the optical axis direction of the lens barrel that is an optical device coincides with the direction 6 a (X-axis direction) in which the vibrator 101 of the ultrasonic motor moves relative to the sliding member 3.

レンズ鏡筒21の撮像光学系は被写体側から1群レンズ22及び2群レンズ23を有している。そして、これらのレンズは1−2群レンズ鏡筒27により保持される。次いで、フォーカスレンズ24が配置され、フォーカスレンズ24はレンズ移動枠28により保持される。次いで、4群レンズ25、5群レンズ26が配置されており、これらは4−5群レンズ鏡筒29により保持される。1群レンズ22、2群レンズ23、4群レンズ25、5群レンズ26は、固定レンズである。また、絞りユニット駆動モータ32により絞りが駆動される絞りユニット33が、2群レンズ23とフォーカスレンズ24との間に設けられている。   The imaging optical system of the lens barrel 21 has a first group lens 22 and a second group lens 23 from the subject side. These lenses are held by the first-second lens barrel 27. Next, the focus lens 24 is disposed, and the focus lens 24 is held by the lens moving frame 28. Next, a fourth group lens 25 and a fifth group lens 26 are arranged, and these are held by a 4-5 group lens barrel 29. The first group lens 22, the second group lens 23, the fourth group lens 25, and the fifth group lens 26 are fixed lenses. A diaphragm unit 33 whose diaphragm is driven by the diaphragm unit drive motor 32 is provided between the second group lens 23 and the focus lens 24.

そして、レンズ移動枠28を光軸41の方向において案内して前後移動させるための2つのメインガイドバー30が、レンズ鏡筒21の鏡筒内壁において光軸41に平行に延在するように取り付けられている。また、レンズ鏡筒21の鏡筒内部には、振動子保持部材5が光軸41の方向に移動可能となるようにユニットベース8が取り付けられている。振動子保持部材5とレンズ移動枠28とは連結部材31で連結され、振動子101の駆動力をレンズ移動枠28へ伝達することで、フォーカスレンズ24を光軸41の方向に移動させることが可能となる。   The two main guide bars 30 for guiding the lens moving frame 28 in the direction of the optical axis 41 and moving back and forth are attached so as to extend in parallel to the optical axis 41 on the inner wall of the lens barrel 21. It has been. A unit base 8 is attached inside the lens barrel 21 so that the vibrator holding member 5 can move in the direction of the optical axis 41. The vibrator holding member 5 and the lens moving frame 28 are connected by a connecting member 31, and the focus lens 24 can be moved in the direction of the optical axis 41 by transmitting the driving force of the vibrator 101 to the lens moving frame 28. It becomes possible.

次に図7を用いて、振動子の製造誤差等の何らかの要因により振動子の姿勢に傾きがある場合について説明する。   Next, a case where the posture of the vibrator is inclined due to some factor such as a manufacturing error of the vibrator will be described with reference to FIG.

図7は本発明の実施例1における超音波モータにおいて、振動子の製作誤差その他何らかの要因により振動子が傾いた状態を示す断面図である。なお、図7に示す断面図は図1のそれと同方向に見た図である。   FIG. 7 is a cross-sectional view showing a state where the vibrator is tilted due to a manufacturing error of the vibrator and other factors in the ultrasonic motor according to the first embodiment of the present invention. 7 is a view seen in the same direction as that of FIG.

図7に示すように、振動板1の製造誤差その他何らかの要因により、左側突起部1bのZ軸方向における寸法Xに対して右側突起部1cのZ軸方向における寸法Yが小さい場合,振動子101は矢印51で示す方向に傾いてしまう。振動子101は振動子保持部材5の振動子取付け部に固定されているが、その取付け部の剛性は然程大きくないため振動子101は傾いてしまう。加圧部材11から加圧力が付与される加圧ベース7も振動子101の傾斜に合わせて傾く。加圧部のブラケット10はその穴部10aにおいて、振動子保持部材5の支承軸5aに対して回動可能に取り付けられているため、緊密に加圧ベース7を付勢している加圧部材11を有する加圧部も振動子101及び加圧ベース7に合わせて傾斜する。従って、振動子101が中心線52から中心線53に傾斜した場合、加圧部材11からの加圧力も中心線52から傾斜した中心線53に沿って振動子101に付与されることとなる。この際、加圧部材11は加圧ベース7の球面状の曲面を有する突起部7aに点接触で付勢する構成とされているため、好適にバランスよく加圧ベース7を介して振動子101に加圧力が付与されることとなる。   As shown in FIG. 7, when the dimension Y in the Z-axis direction of the right protrusion 1c is smaller than the dimension X in the Z-axis direction of the left protrusion 1b due to a manufacturing error of the diaphragm 1 or some other factor, the vibrator 101 Tilts in the direction indicated by arrow 51. Although the vibrator 101 is fixed to the vibrator mounting portion of the vibrator holding member 5, the vibrator 101 is inclined because the rigidity of the mounting portion is not so high. The pressurizing base 7 to which a pressing force is applied from the pressurizing member 11 is also tilted in accordance with the tilt of the vibrator 101. Since the bracket 10 of the pressurizing portion is rotatably attached to the support shaft 5a of the vibrator holding member 5 in the hole portion 10a, the pressurizing member that urges the pressurizing base 7 closely. 11 is also inclined according to the vibrator 101 and the pressure base 7. Therefore, when the vibrator 101 is inclined from the center line 52 to the center line 53, the applied pressure from the pressing member 11 is also applied to the vibrator 101 along the center line 53 inclined from the center line 52. At this time, since the pressing member 11 is configured to be urged by point contact to the protruding portion 7 a having a spherical curved surface of the pressing base 7, the vibrator 101 is preferably connected through the pressing base 7 in a well-balanced manner. A pressurizing force will be given to.

また、加圧部材11からの加圧力は、好適には、振動板1の二つの突起部1aの間の、振動子101の中心線52と一致する矢印の方向11aに向けて付与される。更に、加圧部が回動中心とする軸線54が、摩擦部材3の摩擦接触面上3aまたはその近傍に位置するように、加圧部が振動子保持部材5に好適に取り付けられている。これにより、振動子101が傾斜した場合であっても、加圧部材11からの加圧力は振動子101の2つの突起部1a間の中心に向けバランス良く2つの突起部1aに対して付与されることとなる。そのため、振動子101を安定して加圧することが可能となる。   Further, the pressing force from the pressurizing member 11 is preferably applied in the direction of the arrow 11 a that coincides with the center line 52 of the vibrator 101 between the two protrusions 1 a of the diaphragm 1. Further, the pressurizing part is suitably attached to the vibrator holding member 5 so that the axis 54 centered on the pressurizing part is located on the friction contact surface 3a of the friction member 3 or in the vicinity thereof. Thereby, even when the vibrator 101 is inclined, the pressure from the pressure member 11 is applied to the two protrusions 1a in a well-balanced manner toward the center between the two protrusions 1a of the vibrator 101. The Rukoto. Therefore, the vibrator 101 can be stably pressurized.

(実施例2)
次に、図8から図10を用いて、超音波モータの薄型化を図りつつ、振動子101を摺動部材3に対して安定して加圧することが可能な、本発明の振動波モータとしての超音波モータの実施例2の構成を説明する。基本構成は実施例1と同様であり、ここでは相違点のみを説明する。
(Example 2)
Next, the vibration wave motor of the present invention capable of stably pressing the vibrator 101 against the sliding member 3 while reducing the thickness of the ultrasonic motor with reference to FIGS. 8 to 10. The configuration of the ultrasonic motor according to the second embodiment will be described. The basic configuration is the same as that of the first embodiment, and only the differences will be described here.

図8は本発明の実施例2における超音波モータの構成を示しており、振動子と摺動部材との相対移動方向における断面図(XZ断面)である。図9は本発明の実施例2における超音波モータの構成を示しており、振動子と摺動部材との相対移動方向に対し直交する方向の断面図(YZ断面)である。図10は本発明の実施例2における超音波モータにおいて、製作誤差その他何らかの要因により振動子が傾いた状態を示す図8と同様な方向で見た断面図である。   FIG. 8 shows the configuration of the ultrasonic motor according to the second embodiment of the present invention, and is a cross-sectional view (XZ cross section) in the relative movement direction of the vibrator and the sliding member. FIG. 9 shows a configuration of the ultrasonic motor according to the second embodiment of the present invention, and is a cross-sectional view (YZ cross section) in a direction orthogonal to the relative movement direction of the vibrator and the sliding member. FIG. 10 is a cross-sectional view of the ultrasonic motor according to the second embodiment of the present invention viewed in the same direction as FIG. 8 and shows a state in which the vibrator is inclined due to a manufacturing error or some other factor.

振動子保持部材5を移動方向6a(X軸方向)へ案内するため、本実施例の超音波モータでは、転動部材6のガイド部を摺動部材3に設けている。摺動部材3の摩擦接触面の、相対移動方向と直交する方向(Y軸方向)の両側の各側面に、それぞれV字形状の断面を有するガイド溝3bが相対移動方向(X軸方向)に延在するように形成されている。摺動部材3の側面に設けられたガイド溝3bに対向するようにして、振動子保持部材5にもV字形状の断面を有するガイド溝5bが、好適には片側2箇所ずつ形成されている。摺動部材3の側面に設けられたガイド溝3bと振動子保持部材5に設けられたガイド溝5bとの間に転動部材6が挟持されている。   In order to guide the vibrator holding member 5 in the moving direction 6a (X-axis direction), the guide member of the rolling member 6 is provided on the sliding member 3 in the ultrasonic motor of this embodiment. Guide grooves 3b each having a V-shaped cross section are provided in the relative movement direction (X-axis direction) on each side surface on both sides of the friction contact surface of the sliding member 3 in the direction orthogonal to the relative movement direction (Y-axis direction). It is formed to extend. The vibrator holding member 5 is preferably formed with two guide grooves 5b each having a V-shaped cross section so as to face the guide groove 3b provided on the side surface of the sliding member 3. . A rolling member 6 is sandwiched between a guide groove 3 b provided on the side surface of the sliding member 3 and a guide groove 5 b provided on the vibrator holding member 5.

転動部材6を天板9と振動子保持部材5との間に挟持させて振動子保持部材5を相対移動方向に案内する実施例1の構成に対し、実施例2では上述の如く構成しているため、ユニットベース8と天板9を省くことが出来る。これにより、超音波モータを更に薄型化したコンパクトな構成を実現している。なお、他の構成は実施例1と同様である。   In contrast to the configuration of the first embodiment in which the rolling member 6 is sandwiched between the top plate 9 and the vibrator holding member 5 to guide the vibrator holding member 5 in the relative movement direction, the second embodiment is configured as described above. Therefore, the unit base 8 and the top plate 9 can be omitted. This realizes a compact configuration in which the ultrasonic motor is further thinned. Other configurations are the same as those in the first embodiment.

図10に示すように、振動子101が製作誤差その他何らかの要因により、矢印51で示す方向に傾いて姿勢が変化した場合でも、実施例1において説明したように、加圧力を二つの突起部1aにバランスよく付与することができる。即ち、実施例2による薄型構成の超音波モータにおいても、加圧部材11による矢印の方向11aの加圧力は、傾斜した振動子101の中心線53に沿って2つの突起部1aの中心の位置の方向に付与される。これにより、2つの突起部1aに加圧力をバランスよく付与させることができる。   As shown in FIG. 10, even when the vibrator 101 is tilted in the direction indicated by the arrow 51 due to a manufacturing error or some other factor, the posture is changed as described in the first embodiment. Can be provided in a well-balanced manner. That is, also in the thin ultrasonic motor according to the second embodiment, the pressing force in the direction 11 a of the arrow by the pressing member 11 is the position of the center of the two protrusions 1 a along the center line 53 of the tilted vibrator 101. Given in the direction. Thereby, a pressurizing force can be given to two projection parts 1a with good balance.

以上、本発明の好ましい実施形態について説明したが、本発明はこれらの実施形態に限定されず、その要旨の範囲内で種々の変形及び変更が可能である。   As mentioned above, although preferable embodiment of this invention was described, this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

1 振動板
101 振動子
1a 突起部
1b 左側突起部
1c 右側突起部
2 圧電素子
3 摺動部材
3a 摩擦接触面
3b ガイド溝
5 振動子保持部材
5a 支承軸
5b ガイド溝
6 転動部材
6a 移動方向
7 加圧ベース
7a 突起部
8 ユニットベース
9 天板
10 ブラケット
10a 穴部
11 加圧部材
11a 矢印
21 レンズ鏡筒
22 1群レンズ
23 2群レンズ
24 フォーカスレンズ
25 4群レンズ
26 5群レンズ
27 1−2群レンズ鏡筒
28 レンズ移動枠
29 4−5群レンズ鏡筒
30 メインガイドバー
31 連結部材
32 絞りユニット駆動モータ
33 絞りユニット
41 光軸
51 矢印
52 中心線
53 中心線
54 軸線
DESCRIPTION OF SYMBOLS 1 Diaphragm 101 Vibrator 1a Protrusion part 1b Left side protrusion part 1c Right side protrusion part 2 Piezoelectric element 3 Sliding member 3a Friction contact surface 3b Guide groove 5 Vibrator holding member 5a Bearing shaft 5b Guide groove 6 Rolling member 6a Moving direction 7 Pressure base 7a Protrusion 8 Unit base 9 Top plate 10 Bracket 10a Hole 11 Pressure member 11a Arrow 21 Lens barrel 22 1st group lens 23 2nd group lens 24 Focus lens 25 4th group lens 26 5th group lens 27 1-2 Group lens barrel 28 Lens moving frame 29 4-5 group lens barrel 30 Main guide bar 31 Connecting member 32 Aperture unit drive motor 33 Aperture unit 41 Optical axis 51 Arrow 52 Center line 53 Center line 54 Axis line

Claims (10)

突起部を有する振動子と、
前記突起部が摩擦接触する摩擦接触面を有する摺動部材と、
前記振動子を保持する振動子保持部材と、
前記振動子を前記摺動部材に加圧する加圧部と、
を備え、前記振動子に振動を発生させることにより前記振動子と前記摺動部材とが相対移動する振動波モータにおいて、
前記振動子と前記摺動部材が相対移動する方向と前記加圧部による加圧方向とに直交する方向の軸線まわりに回動可能なように、前記加圧部が前記振動子保持部材に取り付けられていることを特徴とする振動波モータ。
A vibrator having a protrusion, and
A sliding member having a frictional contact surface with which the protrusion is in frictional contact;
A vibrator holding member for holding the vibrator;
A pressurizing unit that pressurizes the vibrator against the sliding member;
In a vibration wave motor in which the vibrator and the sliding member move relative to each other by generating vibration in the vibrator,
The pressurizing part is attached to the vibrator holding member so that the vibrator and the sliding member can rotate about an axis perpendicular to the direction in which the vibrator and the sliding member move relative to each other and the pressurizing direction by the pressurizing part. A vibration wave motor characterized by the above.
前記振動子と前記摺動部材が相対移動する方向と前記加圧部による加圧方向とに直交する方向の前記軸線は、前記摺動部材の前記摩擦接触面の近傍に位置することを特徴とする請求項1に記載の振動波モータ。   The axis in a direction orthogonal to the direction in which the vibrator and the sliding member move relative to each other and the pressing direction by the pressing unit is located in the vicinity of the friction contact surface of the sliding member. The vibration wave motor according to claim 1. 前記加圧部は前記振動子を跨ぐようにして前記振動子保持部材に取り付けられることを特徴とする請求項1または2に記載の振動波モータ。   The vibration wave motor according to claim 1, wherein the pressurizing unit is attached to the vibrator holding member so as to straddle the vibrator. 前記振動子保持部材は支承軸又は穴部のいずれか一方を有し、前記加圧部は前記支承軸又は前記穴部の他方を有し、前記支承軸が前記穴部に受け入れられることにより、前記加圧部が前記振動子保持部材に取り付けられることを特徴とする請求項1から3のいずれか一項に記載の振動波モータ。   The vibrator holding member has either one of a support shaft or a hole, the pressure part has the other of the support shaft or the hole, and the support shaft is received in the hole. 4. The vibration wave motor according to claim 1, wherein the pressurizing unit is attached to the vibrator holding member. 5. 前記加圧部は、前記振動子を加圧する加圧部材と、前記加圧部材を前記振動子保持部材に取り付ける支持部材とを有し、前記加圧部材は板ばねから成ることを特徴とする請求項1から4のいずれか一項に記載の振動波モータ。   The pressurizing unit includes a pressurizing member that pressurizes the vibrator and a support member that attaches the pressurizing member to the vibrator holding member, and the pressurizing member includes a leaf spring. The vibration wave motor according to any one of claims 1 to 4. 前記板ばねと前記振動子との間に曲面を有する突起部を備え、前記板ばねは前記突起部の前記曲面を加圧するようにして前記振動子を加圧することを特徴とする請求項5に記載の振動波モータ。   6. A protrusion having a curved surface is provided between the leaf spring and the vibrator, and the leaf spring pressurizes the vibrator so as to pressurize the curved surface of the protrusion. The described vibration wave motor. 前記振動子は二つの突起部を有し、前記振動子と前記摺動部材が相対移動する方向と前記加圧部による加圧方向とに直交する方向の前記軸線は、前記振動子の前記二つの突起部の間に位置し、前記加圧部による前記振動子への加圧力が前記振動子の前記二つの突起部の間に向けて付与されることを特徴とする請求項1ないし6のいずれか一項に記載の振動波モータ。   The vibrator has two protrusions, and the axis in the direction orthogonal to the direction in which the vibrator and the sliding member move relative to each other and the pressurizing direction by the pressurizing part is the two axes of the vibrator. 7. The device according to claim 1, wherein the pressure force is applied to the vibrator by the pressurizing unit toward the two projections of the vibrator. The vibration wave motor according to any one of the above. 前記摺動部材は、前記相対移動方向と平行な側面を前記摩擦接触面の両側に有し、前記側面には前記相対移動方向に延在する溝が設けられており、前記振動子保持部材は前記摺動部材の前記側面の溝に対向して溝が形成されており、転動部材が前記摺動部材の側面の溝と前記振動子保持部材の溝との間に挟持されていることを特徴とする請求項1ないし7のいずれか一項に記載の振動波モータ。   The sliding member has side surfaces parallel to the relative movement direction on both sides of the friction contact surface, and a groove extending in the relative movement direction is provided on the side surface, and the vibrator holding member is A groove is formed opposite to the groove on the side surface of the sliding member, and the rolling member is sandwiched between the groove on the side surface of the sliding member and the groove of the vibrator holding member. The vibration wave motor according to claim 1, wherein the vibration wave motor is characterized in that: 振動波モータは、前記振動子が超音波振動を発生する超音波モータであることを特徴とする請求項1から8のいずれか一項に記載の振動波モータ。   The vibration wave motor according to any one of claims 1 to 8, wherein the vibration wave motor is an ultrasonic motor in which the vibrator generates ultrasonic vibration. 請求項1から9のいずれか一項に記載の振動波モータと、
レンズを保持し、前記振動波モータの前記振動子保持部材に連結するレンズ移動枠と、
前記レンズの光軸方向に延在し、前記レンズ移動枠を前記光軸方向に移動可能に案内するガイドバーと、
を備え、
前記振動波モータの駆動力により前記レンズ移動枠が前記ガイドバーに沿って前記光軸方向に移動することを特徴とする光学装置。
The vibration wave motor according to any one of claims 1 to 9,
A lens moving frame that holds the lens and is coupled to the vibrator holding member of the vibration wave motor;
A guide bar that extends in the optical axis direction of the lens and guides the lens moving frame so as to be movable in the optical axis direction;
With
The optical apparatus, wherein the lens moving frame is moved in the optical axis direction along the guide bar by the driving force of the vibration wave motor.
JP2014237414A 2014-11-25 2014-11-25 Vibration wave motor and optical device including the same Pending JP2016101023A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110061653A (en) * 2018-01-18 2019-07-26 佳能株式会社 Vibration types of motors and lens driver

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110061653A (en) * 2018-01-18 2019-07-26 佳能株式会社 Vibration types of motors and lens driver
CN110061653B (en) * 2018-01-18 2023-04-28 佳能株式会社 Vibration motor and lens driving device

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