JP2016093871A - Processing device and nozzle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing device which inhibits shape abnormality caused when a metal film or a resin film is processed.SOLUTION: A processing device according to one embodiment includes: a stage on which a sample may be placed; a rotation mechanism for rotating the stage; a nozzle configured to jet a material to the sample; a moving mechanism for relatively moving the stage and the nozzle in a direction perpendicular to a rotation axis of the stage; and a control part for controlling the moving mechanism.SELECTED DRAWING: Figure 1

Description

  Embodiments described herein relate generally to a processing apparatus and a nozzle.

  A plurality of semiconductor elements formed on a semiconductor substrate such as a wafer is divided into a plurality of semiconductor chips by dicing along a dicing region provided on the semiconductor substrate. When a metal film serving as an electrode of a semiconductor element or a resin film such as a die bonding film is formed on one surface of the semiconductor substrate, it is necessary to remove the metal film or resin film in the dicing region during dicing. .

  As a method of removing the metal film or the resin film, for example, there is a method of removing the semiconductor substrate and the metal film or the resin film simultaneously by blade dicing. In this case, shape abnormalities such as protrusions (burrs) are likely to occur in the metal film or the resin film. If the metal film or the resin film has an abnormal shape, it is determined that the appearance inspection of the semiconductor chip is defective, or a bonding failure between the bed and the semiconductor chip is caused, resulting in a decrease in product yield.

JP 2008-141135 A

  The problem to be solved by the present invention is to provide a processing apparatus and a nozzle capable of suppressing shape abnormality when processing a metal film or a resin film.

  The processing apparatus according to the embodiment includes a stage on which a sample can be placed, a rotation mechanism that rotates the stage, a nozzle that injects a substance onto the sample, and a direction in which the stage and the nozzle are perpendicular to the rotation axis of the stage. And a control unit that controls the moving mechanism.

The schematic diagram of the processing apparatus of 1st Embodiment. FIG. 3 is a schematic process cross-sectional view illustrating a device manufacturing method according to the first embodiment. Explanatory drawing of an effect | action of the processing apparatus of 2nd Embodiment. The schematic diagram of the processing apparatus of 3rd Embodiment. The schematic diagram of the processing apparatus of 4th Embodiment. The schematic diagram of the processing apparatus of 5th Embodiment. The schematic diagram of the processing apparatus of 6th Embodiment. The schematic diagram of the processing apparatus of 7th Embodiment. The schematic diagram of the processing apparatus of 8th Embodiment. The schematic diagram of the processing apparatus of 9th Embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the same members and the like are denoted by the same reference numerals, and the description of the members and the like once described is omitted as appropriate.

(First embodiment)
The processing apparatus according to this embodiment includes a stage on which a sample can be placed, a rotating mechanism that rotates the stage, a nozzle that injects a substance onto the sample, and the stage and the nozzle are relatively moved in a direction perpendicular to the rotation axis of the stage. A moving mechanism; and a control unit that controls the moving mechanism. The processing apparatus of this embodiment includes a stage on which a sample can be placed, and a nozzle that separates the sample by injecting a material that removes a metal film or a resin film provided on the sample.

  The processing apparatus of this embodiment is a semiconductor manufacturing apparatus used for dicing a semiconductor substrate, for example. For example, it is used when a metal film provided on one surface of a semiconductor substrate and serving as an electrode of a semiconductor element is removed during dicing.

  Further, in the present embodiment, a case where the substance to be injected onto the metal film is a particle containing carbon dioxide will be described as an example. Note that particles containing carbon dioxide (hereinafter also simply referred to as carbon dioxide particles) are particles containing carbon dioxide as a main component. In addition to carbon dioxide, for example, inevitable impurities may be contained.

  FIG. 1 is a schematic diagram of a processing apparatus according to this embodiment. FIG. 1A is a schematic view including a cross-sectional structure of the apparatus, and FIG. 1B is a top view of the stage.

  The semiconductor manufacturing apparatus according to this embodiment includes a stage 10, a support shaft 12, a rotation mechanism 14, a nozzle 16, a moving mechanism 18, a control unit 20, and a processing chamber 22.

  The stage 10 is configured to be able to place a sample W to be processed. The stage 10 places, for example, a semiconductor wafer bonded to a dicing sheet fixed to a dicing frame.

  The stage 10 is fixed to the support shaft 12. The rotation mechanism 14 rotates the stage 10. The rotation mechanism 14 includes, for example, a motor and a bearing that rotatably holds the support shaft 12. The stage 10 rotates around the rotation axis C by the rotation mechanism 14.

  Carbon dioxide particles that remove the metal film are ejected from the nozzle 16. For example, the sample W is separated by ejecting the carbon dioxide particles to remove the metal film. The carbon dioxide particles are carbon dioxide in a solid state. The carbon dioxide particles are so-called dry ice. The shape of the carbon dioxide particles is, for example, a pellet shape, a powder shape, a spherical shape, or an indefinite shape.

  The nozzle 16 is connected to, for example, a liquefied carbon dioxide cylinder (not shown). Carbon dioxide particles are generated by solidifying the liquefied carbon dioxide gas in the cylinder by adiabatic expansion. The nozzle 16 is connected to, for example, a nitrogen gas supply source (not shown). The generated carbon dioxide particles are sprayed from the nozzle 16 toward the sample W placed on the stage 10 together with, for example, nitrogen gas.

  The diameter of the nozzle 16 is, for example, φ1 mm or more and φ3 mm or less. Further, the distance between the nozzle 16 and the surface of the sample W is set to 10 mm or more and 20 mm or less, for example.

  The moving mechanism 18 linearly moves the stage 10 and the nozzle 16 linearly in a direction perpendicular to the rotation axis C of the stage 10 as indicated by arrows in FIG. For example, the nozzle 16 is moved so as to repeatedly scan between the rotation axis C of the stage 10 and the end of the sample W. FIG. 1 shows a case where the nozzle 16 is moved instead of the stage 10 by the moving mechanism 18.

  The moving mechanism 18 is not particularly limited as long as the mechanism can linearly reciprocate the nozzle 16 with respect to the stage 10. For example, a belt drive shuttle mechanism that combines a belt, a pulley, and a motor that rotates the pulley is used. Further, for example, a combination of a rack and pinion mechanism and a motor is used. For example, a linear motor is used.

  The moving mechanism 18 may be a mechanism that moves the stage 10 with respect to the fixed nozzle 16 instead of the nozzle 16.

  The control unit 20 controls the moving mechanism 18. For example, the scanning range of the nozzle 16 with respect to the stage 10 and the relative speed of the nozzle 16 with respect to the stage 10 are controlled to desired values. For example, the control unit 20 may be hardware such as a circuit board or a combination of hardware and software such as a control program stored in a memory. The control unit 20 may be configured to control the moving mechanism 18 in synchronization with the rotating mechanism 14. For example, the control unit 20 relatively moves the stage 10 and the nozzle 16 in a direction parallel to the surface of the stage 10.

  The housing 22 incorporates the stage 10, the nozzle 16, the moving mechanism 18, and the like. The case 22 protects the stage 10, the nozzle 16, the moving mechanism 18, and the like, and prevents the processing on the sample W from being affected by the external environment.

  Next, an example of a semiconductor device manufacturing method using the semiconductor manufacturing apparatus of the present embodiment will be described. Hereinafter, a case where the semiconductor device to be manufactured is a vertical power MOSFET (Metal Oxide Field Effect Transistor) using silicon (Si) having metal electrodes on both sides of the semiconductor device will be described as an example.

  FIG. 2 is a schematic process cross-sectional view showing the device manufacturing method of this embodiment.

  First, a base region of a vertical MOSFET (semiconductor element) on the surface side of a silicon substrate (semiconductor substrate) 30 having a first surface (hereinafter also referred to as a front surface) and a second surface (hereinafter also referred to as a back surface), Patterns such as a source region, a gate insulating film, a gate electrode, and a source electrode are formed. Thereafter, a protective film is formed on the uppermost layer. The protective film is, for example, a resin film such as polyimide, or an inorganic insulating film such as a silicon nitride film or a silicon oxide film. It is desirable that the silicon substrate 30 is exposed on the surface of the dicing region provided on the surface side.

  Next, the support substrate 32 is bonded to the surface side of the silicon substrate 30 (FIG. 2A). The support substrate 32 is, for example, quartz glass.

  Next, the back surface side of the silicon substrate 30 is removed by grinding, and the silicon substrate 30 is thinned. Thereafter, a metal film 34 is formed on the back side of the silicon substrate 30 (FIG. 2B).

  The metal film 34 is a drain electrode of the MOSFET. The metal film 34 is a laminated film of different metals, for example. The metal film 34 is, for example, a laminated film of aluminum / titanium / nickel / gold from the back side of the silicon substrate 30. The metal film 34 is formed by, for example, a sputtering method.

  Next, a resin sheet 36 is attached to the back side of the silicon substrate 30. The resin sheet 36 is a so-called dicing sheet. For example, the resin sheet 36 is fixed to a metal frame 38. The resin sheet 36 is bonded to the surface of the metal film 34. Thereafter, the support substrate 32 is peeled off from the silicon substrate 30 (FIG. 2C).

  Next, grooves 40 are formed in the silicon substrate 30 along the dicing region provided on the front surface side of the silicon substrate 30 so that the metal film 34 on the back surface side is exposed from the front surface side (FIG. 2D). Here, the dicing area is a predetermined area having a predetermined width for dividing the semiconductor chip by dicing, and is provided on the surface side of the silicon substrate 30. A semiconductor element pattern is not formed in the dicing region. For example, the dicing area is provided in a lattice shape on the surface side of the silicon substrate 30.

The groove 40 is formed by, for example, plasma etching. The plasma etching is, for example, a so-called Bosch process in which an isotropic etching step using F radicals, a protective film forming step using CF ₄ radicals, and anisotropic etching using F ions are repeated.

  The groove 40 is preferably formed by etching the entire surface using the protective film on the surface side of the silicon substrate 30 as a mask. According to this method, since lithography is not used, the manufacturing process can be simplified and the cost can be reduced.

  Next, a resin sheet 42 is attached to the surface side of the silicon substrate 30. The resin sheet 42 is a so-called dicing sheet. For example, the resin sheet 42 is fixed to a metal frame 44. The resin sheet 42 is bonded to the surface side protective film or the surface of the metal electrode. Thereafter, the resin sheet 36 on the back side is peeled off (FIG. 2E).

  Next, carbon dioxide particles are sprayed onto the metal film 34 from the back side of the silicon substrate 30 using the semiconductor manufacturing apparatus of FIG. 1 (FIG. 2F). First, the frame 44 is placed on the stage 10 so that the resin sheet 42 is on the surface of the stage 10 (FIG. 1). Then, the stage 10 is rotated by the rotation drive mechanism 14. Carbon dioxide particles are ejected from the nozzle 16 while the nozzle 16 is reciprocating linearly in the direction perpendicular to the rotation axis of the stage 10 by the moving mechanism 18.

  The metal film 34 on the back side of the groove 40 is removed by spraying carbon dioxide particles. By removing the metal film 34, the silicon substrate 30 is separated into a plurality of MOSFETs. The metal film 34 is removed by being scraped off by the carbon dioxide particles into the grooves 40 which are physically hollow portions (FIG. 2 (g)).

  The carbon dioxide particles are carbon dioxide in a solid state. The carbon dioxide particles are so-called dry ice. The shape of the carbon dioxide particles is, for example, a pellet shape, a powder shape, a spherical shape, or an indefinite shape.

  The carbon dioxide particles are sprayed from the nozzle together with the nitrogen gas and sprayed onto the metal film 34. The average particle size of the carbon dioxide particles is desirably 10 μm or more and 200 μm or less. In addition, the spot diameter on the surface of the metal film 34 when the carbon dioxide particles are sprayed onto the metal film 34 is preferably, for example, φ3 mm or more and φ10 mm or less.

  When removing the metal film 34 by spraying carbon dioxide particles, it is desirable to cover the region of the resin sheet 42 with a mask 46 as shown in FIG. By covering the area | region of the resin sheet 42 with the mask 46, it can suppress that the resin sheet 42 peels from the flame | frame 44 by the impact by a carbon dioxide particle, for example. The mask 46 is, for example, metal.

  Thereafter, the resin sheet 42 on the surface side of the silicon substrate 30 is peeled to obtain a plurality of divided MOSFETs.

  Hereinafter, the operation and effect of the processing apparatus of this embodiment will be described.

  When the metal film 34 is also formed on the back surface side of the silicon substrate 30 as in the case of the vertical MOSFET, it is necessary to remove the metal film 34 on the back surface side of the dicing region at the time of dicing. For example, when the semiconductor substrate 30 and the metal film 34 are simultaneously removed from the front surface side by blade dicing, the metal film 34 at the end of the groove 40 in the dicing area is rolled up on the back surface side, and so-called burrs are generated.

  If burrs occur in the metal film 34, for example, the semiconductor chip may be defective in appearance inspection and cannot be commercialized. In addition, for example, when the semiconductor chip and the bed are bonded with a bonding material such as solder, adhesion may be deteriorated at a burr portion, which may cause unnecessary bonding.

  In dicing using the semiconductor manufacturing apparatus of the present embodiment, after forming the groove 40 along the dicing region of the silicon substrate 30, carbon dioxide particles are sprayed from the back surface side to the metal film 34, and the portion straddling the groove portion 40 is observed. The metal film 34 is removed. Since the removed metal film 34 is scraped off into the hollow groove 40, the generation of burrs is suppressed. Further, it is possible to remove only the metal film 34 in the groove 40 in a self-aligning manner.

  It is considered that the removal of the metal film 34 in the part straddling the groove 40 is mainly caused by the physical impact of the carbon dioxide particles. In addition, the effect of removing the metal film 34 by physical impact is promoted by the metal film 34 being rapidly cooled by the low-temperature carbon dioxide particles and the force of vaporizing and expanding the carbon dioxide colliding with the metal film 34 being applied. It is considered a thing.

  Furthermore, in the semiconductor manufacturing apparatus of the present embodiment, carbon dioxide particles are injected onto the sample on the rotating stage 10. Therefore, compared with the case where carbon dioxide particles are injected onto the sample on the fixed stage, the carbon dioxide particles can be uniformly injected onto the sample surface. Therefore, the metal film 34 can be removed with good uniformity.

  Further, since the carbon dioxide particles are jetted onto the rotating sample, the velocity of the sample is added to the collision velocity of the carbon dioxide particles. Accordingly, the speed at which the carbon dioxide particles collide with the metal film 34 is increased. Therefore, the metal film 34 can be efficiently removed.

  Note that the semiconductor manufacturing apparatus of this embodiment can also be used when manufacturing a semiconductor device including a resin film instead of a metal film on the back side of the silicon substrate 30. In this case, the resin film is removed instead of the metal film by spraying carbon dioxide particles.

  As described above, according to the processing apparatus of the present embodiment, it is possible to suppress the abnormal shape of the metal film or the resin film during dicing. Further, the metal film or the resin film can be removed uniformly and efficiently during dicing.

(Second Embodiment)
The processing apparatus of this embodiment is the same as that of the first embodiment except that the control unit controls the relative movement speed of the stage and the nozzle to be slower as the distance of the nozzle from the rotation axis of the stage increases. is there. Therefore, the description overlapping with the first embodiment is omitted.

  FIG. 3 is an explanatory diagram of the operation of the processing apparatus of this embodiment. 3A is a diagram when the distance of the nozzle 16 from the rotation axis C of the stage 10 is small, and FIG. 3B is a diagram when the distance of the nozzle 16 from the rotation axis C of the stage 10 is large.

  In this embodiment, when the distance of the nozzle 16 from the rotation axis C of the stage 10 is small as shown in FIG. 3A, the moving speed of the nozzle 16 is increased. On the other hand, when the distance of the nozzle 16 from the rotation axis C of the stage 10 is large as shown in FIG. 3B, the moving speed of the nozzle 16 is decreased. The length of the arrow in FIG. 3 indicates the difference in relative moving speed.

  If the moving speed of the nozzle 16 is constant regardless of the distance of the nozzle 16 from the rotation axis C of the stage 10, the amount of carbon dioxide particles injected per unit area of the sample W in the region far from the rotation axis C. However, the amount of carbon dioxide particles injected per unit area of the sample W in the region near the rotation axis C may be smaller.

  According to the present embodiment, regardless of the distance from the rotation axis C, it is possible to make the amount of carbon dioxide particles injected to the sample W per unit area comparable. Therefore, it is possible to further improve the processing uniformity of the sample W. Specifically, for example, the uniformity of metal film or resin film removal is improved.

(Third embodiment)
The processing apparatus of this embodiment is the same as that of 1st Embodiment except having a tilt mechanism which changes the tilt angle with respect to the surface of the stage of a nozzle. Therefore, the description overlapping with the first embodiment is omitted.

  FIG. 4 is a schematic diagram of the processing apparatus of this embodiment. 4A is a schematic diagram including a cross-sectional structure of the device, and FIG. 4B is a schematic diagram including a cross-sectional structure in a direction perpendicular to FIG. 4A.

  The semiconductor manufacturing apparatus according to the present embodiment includes an inclination mechanism 24. The tilt mechanism 24 changes the tilt angle of the nozzle 16 with respect to the surface of the stage 10. The tilt angle of the tilt mechanism 24 is controlled by the control unit 20, for example.

  The tilt mechanism 24 is, for example, a rotary tilt mechanism that combines a rotary shaft and a stepping motor. It is desirable that the inclination angle of the nozzle 16 is controlled so that the collision speed of the carbon dioxide particles on the surface of the rotating sample W is increased as compared with the case where the inclination angle is 90 degrees. Specifically, it is desirable to set the inclination angle of the nozzle 16 so that the direction of the carbon dioxide particles to be ejected on the surface of the sample W is opposite to the direction of rotational movement of the surface of the sample W.

  In the manufacturing method using the semiconductor manufacturing apparatus of the present embodiment, carbon dioxide particles are applied to the sample W in a state where the inclination angle of the nozzle 16 with respect to the surface of the stage 10 is less than 90 degrees, for example, in a state of 15 degrees to 45 degrees. Spray.

  According to this embodiment, the injection of carbon dioxide particles has a horizontal component with respect to the surface of the sample W. For this reason, the metal film or resin film removed by the carbon dioxide particles is less likely to enter the dicing groove. Therefore, it can suppress that the removed metal film and resin film become the residue in a groove | channel. Moreover, since the collision speed of the carbon dioxide particles to the sample W can be increased, the metal film 34 can be further efficiently removed. In addition, the inclination angle can be set to a desired value, and the optimum processing conditions according to the sample W can be set.

  Note that the nozzle 16 may be fixed to the surface of the stage 10 so as to have an inclination angle of less than 90 degrees. Also with this configuration, it is possible to suppress the metal film or the resin film removed by the carbon dioxide particles from entering the dicing groove and becoming a residue. Moreover, since the collision speed of the carbon dioxide particles to the sample W can be increased, the metal film 34 can be further efficiently removed.

(Fourth embodiment)
The processing apparatus of this embodiment is the same as that of the first embodiment except that the processing apparatus includes an air inlet provided in the housing and an air outlet provided in the housing. Therefore, the description overlapping with the first embodiment is omitted.

  FIG. 5 is a schematic diagram of the processing apparatus of this embodiment. FIG. 5 is a schematic view including a cross-sectional structure of the apparatus.

  The semiconductor manufacturing apparatus according to the present embodiment includes an intake port 48 provided in the housing 22 and an exhaust port 50 provided in the housing 22. For example, the air inlet 48 is provided in the upper part of the housing 22, and the air outlet 50 is provided in the lower part of the housing 22, for example.

  A gas such as air or nitrogen gas is supplied from the intake port 48 into the housing 22 and is discharged from the exhaust port 50. For example, a pump (not shown) is connected to the exhaust port 50 to exhaust the gas in the housing 22. The gas flows in the housing 22 from the upper part to the lower part. A so-called down flow can be formed in the housing 22.

  According to this embodiment, the metal film or resin film removed by the carbon dioxide particles is discharged from the exhaust port 50 by the gas flow in the housing 22. Therefore, it is possible to prevent the removed metal film or resin film from reattaching to the sample W or entering into the dicing groove and becoming a residue.

(Fifth embodiment)
The processing apparatus of this embodiment is the same as that of 1st Embodiment except the surface of a stage inclining with respect to a surface perpendicular | vertical to a gravitational direction. Therefore, the description overlapping with the first embodiment is omitted.

  FIG. 6 is a schematic diagram of the processing apparatus of this embodiment. FIG. 6 is a schematic view including a cross-sectional structure of the apparatus.

  In the semiconductor manufacturing apparatus of this embodiment, the surface of the stage 10 is inclined with respect to a plane perpendicular to the direction of gravity. In other words, the surface of the stage 10 is inclined with respect to the horizontal plane. FIG. 6 shows a case where the surface of the stage 10 is inclined at an inclination angle of 90 degrees with respect to a plane perpendicular to the direction of gravity.

  According to this embodiment, the metal film or the resin film removed by the carbon dioxide particles easily falls in the gravity direction, that is, downward in the housing 22. Therefore, it is possible to prevent the removed metal film or resin film from reattaching to the sample W or entering into the dicing groove and becoming a residue.

From the viewpoint of preventing the removed metal film or resin film from reattaching to the sample W, it is more desirable that the surface of the stage 10 be inclined so as to face the direction of gravity.
(Sixth embodiment)
The processing apparatus of this embodiment is the same as that of 1st Embodiment except providing the cooling mechanism which cools the atmosphere in a housing | casing. Therefore, the description overlapping with the first embodiment is omitted.

  FIG. 7 is a schematic diagram of the processing apparatus of this embodiment. FIG. 7 is a schematic view including a cross-sectional structure of the apparatus.

  The semiconductor manufacturing apparatus of this embodiment includes a cooling mechanism 52 that cools the atmosphere in the housing 22. The cooling mechanism 52 uses, for example, a heat pump.

  According to this embodiment, by lowering the temperature in the housing 22, vaporization of carbon dioxide particles ejected from the nozzle is suppressed. Therefore, the removal efficiency of the metal film or the resin film is improved.

(Seventh embodiment)
The processing apparatus of this embodiment is the same as that of 1st Embodiment except having a plurality of nozzles. Therefore, the description overlapping with the first embodiment is omitted.

  FIG. 8 is a schematic diagram of the processing apparatus of this embodiment. FIG. 8 is a schematic view including a cross-sectional structure of the apparatus.

  As shown in FIG. 8, the semiconductor manufacturing apparatus of the present embodiment includes three nozzles 16. The number of nozzles 16 is not limited to three as long as it is two or more.

  According to the present embodiment, by providing the plurality of nozzles 16, it becomes possible to improve processing productivity.

(Eighth embodiment)
The processing apparatus of the present embodiment is the same as that of the first embodiment except that the processing apparatus includes a moving mechanism that relatively moves the stage and the nozzle in the rotation axis direction of the stage. Therefore, the description overlapping with the first embodiment is omitted.

  FIG. 9 is a schematic diagram of the processing apparatus of the present embodiment. FIG. 9 is a schematic view including a cross-sectional structure of the apparatus.

  As shown in FIG. 9, the semiconductor manufacturing apparatus of this embodiment includes a moving mechanism 18 that relatively moves the stage 10 and the nozzle 16 in the direction of the rotation axis of the stage. Here, the moving mechanism 18 has a function of relatively moving the stage 10 and the nozzle 16 also in a direction perpendicular to the rotation axis C of the stage 10. The moving mechanism for moving the stage 10 and the nozzle 16 relative to the rotation axis direction of the stage may be provided as another moving mechanism different from the moving mechanism for moving the stage 10 and the nozzle 16 in the direction perpendicular to the rotation axis C of the stage 10. I do not care.

  According to this embodiment, the distance between the stage 10 and the nozzle 16 can be set to a desired value, and the optimum processing conditions according to the sample W can be set.

(Ninth embodiment)
The processing apparatus of this embodiment is the same as that of 1st Embodiment except that the surface of a stage is concave shape. Therefore, the description overlapping with the first embodiment is omitted.

  FIG. 10 is a schematic diagram of the processing apparatus of this embodiment. FIG. 10 is a schematic view including a cross-sectional structure of the apparatus.

  As shown in FIG. 10, in the semiconductor manufacturing apparatus of the present embodiment, the surface of the stage 10 is concave. For this reason, when the sample W is placed on the stage 10, a space 60 is formed between the stage 10 and the sample W.

  According to the present embodiment, since the space 60 is formed between the stage 10 and the sample W, for example, when dicing the silicon substrate 30, a plurality of MOSFETs divided by dicing are received by the recesses of the stage. Is possible. Therefore, it is possible to omit the step of attaching the front and back dicing sheets. Therefore, it becomes possible to improve processing productivity.

  As described above, in the embodiment, the case where the semiconductor element is a vertical MOSFET has been described as an example. However, the semiconductor element is not limited to the vertical MOSFET.

  In the embodiment, the removal of the metal film or the resin film at the time of dicing has been described as an example. However, the processing apparatus of the embodiment can be applied to, for example, cleaning of the surface of the semiconductor substrate.

  Further, in the embodiment, the case where the substance to be ejected is a particle containing carbon dioxide has been described as an example. However, the substance to be ejected may be, for example, pressurized water, pressurized water containing abrasive grains, or dioxide dioxide. Other materials such as particles other than carbon particles may be used. For example, it is also possible to apply other particles that are solid when ejected from a nozzle and vaporize in an atmosphere in which a substrate is placed at room temperature or the like. For example, nitrogen particles or argon particles can be applied.

  In the embodiment, the semiconductor manufacturing apparatus has been described as an example. However, the present invention can also be applied to a MEMS (Micro Electro Mechanical Systems) manufacturing apparatus.

  Further, in the embodiment, the case has been described in which the nozzle sprays a substance onto a partial region of the sample and processes the entire region of the sample by moving the stage and the nozzle relative to each other. However, for example, it is possible to simultaneously inject the substance from the nozzle over the entire sample, and the entire sample can be processed in a lump. For example, by setting the nozzle diameter to be equal to or larger than the size of the sample or combining a number of nozzles, a nozzle that collectively processes the entire sample can be configured.

  Although several embodiments and examples of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. For example, a component in one embodiment may be replaced or changed with a component in another embodiment. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 10 Stage 14 Rotation mechanism 16 Nozzle 18 Movement mechanism 20 Control part 22 Case 24 Inclination mechanism 48 Intake port 50 Exhaust port 52 Cooling mechanism

Claims (15)

A stage on which a sample can be placed;
A rotation mechanism for rotating the stage;
A nozzle for injecting a substance onto the sample;
A moving mechanism for relatively moving the stage and the nozzle in a direction perpendicular to the rotation axis of the stage;
A control unit for controlling the moving mechanism;
A processing apparatus comprising:   The processing apparatus according to claim 1, wherein the control unit controls the relative movement speed to decrease as the distance of the nozzle from the rotation axis of the stage increases.   The processing apparatus according to claim 1, wherein the nozzle has an inclination angle of less than 90 degrees with respect to the surface of the stage.   The processing apparatus according to claim 1, further comprising an inclination mechanism that changes an inclination angle of the nozzle with respect to the surface of the stage.   5. The processing apparatus according to claim 1, further comprising: a housing that houses the stage and the nozzle; an air inlet provided in the housing; and an air outlet provided in the housing. .   The processing apparatus according to claim 5, further comprising a cooling mechanism that cools the inside of the casing.   The processing apparatus according to claim 1, wherein the substance is particles containing carbon dioxide.   The processing apparatus according to claim 1, wherein a metal film or a resin film provided on the sample is removed by the substance.   The processing apparatus according to claim 1, wherein a surface of the stage has a concave shape. A stage on which a sample can be placed;
A nozzle for separating the sample by injecting a material for removing a metal film or a resin film provided on the sample to the sample;
A processing apparatus comprising:   The processing apparatus according to claim 10, wherein the substance is particles containing carbon dioxide.   The processing apparatus according to claim 10, wherein a surface of the stage is concave.   The processing apparatus according to any one of claims 10 to 12, further comprising a control unit that moves the stage and the nozzle in a direction parallel to the surface of the stage.   A nozzle for separating the sample by injecting a material for removing a metal film or a resin film provided on the sample onto the sample.   The nozzle according to claim 14, wherein the substance is particles containing carbon dioxide.

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